KR101665187B1 - A sensing technique based on dielectric changes in metal capacitor - Google Patents

Abstract

The environmental information measuring device includes an environmental information sensor circuit; An environment information value determining unit for determining an environment information value according to a sensing signal output from the environment information sensor circuit; And an output unit outputting the determined environment information value, wherein the environment information sensor circuit includes: an input terminal receiving a clock input; A first resistor having one end connected to the input terminal; A second resistor whose one end is connected to the input terminal; A first capacitor grounded at the other end and exposed to air; A second capacitor which is grounded at the other end and cut off from the air; A dynamic element matching unit for switching a connection between the other end of the first resistor, one end of the first capacitor, the other end of the second resistor and the second capacitor, and a first input unit connected to one end of the first capacitor, And a differential amplification unit in which one end of the second capacitor and the second input unit are connected.

Description

[0001] The present invention relates to an environmental information sensor circuit and an environmental information measuring apparatus,

The present invention relates to an environmental information sensor circuit and an environmental information measuring apparatus.

2. Description of the Related Art Generally, various semiconductor electronic devices including DRAMs, volatile semiconductor memories, and the like are increasingly being speeded up and highly integrated in response to high performance of electronic systems such as personal computers and electronic communication devices. Particularly, in a semiconductor memory device and the like, a low power consumption characteristic is required, and operating conditions of a circuit block are adjusted to reduce an operating current and a standby current. For this purpose, environmental information of a circuit is sensed using an environmental information measuring device , Thereby controlling the operation state or the like, or monitoring the ambient environment information in the normal operation, and the like. For example, in the adjustment of the refresh cycle of the DRAM cell according to the retention time, as a result, it is controlled to respond to the change of the environmental information. Therefore, the design of the environmental information sensor circuit .

On the other hand, many environmental information sensor related technologies using a CMOS (Complementary Metal Oxide Semiconductor) process have been proposed for such an environmental information sensor circuit. However, most of the announced Cmos environmental information sensors have a problem of mismatch due to errors in the device resistance and the dielectric constant of the capacitor used in the circuit, and due to the systematic noise generated by the system, Is difficult to obtain.

SUMMARY OF THE INVENTION The present invention has been proposed in order to solve the problems described above, and it is an object of the present invention to provide an environment information sensor circuit capable of effectively reducing noise of an output value caused by a change in resistance, The purpose of the present invention is to propose a measuring device.

It is also an object of the present invention to provide an environmental information sensor circuit and a environmental information measuring device including the environmental information sensor circuit, which enable a sensor of high accuracy to be designed by providing a linear environmental information sensor design in which mismatch is eliminated.

According to an aspect of the present invention, there is provided an environment information sensor circuit comprising: an input terminal for receiving a clock input; A first resistor having one end connected to the input terminal; A second resistor whose one end is connected to the input terminal; A first capacitor exposed to ambient air, one end connected to the other end of the first resistor, and the other end grounded; A second capacitor interrupted by ambient air, one end connected to the other end of the second resistor, and the other end grounded; And a differential amplification part in which the other end of the first resistor is connected to the first input part and the other end of the second resistor is connected to the second input part.

According to another aspect of the present invention, there is provided an environment information sensor circuit comprising: an input terminal receiving a clock input; A first resistor having one end connected to the input terminal; A second resistor whose one end is connected to the input terminal; A first capacitor grounded at the other end and exposed to air; A second capacitor which is grounded at the other end and cut off from the air; A dynamic element matching unit for switching a connection between the other end of the first resistor, one end of the first capacitor, the other end of the second resistor and the second capacitor, and a first input unit connected to one end of the first capacitor, And a differential amplification unit in which one end of the second capacitor and the second input unit are connected.

