KR101448086B1 - Transporting system - Google Patents

Abstract

The present invention relates to a transport system, and it is an object of the present invention to prevent the transport vehicle from tilting at the time of lateral transport loading in the transport system.

According to the present invention, the transportation system comprises a track part (300) laid on a ceiling, a traveling part (110) running the track part, a main body part (130) A conveying part 120 having a mounting part 140 on which the conveyed object 400 can be loaded by being extended from the side of the orbit part to a direction in which the center of the conveying part moves And an outrigger driving means for moving the outrigger so that the outrigger is brought into contact with the track when the mounting portion is elongated, do.

Description

TRANSPORTING SYSTEM

BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a technical field of a transport system having a transport vehicle for transporting various substrates for manufacturing semiconductor devices, for example.

As this type of conveying system, there is a conveying system that conveys a conveyed object by a conveying car (OHT: 0verhead Hoist Transfer) of suspension type which runs on an orbit laid on a ceiling. In the above-described conveyance system, there is a case where a conveyance of a conveyed object installed just below the trajectory (hereinafter referred to as " transverse conveyance mounting "

For example, in Patent Document 1, there is disclosed a technique for enabling lateral transfer mounting by providing a transfer mounting means capable of moving in a horizontal plane below a transfer carriage. Further, in Patent Document 2, a technique is disclosed in which a ceiling buffer is provided on the side of a conveyance car, and the platform is moved to the overhead buffer to enable lateral transfer mounting. Further, in Patent Document 3, there is disclosed a technique for enabling lateral transfer mounting by providing an article placing table on the side of a trajectory.

[Patent Document 1] Japanese Patent Application Laid-Open No. 11-180505

[Patent Document 2] Japanese Patent Application Laid-Open No. 2005-206371

[Patent Document 3] Japanese Patent Application Laid-Open No. 2006-282303

However, when carrying out the lateral transfer as described above, since the conveyed object is transported and mounted on the side of the conveyer, the center of the conveyed object may move and the conveyer may be inclined. If the conveyance vehicle is inclined, the conveyance vehicle can not run normally, and for example, there is a technical problem that the conveyed object may be damaged or broken by the impact. In addition, when the mounting portion can be raised and lowered with respect to the main body portion, the position of the mounting portion changes significantly due to the inclination of the main body portion, and there is a technical problem that it is difficult to align the transported object to be transported on the carrying object or the like.

SUMMARY OF THE INVENTION The present invention has been made in view of the above-described problems, and it is an object of the present invention to provide a transport system which can prevent a transporting car from tilting when a lateral transport is mounted.

According to an aspect of the present invention, there is provided a transportation system for a vehicle, comprising: an orbital part attached to a ceiling; a traveling part running on the orbital part; a main body part mounted in a shape suspended from the traveling part; A conveying section having a mounting section capable of supporting the conveyed object by being extended laterally and a direction in which the center of the conveying section is moved by the extension of the mounting section on the surface of the main body section opposite to the orbit section, An outrigger portion provided on an edge in the opposite direction and movable toward the track portion and an outrigger drive means for moving the outrigger portion so as to abut the track portion when the mount portion is elongated do.

According to the conveyance system of the present invention, at the time of operation, the conveyance unit carries the conveyed object by first running the running section on the orbital section laid on the ceiling. The carry section has a main body portion mounted in a form suspended from the running section, and a mounting section which is extended laterally of the track section and on which the transported article can be mounted, and the transported article provided on the side of the track section can be mounted and transported. Here, " lateral extension " is typically a horizontal direction, but does not mean a strictly horizontal direction, and may be a downward inclination or an upward inclination as long as it deviates laterally from the track portion. That is, the mounting portion may be typically horizontally elongated and laterally loaded, or may be laterally elongated by an irregular slope. It is also possible to mount the mounting portion without stretching.

Particularly, in the case of carrying out the transverse transfer mounting described above, the center of the carry section moves as the mount section extends laterally. Therefore, the carry section mounted in the form of hanging from the running section is inclined in the direction in which the center moves. Further, the object to be transported is mounted on the elongated mounting portion, so that it tilts more. Or, even if it is not actually tilted, a force (in other words, a moment or a torque) acts in a direction to tilt, and the balance of the weight is broken, or the apparatus becomes uneven or squeaky.

