KR101441275B1 - Control Device for Generating a High Voltage Pulse Wave and Low Voltage Pulse Wave to complex and Drive Method of the Same - Google Patents

Abstract

Disclosed is a dielectric heat technique relating to electromagnetism. A control device for generating a high voltage pulse wave and a low voltage pulse wave and a method of driving the same according to the embodiment of the present invention control an output voltage in a driving frequency range (100 khz to 4 MHz) by using self resonance which is the parasitic element of a transformer having a primary wire (1 to 5 turns) and a secondary wire (50 to 80 turns), and matches the intrinsic impedance element of the transformer by adjusting magnetizing inductance. The present invention controls a link voltage in a driving frequency range (100 khz to 4 MHz) by using self resonance which is the parasitic element of a transformer having a primary wire (1 to 5 turns) and a secondary wire (50 to 80 turns), prevents the droping phenomenon of an analog voltage signal due to frequency increment included in the intrinsic impedance element of the transformer, and stabilizes a total system.

Description

BACKGROUND OF THE INVENTION 1. Field of the Invention [0001] The present invention relates to a high-voltage pulse-wave sparge and a low-voltage pulse-wave-

BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to an electromagnetic induction heating technique and, more particularly, to an electromagnetic induction heating technique using electromagnetic resonance (self resonance) which is a parasitic component of a transformer having a primary winding amount (1 to 5 turns) and a secondary winding amount (50 to 80 turns) To a high voltage pulse wave and low voltage pulse wave spa combined generation control device for controlling a link voltage in a frequency band (100 kHz to 4 MHz) and a driving method thereof.

In a conventional method of manufacturing a transformer, that is, a design method for determining an output voltage at a winding ratio between primary and secondary sides in accordance with a voltage conversion ratio, the winding amount of the primary winding for securing the system is high, and the secondary winding ratio and the winding It is difficult to design a transformer because the size of the transformer is increased due to the determination of the number of turns and the parasitic capacitance naturally increases due to the increase of the size of the transformer. In addition, the problem that the gap is excessively applied in order to lower the impedance of the primary side in the high frequency band It was not easy to design.

All transformers have gain amplification values in the form of series resonance in a specific frequency band whose resonance frequency is determined by the ratio between the primary and secondary windings of the transformer and the magnetizing inductance of the primary, So that the crystal constant fluctuates finely.

The parasitic component shows a remarkable change according to the frequency domain. It is the fact that the self resonant frequency of the transformer is the best way to design by the empirical aspect and it is difficult to generalize it.

In addition, the winding technique requires the conventional winding technique to be applied as it is. It is experimentally confirmed that the self-resonance does not occur due to the application of the special winding technique, and the same phenomenon occurs in all the transformers.

However, for example, in order to design a transformer to resonate in the band of 1 to 2 MHz, it is preferable to set the magnetization inductance (Lm) of the primary side of the transformer to 1 to 3 uH and the ratio of the primary winding to the secondary winding to 1: 30 to 40 In order to cause the resonance to occur in the higher frequency band, there is a method of reducing the stray capacitance and reducing the amount of secondary winding.

In addition, in order to maintain the secondary side winding, a method of lowering the magnetization inductance of the primary side may be applied to reduce the amount of the primary side winding and to reduce the gap of the core.

It is also important to design the resonance frequency of the transformer so that the resonance frequency of the transformer is determined as close as possible to the maximum drive frequency because the output gain value decreases sharply in the higher frequency region from the resonance point.

That is, it is possible to create various embodiments by simultaneously considering the first and second winding ratios and the magnetizing inductance of the primary side, and at the same time considering the empirical method, which is applicable to a range of technologies that can be publicly practiced.

When the transformer design method follows the conventional method, the rms value at the high frequency is remarkably low or the rms value at the low frequency is excessively high, so that the control is not easy, and the low impedance at the low frequency causes the transformer The circuit itself may be damaged due to excessive current inflow of various accessory elements.