According to another aspect of the present invention, there is provided an apparatus for measuring environmental information, comprising: an environmental information sensor circuit; An environment information value determining unit for determining an environment information value according to a sensing signal output from the environment information sensor circuit; And an output unit outputting the determined environment information value, wherein the environment information sensor circuit includes: an input terminal receiving a clock input; A first resistor having one end connected to the input terminal; A second resistor whose one end is connected to the input terminal; A first capacitor exposed to ambient air, one end connected to the other end of the first resistor, and the other end grounded; A second capacitor interrupted by ambient air, one end connected to the other end of the second resistor, and the other end grounded; And a differential amplification part in which the other end of the first resistor is connected to the first input part and the other end of the second resistor is connected to the second input part.

According to another aspect of the present invention, there is provided an apparatus for measuring environmental information, comprising: an environmental information sensor circuit; An environment information value determining unit for determining an environment information value according to a sensing signal output from the environment information sensor circuit; And an output unit outputting the determined environment information value, wherein the environment information sensor circuit includes: an input terminal receiving a clock input; A first resistor having one end connected to the input terminal; A second resistor whose one end is connected to the input terminal; A first capacitor grounded at the other end and exposed to air; A second capacitor which is grounded at the other end and cut off from the air; A dynamic element matching unit for switching a connection between the other end of the first resistor, one end of the first capacitor, the other end of the second resistor and the second capacitor, and a first input unit connected to one end of the first capacitor, And a differential amplification unit in which one end of the second capacitor and the second input unit are connected.

According to the embodiment of the present invention, the environmental current is sensed by comparing the currents measured from the first capacitor and the second capacitor having different air shielding states and by differential amplifying them, Noise generation can be eliminated.

Further, according to the embodiment of the present invention, the environmental information sensor circuit includes an offset reduction unit for reducing a mismatch of the sensing value by the capacitor, thereby reducing the capacitor mismatch, and the resistance of the output value By eliminating the mismatch, it is possible to design an environmental information sensor circuit with a low environmental information error and a high accuracy with a linear characteristic.

1 is a block diagram schematically illustrating a configuration of an environment information measuring apparatus according to an embodiment of the present invention.
2 is a circuit conceptual diagram for explaining a basic configuration of an environmental information sensor circuit according to an embodiment of the present invention.
3 is a view for explaining a capacitor of an environment information sensor circuit according to an embodiment of the present invention.
4 is a circuit conceptual diagram for explaining a basic configuration of an environment information sensor circuit according to another embodiment of the present invention.
5 is a diagram for explaining the configuration and output of the matching clock generating unit according to the embodiment of the present invention.
FIG. 6 is a diagram for explaining a configuration example of a dynamic element matching unit and a circuit design method according to an embodiment of the present invention.
7 is a circuit diagram for explaining the overall configuration of an environmental information sensor circuit according to an embodiment of the present invention.
8 shows data obtained by experimenting characteristics of an environmental information sensor circuit according to an embodiment of the present invention.

The following merely illustrates the principles of the invention. Thus, those skilled in the art will be able to devise various apparatuses which, although not explicitly described or shown herein, embody the principles of the invention and are included in the concept and scope of the invention. Furthermore, all of the conditional terms and embodiments listed herein are, in principle, intended only for the purpose of enabling understanding of the concepts of the present invention, and are not intended to be limiting in any way to the specifically listed embodiments and conditions .

It is also to be understood that the detailed description, as well as the principles, aspects and embodiments of the invention, as well as specific embodiments thereof, are intended to cover structural and functional equivalents thereof. It is also to be understood that such equivalents include all elements contemplated to perform the same function irrespective of the currently known equivalents as well as the equivalents to be developed in the future, i.e., the structure.

Thus, for example, it should be understood that the block diagrams herein represent conceptual views of exemplary circuits embodying the principles of the invention. Similarly, all flowcharts, state transition diagrams, pseudo code, and the like are representative of various processes that may be substantially represented on a computer-readable medium and executed by a computer or processor, whether or not the computer or processor is explicitly shown .

The functions of the various elements shown in the figures, including the functional blocks depicted in the processor or similar concept, may be provided by use of dedicated hardware as well as hardware capable of executing software in connection with appropriate software. When provided by a processor, the functions may be provided by a single dedicated processor, a single shared processor, or a plurality of individual processors, some of which may be shared.

