KR101656883B1 - Optical arrangement - Google Patents
Optical arrangement Download PDFInfo
- Publication number
- KR101656883B1 KR101656883B1 KR1020100023687A KR20100023687A KR101656883B1 KR 101656883 B1 KR101656883 B1 KR 101656883B1 KR 1020100023687 A KR1020100023687 A KR 1020100023687A KR 20100023687 A KR20100023687 A KR 20100023687A KR 101656883 B1 KR101656883 B1 KR 101656883B1
- Authority
- KR
- South Korea
- Prior art keywords
- optical element
- bearings
- optical
- axis
- mounting body
- Prior art date
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Classifications
-
- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B7/00—Mountings, adjusting means, or light-tight connections, for optical elements
- G02B7/02—Mountings, adjusting means, or light-tight connections, for optical elements for lenses
- G02B7/026—Mountings, adjusting means, or light-tight connections, for optical elements for lenses using retaining rings or springs
-
- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B7/00—Mountings, adjusting means, or light-tight connections, for optical elements
- G02B7/006—Filter holders
-
- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B7/00—Mountings, adjusting means, or light-tight connections, for optical elements
- G02B7/008—Mountings, adjusting means, or light-tight connections, for optical elements with means for compensating for changes in temperature or for controlling the temperature; thermal stabilisation
-
- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B7/00—Mountings, adjusting means, or light-tight connections, for optical elements
- G02B7/02—Mountings, adjusting means, or light-tight connections, for optical elements for lenses
- G02B7/028—Mountings, adjusting means, or light-tight connections, for optical elements for lenses with means for compensating for changes in temperature or for controlling the temperature; thermal stabilisation
Abstract
An optical element 12 having at least one symmetry axis 20 that is non-rotationally symmetric with respect to the optical axis 18 and is perpendicular to the optical axis 18 and the optical element 12 for the optical element 12 An optical device having a mounting body (24) having at least three bearings (26,28, 30) fixed thereon, the bearings (26,28,30) being moveable relative to the mounting body (24) Each of the bearings (26,28, 30) is each movable only along a linear motion (40,42,44), and each of the bearings (26,28,30) , 44) intersect at an intersection (46) lying on the axis of symmetry (20).
Description
The present invention relates to an optical device having an optical element which is not rotationally symmetric with respect to an optical axis but has at least one symmetry axis perpendicular to the optical axis.
Without being limited to a general idea, the optical device according to the present invention can be used in a wide range of applications, such as, but not limited to, an optical system that uses a beam of light of a high light intensity, such as a laser beam, which is greatly expanded in one dimension from the original square beam cross- Lt; / RTI > In other words, this laser beam is imaged in a very thin and long linear shape (linear focusing). The dimensionality of the long and short dimensions of the linear focus can be greater than 100000: 1. Such optical systems are used, for example, in laser induced thin film crystallization of flat panel displays.
In such an optical system used for imaging a ray in a linear focusing, an optical device having a non-rotationally symmetric optical element is required. Conventionally, cylindrical lenses or cylindrical lens arrays are used as optical elements.
These non-rotationally symmetric optical elements have at least one axis of symmetry that is perpendicular to the optical axis, which is formed by an axis parallel to the vertex line of the (partially) cylindrical side of the lens in the case of a cylindrical lens And perpendicular to the optical axis.
For example, when an optical device is used for laser induced thin film crystallization and involves a laser light intensity in the range of 1 kW or more, high heat is generated in the optical element even with a slight absorption. Such heat causes the expansion of the optical element, resulting in aberration and deterioration of the image formation. This thermal expansion is problematic especially when, as in the present case, the optical element is non-rotationally symmetric and has at least one symmetry axis perpendicular to the optical axis. In particular, the thermal expansion can have the effect that, for example, in the case of a cylindrical lens, the optical axis, which is a vertex, is moved, for example, as it is rotated about the optical axis, resulting in the optical element causing aberration.
For this reason, the mounting portion of the optical element is required so that the optical element is held at the correct position even in a given thermal expansion. It is also contemplated herein that the mounting portion, which is typically made of metal, is also heated during operation and may exert a force on the optical element due to its thermal expansion, which may cause stress to the optical element, thereby worsening the optical imaging characteristics of the optical element .
