KR101631639B1 - Method of manufacturing sintered plate and method of manufacturing ceramic heater including the same - Google Patents

Abstract

A method of manufacturing a sintered body according to an embodiment of the present invention includes the steps of preparing a ceramic material for preparing a ceramic material in a powder state to be a material of a plate and forming a refractory metal reacting with carbon and / And a plate plasticizing step of forming a plate as a platelike member by heating the ceramic material under a predetermined temperature and supplying a refractory metal to the upper part and / or the lower part of the sintered body.
According to another embodiment of the present invention, there is provided a method of manufacturing a ceramic heater, comprising the steps of: preparing a ceramic material to prepare a ceramic material in powder form to be a material of a plate; A step of supplying a refractory metal to the upper and / or lower portions of the material; a plate plasticizing step of heating the ceramic material under a predetermined temperature to form a platelike plate; An intermediate plate and a lower plate for preparing an upper plate, an intermediate plate and a lower plate by a ceramic material in powder form to form a lower plate, a static electricity generating electrode for generating static electricity is disposed on the upper surface of the intermediate plate, A heat generating member and a static electricity generating electrode disposed on the lower surface of the intermediate plate, By pressing the intermediate plate and the lower plate is heated by the hot-pressing method comprising a phase-based upper plate and intermediate plate, and hot-pressing step by hot-pressing method is the lower plate are bonded together, at least one of the top plate, intermediate plate, and a lower plate Discloses a method of manufacturing a ceramic heater provided with the plasticized plate.

Description

BACKGROUND OF THE INVENTION 1. Field of the Invention [0001] The present invention relates to a method for manufacturing a sintered body, and a method for manufacturing a ceramic heater including the sintered body manufactured thereby.

The present invention relates to a method of manufacturing a sintered body and a method of manufacturing a ceramic heater including the sintered body produced thereby.

Ceramic heaters are devices for heating semiconductor wafers during the process of manufacturing semiconductors.

The ceramic heater is a ceramic substrate which is a circular flat plate member made of a ceramic material such as aluminum nitride (AlN) or aluminum oxide (Al ₂ O ₃ ), and is attached to the lower surface of the ceramic substrate, A hollow sash extending elongated along the axis, a heating wire which is wired inside the ceramic substrate to radiate heat, and a metal member which is wired inside the ceramic substrate, and which absorbs the semiconductor wafer or generates plasma And a static electricity generating electrode for generating a static electricity for causing the static electricity to be generated.

Therefore, the ceramic heater heats the semiconductor wafer by the hot wire, and uses the static electricity generated by the static electricity generating electrode to adsorb and fix the semiconductor wafer or to generate plasma.

It is an object of the present invention to provide a method of manufacturing a sintered body and a method of manufacturing a ceramic heater including the sintered body produced thereby.

A method of manufacturing a sintered body according to an embodiment of the present invention includes the steps of preparing a ceramic material for preparing a ceramic material in a powder state to be a material of a plate and forming a refractory metal reacting with carbon and / And a plate plasticizing step of forming a plate as a platelike member by heating the ceramic material under a predetermined temperature and supplying a refractory metal to the upper part and / or the lower part of the sintered body.

In this embodiment, carbon and / or oxygen may react with the refractory metal supplied to the upper and / or lower portions of the ceramic material in the plate plasticizing step.

In the present embodiment, the refractory metal may be provided in a sheet form on the upper and / or lower portions of the ceramic material in the refractory metal supply step.

In this embodiment, the refractory metal may be provided in a paste form on the upper and / or lower portions of the ceramic material in the refractory metal supplying step.

In this embodiment, the refractory metal in the form of a paste may be supplied by being sprayed onto the upper and / or lower portions of the ceramic material by a brush in the refractory metal supplying step.

In the present embodiment, the refractory metal may be provided in the form of a powder on the upper and / or lower portions of the ceramic material in the refractory metal supplying step.

In this embodiment, the refractory metal in the form of powder may be sprayed and supplied to the upper and / or lower portions of the ceramic material.

In the present embodiment, the refractory metal may be any one of molybdenum (Mo), tungsten (W), hafnium (Hf), and niobium (Nb).

In this embodiment, after the plate plasticizing step is performed, an oxide which reacts oxygen and / or carbon with the leached metal further supplied to the upper portion and / or the lower portion of the ceramic material and removes the compound generated on the surface of the plate And / or a carbide removing step.

In this embodiment, the oxide and the carbide removal step may remove the upper and / or lower surface of the plate on which the oxide and / or the carbide are formed according to the etching process.

Another embodiment of the present invention is a method for manufacturing a ceramic composite material, comprising: a plate primary calcination step of forming a plate, which is a plate member plated by heating at a predetermined temperature, at a predetermined temperature, a refractory metal To the upper surface and / or the lower surface of the plasticized plate, and a plate second complete sintering step of forming a plate, which is a plate member that is completely sintered by heating the plate at a predetermined temperature under a predetermined temperature A method for producing a sintered body is disclosed.

In this embodiment, carbon and / or oxygen may react with the reflux metal supplied to the upper and / or lower surface of the plate in the plate second complete sintering step.

In the present embodiment, the refractory metal may be any one of molybdenum (Mo), tungsten (W), hafnium (Hf), and niobium (Nb).

In the present embodiment, after the plate second complete sintering step is performed, oxygen and / or carbon react with the leached metal supplied to the upper surface and / or the lower surface of the plate to remove the compound formed on the surface And removing the oxide and / or the carbide.