Also, the explicit use of terms such as processor, control, or similar concepts should not be interpreted exclusively as hardware capable of running software, and may be used without limitation as a digital signal processor (DSP) (ROM), random access memory (RAM), and non-volatile memory. Other hardware may also be included.

In the claims hereof, the elements represented as means for performing the functions described in the detailed description include all types of software including, for example, a combination of circuit elements performing the function or firmware / microcode etc. , And is coupled with appropriate circuitry to execute the software to perform the function. It is to be understood that the invention defined by the appended claims is not to be construed as encompassing any means capable of providing such functionality, as the functions provided by the various listed means are combined and combined with the manner in which the claims require .

BRIEF DESCRIPTION OF THE DRAWINGS The above and other objects, features and advantages of the present invention will become more apparent from the following detailed description of the present invention when taken in conjunction with the accompanying drawings, in which: There will be. In the following description, well-known functions or constructions are not described in detail since they would obscure the invention in unnecessary detail.

Hereinafter, a preferred embodiment of the present invention will be described in detail with reference to the accompanying drawings.

FIG. 1 is a block diagram for schematically explaining a configuration of an environment information measuring apparatus according to an embodiment of the present invention, and FIG. 2 is a circuit conceptual diagram for explaining a basic configuration of an environment information sensor circuit according to an embodiment of the present invention. 3 is a view for explaining a capacitor of the environmental information sensor circuit according to the embodiment of the present invention.

In an embodiment of the present invention, the environmental information may include at least one of temperature information, pressure information, and humidity information. Accordingly, the environmental information measuring apparatus according to the embodiment of the present invention can sense at least one of temperature information, pressure information, and humidity information by sensing environmental information. In particular, in the embodiment of the present invention, the environmental information measuring apparatus measures at least one of temperature information, pressure information, and humidity information based on a voltage output value that varies in accordance with a change in permittivity of a capacitor for environmental information measurement according to an environmental change, The output value can be output to another element or device connected to the sensor circuit.

More specifically, referring to FIG. 1, an apparatus for measuring environmental information according to an embodiment of the present invention includes an environment information sensor circuit 100, an environment information value determination unit 200, and an output unit.

The environment information sensor circuit 100 senses a change in external environmental information and outputs the differential amplified voltage value according to a constant cycle based on the current supply and the clock input signal. The environmental information sensor circuit 100 according to the embodiment of the present invention may include a differential amplifier for comparing and amplifying a difference between a capacitor for blocking air and a capacitor for preventing an error.

2, the environment information sensor circuit 100 includes an input terminal 110 receiving a clock input, a first resistor 120 and a second resistor 130 connected at one end to the input terminal 110, A first capacitor 140 whose one end is connected to the other end of the first resistor 120 and the other end is grounded and the other end of which is connected to the other end of the second resistor 130, And the other end of the second resistor 130 is connected to the second input terminal of the second capacitor 150. The second resistor 150 is connected to the first input terminal of the first resistor 120 and the other terminal of the second resistor 130 is connected to the second input terminal, And an offset removal unit 170 connected to the other end of the second resistor 130 to remove an offset of an input signal to the second input unit.

Here, the resistance values of the first resistor 120 and the second resistor 130 according to the embodiment of the present invention may have the same value, and the input waveform input to the input terminal 110 may include a square wave . Accordingly, the current value flowing through the first capacitor 140 and the second capacitor 150 becomes equal to each other, the voltage at the one end of the first capacitor 140 is applied to the first input of the differential amplifier 160, 2 capacitor 150 is applied to the second input of the differential amplifier 160 so that the differential amplifier 160 amplifies the voltage difference between the first input and the second input, .

Here, the first capacitor 140 may be a sensor capacitor, and may include a capacitor having a variable permittivity according to an environmental change. Accordingly, the output of the differential amplifier 160 can output a voltage signal linearly variable according to an environmental change.

