KR101656883B1 - Optical arrangement - Google Patents

Optical arrangement Download PDF

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Publication number
KR101656883B1
KR101656883B1 KR1020100023687A KR20100023687A KR101656883B1 KR 101656883 B1 KR101656883 B1 KR 101656883B1 KR 1020100023687 A KR1020100023687 A KR 1020100023687A KR 20100023687 A KR20100023687 A KR 20100023687A KR 101656883 B1 KR101656883 B1 KR 101656883B1
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KR
South Korea
Prior art keywords
optical element
bearings
optical
axis
mounting body
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KR1020100023687A
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Korean (ko)
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KR20100105463A (en
Inventor
요한네스 리페르트
울리히 베버
후베르트 홀데르에르
아르민 쇠파흐
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칼 짜이스 레이저 옵틱스 게엠베하
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    • GPHYSICS
    • G02OPTICS
    • G02BOPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B7/00Mountings, adjusting means, or light-tight connections, for optical elements
    • G02B7/02Mountings, adjusting means, or light-tight connections, for optical elements for lenses
    • G02B7/026Mountings, adjusting means, or light-tight connections, for optical elements for lenses using retaining rings or springs
    • GPHYSICS
    • G02OPTICS
    • G02BOPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B7/00Mountings, adjusting means, or light-tight connections, for optical elements
    • G02B7/006Filter holders
    • GPHYSICS
    • G02OPTICS
    • G02BOPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B7/00Mountings, adjusting means, or light-tight connections, for optical elements
    • G02B7/008Mountings, adjusting means, or light-tight connections, for optical elements with means for compensating for changes in temperature or for controlling the temperature; thermal stabilisation
    • GPHYSICS
    • G02OPTICS
    • G02BOPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B7/00Mountings, adjusting means, or light-tight connections, for optical elements
    • G02B7/02Mountings, adjusting means, or light-tight connections, for optical elements for lenses
    • G02B7/028Mountings, adjusting means, or light-tight connections, for optical elements for lenses with means for compensating for changes in temperature or for controlling the temperature; thermal stabilisation

Abstract

An optical element 12 having at least one symmetry axis 20 that is non-rotationally symmetric with respect to the optical axis 18 and is perpendicular to the optical axis 18 and the optical element 12 for the optical element 12 An optical device having a mounting body (24) having at least three bearings (26,28, 30) fixed thereon, the bearings (26,28,30) being moveable relative to the mounting body (24) Each of the bearings (26,28, 30) is each movable only along a linear motion (40,42,44), and each of the bearings (26,28,30) , 44) intersect at an intersection (46) lying on the axis of symmetry (20).

Description

[0001] OPTICAL ARRANGEMENT [0002]

The present invention relates to an optical device having an optical element which is not rotationally symmetric with respect to an optical axis but has at least one symmetry axis perpendicular to the optical axis.

Without being limited to a general idea, the optical device according to the present invention can be used in a wide range of applications, such as, but not limited to, an optical system that uses a beam of light of a high light intensity, such as a laser beam, which is greatly expanded in one dimension from the original square beam cross- Lt; / RTI > In other words, this laser beam is imaged in a very thin and long linear shape (linear focusing). The dimensionality of the long and short dimensions of the linear focus can be greater than 100000: 1. Such optical systems are used, for example, in laser induced thin film crystallization of flat panel displays.

In such an optical system used for imaging a ray in a linear focusing, an optical device having a non-rotationally symmetric optical element is required. Conventionally, cylindrical lenses or cylindrical lens arrays are used as optical elements.

These non-rotationally symmetric optical elements have at least one axis of symmetry that is perpendicular to the optical axis, which is formed by an axis parallel to the vertex line of the (partially) cylindrical side of the lens in the case of a cylindrical lens And perpendicular to the optical axis.

For example, when an optical device is used for laser induced thin film crystallization and involves a laser light intensity in the range of 1 kW or more, high heat is generated in the optical element even with a slight absorption. Such heat causes the expansion of the optical element, resulting in aberration and deterioration of the image formation. This thermal expansion is problematic especially when, as in the present case, the optical element is non-rotationally symmetric and has at least one symmetry axis perpendicular to the optical axis. In particular, the thermal expansion can have the effect that, for example, in the case of a cylindrical lens, the optical axis, which is a vertex, is moved, for example, as it is rotated about the optical axis, resulting in the optical element causing aberration.

