KR101692021B1

KR101692021B1 - Multi monitoring apparatus

Info

Publication number: KR101692021B1
Application number: KR1020150073859A
Authority: KR
Inventors: 채광식
Original assignee: 우성이엔디주식회사
Priority date: 2015-05-27
Filing date: 2015-05-27
Publication date: 2017-01-03
Also published as: KR20160139272A

Abstract

The present invention discloses a multi-monitoring apparatus. The multi-monitoring apparatus of the present invention includes: a piping connection part for connecting with a plurality of branches branched from a plurality of measurement points of a utility supply piping and an air conditioning piping; A sensor unit for sensing a management item at a plurality of measurement points of the utility supply pipe and the air conditioning pipe branched from the plurality of branch pipes connected to the pipe connection unit; A sensor input unit for receiving a detection signal from an external measurement sensor; A control unit for comparing the sensed signal inputted from the sensor unit and the sensor input unit with a reference value, outputting the comparison result to a central server, and providing a request result according to a request command from a central server; A display unit for displaying an operating state of the control unit; And a communication unit for forming a loop between the control unit and another control unit and transmitting and receiving data between the control unit and the central server.

Description

[0001] MULTI MONITORING APPARATUS [0002]

The present invention relates to a multi-monitoring apparatus, and more particularly, to a multi-monitoring apparatus that integrally monitors management items managed in a utility system and an air conditioning system of a manufacturing facility, and transmits monitoring results to a central server.

The method of manufacturing a semiconductor device requires a process that uses fine machining. Related to this process, semiconductor manufacturing facilities are equipped with various utility systems such as Gas, Water, Air N2, Ar, and He supplied to manufacturing equipment.

Further, the dust existing in the semiconductor manufacturing space not only enters into the inside of the semiconductor device during the manufacturing process of the semiconductor device, but also causes a change in temperature or humidity to cause micro bending and twisting in the material used for manufacturing the semiconductor device As a result, the semiconductor device is defective.

There is a need to reduce the amount of dust present in the manufacturing space in order to lower the defective rate of such a device and there is a need to maintain the temperature and humidity in the manufacturing space constant.

In this way, it is possible to manufacture semiconductors such as semiconductors, electronic devices, precision machines, optical printing, pharmaceuticals, food processing, agricultural processing, (Bio-Harzard) and the operating room (An Operating Table Room), the cleanliness of the room requires a clean room that is completely enclosed with the outside .

In this clean room, an air conditioning system is provided to maintain internal cleanliness by air circulation, and air is supplied to the inside of the facility through a plurality of air conditioning pipes.

Therefore, the central server monitors the utilities, temperature, pressure, flow rate, humidity, and flow rate according to the management items to understand the operation state of the utility system and the air conditioning system.

BACKGROUND ART [0002] The background art of the present invention is disclosed in Korean Patent Laid-Open Publication No. 1999-0048107 (published on May 07, 1999, entitled "Fan-Filter Unit Operating Condition Check System for Clean Rooms").

In order to monitor the operation status of the utility system and the air conditioning system in the central server, when the measurement values are received from all the supply pipes and the air-conditioning pipes installed in the manufacturing facility, In addition, if utility supply and air conditioning management are not performed, environmental management is not smoothly performed, and productivity is lowered.

SUMMARY OF THE INVENTION The present invention has been made to solve the above-mentioned problems, and an object of the present invention is to provide a system and method for managing a management item managed in a utility system and an air conditioning system of a manufacturing facility, A multi-monitoring apparatus for receiving sensing signals from sensors installed in a plurality of pipes and integrally monitoring them, and transmitting monitoring results to a central server.

A multi-monitoring apparatus according to the present invention includes: a piping connection part for connecting with a plurality of branches branched from a plurality of measurement points of a utility supply piping and an air conditioning piping; A sensor unit for sensing a management item at a plurality of measurement points of the utility supply pipe and the air conditioning pipe branched from the plurality of branch pipes connected to the pipe connection unit; A sensor input unit for receiving a detection signal from an external measurement sensor; A control unit for comparing the sensed signal inputted from the sensor unit and the sensor input unit with a reference value, outputting the comparison result to a central server, and providing a request result according to a request command from a central server; A display unit for displaying an operating state of the control unit; And a communication unit for forming a loop between the control unit and another control unit and transmitting and receiving data between the control unit and the central server, wherein the display unit further includes a touch input unit for operating the operation of the control unit through a display screen, Wherein the piping connection part includes a plurality of input ports for connecting the plurality of branch pipes, respectively, and the piping connection part includes a plurality of input ports for connecting the plurality of branch pipes, respectively, The sensor unit may include a plurality of internal measurement sensors connected to the plurality of input ports to sense the management item, and the plurality of internal measurement sensors may include at least one of a temperature sensor, a pressure sensor, a flow sensor, a humidity sensor, Further comprising an exhaust pipe connected in common to output ends of the plurality of internal measurement sensors, When standing as supplied and out of each result as supplied and the air conditioning condition is the reference value compared with the reference value for the air conditioning state is characterized in that it further comprises an alarm for generating an alarm.