In particular, according to the operation of the environmental information sensor circuit 100 of the present invention, the linearly varying voltage signal may include pressure information around the sensor capacitor. The pressure information is generally expressed as absolute pressure information based on the full vacuum state, 1 gauge pressure information due to the difference between the atmospheric pressure (ATM) and the absolute pressure, and differential pressure information indicating the difference between the two depressurization pressures . The environmental information sensor circuit 100 according to the embodiment of the present invention changes the permittivity according to the pressure change around the sensor capacitor and accordingly the magnitude of the voltage signal to be outputted is variable and the pressure information can be outputted. The structure of the sensor capacitor for this purpose is shown in Fig.

3 is a view for explaining a capacitor of an environment information sensor circuit according to an embodiment of the present invention.

According to an embodiment of the present invention, a change in permittivity may be used to sense ambient information in accordance with an embodiment of the present invention. To this end, the first capacitor 140 of the environment information sensing circuit 100 according to the embodiment of the present invention may be used as a sensor capacitor. The first capacitor 140 may be formed of a metal structure forming a space for forming a specific dielectric constant, as shown in FIG. The change in the environmental information including the atmospheric pressure, the humidity and the temperature of the surrounding environment causes the change of the permittivity. Therefore, if the metal structure is exposed to the air and the other conditions are controlled, the output of the first capacitor 140 is linear Can have an output.

In addition, according to the embodiment of the present invention, the metal structure may include a first metal structure 'C' shaped continuously formed from one point as shown in FIG. 3A; And a second metal structure 'C' shaped continuously formed from one point different from one point of the first metal structure and spaced apart by a constant distance d from the first metal structure In general, it can be configured to increase the influence of the change in permittivity due to external environment change.

The first metal structure and the second metal structure may be formed in the form of one metal structure in which a plurality of protrusions are alternately formed perpendicularly to both base line structures. Accordingly, it is possible to take the form of a metal structure which is formed N times alternately in such a manner that a plurality of projections are staggered perpendicular to both base line structures.

The first metal structure and the second metal structure according to the embodiment of the present invention may be formed in a shape in which a pair of metal structures having a certain interval as shown in FIG. The capacitance of the first capacitor 140 may be proportional to the dielectric constant due to the space formed in the metal structure and the metal structure itself and may be inversely proportional to the distance d between the protrusions of the metal structures. In addition, the capacitance of the first capacitor 140 may be proportional to the total number N of protrusions formed at both ends of the 'C' by the metal structure.

Accordingly, the first capacitor 140 may be a metal-oxide-metal capacitor including a metal structure, an ultra-thin metal may be used for the metal structure, and a 95% .

The capacitance according to the dielectric constant of the first capacitor 140 of this type can be calculated as shown in Equation (1).

는 진공 유전율을 나타내며,

는 상대 유전율을 나타내고, A는 면적(height x length) 이며, d는 금속 돌출부간 거리(cavity width)를 나타낼 수 있다.이에 따른, 제1 캐패시터(140) 주변 공기의 유전율 변화는 압력, 온도 및 습도에 따라 가변될 수 있다. 즉, 제1 캐패시터(140) 주변 공기의 유전율을

라고 하면, M. Santo Zarnik의 RADIOENGINEERING, Vol 21, No.1 논문 An Experimental and Numerical Study of the Humidity Effect on the Stability of a Capacitive Ceramic Pressure Sensor에 기술된 내용을 참조하면, 하기의 수학식 2와 같이 표현될 수 있다.Here, CC denotes a capacitance (F), N denotes the number of metal protrusions N projecting from both metal structures,

Represents a vacuum dielectric constant,

The change in dielectric constant of the ambient air around the first capacitor 140 is dependent on the pressure, the temperature, and the relative dielectric constant, It can be varied depending on the humidity. That is, the dielectric constant of the air around the first capacitor 140

Referring to the description of M. Santo Zarnik's RADIO ENGINEERING, Vol. 21, No. 1, An Experimental and Numerical Study of the Humidity Effect on the Stability of a Capacitive Ceramic Pressure Sensor, Can be expressed.