If the carry section is operated in a tilted state, for example, there is a fear that the main body section and the track section come into contact with each other, thereby interrupting normal running, or causing the transported article to be damaged or broken by an impact or the like. In addition, it is also necessary to carry out the carriage while carrying the lateral transfer is necessary in the initial setting (for example, teaching) of the transporting system or in the positioning or positioning of the carriage, desirable.

Incidentally, in the present invention, in particular, the outrigger is provided on the edge of the surface of the main body opposed to the trajectory in the direction opposite to the direction in which the center moves. When the mounting portion can be extended in a plurality of directions, since there are a plurality of directions in which the center moves, a plurality of outlet rejections may be provided. The outrigger is movable toward the orbit portion and is moved by the outrigger driving means so as to abut the orbit portion when the mount portion is elongated. Typically, the outrigger is moved vertically upwards to abut the lower surface of the track.

When the outrigger is brought into contact with the raceway portion, the outriggered portion supports each of the raceway portion and the main body portion, thereby preventing the raceway portion and the main body portion from contacting each other. It is possible to maintain a balance with a force (in other words, a moment or a torque) generated by the center shift of the lateral transfer mounting due to a drag or a reaction force generated when the outrigger rejection comes into contact with the raceway portion. Therefore, it becomes possible to prevent the carry section from being inclined by the movement of the center. It is preferable that the outrigger is installed toward the edge, but if the position is closer to the edge than the center moved by the elongation, the above-described effect can be obtained.

As described above, according to the transport system of the present invention, since the outrigger is moved so as to come into contact with the track portion when the mount portion is stretched, it is possible to prevent the transport vehicle from tilting when the lateral transport is mounted.

In one aspect of the transport system of the present invention, the mounting portion is movable up and down with respect to the main body portion.

According to this aspect, for example, the loading section is provided with a lifting belt or the like, and is capable of being raised and lowered with respect to the main body section. That is, it is possible to grip the transported object at a height different from that of the main body, or to transport the transported object to the transported object at a height different from that of the main body.

If the main body portion is tilted when the mount portion is lowered from the main body portion, the position of the mount portion also changes greatly, and the position of each other between the mount portion and the transported object, or the position between the transported object and the transported object, There is a fear that it will become remarkably difficult.

Incidentally, in this embodiment, particularly, the outrigger can prevent the body portion from tilting. Therefore, even when the mounting portion is extended and descended, the position of the mounting portion is not changed much. Therefore, the transported object can be grasped securely or reliably transported and mounted on the transported object.

In another aspect of the transportation system of the present invention, the portion of the outrigger that contacts the raceway portion is a roller.

According to this aspect, the portion where the outrigger moved by the outrigger driving portion makes contact with the track portion is a roller, preferably mounted in a running direction so as to be able to roll, thereby rotating on the track portion, It does not interfere with the traveling of the traveling part. Therefore, when the mounting portion is being extended, it is possible to travel while preventing the body portion from being inclined by the outrigger. Such an effect is remarkably exhibited when, for example, teaching (so-called teaching) such as the stop position of the traveling portion when the transported object is mounted is performed.

In another aspect of the transportation system of the present invention, the portion of the outrigger which contacts the raceway portion includes an elastic body.

According to this aspect, the portion where the outrigger moved by the outrigger driving portion makes contact with the track portion includes an elastic body and prevents impact or damage due to contact between the track portion and the body portion. The elastic body is, for example, a urethane rubber, a silicone rubber or the like, and it is possible to further improve the above-mentioned effect by determining the material after consideration of flexibility, abrasion resistance, lubricity and the like.

In another aspect of the transportation system of the present invention, the outlet rejection is connected to an eccentric shaft, and the outlet triggering means moves the outlet rejection by rotating the eccentric shaft.

