KR101677379B1 - Apparatus of surface treatment - Google Patents

Apparatus of surface treatment Download PDF

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Publication number
KR101677379B1
KR101677379B1 KR1020150103037A KR20150103037A KR101677379B1 KR 101677379 B1 KR101677379 B1 KR 101677379B1 KR 1020150103037 A KR1020150103037 A KR 1020150103037A KR 20150103037 A KR20150103037 A KR 20150103037A KR 101677379 B1 KR101677379 B1 KR 101677379B1
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KR
South Korea
Prior art keywords
reagent
reaction tank
reaction
tank
specimen
Prior art date
Application number
KR1020150103037A
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Korean (ko)
Inventor
임상배
한상빈
Original Assignee
주식회사 포스코
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Publication date
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Priority to KR1020150103037A priority Critical patent/KR101677379B1/en
Application granted granted Critical
Publication of KR101677379B1 publication Critical patent/KR101677379B1/en

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    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C22/00—Chemical surface treatment of metallic material by reaction of the surface with a reactive liquid, leaving reaction products of surface material in the coating, e.g. conversion coatings, passivation of metals
    • C23C22/05—Chemical surface treatment of metallic material by reaction of the surface with a reactive liquid, leaving reaction products of surface material in the coating, e.g. conversion coatings, passivation of metals using aqueous solutions
    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C16/00—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes
    • C23C16/44—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the method of coating
    • C23C16/458—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the method of coating characterised by the method used for supporting substrates in the reaction chamber
    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C22/00—Chemical surface treatment of metallic material by reaction of the surface with a reactive liquid, leaving reaction products of surface material in the coating, e.g. conversion coatings, passivation of metals
    • C23C22/70—Chemical surface treatment of metallic material by reaction of the surface with a reactive liquid, leaving reaction products of surface material in the coating, e.g. conversion coatings, passivation of metals using melts
    • C23C22/72—Treatment of iron or alloys based thereon
    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C22/00—Chemical surface treatment of metallic material by reaction of the surface with a reactive liquid, leaving reaction products of surface material in the coating, e.g. conversion coatings, passivation of metals
    • C23C22/73—Chemical surface treatment of metallic material by reaction of the surface with a reactive liquid, leaving reaction products of surface material in the coating, e.g. conversion coatings, passivation of metals characterised by the process
    • C23C22/77—Controlling or regulating of the coating process

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  • Chemical & Material Sciences (AREA)
  • General Chemical & Material Sciences (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Engineering & Computer Science (AREA)
  • Materials Engineering (AREA)
  • Mechanical Engineering (AREA)
  • Metallurgy (AREA)
  • Organic Chemistry (AREA)
  • Physical Or Chemical Processes And Apparatus (AREA)

Abstract

According to the present invention, a surface treating device comprises: a storing tank wherein a reagent is received; a reaction unit including a reaction tank forming a passage in which the reagent flows with both open ends, wherein a specimen is installed and reacted with the reagent and a rotary shaft installed in one end of the reaction tank and integrally rotated with the reaction tank; a pump transferring the reagent to one end of the reaction unit from the storing unit; and a case collecting the reagent discharged through the other end of the reaction unit, supplying the reagent back to the storing tank. The specimen is installed to be separated from a bottom surface of the reaction tank to allow the reagent to flow down on a top surface and an underside of the specimen. The purpose of the present invention is to provide the surface treating device enabling uniform treatment by controlling a reaction time in case of conversion treatment.

Description

[0001] APPARATUS OF SURFACE TREATMENT [0002]

The present invention relates to a surface treatment apparatus, and more particularly, to a surface treatment apparatus capable of controlling the reaction rate of chemical treatment.

Generally, when a new steel sheet is manufactured, a product having various properties such as color, roughness and strength can be developed by reacting a steel sheet or a specimen with a chemical through changes in composition and composition.

Such chemical treatment is collectively referred to as chemical treatment, and an experimental apparatus for obtaining data that can be applied to actual production according to the results is observed by changing the characteristics by simply performing the chemical treatment.

Conventionally, a method in which a specimen is immersed in a chemical tank containing a reagent for a certain period of time and shaking to cause a reaction is used. After that, the specimen is removed from the chemical tank, and the change of properties is checked by measuring the reaction and the physical properties.

Important factors in the reaction between the reagent and the sample are reaction time, reagent temperature, and reaction rate. However, there is a problem in that the reaction rate can not be controlled by the above method.

(Japanese Patent Laid-Open No. 10-1305641 (2013.09.09)) and a wet processing apparatus (Japanese Patent Laid-Open No. 2001-244233 (2001.09.07))) Are known.