In the case of an optical device having a rotationally symmetric optical element, for example as a rotationally symmetrically mounted body for holding an optical element for the purpose of mounting a rotationally symmetric optical element with a reduced stress at a stable position, The use of a rotationally symmetrically mounted body which supports optical elements on three support points in a housing is known from DE 10 2006 060 088 A1. At the point of support, the mounting body tangentially holds against the circumference of the optical element through the connection points and has radially resiliently configured nets or plate springs. The nets are movable in a radial direction along a straight line that intersects the optical axis.
However, in the case of the rotationally symmetric optical element, the distortion of the optical element with respect to the optical axis does not have a problem causing the image forming characteristic of the optical element to deteriorate, because the optical element is rotationally symmetric with respect to the optical axis. Thus, in the case of this optical element, rotating the optical element about the optical axis is permissible even in evasive motion with thermal induced swelling. This is because it has no effect of damaging the imaging properties.
However, in the case of a non-rotationally symmetric optical element having an axis of symmetry perpendicular to the optical axis, rotation about the optical axis of the optical element will damage the imaging characteristics of the optical element, and thus must be prevented.
It is therefore an object of the present invention to provide an apparatus in which an optical element is mounted such that the optical element to be heated is held firmly in place against a twist about an optical axis, So as to specify an optical device having an axis of symmetry.
According to the present invention, this object is achieved by an optical element comprising an optical element having at least one symmetry axis that is non-rotationally symmetric with respect to the optical axis and perpendicular to the optical axis, and having at least three support points for supporting the optical element, Wherein the bearings are movable relative to the mounting body, each of the bearings being movable only along a respective linear motion, the linear movement of the bearings being such that at an intersection point lying on the axis of symmetry Intersect.
Thus, the mounting portion of the optical device according to the present invention is characterized in that, for example, in the case of a cylindrical lens, the axis of symmetry, which is an axis parallel to the vertex line, intersects at an intersection point lying on the axis of symmetry, For this reason, it has a mounting body configured to support the optical element so as not to rotate about the optical axis due to thermal expansion of the optical element heated and guided thereby. This effect is that any torque acting on the optical element with respect to the optical axis is mutually compensated.
The named intersection of the linear motion of the bearings is preferably located on the optical axis of the optical element.
In addition, as a result, the movement of the axis of symmetry from the optical axis, that is, the translation of the axis of symmetry away from the optical axis, is prevented.
In this regard, in the case of an optical element having a quadrangular outer periphery, one of the bearings is arranged substantially at the center on the first outer peripheral side of the optical element, and the other two bearings are arranged on the outer peripheral edge facing the first outer peripheral side .
The distribution of the bearings on the mounting body has the advantage that firstly only three bearings as a whole are required to mount the optical element, resulting in a particularly simple construction, while the two above- And the optimum possible torque compensation is obtained in order to prevent rotation of the axis of symmetry and translational movement of the axis of symmetry, as a result of which the linear motion of the bearings in particular intersects both on the optical axis and on the axis of symmetry
In a more favorable improvement, each bearing is movable relative to the mounting body through at least one leaf spring of each.
Such means known per se for mounting rotationally symmetric optical elements can also be useful in the case of the mounting of non-rotationally symmetric optical elements, in particular by these means and also by providing the latter with the provision of cut- The mounting body and the bearing can be integrally formed.
Further, in this connection, each bearing is movable with respect to the mounting body through each of the at least two leaf springs, and at least one of the first leaf springs, in the direction of the linear movement of the associated bearing, And at least one second leaf spring is disposed on the bearing side facing away from the optical axis.
It is advantageous in that on both sides of the support points of the optical element the bearings are separated from the mounting body in relation to the drag so that, for example, the mechanical impact load applied to the bearing through the mounting body is also at least reduced.
Further, in this case, it is preferable that the first leaf spring is harder than the second leaf spring.
The first leaf spring disposed on the bearing side facing the optical axis in the direction of the linear movement of the associated bearing advantageously prevents any torque from being applied to the support point where the optical element comes into contact with the bearing in the event of an impact load, It is a harder construction than a leaf spring. By doing so, the sliding movement of the optical element on the support point is prevented from occurring, and the optical element is prevented from moving.