For this reason, the mounting portion of the optical element is required so that the optical element is held at the correct position even in a given thermal expansion. It is also contemplated herein that the mounting portion, which is typically made of metal, is also heated during operation and may exert a force on the optical element due to its thermal expansion, which may cause stress to the optical element, thereby worsening the optical imaging characteristics of the optical element .

In the case of an optical device having a rotationally symmetric optical element, for example as a rotationally symmetrically mounted body for holding an optical element for the purpose of mounting a rotationally symmetric optical element with a reduced stress at a stable position, The use of a rotationally symmetrically mounted body which supports optical elements on three support points in a housing is known from DE 10 2006 060 088 A1. At the point of support, the mounting body tangentially holds against the circumference of the optical element through the connection points and has radially resiliently configured nets or plate springs. The nets are movable in a radial direction along a straight line that intersects the optical axis.

However, in the case of the rotationally symmetric optical element, the distortion of the optical element with respect to the optical axis does not have a problem causing the image forming characteristic of the optical element to deteriorate, because the optical element is rotationally symmetric with respect to the optical axis. Thus, in the case of this optical element, rotating the optical element about the optical axis is permissible even in evasive motion with thermal induced swelling. This is because it has no effect of damaging the imaging properties.

However, in the case of a non-rotationally symmetric optical element having an axis of symmetry perpendicular to the optical axis, rotation about the optical axis of the optical element will damage the imaging characteristics of the optical element, and thus must be prevented.

It is therefore an object of the present invention to provide an apparatus in which an optical element is mounted such that the optical element to be heated is held firmly in place against a twist about an optical axis, So as to specify an optical device having an axis of symmetry.

According to the present invention, this object is achieved by an optical element comprising an optical element having at least one symmetry axis that is non-rotationally symmetric with respect to the optical axis and perpendicular to the optical axis, and having at least three support points for supporting the optical element, Wherein the bearings are movable relative to the mounting body, each of the bearings being movable only along a respective linear motion, the linear movement of the bearings being such that at an intersection point lying on the axis of symmetry Intersect.

Thus, the mounting portion of the optical device according to the present invention is characterized in that, for example, in the case of a cylindrical lens, the axis of symmetry, which is an axis parallel to the vertex line, intersects at an intersection point lying on the axis of symmetry, For this reason, it has a mounting body configured to support the optical element so as not to rotate about the optical axis due to thermal expansion of the optical element heated and guided thereby. This effect is that any torque acting on the optical element with respect to the optical axis is mutually compensated.

The named intersection of the linear motion of the bearings is preferably located on the optical axis of the optical element.

In addition, as a result, the movement of the axis of symmetry from the optical axis, that is, the translation of the axis of symmetry away from the optical axis, is prevented.

In this regard, in the case of an optical element having a quadrangular outer periphery, one of the bearings is arranged substantially at the center on the first outer peripheral side of the optical element, and the other two bearings are arranged on the outer peripheral edge facing the first outer peripheral side .

The distribution of the bearings on the mounting body has the advantage that firstly only three bearings as a whole are required to mount the optical element, resulting in a particularly simple construction, while the two above- And the optimum possible torque compensation is obtained in order to prevent rotation of the axis of symmetry and translational movement of the axis of symmetry, as a result of which the linear motion of the bearings in particular intersects both on the optical axis and on the axis of symmetry

In a more favorable improvement, each bearing is movable relative to the mounting body through at least one leaf spring of each.

Such means known per se for mounting rotationally symmetric optical elements can also be useful in the case of the mounting of non-rotationally symmetric optical elements, in particular by these means and also by providing the latter with the provision of cut- The mounting body and the bearing can be integrally formed.

Further, in this connection, each bearing is movable with respect to the mounting body through each of the at least two leaf springs, and at least one of the first leaf springs, in the direction of the linear movement of the associated bearing, And at least one second leaf spring is disposed on the bearing side facing away from the optical axis.

It is advantageous in that on both sides of the support points of the optical element the bearings are separated from the mounting body in relation to the drag so that, for example, the mechanical impact load applied to the bearing through the mounting body is also at least reduced.