Furthermore, there is a problem in that it is not technically easy to make a high voltage pulse having a uniform effective value for a relatively wide band from 100 kHz to several Mhz using a single transformer.

Korean Patent Publication No. 10-2006-0059172 Korean Patent Publication No. 10-2001-0034023 Korean Patent Publication No. 10-2012-0096453

A first object of the present invention is to provide a high voltage pulse wave sputtering apparatus and a low voltage pulse wave sputtering apparatus which are capable of controlling the primary winding amount (1 to 5 turns) (100 kHz to 4 MHz) using self resonance, which is a parasitic component of a transformer having a secondary side winding amount (50 to 80 turns), to control a frequency contained in the intrinsic impedance component of the transformer To prevent falling of the analog voltage signal due to an increase in the rise and to stabilize the entire system.

The second object of the present invention is to provide a method of controlling the depth of deep cavitation by inducing the generation of a low voltage pulse wave-high voltage pulse wave complex by matching the intrinsic impedance of a transformer, This is to further control the dielectric heating of the device, the dielectric heating device, or the thermal therapy device for cancer treatment, thereby further expanding the various functions.

It is a third object of the present invention to provide a transformer which can smoothly perform intrinsic impedance matching of a transformer during adjustment of core gap adjustment and magnetization inductance even if the turn value of the primary side, secondary side winding ratio, or winding amount of the transformer is reduced, And the thermal amplification depth can be adjusted by increasing the current amplification while maintaining a constant change rate of the voltage amplification according to the weight of the medical device, This is to contribute to the development of the related industry.

In order to achieve the above object, the present invention includes the following configuration.

That is, according to an embodiment of the present invention, there is provided an apparatus for controlling the combined generation of a high-voltage pulse wave and a low-voltage pulse-wave spark, comprising: a clock generator for generating a first clock wave and a second clock wave having a phase difference of 180 degrees from the first clock wave; A microcontroller controlling the clock generator to convert the first clock wave into a first triangle wave and the second clock wave into a second triangle wave to have a phase difference of 180 degrees with the first triangle wave; A DA converter for DA converting a digital voltage signal for a specific frequency into an analog voltage signal from a bus connected to the microcontroller; An error amplifier for amplifying the analog voltage signal within an error range of a reference voltage; A first triangular wave voltage level that is automatically generated by superimposition between the analog voltage signal amplified by the error amplifier and the first triangular wave and a voltage level of the first triangular wave, A first comparator for extracting a high voltage drive signal from the triangle wave; A voltage level of the second triangular wave generated by overlapping between the analog voltage signal amplified by the error amplifier and the second triangle wave and a voltage level of the second triangle wave, A second comparator for extracting a low voltage drive signal from the triangle wave; (First rectangular wave) is outputted to the secondary side of the transformer in a section where the first triangular wave and the link voltage applied to the primary side of the transformer overlap with each other when the first switch is on, A first switching unit for continuously generating a high-voltage pulse wave in which a high-voltage driving signal is placed within a driving frequency band; (Second rectangular wave) is output to the secondary side of the transformer in a section where the second triangular wave and the link voltage overlap with each other when the second switch is turned on, and the low voltage drive signal is applied to the second clock wave so that the second turn- And a second switching unit for continuously generating a low voltage pulse wave within the driving frequency band, wherein the microcontroller is configured to perform PWM (Pulse Width Modulation), PFM And the first and second turn-on signals are selectively output by controlling an effective value of the high-voltage pulse wave or the low-voltage pulse wave using pulse frequency modulation (PWM) or pulse phase modulation (PPM)

The high-voltage pulse-wave spa- tus and low-voltage pulse-wave multi-generation control device and method of driving the same according to the present invention can be applied to a self-resonance circuit (a parasitic component of a transformer having a primary winding amount of 1 to 5 turns and a secondary winding amount of 50 to 80 turns) Self resonance is used to control the link voltage in the driving frequency band (100kHz to 4MHz) to prevent the analog voltage signal from dropping due to the increase in frequency contained in the inherent impedance component of the transformer and to stabilize the entire system. Effect.

