KR101443256B1 - Sliding door type sealed chamber apparatus - Google Patents

Sliding door type sealed chamber apparatus Download PDF

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Publication number
KR101443256B1
KR101443256B1 KR1020140044774A KR20140044774A KR101443256B1 KR 101443256 B1 KR101443256 B1 KR 101443256B1 KR 1020140044774 A KR1020140044774 A KR 1020140044774A KR 20140044774 A KR20140044774 A KR 20140044774A KR 101443256 B1 KR101443256 B1 KR 101443256B1
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KR
South Korea
Prior art keywords
housing
door
opening
chamber
backward
Prior art date
Application number
KR1020140044774A
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Korean (ko)
Inventor
강성덕
Original Assignee
강성덕
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Priority to KR1020140044774A priority Critical patent/KR101443256B1/en
Application granted granted Critical
Publication of KR101443256B1 publication Critical patent/KR101443256B1/en
Priority to PCT/KR2015/002553 priority patent/WO2015160090A1/en

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    • GPHYSICS
    • G01MEASURING; TESTING
    • G01RMEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
    • G01R31/00Arrangements for testing electric properties; Arrangements for locating electric faults; Arrangements for electrical testing characterised by what is being tested not provided for elsewhere
    • G01R31/28Testing of electronic circuits, e.g. by signal tracer
    • G01R31/2851Testing of integrated circuits [IC]
    • G01R31/2855Environmental, reliability or burn-in testing
    • G01R31/286External aspects, e.g. related to chambers, contacting devices or handlers
    • G01R31/2862Chambers or ovens; Tanks

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  • Engineering & Computer Science (AREA)
  • Environmental & Geological Engineering (AREA)
  • Computer Hardware Design (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • General Engineering & Computer Science (AREA)
  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Power-Operated Mechanisms For Wings (AREA)
  • Specific Sealing Or Ventilating Devices For Doors And Windows (AREA)

Abstract

There is provided a sliding door type hermetic chamber device which is compactly opened and closed to maximize space utilization and form a more effective and stable hermetic structure. The chamber device includes a housing having an opening formed in a front portion thereof, a chamber communicated with the opening portion and housed in the housing, a pair of guide rails arranged side by side along the front portion with the opening portion interposed therebetween, And a support panel which is disposed adjacent to the door portion in a sliding movement path of the door portion and slidably moves forward and backward.

Description

[0001] Sliding door type sealed chamber apparatus [0002]

BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a hermetically closed chamber device, and more particularly, to a sliding door hermetically closed chamber device that is compactly opened and closed to maximize space utilization and form a more effective and stable hermetic structure.

Sealed chambers are used for manufacturing semiconductor devices and the like or for testing various electronic apparatus products. The chamber device is formed so as to separate the inside and the outside from each other and to seal the inside of the chamber device and to create an extreme physical environment therein. Depending on the purpose, physical conditions such as the internal temperature and the drying degree may be formed differently. Such a chamber device can be used to carry out the manufacturing process, or the finished product can be tested in a specific environment.

The chamber device requires a door structure for opening and closing the chamber and maintaining the airtightness. In many cases, the chamber device is generally formed in a form in which the chamber and various devices connected to the chamber are accommodated in the housing, and a swing-type door structure is generally employed to more smoothly open and close the chamber. Further, the swing type door can be more advantageously applied to various chamber devices because it can form a closed structure more smoothly by applying pressure. Korean Patent Publication No. 10-2013-0142364 discloses a door structure of such a chamber.

However, the conventional chamber device having such a door structure is disadvantageous in that space utilization is undesirably deteriorated because the door rotates to the outside of the chamber or the housing and is opened. Particularly, in a work room or a test room in which various manufacturing equipments or test equipments are installed, it is necessary to utilize efficient space. Since such requirements are not satisfied, there is a problem that it is very difficult to select a space for installing the apparatus. In order to solve this problem, unlike the swing type door, it is difficult to maintain the airtightness of the sliding door.