Further, in this case, it is preferable that the first leaf spring is harder than the second leaf spring.

The first leaf spring disposed on the bearing side facing the optical axis in the direction of the linear movement of the associated bearing advantageously prevents any torque from being applied to the support point where the optical element comes into contact with the bearing in the event of an impact load, It is a harder construction than a leaf spring. By doing so, the sliding movement of the optical element on the support point is prevented from occurring, and the optical element is prevented from moving.

In a preferred improvement of the at least one leaf spring, the latter is formed perpendicular to the direction of the linear movement of the associated bearing by means of at least two material cuts or at least one material cutout of the mounting body.

By this means, in the case of constructing at least one leaf spring by means of at least two material cuts, by spacing the two material cuts so that the optical element is held in a stable manner, And on the one hand, the plate spring is sufficiently flexible such that, for a given thermal expansion of the optical element, the optical element can expand without sliding on the support point. Likewise, in the case of forming at least one plate spring by at least one material cut in the mounting body, the thickness of the remaining material net from the material cutout dimensioning the strength of the leaf spring is maintained.

In a more preferred improvement, each bearing has a small contact surface as compared to the total area of the optical element, or has at least one contact point, and the optical element is in contact with the contact surface or the contact point at its edge or close to its edge Lt; / RTI >

This means that the heat transfer from the mounting body, which is also heated during operation of the optical device to the optical element, is such that uneven thermal distribution in the optical element can be maintained or prevented slightly due to heat transfer from the area of the bearings to the optical element , It is kept as slight as possible.

Conversely, this non-uniform thermal distribution can also be prevented, owing to the fact that only a few rows are removed from the optical element to the mounting body via the contact surfaces and / or contact points, thus establishing a uniform thermal distribution in the optical element It is possible to do.

In a more preferred improvement, each bearing has a clamping device for fixing the optical element on the bearing.

For example, in contrast to bonding, mechanical clamping dictates that the optical element is durably fixed on the mounting body, but in the case of use of optics, especially in high light intensity systems, the adhesive, There is an advantage in that the optical characteristics of the optical element can be lowered by being precipitated in the optical element.

However, the optical element can also be fastened on each bearing by the same kind of bonding, soldering or the like. In the case of bonding by adhesion, the adhesive layer can preferably be protected from ultraviolet radiation which may be contained in the light by, for example, an adhesive barrier which is a substance blocking ultraviolet rays.

For example, as opposed to screwing an optical element to each bearing, the named means are designed so that the parasitic force is at least, for example, when the bore in the optical element is not completely aligned with the mounting body Is not applied to the optical element to such an extent that it may arise from the engagement of the screw element of the optical element with the screw of the mounting body.

Various arrangements for the clamping device can be considered.

In order to prevent or at least reduce stress in the optical element due to fixation, it is desirable that the clamping devices each fix the optical element with a force substantially parallel to the optical axis.

Here, an advantage is that the direction of the clamping force is adjusted perpendicular to the mobility of the bearing, whereby the mobility of the bearing is separated from the fixation of the optical element. As a result, smaller parasitic forces are applied to the optical element by fixation.

In a preferred refinement of clamping devices of the type mentioned above, the clamping devices have at least one compression plate biased by a spring force and applying pressure to the optical element against the support point of the associated bearing.

The advantage of this improvement lies in the fixing of the axis of the optical element, especially where there is no stress. In this case, the spring force is precisely sized to prevent the optical element from sliding on the associated support point in the case of thermal expansion of the optical element.

In this regard, as a variant of the first preferred improvement, each clamping device extends in the direction of the optical axis through an optical element and a support point, and a spring force is applied, (having a tie rod).

This improvement has the advantage that the clamping device requires only a small installation space in the transverse direction with respect to the optical axis.

In yet another modified improvement, each clamping device is disposed on one lever arm of a two-armed lever, a spring force is applied to its other lever arm, Lt; / RTI > to the optical element.

The advantage of this modified improvement lies in the fact that it is not necessary to insert a bore into the optical element as in the case of the previously mentioned modified modifications.

In a further preferred improvement, the optical element is a cylindrical lens.