According to this aspect, the outrigger is connected to the eccentric shaft. Then, the outrigger driving means causes the eccentric shaft to rotate, whereby the outrigger is moved. With this configuration, the outrigger can be moved more easily. In addition, since the outrigger and outrigger driving means can be simplified in structure, it is possible to reduce the cost and the size of the device.

In another embodiment of the carrying system of the present invention, the outrigger is connected to a rack engaged with a pinion, and the outrigger driving means moves the outrigger by rotating the pinion.

According to this aspect, the outrigger is connected to the rack engaged with the pinion. Then, by the outrigger driving means, the rack is driven by the rotation of the pinion, and the outrigger connected to the rack is moved. With this configuration, the outrigger can be moved more easily. In addition, since the outrigger and outrigger driving means can be simplified in structure, it is possible to reduce the cost and the size of the device.

In another aspect of the transportation system of the present invention, the outlet rejection is connected to an actuator, and the outlet driving means moves the outlet rejection by controlling the actuator.

According to this aspect, the outrigger is connected to an actuator such as an electric, electromagnetic, hydraulic, pneumatic, or mechanical actuator. Then, the actuator is controlled by the outrigger driving means, whereby the outrigger is moved. With this configuration, the outrigger can be moved more easily. In addition, since the outrigger and outrigger driving means can be simplified in structure, it is possible to reduce the cost and the size of the device.

In another aspect of the transportation system of the present invention, the outrigger is engaged with the cam, and the outrigger driving means moves the outrigger by controlling the cam.

According to this embodiment, the outrigger is engaged with the cam. Then, by the outrigger driving means rotating the cam, the outrigger is moved so as to come into contact with the track portion. With this configuration, the outrigger can be moved more easily. In addition, since the outrigger and outrigger driving means can be simplified in structure, it is possible to reduce the cost and the size of the device.

In another aspect of the transport system of the present invention, the transport system further includes contact detection means for detecting that the outrigger is in contact with the orbit portion.

According to this aspect, when the outrigger is moved so as to abut on the raceway portion, it is detected by the contact detecting means that the outrigger is in contact with the raceway portion. In other words, it is possible to know whether or not the body portion can properly prevent inclination by outriggering.

There may be a case where the trajectory portion contacting with the outrigger is cut off at some point at the bifurcation point or the confluence point and at such a point there is a possibility that the moved outrigger can not be brought into contact with the trajectory portion. In such a case, it can be seen that the effect of preventing tilting due to outrigger is not adequately obtained, in particular, since it is not detected that the outrigger is in contact with the trajectory. Therefore, it is possible to take measures against the outrigger so that the outrigger is brought into contact with the track portion, such as by moving the body portion.

As described above, according to the transport system of the present embodiment, it is possible to know whether or not the moved outrigger is in contact with the track portion. Therefore, it is possible to more preferably prevent the transport vehicle from tilting during the lateral transport loading have.

In an embodiment further comprising the contact detection means, the contact detection means may be configured to detect that the outrigger is pressed.

With this configuration, detection of the contact between the outrigger and the track is performed by detecting that the outrigger is pushed from the track.

Since the outrigger is moved so as to abut against the raceway portion, when the contact is made, the drag is received from the raceway portion. Therefore, since it is depressed, it is possible to detect that the outrigger is in contact with the raceway portion.

It is possible to detect that the outrigger is in contact with the raceway portion by a simple configuration using, for example, an optical sensor or a touch sensor.

In the case where the contact detection means detects the depression of the outrigger, the outrigger is pressed so as to be close to the orbit portion in a range not contacting the orbit portion when the outrigger is not moving It may be configured to further include a pressing means.

With this configuration, when the outrigger is not moved by the outrigger driving means, the outrigger is pushed so as to approach the trajectory within a range not contacting the trajectory. The pressing means is typically a spring, and presses the outrigger by its restoring force.

As described above, when the pressure is applied, the outrigger, which is in contact with the track, is pushed out of the track by pushing the pressed portion. Therefore, it is possible to more easily detect that the member is being pushed from the raceway portion. Therefore, it is possible to more suitably detect that the outrigger is in contact with the trajectory.

The operation of the present invention and other advantages will be revealed from the following embodiments.