Korean Patent Publication No. 10-2013-0142364, (2013.12.30), Drawing 1

SUMMARY OF THE INVENTION Accordingly, the present invention has been made to solve the above-mentioned problems occurring in the prior art, and it is an object of the present invention to provide a sliding door type hermetic chamber device which is compactly opened and closed to maximize space utilization and form a more stable and stable sealing structure.

The technical problem of the present invention is not limited to the above-mentioned problems, and another technical problem which is not mentioned can be clearly understood by those skilled in the art from the following description.

The sliding door-type closed chamber device according to the present invention comprises: a housing having an opening formed in a front portion thereof; A chamber received in the housing and communicating with the opening; A pair of guide rails disposed side by side along the front portion with the opening portion interposed therebetween; A door part that slides along the guide rail and opens and closes the opening part; And a support panel disposed adjacent to the door portion in a sliding movement path of the door portion and slidably moving forward and backward.

The chamber device may further include at least one first driving unit coupled to the housing so as to be movable forward and rearward and configured to move the pair of guide rails forward and backward, have.

The support panel is disposed at a lower portion of the door portion and moves forward to support the door portion, or to move backward to escape the sliding movement path of the door portion.

The chamber device may further include at least one second driving unit installed in the housing and moving the supporting panel forward and backward.

The chamber device may further include at least one flexible wire having one end coupled to the door portion and a traction device coupled to the other end of the flexible wire to pull the flexible wire.

The pulling device may include a screw bar rotatably coupled to the housing and having threads on an outer circumferential surface thereof, a motor for rotating the screw bar, and a screw nut portion coupled to the other end of the flexible wire, have.

The chamber device may further include at least one guide bar installed in the housing in parallel with the screw bar, and the screw nut may be slidably coupled to the guide bar to move along the guide bar.

The pulling device is located at an upper portion of the chamber to pull the door portion and the door portion is moved downward by its own weight to open the opening portion and close the opening portion when the pulling device pulls the flexible wire .

The chamber device may further include a rotating wheel coupled to the housing and rotated together with the flexible wire to switch the direction of movement of the flexible wire.

The chamber device may further include at least one of a temperature controller for adjusting a temperature inside the chamber and a humidity controller for adjusting humidity inside the chamber.

The chamber device may further include a grill portion formed through the support panel and serving as an air circulation passage between the inside and the outside of the housing.

The chamber device of the present invention can maximize space utilization around the apparatus by a compact and organically operated sliding door structure and can form a more effective and stable sealing structure. Therefore, it is possible to apply the apparatus to various places without depending on the installation place, and it is possible to carry out various operations such as the manufacturing process and the test work using the chamber more safely.

1 is a perspective view of a sliding door type hermetic chamber device according to an embodiment of the present invention.
Fig. 2 is a perspective view of the chamber device of Fig. 1 with the door part open. Fig.
3 is a longitudinal sectional view showing the internal structure of the chamber device of FIG.
4 is a cross-sectional view taken along the line AA 'of FIG. 1 showing the upper structure of the chamber device and the arrangement of the door part and the guide rail.
Fig. 5 is a sectional view showing the door unit and the guide rail of the chamber apparatus of Fig. 4 moved. Fig.
6 is a cross-sectional view taken along the line BB 'of FIG. 1 showing the arrangement of the support panel of the chamber device.
7 is a cross-sectional view showing a state in which the support panel of Fig. 6 is moved.
8 to 10 are operation diagrams showing the operation of the chamber device of FIG.

BRIEF DESCRIPTION OF THE DRAWINGS The advantages and features of the present invention and methods for achieving them will become apparent with reference to the embodiments described in detail below with reference to the accompanying drawings. The present invention may, however, be embodied in many different forms and should not be construed as being limited to the embodiments set forth herein. Rather, these embodiments are provided so that this disclosure will be thorough and complete, and will fully convey the concept of the invention to those skilled in the art. Is provided to fully convey the scope of the invention to those skilled in the art, and the present invention is only defined by the claims. Like reference numerals refer to like elements throughout the specification.

Hereinafter, a sliding door type closed chamber device according to an embodiment of the present invention will be described in detail with reference to FIGS. 1 to 10. FIG.