The chemical tank covering device can prevent the temperature from dropping even if the heat is leaked to the upper portion of the pretreatment vessel and the work is continued to the next day. The wet treatment apparatus is provided with a chemical treatment tank for treating the surface of the wafer Depending on the amount of bubbles, the supply of hydrogen peroxide can be controlled to reduce bubbles and improve surface treatment quality.

However, the above-mentioned inventions have a problem that the specimen is completely immersed in the reagent, and the reaction rate of the specimen with the reagent can not be precisely controlled because the reagent in contact with the specimen is stagnant.

Therefore, there is a need for a device capable of controlling the reaction rate of a specimen and a reagent by controlling the speed of the reagent flowing on the surface of the specimen.

Korean Registered Patent No. 10-1305641 (2013.09.09) Japanese Patent Application Laid-Open No. 2001-244233 (September 10, 2001)

SUMMARY OF THE INVENTION The present invention has been conceived to solve such a problem, and an object of the present invention is to provide a surface treatment apparatus capable of uniform treatment by controlling reaction time during chemical conversion treatment.

According to an aspect of the present invention, there is provided a surface treatment apparatus comprising: a reservoir storing a reagent; A reaction unit including a reaction tank having both ends opened to form a path through which the reagent flows, a reaction chamber in which a sample is installed and reacted with the reagent, and a rotating shaft installed at one end of the reaction tank and rotating integrally with the reaction tank; A pump for transferring the reagent from the reservoir to one end of the reaction unit; And a case for collecting the reagent discharged through the other end of the reaction part and supplying the collected reagent to the reservoir, wherein the specimen is placed on the bottom surface of the reaction vessel so that the reagent flows on the upper and lower surfaces of the specimen And are spaced apart from each other.

delete

And a fixing unit installed at the other end of the reaction tank to fix the specimen. The specimen has one end fixedly inserted into the rotation shaft and the other end fixed by the fixing unit, .

The fixing part may include a rod provided at the other end of the reaction tank, a fixing bracket coupled to one end of the rod inserted into the reaction tank and inserted with the specimen, and a fixing bracket coupled to the other end of the rod exposed to the outside of the reaction tank And a spring disposed to surround the rod and generating a repulsive force between the fixing bracket and the inner surface of the reaction vessel.

Wherein one end of each of the specimens is inserted into the rotating shaft and one or more of the specimens are provided in the other end direction of the specimen, Are fixed in the reaction vessel.

Wherein a plurality of pinholes into which the support pins for supporting the reaction tank are inserted are formed in the case, the support pins are arranged to penetrate the width direction of the case to support the lower end of the reaction tank, And is arranged in an arc shape about the coaxial axis.

The case is formed in a shape gradually becoming narrower toward the bottom, the reaction tank is installed at an upper end thereof, and the storage tank is connected to a lower end of the case.

And a valve for controlling the transfer of the reagent discharged from the reservoir through the pump to the reaction tank or the reservoir.

And a solvent tank for supplying a reagent solvent to the storage tank, wherein the solute and the solvent are supplied to the solute tank and the solvent tank, respectively, according to the concentration of the reagent stored in the storage tank, Is adjusted.

And a vibration cylinder installed in the case and connected to a side surface of the reaction tank to vibrate the reaction tank in the axial direction of the rotation axis.

The surface treatment apparatus according to the present invention has the following effects.

First, the quality of the specimen can be controlled by adjusting the reaction rate between the specimen and the reagent.

Second, the quality of the specimen can be obtained regardless of the skill of the operator by automating the reaction between the specimen and the reagent.

Third, the reaction between the specimen and the reagent can be promoted by vibrating the reaction vessel.

BRIEF DESCRIPTION OF THE DRAWINGS FIG. 1 is a schematic view showing an entire surface treatment apparatus according to an embodiment of the present invention;
2 is a plan view of a reactor according to an embodiment of the present invention,
3 is a side view of a reactor according to an embodiment of the present invention,
FIG. 4 is a view showing a rotating state of a reaction vessel according to an embodiment of the present invention;
FIG. 5 is a view showing a state where a solvent and a solute are supplied to a surface treatment apparatus according to an embodiment of the present invention.

The terminology used herein is for the purpose of describing particular embodiments only and is not intended to limit the invention. The singular forms as used herein include plural forms as long as the phrases do not expressly express the opposite meaning thereto. Means that a particular feature, region, integer, step, operation, element and / or component is specified, and that other specific features, regions, integers, steps, operations, elements, components, and / And the like.