According to the present invention, it is possible to prevent the center of the conveying carriage from being shifted and tilted when the lateral conveying loading is performed. Therefore, a substrate such as a semiconductor, which is susceptible to impact, can be more suitably transported and transported.

Hereinafter, embodiments of the present invention will be described with reference to the drawings.

≪ Embodiment 1 >

First, the configuration of the transport system according to the first embodiment will be described with reference to Figs. 1 and 2. Fig. Here, Fig. 1 is a side view showing the configuration of the transport system, and Fig. 2 is a side view showing the configuration of the transport system when the lateral transport is carried out.

1, the conveyance system according to the first embodiment includes a running portion 110 having a running roller 115, a main body portion 130, a moving portion 140, a grip portion 150, a lifting belt 160 And a fall preventing unit 170. The outrigger 200 and the orbiting unit 300 are provided with the fall preventing unit 170 and the fall preventing unit 170,

The track part 300 is laid on a ceiling and is made of, for example, metal such as iron or stainless steel.

The running unit 110 runs in the raceway 300 by rotating the running roller 115, for example, by a motor (not shown) or the like.

The carry section 120 is mounted in such a manner that the main body section 130 is suspended from the running section 110 and the moving section 140 is provided on the lower surface of the main body section 130. In the inside of the moving part 140, a grip part 150 is mounted by a lifting belt 160. In addition, below the moving part 140, a fall preventing part 170 for preventing the transported object 400 from falling down is provided. The moving part 140, the grip part 150, the lifting belt 160, and the drop prevention part 170 are examples of the " mounting part " of the present invention.

2, the carry section 120 may extend the moving section 140 to the side of the main body section 130 so as to perform the lateral transfer mounting of the conveyed object 400. [ Further, by carrying out the delivery and winding of the lifting belt 160, the conveyed object 400 at a position different from the height of the main body 130 can be transported and mounted. The drop prevention portion 170 can be reduced so as not to interfere with the conveyance of the conveyed object 400 or stored inside the moving portion 140 when the conveyed object 400 is to be conveyed.

The outrigger 200 is provided on a surface of the main body 130 opposite to the raceway portion 300 and is movable with respect to the raceway portion 300 by being moved. In addition, the portion of the outrigger 200 which comes into contact with the raceway portion 300 is a roller.

Next, the operation of the transport system according to the first embodiment will be described with reference to Figs. 1 and 2. Fig. Here, a case where the carry section 120 performs lateral transfer mounting of the conveyed object 400 will be described as an example.

1, in the operation of the conveyance system according to the first embodiment, first, the conveyance unit 120 in which the conveyed object 400 is not conveyed is conveyed by the conveyance unit 110 to the conveyed object 400 And is moved to a position where the transfer is carried out. At this time, the outrigger 200 is not in contact with the raceway portion 300. In addition, the center of the carry section 120 is positioned substantially at the center of the main body section 130.

2, the carry section 120 first moves (i.e., stretches) the moving section 140 to the side of the main body section 130. As shown in FIG. Subsequently, the lifting and lowering belt 160 is fed to lower the gripper 150 to the position of the conveyed object 400 provided on the conveyed object or the like, and the conveyed object 400 is conveyed and mounted. At this time, along with the extension of the moving part 140, the center of the carrying part 120 moves in the same direction as the extension (that is, the right direction in the drawing). Therefore, the carry section 120 hanging from the running section 110 tends to be inclined about the center of movement.

In this embodiment, in particular, when the moving part 140 is elongated, the outrigger 200 is moved upward in the vertical direction to come into contact with the track part 300. Since the carry section 120 receives the drag force from the track section 300 through the outrigger 200, it is possible to maintain the posture before the moving section 140 is extended without tilting. Therefore, it is possible to prevent breakage or failure of the conveyed object 400 due to inclination of the carry section 120.