In the present embodiment, the oxide and / or carbide removing step may remove the upper and / or lower surface of the plate on which the oxide and / or the carbide are formed according to the etching process.

According to another embodiment of the present invention, there is provided a method of manufacturing a ceramic heater, comprising the steps of: preparing a ceramic material to prepare a ceramic material in powder form to be a material of a plate; A step of supplying a refractory metal to the upper and / or lower portions of the material; a plate plasticizing step of heating the ceramic material under a predetermined temperature to form a platelike plate; An intermediate plate and a lower plate for preparing an upper plate, an intermediate plate and a lower plate by a ceramic material in powder form to form a lower plate, a static electricity generating electrode for generating static electricity is disposed on the upper surface of the intermediate plate, A heat generating member and a static electricity generating electrode disposed on the lower surface of the intermediate plate, Wherein the upper plate, the intermediate plate, and the lower plate are heated and pressed by a hot pressing method so that the upper plate, the intermediate plate, and the lower plate are bonded to each other, and at least one of the upper plate, And the ceramic heater is provided with the plasticized plate.

In this embodiment, before the upper plate, the intermediate plate and the lower plate preparing step are performed after the plate plasticizing step is performed, the precious metal and oxygen and / or carbon supplied to the upper and / And removing an oxide and / or a carbide to remove the compound generated on the surface of the plate.

In the present embodiment, at least one of the lower surface of the upper plate and the upper surface of the intermediate plate may be provided with a static electricity generating electrode receiving groove capable of accommodating the static electricity generating electrode.

In this embodiment, at least one of the lower surface of the intermediate plate and the upper surface of the lower plate may be formed with a heating member receiving groove capable of receiving the heating member.

In the present embodiment, the heating member is a wire member of a metal material elongated in the longitudinal direction, and includes a heat line that is two-dimensionally wired on a virtual two-dimensional plane substantially parallel to the upper surface of the ceramic substrate can do.

Another embodiment of the present invention relates to a method for manufacturing a ceramic composite material, comprising: a plate primary calcination step of forming a plate as a plate member which is calcined by heating the powdery ceramic material at a predetermined temperature; A reflowing metal supplying step of supplying a refractory metal to the upper surface and / or the lower surface of the plasticized plate; a plate forming a plate as a completely-sintered plate member by heating the plate under a predetermined temperature at a predetermined temperature; An intermediate plate and a lower plate for preparing an upper plate, an intermediate plate, and a lower plate made of a ceramic material in powder form to be a material of the fully sintered plate or the plate; And a heat generating member for radiating heat is disposed on the lower surface of the intermediate plate, And a heating and pressing step in which the upper plate, the intermediate plate, and the lower plate are bonded to each other by heating and pressing the upper plate, the intermediate plate, and the lower plate by a heat pressing method, And at least one of the lower plate is provided with the above-described fully sintered plate.

In this embodiment, before the upper plate, the intermediate plate and the lower plate preparing step are performed after the plate second complete sintering step is performed, the tempered metal supplied to the upper surface and / or the lower surface of the plasticized plate And removing the oxide and / or the carbide removing the compound produced on the surface of the plate by the reaction of oxygen and / or carbon.

According to an embodiment of the present invention, there is an advantageous effect that carbon and / or oxygen is removed in the sintering process to increase durability and discoloration or cracking of the ceramic substrate is prevented.

It is needless to say that the effects of the present invention can be derived from the following description with reference to the drawings in addition to the above-mentioned contents.

1 is a flow chart of a method of manufacturing a sintered body according to a first embodiment of the present invention.
2 is a flowchart of a method for manufacturing a sintered body according to a second embodiment of the present invention.
3 is a flowchart of a method of manufacturing a sintered body according to a third embodiment of the present invention.
4 is a flowchart of a method for manufacturing a sintered body according to a fourth embodiment of the present invention.
5 is a cross-sectional view of a ceramic heater manufactured by a method of manufacturing a ceramic heater according to an embodiment of the present invention.
Fig. 6 is an enlarged view of the "A" portion of the ceramic heater shown in Fig. 5;
7 is an exploded cross-sectional view of the ceramic substrate shown in Fig.
8 is a plan view of a heating member according to an embodiment of the present invention.
9 is a front view of the heating member shown in Fig.
10 is a flowchart of a method of manufacturing a ceramic heater according to a first embodiment of the present invention.
11 is a flowchart of a method of manufacturing a ceramic heater according to a second embodiment of the present invention.
12 is a flowchart of a method of manufacturing a ceramic heater according to a third embodiment of the present invention.
13 is a flowchart illustrating a method of manufacturing a ceramic heater according to a fourth embodiment of the present invention.

BRIEF DESCRIPTION OF THE DRAWINGS The present invention is capable of various modifications and various embodiments, and specific embodiments are illustrated in the drawings and described in detail in the detailed description. It is to be understood, however, that the invention is not to be limited to the specific embodiments, but includes all modifications, equivalents, and alternatives falling within the spirit and scope of the invention. In the following description of the present invention, the same reference numerals are used for the same components, although they are shown in other embodiments.

The terms first, second, etc. may be used to describe various elements, but the elements should not be limited by terms. Terms are used only for the purpose of distinguishing one component from another.

The terminology used in this application is used only to describe a specific embodiment and is not intended to limit the invention. In the present application, the terms "comprises" or "having" and the like are used to specify that there is a feature, a number, a step, an operation, an element, a component or a combination thereof described in the specification, But do not preclude the presence or addition of one or more other features, integers, steps, operations, elements, components, or combinations thereof.

