KR20000020065A - Dust collector for air sampling of clean room - Google Patents

Dust collector for air sampling of clean room Download PDF

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Publication number
KR20000020065A
KR20000020065A KR1019980038490A KR19980038490A KR20000020065A KR 20000020065 A KR20000020065 A KR 20000020065A KR 1019980038490 A KR1019980038490 A KR 1019980038490A KR 19980038490 A KR19980038490 A KR 19980038490A KR 20000020065 A KR20000020065 A KR 20000020065A
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South Korea
Prior art keywords
air
clean room
sampling
dust collector
pump
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KR1019980038490A
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Korean (ko)
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오윤철
신흥수
박문수
김대열
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윤종용
삼성전자 주식회사
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Priority to KR1019980038490A priority Critical patent/KR20000020065A/en
Publication of KR20000020065A publication Critical patent/KR20000020065A/en

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    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
    • H01L21/67005—Apparatus not specifically provided for elsewhere
    • H01L21/67242—Apparatus for monitoring, sorting or marking
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F24—HEATING; RANGES; VENTILATING
    • F24F—AIR-CONDITIONING; AIR-HUMIDIFICATION; VENTILATION; USE OF AIR CURRENTS FOR SCREENING
    • F24F3/00—Air-conditioning systems in which conditioned primary air is supplied from one or more central stations to distributing units in the rooms or spaces where it may receive secondary treatment; Apparatus specially designed for such systems
    • F24F3/12—Air-conditioning systems in which conditioned primary air is supplied from one or more central stations to distributing units in the rooms or spaces where it may receive secondary treatment; Apparatus specially designed for such systems characterised by the treatment of the air otherwise than by heating and cooling
    • F24F3/16—Air-conditioning systems in which conditioned primary air is supplied from one or more central stations to distributing units in the rooms or spaces where it may receive secondary treatment; Apparatus specially designed for such systems characterised by the treatment of the air otherwise than by heating and cooling by purification, e.g. by filtering; by sterilisation; by ozonisation
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
    • H01L21/67005—Apparatus not specifically provided for elsewhere
    • H01L21/67011—Apparatus for manufacture or treatment
    • H01L21/67017—Apparatus for fluid treatment

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  • Engineering & Computer Science (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Condensed Matter Physics & Semiconductors (AREA)
  • General Physics & Mathematics (AREA)
  • Manufacturing & Machinery (AREA)
  • Computer Hardware Design (AREA)
  • Physics & Mathematics (AREA)
  • Power Engineering (AREA)
  • Chemical & Material Sciences (AREA)
  • Combustion & Propulsion (AREA)
  • Mechanical Engineering (AREA)
  • General Engineering & Computer Science (AREA)
  • Sampling And Sample Adjustment (AREA)

Abstract

PURPOSE: A dust collector for air sampling of clean room is provided to realize the reliable and reproductive analysis by simultaneously sampling under same conditions. CONSTITUTION: A dust collector for air sampling of clean room comprises containers(30a,30b,30c) filled with solution and having exhaust pipes(40,42,44), gauges(48,50,52) connected to the exhaust pipes, pumps(54) for forcibly exhausting the air within the container, and controllers(56) controlling the operation of the pump. The pumps are mounted in the positions which the exhaust pipes are connected to each other. The controller has a timer for operating the pump for prescribed time to perform sampling.

Description

청정실의 공기 샘플링을 위한 집진장치Dust collector for air sampling in clean room

본 발명은 청정실의 공기를 샘플링하기 위한 집진장치에 관한 것으로서, 보다 상세하게는 청정실 내부의 서로 다른 영역의 공기를 포집하여 환경평가 및 모니터링을 할 수 있도록 한 청정실의 공기 샘플링을 위한 집진장치에 관한 것이다.The present invention relates to a dust collector for sampling air in a clean room, and more particularly, to a dust collector for air sampling in a clean room to collect air in different areas of the clean room and to perform environmental evaluation and monitoring. will be.

반도체 장치를 제조하기 위한 청정실은 목적에 따라 소정 기준에 맞는 청정도를 유지하도록 관리되고 있다. 이를 위해서는 공기중에 포함되어 있는 성분을 포집하여 파악하여야 한다.The clean room for manufacturing a semiconductor device is managed to maintain the cleanliness meeting a predetermined standard according to the purpose. To do this, the components contained in the air must be collected and identified.