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The multi-monitoring apparatus according to the present invention can detect a management item managed by a utility system and an air conditioning system of a manufacturing facility in connection with branch pipes branched from a utility piping and an air conditioning piping or receive detection signals from sensors installed in a plurality of pipes, And sends the monitoring results to the central server, thereby reducing the number of monitoring from the central server, enabling the supply management and coordination management of utilities in the actual manufacturing facilities. Through the integrated monitoring, It is possible to reduce installation cost by reducing installation of individual signal cables to be installed.

1 is a block diagram showing a multi-monitoring apparatus according to an embodiment of the present invention.
2 is an external perspective view of a multi-monitoring apparatus according to an embodiment of the present invention.
FIG. 3 is an exemplary view showing a display screen of the multi-monitoring apparatus according to an embodiment of the present invention.

Hereinafter, a multi-monitoring apparatus according to an embodiment of the present invention will be described with reference to the accompanying drawings. In this process, the thicknesses of the lines and the sizes of the components shown in the drawings may be exaggerated for clarity and convenience of explanation.

In addition, the terms described below are defined in consideration of the functions of the present invention, which may vary depending on the intention or custom of the user, the operator. Therefore, definitions of these terms should be made based on the contents throughout this specification.

FIG. 1 is a block diagram showing a multi-monitoring apparatus according to an embodiment of the present invention. FIG. 2 is an external perspective view of a multi-monitoring apparatus according to an embodiment of the present invention. FIG. 2 is an exemplary view showing a display screen of a multi-monitoring apparatus according to a first embodiment of the present invention;

1 to 3, a multi-monitoring apparatus according to an embodiment of the present invention includes a pipe connection unit 10, a sensor unit 20, a sensor input unit 90, a control unit 30, a display unit 40, And a communication unit 60, as well as a touch input unit 50 and an alarm unit 70.

The piping connection portion 10 is connected to a plurality of branch pipes 5_1 to 5_n branching from a plurality of measurement points of the utility supply piping 2 or the air conditioning piping 2. [

The utility supply piping 2 is a piping for supplying utilities such as various kinds of gas, water, air N2, Ar, and He, and the air conditioning piping 2 is connected to various types of exhaust pipes (heat exhaust, And PFC exhaust, etc.).

At this time, the piping connection unit 10 includes a plurality of input ports 10_1 to 10_n for connecting the plurality of branch pipes 5_1 to 5_n, respectively.

For example, when a plurality of input ports 10_1 to 10_n are constituted by six input ports, the integrated monitoring apparatus 100 may be connected to six sub-branches to integrally measure the air conditioning status for six measurement points have.

The sensor unit 20 detects a supply state and an air conditioning state of a plurality of measurement points branched from the branch pipes 5_1 to 5_n connected to the pipe connection unit 10, respectively.

The sensor unit 20 includes a plurality of internal measurement sensors respectively connected to the plurality of input ports 10_1 to 10_n for measuring the supply state and the air conditioning state.

The plurality of internal measurement sensors may include at least one of a temperature sensor, a pressure sensor, a flow sensor, a humidity sensor, and a flow rate sensor.

Therefore, it is possible to measure the pressures of various gases, water, air N2, Ar, He, etc. in the supply state. In the air conditioning state, any one of temperature, pressure, flow rate, humidity, Or more can be measured.

In one embodiment, when the pressure is measured in the air conditioning state, the first pressure sensor to the nth pressure sensors 20_1 to 20_n may be employed in the sensor unit 20. [

Accordingly, the pressure of the first to nth measuring points (not shown) connected to the first to nth input ports 10_1 to 10_n through the first to the n-th branching pipes 5_1 to 5_n is set to the first to n- Can be measured through the sensors 20_1 to 20_n.

However, when it is desired to measure not only the pressure but also the temperature, the flow rate and the flow velocity in accordance with the measurement point, the internal measurement sensor of the sensor unit 20 may employ a temperature sensor, a flow rate sensor and a flow rate sensor have.

The air introduced into the first to the n-th branch pipes 5_1 to 5_n is discharged to the atmosphere through the exhaust pipe 25 connected to the output terminals of the first pressure sensor to the nth pressure sensors 20_1 to 20_n.

The sensor input unit 90 provides a port for receiving a detection signal from an external measurement sensor.

For example, a port for receiving a sensing signal sensed for a management item through an external measurement sensor 95 installed in at least one of a utility supply pipe 2, an air conditioning pipe 2, and a space of a manufacturing facility .