DETAILED DESCRIPTION OF THE PREFERRED EMBODIMENTS Hereinafter, embodiments of the present invention will be described in detail with reference to the accompanying drawings.

1 is a flowchart of a sintered body manufacturing method according to a first embodiment of the present invention.

First, a ceramic material preparing step (S10) for preparing a ceramic material as a material of a plate as a plate member in powder form is performed.

In the ceramic material preparing step (S10), a refractory metal supplying step (S30) may be performed in which a ceramic material is prepared in powder form and then a refractory metal is supplied to an upper portion and / or a lower portion of the ceramic material.

A refractory metal is also called refractory metal as a general term for metals whose melting point is higher than 1539 ° C, which is the melting point of iron.

As will be described later, since the plate plasticizing step (S50) of the present invention is performed at about 1200 to 1600, a metal having a melting point of 1650 or more must be provided in order to dissolve in the heating step.

In particular, the refractory metal of the present invention may be a metal that reacts well with oxygen and / or carbon. That is, a refractory metal that reacts well with oxygen and / or carbon may be supplied so that the refractory metal supplied before heating is combined with oxygen and / or carbon to form a compound.

In step S30, the refractory metal may be supplied only to the upper portion of the ceramic material, or may be supplied only to the lower portion of the ceramic material. Alternatively, the refractory metal may be supplied to the entire upper and lower portions of the ceramic material.

After the refractory metal is supplied to the upper portion and / or the lower portion of the ceramic material, the ceramic material may be heated to perform a plate joining step (S50) of forming a plate as a plated plate member.

The ceramic material in a powder state in the plate plasticizing step (S50) may be firstly heated at a temperature of 1200 to 1600 ° C to form a plated plate member having a density of 1.6 to 2.5 g / cm ³ have.

The refractory metal supplied to the upper portion and / or the lower portion of the ceramic material reacts with carbon and / or oxygen in the plate plasticizing step (S50) to form carbide and / or oxide on the surface of the plate.

Carbon and / or oxygen need to be removed as much as possible for the uniform color of the heater as a factor causing the partial color change of the ceramic in the plate plasticizing step (S50).

Accordingly, in the present invention, it is possible to minimize the processing time by removing carbon and / or oxygen as much as possible in the plate plasticizing step (S50) by supplying a refractory metal which is sensitive to carbon and / or oxygen, There is an advantageous effect that can be prevented.

The refractory metal that can be supplied in one embodiment of the present invention is molybdenum (Mo), tungsten (W), or molybdenum (Molybdenum) having a melting point higher than that of iron and having a high reactivity with carbon and / , Hafnium (Hf), niobium (Nb), or the like can be used.

That is, any one of molybdenum (Mo), tungsten (W), hafnium (Hf), and niobium (Nb) may be supplied to the upper and / or lower portions of the ceramic material as a refractory metal.

Of course, the refractory metal to be supplied is not limited to the above-mentioned metals, and any metal having a melting point that is high enough to melt in the plasticizing process and high in reactivity with oxygen and / or carbon can be used.

In the sintered body manufacturing method of the present invention, the refractory metal may be supplied in various forms. That is, they may be supplied in various forms such as a powder form, a paste form, a sheet form, and the like, instead of being limited to one form.

According to an embodiment of the present invention, the refractory metal may be supplied in the form of a sheet, and a refractory metal sheet may be attached to the upper portion of the ceramic material, A refractory metal sheet may be attached. Of course, a (refractory) sheet of metal may be attached to both the top and bottom of the ceramic material.

The refractory metal sheet reacts with carbon and / or oxygen to form carbides and / or compounds on the top and / or bottom of the ceramic material.

According to another embodiment of the present invention, the refractory metal may be supplied in the form of a paste. The paste form means a medium hardness between a solid and a liquid, and means a substance which is sticky like a paste.

That is, a refractory metal may be supplied to the top and / or bottom of the ceramic material as an intermediate phase between the solid and the liquid.

When the refractory metal is supplied in the form of a paste, it may be applied to the upper portion of the ceramic material and / or the lower portion of the ceramic material by a brush-like tool. As a matter of course, the brush is one embodiment in supplying the refractory metal in paste form, but the supply tool is not limited thereto.

The refractory metal supplied in the form of paste in the top and / or bottom of the ceramic material may react with carbon and / or oxygen to form carbides and / or oxides on the surface of the plated plate.

According to another embodiment of the present invention, the refractory metal may be supplied in the form of a powder. That is, a refractory metal may be sprayed onto the top and / or bottom of the ceramic material.

The refractory metal in the form of a powder has a larger surface area and thus becomes more reactive with carbon and / or oxygen. Therefore, a refractory metal in the form of powder supplied to the upper and / or lower portions of the ceramic material reacts with carbon and / or oxygen on the surface to form carbides and / or oxides.

Refractory metal in the form of powder can be sprayed onto the surface by a tool such as a spray. Of course, as refractory metal powder is sprayed and supplied, spraying is only one example, and the supply tool is not limited thereto.

As described above, the refractory metal may be supplied to the upper and / or lower portions of the ceramic material before the plate plasticizing step (S50) is performed. (S30)

At this time, embodiments in which the refractory metal is supplied in the form of powder, paste, or sheet have been described in detail. However, the form in which the refractory metal is supplied is not limited thereto, and any type of refractory metal may be supplied in the refractory metal supply step (S50) if it can be supplied to the ceramic material.