Other advantages and features are apparent from the following specification and attached drawings.

It is needless to say that the features named and still to be described below can be used in their respective specific combinations as well as in the features themselves or in other combinations not departing from the scope of the invention.

Exemplary embodiments of the invention are shown in the drawings and will be described in more detail below with reference to the same.

Fig. 1 shows a schematic diagram as a plan view of an optical device having an optical element, wherein the optical axis of the optical element is a direction perpendicular to the plane of the drawing.
Fig. 2 shows a part of Fig. 1, in cross section along line II-II in Fig. 1, together with a clamping device in accordance with a first exemplary embodiment.
Fig. 3 shows an illustration of a part of the optical device in Fig. 1 as a view similar to Fig. 2 with a clamping device in accordance with another variant improvement.

An optical device having a general reference number 10 is shown in FIG. 1 and the direction of light propagation during operation of the optical device 10 is perpendicular to the plane of the drawing.

The details of the optical device 10 are shown in two modified enhancements in Figures 2 and 3.

1, the optical device 10 has an optical element 12, which has an optically useful region 14 and a mounting region 16 outside the optically useful region 14 .

1, the optical element has a symmetry axis 20 that is non-rotationally symmetric and perpendicular to the optical axis 18.

In particular, the optical element 12 is a cylindrical lens, and the axis of symmetry 20 is parallel to the vertex line of the cylindrical lens and passes through the optical axis vertically. In this case, the axis of symmetry 20 is the cylindrical axis of the cylindrical lens.

The optical element 12 has a generally rectangular outer periphery 22.

In the case of the optical element 12, the mounting area 16 and the optically useful area 14 are produced together with one another and with the same material, for example, quartz glass. 2, the optically useful region 14 has a greater thickness compared to the mounting region 16 in the direction of the optical axis 18.

The optical device further has a mounting body 24 made, for example, of metal. In a direction transverse to the optical axis, the mounting body 24 protrudes out of the optical element 12 such that the mounting body 24 is fastened on a holder (not shown) of the optical system. In an area of the optical element 12 and more precisely in the optically useful area 14 of the optical element 12 the mounting body 24 is positioned at the size of the optically useful area 14 of the optical element 12 And has an opening 25 with a size that lies transverse to the corresponding optical axis.

The mounting body 24 has three bearings 26, 28 and 30, to which the optical element 12 is fixed, respectively.

Each of the bearings 26,28 and 30 has a contact surface and a contact element and in particular the bearing 26 is a contact element 32, the bearing 28 is a contact element 34, And a contact element 36.

The contact elements 32,34 and 36 have respective contact surfaces 38 shown relative to the contact elements 32 in Figure 2 and the contact surfaces are small relative to the total area of the optical element 12. [ The optical element 12 is supported against the contact elements 32, 34 and 36 through a contact surface. Instead of the contact surface, the contact elements 32, 34 and 36 may also have only contact points through contact of the contact elements 32, 34 and 36 with the optical element 12. [

As shown in the exemplary embodiment, the optical element 12 is in contact with only the contact elements 32, 34 and 36 and its edge, particularly within the area of the mounting area 16 of the optical element 12 do.

In the exemplary embodiment according to FIGS. 1 and 2 or 1 and 3, the bearings 26,28 and 30 are constructed of axial bearings, in other words the optical element 12 is arranged in the direction of the optical axis 18 34 and 36, respectively.

In the exemplary embodiment according to Figures 1 and 2 or Figures 1 and 3, the contact elements 32,34 and 36 are integrally formed with the mounting body 24, and in particular, the rest of the mounting body 24 And is made of a material protruding from the region. The manner in which the optical element 12 is immobilized on the bearings 26,28 and 30, or more precisely on the contact elements 32,34 and 36, will now be described fully.

The bearings 26,28 and 30 are configured such that they are movable relative to the mounting body 24. In this case, the bearings 26,28 and 30 are only movable along a line of motion that intersects at the intersection point lying on the axis of symmetry 20, and in particular the bearing 26, along a linear motion 40, The bearing 28 is movable along a linear motion 42 only along the linear motion 44 of the bearing 30. [

Further, as shown in the exemplary embodiment, the intersection point 46 is also placed on the optical axis 18. [

The optical element 12 itself is fixed on the bearings 26,28 and 30 so that the optical element 12 can not make relative motion to the bearings 26,28 and 30.

