KR101482045B1 - Cartride module for ion implant equipment - Google Patents

Abstract

The present invention relates to a cartridge module which holds a wafer in an ion implant process of manufacturing the wafer into a semiconductor by injecting an ion such as phosphorous and boron. Provided is a cartridge module of an ion implant equipment which applies an insert part including a lift pin sip seal at a cartridge center portion to realize a new type of lip seal replacing method, wherein only the insert part is detached from the replacing work instead of detaching the whole cartridge from an apparatus when replacing a lift pin lip seal, thereby improving efficiency of the replacing work by saving the replacing time and preventing a scratch or contamination of a body part which may be formed in the replacing process, while applying a method of assembling and using one integrated twist lip seal instead of a conventional method of vertically assembling and using two twist lip seals, thereby reducing damages which may occurr in a process of assembling a twist lip seal by securing convenience and safety in assembling.

Description

The present invention relates to a cartridge module for an ion implant device,

The present invention relates to a cartridge module of an ion implantation apparatus, and more particularly, to a cartridge module that serves to hold a wafer in an ion implant process for manufacturing a wafer into a semiconductor by implanting ions such as phosphorus and boron.

In general, ion implant equipment is a semiconductor device manufacturing equipment that accelerates ionized impurities in a vacuum atmosphere to specific energy and dopes them onto a masked wafer.

That is, it is an impurity implantation apparatus that uses the principle that accelerated ions penetrate the wafer surface when the ionized impurities are accelerated at high speed and shot toward the wafer surface.

In such ion implantation equipment, the depth of ion implantation can be determined by controlling the amount of impurities, the size of the atoms, the speed of the ions, and the time the wafer is exposed to the ion implantation beam.

The basic structure of such an ion implant device is disclosed in Korean Patent Laid-Open Nos. 10-2007-0069853 and Korean Patent No. 10-0765619.

Usually, the ion implantation process is performed by generating an ion plasma in the arc chamber, and then extracting and discharging the plasma from the arc chamber by the difference of the electric potential energy and injecting it into the wafer to be an ion implant target.

For example, in a process for manufacturing a semiconductor device, an ion implant process is performed by implanting a p-type impurity such as boron (B), aluminum (Al), indium (In) and antimony (Sb) P) and arsenic (As), into a plasma ion beam state, and then impregnating the semiconductor crystal to obtain a device of necessary conduction type and resistivity.

Such an ion implant process can easily control the concentration of impurities implanted into the substrate, and has the advantage that ions can be implanted into the surface by the desired ion species, the desired amount of ions, and the desired ion depth.

Typically, ion implantation equipment that performs an ion implant process includes a source head assembly for generating an ion beam, a manipulator assembly for extracting and extracting the ion beam, a tilt & twist assembly for the location of the wafer, assembly.

Figure 1 is a front view of a tilt & twist assembly of an ion implant instrument.

1, the tilt and twist assembly includes a twist block 100 having a platen 250 on which a wafer is placed, a tilt motor 110 for tilting the twist block 100, A tilt drive belt 120 and a gear 130, a twist block cabling 140 for twisting the twist block 100, and the like.

2 is a cross-sectional view schematically showing the internal structure of the cartridge module of the tilt & twist assembly.

2, the cartridge module includes a twist body 150 installed in a concentric structure and supported by bearings inside the twist block 100, a twist body 150 having a lift pin 160 at an upper end thereof, A lift pin assembly 170 installed along the axis of the lift pin assembly 170 and a plurality of lift pin lip seats 180 for maintaining the lift pin assembly 170 in a vacuum during up- A motor 190 and a gear 200 for up-down driving of the screw 170, and a screw driving unit 210, and the like.

Here, the reference numeral 220 denotes two lip seals up and down for vacuum maintenance between the twist block and the twisted body, reference numerals 230 and 240 denote differential pumping holes and twisted bearings, and reference numeral 250 denotes a platen.

Accordingly, the entire twist body 150 can be twisted by a twist motor (not shown) and a twist coupling (not shown) at the bottom, and a wafer (not shown) on the platen 250 can be twisted by a lift pin assembly May be spaced from the platen 250 by the up-down operation of the plunger (170).

