KR101443256B1 - Sliding door type sealed chamber apparatus - Google Patents
Sliding door type sealed chamber apparatus Download PDFInfo
- Publication number
- KR101443256B1 KR101443256B1 KR1020140044774A KR20140044774A KR101443256B1 KR 101443256 B1 KR101443256 B1 KR 101443256B1 KR 1020140044774 A KR1020140044774 A KR 1020140044774A KR 20140044774 A KR20140044774 A KR 20140044774A KR 101443256 B1 KR101443256 B1 KR 101443256B1
- Authority
- KR
- South Korea
- Prior art keywords
- housing
- door
- opening
- chamber
- backward
- Prior art date
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Classifications
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01R—MEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
- G01R31/00—Arrangements for testing electric properties; Arrangements for locating electric faults; Arrangements for electrical testing characterised by what is being tested not provided for elsewhere
- G01R31/28—Testing of electronic circuits, e.g. by signal tracer
- G01R31/2851—Testing of integrated circuits [IC]
- G01R31/2855—Environmental, reliability or burn-in testing
- G01R31/286—External aspects, e.g. related to chambers, contacting devices or handlers
- G01R31/2862—Chambers or ovens; Tanks
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- Engineering & Computer Science (AREA)
- Environmental & Geological Engineering (AREA)
- Computer Hardware Design (AREA)
- Microelectronics & Electronic Packaging (AREA)
- General Engineering & Computer Science (AREA)
- Physics & Mathematics (AREA)
- General Physics & Mathematics (AREA)
- Specific Sealing Or Ventilating Devices For Doors And Windows (AREA)
- Power-Operated Mechanisms For Wings (AREA)
Abstract
There is provided a sliding door type hermetic chamber device which is compactly opened and closed to maximize space utilization and form a more effective and stable hermetic structure. The chamber device includes a housing having an opening formed in a front portion thereof, a chamber communicated with the opening portion and housed in the housing, a pair of guide rails arranged side by side along the front portion with the opening portion interposed therebetween, And a support panel which is disposed adjacent to the door portion in a sliding movement path of the door portion and slidably moves forward and backward.
Description
BACKGROUND OF THE
Sealed chambers are used for manufacturing semiconductor devices and the like or for testing various electronic apparatus products. The chamber device is formed so as to separate the inside and the outside from each other and to seal the inside of the chamber device and to create an extreme physical environment therein. Depending on the purpose, physical conditions such as the internal temperature and the drying degree may be formed differently. Such a chamber device can be used to carry out the manufacturing process, or the finished product can be tested in a specific environment.
The chamber device requires a door structure for opening and closing the chamber and maintaining the airtightness. In many cases, the chamber device is generally formed in a form in which the chamber and various devices connected to the chamber are accommodated in the housing, and a swing-type door structure is generally employed to more smoothly open and close the chamber. Further, the swing type door can be more advantageously applied to various chamber devices because it can form a closed structure more smoothly by applying pressure. Korean Patent Publication No. 10-2013-0142364 discloses a door structure of such a chamber.
However, the conventional chamber device having such a door structure is disadvantageous in that space utilization is undesirably deteriorated because the door rotates to the outside of the chamber or the housing and is opened. Particularly, in a work room or a test room in which various manufacturing equipments or test equipments are installed, it is necessary to utilize efficient space. Since such requirements are not satisfied, there is a problem that it is very difficult to select a space for installing the apparatus. In order to solve this problem, unlike the swing type door, it is difficult to maintain the airtightness of the sliding door.
SUMMARY OF THE INVENTION Accordingly, the present invention has been made to solve the above-mentioned problems occurring in the prior art, and it is an object of the present invention to provide a sliding door type hermetic chamber device which is compactly opened and closed to maximize space utilization and form a more stable and stable sealing structure.
The technical problem of the present invention is not limited to the above-mentioned problems, and another technical problem which is not mentioned can be clearly understood by those skilled in the art from the following description.
The sliding door-type closed chamber device according to the present invention comprises: a housing having an opening formed in a front portion thereof; A chamber received in the housing and communicating with the opening; A pair of guide rails disposed side by side along the front portion with the opening portion interposed therebetween; A door part that slides along the guide rail and opens and closes the opening part; And a support panel disposed adjacent to the door portion in a sliding movement path of the door portion and slidably moving forward and backward.