Bearings 26,26 and 30 each have two leaf springs, in particular bearing 26 comprises two leaf springs 48 and 50, bearing 28 comprises two leaf springs 52 and 54, The bearing 30 has two leaf springs 56 and 58.

The leaf springs 48,50; 52,54; 56,58 are here formed by the material cuts in the mounting body 24, which in Fig. 1 are connected to the leaf springs 48 and 50 For example, in the form of a quadrangular C, with one facing each other on their "open" side, by two incisions 60 and 62 sandwiched inward on the other side. The plate spring 48 forms a parallelogram with the plate spring 50 and the plate spring 52 is connected to the plate spring 54 and the plate spring 52. In this way, each of the plate springs paired to form a parallelogram, And the leaf spring 56 forms a parallelogram with the leaf spring 58. The leaf spring 56 is formed in a substantially parallelogram shape.

The material cuts forming the leaf springs 48 and 50, 52 and 54 or 56 and 58 of the mounting body 24 run perpendicular to the respective linear motion 40,42 or 44. In this manner, the bearings 26,28 and 30 can move relative to the mounting body 24 only in the direction of the associated linear motion 40,42 or 44.

1, bearing 26 is disposed approximately midway on the outer perimeter 64 of the outer perimeter 22 of the rectangle of optical element 12 and bearings 28 and 30 are disposed on the outer perimeter 64 of the optical element, On the other side of the outer periphery 66, respectively.

This arrangement, in which its mobility of the bearings 26, 28 and 30 only proceeds along linear motions 40, 42 and 44, causes the optical element 12 to move in the direction of the optical element 12, And the symmetry axis 20 can not move in a direction transverse to it. The expansion of the optical element 12 causes only the deformation of the leaf springs 48, 50, 52, 54, 56 and 58 in the direction of the linear motions 40,42 and 44.

As shown in Figures 1 and 2 or 1 and 3, the leaf spring pairs 48, 50; 52, 54 and 56, 58 are located on the sides of the associated bearings 26, 28 and 30, 34 and 36 facing away from each other.

1 and 3, as shown in Figs. 1 and 2, each inner leaf spring 50, 54 and 58 has a greater strength than the respective outer leaf spring 48, 50 and 56 . As a result of this, in the case of an impact load, no torque is applied to the contact points on the contact elements 32, 34 and 36 so that the optical element 12 slides on the contact elements 32, 34 and 36 And prevents the optical element 12 from undesirably changing its position.

As a whole, the strength of each leaf spring of each leaf spring pair 48,50; 52,54 and 56,58 is such that the leaf springs keep the optical element 12 stable and, in the case of thermal expansion, So that the element 12 can expand without sliding on the contact elements 32, 34, and 36.

How the optical element 12 is fixed on each of the bearings 26, 28 and 30 will be described below.

The clamping device is provided for the purpose of securing the optical element 12 to the respective bearings 26, 28 and 30, and is not shown in FIG. 1 for reasons of clarity but appears in the cross-sectional view of FIG. 2 and FIG.

Fig. 2 shows a first exemplary embodiment of a clamping device 70 used to secure the optical element 12 on the bearing 26. Fig. A corresponding clamping device is provided on the two remaining bearings 28 and 30.

The clamping device 70 fixes the optical element 12 on the bearing 26, more precisely, with a fixing force acting in the direction of the optical axis 18 on the contact element 32.

The clamping device 70 has a shaft 74 that engages through the bore 76 of the mounting area 16 of the optical element 12 and through the bore 78 of the mounting body 24, And a tie rod 72 passing therethrough. The bores 76 and 78 prevent parasitic forces from occurring across the optical axis 18 to prevent stresses from being generated in the optical element 12 and in particular in the optically useful region 14 of the optical element 12. [ And has a larger size than the cross section of the fork shaft 74. Thus, the locking action is here only in the axial direction. The tie rod 72 has a compression plate 80 at one end and a support plate 82 at the other end thereof and the support plate 82 can be screwed to the shaft 74. The compression plate 80 rests on the mounting area 16 of the optical element 12 while the compression spring 84 rests against the support plate 82 and mounting body 24 . The compression spring 84 affects the pulling force on the compression plate 80 as a result of the compression plate 80 exerting pressure on the mounting area 16 against the contact element 32. In this case, the pressure is such that the optical element 12 does not slide on the contact element 32.