In this cartridge module, the lift pin lip seal 180, which serves to maintain the vacuum at the up-down operation position of the lift pin assembly 170, is exposed to abrasion due to frequent friction with the lift pin assembly 170 side This is a consumable that requires periodic replacement.

However, in order to replace such a lift fin lip seal (lip seal spacer, center spacer, etc.), since the lift fin lip seal is mounted in the hole of the twisted body, It is necessary to disassemble the entire cartridge module.

In the case of replacing the lift pin lip seal, it takes about 8 hours. In addition, the operation is very difficult due to the narrow space of the chamber side. In addition, There is a disadvantage in that the efficiency of the replacement work is deteriorated.

Further, there is a problem that scratches or contamination of the twisted body parts may occur during the replacement process.

Meanwhile, the twist lip seal 220, which serves to maintain the vacuum in the twist operation part of the twist body 150 in the cartridge module, is composed of two upper and lower lip seals 220 and two lip seals 220 ) With a spacer interposed therebetween.

Even in the case of such a lip seal 220, periodic replacement is necessary due to abrasion due to frequent friction with the side of the twist body 150 and the like.

However, when the twist lip seals are replaced, the two upper and lower twist lip seals tightly mounted on the circumference of the twisted body must be forcibly removed, so that not only the time is long, but the operation is very troublesome, Even when reassembled with a new product, it is disadvantageous in terms of workability even in the case of skilled work such as assembling with a spacer interposed therebetween.

SUMMARY OF THE INVENTION Accordingly, the present invention has been made in view of the above circumstances, and it is an object of the present invention to provide an insert part including a lift pin lip seal, etc., It is possible to save a replacement time by implementing a new type of lip seal replacement method in which only the insert part can be separated and replaced without performing a disassembly in the body part, And to provide a cartridge module of an ion implantation apparatus which can improve the efficiency of replacement work such as prevention of contamination or the like.

Another object of the present invention is to provide a method of assembling and using a single integrated twist lip seal instead of assembling two lip seals existing up and down, A cartridge module of an ion implantation device capable of reducing the breakage phenomenon that may occur during assembly of a lip seal such as ease of use, safety, and promptness.

To achieve the above object, the present invention provides a cartridge module of an ion implant apparatus, which has the following features.

The cartridge module of the ion implantation device has a twisted body, which is supported in a twisted block in the tilt & twist assembly of the ion implant equipment and is installed in a concentric structure, and a twisted body having an upper lift pin and a lower lift shaft, A lift pin assembly installed along the axis of the body and capable of being lifted up and down; a plurality of lift fin lip seals for maintaining vacuum during up-down of the lift pin assembly; and drive means for up- And an insert having a lift lip lip seal. The insert is provided at a central portion of the twist body. The insert having the lift pin lip seal is inserted into the insert mounting portion of the twist body. As needed. And fastening the expression takes place in a fitting structure.

Therefore, the cartridge module of the ion implant equipment is characterized in that when the lift pin lip seal is replaced, the entire cartridge is not disassembled but only the insert is separated and replaced.

The insert may have a cylindrical insert body that accommodates a lift pin lip seal and an insert flange that is coupled to the twisted body. The insert body may include a groove for vacuum pumping, A vacuum pumping hole may be formed through the body to communicate therewith, and the insert body may include a first lift fin lip seal sequentially disposed from the top to the bottom along the body center axis, a first lip seal a lip seal spacer, a center spacer, a second lift pin lip seal, and a second lip seal spacer.

An insert cap may be fastened to an upper end of the insert to close an upper portion of a lift pin lip seal mounted at the uppermost position.

In order to achieve the above object, the present invention provides a cartridge module of an ion implantation system, which has the following features.