The chamber device may further include at least one first driving unit coupled to the housing so as to be movable forward and rearward and configured to move the pair of guide rails forward and backward, have.
The support panel is disposed at a lower portion of the door portion and moves forward to support the door portion, or to move backward to escape the sliding movement path of the door portion.
The chamber device may further include at least one second driving unit installed in the housing and moving the supporting panel forward and backward.
The chamber device may further include at least one flexible wire having one end coupled to the door portion and a traction device coupled to the other end of the flexible wire to pull the flexible wire.
The pulling device may include a screw bar rotatably coupled to the housing and having threads on an outer circumferential surface thereof, a motor for rotating the screw bar, and a screw nut portion coupled to the other end of the flexible wire, have.
The chamber device may further include at least one guide bar installed in the housing in parallel with the screw bar, and the screw nut may be slidably coupled to the guide bar to move along the guide bar.
The pulling device is located at an upper portion of the chamber to pull the door portion and the door portion is moved downward by its own weight to open the opening portion and close the opening portion when the pulling device pulls the flexible wire .
The chamber device may further include a rotating wheel coupled to the housing and rotated together with the flexible wire to switch the direction of movement of the flexible wire.
The chamber device may further include at least one of a temperature controller for adjusting a temperature inside the chamber and a humidity controller for adjusting humidity inside the chamber.
The chamber device may further include a grill portion formed through the support panel and serving as an air circulation passage between the inside and the outside of the housing.
The chamber device of the present invention can maximize space utilization around the apparatus by a compact and organically operated sliding door structure and can form a more effective and stable sealing structure. Therefore, it is possible to apply the apparatus to various places without depending on the installation place, and it is possible to carry out various operations such as the manufacturing process and the test work using the chamber more safely.
1 is a perspective view of a sliding door type hermetic chamber device according to an embodiment of the present invention.
Fig. 2 is a perspective view of the chamber device of Fig. 1 with the door part open. Fig.
3 is a longitudinal sectional view showing the internal structure of the chamber device of FIG.
4 is a cross-sectional view taken along the line AA 'of FIG. 1 showing the upper structure of the chamber device and the arrangement of the door part and the guide rail.
Fig. 5 is a sectional view showing the door unit and the guide rail of the chamber apparatus of Fig. 4 moved. Fig.
6 is a cross-sectional view taken along the line BB 'of FIG. 1 showing the arrangement of the support panel of the chamber device.
7 is a cross-sectional view showing a state in which the support panel of Fig. 6 is moved.
8 to 10 are operation diagrams showing the operation of the chamber device of FIG.
BRIEF DESCRIPTION OF THE DRAWINGS The advantages and features of the present invention and methods for achieving them will become apparent with reference to the embodiments described in detail below with reference to the accompanying drawings. The present invention may, however, be embodied in many different forms and should not be construed as being limited to the embodiments set forth herein. Rather, these embodiments are provided so that this disclosure will be thorough and complete, and will fully convey the concept of the invention to those skilled in the art. Is provided to fully convey the scope of the invention to those skilled in the art, and the present invention is only defined by the claims. Like reference numerals refer to like elements throughout the specification.
Hereinafter, a sliding door type closed chamber device according to an embodiment of the present invention will be described in detail with reference to FIGS. 1 to 10. FIG.
FIG. 1 is a perspective view of a sliding door type closed chamber apparatus according to an embodiment of the present invention, FIG. 2 is a perspective view of the chamber apparatus of FIG. 1 with its door open, Fig.
1 to 3, a sliding door type closed
At this time, the front surface of the
The sliding door type closed
In addition, the sliding door type
1 and 2, the
Although the
The
The pair of
Meanwhile, the
The
At least one packing
The
More specifically, the
The sliding door type closed
FIG. 4 is a cross-sectional view of the upper part of the chamber device of FIG. 1 and the arrangement of the door part and the guide rail, and FIG. 5 is a sectional view of the door device of FIG. FIG. 6 is a cross-sectional view taken along the line BB 'in FIG. 1 illustrating the arrangement of the support panel of the chamber device of FIG. 1, and FIG. 7 is a cross-sectional view of the support panel of FIG. 6 moved.
