KR101657468B1 - Exhaust gas pre-treatment apparatus for incineration treatment of non-degradable noxious gas and exhaust gas pre-treatment method using the same - Google Patents

Exhaust gas pre-treatment apparatus for incineration treatment of non-degradable noxious gas and exhaust gas pre-treatment method using the same Download PDF

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KR101657468B1
KR101657468B1 KR1020150010727A KR20150010727A KR101657468B1 KR 101657468 B1 KR101657468 B1 KR 101657468B1 KR 1020150010727 A KR1020150010727 A KR 1020150010727A KR 20150010727 A KR20150010727 A KR 20150010727A KR 101657468 B1 KR101657468 B1 KR 101657468B1
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South Korea
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gas
exhaust gas
reaction
pretreatment
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KR1020150010727A
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Korean (ko)
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KR20160090654A (en
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정종국
이기용
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주식회사 글로벌스탠다드테크놀로지
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Priority to KR1020150010727A priority Critical patent/KR101657468B1/en
Priority to PCT/KR2015/000764 priority patent/WO2016117735A1/en
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    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F23—COMBUSTION APPARATUS; COMBUSTION PROCESSES
    • F23G—CREMATION FURNACES; CONSUMING WASTE PRODUCTS BY COMBUSTION
    • F23G5/00—Incineration of waste; Incinerator constructions; Details, accessories or control therefor
    • F23G5/02—Incineration of waste; Incinerator constructions; Details, accessories or control therefor with pretreatment
    • F23G5/027—Incineration of waste; Incinerator constructions; Details, accessories or control therefor with pretreatment pyrolising or gasifying stage
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
    • B01D—SEPARATION
    • B01D47/00—Separating dispersed particles from gases, air or vapours by liquid as separating agent
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
    • B01D—SEPARATION
    • B01D53/00—Separation of gases or vapours; Recovering vapours of volatile solvents from gases; Chemical or biological purification of waste gases, e.g. engine exhaust gases, smoke, fumes, flue gases, aerosols
    • B01D53/32—Separation of gases or vapours; Recovering vapours of volatile solvents from gases; Chemical or biological purification of waste gases, e.g. engine exhaust gases, smoke, fumes, flue gases, aerosols by electrical effects other than those provided for in group B01D61/00
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
    • B01D—SEPARATION
    • B01D53/00—Separation of gases or vapours; Recovering vapours of volatile solvents from gases; Chemical or biological purification of waste gases, e.g. engine exhaust gases, smoke, fumes, flue gases, aerosols
    • B01D53/34—Chemical or biological purification of waste gases
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
    • B01D—SEPARATION
    • B01D53/00—Separation of gases or vapours; Recovering vapours of volatile solvents from gases; Chemical or biological purification of waste gases, e.g. engine exhaust gases, smoke, fumes, flue gases, aerosols
    • B01D53/34—Chemical or biological purification of waste gases
    • B01D53/74—General processes for purification of waste gases; Apparatus or devices specially adapted therefor
    • B01D53/75—Multi-step processes
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F23—COMBUSTION APPARATUS; COMBUSTION PROCESSES
    • F23G—CREMATION FURNACES; CONSUMING WASTE PRODUCTS BY COMBUSTION
    • F23G7/00—Incinerators or other apparatus for consuming industrial waste, e.g. chemicals
    • F23G7/06—Incinerators or other apparatus for consuming industrial waste, e.g. chemicals of waste gases or noxious gases, e.g. exhaust gases
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F23—COMBUSTION APPARATUS; COMBUSTION PROCESSES
    • F23G—CREMATION FURNACES; CONSUMING WASTE PRODUCTS BY COMBUSTION
    • F23G2204/00—Supplementary heating arrangements
    • F23G2204/20—Supplementary heating arrangements using electric energy
    • F23G2204/201—Plasma

Abstract

The present invention relates to an exhaust gas pretreatment apparatus for incinerating incombustible noxious gas and an exhaust gas pretreatment method using the pretreatment apparatus. More particularly, the present invention relates to a supply unit for supplying a noxious decomposable noxious gas; A pre-heating zone for increasing the decomposition reactivity of the noxious gas; An oxidant injector for injecting an oxidant to generate explosive gas and reaction by-product powder among the gases to be treated; An oxidizer reaction unit; And a plasma ignitor added to the reaction part; A reaction part in which a full decomposition reaction is performed; A quenching section for lowering the temperature of the treated gas; And a scrubber for collecting the byproducts. The present invention relates to an exhaust gas pretreatment apparatus for incineration of harmful noxious gas and a pretreatment method using the same.