The cartridge module of the ion implantation device has a twisted body, which is supported in a twisted block in the tilt & twist assembly of the ion implant equipment and is installed in a concentric structure, and a twisted body having an upper lift pin and a lower lift shaft, A lift pin assembly mounted along an axis of the body and being capable of being lifted up and down; and a plurality of lift fin lip seals for maintaining vacuum during up-down of the lift pin assembly, driving means for up-down driving of the lift pin assembly, And a lip seal mounted on a circumferential surface of the body and sealing between the lip seal and the inner wall of the twist block while the lip seal has a vertical width corresponding to the vertical width of the twist body Which can cover the entire upper and lower width of the twisted body It may be made in form.

Therefore, the cartridge module of the ion implant equipment is characterized by being able to secure ease of assembly, promptness, and safety by applying one integral type lip seal.

A screw hole for fastening a plurality of jigs fastened to the jig side is formed on the upper surface of the integral twist lip seal when the integrated twist lip seals are disassembled and assembled using the jig, , It is desirable to secure safety.

The cartridge module of the ion implant equipment provided by the present invention has the following advantages.

First, by applying a lift pin lip seal to a single insert part and assembling it to a twisted body, it is possible to separate the insert part only without disassembling the entire cartridge when replacing the lip seal. And it is possible to shorten the replacement time as well as to prevent scratches and contamination of the twisted body, thereby improving the workability and improving the efficiency of the work.

Second, by applying the existing two twist lip seals and spacers, which are mounted on the twisted body, as a self-developed one-piece twist lip seal, it is possible to secure the ease of assembly and safety in the replacement operation, Damage and damage during assembly process can be reduced and the total number of parts can be reduced.

1 is a front view of a tilt & twist assembly of an ion implant device;
Figure 2 is a cross-sectional view schematically showing the internal structure of a cartridge module of a tilt &
3 to 5 are perspective views illustrating a cartridge module of an ion implantation apparatus according to an embodiment of the present invention.
6 is a cross-sectional view showing a cartridge module of an ion implantation apparatus according to an embodiment of the present invention
7 is a perspective view illustrating a lip seal assembly and separation jig in a cartridge module of an ion implantation apparatus according to an embodiment of the present invention.
8 to 10 are perspective views showing a cartridge module of an ion implantation apparatus according to another embodiment of the present invention.
11 is a sectional view showing a cartridge module of an ion implantation apparatus according to another embodiment of the present invention

Hereinafter, the present invention will be described in detail with reference to the accompanying drawings.

FIGS. 3 to 5 are perspective views showing a cartridge module of an ion implantation apparatus according to an embodiment of the present invention, and FIG. 6 is a cross-sectional view illustrating a cartridge module of an ion implantation apparatus according to an embodiment of the present invention.

As shown in FIGS. 3-6, the cartridge module of the ion implant machine is applied with an insert in the form of a single assembly including a lift pin lip seal, so that when the lift pin lip seal is replaced The time can be shortened, and the damage of the body parts can be prevented, thereby improving the efficiency of the replacement work.

To this end, a twist block (reference numeral 100 in Fig. 1) provided with a platen (reference numeral 250 in Fig. 1) on which a wafer is placed, a tilt motor for tilting the twist block 100 110), a tilt drive belt (reference numeral 120 in FIG. 1) and gears (reference numeral 130 in FIG. 1), a twist block cabling for twisting the twist block 100 A tilt & twist assembly is provided.

Inside the twist block 100, a cylindrical twist body 10, which is supported by a twist bearing (reference numeral 240 in FIG. 2) and capable of twisting, is installed in a concentric circular structure.

In this twisted body 10, a hole-like insert mounting portion 16 formed along the center axis of the cylinder is formed. The insert mounting portion 16 at this time has a stepped structure, So that it can be inserted and installed.

A differential pumping hole 25 is formed in the twisted body 10 so as to penetrate from the outer circumferential surface toward the center of the twisted body 10. The differential pumping hole 25 is formed in the groove 15 for vacuum pumping And the vacuum pumping hole 18, as shown in FIG.

Here, the vacuum pumping pressure provided through the differential pumping hole 25 improves the adhesion to the lift shaft 12 that moves up and down between two lip seals mounted inside the insert using a vacuum pressure , Tilt and twist assembly, it is necessary to maintain the vacuum state to be maintained during semiconductor wafer processing.