4 and 5, the
The
The
The towing
The
Meanwhile, the
The
The structure using the
The
6 and 7, the
That is, the
FIGS. 8 to 10 are views showing the operation of the chamber device of FIG. 1. FIG.
8, the
1 and 2) formed in the
9, the
The
10, the
While the present invention has been described in connection with what is presently considered to be practical exemplary embodiments, it is to be understood that the invention is not limited to the disclosed embodiments, but, on the contrary, You will understand. It is therefore to be understood that the above-described embodiments are not limitative in any way whatsoever exemplary.
1: Sliding door type hermetic chamber device 100: Housing
104, 203: switch 101: opening
102: accommodation space 110: chamber
103, 202: packing part 200: door part
201: Slider 204: Window
205: display portion 210: guide rail
211: rail part 220: first drive part
300: Support panel 310: Grille part
320: second driving part 400: traction device
401: flexible wire 402: rotating wheel
410: screw bar 411: motor
420: screw nut portion 421:
430: guide bar 510: temperature control unit
520: humidity controller 600:
Claims (11)
A chamber received in the housing and communicating with the opening;
A pair of guide rails disposed side by side along the front portion with the opening portion interposed therebetween;
A door part that slides along the guide rail and opens and closes the opening part;
A support panel disposed adjacent to the door portion in a sliding movement path of the door portion and slidably moving forward and backward; And
And at least one first driving unit installed in the housing and moving the pair of guide rails forward and backward,
The pair of guide rails are coupled to the housing so as to be movable forward and backward,
Wherein the support panel is disposed at a lower portion of the door portion and moves forward to support the door portion or move backward to deviate from a sliding movement path of the door portion.
And at least one second driving unit installed in the housing and moving the support panel forward and backward.
A chamber received in the housing and communicating with the opening;
A pair of guide rails disposed side by side along the front portion with the opening portion interposed therebetween;
A door part that slides along the guide rail and opens and closes the opening part;
A support panel disposed adjacent to the door portion in a sliding movement path of the door portion and slidably moving forward and backward;
At least one first driving unit installed in the housing and moving the pair of guide rails forward and backward;
At least one flexible wire having one end coupled to the door portion; And
And a traction device coupled to the other end of the flexible wire to pull the flexible wire,
Wherein the pair of guide rails are coupled to the housing so as to be movable forward and backward.
The towing device comprises:
A screw bar rotatably coupled to the housing,
A motor for rotating the screw bar, and
And a screw nut portion to which the other end of the flexible wire is coupled and engaged with the screw bar.
And at least one guide bar installed in the housing in parallel with the screw bar,
Wherein the screw nut portion is slidably engaged with the guide bar and moves along the guide bar.
The towing device is located at an upper portion of the chamber to pull the door portion,
Wherein the door portion is moved downward by its own weight to open the opening portion and close the opening portion when the pulling device pulls the flexible wire.
Further comprising a rotating wheel coupled to the housing and rotating together with the flexible wire to switch the direction of movement of the flexible wire.
A chamber received in the housing and communicating with the opening;
A pair of guide rails disposed side by side along the front portion with the opening portion interposed therebetween;
A door part that slides along the guide rail and opens and closes the opening part;
A support panel disposed adjacent to the door portion in a sliding movement path of the door portion and slidably moving forward and backward; And
And at least one of a temperature controller for adjusting a temperature inside the chamber and a humidity controller for adjusting humidity inside the chamber, the humidity controller being installed at a lower portion of the chamber.
And a grill portion formed through the support panel and serving as an air circulation passage between the inside and the outside of the housing.