In addition, the present invention adjusts the magnetization inductance to match the intrinsic impedance of the transformer, thereby inducing a combined generation of the low-voltage pulse-spark-high-voltage pulse-wave to control the depth of the deep portion, , Thermal medical devices, dielectric heating devices, or thermal therapy devices for cancer therapy.

Further, even if the turn value of the primary winding, the secondary winding ratio, or the winding amount of the transformer is reduced, it is possible to smoothly perform the intrinsic impedance matching of the transformer when adjusting the core gap adjustment and the magnetizing inductance, , The change of the voltage amplification is constant but the amplification of the current is increased so that the depth of deep heat can be controlled so that the deep medical treatment device for medical treatment, the thermal heating device or the thermal therapy device for cancer treatment, The third effect is obtained.

BRIEF DESCRIPTION OF DRAWINGS FIG. 1 is a diagram showing a high-voltage pulse-wave spa- tus and a low-voltage pulse-wave mixed-wave generation control device according to an embodiment of the present invention;
Fig. 2 is another diagram showing a part of a high-voltage pulse-wave spa- tus and low-voltage pulse-wave multi-pulse generation control device according to an embodiment of the present invention.
FIG. 3 is another diagram showing a part of a high-voltage pulse-wave spa and a low-voltage pulse-wave combine generation control device according to an embodiment of the present invention.
4 is an actual waveform diagram showing a high-voltage pulse wave output from the first switching unit of the high-voltage pulse-wave spa and low-voltage pulse-wave multi-pulse generation control apparatus according to the embodiment of the present invention.
5 is an actual waveform diagram showing a low-voltage pulse wave output from the second switching unit of the high-voltage pulse-wave spa and low-voltage pulse-wave multi-pulse generation control apparatus according to the embodiment of the present invention.
FIG. 6 is an actual waveform diagram showing a first turn-on signal output to a transformer secondary side among the high-voltage pulse-wave spa and low-voltage pulse-wave multi-generation control device according to the embodiment of the present invention.
FIG. 7 is an actual waveform diagram showing a second turn-on signal output to the transformer secondary side in the high voltage pulse wave spa and low voltage pulse wave spa multiple generation control device according to the embodiment of the present invention.
FIG. 8 is an actual waveform diagram showing first and second turn-on signals simultaneously output to the transformer secondary side among the high-voltage pulse wave spa and low-voltage pulse-wave multi-generation control apparatus according to the embodiment of the present invention.
FIG. 9 is a flowchart showing a method of driving a high voltage pulse wave spaction control apparatus and a low voltage pulse wave spa complex generation control apparatus according to an embodiment of the present invention.

[Example]

Hereinafter, the present invention will be described in detail with reference to the accompanying drawings.

BRIEF DESCRIPTION OF DRAWINGS FIG. 1 is a diagram showing a high-voltage pulse-wave spa- tus and a low-voltage pulse-wave mixed-wave generation control device according to an embodiment of the present invention;

1, the high-voltage pulse-wave and low-voltage pulse-wave multi-pulse generation control apparatus 1000 includes a transformer 800 having a primary winding amount (1 to 5 turns) and a secondary winding amount (50 to 80 turns) (100kHz to 4MHz) and the voltage amplification rate through the resonance phenomenon are improved by using the self resonance component of the transformer (800), and a high voltage pulse wave and a low voltage pulse wave are mixed with the secondary side of the transformer The first and second comparators 500 and 600, the first switching unit 700, and the second switching unit 700. The clock generator 100, the microcontroller 200, the DA converter 300, the error amplifier 400, 710 < / RTI >

The transformer 800 induces the inductance at a predetermined winding amount (1 to 5 turns) to be lower through the method of applying the gap of the transformer core from the maximum primary magnetization inductance.