Description

TECHNICAL FIELD [0001] The present invention relates to an exhaust gas pretreatment apparatus for an incineration process of harmful gases, and an exhaust gas pretreatment method using the pretreatment apparatus. BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to an exhaust gas pretreatment apparatus,

The present invention relates to a flue gas pretreatment apparatus and a pretreatment method for a refractory noxious gas, and more particularly, to a flue gas pretreatment apparatus and a flue gas pretreatment method for a flue gas, And a dust collecting part for collecting and collecting the by-product powder by using a droplet, and a pretreatment method for an exhaust gas using the same .

Recently, waste gas used in the semiconductor process, flat panel display (FPD), liquid crystal display (LCD) manufacturing process, or as a by-product after use has a great influence on the environment and global warming Are reported.

Particularly, there are NF 3 , SF 6 , PF 6 and N 2 O as the kinds of decomposable gases to be discharged, and silane, TEOS, DCS, WF 6 , TiCl 4 and SiF 4 And it is very corrosive and has very explosive gases such as F 2 , HF, Cl 2 , HCl, ClF 3 , NH 3 , BCl 3 , B 2 H 4 and PH 3 , DCS, WF 6, NH 3, H 2, B 2 H 4, CO, etc. in addition, contains oxygen (O 2), ozone (O 3), the argon inert gas (Ar), helium (he) or the like, Also, various kinds of organic noxious gases generated in various kinds of organic solvents such as acetone, methanol, trichlorethylene and the like which are mainly used in the washing process of the manufacturing process are also included and discharged. As such, various kinds of waste gases emitted from the above process contain highly stable compounds that decompose in the natural state from thousands to tens of thousands of years. Since the global warming index is from thousands to tens of thousands times that of carbon dioxide, As agreed in the Convention, future emissions are strictly limited.

Therefore, technologies for decomposing these gases are required to prevent air pollution caused by these waste gases and global warming. Typical processes for removing such refractory waste gas include an oxidation process such as combustion (Japanese Laid-Open Patent Publication No. 2006-17453), a chemical adsorption process (Korean Patent Publication No. 2003-0078949, and plasma 2008-259953), and the like.

Among them, the oxidation process such as the combustion is usually carried out by heating to a predetermined temperature or higher and then decomposing and discharging it as a harmless gas, or heating and then mixing with another gas to precipitate in powder form. In the case of water- And is recovered and discharged. Among them, the plasma method is widely used for the decomposition and removal of the degradable waste gas. However, the conventional plasma removing technique for the refractory gas is a technique using a plasma torch having a very high temperature. Hundreds of LPM Consumes several tens of kilowatts of power to process the waste gas of a flat panel display (FPD). In a flat panel display (FPD) manufacturing process, the amount of exhaust gas increases to 2500 LPM depending on the case, It is consumed.

All of the above-mentioned waste gas treatment methods are required to heat and decompose the refractory gas. Until now, a plasma arc torch has been used or a direct heating method using a heater has been used. (Korean Patent Publication No. 10-0619237). However, the method of using the heater is relatively inefficient because the electrode has a short life span due to the high temperature and the plasma discharge, Although it has an advantage of being able to treat gas at low cost, it has a drawback (Korean Patent Laid-Open Publication No. 2009-0041880) that it is not easy to treat the waste gas at a high temperature because an indirect heating method using a heater is used. Particularly, a poorly decomposable gas such as PFCs in the waste gas can be decomposed at a temperature of 900 ° C or higher, and it is difficult to heat and maintain the decomposition gas directly to the decomposition temperature.

An object of the present invention is to provide an exhaust gas pretreatment apparatus for incinerating incombustible noxious gas and an exhaust gas pretreatment method using the pretreatment apparatus to increase decomposition reactivity of noxious gas An oxidant injector for increasing the temperature of the waste gas in the pre-heating zone and injecting an oxidant to generate explosive gas and reaction by-product powder in the gas to be treated; An oxidizer reaction unit; And a plasma ignitor added to the reaction part; A reactor in which a full decomposition reaction takes place; A quenching section for lowering the temperature of the treated gas; And a scrubber for collecting reaction byproducts. The present invention also provides a flue gas pretreatment method and apparatus for incineration of noxious harmful gas.

