KR20100121968A - Non-incineration pyrolysis treatment system using steam plasma for pollution materials - Google Patents

Abstract

PURPOSE: A malignancies contaminant pyrolysis treatment device using steam plasma is provided to supply direct current of an electronic device in a plasma torch unit and supply the steam, thereby generating the plasma plume of smooth high temperature. CONSTITUTION: The steam of a steam generator(5') is discharged through a steam supply pipe(5). The steam plasma of the high temperature is generated in the plasma generating room(2). The malignancies contaminant is inserted to the malignancies contaminant injection pipe(9). The steam plasma and malignancies contaminant are mixed in a mixing chamber(2') of the malignancies contaminant. The steam reacts with the oxygen and hydrogen. The steam is disassembled into the hydrogen and OH group. In the reaction chamber(2"), the malignancies contaminant is purified into the stabilized gas.

Description

Non-incineration pyrolysis treatment system using steam plasma for pollution materials}

The present invention relates to a pyrolysis treatment apparatus for malignant pollutants using steam plasma, and more particularly, a steam coming from a steam supply pipe to a plasma generation chamber, a mixture chamber of malignant pollutants, and a reaction chamber of a long type plasma torch. By sending (steam), in the mixing chamber and reaction chamber of malignant pollutants, water vapor reacts with oxygen and hydrogen, is decomposed into hydrogen (H) and Oechi (OH group), and the malignant pollutants injected into the mixing chamber are oxygen (O _2). The malignant pollutants are dioxin by rapidly cooling by purifying the solids in the exhaust gas storage tank by pumping them into a stable gas such as hydrogen fluoride carbon dioxide (CO ₂ ) and pumping them. ) And the gas in the treated gas exhaust chamber is sprayed to the lower part of the water distributor of the gas exhaust tank by the pump. W is one to provide the malicious contamination thermal decomposition treatment apparatus using a steam plasma discharge for removal of acidic material.

Among the pollutants in the air generated by modern industry, harmful gases such as malignant toxic gases are very difficult to deal with and therefore require special plasma technology to treat them.

In general, the known nitrogen gas use technology has been widely used because the plasma torch of the anode and the cathode which are the cathode and the anode can be used for a long time, but due to the stabilized nature of nitrogen, the treatment of pollutants is not complete. There has been a limit. This requires a high temperature pyrolysis step to treat harmful gases such as poison gas, and decomposes poison gas by adding hydrogen oxide groups (OH-radicals) to stabilize it with hydrogen fluoride, hydrogen chloride, and carbon dioxide (CO ₂ ). However, the treatment of malignant pollutants in the nitrogen gas plasma treatment facility has not been completed and there are limitations.

In addition, Korean Laid-Open Patent Publication No. 97-2102 Application No. 95-17246 has been disclosed as an incinerator of malignant gas and waste oil and waste solid by industrial plasma.

It is connected to the injection tube that injects the continuous catalyst of oxygen (O ₂ ) ammonia into the reaction chamber composed of plasma torch, but it supplies oxygen to the reaction chamber to burn contaminated malignant substance. Since only the material is oxidized, the treatment efficiency is low, and the negative (-) group of pollutants such as chlorine and fluorinated, etc. are difficult to process and have limitations, and the cost of treatment is expensive.

Therefore, the object of the present invention was devised to solve the above conventional problems, the plasma torch (plasma torch) inside the plasma generating chamber, the mixing chamber and reaction chamber of malignant pollutants mixed with plasma and malignant pollutants As it gradually connects from top to bottom, the water vapor introduced into the plasma generating chamber reacts with oxygen and hydrogen, and is decomposed into hydrogen (H) and Oechi (OH group), so that hydrogen (H) is negatively polluted. It reacts with the substance and the Oechi (OH group) reacts with the positive (+) group pollutant to stabilize, so that the pyrolysis treatment of the malignant pollutant is made smoothly and efficiently.