2 is a flowchart of a method for manufacturing a sintered body according to a second embodiment of the present invention. In FIG. 2, the same reference numerals as in FIG. 1 denote the same steps, and a duplicate description thereof will be omitted for convenience of explanation.

In the method of manufacturing a sintered body according to the second embodiment, an oxide and / or a carbide removing step (S70) for removing an oxide and / or a carbide formed on the surface of the plastic plate after the plate plasticizing step (S50) is performed is performed .

As described above, in the method of manufacturing a sintered body according to the present invention, since a refractory metal reacting with carbon and / or oxygen is supplied to the upper and / or lower portions of the ceramic material, oxides and / or carbides are formed on the surface of the plated plate There is an advantageous effect that the bar can be easily removed.

It is possible to produce a sintered body having a low content of oxygen and / or carbon by removing the oxide and / or carbide formed on the surface thereof, and a ceramic heater including such a sintered body can be manufactured.

The method of removing the oxide and / or carbide formed on the surface is not limited, and the oxide and / or the carbide can be easily removed from the surface by further performing a process such as etching.

3 is a flowchart of a method of manufacturing a sintered body according to a third embodiment of the present invention.

In this embodiment, first, the ceramic material in a powder state is first heated under a temperature of 1200 to 1600 ° C to form a plate, which is a plated plate member having a density of 1.6 to 2.5 g / cm ³ . Step S11 may be performed.

Here, the plasticized plate has such a comparatively small property that it shrinks at a shrinkage ratio of 20 to 50% in the thickness direction when it is changed into a completely sintered state in the plate second complete sintering step (S51), which will be described later.

After the plate primary sintering step S11 is performed, a reflowing metal supplying step S31 for supplying a refractory metal to the upper and / or lower surfaces of the plated plates may be performed.

At this time, the refractory metal supplied in the refractory metal supply step S31 is the same as that described in the first embodiment, and will not be repeatedly described for convenience of explanation.

As will be described later, in the second plate complete sintering step, a metal having a melting point of 1650 or more must be provided in order to prevent melting at a temperature of about 1650 to 1800 in a heating step.

As described above, the refractory metal that can be supplied in one embodiment of the present invention is molybdenum (Mo) having a melting point higher than the melting point of iron and having a high reactivity with carbon and / or oxygen, Tungsten (W), hafnium (Hf), niobium (Nb), or the like can be used.

That is, any one of molybdenum (Mo), tungsten (W), hafnium (Hf) and niobium (Nb) is supplied as refractory metal to the upper and / .

And the plate second complete sintering step (S51) may be performed after the reflowing metal is supplied to the upper and / or lower surfaces of the plated plates in the refractory metal refining step (S31).

When the plated plate with the refractory metal supplied to the surface of the plasticized plate is heated at a temperature of 1650 to 1800 ° C secondarily and pressurized for a predetermined time, the plasticized plate is completely sintered so that the density Lt; ³ > to 3.4 g / cm < ³ >.

At this time, in the plate second complete sintering step (S51), oxygen and / or carbon is pushed to the surface of the plasticized plate to react with the refractory metal supplied to the surface. Therefore, in the plate second complete sintering step (S51), a carbide and / or an oxide formed by reacting a refractory metal with carbon and / or oxygen is formed on the surface of the plated plate.

As described above, the refluxed metal supplied to the upper and / or lower surface of the plasticized sintered metal in the reflowed metal supply step S31 may react with oxygen and / or carbon in the plate second complete sintering step S51 .

At this time, the shape of the reflux metal supplied in the refueling metal supply step (S31) is not limited and can be supplied in various forms. The manner in which the refractory metal is supplied is the same as that described in the first embodiment and is not repeatedly described for convenience of explanation.

4 is a flowchart of a method for manufacturing a sintered body according to a fourth embodiment of the present invention. In FIG. 4, the same reference numerals as in FIG. 3 denote the same steps, and a duplicate description thereof will be omitted for convenience of explanation.

The sintered body manufacturing method according to the fourth embodiment includes an oxide and / or carbide removing step (S71) for removing the oxide and / or carbide formed on the plate surface that has been completely sintered after the plate second complete sintering step (S51) .

As described above, in the method of manufacturing a sintered body according to the present invention, since the refractory metal reacting with carbon and / or oxygen is supplied to the upper surface and / or the lower surface of the plasticized plate, the oxide and / There is an advantageous effect that it can be easily removed as it is formed on the plate surface.

The oxide and / or the carbide formed on the surface of the completely sintered plate are removed, so that a sintered body having a low content of oxygen and / or carbon can be manufactured, and a ceramic heater including the sintered body can be manufactured, have.

The method of removing the oxide and / or carbide formed on the surface of the fully sintered plate is not limited, and the oxide and / or carbide can be easily removed from the surface by further performing a process such as etching.

One embodiment of the present invention discloses a method of manufacturing a ceramic heater including a firing assembly manufactured by the above-described method of manufacturing a sintered body.

FIG. 5 is a cross-sectional view showing a ceramic heater according to an embodiment of the present invention, and FIG. 6 is an enlarged view of an "A" portion of the ceramic heater shown in FIG. 7 is an exploded cross-sectional view of the ceramic substrate shown in Fig.

5 to 7, a ceramic heater 100 according to a preferred embodiment of the present invention is a ceramic heater for heating a semiconductor wafer. The ceramic heater 100 includes a ceramic substrate 90, A heat generating member 40, and a static electricity generating electrode 50. The electrostatic generating electrode 50 is made of a metal,

The ceramic substrate 90 is a circular plate member having a central axis C as the center of a circle and has a coefficient of thermal expansion of 4.4 * 10 ^-6 * K ^-1 Aluminum nitride (AlN) or a coefficient of thermal expansion of 8.0 * 10 ^-6 * K ^-1 Aluminum oxide (Al ₂ O ₃ ), or the like. In this embodiment, aluminum nitride (AlN) is used.