Another problem to be solved by the present invention is to provide a method for pretreating a refractory exhaust gas without explosion by providing continuous ignition by using a plasma igniter in order to prevent a risk of explosion of explosive noxious gas.

In order to accomplish the above object, the present invention provides an exhaust gas pretreatment apparatus for incinerating harmful noxious gas, comprising: an exhaust gas inlet through which a noxious gas is introduced at one end; Oxidant input; A plasma ignitor; A reactor; A quenching section; And an exhaust gas scrubber for decomposing the exhaust gas.

A pre-heating zone may be additionally provided between the exhaust gas inlet and the oxidant inlet.

The preheating zone may be heated at a temperature ranging from 100 to 600 ° C.

A safety device for suppressing a rapid oxidation reaction may be added to the oxidant input part.

At least one oxidizing agent selected from oxygen (O2) or moisture may be added to the oxidant input portion.

The reaction unit may be a chamber structure.

The chamber may form a water film forming portion and inhibit clogging of the reaction-generated powder in the chamber.

The scrubber may be a wet scrubber.

At least one droplet selected from a sparge nozzle, a fogjet nozzle and a spray pyrolysis may be formed on the upstream side of the dust collecting part to aggregate reaction by-products.

The plasma ignitor is composed of at least one plasma ignition part, and the flame is composed of any one or more selected from the longitudinal and transverse directions, and may be overlapped or parallel.

The mixing conditions of the oxidizer mixer and the flue gas may be in the form of one or more of T type, Swirl type, or cyclic type mixing.

The plasma ignition part may be replaced with any one of an electric heater, a combustible gas igniter, a combustible liquid fuel igniter, a combustible solid fuel igniter, an ignition coil, an ignition plug, and a preheating plug.

Also, there is provided a method for pretreating an exhaust gas for incinerating harmful noxious gases, comprising the steps of: supplying an exhaust gas through an exhaust gas inlet provided at one end of a pretreatment apparatus; Introducing an oxidizing agent into the supplied exhaust gas; Reacting the oxidant and the flue gas inside the reactor; A cooling step of lowering the temperature of the reacted exhaust gas; And collecting by-products of the cooled flue-gas. The present invention also provides a flue gas pretreatment method for incineration of noxious gas.

And a step of additionally including a pre-heating zone between the exhaust gas inlet and the oxidizer inlet, wherein the exhaust gas passes through a pre-heating zone and is heated.

The temperature can be raised in the range of 100 to 600 ° C in the pre-heating zone.

The oxidant injector may use a safety device for suppressing a rapid oxidation reaction.

The safety device may be a plasma ignitor.

At least one oxidizing agent selected from oxygen (O 2 ) or moisture may be added to the oxidizing agent supplying step.

The reaction part can be reacted in a chamber structure.

In the reaction chamber, a water film forming part is formed and the reaction-generated powder is prevented from clogging in the chamber.

The dust collecting part may use a wet dust collecting part.

At least one selected from a spar nozzle, a fog jet nozzle and a spray pyrolysis may be used in front of the dust collecting part to collect droplets of the reaction by-products to collect dust.

The present invention also provides an exhaust gas treating apparatus comprising the above-described exhaust gas pretreatment apparatus.

Also, the present invention provides an exhaust gas treating method characterized by using the exhaust gas pretreatment method described above.

As described in detail above, the exhaust gas pretreatment apparatus and the pretreatment method of the present invention are characterized in that after the waste gas is heated through the preliminary heat treatment, the solid reaction by-products generated by the mixing reaction of the oxidizer and the waste gas and the thermal decomposition by the plasma igniter, It is effective to agglomerate into droplets to be generated and to perform a dust collection process in the dust collecting part, thereby increasing the decomposition rate and decomposition efficiency as the decomposition reactivity is increased through the preliminary heat treatment.

1 is a schematic view of an exhaust gas pretreatment apparatus of the present invention.
2 is a flue gas pretreatment method using the flue gas pretreatment apparatus of the present invention.

