KR101635853B1 - Sludge removal device for pressure maintenance of the storage tank - Google Patents

Sludge removal device for pressure maintenance of the storage tank Download PDF

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Publication number
KR101635853B1
KR101635853B1 KR1020150028179A KR20150028179A KR101635853B1 KR 101635853 B1 KR101635853 B1 KR 101635853B1 KR 1020150028179 A KR1020150028179 A KR 1020150028179A KR 20150028179 A KR20150028179 A KR 20150028179A KR 101635853 B1 KR101635853 B1 KR 101635853B1
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KR
South Korea
Prior art keywords
pressure
sludge
bushing
storage tank
removing shaft
Prior art date
Application number
KR1020150028179A
Other languages
Korean (ko)
Inventor
유제덕
Original Assignee
주식회사 한울
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Priority to KR1020150028179A priority Critical patent/KR101635853B1/en
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Publication of KR101635853B1 publication Critical patent/KR101635853B1/en

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    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/02—Manufacture or treatment of semiconductor devices or of parts thereof

Abstract

The present invention relates to a pressure maintenance device to remove sludge of a storage tank, to actively block the inflow of external air due to atmospheric pressure by supplying inert gas, such as nitrogen, with 0.5 bar to the inside of a bushing, which is a means for maintaining the seal of a sludge removing shaft, guiding lifting/lowering of the sludge removing shaft, to continuously supply a constant pressure to the inside of the bushing by using a pressure storage tank to keep the pressure of nitrogen gas, and especially to detect a rapid pressure change, when the pressure inside the bushing is rapidly changed, to operate an alarm lamp and enable a manager to take corrective measures quickly. To this end, in the pressure maintenance device; connecting a cylinder, a cyclone, and the storage tank in a line; coupling the sludge removing shaft penetrating the cyclone with a rod of the cylinder, wherein the sludge removing shaft has a screw to remove the sludge from the inner wall of an outlet of the cyclone; and having a means of blocking air while guiding the lifting/lowering of the sludge removing shaft, between the cylinder and the cyclone, a pressure maintenance tube penetrated by the sludge removing shaft is installed between the cyclone and the cylinder, a bushing coming in contact with the outer circumferential surface of the sludge removing shaft is installed in the upper/lower inside of the pressure maintenance tube, and a nozzle connected to each bushing is installed in the upper/lower outside of the pressure maintenance tube. Each nozzle is connected to the pressure storage tank filled with nitrogen, so nitrogen at a constant pressure is supplied to the inside of each bushing, and thereby air inflow due to atmospheric pressure is blocked.

Description

Technical Field [0001] The present invention relates to a sludge removal device for pressure storage of a storage tank,

The present invention relates to a sludge-removing pressure holding device for a sludge storage tank, and more particularly, to a sludge-removing device for sludge removal in a storage tank by mixing two types of explosive gas, The sludge removing shaft is attached to the sludge removing shaft so that the airtightness of the sludge removing shaft can be reduced and the airtightness of the sludge removing shaft can be reduced. The present invention relates to a pressure holding device for removing sludge in a storage tank in which safety measures can be quickly performed by providing a means for notifying the manager when the sludge is removed smoothly and the airtightness is destroyed.

Generally, a semiconductor coating material is produced by stirring and chemical reaction in the process of circulating two types of explosive gases through a plurality of cyclones. Such a coating material is stored in a raw material storage tank in which the cyclone is directly connected to the upper portion of the storage tank and the material being mixed is dropped from the cyclone to the storage tank.

However, the coating material generated in the cyclone material mixing process adhered to the inner wall of the outlet due to the good adhesion to the metal surface, thereby generating sludge, and the sludge caused clogging of the outlet.

Therefore, a sludge removal shaft with a screw was attached to the top of the cyclone to periodically perform the work of piercing the outlet. The sludge removal shaft was connected to the cylinder rod to automatically operate the sludge removal shaft at an intermittent time so that the screw scrapes the sludge adhering to the inner wall of the outlet and dropped into the cyclone and the storage tank.