The lift pin assembly 13 is provided with a motor (reference numeral 190 in FIG. 2) and a gear (reference numeral 200 in FIG. 2), and a screw pin assembly And the wafer can be raised or lowered while the wafer W is lifted up by the east portion (reference numeral 210 in FIG. 2).

The body of the lift pin assembly 13 is formed in the shape of three integral arms arranged at an angle of about 120 degrees. A lift pin 11, which supports the wafer substantially, And the lift shaft 12 is vertically extended downwardly on the bottom surface of the center portion where the arms are gathered.

The lift pin assembly 13 is installed along the axis of the twisted body 10 to perform the up-down operation.

That is, the lift shaft 12 of the lift pin assembly 13 is disposed along the center axis of the insert 15 installed on the twist body 10, so that the lift pin assembly 13 is supported by the lift shaft 12 The user can move up and down while receiving the slide guide in the insert 15 through the slide 15.

In particular, the insert 15 is provided as a means for efficiently replacing the lift pin lip seal.

The insert 15 is integrally formed with a cylindrical insert body 15a having a hole on the central axis and a circular plate-shaped insert flange 15b formed on the upper end of the insert body 15a. A lift pin lip seal 14 and the like are accommodated in the hole of the body 15a and the insert flange 15b is fastened to the side of the twist body 10 to fix the entire insert.

For example, about three bolt-through holes 26 are formed in the insert flange 15b and the upper surface of the twist body 10, that is, the insert mounting portion 16 formed on the twist body 10 And a bolt fastening hole 27 corresponding to the bolt through hole 26 is formed on the bottom surface.

The bolt penetrating hole 26 in the insert flange 15b of the insert 15 is inserted into the insert mounting portion 16 of the twist body 10, It is possible to assemble the insert 15 on the side of the twisted body 10 by fastening the bolt to the bolt fastening hole 27 on the side of the twisted body 10 through the bolt.

Of course, when the bolt fastening portion at this time is loosened, the insert 15 can be easily separated from the twisted body 10.

Since the upper surface of the insert flange 15b is exposed with the same surface as the upper surface of the twist body 10 in the case of the insert 15 assembled with the twist body 10, Can be easily and quickly performed on the top surface of the twisted body.

A vacuum pumping groove 17 and a plurality of vacuum pumping holes 18 are formed in the insert body 15a of the insert 15. The groove for vacuum pumping 17 at this time has an outer circumferential surface And the vacuum pumping hole 18 is formed in such a manner as to penetrate through the thickness of the body from the vacuum pumping groove 17 and communicate with the inside of the body.

Since the lift pin lip seal 14 is assembled together with the insert 15 assembled in such a detachable structure, when the lift pin lip seal is replaced, the insert 15 is disassembled without disassembling the entire cartridge, It is possible to replace the lift pin lip seal after the separate separation, and as a result, the lift pin lip seal replacement operation can be performed very effectively.

A first lip seal spacer 19, a first lift fin lip seal 14a, a center spacer (not shown) are formed along the body center axis in the interior of the insert 15, i.e., inside the insert body 15a 20, a second lift pin lip seal 14b, and a second lip seal spacer 21 are sequentially arranged from top to bottom.

At this time, the center spacer 20 is also provided with a vacuum pumping groove 17 and a vacuum pumping hole 18 in the insert body 15a having the same structure as the vacuum pumping groove 17 and the vacuum pumping hole 18, So that the vacuum pumping pressure can be provided up to this point.

A threaded portion 28 is formed on the upper end of the insert 15 or the upper end portion of the central hole and a ring-shaped insert cap 22 is installed on the threaded portion 28 at this time. The top of the uppermost lift pin lip 16, i.e., the first lift pin lip seal 14a, built into the first lift pin 15 can be closed.

A lip seal spacer 19, a first lift fin lip seal 14a, a center spacer 20 and a second lift fin lip seal (not shown) are inserted into the insert 15 14b and lip seal spacers 21 are installed in order and the insert 15 is closed by the insert cap 22 at this time the insert 15 at the insert mounting portion 16 And the lift shaft 12 of the lift pin assembly 13 is inserted into the insert 15 so assembled.

