KR101608821B1 - CFRP supporting apparatus for laser system - Google Patents

Abstract

The present invention relates to a laser machining apparatus comprising a base on which a sample to be machined is mounted and a laser machining section for performing laser machining on the sample, the laser machining apparatus comprising: a plurality of sample stages for loading the sample on the base; A vacuum pump for causing the sample to be vacuum-adsorbed with a predetermined distance to the upper portion of the sample table; and a vacuum pump for moving the position of the sample table vertically and horizontally along the rail portion in accordance with the size of the sample And a controller for controlling the vacuum pump and the driving motor.

Description

[0001] The present invention relates to a CFRP laser apparatus,

BACKGROUND OF THE INVENTION 1. Field of the Invention [0001] The present invention relates to a laser processing machine, and more particularly, to a sample fixing device for laser processing a fiber reinforced composite material.

A new material fiber is a carbon fiber reinforced plastic (CFRP) which combines a carbon fiber and a synthetic resin. It is 25% in weight compared with iron, but its strength is more than ten times. Therefore, it is applied to airplanes and automobiles. It contributes greatly to the improvement of fuel efficiency by light weight.

In addition, due to its excellent properties such as hardness and tensile strength, light weight, improved chemical resistance and temperature resistance, and lower thermal expansion rate, its application in application to wind energy, aerospace and defense industry, subsea oil field and gas field and composite pressure vessel .

In particular, the recent trend of the automobile industry is to increase the fuel efficiency according to the light weight. Therefore, the attempt to utilize the CFRP in the automobile industry is becoming the most active, and recently the concept car of the parent company It weighs about 800kg and the fuel consumption is 111.1km / ℓ. The most common examples of CFRPs currently applied to automobiles are automotive transmission gears and automotive head gaskets.

First, there are many toothed wheels in the automotive transmission. Thousands of revolving toothed wheels generate a lot of heat and oil to prevent wear. Nonetheless, gear wheels wear out, . In this case, CFRP instead of oil between the gear wheel and the gear wheel can reduce wear and prolong life.

In the past, metal was used as a gasket material. In recent years, CFRP, which is excellent in hardness, light weight, and temperature resistance, has been applied to the engine output We are trying to reduce the cause of degradation and ensure durability.

In order to apply such CFRP to automobile transmission gears or automobile head gaskets, it is necessary to cut to a suitable size. In the past, water jet method which cuts using water and abrasive was mainly used.

However, even when the conventional water jet method is applied, it is very difficult to cut curves or corners having a small radius. For example, as shown in Figs. 1A and 1B, if the minimum size of the CFRP processing cut surface is 0.8 mm or less, it is difficult to obtain a desired shape or material loss as shown in Fig. 1C. On the other hand, in the case of using a laser as in Korean Patent Laid-Open No. 10-2012-0006021, such a problem can be solved, and as shown in FIG. 1D, a much better shape can be obtained than the conventional water jet cutting have.

2 and 3, a general laser processing machine generally includes a processing table 20 on which a CFRP sample 40 to be processed is loaded, a CFRP sample 40 on the processing table 20, And a laser processing unit 10 for performing laser processing.

The laser beam 11 is irradiated from the laser head 15 attached to the distal end of another articulated robot and the laser head 15 irradiates the laser beam 11 from the optical fiber 16 11 are guided. The laser beam 11 is guided through the optical fiber 16 and an inert gas such as nitrogen gas is supplied through the auxiliary gas supply line 17 into the laser head 15 for irradiating the laser beam 11. [ When the laser beam 11 is irradiated toward the CFRP specimen 40 on the treatment table 20 while the laser beam 13 is guided into the laser head 15, To prevent clogging in the head 15.

At this time, when the CFRP sample to be processed has a very small thickness or a very small size, it may be shaken due to the auxiliary gas or air even by the laser processing, so that there is a restriction on obtaining a desired shape In addition, there is a problem that steps are generated on the surface of CFRP and processing is difficult.