The control unit 30 receives a plurality of supply states and air conditioning states sensed by the sensor unit 20 and the sensor input unit 90, and compares them with a reference value.

The reference value is set individually for each input port, and the control unit 30 compensates for the error of the length of the branch pipe with respect to the supply state and the air conditioning state of the measurement point input through the internal measurement sensor and the external measurement sensor, Compare.

The control unit 30 outputs the result of the comparison between the supply state and the air conditioning state and the reference value to the central server 80, receives the request command from the central server 80, and provides the request result.

At this time, the control unit 30 assigns IDs to the integrated monitoring apparatus 100, outputs the comparison results to the central server 80, and receives the comparison results from the plurality of integrated monitoring apparatuses 100 at the central server 80 So that the integrated monitoring apparatus 100 can be distinguished.

The display unit 40 is installed on the front surface of the integrated monitoring apparatus 100 as shown in FIG. 2, and displays the operation state of the control unit 30.

As shown in FIG. 3, a result detected per input port may be displayed. If the detected air conditioner state is out of the reference state, colors may be displayed differently, and an input port where an alarm occurs may be displayed.

The display unit 40 may include a touch input unit 50 for setting an operation state of the control unit 30 through a display screen.

Accordingly, when the menu is input through the touch input unit 50, the control unit 30 can set the reference state for each input port, search for the log in which the alarm is generated, .

The alarm unit 70 generates an alarm when it goes out of the reference state as a result of comparison with the reference state in the control unit 30, so that the alarm unit 70 can recognize the alarm immediately.

The communication unit 60 forms a loop between the control unit 30 and another control unit 30 and provides an interface to transmit and receive data between the control unit 30 and the central server 80.

The communication unit 60 provides one or more communication methods of RS232, RS485, and TCP / IP to support various communication methods.

For example, after forming a loop through the plurality of integrated monitoring devices 100 and the communication unit 60, the central server 80 connects to the central server 80 so that a plurality of integrated monitoring devices 100 ) Can be collectively managed.

As described above, according to the multi-monitoring apparatus according to the embodiment of the present invention, the management items managed in the utility system of the manufacturing facility and the management items managed by the air conditioning system can be detected by connecting with the branches branched from the utility piping and the air- It receives the sensing signal from the sensors installed in the piping and integrally monitors it, and transmits the monitoring result to the central server.

Therefore, it is possible to reduce the number of monitoring from the central server and to manage the supply management and the coordination of the manufacturing facility substantially. By integrating monitoring, it is possible to reduce the installation of individual signal cables, The cost can be reduced.

While the present invention has been particularly shown and described with reference to exemplary embodiments thereof, it will be understood by those of ordinary skill in the art that various changes in form and details may be made therein without departing from the spirit and scope of the invention as defined by the appended claims. I will understand.

Accordingly, the technical scope of the present invention should be defined by the following claims.

2: piping 5_1 to 5_n: first to n-th branch
10: Piping connection parts 10_1 to 10_n: First to nth input ports
20: sensor units 20_1 to 20_n: first to nth pressure sensors
25: exhaust pipe 30:
40: display unit 50: touch input unit
60: communication unit 70: alarm unit
80: central server 90: sensor input
95: External measuring sensor 100: Multi monitoring device

Claims

A piping connection for connection to a plurality of branches branched from a plurality of measurement points of the utility supply piping and the air conditioning piping;
A sensor unit for sensing a management item at a plurality of measurement points of the utility supply pipe and the air conditioning pipe branched from the plurality of branch pipes connected to the pipe connection unit;
A sensor input unit for receiving a detection signal from an external measurement sensor;
A control unit for comparing the sensed signal inputted from the sensor unit and the sensor input unit with a reference value, outputting the comparison result to a central server, and providing a request result according to a request command from a central server;
A display unit for displaying an operating state of the control unit; And
And a communication unit for forming a loop between the control unit and another control unit and transmitting and receiving data between the control unit and the central server,
The display unit may further include a touch input unit for operating an operation of the control unit through a display screen,
Wherein the external measurement sensor is installed in at least one of the utility supply pipe, the air-conditioning pipe, and the space of the manufacturing facility to detect the management item,
Wherein the pipe connection portion includes a plurality of input ports for connecting the plurality of branch pipes, respectively,
Wherein the sensor unit includes a plurality of internal measurement sensors respectively connected to the plurality of input ports to sense the management item,
Wherein the plurality of internal measurement sensors include at least one of a temperature sensor, a pressure sensor, a flow sensor, a humidity sensor, and a flow rate sensor,
Further comprising an exhaust pipe connected in common to the output ends of the plurality of internal measurement sensors,
Further comprising an alarm unit for generating an alarm when the supply state and the air conditioning state deviate from the reference value as a result of comparing the supply state and the air conditioning state with the reference value, respectively, in the control unit.

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