FIG. 1 is a perspective view of a sliding door type closed chamber apparatus according to an embodiment of the present invention, FIG. 2 is a perspective view of the chamber apparatus of FIG. 1 with its door open, Fig.

1 to 3, a sliding door type closed chamber device 1 according to an embodiment of the present invention includes a housing 100 having an opening 101 formed in a front portion thereof, a housing 100 housed in the housing 100, A pair of guide rails 210 arranged side by side along the front portion of the housing 100 with the opening 101 interposed therebetween as shown in Figs. 1 and 2, A door part 200 slidably moving along the guide rail 210 to open and close the opening part 101 and a door part 200 disposed adjacent to the door part 200 in the sliding movement path of the door part 200, Panel 300 as shown in FIG.

At this time, the front surface of the housing 100 has an opening 101 communicating with the chamber 110, as shown in FIG. 2, on one side of the housing 100 in which the door part 200 is formed and can be opened and closed Refers to a surface through which the user can access the chamber 110 through the opening 101 when the door unit 200 is opened. Further, the forward direction may be referred to as a direction toward the front portion of the housing 100, and the rear direction may include the forward direction and the backward direction in a direction opposite to the forward direction and connecting the forward direction and the rear direction. For example, the front portion of the housing 100 may be the entire vertical surface of the left portion where the door portion 200 and the support panel 300 are positioned as viewed in FIG. 3, and the front and rear portions may be directed to the front portion, 3 < / RTI >

The sliding door type closed chamber device 1 according to an embodiment of the present invention is configured such that the door portion 200 is slid on the guide rail 210 extending along the front portion of the housing 100, (I.e., forward and backward) toward or away from the front portion on the sliding movement path of the door portion 200. [ With the organic door structure as described above, the door portion 200 operates very compactly, and a more stable sealing structure can be formed together with the support panel 300.

In addition, the sliding door type hermetic chamber device 1 according to an embodiment of the present invention can be coupled to the housing 100 such that the pair of guide rails 210 can also be moved forward and backward. Therefore, the guide rail 210 pushes the front portion of the housing 100 together with the door portion 200 to operate compactly, thereby forming a more effective sealing structure. Hereinafter, the components and features of the sliding door-type hermetic chamber device 1 having such features will be described in detail with reference to the drawings.

1 and 2, the housing 100 is formed in a box shape as a whole, and one side of the housing 100 can be used as the front side as described above. At least one wheel unit 600 may be formed at the lower portion of the housing 100 so that the sliding door type closed chamber device 1 can be easily moved. 200 may be provided with switches 104, 203 capable of opening and closing the apparatus.

Although the housing 100 is formed in a box shape according to an embodiment of the present invention, the shape of the housing 100 need not be limited. The housing 100 can be formed in various shapes including at least one surface that can be utilized as a front portion. The front portion is preferably formed as a vertical surface as described above, and the door portion 200 can be operated more easily by using gravity. The operation of the door unit 200 will be described later in more detail.

The opening 101 is formed in the front portion of the housing 100 and the chamber 110 is accommodated in the housing 100 and communicates with the opening 101. Accordingly, as described above, when the door portion 200 opens the opening portion 101, the user can access the chamber 110 through the opening portion 101. As shown in FIG. 2, the chamber 110 may be formed by opening a portion overlapping the opening 101, but an additional door may be additionally provided in the opened portion. Also, the shape of the chamber 110 as illustrated is exemplary, and the shape of the chamber 110 may also be modified into various shapes other than a box shape. The chamber 110 may be formed in various forms without limitation as long as it has a relatively thick inner wall and can effectively maintain airtightness.

The pair of guide rails 210 are arranged side by side along the front portion of the housing 100 with the opening 101 therebetween. The guide rail 210 extends in a direction parallel to the front portion of the housing 100 and has a rail portion 211 (see FIGS. 3 and 4) formed on a surface facing the door portion 200, The portion 200 can be formed to easily slide. The guide rail 210 preferably extends in the vertical direction along the front surface formed by the vertical surface as described above.