However, if the airtightness of the connecting part connecting the outlet of the cyclone and the cylinder is destroyed during the lifting and lowering of the sludge removing shaft, an explosive gas leaking accident occurs and there is a risk of spontaneous ignition in the air.

Therefore, conventionally, a plurality of metal bushings and rubber packing are installed for the airtightness of the exit, and the leakage poisoning is prepared. However, there is still a problem that the airtightness is destroyed due to the aging of the bushing and packing. In addition, if the airtightness is destroyed due to the minute cracks, explosive gas may be leaked in a small amount. Such a small amount of leakage accident can be confirmed only by periodic inspection, and thus the working environment is poor.

SUMMARY OF THE INVENTION The present invention has been developed in view of the problems of the prior art, and it is an object of the present invention to provide a method of producing a semiconductor coating material by mixing two kinds of explosive gases, which are spontaneously ignited in air, The sludge removing shaft is moved up and down in order to remove the sludge, and by providing the sludge removing shaft with the means for keeping the airtightness while reducing the friction due to the lifting and lowering of the sludge removing shaft so that the air- The present invention provides a pressure holding device for removing sludge in a storage tank, which is provided with a means for informing the manager of the leakage of the sludge,

It is another object of the present invention to provide a sludge removing apparatus for a sludge removing apparatus, which is capable of maintaining the airtightness of the sludge removing shaft by supplying nitrogen gas, which is an inert gas, In addition, the constant pressure is continuously supplied to the inside of the bushing by using the pressure storage tank so that the pressure of the nitrogen gas is maintained. Especially, when the pressure inside the bushing suddenly changes, it is detected so that the warning lamp is operated, And to provide a sludge removing pressure holding device for a storage tank.

To this end, the present invention is characterized in that a cylinder, a cyclone, and a storage tank are provided in parallel, a sludge removing shaft passing through the cyclone is coupled with a rod of the cylinder, and the sludge removing shaft includes a screw for removing sludge on the inner wall of the outlet of the cyclone Wherein the sludge removing shaft is provided between the cylinder and the cyclone and includes means for blocking the air while guiding the lifting and lowering of the sludge removing shaft, A pressure-maintaining pipe penetrating through the pipe is provided; A bushing contacting the outer circumferential surface of the sludge removing shaft is provided inside the upper and lower sides of the pressure holding pipe; And a plurality of nozzles connected to the respective bushings are provided on the upper and lower outer sides of the pressure maintenance tube, and the nozzles are connected to a pressure storage tank filled with nitrogen, and nitrogen of a predetermined pressure is supplied into the bushes, And the air flow is blocked.

According to the present invention, when the sludge is accumulated at the outlet of the cyclone, the sludge removing shaft for removing the sludge is provided because the mixing material is circulated to the next process. The sludge removing shaft is formed with a screw on the outer circumferential surface and scratched and passed through the inner wall of the outlet. The sludge removing shaft is periodically lifted and lowered by the cylinder.

According to an embodiment of the present invention, there is provided a pressure holding pipe for connecting the cyclone and the cylinder, wherein a bushing is vertically provided inside the pressure holding pipe to reduce friction caused by the lifting and lowering of the sludge removing shaft while ensuring airtightness. An inner passage and an outlet are formed in the bushing so that nitrogen, which is an inert gas, is supplied to the bushing at a constant pressure. A nozzle for supplying nitrogen gas to the respective bushings is connected to upper and lower sides of the pressure holding pipe.

The sludge removing shaft is brought into contact with nitrogen gas of a predetermined pressure supplied to the inside of the bushing while the sludge removing shaft is lifted and lowered along the upper and lower bushings inside the pressure holding pipe. Therefore, even if airtightness is weakened due to wear and cracking of the bushing, nitrogen gas is positively supplied to the inside of the bushing to block the air in the atmosphere, so that the explosive gas and air are not brought into contact with each other. And when the nitrogen gas is supplied more than necessary, the warning light is activated and notified to the manager. Therefore, the state of the bushing and the replacement cycle can be easily known.