In addition, another object of the present invention is to install a water spray pipe in the reaction chamber of the plasma torch unit by supplying the cold water in the exhaust gas storage tank to the pump to spray untreated air pollutants from the plasma reaction chamber from the water spray pipe The purpose of the present invention is to provide rapid cooling, thereby preventing the formation of dioxin poisons (furans) and improving the treatment function.

Another object of the present invention is to supply the acidic substances from the reaction chamber through the circulation pipe from the gas discharge chamber into the exhaust gas tank to spray spraying treatment with the sprayer, so that the remaining acidic substances such as ammonia can be removed and exhausted through the exhaust pipe. The purpose of the present invention is to make the exhaust gas safer.

In order to achieve the above object, the present invention comprises a mixture chamber and a reaction chamber of plasma generating chamber malignant contaminants in a long body of the plasma torch anode (+) body, and a cathode (-) rod and a lower position on the plasma generating chamber. The argon gas discharge pipe and the steam supply pipe are combined, and the reaction chamber is connected with a water spray pipe for supplying and spraying the cold water of the exhaust gas storage tank to the pump to spray water into the reaction chamber, and to the upper portion of the exhaust gas storage tank. Inside the connected exhaust gas cylinder, a gas injection pipe is installed to supply and discharge the exhaust gas from the gas discharge chamber with a pump. It is possible to provide a pyrolysis treatment apparatus for malignant pollutants using steam plasma.

As described above, the apparatus for pyrolysis of malignant pollutants using the steam plasma of the present invention is composed of a mixture chamber 2 'and a reaction chamber 2' of a plasma generating chamber 2 malignant pollutants inside the plasma torch anode (+) body 1, In addition to forming a gradual structure below, by supplying the direct current of the electric device to the plasma torch unit 16 and supplying steam to it, it is possible to generate a smooth high temperature plasma plume and the upper part of the plasma generating chamber 2 The argon gas discharge pipe 4 and the steam supply pipe 5 for discharging the argon gas at the lower portion thereof and the negative electrode rod 3 disposed at the lower portion thereof are kept at the start of the cathode rod 3 underneath the cathode rod 3. Due to the high temperature of the steam and the plasma discharged from the steam supply pipe 5 supplied from the steam generator 5 ', it is prevented from severe corrosion and deformation. It is safe to operate, can be used for a long time, and the steam (steam) discharged from the steam supply pipe 5 supplied from the steam generator 5 'generates high temperature steam plasma with DC electricity in the plasma generating room 2 and injects harmful pollutants. The malignant pollutants in the air injected through the tube (9) and the high temperature steam plasma are continuously mixed well in the mixing chamber 2 '. In addition, steam (vapor) is discharged into the reaction chamber 2 "'. Reacts with hydrogen and decomposes into hydrogen (H) and Oechi (OH group) to stabilize malignant contaminants by reacting with negative (-) contaminants and Oechi (OH) is positive (+) As it stabilizes by reacting with existing pollutants, pyrolysis treatment of malignant pollutants is smooth and efficient.

In addition, the present invention is the exhaust gas reacted and decomposed above the circulation of cold water in the exhaust gas storage tank 6 to the pump 10 through a water injection pipe 7 consisting of a pump 10 and a connection pipe installed between the gas discharge chamber 12 and the reaction chamber 2 "'. Water spray in the water spray pipe 7 so that the poisonous gases such as dioxin and furans, which can be generated during the reaction in the reaction chamber 2, are rapidly regenerated by water spray treatment. Because of the constitution, it is possible to completely and efficiently treat the pyrolysis treatment of malignant pollutants. Also, the exhaust gas of the gas discharge chamber 12 configured in the lower portion of the reaction chamber 2 " The gas spray pipe 8 is installed and configured so that the upper sprayer 14 is sprayed and sprayed to remove and discharge acidic substances once more by spraying. The gas is absorbed well in water, such as ammonia, which may remain in the temperature controlled exhaust gas of the gas, so that it can be treated more safely, and there is an advantage that it can be operated at low cost.