Korean Patent Publication No. 10-2012-0006021

SUMMARY OF THE INVENTION It is an object of the present invention to provide a laser processing apparatus and a sample fixing apparatus therefor which can improve processing quality by eliminating or mitigating heat affected portions during laser machining .

In order to achieve the above object, a preferred embodiment of the present invention is a laser processing machine comprising a base on which a sample to be processed is mounted, and a laser machining portion for performing laser machining on the sample, A vacuum pump for causing the sample to be vacuum-adsorbed with a predetermined distance from the upper portion of the sample table; and a vacuum pump for sucking the sample, And a controller for controlling the vacuum pump and the driving motor. The sample holding device includes: a sample holder;

Further, a first gas injection hole or a first gas injection nozzle is formed on the sample stage, and an auxiliary gas is injected onto the lower surface of the sample through the first gas injection hole or the first gas injection nozzle do.

A second gas injection hole or a second gas injection nozzle is formed in the laser processing portion and an auxiliary gas is injected onto the upper surface of the sample through the second gas injection hole or the second gas injection nozzle do.

In addition, the control unit may control the degree of vacuum suction or control on / off of the suction by controlling the intensity of the suction of the vacuum pump, and the auxiliary gas to the first gas injection hole or the first gas injection nozzle Or the direction of the first gas injection nozzle can be controlled, and the position of the sample stage can be controlled through the driving motor.

Further, it is preferable that the sample is a CFRP material, and the laser processing unit uses a femtosecond laser.

In another preferred embodiment of the present invention, there is provided a laser machining apparatus comprising a sample to be machined and a first laser machining section for performing laser machining on the sample, the laser machining apparatus comprising: a hollow sample stage for loading the sample; A tilt shaft connected to the sample table and the rotating shaft for changing a tilt of the sample table, a vacuum pump for vacuum-adsorbing the sample at a predetermined distance from the sample table, And a controller for controlling the vacuum pump and the first driving motor and the second driving motor, and a controller for controlling the vacuum pump, the first driving motor and the second driving motor, Device.

In addition, the inclination axis is preferably formed in a multi-stage length-adjustable lever shape.

Further, a first gas injection hole or a first gas injection nozzle is formed on the sample stage, and an auxiliary gas is injected onto the lower surface of the sample through the first gas injection hole or the first gas injection nozzle do.

A second gas injection hole or a second gas injection nozzle is formed in the laser processing portion and an auxiliary gas is injected onto the upper surface of the sample through the second gas injection hole or the second gas injection nozzle do.

In addition, the control unit may control the degree of vacuum suction or control on / off of the suction by controlling the intensity of the suction of the vacuum pump, and the auxiliary gas to the first gas injection hole or the first gas injection nozzle Or the direction of the first gas injection nozzle can be controlled and the rotation and tilt of the sample stage can be controlled through the first and second driving motors.

In addition, it is preferable that a dual laser system is implemented by forming a second laser processing unit below the sample stage.

Further, it is preferable that the sample is a CFRP material, and the laser processing unit uses a femtosecond laser.

As described above, according to the present invention, the laser beam is directly contacted to the sample during the conventional laser processing, so that the sample to be laser-processed is not directly attached or stacked on the processing table such as the sample table, Or by cooling through the auxiliary gas injection to remove the heat affected portion, thereby improving the processing quality.