In the pretreatment reaction for the incombustible waste incineration waste, the present invention has the following characteristics. In the pretreatment reaction for the incombustible waste incineration, the pyrolysis rate and the pyrolysis rate are determined by passing through a pre-heating zone immediately before the off- The temperature of the waste gas is heated to 100 to 600 DEG C and supplied. Generally, the decomposing waste gas is decomposed at a temperature of 900 ° C or higher, but it is preferable to increase the reaction activity of the waste gas by adding a pretreatment section in order to increase decomposition rate and decomposition efficiency.

Before describing the preferred embodiments of the present invention, the present invention relates to a pretreatment apparatus and a pretreatment method for treating a refractory gas, wherein refractory gases include NF 3 , SF 6 , PF 6 , and N 2 O, or a mixture thereof. The silane, TEOS, DCS, WF 6 , TiCl 4 , and SiF 4 generated in the process and emitted are highly corrosive and highly toxic. with F 2, HF, Cl 2, HCl, ClF 3, NH 3, BCl 3, B 2 H 4, PH 3 as the very large silane (silane) is explosive, TEOS, DCS, WF 6, NH 3, H 2, B 2 H 4, CO, etc. in addition, oxygen (O 2), ozone (O 3), an inert gas of argon (Ar), helium (he) either one, or can be mixtures thereof of, but are not mentioned in the Other waste gases are also included in the scope of the present invention.

Hereinafter, preferred embodiments of the present invention will be described in detail with reference to the accompanying drawings.

FIG. 1 is a schematic view showing an exhaust gas pretreatment apparatus according to a preferred embodiment of the present invention, and FIG. 2 is an embodiment for a flue gas pretreatment method using an exhaust gas pretreatment apparatus according to the present invention.

According to the present invention, a preferable structure and structure of a pretreatment apparatus for pretreatment of flue-gas are as follows.

First, the waste gas supplied along the pipe is supplied to the pretreatment apparatus 10, the front end heat treatment unit 20, the oxidant input unit 30, the plasma igniter 40, the mixing-reaction unit 50, the reactor 60 ), A cooler (70), a mist jet nozzle (80), and a dust collecting part (90).

The waste gas supplied through the supply unit 10 passes through the shearing heat treatment unit 20 and is heated to increase the pyrolysis reaction efficiency. At this time, the front end heat treatment unit 20 is equipped with a plurality of heaters on the inner side and the outer side, so that the waste gas directly contacts to increase the thermal efficiency, thereby improving the decomposition efficiency of the waste gas. That is, conventionally, the waste gas is directly pyrolyzed by radiant heat, but in the present invention, the heated waste gas is heated in the shearing heat treatment unit to increase the decomposition efficiency and the decomposition rate in order to increase the pyrolysis efficiency.

The shearing heat treatment unit 20 may utilize an independent heat source and may also recover waste heat generated in the mixing-reaction unit 50 and the reactor 60 and use it for heating. In terms of efficient energy utilization, it is preferable to use a hybrid type of waste heat recovered together with an independent heat source.

The oxidizing agent is introduced into the heated waste gas through the oxidizing agent input unit 30 and mixed with the oxidizing agent and the waste gas in the mixing-reaction unit 50 which decomposes the waste gas using the flame through the plasma igniter. In addition, the flame generated in the plasma igniter decomposes the preheated waste gas and further improves the stability of the waste gas decomposition treatment system by decomposing the explosive waste gas in advance. The plasma ignitor is composed of at least one plasma ignition part, which is preferable from the viewpoint of pyrolysis efficiency. It is preferable that the flame generated in the ignition part is composed of at least one selected from longitudinal and transverse directions, And is generated in the flow direction of the flue gas. The plasma ignition part may be replaced with any one of an electric heater, a combustible gas igniter, a combustible liquid fuel igniter, a combustible solid fuel igniter, an ignition coil, an ignition plug, and a preheating plug.