The ceramic substrate 90 includes an intermediate plate 10, an upper plate 20 and a lower plate 30 as shown in FIG.

On the upper surface of the intermediate plate 10, a static electricity generating electrode receiving groove 11 capable of accommodating the static electricity generating electrode 50 is formed.

The depth H2 of the electrostatic generating electrode receiving groove 11 is determined in consideration of the total volume of the electrostatic generating electrode 50 and the contraction ratio of the intermediate plate 10 and the top plate 20, (20% to 40%) of the thickness (T2) of the substrate (50).

The upper plate 20 is a circular plate member having the central axis C as the center of the circle and is disposed on the upper surface of the intermediate plate 10. [ On the upper surface of the upper plate 20, an object receiving groove 21 on which a semiconductor wafer as an object to be heated can be mounted is formed.

The lower plate 30 is a circular plate member having the center axis C as the center of the circle and is disposed on the lower surface of the intermediate plate 10. [ A heating member receiving groove 31 is formed in the upper surface of the lower plate 30 to receive the heating member 40.

The depth H1 of the heating member receiving groove 31 is determined in consideration of the total volume of the heating member 40 and the shrinkage ratio of the intermediate plate 10 and the lower plate 30, Of the thickness (T1) of the substrate.

As shown in Fig. 5, the hollow sheath 3 is a pipe-shaped ceramic member having a hollow H therein, and is hermetically attached to the lower surface of the ceramic substrate 90. Therefore, the hollow H is hermetically isolated from the outside.

The hollow sheath 3 is made of aluminum nitride (AlN) of the same material as the ceramic substrate 90 as a raw material. A first electricity supply member (6) and a second electricity supply member (7) are disposed inside the hollow sheath (3).

FIG. 8 is a plan view of a heating member according to an embodiment of the present invention, and FIG. 9 is a front view of the heating member shown in FIG.

The heating member 40 is a member that dissipates heat by electricity and is disposed between the intermediate plate 10 and the lower plate 30 as shown in FIG.

The heating member (40) is seated in the heating member receiving groove (31) of the lower plate (30).

In the present embodiment, the heating member 40 is formed by bending a metal wire having a diameter T1 extended in the longitudinal direction, and a disk-shaped heating wire 40 having a predetermined thickness T1 is used do.

The hot wire 40 may be made of a conductive metal such as molybdenum (Mo) or tungsten (W) as a wire having a circular cross section with a predetermined diameter T1. In this embodiment, molybdenum Mo). Here, the thermal expansion coefficient of the molybdenum (Mo) has a value of 5.1 * 10 ^-6 * K ^-1 , and the thermal expansion coefficient of the tungsten (W) has a value of 5.4 * 10 ^-6 * K ^-1 .

3.0*10^-6*K^-1의 오차 범위 이내의 값을 가지게 된다.Therefore, the coefficient of thermal expansion of the heat ray 40 is smaller than the coefficient of thermal expansion of the ceramic substrate 90

3.0 * 10 ^-6 * K ^-1 .

As shown in Figs. 8 and 9, the heat ray 40 is two-dimensionally wired in close contact with a virtual two-dimensional plane substantially parallel to the upper surface of the ceramic substrate 90. [ Therefore, the heat ray 40 is wired so as not to protrude from the two-dimensional plane, so that the arrangement thickness T1 of the heat ray 40 has the same value as the diameter T1 of the heat ray 40. [ In the present invention, the virtual two-dimensional plane does not mean only a mathematically perfect plane.

8, the heat line 40 includes a right half portion 40a disposed on the right side of the ceramic substrate 90 with respect to the separation line S and a right half portion 40b disposed on the left side of the ceramic substrate 90 And the left half 40b.

In the present embodiment, the hot wire 40 is manufactured by bending one wire without a separate joining operation.

The right half 40a and the left half 40b are provided with a plurality of circular arcs 44 arranged on a plurality of concentric circles with the center axis C of the ceramic substrate 90 as the center of the circle, And a plurality of engaging portions 45 for connecting the arcuate portions 44 disposed on the outer circumferential surface.

One end 41 of the right half 40a and one end 42 of the left half 40b are connected to the first connection member 8 to receive electricity, (C) of the ceramic substrate 90 so as to communicate with the inside of the hollow (H) of the ceramic substrate (3).

The other end of the right half 40a and the other end of the left half 40b are connected to each other at a connection point 43 located at the outermost portion of the ceramic substrate 90.

The heat ray 40 is formed in a zigzag shape. Here, the pitch and the amplitude of the shear wave of the hot wire 40 may have different values depending on the wired eight positions on the ceramic substrate 90.

4, the pitch of the hot line 40 in the vicinity of the central axis C of the ceramic substrate 90 is smaller than the pitch of the remaining partial hot lines 40. In this embodiment, However, the pitch of the heat ray 40 has the same value on the same concentric circle.

8, the amplitude of the heat line 40 wired on the concentric circle closest to the center axis C of the ceramic substrate 90 is larger than the amplitude of the remaining partial heat line 40 . However, the amplitude of the heat ray 40 has the same value on the same concentric circle.

The electrostatic generating electrode 50 is a disc-shaped metal member having an electrode line 51 formed in a mesh shape, and is a member for generating a static electricity for adsorbing a semiconductor wafer or generating plasma.