2, when the grip portion 150 is lowered to load and carry the transported object, the transport portion 120 is inclined so that the grip portion 160 mounted on the tip of the lifting belt 160 150 are greatly changed, and there is a fear that it becomes difficult to grasp the conveyed object 400. [

Further, after gripping the transported object, the weight of the transported object 400 is also added, so that the center of gravity moves further, and the tilting of the transport unit 120 becomes large. It is preferable to position the bottom surface of the transported object 400 and the mounting surface of the transported object in parallel with each other, but when the transported portion 120 is tilted, The position of the gripper 150 also changes greatly, so that such an alignment operation becomes remarkably difficult.

On the other hand, in the present embodiment, as described above, the outrigger 200 can prevent the carry section 120 from tilting. Therefore, when gripping the transported object 400 by the gripping portion 150, positioning of the transported object 400 and the gripping portion 150 can be performed more accurately. In addition, even when the held transferred object 400 is carried on a conveyed object or the like, alignment of the conveyed object 400 and the conveyed object can be performed more accurately. Therefore, it is possible to more reliably perform the transfer mounting of the transferred object 40O.

Even when the outrigger 200 is in contact with the track portion 300, the portion of the outrigger 200 contacting the track portion 300 is a roller. Therefore, even when the outrigger 200 is in contact with the track portion 300, This is possible. Therefore, the carry section 120 can be traveled without being inclined even in the case where the lateral transfer is carried out. If it is possible to run smoothly while the lateral transfer is carried out in this manner, it is convenient at the time of teaching.

Next, the detailed configuration and operation of the outrigger 200 will be described with reference to Figs. 3 and 4. Fig. Here, FIG. 3 is a top view showing the overall configuration of the outrigger, and FIG. 4 is a side view showing drive of the outrigger by the eccentric shaft.

3, the outrigger 200 includes a roller 210, a shaft 220, a bevel gear 230, and an eccentric shaft 240. To the shaft 220, a motor, which is an example of the " outrigger driving portion " of the present invention, is connected. The surface of the roller 210 (that is, the surface that contacts the raceway portion 300) is made of urethane rubber.

At the time of driving the outrigger 200, the rotation of the motor is transmitted to the shaft 220 first. The rotation direction of the shaft 220 is then converted by the bevel gear 230 connected to the shaft 220 and transmitted to the eccentric shaft 240. As the eccentric shaft 240 is rotated, the roller 210 connected to the eccentric shaft 240 is moved and brought into contact with the raceway portion 300.

In Fig. 4, the roller 210 before driving does not contact the raceway portion 300. Then, when the eccentric shaft 240 is rotated by the driving, the entire roller 210 rotates and moves upward in the vertical direction, thereby contacting the raceway portion 300. The roller 210 that is in contact with the raceway portion 300 can rotate on the raceway portion 300 about the bearing 215. At this time, the rotation axis and the eccentric axis of the roller 210 are arranged vertically (that is, the straight line connecting the rotation axis and the eccentric shaft is perpendicular to the contact surface at the raceway portion 300 as shown in the figure), or By making this state close to this state, the rotation torque of the roller 210 can be reduced, and it is possible to realize smoother rotation.

Next, a modified example of the outrigger 200 will be described with reference to Figs. 5 and 6. Fig. 5 and 6 are side views respectively showing a modified example of the outrigger. In Figs. 5 and 6, parts of the motor and the like are omitted.

In Fig. 5, the roller 210 is connected to a rack 260 engaged with the pinion 250. Fig. In such a configuration, by rotating the pinion 250, the rack 260 and the roller 210 connected to the rack 260 are driven in the vertical direction in the drawing.

In Fig. 6, the roller 210 is connected to a linear actuator, which is an example of the " actuator " of the present invention, and by controlling the linear actuator, the roller 210 is driven in the vertical direction of the drawing.

As described above, the configuration of the outrigger 200 can take various forms as far as it can drive the roller 210 in the direction to contact the track part 300. [

As described above, according to the conveyance system of the first embodiment, the center of the conveyance carriage 100 is shifted, and the conveyance carriage 100 can be prevented from tilting when the transverse conveyance mounting is performed. Therefore, for example, a substrate such as a semiconductor, which is susceptible to impact, can be transported and transported more preferably.