In the case of the improvement of the clamping device of Figure 2, in order to prevent the bore 76, the tie rod 72 may comprise a U-shaped element (not shown) having an additional compression plate in addition to the compression plate 80 on the opposite side of the compression plate In which case the compression spring 84 is positioned between the support plate 82 and the additional compression plate that is movably adjusted axially.

3 shows the clamping device 90 by fixing the optical element 12 also on the bearing 26 of the mounting body 24 by a fixing force acting in an axial direction, that is, in the direction of the optical axis 18. [ Which shows an alternative improvement of.

For this purpose, the clamping device 90 has a compression plate 92 which rests axially on the mounting area 16 of the optical element 12. [ The compression plate 92 is supported by a compression spring 100 which is further supported within the leaf spring 48 on the bearing 26 of the mounting body 24, Is connected to the arm 94, while the spring force is applied to the second lever arm 98.

The dual arm lever 96 is also connected to the bearing 26 of the mounting body 24 via the leaf spring 102 and to the foot 104 which supports the dual arm lever 96 on the bearing 26 . The dual arm lever forms a leaf spring 102 and similar arrangement with the rocker and the compression spring 100 applies a corresponding pressure to the compression plate 92 against the mounting area 16 of the optical element 12, The contact element 32 is subjected to the latter pressure. In the case of this improvement of the clamping device 90, it is possible to omit a bore, such as the bore 76 in FIG. 2, in the mounting area 16 of the optical element 12.

Instead of fastening the optical element by the fastening means, the optical element can also be fastened on the bearings 26, 28, 30 in a bonding, soldering or the like manner. In the case of bonding, the adhesive is protected from ultraviolet rays, which can decompose the adhesive over time, by means of an adhesive barrier.

Claims (15)

An optical element having at least one symmetry axis (20) that is non-rotationally symmetric with respect to the optical axis (18) and is perpendicular to the optical axis (18)
An optical device, further comprising: a mounting body (24) for the optical element (12) having at least three bearings (26,28,30) to which the optical element (12)
Wherein the bearings (26,28,30) are movable relative to the mounting body (24) and each of the bearings (26,28,30) is movable only along a linear motion (40,42,44) , The linear movements (40, 42, 44) of the bearings (26, 28, 30) intersect at an intersection (46) lying on the axis of symmetry (20)
Each of the bearings 26,28, 30 is movable relative to the mounting body 24 via at least one leaf spring 48,50,52,54,56,58,
Each bearing 26,28,30 being movable relative to the mounting body 24 via at least two leaf springs 48,50,52,54,56,58, and at least one first plate < RTI ID = 0.0 > The springs 50,54 and 58 are arranged in the direction of the linear motion 40,42,44 of the associated bearings 26,28,30 at the bearing 26,28,30 facing the optical axis 18 And at least one second leaf spring (48, 52, 56) is disposed on the side of the bearing (26, 28, 30) facing away from the optical axis (18).
The method according to claim 1,
And the intersection point (46) lies on the optical axis (18).
The method according to claim 1 or 2,
The optical element 12 has a quadrangular outer periphery 22 and one of the bearings 26 is disposed midway on the first outer periphery 64 of the optical element 12 and the other two bearings 28, 30) are disposed at the corners of the outer periphery (66) opposite the first outer periphery (64).
delete delete The method according to claim 1,
Wherein the first leaf springs (50, 54, 58) have greater rigidity than the second leaf springs (48, 52, 56).
The method according to claim 1,
At least one leaf spring 48, 50, 52, 54, 56, 58 is formed by at least two material cuts 60, 62 or a linear motion of the associated bearings 26, 28, 30 And at least one material cutout of the mounting body perpendicular to the direction of the mounting body.
In the quarry 1,
Each bearing 26,28,30 has a contact surface 38 that is small relative to the total area of the optical element 12 or has at least one contact point and the optical element 12 has an edge of its or its The contact surface or the contact point near the edge.
The method according to claim 1,
Wherein each of the bearings (26, 28, 30) has a clamping device (70) for fixing the optical element (12) on the bearings (26, 28, 30).
The method of claim 9,
Wherein the clamping device (70) fixes the optical element (12) with a force parallel to the optical axis (18), respectively.
The method of claim 10,
Clamping device 70 has at least one compression plate 80,92 biased by a spring force and applying pressure to optical element 12 against the support point of the associated bearing 26,28,30 Lt; / RTI >
The method of claim 11,
Wherein the compression plate (80) is disposed on a tie rod (72) extending in the direction of the optical axis (18) through the optical element (12) and the support point and being subject to a spring force.
The method of claim 11,
Wherein the compression plate (92) is disposed on one lever arm (94) of the double arm lever (96) and a spring force is applied to the other lever arm (98).
The method according to claim 1,
Wherein the optical element (12) is fastened on at least one of the bearings (26, 28, 30) by bonding or soldering.
The method according to claim 1,
Wherein the optical element (12) is a cylindrical lens.
KR1020100023687A 2009-03-18 2010-03-17 Optical arrangement KR101656883B1 (en)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
DE102009014972.4 2009-03-18
DE102009014972A DE102009014972A1 (en) 2009-03-18 2009-03-18 Optical device, has mounting bar fixed in optical axis, optical element fixed at symmetrical axis that is perpendicular to optical axis, and cross point in line with movement axes of bearing