The electrostatic generating electrode 50 is disposed between the intermediate plate 10 and the upper plate 20 as shown in FIG. 6 and has a predetermined thickness T2 as shown in FIG. The electrostatic generating electrode 50 is seated in the electrostatic generating electrode receiving groove 11 of the intermediate plate 10.

10 is a flow chart according to the first embodiment of the method of manufacturing the ceramic heater of the present invention. In FIG. 10, the same reference numerals as in FIG. 1 denote the same steps, and a duplicate description thereof will be omitted for convenience of explanation.

As described above, the plasticized plate can be formed according to the first embodiment of the sintered body manufacturing method of the present invention.

That is, as shown in FIG. 10, the ceramic material preparing step S10, the reflowing metal supplying step S30, and the plate plasticizing step S50 can be sequentially performed.

Accordingly, the supplied leached metal reacts with oxygen and / carbon to form a plate on which oxides and / or carbides are formed.

Thereafter, in order to manufacture the ceramic heater according to the present embodiment, an upper plate 20, an intermediate plate 10, and a lower plate 30 providing step (S100) for providing the upper plate 20, the intermediate plate 10 and the lower plate 30 ). ≪ / RTI >

In the method of manufacturing a ceramic heater according to the present embodiment, the upper plate 20, the intermediate plate 10 and the lower plate 30 are provided with the ceramic material preparing step S10, the reflowing metal supplying step S30, the plate plasticizing step S50, And a ceramic material in powder form to be a material of the plate.

At least one of the upper plate 20, the intermediate plate 10 and the lower plate 30 is formed by the ceramic material preparing step S10, the reflowing metal supplying step S30, And a plastic plasticizing step (S50).

The electrostatic generating electrode receiving groove 11 and the heating member receiving groove 31 may be formed by cutting in the upper plate 20, intermediate plate 10 and lower plate 30 forming step S100.

After the upper plate 10, the intermediate plate 30, and the lower plate 50 are formed (S100), a heating member and a static electricity generating electrode placement step S120 may be performed.

The heating wire 40 is disposed in the heating member receiving groove 31 of the lower plate 30 and the middle plate 10 is disposed on the heating wire 40. The static electricity generating electrode The electrostatic generating electrode 50 is disposed in the receiving groove 11 and the top plate 20 is placed on the electrostatic generating electrode 50 in order.

Thereafter, a heat pressing step (S140) for heating and pressing the upper plate 20, the intermediate plate 10 and the lower plate 30 can be performed. The lower plate 30, the heat ray 40, the intermediate plate 10, the static electricity generating electrode 50, and the upper plate 20, which are sequentially disposed in the heating and pressing step S140, can be disposed in the hot press.

(Not shown) includes a cylindrical side mold for supporting the side surfaces of the intermediate plate 10, the upper plate 20 and the lower plate 30, an upper mold for pressing the upper surface of the upper plate 20, And a lower mold supporting and supporting the lower surface of the lower plate 30. This device is used for hot pressing.

The hot press is driven to lower the upper mold in a state where the intermediate plate 10, the upper plate 20 and the lower plate 30 are heated at a temperature of 1650 to 1800 ° C secondarily, The intermediate plate 10, the upper plate 20 and the lower plate 30 are completely sintered so that the densities of the intermediate plate 10, the upper plate 20 and the lower plate 30 are changed to 3.0 to 3.4 g / cm ³ , thereby completing the manufacture of the ceramic substrate 90 .

Thereafter, the hollow sheath 3 is joined to the lower surface of the ceramic substrate 90, and other finish machining is performed to complete the manufacture of the ceramic heater 100.

The ceramic heater manufacturing method includes a ceramic material preparing step (S10), a reflowing metal supplying step (S30) for supplying refractory metal to the upper and / or lower portions of the ceramic material, and a plasticized plate by heating the ceramic material The intermediate plate 10 and the intermediate plate 10 are formed such that at least one of the upper plate 20, the intermediate plate 10 and the lower plate 30 includes the plasticized plate, Since the step S100 of providing the bottom plate and the step of arranging the electrostatic generating electrodes S120 and S140 are included in the step S130, Refracting metal), carbon and / or oxygen reacts with the surface of the refractory metal to form carbide and / or oxide on the surface of the plate, so that the electrostatic generating electrode 50 and the heat ray 40 are sintered Oxidized or carbonized in the city Because there is an advantage that the durability is increased. If the static electricity generating electrode 50 and the heat ray 40 are oxidized or carbonized, the life and performance of the metal members 40 and 50 are reduced, and the risk of cracking and discoloration of the ceramic substrate 90 It grows.

The method of manufacturing the ceramic heater may further include heating the upper plate 20, the intermediate plate 10 and the lower plate 30 by heating the upper plate 20, the intermediate plate 10, and the lower plate 30 by the second- 30 are bonded to each other while changing into a completely sintered state, there is an advantage that the ceramic material in a powder state necessary for bonding the completely sintered bodies to each other is not required to be used as an adhesive.

11 is a flowchart of a method of manufacturing a ceramic heater according to a second embodiment of the present invention. In FIG. 11, the same reference numerals as in FIGS. 1, 2, and 10 denote the same steps, and a duplicate description thereof will be omitted for convenience of explanation.

In the method of manufacturing a ceramic heater according to this embodiment, an oxide and / or a carbide removing step (S70) for removing an oxide and / or a carbide formed on a surface of a plastic plate after the plate plasticizing step (S50) is performed is performed .