1A is a photograph showing a CFRP machined surface, FIG. 1B is an enlarged view of a circular display portion in the outer circumferential pattern of FIG. 1A, and FIG. Fig. 1C is a photograph showing water jet processing for CFRP in Fig. 1B, Fig. 1D is a photograph showing laser processing for CFRP in Fig. 1B,
2 is a view showing a general laser processing machine,
FIG. 3 is a schematic view of a laser process using the laser processor of FIG. 2,
4 is a view showing a CFRP sample fixing apparatus according to a first embodiment of the present invention,
5 is a view showing a heat affected zone effect,
FIGS. 6A and 6B are optical microscope photographs illustrating ablation with and without auxiliary gas, respectively. FIG. 6A shows an optical microscope photograph showing the case where the auxiliary gas is absent, FIG.
FIG. 7 is a view illustrating a connection line between a suction hole and a gas injection hole in the CFRP sample fixing device according to the first embodiment of FIG. 4;
FIG. 8 is a view showing that the CFRP sample fixing apparatus according to the first embodiment of FIG. 4 is adjusted to the size of the sample,
9A and 9B are graphs showing experiments using a picosecond laser and experiments using a femtosecond laser with respect to the same CFRP specimen of 1T thickness,
10 is a view showing a CFRP sample fixing apparatus according to a second embodiment of the present invention,
FIG. 11 is a view showing a sample to be processed at a desired angle in the CFRP sample fixing apparatus according to the second embodiment of FIG.

DETAILED DESCRIPTION OF THE PREFERRED EMBODIMENTS Hereinafter, embodiments of the present invention will be described in detail with reference to the accompanying drawings, but the present invention is not limited to or limited by the embodiments. In describing the present invention, a detailed description of well-known functions or constructions may be omitted for clarity of the present invention.

In the drawings, embodiments of the present invention are not limited to the specific forms shown and are exaggerated for clarity. Also, the same reference numerals denote the same components throughout the specification.

The singular forms herein include plural forms unless the context clearly dictates otherwise. Also, components, steps, operations and elements referred to in the specification as " comprises "or" comprising " refer to the presence or addition of one or more other components, steps, operations, elements, and / or devices.

2 and 3, the laser processing machine generally includes a processing table 20 on which a CFRP sample 40 to be processed is loaded and a CFRP sample 40 on the processing table 20, The present invention relates to a sample fixing device related to the treatment table 20 on which the CFRP sample 40 is loaded, and the difference is mainly described.

4 is a view showing a sample fixing apparatus 100 in a laser processing machine according to the first embodiment of the present invention.

4, the CFRP sample fixing apparatus 100 according to the first embodiment of the present invention includes a laser processing unit 10 and four sample beds 110 The CFRP sample 40 is placed on the upper side of the sample stage 110. The lower end of the CFRP sample 40 is connected to the lower end of the CFRP sample 40, (130). At this time, the number of the sample beds 10 is four in the most stable form, and is not limited to four, so that a plurality of sample beds 10 may be formed in the most suitable form, (150) may be formed on the base or stage (120) as a conventional treatment table (20).

A plurality of adsorption holes 111 are formed in the upper part of each sample stage 110 and a CFRP sample 40 is injected into the sample chamber 110 during suction operation of the vacuum pump 130 through the adsorption holes 111. [ (110). At this time, the CFRP sample 40 can be supported while maintaining a predetermined distance without directly contacting the CFRP sample 40 and the sample bed 110 supporting the CFRP sample 40 according to the suction of the vacuum pump 130. The CFRP sample 40 40 and the sample stage 110 depends on the strength of the suction of the vacuum pump 130, the suction strength of the vacuum pump 130 can be optimally controlled by the control unit.

In addition, a plurality of gas injection holes 112 may be formed on one side of the sample stage 110, and auxiliary gas may be injected through the gas injection holes 112 to cool the laser generated during the laser processing.

As described above, since the sample to be laser-processed is not directly attached to or stacked on the processing table of the sample stand, it is possible to improve the problem that the laser beam directly contacts the sample during the conventional laser processing, By cooling the gas through the gas injection, the heat affected zone can be removed, thereby improving the processing quality.

That is, as shown in FIG. 5, when a laser is irradiated on the sample to cut a metal or CFRP, for example, the surface is first melted by the high energy of the laser and the material is vaporized. At this time, a plasma is generated. Whether the plasma is efficiently removed determines the processing quality. In addition, very high heat is instantaneously generated, and the heat is affected by the heat, which is called a heat-affected part. If the surface to be processed is affected by unwanted heat, the material is deformed, There arises a problem that the quality of the machining is very poor. Accordingly, in the present invention, the effect of the heat-affected portion through non-contact with a plurality of adsorption holes on the sample stage 110 is eliminated, or an auxiliary gas such as nitrogen or oxygen is injected into the plurality of gas injection holes to relieve the heat- Or removed.