The secondary side of the transformer 800 is wound with a winding interval of 1 mm to 3 mm so as to generate a high voltage pulse wave at the secondary side (see FIG. 4) and a low voltage pulse at the secondary side through series resonance between the stray capacitance of the transformer 800 and the primary side magnetizing inductance To induce the pulse wave (see FIG. 5) to be generated with a phase difference of 180 degrees.

The high voltage pulse wave and low voltage pulse wave spa combined generation control apparatus 1000 can improve the voltage amplification rate in the driving frequency band (100 kHz to 4 MHz) by using the self resonance which is a parasitic component of the transformer 800, (See FIG. 4) or the low voltage high frequency (see FIG. 5) by continuously adjusting the magnetization inductance according to the intrinsic impedance matching of the magnetoresistive effect element 800.

A detailed description of the constituent elements of the high-voltage pulse wave spa- tus and low-voltage pulse-wave multi-pulse generation control apparatus 1000 according to the embodiment of the present invention and the operation realization thereof is as follows.

As shown in FIG. 2, the clock generator 100 includes a first clock wave on a required frequency band (i.e., 11 kHz to 500 kHz), a second clock wave having a phase difference of 180 degrees with the first clock wave, .

A direct digital synthesizer (DDS) can be used as an alternative to the clock generator 100 for generating the first and second clock waves.

The microcontroller 200 controls the clock generator 100 to convert the first clock wave into a first triangle wave and the second clock wave into a second triangle wave to have a phase difference of 180 degrees from the first triangle wave.

The microcontroller 200 sets the reference value for the specific frequency in advance on the internal memory which is not instrumentalized.

The microcontroller 200 applies the first control signal output from the A port to the first AND gate provided between the first comparator 500 and the first switch SW1 connected to a part of the primary side of the transformer 800, Off operation of the first switch SW1 in accordance with the logic operation and controls the ON / OFF operation of the first switch SW1 at the time when the high-voltage pulse pulse (see FIG. 4) continuously generated within the drive frequency at the time of the first switch- The first turn-on signal is converted to the first turn-on signal, and then the first turn-on signal is outputted to the secondary side of the transformer 800 (refer to FIG. 6)

The microcontroller 200 outputs a second control signal outputted from the port B to the second AND gate 710 provided between the second comparator 600 and another part of the primary side of the transformer 800 and the second switch SW2 connected in advance, OFF operation of the second switch SW2 in accordance with the AND logic operation and turns on the low voltage pulse pulse (see FIG. 5) continuously generated in the drive frequency at the time of the first switch-on (SW1 ON) The second turn-on signal is output to the secondary side of the transformer 800 (see FIG. 7)

In addition, the microcontroller 200 may use a pulse width modulation (PWM) method, a pulse frequency modulation (PFM) method, or a pulse phase modulation (PPM) And the first and second turn-on signals are selectively output by controlling the on / off states of the first and second switching units.

The DA converter 300 DA converts the digital voltage signal for a specific frequency into an analog voltage signal from the bus connected to the microcontroller 200.

The error amplifier 400 amplifies the analog voltage signal within an error range of the reference voltage.

As shown in FIG. 3, the first comparator 500 superimposes the analog voltage signal amplified by the error amplifier 400 and the first triangle wave to extract a high voltage driving signal.

The second comparator 500 extracts the low voltage driving signal by superimposing the analog voltage signal amplified by the error amplifier 400 and the second triangle wave.