≪ Embodiment 2 >

Next, a transport system according to the second embodiment will be described with reference to Figs. 7 to 11. Fig. 7 is a side view showing the configuration of the outrigger in the non-contact state in the transport system according to the second embodiment, and Fig. 8 is a cross-sectional view showing the configuration of the outrigger at the time of contact in the transport system according to the second embodiment Fig. Fig. 9 is a side view showing the configuration of the sensor unit, and Figs. 10 and 11 are side views showing a configuration of a modified example of the transport system according to the second embodiment. In FIG. 7, FIG. 9, and FIG. 10, the configuration for driving the roller 210 as shown in FIGS. 3 to 6 is omitted. In FIG. 11, Are omitted. The second embodiment is different from the first embodiment in that a sensor portion for detecting the contact of the outrigger is provided, and the other configurations and operations are substantially the same. Therefore, in the second embodiment, the configuration and operation of the sensor unit will be described in detail, and the description of other configurations and operations will be omitted as appropriate.

7, the outrigger 200 in the transport system according to the second embodiment includes a roller 210, a drive plate 510, a reference plate 520, a drive shaft 530, A spring 540 which is an example of a " pressing means " of the present invention, a partition plate 550, and a sensor unit 560 which is an example of the " contact detection means "

The drive plate 510 is connected to a reference plate 520 fixed to the main body 130 (see FIG. 1) through a drive shaft 530, and is capable of being driven so that the drive shaft 530 rotates as a rotation axis . The roller 210 and the partition plate 550 are fixed to the drive plate 510 and the sensor unit 560 is fixed to the reference plate 520. [

The spring 540 is connected to the drive plate 510 and the reference plate 520 to press the drive plate 510 toward the reference plate 520 as shown in FIG.

The partition plate 550 is arranged to be detected by the sensor unit 560 in a pressed state as a metal plate or the like.

The sensor portion 560 is disposed between the peripheral portion of the partition plate 550 (the portion in the vicinity of the lower edge in Figs. 7 to 9) when the roller 210 is not abutted And includes a pair of opposed light emitting portions 561 and a light receiving portion 562. The sensor unit 560 may be constituted by a contact type sensor or the like.

8, when the roller 210 is moved to contact the raceway portion 300, the roller 210 is pushed by the raceway portion 300. Since the roller 210 is fixed to the drive plate 510, the drive plate 510 is pressed as the roller 210 is pushed.

Here, the position of the partition plate 550 fixed to the drive plate 510 also changes (that is, the right end of the partition plate 550 in the figure moves in the upward direction of the drawing) Is not detected by the sensor unit 560. Hereinafter, detection by the sensor unit 560 will be described in detail.

7, the partition plate 550 is disposed between the light emitting portion 561 and the light receiving portion 562 of the sensor portion 560. In this case, the roller 210 is not in contact with the track portion 300 . Therefore, the light emitted from the light emitting portion 561 does not reach the light receiving portion 562, and accordingly, the sensor portion 560 detects the partition plate 550. [

On the other hand, when the roller 210 is in contact with the track portion 300 (see Fig. 8), the partition plate 550 moves upward in the figure as described above. Therefore, the light emitted from the light emitting portion 561 reaches the light receiving portion 562, and the partition plate 550 is not detected by the sensor portion 560. [

As described above, the partition plate 550 is detected when the roller 210 is not in contact with the track portion 300, and is not detected when the roller 210 is in contact with the track portion 300, It is possible to indirectly detect that the roller 210 is in contact with the raceway portion 300.

10, the outrigger 200 may be configured such that the partition plate 550 connected to the roller 210 is pushed upward by the spring 540 from the reference plate 520 side to the raceway 300 side do. In this case, the partition plate 550 is detected by the sensor unit 560 when the roller 210 is not in contact with the raceway portion 300, and is detected when it is in contact with the roller.

In Fig. 11, the outrigger 200 may be configured such that the roller 210 is pressed by the spring 540. Fig. For example, as shown in the figure, a spring 540 is provided between a support plate 610 fixed to the main body 130 (see Fig. 1) or the like and an engaging portion 620 engaged with the cam 630, (That is, the lower side of the drawing) away from the track portion 300. As shown in Fig.