As shown in FIGS. 6A and 6B, the ablation according to the presence or absence of the auxiliary gas is illustrated. Compared with the case where the auxiliary gas shown in FIG. 6A is not provided, It can be confirmed that it has been relaxed.

FIG. 7 is a view showing a connection line between a suction hole and a gas injection hole in the CFRP sample fixing device according to the first embodiment of FIG.

7, a vacuum adsorption line and a line for supplying an auxiliary gas are separately connected. Inside each of the sample beds 110, an internal adsorption channel 132 connected to a plurality of adsorption holes 111 for vacuum adsorption, And an inner gas channel 162 as an inner movement passage of the auxiliary gas connected to the plurality of gas injection holes 112. The internal adsorption channel 132 is connected to the vacuum pump 130 through the external adsorption channel 131 and the internal gas channel 162 is connected to the gas supply unit 160 through the external gas channel 161 . At this time, the gas injection hole 112 connected to the inner gas channel 162 may be provided with a separate nozzle for controlling the auxiliary gas in a predetermined direction. That is, the gas injection hole 112 may be formed on the side surface of the sample stage 110 so as to be injected toward the laser processing site, or may be formed on one side of the sample stage 110 with a separate auxiliary gas It is possible to form the nozzle, to select the kind of the gas according to the shape of the sample, to input the nozzle, and to manipulate the direction of the nozzle. Therefore, it is possible to adjust the gas injection in a certain direction by using the separate gas injection nozzle, so that the auxiliary gas can be easily injected into the laser processing site.

The auxiliary gas supply line 162 may be provided on the sample stage 110 as well as the second auxiliary gas supply line may be guided into the laser processing unit 10. For example, have. That is, the laser processing unit 10 may be provided with a spray hole for spraying a laser beam or a separate second gas spray hole, or a second gas spray nozzle may be formed so that the auxiliary gas induced in the second auxiliary gas supply line When the laser beam is irradiated toward the CFRP sample 40 through the second gas injection hole or the second gas injection nozzle, the auxiliary gas is also sprayed toward the cutting position of the sample 40 to cool the heat generated during the processing , Or clogging in the laser head can be prevented.

Accordingly, the auxiliary gas is primarily injected through the gas injection hole or the gas injection nozzle formed in the laser processing part to the laser processing part to cool the heat generated during the processing, and the gas sprayed on the sample stage 110 Or the lower surface of the CFRP to be processed through the gas injection nozzle 162 may be cooled to eliminate or alleviate the heat affected zone effect.

FIG. 8 is a view showing that the CFRP sample fixing device according to the first embodiment of FIG. 4 is adjusted to the size of the sample.

As shown in FIG. 8, since the CFRP sample 40 to be processed has various sizes, the positions of the four sample beds 110 are adjusted to the size of the CFRP sample 40 to be processed, And can be moved upward, downward, leftward, and rightward along the guide 150.

And a driving motor (not shown) for moving each sample stage 110 so that each sample stage 110 can move up and down and left and right along the rail part 150, Four drive motors may be needed to connect and move each one. Accordingly, it is possible to further include a drive motor for moving each sample stage 110 and a control unit (not shown) for controlling the drive motor according to a set control program.

Accordingly, in the CFRP sample fixing apparatus according to the first embodiment of the present invention, the control unit controls the vacuum pump 130, the gas supply unit 160, and the driving motor, and controls the suction strength of the vacuum pump 130 Off of the suction can be controlled by controlling the degree of vacuum suction or on / off of the suction, and it is possible to control whether the auxiliary gas is supplied through the gas supply unit 160 and the direction of the nozzle, Can be controlled.

At this time, even if the sample is fixed through the vacuum adsorption process by knowing the size of the sample, the control unit may inevitably shift its position during the process. In this case, the existing process setting conditions, especially the alignment, And the focus area of the ray spot beam is important for this, which may have a considerable influence on the laser processing result.