종래의 집진장치는, 도1에서 보는 바와 같이 샘플링을 위한 용기(10)에 뚜껑(12)이 연결구(14)에 의해 결합되고, 용기(10)의 내부에는 집진용액(16)이 담겨있다. 뚜껑(12)에는 청정실의 공기가 유입되는 유입관(18)이 설치되어 있으며, 배기를 위한 배기관(20)이 연결구(22)에 의해 용기(10)의 측면에 결합되어 있다. 배기관(20)에는 배기량을 측정하기 위한 유량계(24)와 용기(10) 내의 공기를 강제로 배출하기 위한 펌프(26)가 설치되고, 펌프(26)에 제어기(28)가 설치되어서 용기(10) 내의 압력, 즉 청정실로부터 용기(10) 내로 유입되는 공기량을 조절하도록 되어 있다.In the conventional dust collecting apparatus, as shown in FIG. 1, a lid 12 is coupled to a container 10 for sampling by a connector 14, and a dust collecting solution 16 is contained in the container 10. The lid 12 is provided with an inlet pipe 18 through which air of the clean room is introduced, and an exhaust pipe 20 for exhausting is coupled to the side of the container 10 by a connector 22. The exhaust pipe 20 is provided with a flow meter 24 for measuring the displacement and a pump 26 for forcibly discharging the air in the vessel 10, and a controller 28 is installed in the pump 26 so that the vessel 10 Is controlled to control the pressure inside the chamber, that is, the amount of air flowing into the container 10 from the clean room.

이와 같이 이루어지는 종래의 집진장치는 공기 샘플링을 위해 제어기(28)의 제어동작으로 펌프(26)가 작동되고, 청정실 내의 공기가 유입관(18)을 통해 유입되며, 이 중 불순물 등이 용기(10)에 담겨있는 집진용액(16)에 용해된다. 불순물이 집진용액(16)에 걸러진 후 공기는 펌프(26)의 펌핑동작으로 외부로 배출되며, 집진을 위한 시간과 집진량은 유량계(24)의 눈금을 통해 확인할 수 있도록 되어 있다.In the conventional dust collector, the pump 26 is operated by the control operation of the controller 28 for air sampling, and the air in the clean room is introduced through the inlet pipe 18, among which impurities are contained in the container 10. It is dissolved in the dust collection solution 16 contained in). After the impurities are filtered by the dust collecting solution 16, the air is discharged to the outside by the pumping operation of the pump 26.

그런데, 종래의 하나의 집진장치는 전술한 바와 같이 이루어지고, 이들을 둘 이상 사용하여 비교분석을 위한 동일조건을 형성하기 위해서는 전술한 단위의 집진장치가 독립적으로 사용되어 집진이 이루어져야 했다. 그러한 이유로 전술한 단위 집진장치를 각각 설치함으로써 동일한 조건을 유지시켜야 하는데, 제어기(28)의 제어동작, 펌프의 성능, 샘플링 시간, 샘플링 효율 등에 차이가 남으로써 동일한 조건에서 서로 다른 영역의 샘플링이 수행되기 어려운 문제점이 있었다.However, one conventional dust collector is made as described above, and in order to form the same condition for comparative analysis using two or more of these, the dust collector of the above-mentioned unit had to be used independently to collect dust. For this reason, the same conditions must be maintained by installing each of the above-described unit dust collectors, and the sampling operation in different areas is performed under the same conditions due to differences in the control operation of the controller 28, the performance of the pump, the sampling time, and the sampling efficiency. There was a difficult problem.

따라서, 종래에는 전술한 바와 같이 여러개의 집진장치를 사용하는 사용환경과 같은 조건이 각각 다르므로 샘플을 신뢰할 수 없는 문제점이 있었다.Therefore, in the related art, as described above, since conditions such as a use environment using a plurality of dust collectors are different from each other, there is a problem in that the sample cannot be trusted.

본 발명의 목적은, 다수개의 집진장치와 내부환경을 하나의 펌프와 하나의 제어기에 의해 제어 및 구성하여 청정실의 여러곳의 공기를 동일한 환경으로 샘플링할 수 있도록 하는 청정실의 공기 샘플링을 위한 집진장치를 제공하는 데 있다.An object of the present invention is to control and configure a plurality of dust collectors and the internal environment by one pump and one controller to collect the air in the clean room for sampling the air of the clean room in the same environment. To provide.