Meanwhile, the guide rail 210 is coupled to the housing 100 so as to be movable forward and backward as described above. Accordingly, the door portion 200 coupled to the guide rail 210 is not simply moved along the guide rail 210 but is moved toward the front portion of the housing 100 to urge the front portion to form a more effective sealing structure . More specifically, the guide rail 210 may be connected to at least one first driving unit 220 installed in the housing 100 to move the guide rail 210 forward and backward. The first driving part 220 may be a linear actuator such as a hydraulic cylinder in which one end is fixed to the housing 100 and the other end is connected to the guide rail 210 to extend and contract. The guide rail 210 can be stably driven by being connected to different points of the guide rail 210 as shown in FIG.

The door unit 200 is slidably coupled to the guide rail 210 and slides along the guide rail 210. The door part 200 slides along the guide rail 210 to close the opening 101 as shown in Figure 1 or to open the opening 101 as shown in Figure 2, The guide rails 210 move together along the guide rails 210 as described above so as to press the front portion of the housing 100 or vice versa. A slider (see 201 in FIGS. 3 and 4) coupled with a rail portion (see 211 in FIGS. 3 and 4) is formed on the surface of the door portion 200 facing the guide rail 210, .

At least one packing part 103 is formed between the door part 200 and the housing 100, so that airtightness can be maintained more easily. The packing portion 103 may be formed adjacent to the opening portion 101 around the opening portion 101 as shown in FIG. 2 and may be formed on one side of the door portion 200 facing the opening portion 101, if necessary (See 202 in FIG. 5). In this way, double or triple packing portions can be formed to easily maintain airtightness. A window 204 can be formed on one side of the door unit 200 so as to observe the inside of the door unit 200. A display unit 205 or the like capable of externally displaying the operation state of the chamber in the housing 100 .

The support panel 300 is disposed on the movement path of the door portion 200 sliding along the guide rail 210. The support panel 300 is disposed at the lower portion of the door portion 200 and moves forward to support the door portion 200 as shown in FIG. 1 or to move backward in the opposite direction, as shown in FIG. 2 So that it can escape from the sliding movement path of the door part 200 in a retracted state. That is, the support panel 300 is operated organically so that the door part 200 can be easily slid by limiting the movement path so that the door part 200 can not be slid or opening the movement path, By restricting the path and supporting it, a more stable sealing structure can be formed. The support panel 300 may be provided with a grille 310 which penetrates the support panel 300 and serves as an air circulation passage between the inside and the outside of the housing 100.

More specifically, the support panel 300 may be connected to at least one second drive unit 320 installed in the housing 100 to move the support panel 300 forward and backward, and the second drive unit 320 may move As with the first driving part 220, the first driving part 220 may be formed of a linear actuator such as a hydraulic cylinder, one end of which is fixed to the housing 100 and the other end of which is connected to the supporting panel 300 to extend and contract. The second driving unit 320 may also be connected to other points of the supporting panel 300, as shown in FIG. 3, to stably drive the supporting panel 300.

The sliding door type closed chamber device 1 in which the door part 200, the guide rail 210, and the support panel 300 are organically combined with each other is formed in the door part 200, At least one flexible wire 401 coupled to the flexible wire 401 and a pulling device 400 coupled to the other end of the flexible wire 401 to pull the flexible wire 401, The door unit 200 can be operated. The traction device 400 includes a screw bar 410, a screw nut 420, a motor 411 for rotating the screw bar 410, and a guide bar 430 to which the screw nut 420 is coupled . Hereinafter, the specific structure of the pulling device 400 and the flexible wire 401 and the operation of each component will be described in more detail with reference to FIGS. 4 to 7. FIG.

FIG. 4 is a cross-sectional view of the upper part of the chamber device of FIG. 1 and the arrangement of the door part and the guide rail, and FIG. 5 is a sectional view of the door device of FIG. FIG. 6 is a cross-sectional view taken along the line BB 'in FIG. 1 illustrating the arrangement of the support panel of the chamber device of FIG. 1, and FIG. 7 is a cross-sectional view of the support panel of FIG. 6 moved.