When the first switch SW1 is turned on, the first switching unit 700 applies a high-voltage pulse wave having a high-voltage driving signal to the first clock wave so that the first turn-on signal (first rectangular wave) is output to the secondary side of the transformer 800 And is continuously generated within the driving frequency band (100 kHz to 4 MHz) (refer to FIG. 4)

When the second switch SW2 is turned on, the second switching unit 710 outputs a low voltage pulse wave having a low voltage driving signal to the second clock wave so that the second turn-on signal (second square wave) is outputted to the secondary side of the transformer 800 And continuously generated within the driving frequency band (refer to FIG. 5)

The first and second switching units perform at least one of PWM (Pulse Width Modulation), PFM (Pulse Frequency Modulation) and PPM (Pulse Phase Modulation) Frequency range or the phase width of the high-voltage pulse wave increases, and when the low-voltage pulse-wave is in the high-band state, the link voltage is lowered to decrease the amplitude, frequency width, or phase width of the low- .

The first and second switching units control the link voltage using the self resonance of the transformer 800 induced to turn on the first and second switches SW1 and SW2 so that the first and second switches SW1 and SW2 are turned on by the frequency rise increase included in the intrinsic impedance component of the transformer 800 Thereby preventing the drop of the analog voltage signal due to the voltage drop.

In other words, the first and second switching units switch the high-voltage pulses (see FIG. 4) and the low-voltage pulse pulses (see FIG. 4) according to the ON / OFF operation of the first and second control signals output from the A port and the B port of the microcontroller 200 5>, and when the output route is set, the secondary side of the transformer 800 whose intrinsic impedance is matched with the core gap and the magnetization inductance of the primary side, the secondary side winding ratio, or the winding amount of the transformer 800 Voltage pulse wave and the low-voltage pulse wave through the first and second comparators 500 and 600 so that the first and second turn-on signals (see FIG. 8) are outputted.

FIG. 9 is a flowchart showing a method of driving a high voltage pulse wave spaction control apparatus and a low voltage pulse wave spa complex generation control apparatus according to an embodiment of the present invention.

Referring to FIG. 9, the driving method of the high-voltage pulse wave spaction and low-voltage pulse-wave multipage generation control apparatus includes a self-resonance component which is a parasitic component of a transformer having a primary winding amount (1 to 5 turns) and a secondary winding amount (50 to 80 turns) (100khz to 4MHz) using self resonance, and the voltage amplification rate through resonance phenomenon is improved, and the high voltage pulse wave and the low voltage pulse wave are generated at the secondary side of the transformer.

First, the clock generator generates a first clock wave on the required frequency band and a second clock wave having a phase difference of 180 degrees with the first clock wave (S100).

The microcontroller controls the clock generator to convert the first clock wave into a first triangle wave and converts the second clock wave into a second triangle wave to have a phase difference of 180 degrees with the first triangle wave (S110).

The DA converter DA converts the digital voltage signal for a specific frequency into an analog voltage signal from the microcontroller and the bus connected thereto (S120).

The error amplifier amplifies the analog voltage signal within an error range of the reference voltage (S130).

The first comparator superimposes the analog voltage signal amplified by the error amplifier and the first triangular wave to extract a high voltage driving signal (S140).

The second comparator superimposes the analog voltage signal amplified by the error amplifier and the second triangle wave to extract the low voltage driving signal (S150).

When the first switch is turned on, the first switching unit continuously generates a high-voltage pulse wave in which the high-voltage drive signal is placed on the first clock wave so that the first turn-on signal (first rectangular wave) is output to the secondary side of the transformer S160).

When the second switch is turned on, the second switching unit continuously generates the low-voltage pulse wave in the driving frequency band in which the low-voltage driving signal is placed in the second clock wave so that the second turn-on signal (second square wave) is output to the secondary side of the transformer S170).

The microcontroller uses high-voltage pulsed spark or low-voltage pulse-width modulation (PWM), pulse width modulation (PWM), pulse frequency modulation (PFM) or pulse phase modulation The effective value of the span is measured and the first and second turn-on signals are selectively output (S180, S190).

The driving method of the high voltage pulse wave spa and the low voltage pulse wave spa combined generation control apparatus according to the embodiment of the present invention is easy to carry out the additional operation as described below.