For example, the control unit temporarily stops some of the adsorption functions of the four sample beds 110 but does not completely remove the adsorption of the four sample beds 110, And the position of the sample stage 110 can be controlled by controlling the drive motor to change the position of the rails.

Further, a dust collecting device (not shown) may be further provided to suction or remove soot generated in laser processing or fragments of the sample 40, connected to a vacuum suction line on the side or bottom of the sample stage 110 have. At this time, a suction line by a vacuum pump may be further connected to the laser head 15 as the laser processing portion.

In the CFRP manufacturing process, a picosecond laser or a femtosecond laser may be used as the microwave pulse laser. In the present invention, a femtosecond laser having a shorter pulse width than the picosecond laser is more preferable.

That is, in the present invention, the femtosecond laser has a pulse width of 100 fs, the fundamental wavelength is 800 nm, the pulse repetition rate is 1 kHz, and the maximum output is 10 W.

FIGS. 9A and 9B are graphs showing experiments using a picosecond laser and experiments using a femtosecond laser for the same CFRP specimen of 1T thickness, respectively. The picosecond laser has wavelengths of 355 nm, 532 nm and 1064 nm, To 8.2 MHz.

Referring to FIG. 9A, when the laser beam is machined with a pulse (12 ps) of a picosecond laser, it is difficult to obtain a shape having a large heat affected zone and a clean cut surface.

On the other hand, when the femtosecond laser is processed with a shorter pulse width (100 fs) as shown in FIG. 9B, the heat affected part has a maximum of 100 mu m on one side, and a good machined surface of the cut surface can be obtained.

In this way, although it is possible to cut in a processing experiment using a short pulse laser having a pulse width in the range of 100 picoseconds to 50 nanoseconds, it has been confirmed that the heat affected part is formed larger than the processing using the femtosecond laser, In addition, there is a disadvantage in that the loss of the processed surface is increased due to the thermal effect. Therefore, it is more preferable to use a femtosecond laser, which is a laser having a shorter pulse than the picosecond laser.

FIG. 10 is a view showing a sample fixing device 200 of a laser processing machine according to a second embodiment of the present invention, which is different from the sample fixing device 100 of the laser processing machine according to the first embodiment.

10, a CFRP sample fixing apparatus 200 according to the second embodiment of the present invention includes a laser processing unit 10, a hollow rectangular sample table 210 on which a CFRP sample 40 to be processed is placed, A rotation shaft 220 for supporting and rotating the sample stage 210 and a vacuum pump 230 for vacuum-adsorbing the CRFP sample 40 at a predetermined distance above the sample stage 210 have.

A plurality of adsorption holes 211 are formed on the quadrangular outer circumferential surface of each sample stage 210 and the CFRP sample 40 ) Is fixed on the sample table. At this time, the CFRP sample 40 can be supported while maintaining a predetermined distance without directly contacting the CFRP sample 40 and the sample bed 210 supporting the CFRP sample 40 according to the suction of the vacuum pump 230. The CFRP sample 40 40 and the sample stage 210 depend on the strength of the suction of the vacuum pump 230, the suction strength of the vacuum pump 230 can be optimally controlled by the control unit. Here, a nozzle for adsorbing vacuum may be provided in addition to the adsorption hole 211, and the position of the nozzle can be fluidly adjusted by changing the direction.

In addition, a plurality of gas injection holes 212 may be formed on one side of the sample stage 210, and auxiliary gas may be injected through the gas injection holes 212 to cool the laser generated during the laser processing.