In the above equation, T represents absolute temperature, RH represents relative humidity, and P represents air pressure. Also, Ps can represent the saturated water vapor pressure at the absolute temperature. As a result, changes in pressure, temperature, and humidity can all cause different relative permittivity changes with different conditions being maintained.

For example, if the capacitance of the first capacitor 140 is 10 pF, an increase in one atmosphere of ambient air may result in a capacitance increase of 5.467 fF, a 1K increase in absolute temperature will result in a capacitance reduction of 18.587 aF, A 1% increase in capacitance can result in a capacitance increase of 20.975 aF.

Thus, the capacitance change of the first capacitor 140 may cause a change in the output voltage, and as a result, the humidity change as well as the pressure change can be measured through the measured value.

In addition, the sensor circuit of the first capacitor 140 according to the embodiment of the present invention can operate independently of other elements, thereby enabling high-resolution measurement. In particular, it is possible to measure the pressure according to the determination of the dielectric constant level.

Referring again to Figure 1,

The environment information value determination unit 200 compares the voltage output from the environment information sensor circuit 100 with the reference voltage VREF and applies the comparison result to the analog-to-digital converter ADC to calculate a digital value Dout And outputs it to the output unit 300. The output unit 300 generates environment information data based on the digital value corresponding to the environment information and outputs it to the outside. The outputted environmental information data may be converted into a predetermined format and transmitted to another module that performs environmental information control, or may be transmitted to a video or audio output device and converted and outputted as video or audio data.

The environment information sensor circuit 100 may further include an offset removal unit 170 connected to the other end of the second resistor 150 to remove an offset of an input signal to the second input unit. The offset removal unit 170 may be controlled according to an environment information code signal for removing a mismatch signal from an input signal to the second input unit, and may include at least one switch and at least one capacitor.

According to an embodiment of the present invention, at least one capacitor may form a capacitor array. Accordingly, the dynamic detection region offset due to the capacitance change can be increased by an amount equal to the capacitance of the second capacitor 150 plus the capacitance of the capacitor array. For example, if the capacitance of the second capacitor 150 is 10 pF, the capacitance change detection region may be increased to 20 pF by summing the capacitance 10 pF of the capacitor array.

As a result, the offset eliminator 170 according to the embodiment of the present invention includes a capacitor array composed of at least one capacitor, so that it is possible to improve the detection range of the capacitance change. Due to the increase in the dynamic range, Flicker noise (1 / f noise) generated by the flicker can be removed.

Meanwhile, according to the embodiment of the present invention, a change in capacitance due to a change in pressure, temperature or humidity of the surrounding environment brings about a change in the overall system capacitance as described above, resulting in a change in the RC time delay. As a result, a mismatch to R and C of the input signal can be generated. Accordingly, the offset removal unit 170 may adjust the capacitance value of the capacitor array so that the RC time delay is matched by adjusting the capacitance value of the capacitor array according to the environment information code signal. Accordingly, an RC mismatch due to an RC time delay change can be eliminated.

According to the embodiment of the present invention, the offset eliminator 170 adjusts the capacitance value of the capacitor array to remove the offset voltage of the voltage output from the differential amplifier 160, thereby eliminating the mismatch of the offset voltage can do.

FIG. 4 is a circuit conceptual diagram for explaining a basic configuration of an environment information sensor circuit according to another embodiment of the present invention, FIG. 5 is a diagram for explaining a configuration and output of a clock generator according to an embodiment of the present invention, FIG. 6 is a diagram for explaining a configuration example of a dynamic element matching unit and a circuit design method according to an embodiment of the present invention.

4, in addition to the components of the environment information sensor circuit shown in FIG. 2, according to another embodiment of the present invention, a matching clock generating unit 180 and a dynamic element matching unit 190 are further included .