A detailed description of the oxide and / or carbide removal step (S70) is not repeated for the sake of convenience of description, as described above in the method of manufacturing the sintered body according to the second embodiment.

12 is a flowchart of a method of manufacturing a ceramic heater according to a third embodiment of the present invention. In FIG. 12, the same reference numerals as in FIG. 3 and FIG. 10 denote the same steps, and redundant description thereof will be omitted for convenience of explanation.

The method of manufacturing a ceramic heater according to this embodiment can form a fully sintered plate according to the third embodiment of the method for manufacturing a sintered body as described above.

That is, as shown in FIG. 12, the plate primary sintering step S11, the reflowing metal supplying step S31, and the plate secondary complete sintering step S51 can be sequentially performed.

Thus, a fully sintered plate can be formed in which oxygen and / carbon react with the supplied leached metal to form oxides and / or carbides on the surface.

In the ceramic heater manufacturing method according to the present embodiment, the upper plate 20, the intermediate plate 10 and the lower plate 30 are subjected to a plate primary sintering step S11, a reflux metal feeding step S31, (S51), or a ceramic material in powder form to be the material of the plate.

At least one of the upper plate 20, the intermediate plate 10 and the lower plate 30 is subjected to a plate primary firing step S11, a reflowing metal supplying step S31, , And a plate secondary complete sintering step (S51).

At least one of the plate primary sintering step S11, the reflowing metal supplying step S31 and the plate secondary sintering step S11 are performed as described above in the upper plate 20, the intermediate plate 10 and the lower plate preparing step S100. And a complete sintering step (S51) are sequentially performed.

That is, at least one of the upper plate 20, the intermediate plate 10 and the lower plate 30 is subjected to a plate second complete sintering step (S51) in a state in which a refractory metal is supplied to the surface, Oxide and / or carbide may be formed on the surface by reacting with carbon.

After the upper plate 20, the intermediate plate 10 and the lower plate 30 are prepared, the heat generating member and the electrostatic generating electrode arranging step S120 and the heat pressing step S140 may be sequentially performed, The method for manufacturing a ceramic heater according to the first embodiment has not been described repeatedly for the sake of convenience of the explanation described above.

13 is a flowchart of a method of manufacturing a ceramic heater according to a fourth embodiment of the present invention. In FIG. 13, the same reference numerals as in FIG. 4 and FIG. 10 denote the same steps, and redundant description thereof will be omitted for convenience of explanation.

The method for manufacturing a ceramic heater according to the present embodiment is characterized in that an oxide and / or a carbide removing step (S71) for removing oxides and / or carbides formed on the surface of the plate which has been completely sintered after the plate second complete sintering step (S51) .

The oxide and / or carbide removal step (S71) is not described in detail for the sake of convenience of description, as described above in the method of manufacturing the sintered body according to the fourth embodiment.

The electrostatic generating electrode receiving groove 11 is formed on the upper surface of the intermediate plate 10 but may be formed on the lower surface of the upper plate 20 or on the upper surface of the intermediate plate 10, And it may be formed on the lower surface of the upper plate 20.

The heating member receiving grooves 31 are formed on the upper surface of the lower plate 30 but may be formed on the lower surface of the intermediate plate 10 or may be formed on the lower surface and the lower surface of the intermediate plate 10. [ (Not shown) may be formed on the upper surface of the base 30.

In the above-described embodiment, the upper plate 20, the intermediate plate 10 and the lower plate 30 are mounted in order from the top in the order of the hot-pressing unit, but the lower plate 30, the intermediate plate 10, Of course. In this case, the electrostatic generating electrode receiving groove 11 is formed in the upper plate 20, and the heating member receiving groove 31 is formed in the intermediate plate 10.

While the present invention has been particularly shown and described with reference to exemplary embodiments thereof, it is clearly understood that the same is by way of illustration and example only and is not to be construed as limiting the scope of the invention as defined by the appended claims. It will be understood by those skilled in the art that various changes in form and details may be made therein without departing from the spirit and scope of the present invention.

100: Ceramic heater
10: Intermediate plate
11: Static electricity generating electrode housing groove
20: Top plate
21: The object to be heated
23: upper surface of the upper plate
30: Lower plate
31: heating member receiving groove
33: Lower face of the lower plate
40: heating member, hot wire
50: electrostatic generating electrode
51: Electrode line

Claims (22)