During the up-down operation of the lift pin assembly 13, the vacuum of the operating part can be maintained by the lift pin seal lip 14 inside the insert 15.

Therefore, by providing a structure in which the twist body 10 can be separated and assembled, and the lift pin seal lip 14 is integrally assembled into the insert 15, In the case of replacing the lift pin lip seal 14, if the insert 15 is removed separately without disassembling the entire cartridge, the lift pin lip seal 14 therein can be easily replaced It is possible to efficiently perform the replacement work of the lift pins such as the lift pins.

For example, the bolts fastened to the insert flange 15b of the insert 15 are loosened to separate the insert 15 from the twisted body 10 and then the insert cap 22 fastened to the insert 15 It is possible to easily carry out the replacement work by loosening and removing the damaged lift lip seal 14 therein and again inserting a new lift lip seal 14.

Further, in the present invention, a twist lip 23 interposed between the twist block 100 and the twisted block 100 during the twist operation of the twisted body 10 performs a vacuum action on the operation area.

Particularly, the twist lip seal 23 is formed as a unitary structure rather than a two-piece structure in which spacers are disposed in the center as above.

That is, the lip seal 23 is formed in a ring shape having a vertical width corresponding to the vertical width of the twist body 10, and the lip seal 23 at this time is formed in a shape of a twisted body 10 and the inner peripheral wall surface of the twist block 100, the upper and lower widths of the twisted body 10 can be covered.

A plurality of threaded holes 24 for fastening the jig are formed on the upper surface of the lip seal 23 so that the threaded holes 24 are fastened to the jig side with bolts. It is possible to easily remove and mount the lip seal 23 by operation.

7, the jig 29 includes a ring-shaped fastening portion 29a which can be closely contacted with the upper surface of the lip seal 23, And a plurality of bolts 29c fastened to the screw holes 24 on the upper surface of the lip seal 23 are attached to the fastening portions 29a Respectively.

Therefore, when the fastening portion 29a of the jig 29 is in close contact with the upper surface of the lip seal 23 mounted on the outer circumferential surface of the twisted body 10, The lip seal 23 is fastened from the twisted body 10 when the handle 29c is fastened to the screw hole 24 in the lip seal 23 and the handle structure 29b is pulled. So that it can be easily separated.

Further, even in the case of assembling, the lip seal 23 is attached to the side of the jig 29 and then the lip seal 23 is aligned with the periphery of the twist body 10 The lip seal 23 can be easily assembled to the twisted body 10 without damaging it.

As described above, instead of the conventional method in which the two lip seals are assembled upside and down, an integrated type twist lip seal is assembled and used, thereby assuring ease of assembly and safety , And lip seals that can be generated during the assembly process. Due to the slight damage of the lip seals during the process of assembling the lip seals, the reference twist lip seals can be attached and detached from time to time in the process of mounting, and the vacuum degree (VACUUM RATE) The work to be disassembled and assembled again from the beginning can reduce the cost of productivity loss due to work efficiency decrease due to worker fatigue increase and stoppage of installation.

In the present invention, an insert including a lift pin lip seal, and an integral twist lip seal are mounted on two cartridge module models, namely a detachable cartridge module (FIGS. 3 to 6) and an integral cartridge module 8 to Fig. 11).

And, as shown in Figs. 8 to 11, in the case of a twist lip seal integral with an insert including a lift fin lip seal applied to the integral cartridge module, an example applied to a detachable cartridge module and The detailed description thereof will be omitted.

As described above, in the present invention, the insert part is applied to the center portion of the cartridge module, so that the entire cartridge is not disassembled at the facility during the lift pin lip seal replacement operation, By implementing this, it is possible to effectively prevent scratches or contamination of the body parts, which may occur during the replacement process as well as the replacement time.

In addition, since the twist lip seals are integrally improved, the replacement work of the twist lip seals can be easily performed, and in particular, various difficult problems that may arise in the process of assembling the twist lip seals It is possible to expect a lot of effects on worker's work fatigue lowering and productivity improvement.