Processing efficiency

The malignant pollutant gas generated in the semiconductor production process using the malignant pollutant pyrolysis treatment apparatus using the steam plasma of the present invention obtained the following good results.

Total amount of malicious polluted gas injected: 288.5 SLM

Plasma Torch Power Consumption: 16kw

Steam supply: 1㎥ per hour

Argon Gas Supply: 0.7ℓ / m

Processing result

Type of gas
Post-Constitutional Pollutants (PPM)


Processing efficiency (%)
Slot

outlet
SP6
C ₂ F ₆
CF ₄
HF
HCℓ

1674
1294
416
210
324
3.28
1.81
4.49
0.16
0.01
99.74
99.80
98.35
99.70
99.99

Hereinafter, exemplary embodiments of the present invention will be described in detail with reference to the accompanying drawings.

First, in the drawings, the same components or parts are to be noted that the same reference numerals as possible. In describing the present invention, detailed descriptions of related well-known functions or configurations are omitted in order not to obscure the subject matter of the present invention.

Figure 1 is an enlarged cross-sectional view of the plasma torch portion of the present invention, Figure 2 is a plan sectional view of the argon gas discharge pipe and the cathode rod portion in the present invention, Figure 3 is a plan sectional view of the steam supply pipe portion in the present invention, Figure 4 Is a cross-sectional view showing the overall configuration of the present invention.

The present invention is composed of a long chamber type plasma torch anode (+) body 1, a mixing chamber 2 'of a plasma generating chamber 2 and a reaction chamber 2 "reacting with a malicious pollutant and a high temperature plasma. In addition, a cathode rod 3 and an argon gas discharge pipe 4 for protecting the inner surface of the plasma generating chamber 2 are connected to a cathode rod 3 and an argon gas cylinder 4 'at a lower position in the upper portion of the plasma generating chamber 2 space. The steam supply pipe 5 which is installed and connected to receive steam (steam) from the steam generator 5 'is combined together.

In the above argon gas discharge pipe 4, since the argon gas is continuously discharged during operation, it is configured to prevent severe corrosion and deformation in the cathode (-) rod 3 and the plasma generating chamber (2) due to steam during operation, and to be able to be treated safely.

In addition, the plasma torch anode (+) body 1 and the cathode (-) rod (3) are formed in the body of the plasma torch anode (1) body 1 so as to circulate water for continuous cooling. Plasma torch unit 16 consisting of a) to supply the direct current to the electric device not shown, so that the body caused by the high temperature (2000 ℃ or more) to cool.

On the exhaust gas storage tank 6 in the lower part of the apparatus of the present invention, the exhaust pipe 11 and the exhaust pipe 17 which are exhausted by the pump 10 "are connected, and the gas exhaust chamber 12 is able to communicate with the lower part of the exhaust gas cylinder 11 on the lower side of the exhaust gas cylinder 11. The decomposition gas is exhausted to the gas discharge chamber 12 by the reaction of pyrolysis in the reaction chamber 2 ", and the exhaust gas of the gas discharge chamber 12 is pump 10 'through the circulation pipe 13 to the gas injection pipe 8 in the exhaust gas cylinder 11 By controlling the sprinkling of the upper sprinkler 14 and by sprinkling of the upper sprinkler 14, by controlling the temperature of the exhaust gas and the remaining and sprinkling of the exhaust gas, Acidic substances such as ammonia that may remain in the water are configured to be sprayed.

The pump 10 " installed in the exhaust pipe 17 is for exhausting the treated exhaust gas in the exhaust gas cylinder 11.

In addition, the malignant pollutant injection pipe 9 is installed in the mixing chamber 2 'of malignant pollutants connected from the outside to the inside, and is configured to inject malignant pollutants to be treated.