In addition, the vacuum adsorption line and the line for supplying the auxiliary gas are separately connected. Inside each of the sample beds 210, an internal adsorption channel 232 connected to a plurality of adsorption holes 211 for vacuum adsorption, And an inner gas channel (262) as an inner movement passage of an auxiliary gas connected to the gas injection hole (212). The internal adsorption channels 232 are connected to the vacuum pump 2130 through the external adsorption channels 231 and the internal gas channels 262 are connected to the gas supply units 260 through the external gas channels 261 . At this time, the gas injection hole 212 connected to the inner gas channel 262 may be provided with a separate nozzle for controlling the auxiliary gas in a predetermined direction. That is, the gas injection holes 212 may be formed on the side of the sample stage 210 so as to be injected toward the laser processing site, or may be formed on one side of the sample stage 210 with a separate auxiliary gas It is possible to form the nozzle, to select the kind of the gas according to the shape of the sample, to input the nozzle, and to manipulate the direction of the nozzle. Therefore, it is possible to adjust the gas injection in a certain direction by using the separate gas injection nozzle, so that the auxiliary gas can be easily injected into the laser processing site.

The auxiliary gas supply line 262 may be provided on the sample stage 210 as well as the second auxiliary gas supply line may be introduced into the laser processing unit 10, have. That is, the laser processing unit 10 is provided with a spray hole for spraying the laser beam or a separate second gas spray hole or a second gas spray nozzle, and the auxiliary gas derived from the second auxiliary gas supply line When the laser beam is irradiated toward the CFRP specimen 40 through the second gas injection hole or the second gas injection nozzle, the auxiliary gas is simultaneously injected toward the cutting position of the specimen 40 to generate heat Or the clogging in the laser head can be prevented.

Accordingly, the auxiliary gas is injected into the laser processing site through the gas injection hole or the gas injection nozzle formed in the laser processing unit to cool the heat generated during the processing, and the gas sprayed on the sample stage 210 Or the lower surface of the CFRP to be processed through the gas injection nozzle 262 can be cooled to eliminate or alleviate the heat affected zone effect.

FIG. 11 is a view showing that the slope of the sample bed is adjusted in the CFRP sample fixing apparatus according to the second embodiment of FIG.

As shown in FIG. 11, it is possible to rotate the rotating shaft 220 supporting the sample stage 210 for laser processing at a desired angle, or adjust the vertical inclination of the sample stage 210 to reduce the inclination angle.

For this, a sample stage 210, a triangular supporter 250 for supporting the sample stage 210, and a rotary shaft 220 connected to the triangular supporter 250 may be formed.

The triangular supporter 250 is formed in the form of a multi-stage length-adjustable lever 251 so that the length of the triple supporter 250 can be adjusted in two or more stages in the interior thereof to determine the tilt of the upper / It is possible to adjust the tilt angle and the equilibrium by manipulating this length because of the control of the motor.

A first driving motor (not shown) connected to the rotating shaft 220 to rotate the sample stage 210 so that the sample stage 210 rotates 360 degrees horizontally along the rotating shaft 220, And a second driving motor (not shown) connected to the triangular support of the adjustable lever 21 to adjust the length of the adjustable lever 21. The first and second driving motors adjust the rotation / tilt of the sample table 210, And a control unit (not shown) for controlling the driving motor according to a set control program.

Accordingly, in the CFRP sample fixing apparatus according to the second embodiment of the present invention, the control unit controls the vacuum pump 230, the gas supply unit 260, and the first and second driving motors, The degree of vacuum suction can be controlled by controlling the intensity of the suction, on / off of the suction can be controlled, the supply of auxiliary gas through the gas supply part 260 and the direction of the nozzle can be controlled, The rotation / tilt of the sample stage 110 can be controlled through the two drive motors.

A dual laser system capable of processing a sample vacuum-adsorbed on a hollow sample bed 210 through upper and lower laser processing units 10 and 10a can be processed from the upper and lower sides.

Conventionally, laser beam and auxiliary gas are flowed from the upper part of the sample to process it. However, in case of thick material or very hard material, there is a limit to a single scan method using laser. In this case, if the processing is done in a way that the processing is done once and the Z-axis is lowered and processed again, the upper part is processed well, but the part which is in contact with the vacuum chuck or sample stand may not be processed well. As a result, dual laser systems can solve this problem.

Further, auxiliary gas can be injected in the upper part and the lower part to improve the quality of the processing.