1 is a conceptual view of a storage tank provided with a pressure holding device according to an embodiment of the present invention;
2 is a cross-sectional view of the pressure holding device of the embodiment of the present invention
3 is a partially enlarged cross-sectional view of the pressure holding device of the embodiment of the present invention

1 to 3, the pressure holding device of the embodiment of the present invention is configured such that the storage tank 10 and the cyclone 20 are connected to each other through the tank connecting port 11 to form two types of explosive gas And the crystal according to the combination is supplied to the storage tank 10. A pressure holding pipe 40 is provided at an upper portion of the cyclone 20 through an outlet 21 and a cylinder 30 is provided at an upper portion of the pressure holding pipe 40 at a predetermined interval Away.

The sludge removing shaft 22 penetrates through the outlet 21 so that the upper end of the sludge removing shaft 22 passes through the pressure holding pipe 40 and the rod 31 of the cylinder 30, And is connected to the joint 33. The sludge removing shaft 22 is provided on the outer circumferential surface thereof with a screw 23 for scraping sludge accumulated on the inner wall of the outlet 21.

The pressure maintenance pipe 40 is provided with a lower flange pipe 42 at a lower portion thereof and is bolted to the outlet 21 and an upper flange pipe 41 is provided at an upper portion of the pressure maintenance pipe 40, do. The upper and lower flange pipes 41 and 42 in contact with the pressure holding pipe 40 are provided with a bushing 50 for supporting the sludge removing shaft 22 in a vertical direction.

The upper and lower sides of the pressure holding pipe 40 are respectively provided with passages 43 connected to the bushing 50. The bushing 50 is formed with an internal passageway 51 contacting the passageway 43 , And a plurality of outlets (52) formed at the inner and outer circumferential surfaces of the bushing (50) are formed at both ends of the inner passage (51). The upper and lower flange tubes 41 and 42 are provided with sleeves 41a and 42a in which the bushing 50 is inserted and the outlet 52 on the outer circumferential side is inserted into the sleeve 41a 42a, respectively. And the outlet 52 on the inner circumferential side is in contact with the outer circumferential surface of the sludge removing shaft 22.

The nozzles 60 connected to the respective passages 43 are provided on the upper and lower sides of the pressure holding pipe 40. The nozzles 60 include a pressure storage tank 61 filled with nitrogen, (62). The pressure line 62 is provided with a check valve 63, a control valve 64 and a pressure sensing valve 65. The control valve 63 is connected to a warning light 66 through a signal line. Reference numeral 54 denotes a packing for sealing the pressure holding pipe 40 and the upper and lower flange pipes 41 and 42.

In the pressure holding apparatus of the embodiment of the present invention thus constituted, nitrogen gas is supplied to the upper and lower sides of the pressure holding pipe 40 on the pressure line 62 at a pressure of 0.5 bar in the pressure storage tank 61. Since the inner passage 51 of the bushing 50 is connected to the nozzles 60 through the passage 43, nitrogen gas is supplied into the bushing 50. The outlet 52 on the outer circumferential side is in contact with the sleeve 41a and the outlet 52 on the inner circumferential side is in contact with the outer circumferential surface of the sleeve 51. [ The nitrogen gas is supplied to the sleeve 41a (42a) and the sludge removing shaft (22) at a constant pressure since the sludge is in contact with the outer circumferential surface of the sludge removing shaft (22).

Therefore, air in the air is prevented from flowing into the clearance of the sleeve 41a (42a) and the clearance of the bushing (50). The sludge adheres to the inner wall of the outlet 21 during the raw material mixing process of the cyclone 20, and the cylinder 30 is periodically operated in consideration of this. At this time, when abrasion of the bushing (50) occurs in the process of continuously raising and lowering the sludge removing shaft (22), minute gaps are generated and nitrogen gas flows out into the atmosphere. At this time, if the pressure drops, the pressure sensing valve 65 senses it and sends an open signal to the control valve 64. Therefore, the nitrogen gas in the pressure storage tank 61 is supplied into the bushing 50 to maintain a constant pressure, so that the explosive gas does not leak into the atmosphere.