In a preferred improvement of the at least one leaf spring, the latter is formed perpendicular to the direction of the linear movement of the associated bearing by means of at least two material cuts or at least one material cutout of the mounting body.
By this means, in the case of constructing at least one leaf spring by means of at least two material cuts, by spacing the two material cuts so that the optical element is held in a stable manner, And on the one hand, the plate spring is sufficiently flexible such that, for a given thermal expansion of the optical element, the optical element can expand without sliding on the support point. Likewise, in the case of forming at least one plate spring by at least one material cut in the mounting body, the thickness of the remaining material net from the material cutout dimensioning the strength of the leaf spring is maintained.
In a more preferred improvement, each bearing has a small contact surface as compared to the total area of the optical element, or has at least one contact point, and the optical element is in contact with the contact surface or the contact point at its edge or close to its edge Lt; / RTI >
This means that the heat transfer from the mounting body, which is also heated during operation of the optical device to the optical element, is such that uneven thermal distribution in the optical element can be maintained or prevented slightly due to heat transfer from the area of the bearings to the optical element , It is kept as slight as possible.
Conversely, this non-uniform thermal distribution can also be prevented, owing to the fact that only a few rows are removed from the optical element to the mounting body via the contact surfaces and / or contact points, thus establishing a uniform thermal distribution in the optical element It is possible to do.
In a more preferred improvement, each bearing has a clamping device for fixing the optical element on the bearing.
For example, in contrast to bonding, mechanical clamping dictates that the optical element is durably fixed on the mounting body, but in the case of use of optics, especially in high light intensity systems, the adhesive, There is an advantage in that the optical characteristics of the optical element can be lowered by being precipitated in the optical element.
However, the optical element can also be fastened on each bearing by the same kind of bonding, soldering or the like. In the case of bonding by adhesion, the adhesive layer can preferably be protected from ultraviolet radiation which may be contained in the light by, for example, an adhesive barrier which is a substance blocking ultraviolet rays.
For example, as opposed to screwing an optical element to each bearing, the named means are designed so that the parasitic force is at least, for example, when the bore in the optical element is not completely aligned with the mounting body Is not applied to the optical element to such an extent that it may arise from the engagement of the screw element of the optical element with the screw of the mounting body.
Various arrangements for the clamping device can be considered.
In order to prevent or at least reduce stress in the optical element due to fixation, it is desirable that the clamping devices each fix the optical element with a force substantially parallel to the optical axis.
Here, an advantage is that the direction of the clamping force is adjusted perpendicular to the mobility of the bearing, whereby the mobility of the bearing is separated from the fixation of the optical element. As a result, smaller parasitic forces are applied to the optical element by fixation.
In a preferred refinement of clamping devices of the type mentioned above, the clamping devices have at least one compression plate biased by a spring force and applying pressure to the optical element against the support point of the associated bearing.
The advantage of this improvement lies in the fixing of the axis of the optical element, especially where there is no stress. In this case, the spring force is precisely sized to prevent the optical element from sliding on the associated support point in the case of thermal expansion of the optical element.
In this regard, as a variant of the first preferred improvement, each clamping device extends in the direction of the optical axis through an optical element and a support point, and a spring force is applied, (having a tie rod).
This improvement has the advantage that the clamping device requires only a small installation space in the transverse direction with respect to the optical axis.
In yet another modified improvement, each clamping device is disposed on one lever arm of a two-armed lever, a spring force is applied to its other lever arm, Lt; / RTI > to the optical element.
The advantage of this modified improvement lies in the fact that it is not necessary to insert a bore into the optical element as in the case of the previously mentioned modified modifications.
In a further preferred improvement, the optical element is a cylindrical lens.
Other advantages and features are apparent from the following specification and attached drawings.
It is needless to say that the features named and still to be described below can be used in their respective specific combinations as well as in the features themselves or in other combinations not departing from the scope of the invention.
Exemplary embodiments of the invention are shown in the drawings and will be described in more detail below with reference to the same.
Fig. 1 shows a schematic diagram as a plan view of an optical device having an optical element, wherein the optical axis of the optical element is a direction perpendicular to the plane of the drawing.