As described above, in the present invention, CFRP is exemplified as a material containing at least carbon fibers. However, the present invention is not limited to this, and carbon fibers containing substantially carbon fibers may be used as the base material. It can be expanded to material.

Also, while the present invention has been described with reference to specific embodiments thereof and the like, it should be understood that the same is by way of illustration and example only, and is not for the purpose of limiting the same. In addition, the present invention is not limited to the above-described embodiments, and various modifications and changes may be made thereto by those skilled in the art to which the present invention belongs. Therefore, the spirit of the present invention should not be construed to be limited to the above-described embodiments, and all of the equivalents or equivalents of the claims, as well as the claims of the following claims belong to the scope of the present invention.

40: CFRP sample
100, 200: sample fixing device
110 and 210:
111, 211: Adsorption balls
112, 212: gas injection hole or gas injection nozzle
130, 230: Vacuum pump
160, 260: gas supply part

Claims (14)

1. A laser processing machine comprising a base on which a CFRP (Carbon Fiber Reinforced Plastic) sample is mounted, and a laser processing unit for performing laser processing on the CFRP sample,
A plurality of sample beds for loading the CFRP sample on the base; a plurality of adsorption holes formed on the sample chamber; A plurality of first gas injection holes or first gas injection nozzles formed on one side of the sample stage; A reamer that is a passage through which the sample chamber moves up and down and left and right; A vacuum pump for vacuum-adsorbing the CFRP sample at a predetermined distance from the upper portion of the sample; A driving motor for moving the position of the specimen stage up, down, left, and right along the rail portion according to the size of the CFRP specimen; The suction force of the vacuum pump is controlled through the suction holes to fix the CFRP sample to the sample bed or to control whether the auxiliary gas is supplied through the first gas injection hole or the first gas injection nozzle And a controller for controlling the position of the sample stage through the driving motor by spraying an auxiliary gas to the lower surface of the CFRP sample by operating the direction of the first gas injection nozzle. The method according to claim 1,
Wherein a second auxiliary gas supply line is guided into the laser processing unit and an auxiliary gas is injected onto the upper surface of the CFRP sample through a second gas injection hole or a second gas injection nozzle of the laser processing unit, . The method according to claim 1,
Wherein the laser processing unit uses a femtosecond laser. A laser processing machine comprising a CFRP (Carbon Fiber Reinforced Plastic) sample to be processed and a first laser processing part for performing laser processing on the CFRP sample,
A hollow sample stage for loading the CFRP sample; A plurality of adsorption holes formed on an upper portion of the sample stage; A plurality of first gas injection holes or first gas injection nozzles formed on one side of the sample stage; A rotating shaft for supporting the sample stage; A tilting axis connected to the sample table and the rotating shaft to change a tilt of the sample table; A vacuum pump for vacuum-adsorbing the CFRP sample at a predetermined distance from the upper portion of the sample; A first driving motor for rotating the sample table along the rotation axis, and a second driving motor for implementing the inclination angle of the sample table along the inclination axis; The suction force of the vacuum pump is controlled through the suction holes to fix the CFRP sample to the sample bed or to control whether the auxiliary gas is supplied through the first gas injection hole or the first gas injection nozzle And a control unit for operating the direction of the first gas injection nozzle to inject auxiliary gas onto the lower surface of the CFRP sample or to control the rotation and inclination of the sample bed through the first and second driving motors . 5. The method of claim 4,
Wherein the tilt axis is formed in a multi-stage length adjustable lever type. 5. The method of claim 4,
And a second auxiliary gas supply line is introduced into the laser processing unit to spray the auxiliary gas onto the upper surface of the CFRP sample through a second gas injection hole or a second gas injection nozzle formed in the laser processing unit. Fixing device .. 5. The method of claim 4,
And a second laser machining portion is formed on a lower portion of the sample stage. 8. The method of claim 7,
Wherein the first laser processing unit or the second laser processing unit uses a femtosecond laser. delete delete delete delete delete delete

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