KR101406834B1 - Tdbi facility capable of controlling skew and method thereof - Google Patents

Abstract

A burn-in test apparatus according to embodiments of the present invention includes a skew value table for storing skew values to be adjusted with respect to test patterns, a test pattern to be input to the DUT according to the progress of the test, A pattern generator for specifying a timing set of test patterns by referring to the skew value table and generating a test vector based on the specified test pattern and the timing set, an event memory for storing the test vector, An address generator for generating an arbitrary address in accordance with the timing signal and the test pattern, a data generator for generating input data to be stored at an arbitrary address in accordance with the timing signal and the test pattern, A driver that applies input data to the DUT on the basis of It can hamhal.

Description

TECHNICAL FIELD [0001] The present invention relates to a burn-in test apparatus and a control method thereof,

The present invention relates to a burn-in test, and more particularly, to a burn-in test device capable of adjusting skew.

A burn-in test belonging to a post-process in a semiconductor manufacturing process is a test capable of accelerating a defect by operating a semiconductor device under test (DUT) at a temperature higher than the actual operating temperature, and detecting most of the initial defects.

A test during burn-in (TDBI) device is a device that enables functional testing during burn-in testing. In order to test various types of semiconductor devices with a single TDBI device, it is necessary to generate timing and test patterns that vary depending on the semiconductor devices and apply them to the semiconductor devices to be tested.

Compared to expensive automatic test equipment (ATE) for professionally in-depth testing of a given DUT at a practical rate for a particular category of DUTs, a relatively inexpensive and general-purpose TDBI device is capable of providing various types of DUTs , And has a structure for carrying out various functional tests to discriminate defective products at a low speed.

However, in TDBI devices, the demand for testing at a high speed closer to the practical speed of the DUT is gradually increasing. As a result, the skew problem of the test pattern signal, which has not been relatively emphasized at low speed, has come to be solved.

SUMMARY OF THE INVENTION It is an object of the present invention to provide a burn-in test apparatus and method capable of adjusting skew.

A burn-in test apparatus according to an aspect of the present invention includes:

A skew value table storing skew values to be adjusted with respect to the test patterns;

A test pattern to be input to the semiconductor device under test (DUT) is specified according to the progress of the test, a timing set of the test patterns is specified with reference to the skew value table, and based on the specified test pattern and the timing set A pattern generator for generating a test vector;

An event memory for storing the test vector;

A timing generator for generating a timing signal according to the specified timing set;

An address generator for generating an arbitrary address according to the timing signal and the test pattern;

A data generator for generating input data to be stored in the arbitrary address according to the timing signal and the test pattern; And

And a driver for applying the input data to the DUT based on the timing signal and the generated address.

According to an embodiment, the pattern generator may include:

And apply skew values read from the skew value table to the original timing set information with respect to the test pattern to specify the timing set for the test pattern.

According to one embodiment, the burn-

A measurement unit for measuring a waveform characteristic of signals applied to the DUT by the driver; And

And a skew adjusting unit that determines a skew value to be adjusted with respect to a specific signal based on the measured waveform characteristics.

According to another aspect of the present invention,

A test pattern to be input to the semiconductor device under test (DUT) is specified according to the progress of the test, skew values corresponding to the test patterns are referred to from a skew value table storing skew values to be adjusted with respect to the test patterns An algorithm pattern generation board for specifying a timing set of the test patterns, generating a test vector based on the specified test pattern and the timing set, and generating and outputting a timing signal, an address, and input data according to the test vector;

A DUT tray for electrically and mechanically fixing the DUTs; And

And a connection for transferring the output timing signal, address, and input data to the DUT tray.

According to another aspect of the present invention, there is provided a skew adjusting method of a burn-

Storing in a skew value table skew values that need adjustment with respect to test patterns to be applied to a semiconductor device under test (DUT);

Determining a timing set for the test pattern by setting a skew timing set adjusted by applying a skew value referenced in the skew value table to an original timing set with respect to the test pattern;

Generating and storing a test vector based on the test pattern and the specified timing set; And

Generating a timing signal, address and input data according to the test vector, and applying the generated timing signal, address, and input data to the DUT.

According to one embodiment, the skew adjustment method of the burn-

Determining a skew value to be adjusted according to the skew measurement value measured in the detected waveform with respect to the generated timing signal, address, and input data, and storing the skew value in the skew value table.

According to the burn-in test apparatus and method of the present invention, it is possible to implement a function of adjusting the skew of a test pattern signal in a low-cost FPGA without employing an expensive and precise analogue deskew circuit.

Further, according to the burn-in test apparatus and method of the present invention, the operator can specify the skew value during the test without modifying the test program, or perform on-the-fly according to the skew adjustment value determined from the measured signal waveform. You can adjust the skew value.

1 is a block diagram schematically illustrating a burn-in test apparatus according to an embodiment of the present invention.
2 is a waveform diagram illustrating signals generated at different timings according to a skew value adjusted in a burn-in test apparatus according to an embodiment of the present invention.
3 is a flowchart illustrating a skew adjustment method of a burn-in test apparatus according to an embodiment of the present invention.

For the embodiments of the invention disclosed herein, specific structural and functional descriptions are set forth for the purpose of describing an embodiment of the invention only, and it is to be understood that the embodiments of the invention may be practiced in various forms, The present invention should not be construed as limited to the embodiments described in Figs.