Fig. 2 shows a part of Fig. 1, in cross section along line II-II in Fig. 1, together with a clamping device in accordance with a first exemplary embodiment.
Fig. 3 shows an illustration of a part of the optical device in Fig. 1 as a view similar to Fig. 2 with a clamping device in accordance with another variant improvement.
An optical device having a
The details of the
1, the
1, the optical element has a
In particular, the
The
In the case of the
The optical device further has a mounting
The mounting
Each of the
The
As shown in the exemplary embodiment, the
In the exemplary embodiment according to FIGS. 1 and 2 or 1 and 3, the
In the exemplary embodiment according to Figures 1 and 2 or Figures 1 and 3, the
The
Further, as shown in the exemplary embodiment, the
The
The leaf springs 48,50; 52,54; 56,58 are here formed by the material cuts in the mounting
The material cuts forming the
1, bearing 26 is disposed approximately midway on the
This arrangement, in which its mobility of the
As shown in Figures 1 and 2 or 1 and 3, the leaf spring pairs 48, 50; 52, 54 and 56, 58 are located on the sides of the associated
1 and 3, as shown in Figs. 1 and 2, each
As a whole, the strength of each leaf spring of each
How the
The clamping device is provided for the purpose of securing the
Fig. 2 shows a first exemplary embodiment of a
The clamping
The clamping
In the case of the improvement of the clamping device of Figure 2, in order to prevent the
3 shows the
For this purpose, the clamping
The
Instead of fastening the optical element by the fastening means, the optical element can also be fastened on the
Claims (15)
An optical device, further comprising: a mounting body (24) for the optical element (12) having at least three bearings (26,28,30) to which the optical element (12)
Wherein the bearings (26,28,30) are movable relative to the mounting body (24) and each of the bearings (26,28,30) is movable only along a linear motion (40,42,44) , The linear movements (40, 42, 44) of the bearings (26, 28, 30) intersect at an intersection (46) lying on the axis of symmetry (20)
Each of the bearings 26,28, 30 is movable relative to the mounting body 24 via at least one leaf spring 48,50,52,54,56,58,
Each bearing 26,28,30 being movable relative to the mounting body 24 via at least two leaf springs 48,50,52,54,56,58, and at least one first plate < RTI ID = 0.0 > The springs 50,54 and 58 are arranged in the direction of the linear motion 40,42,44 of the associated bearings 26,28,30 at the bearing 26,28,30 facing the optical axis 18 And at least one second leaf spring (48, 52, 56) is disposed on the side of the bearing (26, 28, 30) facing away from the optical axis (18).
And the intersection point (46) lies on the optical axis (18).
The optical element 12 has a quadrangular outer periphery 22 and one of the bearings 26 is disposed midway on the first outer periphery 64 of the optical element 12 and the other two bearings 28, 30) are disposed at the corners of the outer periphery (66) opposite the first outer periphery (64).
Wherein the first leaf springs (50, 54, 58) have greater rigidity than the second leaf springs (48, 52, 56).
At least one leaf spring 48, 50, 52, 54, 56, 58 is formed by at least two material cuts 60, 62 or a linear motion of the associated bearings 26, 28, 30 And at least one material cutout of the mounting body perpendicular to the direction of the mounting body.
Each bearing 26,28,30 has a contact surface 38 that is small relative to the total area of the optical element 12 or has at least one contact point and the optical element 12 has an edge of its or its The contact surface or the contact point near the edge.
Wherein each of the bearings (26, 28, 30) has a clamping device (70) for fixing the optical element (12) on the bearings (26, 28, 30).
Wherein the clamping device (70) fixes the optical element (12) with a force parallel to the optical axis (18), respectively.
Clamping device 70 has at least one compression plate 80,92 biased by a spring force and applying pressure to optical element 12 against the support point of the associated bearing 26,28,30 Lt; / RTI >
Wherein the compression plate (80) is disposed on a tie rod (72) extending in the direction of the optical axis (18) through the optical element (12) and the support point and being subject to a spring force.
Wherein the compression plate (92) is disposed on one lever arm (94) of the double arm lever (96) and a spring force is applied to the other lever arm (98).