That is, the microcontroller performs at least one of PWM (Pulse Width Modulation), PFM (Pulse Frequency Modulation), and Pulse Phase Modulation (PPM).

The microcontroller increases the amplitude, frequency width or phase width of the high-voltage pulse wave by leveling up the link voltage when the high-voltage pulse-wave is in a low-band of the driving frequency band. When the low- Thereby reducing the amplitude, frequency width or phase width of the spa.

The microcontroller applies a first control signal to the first AND gate provided between the first comparator and a first switching unit connected to the first switching unit connected to the first comparator and the transformer to turn on and off the first switch and the first turn- .

The microcontroller applies a second control signal to the second AND gate provided between the second comparator and another part of the primary side of the transformer and the second switching unit connected to the first comparator to turn on and off the second switch according to the AND logical operation, And controls the output of the signal.

The first and second switching units switch the link voltage using the self resonance of the transformers induced to the first and second switch-ons, thereby preventing the drop of the analog voltage signal due to the frequency rise increase contained in the intrinsic impedance component of the transformer .

It will be apparent to those skilled in the art that various modifications and variations can be made in the present invention without departing from the spirit or scope of the present invention as defined by the following claims. It can be understood that it is possible.

1000: High-voltage pulse-wave generation control device
100: clock generator 200: microcontroller
300: DA converter 400: error amplifier
500, 600: first and second comparators 700, 710: first and second switching units
800: Transformer

Claims (12)