More specifically, the environment information sensor circuit 100 according to another embodiment of the present invention includes an input terminal 110 receiving a clock input, a first resistor 120 connected at one end to the input terminal, A second capacitor 150 grounded at the other end and exposed to the air and a second capacitor 150 grounded at the other end and disconnected from the air, the other end of the first resistor 120, A dynamic element matching unit for switching a connection between a first end of the first capacitor 140, a second end of the second resistor 130 and the second capacitor 150, And a differential amplifier unit having one end of the second capacitor 150 connected to the second input unit. The description of the above-described elements is the same, so it is omitted.

The matching clock generating unit 180 applies the dynamic element matching signal and performs clock signal processing for generating a dynamic element matching signal.

5, the matching clock generator 180 includes a clock divider 181 for dividing a clock signal based on a clock signal input from the input terminal 110; And a non-overlapping matching unit 183 for variably outputting the divided clock signals to non-overlapping dynamic element matching signals. 5, the clock divider 181 may divide the clock so that the switching operation is synchronized with the clock input to the input terminal 110. [ For example, if a 100 kHz input is applied, it can be divided into 50 kHz.

The nonoverlapped clock generation unit 183 generates a peer element matching signal that enables each of the switches included in the dynamic element matching unit 190 to be synchronized in accordance with the clock to enable accurate digitalization of the environment information value, As shown in FIG. The nonoverlapped clock generation unit 183 can generate and output a clock signal that is distributed so that each switching signal is synchronized with the input terminal 110 clock without overlapping.

The dynamic element matching unit 190 includes a plurality of switches controlled in accordance with the dynamic element matching signal applied from the matching clock generating unit 180 to perform dynamic element matching switching for reducing a resistance mismatch Operation can be performed.

To this end, referring to FIG. 6, the dynamic element matching unit 190 is designed to perform clock synchronized switching for each resistor connection end, thereby reducing mismatch caused by resistance and reducing output error.

The dynamic element matching unit 190 includes a first switch unit 191 for switching connection between the other end of the first resistor 120 and one end of the first capacitor 140, A second switch unit 192 for switching the connection between the other end of the first capacitor 191 and one end of the second capacitor 150 and a second switch unit 192 for switching connection between the other end of the first capacitor 191 and the other end of the second resistor 130. [ 3 switch 193 and a fourth switch 194 for switching connection between one end of the second capacitor 150 and the other end of the first resistor 140.

Accordingly, the dynamic element matching unit 190 outputs the dynamic element matching signal to the first switch unit 191 to the fourth switch unit 193 in accordance with the non-overlapping dynamic element matching signal applied from the matching clock generating unit 180 By performing clock synchronized switching, it is possible to reduce the mismatch caused by the resistance and reduce the output error.

FIG. 7 is a circuit diagram for explaining the overall configuration of the environment information sensor circuit 100 according to the embodiment of the present invention, and FIG. 8 shows data obtained by experimenting characteristics of the environment information sensor circuit according to the embodiment of the present invention .

7, the environment information sensor circuit 100 according to an embodiment of the present invention includes a first resistor 120, a second resistor 130, A dynamic element matching unit 190 connected to a first capacitor 140 exposed to the air as a sensor capacitor and a second capacitor 150 whose air is blocked as a reference may be switched, The voltage output is removed from the capacitor mismatch by the offset removal unit 170 and amplified by the differential amplification unit 160 to be transmitted to the environment information value determination unit 200. The output unit 300 determines the environment information value And outputs it in an appropriate manner according to the environmental information value determined by the unit 200.

In addition, the differential amplifier 160 may include buffers 161, 162, 163, and 164 at the first input terminal, the second input terminal, and the output terminal, respectively, so that the output efficiency and the error reduction can be realized.

8 shows data obtained by experimenting characteristics of an environmental information sensor circuit according to an embodiment of the present invention. As shown in FIG. 8, it can be seen that the sensor capacitance and the voltage output of the environment information sensor circuit 100 are linearly variable. According to the embodiment of the present invention, it is possible to design the environmental information sensor circuit 100 and the environmental information measuring device which can linearly and accurately measure the environmental information according to the capacitance change and realize the error elimination .