The present invention is a high-temperature (2000 ℃ or more) by supplying a direct current (not shown) to the electric device not shown in the conventional method to the plasma torch unit 16 consisting of a plasma torch anode (+) body 1 and a cathode (-) rod 3 as described above In addition, the steam supplied from the steam generator 5 'comes out through the steam supply pipe 5, so that the high temperature steam plasma is generated in the plasma generating chamber 2. At this time, when the malignant pollutant generated in the air and a specific place is injected into the malignant pollutant injection tube 9, the mixing chamber 2 'of the malignant pollutant is mixed with the hot steam plasma generated above. That is, steam (water vapor) reacts with oxygen and hydrogen, and is decomposed into hydrogen (H) and Oechi (OH group), and in the reaction chamber 2 ", malignant pollutants are stable such as hydrogen fluoride or carbon dioxide (CO ₂ ). These reactions require oxygen, hydrogen and Oechichi (OH) to treat poisonous gases and malignant pollutant gases that contain toxic gases and are hazardous to steam plasma flames with temperatures of 2000 ° C or higher. By adding malignant pollutants, which are gases, polymers of poison gas or poison gas components are decomposed into monomolecular substances, and oxygen and hydrogen combine to generate carbon monoxide, carbon dioxide, hydrogen chloride, and hydrogen fluoride. connection between the exhaust gas storage tank 6 and the reaction chamber 2 "to prevent regeneration into dioxin, furans and other poisonous gases. It was rapidly cooled using a water jet as connect mulbun Academy 7 been carried out repeatedly the process made a complete decomposition treatment.

When the discharged gas treated above is discharged into the gas discharge chamber 12, the processing gas implemented above is sent to the exhaust gas cylinder 11 through the circulation pipe 13 and the gas injection pipe 8 connected between the gas discharge chamber 12 and the exhaust gas cylinder 11. It is sprayed and sprinkled with the water sprinkler of the sprinkler 14 in the gas cylinder 11 and exhausted to the atmosphere by the pump 10 "of the exhaust pipe 17.

As described above, the present invention can smoothly and continuously carry out pyrolysis treatment based on high temperature steam plasma at malignant pollutants in the place of harmful poisonous gas or malignant harmful gas in the air, so that the treatment efficiency is excellent and the operation cost is low. There is a number.

The present invention described above is not limited to the above-described embodiment and the accompanying drawings, and various substitutions, modifications, and changes are possible within the scope without departing from the technical spirit of the present invention. It will be evident to those who have knowledge of.

1 is an enlarged cross-sectional view of a plasma torch portion of the present invention.

Figure 2 is a plan sectional view of the argon gas discharge pipe and the cathode rod portion in the present invention.

Figure 3 is a plan sectional view of a steam supply pipe portion in the present invention.

Figure 4 is a cross-sectional view showing the overall configuration of the present invention.

Explanation of symbols on the main parts of the drawings

1: plasma torch anode (+) body 2: plasma generating chamber

2 ': Mixing chamber of malignant pollutants 2 ": Reaction chamber

9: malignant pollutant injection pipe 3: cathode (-) rod

4: argon gas discharge pipe 5: steam supply pipe

6: exhaust gas storage tank 7: water spray pipe

8: gas injection pipe 10, 10 ', 10 ": pump

11: exhaust gas cylinder 12: gas discharge chamber

13: circulation tube

Claims (1)

In the long type plasma torch anode (+) body 1 is composed of a plasma generating chamber 2 mixed chamber 2 'and reaction chamber 2 "of malignant pollutants, Malignant contaminant injection tube 9 is installed in the mixing chamber 2 "to mix plasma and malignant contaminants, A combination of the cathode (-) rod 3 and the argon gas discharge pipe 4 and the steam supply pipe 5 at the lower portion of the plasma generating chamber 2, A water spray pipe 7 connected to the reaction chamber 2 "to supply and spray the cold water from the exhaust gas storage tank 6 to the pump 10, Malicious pollution using steam plasma, characterized in that the gas injection pipe 8 is installed in the exhaust gas cylinder 11 to the exhaust gas of the gas discharge chamber 12 formed in the lower part of the reaction chamber 2 back to the circulation pipe 13 for injection Material pyrolysis treatment device.

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