A clock generator for generating a first clock wave on the required frequency band and a second clock wave having a phase difference of 180 degrees with the first clock wave;
A microcontroller controlling the clock generator to convert the first clock wave into a first triangle wave and the second clock wave into a second triangle wave to have a phase difference of 180 degrees with the first triangle wave;
A DA converter for DA converting a digital voltage signal for a specific frequency into an analog voltage signal from a bus connected to the microcontroller;
An error amplifier for amplifying the analog voltage signal within an error range of a reference voltage;
A first comparator for superimposing the analog voltage signal amplified by the error amplifier and the first triangle wave to extract a high voltage drive signal;
A second comparator for superimposing the analog voltage signal amplified by the error amplifier and the second triangle wave to extract a low voltage driving signal;
When the first switch is turned on, the high-voltage pulse wave generated as the high-voltage drive signal is loaded on the first clock wave is continuously generated in the drive frequency band so that the first turn-on signal (first rectangular wave) A first switching unit for outputting the output signal; And
Voltage pulse wave generated as the low-voltage driving signal is loaded on the second clock wave continuously in the driving frequency band, and a second turn-on signal (second rectangular wave) is generated in the second frequency of the transformer And a second switching unit for outputting the output signal to the car side,
The microcontroller is configured to perform the first and second switch-on pulse width modulation (PWM), pulse frequency modulation (PFM), or pulse phase modulation (PPM) Wherein the first and second turn-on signals are selectively output by measuring an effective value of a low-voltage pulse-wave spark or a low-voltage pulse-wave spark.
The microcontroller according to claim 1,
Wherein at least one of the pulse width modulation (PWM), the pulse frequency modulation (PFM), and the pulse phase modulation (PPM) Frequency band or phase width of the high-voltage pulse-wave spark is increased by controlling the link voltage to increase, and when the low-voltage pulse-wave spark is in a high band, the link voltage is lowered to increase the amplitude, frequency width or phase width of the low- Voltage pulsewave and low-voltage pulse-wave complex-generation control device.
The apparatus as claimed in claim 1, wherein the first and second switching units comprise:
And the link voltage is controlled using the self resonance of the transformer induced to the first and second switch-ons, thereby preventing the drop of the analog voltage signal due to an increase in the frequency contained in the intrinsic impedance component of the transformer Voltage pulse wave spark and low-voltage pulse-wave multi-pulse generation control device.
The method according to claim 1,
Wherein a direct digital synthesizer (DDS) can be used as a substitute for the clock generator instead of the clock generator.
The method according to claim 1,
The required frequency band is 11 kHz to 500 kHz,
The driving frequency band is 100 kHz to 4 MHz,
Wherein the microcontroller sets a reference value for the specific frequency in advance in an internal memory having a mechanism ratio.
The microcontroller according to claim 1,
A first comparator, a first switch connected between a first portion of the transformer and a first switching unit, and a first switch connected between the first switch and the first switch, the first switch being turned on and off according to an AND logic operation, Voltage pulse wave sparger and the low-voltage pulse-wave combine generation control device.
7. The microcontroller according to claim 6,
And a second control signal is applied to the second AND gate provided between the second comparator and another part of the primary side of the transformer and the second switching unit connected to the second comparator to turn on and off the second switch, And the output of the turn-on signal is controlled.
Generating a second clock wave having a first clock wave and a first clock wave and a phase difference of 180 degrees on the required frequency band;
The microcontroller controlling the clock generator to convert the first clock wave into a first triangle wave and the second clock wave into a second triangle wave so that the first clock wave has a phase difference of 180 degrees with the first triangle wave;
DA converter converts a digital voltage signal for a specific frequency into an analog voltage signal from a bus connected to the microcontroller;
Amplifying the analog voltage signal within an error range of the reference voltage by an error amplifier;
Extracting a high voltage driving signal by superposing the analog voltage signal amplified by the error amplifier with the first triangle wave by a first comparator;
Extracting a low voltage driving signal by superposing the analog voltage signal amplified by the error amplifier with the second triangle wave by a second comparator;
Voltage pulse wave in which the high-voltage driving signal is placed in the first clock wave continuously in the driving frequency band when the first switching unit is turned on, so that the first turn-on signal (first rectangular wave) is output to the secondary side of the transformer ;
Voltage pulse wave in which the low-voltage driving signal is placed in the second clock wave continuously in the driving frequency band when the second switching unit is turned on and the second turn-on signal (second square wave) is generated in the secondary side of the transformer ; And
The microcontroller is connected to the high voltage pulsed spark plug using the first and second switch on pulse width modulation (PWM), pulse frequency modulation (PFM), or pulse phase modulation (PPM) Voltage pulsed spark gauging circuit and the low-voltage pulsed spark gauge to selectively output the first and second turn-on signals.
9. The microcontroller of claim 8,
Performing at least one of pulse width modulation (PWM), pulse frequency modulation (PFM), and pulse phase modulation (PPM);
Increasing the amplitude, frequency width, or phase width of the high-voltage pulse wave by leveling up the link voltage when the high-voltage pulse wave is in a low band of the driving frequency band; And
Voltage pulsed spark generation control device further comprises a step of lowering the link voltage level to reduce the amplitude, frequency width or phase width of the low-voltage pulse wave spark when the low-voltage pulse spark is in a high- Driving method.
9. The apparatus according to claim 8, wherein the first and second switching units
The step of switching the link voltage by using the self resonance of the transformer induced to the first and second switch-ons so as to prevent the drop of the analog voltage signal due to the frequency rise increase included in the intrinsic impedance component of the transformer Voltage pulse wave sparger and the low-voltage pulse-wave combine generation control apparatus.
9. The microcontroller of claim 8,
A first comparator, a first switch connected between a first portion of the transformer and a first switching unit, and a first switch connected between the first switch and the first switch, the first switch being turned on and off according to an AND logic operation, And controlling the output of the signal to the high voltage pulse wave sputtering apparatus.
12. The microcontroller of claim 11,
And a second control signal is applied to the second AND gate provided between the second comparator and another part of the primary side of the transformer and the second switching unit connected to the second comparator to turn on and off the second switch, And controlling the output of the turn-on signal. The method of claim 1, further comprising:

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