The oxidizing agent supply unit supplies oxidizing agent or moisture capable of promoting oxidation. As the oxidizing agent, at least one selected from oxygen (O 2 ) and moisture may be used, and waste gas and fuel gas may be supplied at the same time. It is to be understood that a gas having a different flammability as the fuel gas and also another gas for inducing the oxidation reaction of the fuel as the oxidizing agent can be applied respectively, and the waste gas and the oxidizing agent can be introduced sequentially or simultaneously . It is preferable that the mixing conditions of the oxidizer mixer and the flue gas are composed of one or more mixing types selected from T type, Swirl type, or cyclic mixing.

The reactor 60, in which the waste gas mixed in the mixing-reaction unit 50 is fully decomposed, can be designed to have a chamber structure in which gases can react and a water film can be formed therein. It is possible to prevent the generated solid reaction product (powder) from accumulating inside the chamber.

The high-temperature waste gas thus treated passes through the cooling section 70 and lowers the temperature. The cooling unit 70 may be provided in a water-cooled or air-cooled manner, and a cooling plate may be installed therein to form a flow path of the combustion gas.

The reaction waste gas cooled at the predetermined temperature may be a device capable of forming at least one droplet selected from a spar nozzle, a fogjet nozzle, and a spray pyrolysis device before being supplied to the scrubber unit. Thereby aggregating the fine solid reaction product.

The solid reaction product generated in the reactor 60 and the acid as a reaction byproduct are collected in the dust collector 90. The dust collecting part 90 may be equipped with a filter capable of screening solid reaction byproducts, and may also be constituted by a wet scrubber. The waste gas decomposition apparatus according to the present invention converts a fluorine-based gas into a by-product gas which is easily dissolved in water. For example, fluorine (F) is converted to hydrofluoric acid (HF) which is soluble in water in combination with hydrogen. Therefore, the solid reaction by-product generated in the reactor and the waste gas that is easily dissolved in water can be simultaneously removed from the dust collecting unit 90.

Referring to FIG. 2, an exhaust gas pretreatment method using the exhaust gas pretreatment apparatus includes: (S1) supplying exhaust gas into a pretreatment apparatus for waste gas treatment; A step (S2) of raising the temperature of the waste gas through heating in the shearing heat treatment section; Introducing an oxidizing agent to induce a reaction (S3), and inducing a reaction using a plasma igniter (S4); Performing a combustion reaction inside the reactor (S5); A step (S6) of cooling the waste gas passing through the cooler after the reaction; And collecting the reaction product (S7).

The heat generated in the plasma igniter and the reactor may be recovered from the waste heat for heating in the preheating section.

The kind of the oxidizing agent is not specifically defined in the step of injecting the oxidizing agent into the oxidizing agent (S3). The oxidizing agent may be at least one selected from the group consisting of oxygen (O 2 ) and moisture, May be supplied at the same time. It is to be understood that a gas having a different flammability as the fuel gas and another gas for inducing an oxidation reaction of the fuel as the oxidizing agent can be applied, respectively, and the waste gas and the oxidizing agent can flow into each other sequentially or simultaneously .

In the dust collecting step (S7) for collecting the reaction product, the solid reaction byproduct and the waste gas dissolved in water can be separated by dissolving in water. A droplet selected from a spray nozzle, a fog jet nozzle, and a spray pyrolysis device, which is a device capable of spraying droplets at the front end of the dust collecting step S7, The fine powder can be separated by agglomeration in droplets.

10: Inflow section 20: Shearing heat treatment section
30: oxidizer input unit 40: plasma ignition unit
50: mixing and reacting part 60: reactor
70: cooling unit 80: mist generating unit
90: Dust collector

Claims (24)