Unless otherwise defined, all terms including technical and scientific terms used herein have the same meaning as commonly understood by one of ordinary skill in the art to which this invention belongs. Commonly used predefined terms are further interpreted as having a meaning consistent with the relevant technical literature and the present disclosure, and are not to be construed as ideal or very formal meanings unless defined otherwise.

Hereinafter, a surface treatment apparatus according to a preferred embodiment of the present invention will be described with reference to the accompanying drawings.

As shown in FIGS. 1 and 2, the present invention mainly comprises a reservoir 20, a reaction unit 100, and a case 10, each of which is connected by a hose 50. If we look at each of these configurations one by one,

The storage tank 20 is a place where the reagent is stored, and reacts with the specimen S by supplying the reagent to the reaction tank 110. The reservoir 20 is connected to the pump 30 and the reagent stored in the reservoir 20 is transferred to the reaction tank 110 by the transfer force of the pump 30. The reason for using the pump 30 in this way is that the reaction tank 110 is located above the storage tank 20. This positional relationship will be described later in more detail.

The reaction unit 100 includes a reaction tank 110 and a rotating shaft 120. The reaction tank 110 is provided inside the case 10 to receive the reagent from the storage tank 20. Both ends of the reaction tank 110 are open, one end is connected to the pump 30, and the other end is opened toward the inside of the case 10.

The specimen S is fixed in the reaction tank 110 to react with the reagent. The reaction tank 110 is installed so as to be able to rotate integrally with the pivot shaft 120 installed at one end of the reaction tank 110. The reaction rate of the reagent and the specimen S can be controlled through this. The reagent is supplied to one end of the reservoir 20, that is, to a high position and discharged to the other end, that is, to a low position. The speed of the reagent is controlled according to the angle of the reservoir 20, .

At this time, the specimen S is spaced apart from the bottom surface of the reaction tank 110 by a predetermined height, so that the reagent flows along the plane and the bottom surface. A groove for inserting the specimen S is formed on the pivot shaft 120 so as to fix the specimen S in the reaction chamber 110 so that one end of the specimen S is fixed and the other end A fixing portion 150 is provided to fix the other end of the specimen S.

The fixing unit 150 is fixed to one side of the rod 152, more specifically, to one side located inside the reaction tank 110, and the other end of the specimen S A stopper 154 coupled to the other side of the rod 152 to prevent the rod 152 from dropping into the reaction tank 110 and a stopper 154 disposed to surround the rod 152 And a spring 153 for generating a repulsive force between the fixing bracket 151 and the inner surface of the reaction tank 110.

Since the fixing unit 150 is expanded and contracted to fix the specimen S, it becomes possible to fix the specimen S even if the size of the specimen S changes.

Since a plurality of grooves are formed in the pivot shaft 120 and a plurality of the fixed portions 150 are vertically spaced apart from each other, a plurality of specimens S can be provided up and down. By providing a plurality of specimens S in this manner, a large amount of specimens can be manufactured under the same experimental conditions.

The case 10 is installed to surround the reaction tank 110 and must be formed to have a larger volume than the rotation range of the reaction tank 110 so as not to interfere with the rotation of the reaction tank 110. The case 10 is connected to the storage tank 20 so as to collect the reagent discharged to the other end of the reaction tank 110 and to send the reagent to the storage tank 20 again.

In addition, a plurality of pinholes 11 are formed on the side surface of the case 10, and the support pins 130 can be inserted into the pinhole 11. The support pin 130 supports the lower end of the reaction tank 110 to prevent the other end of the reaction tank 110 from falling. Since the pinholes 11 are arranged in an arc shape centering on the pivot shaft 120, the angle of the reaction vessel 110 can be fixed by disposing the support pins 130 in accordance with the rotation of the reaction tank 110.

A vibrating cylinder 140 is installed on the side surface of the case 10. An end of the vibrating cylinder 140 is connected to a side surface of the reaction tank 110 to oscillate the reaction tank 110 in the axial direction of the rotation shaft 120. [ .

By oscillating the reaction tank 110 in this way, the reagent can flow evenly on the surface of the specimen S, and the effect of more active reaction can be expected.

In addition, the upper portion of the case 10 where the reaction tank 110 is installed is formed to be the widest, and the lower portion of the case 10 is formed narrower to collect reagents discharged from the reaction tank 110. The reagent collected in the lower portion of the case 10 is supplied to the storage tank 20 and circulated to the reaction tank 110 through the pump 30.

If the reagent is used for a long time, the concentration of the reagent may be blurred or foreign matter may be mixed. In order to solve such a problem, the solute tank 70 and the solvent tank 60 are provided to supply the solute and the solvent to the storage tank 20, so that the concentration of the reagent can be kept constant.