A method for producing a sintered body,
A ceramic material preparing step of preparing a ceramic material in a powder state to be a material of a plate;
Supplying a refractory metal reacting with carbon and / or oxygen at a high temperature to an upper portion and / or a lower portion of the ceramic material in a powder state;
A plate plasticizing step of heating the ceramic material under a predetermined temperature to form a plate as a plated plate member;
Wherein the sintered body is made of a metal. The method according to claim 1,
And the carbon and / or oxygen reacts with the leached metal supplied to the upper and / or lower portions of the ceramic material in the plate plasticizing step. The method according to claim 1,
Wherein the refractory metal is provided in a sheet form on an upper portion and / or a lower portion of the ceramic material in the refractory metal supplying step. The method of claim 1, wherein
Wherein the refractory metal is provided in a paste form on an upper portion and / or a lower portion of the ceramic material in the refractory metal supplying step. 5. The method of claim 4,
Wherein the paste-like refractory metal is supplied to the upper and / or lower portions of the ceramic material by a brush and supplied to the refractory metal supplying step. The method according to claim 1,
Wherein the refractory metal is provided in the form of a powder in an upper portion and / or a lower portion of the ceramic material in the refractory metal supplying step. The method according to claim 6,
Wherein the refractory metal in the form of powder is injected and sprayed onto the upper and / or lower portions of the ceramic material. The method according to claim 1,
Wherein the refractory metal is any one of molybdenum (Mo), tungsten (W), hafnium (Hf), and niobium (Nb). The method according to claim 1,
A step of removing oxide and / or carbide removing the compound generated on the surface of the plate by reacting oxygen and / or carbon with the leached metal supplied to the upper and / or lower portions of the ceramic material after the plate plasticizing step is performed; ;
Further comprising a step of forming a sintered body. 10. The method of claim 9,
Wherein the oxide and the carbide removing step remove the upper surface and / or the lower surface of the plate on which the oxide and / or the carbide are formed by an etching process. A first primary plasticizing step of forming a plate as a platelike member by firstly heating the ceramic material in a powder state at a predetermined temperature;
Supplying a refractory metal reacting with carbon and / or oxygen at a high temperature to the upper surface and / or the lower surface of the plasticized plate;
A plate second complete sintering step of forming a plate as a completely sintered plate member by heating the plate secondarily under a predetermined temperature;
Wherein the sintered body is made of a metal. 12. The method of claim 11,
And the carbon and / or oxygen reacts with the leached metal supplied to the upper surface and / or the lower surface of the plate in the plate second complete sintering step. 12. The method of claim 11,
Wherein the refractory metal is any one of molybdenum (Mo), tungsten (W), hafnium (Hf), and niobium (Nb). 12. The method of claim 11,
And an oxide and / or a carbide which reacts oxygen and / or carbon with the leached metal supplied to the upper surface and / or the lower surface of the plate after the plate second complete sintering step is performed, Removing step;
Further comprising a step of forming a sintered body. 15. The method of claim 14,
Wherein the oxide and / or carbide removing step removes the upper surface and / or the lower surface of the plate, on which the oxide and / or the carbide are formed, according to an etching process. A method of manufacturing a ceramic heater,
A ceramic material preparing step of preparing a ceramic material in a powder state to be a material of a plate;
Supplying a refractory metal reacting with carbon and / or oxygen at a high temperature to an upper portion and / or a lower portion of the ceramic material in a powder state;
A plate plasticizing step of heating the ceramic material in a powder state to which the refractory metal is supplied at a predetermined temperature to form a plate as a plated plate member; And
An upper plate, an intermediate plate, and a lower plate for preparing an upper plate, an intermediate plate, and a lower plate made of a ceramic material in powder form to be a material of the plasticized plate or the plate;
A step of arranging a static electricity generating electrode for generating static electricity on the upper surface of the intermediate plate and a heat generating member for radiating heat on the lower surface of the intermediate plate and a static electricity generating electrode; And
And heating and pressing the upper plate, the intermediate plate, and the lower plate by heating and pressing the upper plate, the intermediate plate, and the lower plate, thereby bonding the upper plate, the intermediate plate, and the lower plate to each other,
Wherein at least one of the upper plate, the intermediate plate, and the lower plate is provided as the plasticized plate. 17. The method of claim 16,
After the plate plasticizing step is performed, before the upper plate, the intermediate plate, and the lower plate preparing step are performed,
And removing oxide and / or carbide removing the compound generated on the surface of the plate by reacting oxygen and / or carbon with the leached metal supplied to the upper portion and / or the lower portion of the ceramic material. 18. The method according to claim 16 or 17,
Wherein at least one of a lower surface of the upper plate and an upper surface of the intermediate plate is provided with a static electricity generating electrode receiving groove capable of accommodating the static electricity generating electrode. 18. The method according to claim 16 or 17,
Wherein at least one of the lower surface of the intermediate plate and the upper surface of the lower plate is provided with a heating member receiving groove capable of receiving the heating member 18. The method according to claim 16 or 17,
Wherein the heating member is a metal wire member elongated in the longitudinal direction and includes a heating wire that is two-dimensionally wired on a virtual two-dimensional plane substantially parallel to an upper surface of the ceramic substrate. A method of manufacturing a ceramic heater,
A first primary plasticizing step of forming a plate as a platelike member by firstly heating the ceramic material in a powder state at a predetermined temperature;
Supplying a refractory metal reacting with carbon and / or oxygen at a high temperature to the upper surface and / or the lower surface of the plasticized plate;
A plate second complete sintering step of forming a plate as a completely sintered plate member by heating the plate secondarily under a predetermined temperature;
An upper plate, an intermediate plate, and a lower plate preparing a top plate, an intermediate plate, and a bottom plate of a ceramic material in a powder state to be a material of the fully sintered plate or the plate;
A step of arranging a static electricity generating electrode for generating static electricity on the upper surface of the intermediate plate and a heat generating member for radiating heat on the lower surface of the intermediate plate and a static electricity generating electrode; And
And heating and pressing the upper plate, the intermediate plate, and the lower plate by heating and pressing the upper plate, the intermediate plate, and the lower plate, thereby bonding the upper plate, the intermediate plate, and the lower plate to each other,
Wherein at least one of the upper plate, the intermediate plate, and the lower plate is provided as the fully sintered plate. 22. The method of claim 21,
After the plate second complete sintering step is performed, before the upper plate, intermediate plate and lower plate preparing step are performed,
And removing the oxide and / or carbide from the plate surface by reacting oxygen and / or carbon with the leached metal supplied to the upper and / or lower surfaces of the plasticized plate. A method of manufacturing a heater.

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