도1은 종래의 집진장치를 개략적으로 나타내는 도면이다.1 is a view schematically showing a conventional dust collector.

도2는 본 발명에 따른 청정실의 공기 샘플링을 위한 집진장치의 일 실시예를 나타내는 도면이다.2 is a view showing an embodiment of a dust collector for air sampling of a clean room according to the present invention.

※ 도면의 주요 부분에 대한 부호의 설명※ Explanation of codes for main parts of drawing

10, 30a, 30b, 30c : 용기 12, 32a, 32b, 32c : 뚜껑10, 30a, 30b, 30c: container 12, 32a, 32b, 32c: lid

14, 22, 34a, 34b, 34c, 46a, 46b, 46c : 연결구14, 22, 34a, 34b, 34c, 46a, 46b, 46c: end connection

16, 36a, 36b, 36c : 집진용액 18, 38a, 38b, 38c : 유입관16, 36a, 36b, 36c: dust collecting solution 18, 38a, 38b, 38c: inflow pipe

20, 40, 42, 44 : 배기관 24, 48, 50, 52 : 유량계20, 40, 42, 44: exhaust pipe 24, 48, 50, 52: flow meter

26, 54 : 펌프 28, 56 : 제어기26, 54: pump 28, 56: controller

상기 목적을 달성하기 위한 본 발명에 따른 청정실의 공기 샘플링을 위한 집진장치는, 집진용액이 충진되어 있으며, 청정실의 각 소의 공기를 흡입하는 유입관이 집진용액에 담겨지게 연결되고, 측면에 배기관이 연결된 용기와, 상기 배기관에 설치되어 배기량을 표시하고, 배기량을 조절하는 측정수단과, 상기 배기관이 하나의 배기관으로 통합된 부분에 설치되어 용기내의 공기를 강제로 배출하는 펌프 및 상기 펌프의 동작을 제어하는 제어기로 이루어지고, 상기 측정수단은 공기가 흡입되는 양이 조절되는 유량계가 사용될 수 있으며, 상기 제어기에는 소정 시간동안 펌프를 작동시켜 샘플링이 이루어지도록 타이머를 내장함이 바람직하다.The dust collector for air sampling of the clean room according to the present invention for achieving the above object is filled with the dust collection solution, the inlet pipe for sucking the air of each element of the clean room is connected to be contained in the dust collection solution, the exhaust pipe is connected to the side Measurement means for displaying the displacement and installed in the exhaust pipe, and the exhaust pipe is connected to the vessel, the pump is installed in a portion of the exhaust pipe integrated into one exhaust pipe for forcibly discharging the air in the vessel and the operation of the pump It is made of a controller for controlling, the measuring means may be used a flow meter to adjust the amount of air intake, the controller is preferably built-in timer so that the sampling is made by operating the pump for a predetermined time.

이하, 본 발명의 구체적인 실시예를 첨부한 도면을 참조하여 상세히 설명한다.Hereinafter, exemplary embodiments of the present invention will be described in detail with reference to the accompanying drawings.

본 발명에 따른 집진장치의 실시예는 도2에서 보는 바와 같이, 세 개의 용기(30a, 30b, 30c)에 각각 뚜껑(32a, 32b, 32c)과 이를 결합하는 연결구(34a, 34b, 34c)가 구비되어 있고, 용기(30a, 30b, 30c)에는 집진용액(36a, 36b, 36c)이 담겨있다. 뚜껑(32a, 32b, 32c)에는 도시되지 않은 청정실의 공간에 연결되어서 청정실의 공기가 유입되는 유입관(38a, 38b, 38c)이 설치되어 있으며, 집진용액이 담겨진 수위보다 높은 용기(30a, 30b, 30c)의 측면에는 연결구(34a, 34b, 34c)에 의해 배기관(40, 42, 44)이 각각 연결되어 있다.In the embodiment of the dust collector according to the present invention, as shown in Figure 2, the lids (32a, 32b, 32c) and the couplings (34a, 34b, 34c) coupling them to the three containers (30a, 30b, 30c) respectively And the dust collecting solutions 36a, 36b, and 36c are contained in the containers 30a, 30b, and 30c. Lids 32a, 32b and 32c are provided with inlet pipes 38a, 38b and 38c connected to a space of a clean room (not shown) and into which air of the clean room is introduced. , 30c, the exhaust pipes 40, 42, 44 are connected to each other by the connector 34a, 34b, 34c.