Meanwhile, the offset eliminator 170 according to the embodiment of the present invention may include a capacitor array including at least one capacitor. In detecting capacitance change, the capacitor array can eliminate the flicker noise (1 / f noise) elimination and the resistance mismatch that are caused in the detection region and resolution improvement and in inverse proportion to the frequency.

In addition, the environment information value determiner 200 according to the embodiment of the present invention can detect a change in capacitance as a change in RC time delay.

9 is a diagram for explaining that the environment information value determination unit 200 can detect the change in capacitance by using the RC time change.

For example, if the switching VDD value and the GND value of the environment information sensor circuit 100 are before saturation, the system resistance value R is 200 (k?), And the system capacitance C is 15 pF, .

Assuming a 100 kHz clock and a VDD value of 2.5 V with respect to the RC value calculated as shown in Equation (3), in order to calculate the voltage value per each vertex in FIG. 9, .

It can be confirmed that the voltage value varies between about 2.1 V and 0.4 V according to the result of the calculation. As a result, the difference between the RC time delay and the voltage value change can be calculated as shown in the following table.

Through such a process, the environment information value determining unit 200 can detect a change in the capacitance value based on the RC time delay change of the output of the environment information sensor circuit 100, It is possible to measure the change of the value.

For example, if the change in the air pressure sensed in the system shown in FIG. 9 and Table 1 is 0.1 psi, this may lead to a variation amount of capacitance 36aF, It is possible to detect a change in the RC time delay of the output of the information sensor circuit 100 and output it through the output unit 300 by measuring the amount of change in the pressure based thereon.

While the present invention has been particularly shown and described with reference to exemplary embodiments thereof, it is clearly understood that the same is by way of illustration and example only and is not to be construed as limiting the scope of the invention as defined by the appended claims. It will be understood by those skilled in the art that various changes in form and details may be made therein without departing from the spirit and scope of the present invention.

100: Environmental information sensor circuit
110: input terminal
120: first resistance
130: second resistance
140: first capacitor
150: second capacitor
160: Differential amplifier
170: Offset removal
180: Matching clock generating unit
190: Dynamic element matching unit
200: environment information value determination unit
300:

Claims (18)