An exhaust gas pretreatment apparatus which does not supply fuel for incinerating harmful noxious gases, comprising: an exhaust gas inlet through which a noxious gas is introduced at one end; Oxidant input; A plasma ignitor; A reactor; A quenching section; And a scrubber section,
Further comprising a pre-heating zone between the flue gas inlet and the oxidant inlet,
The preheating zone is heated in a temperature range of 100 to 600 ° C,
Wherein the oxidant input unit is provided with a safety device for suppressing a rapid oxidation reaction,
Wherein at least one oxidizing agent selected from oxygen (O2) and moisture is added to the oxidant input portion,
The reactor is a chamber structure,
Wherein the chamber is formed with a water film forming portion to inhibit clogging of the reaction-generated powder in the chamber, wherein the chamber is provided with no fuel supply for incineration of noxious gas.
delete delete delete delete delete delete 2. The apparatus of claim 1, wherein the scrubber is a wet scrubber.
The method according to claim 1, wherein one or more droplets selected from a spray nozzle, a fogjet nozzle, and a spray pyrolysis are formed on the upstream side of the dust collecting part to aggregate reaction by- Free flue gas pretreatment device.
The plasma igniter according to claim 1, wherein the plasma ignitor comprises at least one plasma igniter, and the flame is composed of at least one selected from the longitudinal and transverse directions, and is overlapped or parallel. Flue gas pretreatment device without fuel supply.
2. The exhaust gas pretreatment apparatus according to claim 1, wherein the mixing condition of the oxidant input part and the flue gas is composed of one or more mixing types selected from T type, Swirl type, .
2. The fuel supply system according to claim 1, wherein the plasma ignition part is replaced with any one of an electric heater, a combustible gas igniter, a combustible liquid fuel igniter, a combustible solid fuel igniter, an ignition coil, an ignition plug, No flue gas pretreatment device.
A method for pretreating an exhaust gas without the supply of fuel for incinerating harmful noxious gases, comprising the steps of: supplying an exhaust gas through an exhaust gas inlet installed at one end of a pretreatment apparatus; Introducing an oxidizing agent into the supplied exhaust gas; Reacting the oxidant and the flue gas inside the reactor; A cooling step of lowering the temperature of the reacted exhaust gas; Collecting by-products of the cooled flue-gas,
Further comprising a pre-heating zone between the flue gas inlet and the oxidant inlet,
Wherein the exhaust gas passes through a pre-heating zone and is heated,
Heating is carried out in a temperature range of 100 to 600 ° C in the pre-heating zone,
The step of injecting the oxidizing agent uses a safety device for suppressing a rapid oxidation reaction,
Wherein at least one oxidizing agent selected from the group consisting of oxygen (O2) and moisture is added to the oxidizing agent,
The reactor reacts in a chamber structure,
Wherein the chamber is formed with a water film forming part to inhibit clogging of the reaction-generated powder in the chamber, wherein the powder is pretreated with no fuel supply for incineration of harmful gas.
delete delete delete 14. The method according to claim 13, wherein the safety device uses a plasma ignitor.
delete delete delete 14. The method according to claim 13, wherein the dust collecting step uses a wet dust collecting part.
22. The method of claim 21, wherein droplets are formed by using at least one selected from the group consisting of a spar nozzle, a fogjet nozzle, and a spray pyrolysis in front of the wet dust collector to aggregate the reaction by- A pretreatment method of flue gas without supply of fuel.
The exhaust gas treatment apparatus according to any one of claims 1 to 9, characterized by comprising an exhaust gas pretreatment apparatus according to any one of claims 1 to 8.
A method for treating a flue-gas-free fuel, characterized by using an exhaust gas pretreatment method according to any one of claims 13, 17, 21-22.
KR1020150010727A 2015-01-22 2015-01-22 Exhaust gas pre-treatment apparatus for incineration treatment of non-degradable noxious gas and exhaust gas pre-treatment method using the same KR101657468B1 (en)

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KR1020150010727A KR101657468B1 (en) 2015-01-22 2015-01-22 Exhaust gas pre-treatment apparatus for incineration treatment of non-degradable noxious gas and exhaust gas pre-treatment method using the same
PCT/KR2015/000764 WO2016117735A1 (en) 2015-01-22 2015-01-23 Flue gas pretreatment apparatus for incineration of non-biodegradable harmful gases, and flue gas pretreatment method using said pretreatment apparatus

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Citations (1)

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Publication number Priority date Publication date Assignee Title
KR101405166B1 (en) * 2013-05-15 2014-06-10 주식회사 케이피씨 Hybrid scrubber system

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JP3733631B2 (en) * 1995-11-28 2006-01-11 株式会社村田製作所 Exhaust gas treatment equipment
JP4497726B2 (en) * 1998-12-01 2010-07-07 株式会社荏原製作所 Exhaust gas treatment equipment
KR20110117753A (en) * 2010-04-22 2011-10-28 주식회사 뉴프로테크 Gas scrubber

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* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
KR101405166B1 (en) * 2013-05-15 2014-06-10 주식회사 케이피씨 Hybrid scrubber system

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