When the outrigger 200 is driven, the cam 630 is rotated by the drive motor 650 about the rotation shaft 640. Accordingly, as shown in the drawing, the roller 210 is pushed up, and the outrigger 200 is moved so as to come into contact with the raceway portion 300.

As described above, the configuration of the outrigger 200 can take various forms as long as the sensor unit 560 can detect that the roller 210 is in contact with the raceway portion 300.

As described above, according to the transport system of the second embodiment, since the sensor unit 560 for detecting the contact of the outrigger 200 is provided, the carry unit 120 by the outrigger unit 200 can be used, It is possible to detect whether or not the effect of preventing the inclination of the liquid crystal display panel is appropriately obtained. Therefore, it is possible to more preferably prevent the carry section 120 from tilting.

The present invention is not limited to the above-described embodiments, but can be appropriately changed without departing from the gist or spirit of the invention which can be found from the claims and the entire specification, and a transfer system And are also included in the technical scope of the present invention.

1 is a side view showing a configuration of a transport system.

Fig. 2 is a side view showing the configuration of the transport system when the lateral transport is carried out.

3 is a top view showing the overall configuration of outrigger.

4 is a side view showing drive of the outrigger by the eccentric shaft.

5 is a first side view showing a modified example of outrigger.

6 is a second side view showing a modified example of outrigger.

Fig. 7 is a side view showing the configuration of outrigger in noncontact mode in the transport system according to the second embodiment. Fig.

8 is a side view showing the configuration of outrigger at the time of contact in the transport system according to the second embodiment.

9 is a side view showing the configuration of the sensor unit.

10 is a first side view showing a configuration of a modification of the transport system according to the second embodiment.

11 is a second side view showing a configuration of a modification of the transport system according to the second embodiment.

[Description of Symbols]

110: running part 115: roller

120: conveying section 130:

140: moving part 150: grip part

160: lifting belt 170: falling prevention part

200: Outrigger Rejection 210: Rollers

215: bearing 220: shaft

230: Bevel gear 240: Eccentric shaft

250: Pinion 260: Rack

270: Linear actuator 300:

400: conveyed object 510: drive plate

520: reference plate 530: drive shaft

540: spring 550: partition plate

560: Sensor part 610: Support plate

620: engaging portion 630: cam

640: rotating shaft 650: driving motor

Claims (11)

A track part laid on the ceiling, A traveling portion for traveling on the orbit portion, A carry section including a main body mounted in a form suspended from the running section, a holding section capable of moving up and down with respect to the main body section and capable of moving the conveyed object, and a moving section for moving the holding section to the side of the track section; Wherein the holding portion is provided on the side of the body portion opposite to the raceway portion and the side of the moving portion and the gripping portion is moved toward the edge in the direction opposite to the moving direction of the center of the carry portion, An outrigger portion capable of moving toward the portion, An outrigger drive means for moving the outrigger so as to come into contact with the track portion when the grip portion and the moving portion move laterally, . The method according to claim 1, Wherein the portion of the outrigger which contacts the raceway portion is a roller. 3. The method according to claim 1 or 2, Wherein the portion of the outrigger that contacts the raceway portion includes an elastic body. 3. The method according to claim 1 or 2, Wherein the outrigger is connected to an eccentric shaft, And the outrigger driving means moves the outrigger by rotating the eccentric shaft. 3. The method according to claim 1 or 2, The outrigger is connected to a rack engaged with the pinion, And the outrigger driving means moves the outrigger by rotating the pinion. 3. The method according to claim 1 or 2, Wherein the outrigger is connected to an actuator, And the outrigger driving means moves the outlet rejection by controlling the actuator. 3. The method according to claim 1 or 2, The outrigger is engaged with the cam, And the outrigger driving means moves the outrigger by controlling the cam. 3. The method according to claim 1 or 2, Further comprising contact detection means for detecting that the outrigger is in contact with the orbit portion. 9. The method of claim 8, Wherein the contact detection means detects that the outrigger is pressed. 10. The method of claim 9, Further comprising urging means for urging the outrigger toward the trajectory portion in a range not contacting the trajectory portion when the outrigger is not moving. delete

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