4 and 5, the traction device 400 includes a screw bar 410 rotatably coupled to the housing 100 and having a screw thread formed on the outer circumference thereof, a motor 411 rotating the screw bar 410, And a screw nut portion 420 to which the other end of the flexible wire 401 coupled to the door portion 200 is coupled and engaged with the screw bar 410 as described above. The screw nut 420 is slidably coupled to at least one guide bar 430 installed in the housing 100 in parallel with the screw bar 410 and can move along the guide bar 430.

The screw bar 410 is coupled to the motor 411 and rotated, and a screw thread is formed on the outer circumferential surface of the screw bar 410 so that the screw nut 420 engaged with the screw bar 410 can be linearly moved. The screw nut 420 has a mating portion 421 formed at a portion of the screw bar 410 through which the screw bar 410 penetrates to mate with the screw of the screw bar 410 to easily convert the rotational motion of the screw bar 410 into a linear motion. can do. The mating portion 421 may include, for example, a spherical body such as a ball inserted into the thread of the screw bar 410 and rotating. The screw bar 410 and the screw nut 420 which are engaged with each other can function as a ball screw which is a mechanical element for converting rotational motion into linear motion.

The screw nut portion 420 is engaged with the screw bar 410 and moves linearly along the screw bar 410 so that the mating portion 421 may be formed integrally with the screw nut portion 420, Or may be fixedly coupled to the nut portion 420. That is, the screw nut 420 is not limited by the shape and size of the screw nut 410 as long as it can be engaged with the screw bar 410 to form the ball screw. As shown in the figure, the screw nut portion 420 may be formed so that both end portions thereof are formed in an expanded shape so that a guide bar 430 parallel to the screw bar 410 passes through the screw nut portion 420, 420 can slide more stably along the guide bar 430 by the rotation of the screw bar 410.

The towing device 400 may be located above the chamber (see 110 in FIGS. 1 to 3) to more easily pull the door portion 200 and adjust the traction force to lower or raise the door portion 200 have. That is, the door part 200 slides by its own weight and moves to the lower part of the chamber 110 to open the opening part 101. When the pulling device 400 pulls the flexible wire 401 from above the chamber 110 And may be formed so as to close the opening 101 by sliding movement.

The traction device 400 may be located at the upper end of the housing 100, for example, as shown in FIGS. 4 and 5, to form the upper structure of the housing 100. As described above, when the flexible wire 401 connected to the lower portion is pulled by operating the upper portion, the door portion 200 can be easily lowered by its own weight by adjusting the pulling force. Further, by using such a pulling structure, the door portion 200 can be moved downward to be more easily seated on the support panel (see 300 in FIG. 1 to FIG. 3).

Meanwhile, the flexible wire 401 has one end coupled to the door portion 200 and the other end coupled to the screw nut portion 420, and the moving direction of the flexible wire 401 is switched at least once in contact with the rotating wheel (see 402 in FIG. 3) . That is, by using the rotary wheel 402 that is coupled to the housing 100 and rotates together with the flexible wire 401 to change the direction of movement of the flexible wire 401, the pulling direction of the pulling device 400 So that the apparatus can be smoothly operated even if the direction of movement of the flexible wire 401 does not match.

The flexible wire 401 is not particularly limited as long as it is a deflectable mechanical element that extends between the door part 200 and the pulling device 400, particularly the screw nut part 420 of the pulling device 400 . The flexible wire 401 may be made of a steel wire having sufficient rigidity, for example, a metal wire, or may be made of a mechanical power transmission element such as a chain or a belt. The rotation wheel 402 may also be deformed at least in part according to the embodiment of the flexible wire 401. [ In particular, when the flexible wire 401 is formed in the form of a chain, the rotating wheel 402 may be formed in the form of a gear that meshes with the flexible wire 401 in the form of a chain.