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KR20100105463A KR20100105463A (en) 2010-09-29
KR101656883B1 true KR101656883B1 (en) 2016-09-12

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Families Citing this family (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE102018107034A1 (en) 2018-03-23 2019-09-26 Huber+Suhner Cube Optics Ag Elastic suspension for optical design
DE102021201126A1 (en) 2020-06-26 2021-12-30 Carl Zeiss Smt Gmbh COMPONENT CONNECTION, LITHOGRAPHY SYSTEM AND METHOD FOR DESIGNING A COMPONENT CONNECTION

Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2002107595A (en) * 2000-08-10 2002-04-10 Nikon Corp Optical mount assembly
JP2007118049A (en) * 2005-10-28 2007-05-17 Sunx Ltd Laser beam machining apparatus

Family Cites Families (9)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE10051706A1 (en) * 2000-10-18 2002-05-02 Zeiss Carl Device for supporting optical element, has approximately T-shaped joints with connection points between holders at outer ends of T-bearer and manipulators engaging T-support
US6603611B1 (en) * 2001-11-06 2003-08-05 Itt Manufacturing Enterprises, Inc. Mount for ultra-high performance of optical components under thermal and vibrational distortion conditions
DE10216114A1 (en) * 2002-04-12 2003-10-23 Zeiss Carl Smt Ag Device for deformation-free mounting of non-rotation symmetrical optical elements has joining elements giving at least 1, maximum 2 degrees of translational freedom, 2 degrees of rotational freedom
US7167325B2 (en) * 2004-02-11 2007-01-23 Agilent Technologies, Inc. Flexured athermalized pseudokinematic mount
JP2007524130A (en) * 2004-02-25 2007-08-23 カール・ツァイス・エスエムティー・アーゲー Housing structure for mounting optical elements
DE102005049731A1 (en) * 2005-10-14 2007-04-19 Cube Optics Ag Optical structure with elastic suspension and method for producing such
DE102006060088A1 (en) 2006-12-15 2008-06-19 Carl Zeiss Sms Gmbh Optical assembly, e.g. for use in photolithography, has rotation symmetrical rim for holding optical components, rotation symmetrical rim holder with at least one first and second part; first rim holder part encloses rim circumference
JP4857293B2 (en) * 2007-03-15 2012-01-18 キヤノン株式会社 Mobile device
JP5128665B2 (en) * 2007-08-23 2013-01-23 カール・ツァイス・エスエムティー・ゲーエムベーハー Parasitic load minimizing optical element module

Patent Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2002107595A (en) * 2000-08-10 2002-04-10 Nikon Corp Optical mount assembly
JP2007118049A (en) * 2005-10-28 2007-05-17 Sunx Ltd Laser beam machining apparatus

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