배기관(40, 42, 44)에는 공기의 유입량을 지시하는 유량계(48, 50, 52)가 각각 설치되어 있고, 하나의 배기관으로 통합된 배기관의 종단에는 펌프(54)가 연결된다. 그리고, 펌프(54)에는 청정실의 환경, 즉 청정실로부터 용기(30a, 30b, 30c) 내로 유입되는 공기량을 조절하는 제어기(56)가 연결되어 있다.The exhaust pipes 40, 42 and 44 are provided with flowmeters 48, 50 and 52 respectively indicating the inflow amount of air, and the pump 54 is connected to the end of the exhaust pipe integrated into one exhaust pipe. The pump 54 is connected to a controller 56 for controlling the amount of air introduced into the containers 30a, 30b, 30c from the environment of the clean room, that is, the clean room.

전술한 바와 같이 이루어지는 본 발명은, 제어기(56)의 제어신호를 공급받아 동작하는 펌프(54)에 의해 펌핑이 이루어지면 청정실 내의 공기가 유입관(38a, 38b, 38c)을 통해 용기(30a, 30b, 30c)로 유입되고, 유입관(38a, 38b, 38c)이 집진용액(36a, 36b, 36c)에 잠겨 있으므로 공기중에 포함되어 있는 무기이온, 금속 및 중금속과 같은 불순물이 집진용액(36a, 36b, 36c)에 용해된다. 이때 집진용액(36a, 36b, 36c)은 초순수와 같은 순수한 용액이 사용됨이 바람직하다.According to the present invention made as described above, when pumping is performed by the pump 54 operating by receiving the control signal of the controller 56, the air in the clean room is passed through the inlet pipes (38a, 38b, 38c) of the container (30a, 30b, 30c, and the inflow pipes 38a, 38b, and 38c are immersed in the dust collection solutions 36a, 36b, and 36c, and impurities such as inorganic ions, metals, and heavy metals contained in the air are collected in the dust collection solution 36a, 36b, 36c). At this time, it is preferable that a pure solution such as ultrapure water is used for the dust collection solutions 36a, 36b, and 36c.

그리고, 흡입된 공기는 배기관(40, 42, 44)을 통해 배출되는데, 배기관(40, 42, 44)에 설치되어 있는 유량계(48, 50, 52)에 의해 배기되는 공기량이 표시되고, 유량계(48, 50, 52)에 설치되어 있는 조정간(도시하지 않음)을 통해 유량조절이 이루어진다. 각각의 유량계(48, 50, 52)의 배기량을 조절함으로써 샘플링되는 공기의 양을 동일하게 유지할 수 있다.Then, the sucked air is discharged through the exhaust pipes 40, 42, 44, and the amount of air exhausted by the flow meters 48, 50, 52 provided in the exhaust pipes 40, 42, 44 is displayed, and the flow meter ( 48, 50, 52, the flow rate is adjusted through the adjustment bar (not shown) installed. By adjusting the displacements of the respective flow meters 48, 50, 52, the amount of air sampled can be kept the same.

결국 펌프(54)를 통해 흡입된 공기는 외부로 배출된다.As a result, the air sucked through the pump 54 is discharged to the outside.

상기와 같이 서로 다른 부위에 설치되어 있는 용기(30a, 30b, 30c)를 통해 동일 시간에 동일 조건에서 샘플을 얻으므로 정확한 샘플링이 이루어질 수 있다.As described above, samples are obtained under the same conditions at the same time through the containers 30a, 30b, and 30c installed at different parts, and thus accurate sampling can be made.