The structure using the flexible wire 401 can prevent the flexible wire 401 from moving in the front and rear directions of the guide rail 210 even when the guide rail 210 is moved forward and backward to come in close contact with the housing 100 or away from the housing 100 So that the door unit 200 can be easily supported while flexibly bending. 5, even when the guide rail 210 is moved away from the housing 100 in parallel (see arrows), the flexibility of the flexible wire 401 causes the door portion 200 to be pulled out of the pulling device 400 can be easily maintained without a problem such as being separated from the connection state. 5, when the guide rail 210 moves, the screw nut 420 also moves correspondingly to prevent the tension applied to the flexible wire 401 from increasing sharply, so that the tension is appropriately increased. .

The slider 201 is formed on the surface of the door part 200 facing the guide rail 210 and the rail part 210 is formed on the surface of the guide rail 210 facing the door part 200 And is engaged with the slider 201. Accordingly, the door portion 200 forms a rigid coupling structure that easily slides along the guide rail 210 but is not easily separated from the guide rail 210. The door portion 200 can be moved forward and backward (in the direction of the arrow shown in FIG. 5 and the opposite direction thereof) as shown in FIG. 5 by the extension of the first driving portion 220 coupled to the housing 100. The packing parts 103 and 202 are formed between the door part 200 and the housing 100 so that the first driving part 220 contracts and the door part 200 moves toward the housing 100 again A more effective sealing structure can be formed. As described above, one or more packing portions 103 and 202 may be formed around the opening portion 101 and the door portion 200 side.

6 and 7, the support panel 300 is also moved forward and backward (in the arrow direction and the opposite direction shown) by the second driver 320. [ In particular, when the first driving unit 220 is extended and the guide rail 210 is separated from the housing 100, the second driving unit 320 contracts to move in the opposite direction . Such an organic movement between the guide rail 210 and the support panel 300 allows the support panel 300 to be easily released from the sliding path of the door portion (see 200 in FIGS. 4 and 5) Can readily open the opening (see 101 in Figs. 1 to 3).

That is, the guide rail 210 and the support panel 300 are moved forward and backward by the driving of the first driving part 220 and the second driving part 320, and are moved in the opposite directions organically. The support panel 300 is inserted into the movement path of the door part 200 and the door part 200 is inserted into the door part 200 while the mutual movement of the guide rail 210 and the support panel 300 is minimized, Can be easily supported. Hereinafter, this will be described in more detail with reference to FIGS. 8 to 10. FIG.

FIGS. 8 to 10 are views showing the operation of the chamber device of FIG. 1. FIG.

8, the door part 200 closes the opening part 101 of the front part of the housing 100 with the guide rail 210 and the door part 200 in close contact with the housing 100, The panel 300 is positioned below the door part 200 and supports the door part 200. The door portion 200 is stably supported in a state of being pressed toward the front portion of the housing 100, so that a more effective and stable sealing structure can be formed. In this state, the first driving unit 220 is maintained in a contracted state and the second driving unit 320 is maintained in a stretched state.

1 and 2) formed in the support panel 300 circulates air to the outside of the housing 100 to prevent the temperature inside the housing 100 from rising sharply . That is, a temperature control unit 510 installed in a lower portion of the chamber 110 and connected to the chamber 110 to adjust the temperature inside the chamber 110 is provided in the accommodation space 102 inside the housing 100, The humidity control unit 520 for controlling the humidity of the inside of the indoor unit 110 may be installed. By using the grill unit 310, such devices can be heated to prevent the temperature from rising sharply . A fan (not shown) for air circulation may be additionally provided on one side of the housing 100 or the support panel 300 if necessary. In this way, the chamber device can be used, for example, as a constant temperature and humidity bath.

9, the first driving unit 220 is extended, the second driving unit 320 is contracted, and the guide rail 210 and the supporting panel 300 are moved forward and backward (see arrows in the drawing) The support panel 300 is released from the sliding path of the door part 200 and the door part 200 is released from the housing 100 and the pressing is released. At this time, it is sufficient that the guide rail 210 moves only to the extent that the door portion 200 can be separated from the front portion of the housing 100, and the support panel 300 has the temperature control portion 510 and the humidity control portion 520 Or the like and the guide rail 210, as shown in FIG. In this way, the door unit 200 is switched to the slidable state with only minimal movement.