Wherein the optical element (12) is fastened on at least one of the bearings (26, 28, 30) by bonding or soldering.
Wherein the optical element (12) is a cylindrical lens.
Applications Claiming Priority (2)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
DE102009014972.4 | 2009-03-18 | ||
DE102009014972A DE102009014972A1 (en) | 2009-03-18 | 2009-03-18 | Optical device, has mounting bar fixed in optical axis, optical element fixed at symmetrical axis that is perpendicular to optical axis, and cross point in line with movement axes of bearing |
Publications (2)
Publication Number | Publication Date |
---|---|
KR20100105463A KR20100105463A (en) | 2010-09-29 |
KR101656883B1 true KR101656883B1 (en) | 2016-09-12 |
Family
ID=42733027
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
KR1020100023687A KR101656883B1 (en) | 2009-03-18 | 2010-03-17 | Optical arrangement |
Country Status (2)
Country | Link |
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KR (1) | KR101656883B1 (en) |
DE (1) | DE102009014972A1 (en) |
Families Citing this family (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
DE102018107034A1 (en) | 2018-03-23 | 2019-09-26 | Huber+Suhner Cube Optics Ag | Elastic suspension for optical design |
DE102021201126A1 (en) | 2020-06-26 | 2021-12-30 | Carl Zeiss Smt Gmbh | COMPONENT CONNECTION, LITHOGRAPHY SYSTEM AND METHOD FOR DESIGNING A COMPONENT CONNECTION |
Citations (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP2002107595A (en) * | 2000-08-10 | 2002-04-10 | Nikon Corp | Optical mount assembly |
JP2007118049A (en) * | 2005-10-28 | 2007-05-17 | Sunx Ltd | Laser beam machining apparatus |
Family Cites Families (9)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
DE10051706A1 (en) * | 2000-10-18 | 2002-05-02 | Zeiss Carl | Device for supporting optical element, has approximately T-shaped joints with connection points between holders at outer ends of T-bearer and manipulators engaging T-support |
US6603611B1 (en) * | 2001-11-06 | 2003-08-05 | Itt Manufacturing Enterprises, Inc. | Mount for ultra-high performance of optical components under thermal and vibrational distortion conditions |
DE10216114A1 (en) * | 2002-04-12 | 2003-10-23 | Zeiss Carl Smt Ag | Device for deformation-free mounting of non-rotation symmetrical optical elements has joining elements giving at least 1, maximum 2 degrees of translational freedom, 2 degrees of rotational freedom |
US7167325B2 (en) * | 2004-02-11 | 2007-01-23 | Agilent Technologies, Inc. | Flexured athermalized pseudokinematic mount |
JP2007524130A (en) * | 2004-02-25 | 2007-08-23 | カール・ツァイス・エスエムティー・アーゲー | Housing structure for mounting optical elements |
DE102005049731A1 (en) * | 2005-10-14 | 2007-04-19 | Cube Optics Ag | Optical structure with elastic suspension and method for producing such |
DE102006060088A1 (en) | 2006-12-15 | 2008-06-19 | Carl Zeiss Sms Gmbh | Optical assembly, e.g. for use in photolithography, has rotation symmetrical rim for holding optical components, rotation symmetrical rim holder with at least one first and second part; first rim holder part encloses rim circumference |
JP4857293B2 (en) * | 2007-03-15 | 2012-01-18 | キヤノン株式会社 | Mobile device |
JP5128665B2 (en) * | 2007-08-23 | 2013-01-23 | カール・ツァイス・エスエムティー・ゲーエムベーハー | Parasitic load minimizing optical element module |
-
2009
- 2009-03-18 DE DE102009014972A patent/DE102009014972A1/en not_active Ceased
-
2010
- 2010-03-17 KR KR1020100023687A patent/KR101656883B1/en active IP Right Grant
Patent Citations (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP2002107595A (en) * | 2000-08-10 | 2002-04-10 | Nikon Corp | Optical mount assembly |
JP2007118049A (en) * | 2005-10-28 | 2007-05-17 | Sunx Ltd | Laser beam machining apparatus |
Also Published As
Publication number | Publication date |
---|---|
KR20100105463A (en) | 2010-09-29 |
DE102009014972A1 (en) | 2010-10-14 |
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