1. A sensor circuit for environmental information comprising at least one of temperature information, pressure information, and humidity information,
An input terminal receiving a clock input;
A first resistor having one end connected to the input terminal;
A second resistor whose one end is connected to the input terminal;
A first capacitor exposed to ambient air, one end connected to the other end of the first resistor, and the other end grounded;
A second capacitor interrupted by ambient air, one end connected to the other end of the second resistor, and the other end grounded;
A differential amplifier having a first input connected to the other end of the first resistor and a second input connected to the other end of the second resistor;
An offset canceling unit coupled to the other end of the second resistor to remove an offset of an input signal to the second input unit; And
And a dynamic element matching unit for switching connection between the other end of the first resistor, one end of the first capacitor, the other end of the second resistor and the second capacitor, respectively
Environmental information sensor circuit. delete The method according to claim 1,
Wherein the offset eliminator comprises a plurality of offset cancellation circuit units each controlled by an environment information code signal for removing a mismatch signal from an input signal to the second input unit and including at least one switch and at least one capacitor,
Environmental information sensor circuit. delete The method according to claim 1,
Wherein the dynamic element matching unit includes a plurality of switches controlled in accordance with a dynamic element matching signal,
And a matching clock generator for applying the dynamic element matching signal
Environmental information sensor circuit. 6. The method of claim 5,
The matching clock generating unit
A clock divider for dividing a clock signal based on a clock signal input from the input terminal; And
And a non-overlap matching unit for variably outputting the divided clock signal to a non-overlapping dynamic element matching signal
Environmental information sensor circuit. The method according to claim 1,
The dynamic element matching unit
A first switch unit for switching connection between the other end of the first resistor and one end of the first capacitor;
A second switch unit for switching a connection between the other end of the second resistor and one end of the second capacitor;
A third switch for switching connection between one end of the first capacitor and the other end of the second resistor; And
And a fourth switch unit for switching connection between one end of the second capacitor and the other end of the first resistor
Environmental information sensor circuit. 8. The method of claim 7,
Wherein the dynamic element matching unit switches at least one of the first to fourth switch units according to a non-overlapping dynamic element matching signal applied from the matching clock generating unit
Environmental information sensor circuit. The method according to claim 1,
Wherein the first resistance and the second resistance value are the same. The method according to claim 1,
Wherein the first capacitor is a metal structure forming a space for forming a specific dielectric constant. 11. The method of claim 10,
The metal structure may include: a first metal structure having a 'C' shape continuously formed from a point; And
A second metal structure formed continuously from a point different from one point of the first metal structure and spaced a predetermined distance from the first metal structure, . In the environmental information sensor circuit,
An input terminal receiving a clock input;
A first resistor having one end connected to the input terminal;
A second resistor whose one end is connected to the input terminal;
A first capacitor grounded at the other end and exposed to air;
A second capacitor which is grounded at the other end and cut off from the air;
A dynamic element matching unit for switching connection between the other end of the first resistor, one end of the first capacitor, the other end of the second resistor and the second capacitor,
And a differential amplifier unit having one end of the first capacitor connected to the first input unit and one end of the second capacitor connected to the second input unit,
Environmental information sensor circuit. 13. The method of claim 12,
And an offset removing unit for removing a capacitor mismatch with respect to an input signal to the second input unit in accordance with the environmental information code signal
Environmental information sensor circuit. 13. The method of claim 12,
The dynamic element matching unit
A plurality of switching circuits that are dynamically controlled to eliminate the resistance mismatch effect
Environmental information sensor circuit. 13. The method of claim 12,
Further comprising a matching clock generator for inputting a dynamic control clock to the dynamic element matching unit,
Wherein the matching clock generating unit divides a clock signal based on a clock signal input from the input terminal and variably outputs the divided clock signal as a non-overlapping dynamic element matching signal. An environmental information measuring apparatus comprising:
Environmental information sensor circuit;
An environment information value determining unit for determining an environment information value according to a sensing signal output from the environment information sensor circuit; And
And an output unit outputting the determined environment information value,
The environmental information sensor circuit
An input terminal receiving a clock input;
A first resistor having one end connected to the input terminal;
A second resistor whose one end is connected to the input terminal;
A first capacitor exposed to ambient air, one end connected to the other end of the first resistor, and the other end grounded;
A second capacitor interrupted by ambient air, one end connected to the other end of the second resistor, and the other end grounded;
A differential amplifier having a first input connected to the other end of the first resistor and a second input connected to the other end of the second resistor;
An offset canceling unit coupled to the other end of the second resistor to remove an offset of an input signal to the second input unit; And
And a dynamic element matching unit for switching connection between the other end of the first resistor, one end of the first capacitor, the other end of the second resistor and the second capacitor, respectively
Environmental information measuring device. An environmental information measuring apparatus comprising:
Environmental information sensor circuit;
An environment information value determining unit for determining an environment information value according to a sensing signal output from the environment information sensor circuit; And
And an output unit outputting the determined environment information value,
The environmental information sensor circuit
An input terminal receiving a clock input;
A first resistor having one end connected to the input terminal;
A second resistor whose one end is connected to the input terminal;
A first capacitor grounded at the other end and exposed to air;
A second capacitor which is grounded at the other end and cut off from the air;
A dynamic element matching unit for switching connection between the other end of the first resistor, one end of the first capacitor, the other end of the second resistor and the second capacitor,
And a differential amplifier unit having one end of the first capacitor connected to the first input unit and one end of the second capacitor connected to the second input unit,
Environmental information measuring device. 18. The method of claim 17,
The environment information value determining unit detects a change in capacitance value based on the RC time delay change of the output of the environment information sensor circuit and determines the environment information value by measuring a change in the environment information value according to the change in the capacitance value
Environmental information measuring device.

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