The flexible wire 401 is bent in a tilted state according to the movement of the guide rail 210 and the door part 200 as shown in FIG. It is possible to easily cope with the play. As described above, when the guide rail 210 moves, the screw nut portion 420 of the pulling device 400 moves together to adjust the tension applied to the flexible wire 401 so as not to increase rapidly.

10, the screw nut 420 of the traction device 400 is rapidly moved along the guide bar 430 after the arrangement state is changed as described above, so that the door part 200 is moved downward, Can be opened and the user can access the chamber 110 through the opening 101. The door unit 200 can be moved downward by its own weight so that the opening 101 can be opened easily so that the pulling device 400 and the flexible wire 401 can be properly pulled out of the door unit 200 It may be sufficient to provide. In this way, it is possible to form a door structure which can be opened and closed very easily while maximizing space utilization. 8 to 10 are reversed, the door portion 200 is pulled up and is brought into close contact with the front portion of the housing 100 where the opening portion 101 is formed together with the guide rail 210, It is possible to form an effective sealing structure for pressing the front portion of the body 100.

While the present invention has been described in connection with what is presently considered to be practical exemplary embodiments, it is to be understood that the invention is not limited to the disclosed embodiments, but, on the contrary, You will understand. It is therefore to be understood that the above-described embodiments are not limitative in any way whatsoever exemplary.

1: Sliding door type hermetic chamber device 100: Housing
104, 203: switch 101: opening
102: accommodation space 110: chamber
103, 202: packing part 200: door part
201: Slider 204: Window
205: display portion 210: guide rail
211: rail part 220: first drive part
300: Support panel 310: Grille part
320: second driving part 400: traction device
401: flexible wire 402: rotating wheel
410: screw bar 411: motor
420: screw nut portion 421:
430: guide bar 510: temperature control unit
520: humidity controller 600:

Claims (11)

A housing having an opening formed in a front portion thereof;
A chamber received in the housing and communicating with the opening;
A pair of guide rails disposed side by side along the front portion with the opening portion interposed therebetween;
A door part that slides along the guide rail and opens and closes the opening part;
A support panel disposed adjacent to the door portion in a sliding movement path of the door portion and slidably moving forward and backward; And
And at least one first driving unit installed in the housing and moving the pair of guide rails forward and backward,
The pair of guide rails are coupled to the housing so as to be movable forward and backward,
Wherein the support panel is disposed at a lower portion of the door portion and moves forward to support the door portion or move backward to deviate from a sliding movement path of the door portion.
delete delete The method according to claim 1,
And at least one second driving unit installed in the housing and moving the support panel forward and backward.
A housing having an opening formed in a front portion thereof;
A chamber received in the housing and communicating with the opening;
A pair of guide rails disposed side by side along the front portion with the opening portion interposed therebetween;
A door part that slides along the guide rail and opens and closes the opening part;
A support panel disposed adjacent to the door portion in a sliding movement path of the door portion and slidably moving forward and backward;
At least one first driving unit installed in the housing and moving the pair of guide rails forward and backward;
At least one flexible wire having one end coupled to the door portion; And
And a traction device coupled to the other end of the flexible wire to pull the flexible wire,
Wherein the pair of guide rails are coupled to the housing so as to be movable forward and backward.
6. The method of claim 5,
The towing device comprises:
A screw bar rotatably coupled to the housing,
A motor for rotating the screw bar, and
And a screw nut portion to which the other end of the flexible wire is coupled and engaged with the screw bar.
The method according to claim 6,
And at least one guide bar installed in the housing in parallel with the screw bar,
Wherein the screw nut portion is slidably engaged with the guide bar and moves along the guide bar.
6. The method of claim 5,
The towing device is located at an upper portion of the chamber to pull the door portion,
Wherein the door portion is moved downward by its own weight to open the opening portion and close the opening portion when the pulling device pulls the flexible wire.
6. The method of claim 5,
Further comprising a rotating wheel coupled to the housing and rotating together with the flexible wire to switch the direction of movement of the flexible wire.
A housing having an opening formed in a front portion thereof;
A chamber received in the housing and communicating with the opening;
A pair of guide rails disposed side by side along the front portion with the opening portion interposed therebetween;
A door part that slides along the guide rail and opens and closes the opening part;
A support panel disposed adjacent to the door portion in a sliding movement path of the door portion and slidably moving forward and backward; And
And at least one of a temperature controller for adjusting a temperature inside the chamber and a humidity controller for adjusting humidity inside the chamber, the humidity controller being installed at a lower portion of the chamber.
11. The method of claim 10,
And a grill portion formed through the support panel and serving as an air circulation passage between the inside and the outside of the housing.
KR1020140044774A 2014-04-15 2014-04-15 Sliding door type sealed chamber apparatus KR101443256B1 (en)