Priority Applications (2)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
KR1020140044774A KR101443256B1 (en) | 2014-04-15 | 2014-04-15 | Sliding door type sealed chamber apparatus |
PCT/KR2015/002553 WO2015160090A1 (en) | 2014-04-15 | 2015-03-17 | Sliding door type closed chamber apparatus |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
KR1020140044774A KR101443256B1 (en) | 2014-04-15 | 2014-04-15 | Sliding door type sealed chamber apparatus |
Publications (1)
Publication Number | Publication Date |
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KR101443256B1 true KR101443256B1 (en) | 2014-09-22 |
Family
ID=51760852
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
KR1020140044774A KR101443256B1 (en) | 2014-04-15 | 2014-04-15 | Sliding door type sealed chamber apparatus |
Country Status (2)
Country | Link |
---|---|
KR (1) | KR101443256B1 (en) |
WO (1) | WO2015160090A1 (en) |
Cited By (6)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
WO2017135711A1 (en) * | 2016-02-02 | 2017-08-10 | 한동희 | Autoclave and panel assembly treating apparatus using same |
KR101834133B1 (en) | 2017-10-12 | 2018-02-28 | 장인재 | Door apparatus for chamber |
KR20200112226A (en) * | 2019-03-21 | 2020-10-05 | 국방과학연구소 | High temperature test equipment by using dual chamber |
KR102228618B1 (en) * | 2020-01-23 | 2021-03-16 | 엘아이지넥스원 주식회사 | Apparatus and method for testing an antenna |
KR20210106710A (en) * | 2020-02-21 | 2021-08-31 | 주식회사 두오텍 | burn-in test device having dual test chamber |
KR20220052139A (en) * | 2020-10-20 | 2022-04-27 | 한국생산기술연구원 | Semiconductor test chamber |
Families Citing this family (2)
Publication number | Priority date | Publication date | Assignee | Title |
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CN107448086B (en) * | 2017-08-24 | 2022-09-27 | 苏州优备精密智能装备股份有限公司 | Full-automatic door opening and closing device for aging of liquid crystal panel |
CN110987781A (en) * | 2019-12-18 | 2020-04-10 | 广东虹勤通讯技术有限公司 | Salt spray test device |
Citations (3)
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JPH0978965A (en) * | 1995-09-18 | 1997-03-25 | Emoto Kogyo Kk | Safety device in motor-driven shutter |
KR200411339Y1 (en) * | 2005-07-21 | 2006-03-15 | 한국기계연구원 | Structure for opening and closing door of chamber |
KR20110095014A (en) * | 2010-02-18 | 2011-08-24 | 세메스 주식회사 | Door apparatus of vacuum chamber and apparatus for processing substrate having the apparatus |
-
2014
- 2014-04-15 KR KR1020140044774A patent/KR101443256B1/en active IP Right Grant
-
2015
- 2015-03-17 WO PCT/KR2015/002553 patent/WO2015160090A1/en active Application Filing
Patent Citations (4)
Publication number | Priority date | Publication date | Assignee | Title |
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JPH0978965A (en) * | 1995-09-18 | 1997-03-25 | Emoto Kogyo Kk | Safety device in motor-driven shutter |
KR200411339Y1 (en) * | 2005-07-21 | 2006-03-15 | 한국기계연구원 | Structure for opening and closing door of chamber |
KR20110095014A (en) * | 2010-02-18 | 2011-08-24 | 세메스 주식회사 | Door apparatus of vacuum chamber and apparatus for processing substrate having the apparatus |
KR101096132B1 (en) * | 2010-02-18 | 2011-12-20 | 세메스 주식회사 | Door apparatus of vacuum chamber and apparatus for processing substrate having the apparatus |
Cited By (9)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
WO2017135711A1 (en) * | 2016-02-02 | 2017-08-10 | 한동희 | Autoclave and panel assembly treating apparatus using same |
KR101834133B1 (en) | 2017-10-12 | 2018-02-28 | 장인재 | Door apparatus for chamber |
KR20200112226A (en) * | 2019-03-21 | 2020-10-05 | 국방과학연구소 | High temperature test equipment by using dual chamber |
KR102195150B1 (en) | 2019-03-21 | 2020-12-24 | 국방과학연구소 | High temperature test equipment by using dual chamber |
KR102228618B1 (en) * | 2020-01-23 | 2021-03-16 | 엘아이지넥스원 주식회사 | Apparatus and method for testing an antenna |
KR20210106710A (en) * | 2020-02-21 | 2021-08-31 | 주식회사 두오텍 | burn-in test device having dual test chamber |
KR102340726B1 (en) * | 2020-02-21 | 2021-12-17 | 주식회사 두오텍 | burn-in test device having dual test chamber |
KR20220052139A (en) * | 2020-10-20 | 2022-04-27 | 한국생산기술연구원 | Semiconductor test chamber |
KR102419841B1 (en) | 2020-10-20 | 2022-07-12 | 한국생산기술연구원 | Semiconductor test chamber |
Also Published As
Publication number | Publication date |
---|---|
WO2015160090A1 (en) | 2015-10-22 |
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