전술한 연결구(34a, 34b, 34c)와 연결구(34a, 34b, 34c)들은 테프론 재질의 것이 사용될 수 있고, 용기(30a, 30b, 30c)는 유리, 폴리프로필렌 수지 등의 재질의 것이 사용될 수 있다. 또한, 용기(30a, 30b, 30c)에 공기가 흡입되어 불순물이 용해되어 샘플링이 이루어지면 분석을 위해 용기(30a, 30b, 30c)와 뚜껑(32a, 32b, 32c)을 분리한 후 용기(30a, 30b, 30c)에 별도의 캡을 덮어 다른 불순물이 유입되지 않도록 하는 것이 바람직하다.The aforementioned connectors 34a, 34b, 34c and connectors 34a, 34b, 34c may be made of Teflon material, and the containers 30a, 30b, 30c may be made of glass, polypropylene resin, or the like. . In addition, when air is sucked into the containers 30a, 30b, and 30c, and impurities are dissolved and sampling is performed, the containers 30a, 30b, and 30c are separated from the lids 32a, 32b, and 32c for analysis. , 30b, 30c) is preferably covered with a separate cap to prevent other impurities from entering.

전술한 바와 같이 본 발명에 따른 실시예에 의하면, 청정실 내에 존재하는 불순물을 서로 다른 용기(30a, 30b, 30c)를 통해 동일 조건으로 샘플을 포집하게 되는 이점이 있다.As described above, according to the exemplary embodiment of the present invention, there is an advantage in that the impurities are collected in the clean room under the same conditions through different containers 30a, 30b, and 30c.

따라서, 본 발명에 의하면 동일 조건에서 동시에 샘플링이 이루어짐으로써 신뢰성있고, 재현성있는 분석을 수행할 수 있는 효과가 있다.Therefore, according to the present invention, since the sampling is performed simultaneously under the same conditions, it is possible to perform a reliable and reproducible analysis.

이상에서 본 발명은 기재된 구체예에 대해서만 상세히 설명되었지만 본 발명의 기술사상 범위 내에서 다양한 변형 및 수정이 가능함은 당업자에게 있어서 명백한 것이며, 이러한 변형 및 수정이 첨부된 특허청구범위에 속함은 당연한 것이다.Although the present invention has been described in detail only with respect to the described embodiments, it will be apparent to those skilled in the art that various modifications and variations are possible within the technical scope of the present invention, and such modifications and modifications are within the scope of the appended claims.

Claims (3)

용액이 충진되어 있으며, 청정실의 각 소의 공기를 흡입하는 유입관이 집진용액에 담겨지게 연결되고, 측면에 배기관이 연결된 용기;A container filled with a solution, connected to the inlet pipe for sucking air from each cow of the clean room so as to be contained in the dust collecting solution, and an exhaust pipe connected to the side; 상기 배기관에 설치되어 배기량을 표시하고, 배기량이 조절되는 측정수단;Measuring means installed in the exhaust pipe to display the displacement, and the displacement is adjusted; 상기 배기관이 하나의 배기관으로 통합된 부분에 설치되어 용기내의 공기를 강제로 배출하는 펌프; 및A pump installed at a portion where the exhaust pipe is integrated into one exhaust pipe to forcibly discharge air in the container; And 상기 펌프의 동작을 제어하는 제어기;A controller for controlling the operation of the pump; 로 이루어짐을 특징으로 하는 청정실의 공기 샘플링을 위한 집진장치.Dust collector for air sampling of the clean room, characterized in that consisting of. 제 1 항에 있어서,The method of claim 1, 상기 측정수단은 공기가 흡입되는 양이 조절되는 유량계임을 특징으로 하는 상기 청정실의 공기 샘플링을 위한 집진장치.The measuring means is a dust collecting device for sampling the air of the clean room, characterized in that the flow rate is adjusted to the amount of air suction. 제 1 항에 있어서, 상기 제어기에는,The method of claim 1, wherein the controller, 소정 시간동안 펌프를 작동시켜 샘플링이 이루어지도록 타이머가 내장됨을 특징으로 하는 상기 청정실의 공기 샘플링을 위한 집진장치.Dust collector for air sampling of the clean room, characterized in that the timer is built in so that sampling is performed by operating the pump for a predetermined time.
KR1019980038490A 1998-09-17 1998-09-17 Dust collector for air sampling of clean room KR20000020065A (en)

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Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
KR20160139272A (en) * 2015-05-27 2016-12-07 우성이엔디주식회사 Multi monitoring apparatus

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
KR20160139272A (en) * 2015-05-27 2016-12-07 우성이엔디주식회사 Multi monitoring apparatus

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