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KR1020140044774A KR101443256B1 (en) 2014-04-15 2014-04-15 Sliding door type sealed chamber apparatus
PCT/KR2015/002553 WO2015160090A1 (en) 2014-04-15 2015-03-17 Sliding door type closed chamber apparatus

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WO2017135711A1 (en) * 2016-02-02 2017-08-10 한동희 Autoclave and panel assembly treating apparatus using same
KR101834133B1 (en) 2017-10-12 2018-02-28 장인재 Door apparatus for chamber
KR20200112226A (en) * 2019-03-21 2020-10-05 국방과학연구소 High temperature test equipment by using dual chamber
KR102228618B1 (en) * 2020-01-23 2021-03-16 엘아이지넥스원 주식회사 Apparatus and method for testing an antenna
KR20210106710A (en) * 2020-02-21 2021-08-31 주식회사 두오텍 burn-in test device having dual test chamber
KR20220052139A (en) * 2020-10-20 2022-04-27 한국생산기술연구원 Semiconductor test chamber

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* Cited by examiner, † Cited by third party
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CN110987781A (en) * 2019-12-18 2020-04-10 广东虹勤通讯技术有限公司 Salt spray test device

Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH0978965A (en) * 1995-09-18 1997-03-25 Emoto Kogyo Kk Safety device in motor-driven shutter
KR200411339Y1 (en) * 2005-07-21 2006-03-15 한국기계연구원 Structure for opening and closing door of chamber
KR20110095014A (en) * 2010-02-18 2011-08-24 세메스 주식회사 Door apparatus of vacuum chamber and apparatus for processing substrate having the apparatus

Patent Citations (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH0978965A (en) * 1995-09-18 1997-03-25 Emoto Kogyo Kk Safety device in motor-driven shutter
KR200411339Y1 (en) * 2005-07-21 2006-03-15 한국기계연구원 Structure for opening and closing door of chamber
KR20110095014A (en) * 2010-02-18 2011-08-24 세메스 주식회사 Door apparatus of vacuum chamber and apparatus for processing substrate having the apparatus
KR101096132B1 (en) * 2010-02-18 2011-12-20 세메스 주식회사 Door apparatus of vacuum chamber and apparatus for processing substrate having the apparatus

Cited By (9)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO2017135711A1 (en) * 2016-02-02 2017-08-10 한동희 Autoclave and panel assembly treating apparatus using same
KR101834133B1 (en) 2017-10-12 2018-02-28 장인재 Door apparatus for chamber
KR20200112226A (en) * 2019-03-21 2020-10-05 국방과학연구소 High temperature test equipment by using dual chamber
KR102195150B1 (en) 2019-03-21 2020-12-24 국방과학연구소 High temperature test equipment by using dual chamber
KR102228618B1 (en) * 2020-01-23 2021-03-16 엘아이지넥스원 주식회사 Apparatus and method for testing an antenna
KR20210106710A (en) * 2020-02-21 2021-08-31 주식회사 두오텍 burn-in test device having dual test chamber
KR102340726B1 (en) * 2020-02-21 2021-12-17 주식회사 두오텍 burn-in test device having dual test chamber
KR20220052139A (en) * 2020-10-20 2022-04-27 한국생산기술연구원 Semiconductor test chamber
KR102419841B1 (en) 2020-10-20 2022-07-12 한국생산기술연구원 Semiconductor test chamber

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