10: Twisted body 11: Lift pin
12: Lift shaft 13: Lift pin assembly
14: Lift pin lip seal 14a: First lift pin lip seal
14b: second lift pin lip seal 15: insert
15a: insert body 15b: insert flange
16: insert mounting part 17: groove for vacuum pumping
18: Pumping hole 19: First lip seal spacer
20: Center spacer 21: Second lip seal spacer
22: insert cap 23: twist lip seal
24: Screw hole 25: Differential pumping hole
26: Bolt through hole 27: Bolt tightening hole
28: threaded portion 29: jig

Claims (8)

A twisted body 10 which is installed in a concentric structure with the bearings supported by the inside of the twist block in the tilt and twist assembly of the ion implant apparatus, the upper lift pin 11 and the lower lift shaft 12 A lift pin assembly 13 installed along the axis of the twisted body 10 and capable of being lifted up and a plurality of lift pin lip seats 14 for maintaining vacuum during the up- Driving means for up-down driving of the pin assembly 13,
And an insert 15 having a lift lip lip seal 14 therein. The insert insert 16 is formed at the center of the twist body 10, It is possible to provide the insert 15 in which the insert 14 is embedded in the insert mounting portion 16 of the twist body 10 so that the insert does not disassemble the entire cartridge when the lift pin lip seal is replaced, Wherein the cartridge is detachably attached to the main body of the ion implantation apparatus.
The method according to claim 1,
The insert 15 is formed as a unitary structure of a cylindrical insert body 15a accommodating a lift pin lip seal 14 and an insert flange 15b fastened to the side of the twisted body 10 Cartridge module for ion implants.
The method according to claim 1,
Wherein the insert body (15a) of the insert (15) is provided with a vacuum pumping groove (17) on the circumferential surface thereof and a vacuum pumping hole (18) communicating with the insert pumping cavity and passing through the inside of the body. Cartridge module.
The method according to claim 1 or 2,
The insert body 15a of the insert 15 is provided with a first lip seal spacer 19, a first lift pin lip seal 14a, and a second lip seal spacer 14 which are sequentially arranged from top to bottom along the body center axis, Wherein a spacer (20), a second lift fin lip seal (14b), and a second lip seal spacer (21) are mounted.
The method according to claim 1 or 2,
Wherein an insert cap (22) is fastened to an upper end of the insert (15) to close an upper portion of a lift pin lip seal (16) mounted at the uppermost position.
A twisted body 10 which is installed in a concentric structure with the bearings supported by the inside of the twist block in the tilt and twist assembly of the ion implant apparatus, the upper lift pin 11 and the lower lift shaft 12 A lift pin assembly 13 installed along the axis of the twisted body 10 and capable of being lifted up and a plurality of lift fin lip seals 14 for maintaining the lift pin assembly 13 in vacuum during up- Driving means for up-down driving the pin assembly 13 and a lip seal 23 mounted on the circumferential surface of the twist body 10 to seal between the inner wall of the twist block 10,
The twist lip 23 may have a ring-shaped integral shape covering the entire upper and lower widths of the twisted body 10 with a vertical width corresponding to the vertical width of the twisted body 10 Characterized by the cartridge module of an ion implant device.
The method of claim 6,
And a screw hole 24 for fastening a plurality of jigs to be fastened to the jig side is formed on the upper surface of the lip seal 23 when the twist lip seal is disassembled and assembled using the jig Cartridge module for ion implants.
(14) for vacuum maintenance during up-down of a lift pin assembly (13) in a cartridge module of an ion implant device, the lift pin assembly (13)
And an insert 15 in which the lift pin lip seal 14 is embedded and the insert mounting portion 16 is formed at the center of the twist body 10 and the lift pin lip seal The insert 15 in which the insert pins 14 are embedded can be attached to and detached from the insert mounting portion 16 of the twisted body 10 so that when the lift pin lip seal is replaced, So that it is possible to separate and replace the insert.

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