If the nitrogen is excessively discharged from the bushing 50 and the sleeves 41a and 42a, if the warning light 66 detects the opening signal of the control valve 64 to generate light and sound, Can be recognized. Therefore, there is an advantage that the state of the bushing 50 and the replacement cycle can be accurately grasped.

10: Storage tank 11: Tank connector
20: Cyclone 21: Exit
22: sludge removing shaft 23: screw
30: cylinder 31: rod
32: spacing holder 33: ball joint portion
40: Pressure maintaining pipe 41: Upper flange pipe
42: lower flange tube 43: passage
50: bushing 51: internal passage
52: outlet 60: nozzle
61: pressure storage tank 62: pressure line
63: Check valve 64: Control valve
65: Pressure sensing valve 66: Warning light

Claims (3)

And a sludge removing shaft connected to the cylinder, wherein the sludge removing shaft is provided with a screw for removing sludge on the inner wall of the outlet of the cyclone, and the cylinder, the cyclone, and the storage tank are connected in parallel, Wherein the sludge removing device comprises: a sludge removing device for removing sludge from the sludge;
A pressure holding pipe through which the sludge removing shaft passes is provided between the outlet of the cyclone and the cylinder;
A bushing contacting the outer circumferential surface of the sludge removing shaft is provided inside the upper and lower sides of the pressure holding pipe;
And a plurality of nozzles connected to the respective bushings are provided on the upper and lower outer sides of the pressure maintenance tube, and the nozzles are connected to a pressure storage tank filled with nitrogen, and nitrogen of a predetermined pressure is supplied into the bushes, Thereby preventing air from entering the sludge tank. The method according to claim 1,
And a passage for connecting the respective bushings and the respective nozzles are provided on the upper and lower sides of the pressure holding pipe,
Wherein each bushing has an internal passage in contact with the passage,
Wherein a plurality of outlets perforated into the inner circumferential surface and the outer circumferential surface of the bushing are formed at both ends of the inner passage so that the outlet of the inner circumferential surface is in contact with the outer circumferential surface of the sludge removing shaft. Retaining device. 3. The method of claim 2,
The nozzle and the pressure storage tank are connected by a pressure line,
The pressure line is provided with a control valve and a pressure sensing valve. The control valve is opened and closed according to the pressure sensing of the pressure sensing valve to supply nitrogen gas to the bushing,
And a warning light connected to the control valve and a signal line is provided to operate the warning light when the control valve is abnormally opened or closed.
KR1020150028179A 2015-02-27 2015-02-27 Sludge removal device for pressure maintenance of the storage tank KR101635853B1 (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
KR1020150028179A KR101635853B1 (en) 2015-02-27 2015-02-27 Sludge removal device for pressure maintenance of the storage tank

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
KR1020150028179A KR101635853B1 (en) 2015-02-27 2015-02-27 Sludge removal device for pressure maintenance of the storage tank

Publications (1)

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KR101635853B1 true KR101635853B1 (en) 2016-07-04

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Citations (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
KR200184113Y1 (en) * 2000-01-05 2000-06-01 이기봉 Switching apparatus for data transmitting port
KR20020080195A (en) * 2001-04-12 2002-10-23 김철원 Regeneration method of sludge for wire saw cutting
KR20040072241A (en) * 2003-02-10 2004-08-18 (주)일신기공 Filter
KR20090058111A (en) * 2007-12-04 2009-06-09 한익수 Angle vacuum valve

Patent Citations (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
KR200184113Y1 (en) * 2000-01-05 2000-06-01 이기봉 Switching apparatus for data transmitting port
KR20020080195A (en) * 2001-04-12 2002-10-23 김철원 Regeneration method of sludge for wire saw cutting
KR20040072241A (en) * 2003-02-10 2004-08-18 (주)일신기공 Filter
KR20090058111A (en) * 2007-12-04 2009-06-09 한익수 Angle vacuum valve

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