A valve 40 may be provided between the pump 30 and the reaction tank 110 so that when the amount of the reagent supplied from the pump 30 is excessively large, it may be returned to the storage tank 20 instead of the reaction tank 110 have.

While the present invention has been described in connection with what is presently considered to be practical exemplary embodiments, it is to be understood that the invention is not limited to the disclosed embodiments, but, on the contrary, You will understand.

It is therefore to be understood that the above-described embodiments are illustrative in all aspects and not restrictive. The scope of the present invention is defined by the appended claims rather than the detailed description, and all changes or modifications derived from the meaning and scope of the claims and their equivalents should be interpreted as being included in the scope of the present invention .

1: Surface treatment apparatus 10: Case
11: Pinhole 20: Storage tank
30: pump 40: valve
50: Hose 60: Solvent tank
70: solute tank 100: reaction part
110: reaction tank 120:
130: support pin 140: vibrating cylinder
150: fixing part 151: fixing bracket
152: load 153: spring
154: Stoppers S: Psalms

Claims (10)

A reservoir in which reagents are stored;
A reaction unit including a reaction tank having both ends opened to form a path through which the reagent flows, a reaction chamber in which a sample is installed and reacted with the reagent, and a rotating shaft installed at one end of the reaction tank and rotating integrally with the reaction tank;
A pump for transferring the reagent from the reservoir to one end of the reaction unit; And
And a case for collecting the reagent discharged through the other end of the reaction part and supplying the collected reagent to the storage tank,
Wherein the specimen is spaced apart from the bottom surface of the reaction tank so that the reagent can flow on the upper surface and the lower surface of the specimen.
delete The method according to claim 1,
And a fixing unit installed at the other end of the reaction tank to fix the specimen,
Wherein the specimen is arranged such that one end thereof is inserted and fixed to the rotating shaft and the other end thereof is fixed by the fixing portion and is spaced apart from the bottom surface of the reactor.
The method of claim 3,
The fixing part may include a rod provided at the other end of the reaction tank, a fixing bracket coupled to one end of the rod inserted into the reaction tank and inserted with the specimen, and a fixing bracket coupled to the other end of the rod exposed to the outside of the reaction tank A stopper and a spring arranged to surround the rod and generating a repulsive force between the fixing bracket and the inner surface of the reaction vessel.
The method of claim 4,
Wherein a plurality of the specimens are arranged in the reaction vessel so as to be vertically spaced apart from each other, one end of each of the specimens is inserted into the rotation shaft,
Wherein one or more of the fixing portions are provided in the other end direction of each of the specimens to fix the specimens inside the reactor.
The method according to claim 1,
A plurality of pinholes into which the support pins for supporting the reaction tank are inserted are formed in the case,
The support pin is disposed so as to pass through the width direction of the case and supports the lower end of the reaction tank,
Wherein the pinhole is disposed in a shape of arc around the pivot shaft.
The method according to claim 1,
Characterized in that the case is formed in a shape that becomes gradually narrower toward the bottom, the reaction tank is provided at an upper end thereof, and the reservoir is connected to a lower end thereof.
The method according to claim 1,
Further comprising: a valve for regulating the transfer of the reagent discharged from the reservoir through the pump to the reaction tank or the reservoir.
The method according to claim 1,
A solute tank for supplying a reagent solute to the reservoir; and a solvent reservoir for supplying a reagent solvent to the reservoir,
Wherein the solute and solvent are respectively supplied to the solute tank and the solvent tank according to the concentration of the reagent stored in the storage tank to adjust the concentration.
The method according to claim 1,
And a vibration cylinder installed in the case and connected to a side surface of the reaction tank to vibrate the reaction tank in the axial direction of the rotation axis.
KR1020150103037A 2015-07-21 2015-07-21 Apparatus of surface treatment KR101677379B1 (en)

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KR1020150103037A KR101677379B1 (en) 2015-07-21 2015-07-21 Apparatus of surface treatment

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KR101677379B1 true KR101677379B1 (en) 2016-11-18

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Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2001244233A (en) 2000-02-25 2001-09-07 Nec Corp Wet treatment device
JP2002195922A (en) * 2000-12-26 2002-07-10 Sharp Corp Apparatus and method for treating thin piece specimen
KR101305641B1 (en) 2007-07-05 2013-09-09 현대자동차주식회사 Covering apparatus for chemicals tank

Patent Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2001244233A (en) 2000-02-25 2001-09-07 Nec Corp Wet treatment device
JP2002195922A (en) * 2000-12-26 2002-07-10 Sharp Corp Apparatus and method for treating thin piece specimen
KR101305641B1 (en) 2007-07-05 2013-09-09 현대자동차주식회사 Covering apparatus for chemicals tank

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