Hereinafter, preferred embodiments of the present invention will be described in detail with reference to the accompanying drawings. The same reference numerals are used for the same constituent elements in the drawings and redundant explanations for the same constituent elements are omitted.

The names and bit numbers of data or information appearing in the embodiments of the present invention are all exemplary.

1 is a block diagram schematically illustrating a burn-in test apparatus according to an embodiment of the present invention.

Referring to FIG. 1, the burn-in test apparatus 10 roughly comprises an ALPG board 11 and a connection unit 13, a DUT tray 15, and an operator computer 17.

The ALPG board 11 includes a pattern generating unit 111, a skew value table 112, an event memory 113, a timing generating unit 114, an address generating unit 115, a data generating unit 116, a driver 117 A measuring unit 118, a judging unit 119, and a skew adjusting unit 121. [0034]

The pattern generator 111 specifies a test pattern for the DUT 16 with the start of the test, specifies a skew timing set of the test patterns by referring to the skew value table 112, The test vector may be stored in the event memory 113 and the test pattern may be output to the address generator 115 and the data generator 116 according to the progress of the test.

Specifically, the pattern generator 111 can determine a skew timing set by applying a skew value read from the skew value table 112 to the original timing set information with respect to a specific test pattern.

The test pattern is a predetermined digital command or data to be input to the DUT 16 for the test and a predetermined expected output data. The test vector specifies the test pattern and timing set for a given cycle for the test that is currently being performed.

The timing set can be described as follows. If we divide the test cycle by a predetermined time interval and simplify that the waveform can only rise or fall at such a split time, any digital waveform can be defined by specifying the position of that point, or edge. The timing set defines the position of the edge where the waveform will rise and the position where the edge will fall for each test pattern. You can easily shape the desired waveform in a specific test event. For example, if you have 2048 edge positions specified in one test cycle, and you set the waveform to rise at a certain edge and fall at another specific edge, up to 1024 waveforms can be generated. For example, if you repeatedly go up and down on each successive edge, a waveform that can be used as a clock signal will be generated.

The skew timing set is a newly generated timing set by appropriately moving the position information of the rising edge and the falling edge of the waveform back and forth in accordance with the skew value so as to reduce the influence of the skew in the original timing set.

The skew value table 112 includes test patterns and timing signals (clock, scan, sync, strobe, tri-cross) to adjust the skew generated in the DUT 16 by a process, state, and so on).

For example, the skew value table 112 may store skew values of any one of the 16 skew values with respect to each of the signals whose timing is to be specified. For example, a skew value of +5 ns for a scan signal may be stored as a skew value of 0x7, and a skew value of +20 ns for a strobe signal may be stored as a skew value of 0x4.

2 is a waveform diagram illustrating signals generated at different timings according to a skew value adjusted in a burn-in test apparatus according to an embodiment of the present invention.

Referring to Figure 2, for some exemplary signals, if a waveform having a rising edge at 40 ns and a falling edge at 55 ns is stored in the event memory 113, the corresponding waveform The skew of the corresponding waveform is adjusted in accordance with the skew value set with respect to the waveform.

In the example of FIG. 2, the skew is adjusted in 16 steps back and forth to the 8 edges, respectively, with respect to the original edge, and the skew value can be stored in the skew value table 112 in 1 byte of hexadecimal from 0x0 to 0xF.

In this case, the top waveform is a case where the skew value is set to a hex code of 0x8, the skew to be adjusted is 0 ns, and the original edge information stored in the event memory 113 is unchanged.

The next waveform is set to a hex code of skew value 0x7, where the skew to be adjusted is -5 ns, reflecting -5 ns each for the original edge information to have a rising edge at 35 ns and a falling edge at 50 ns .

The next waveform is for a skew value of 0x6 hexadecimal. The skew to be adjusted is -10 ns, with -10 ns for each of the original edge information, with a rising edge at 30 ns and a falling edge at 45 ns Lt; / RTI >

The next waveform is when the skew value is set to a hexadecimal value of 0x9, the skew to be adjusted is +5 ns, reflected by +5 ns each for the original edge information, and has a rising edge at 45 ns and a falling edge at 60 ns Lt; / RTI >

The last waveform is set to a hexa code with a skew value of 0xA. The skew to be adjusted is +10 ns, with +10 ns for each of the original edge information, with a rising edge at 50 ns and a falling edge at 65 ns .

Returning to Figure 1, this skew value table 112 may store the skew values entered by the operator through the operator computer 17. [ The skew adjusting unit 121 may actively determine the skew measurement value to be adjusted by the measuring unit 118 according to the measurement result of the waveform of various signals applied to the DUT 16, May be stored in the skew value table 112 as shown in FIG.

The event memory 113 stores the test vector generated by the pattern generation unit 111. [

The timing generator 114 generates timing signals based on the skew-adjusted timing set information and timing signals including the clock signals for the DUT 16 and other control signals in accordance with a test vector stored in the event memory 113 Can be generated.

The address generating unit 115 and the data generating unit 116 are connected to an arbitrary memory space in the actual DUT 16 in accordance with the test pattern instructed by the pattern generating unit 111 and the timing signal of the timing generating unit 114 It is possible to generate the address information necessary for applying and the input data to be stored in the address at a predetermined timing.

The driver 117 drives a signal of a desired waveform to the DUT 16 by driving voltages and currents in accordance with the electrical characteristics of the DUT 16 in a state where both the timing, address, and data are determined and ready to be applied to the DUT 16. [ . For example, depending on the DUT, the operating voltage or current may be different and the signaling scheme may be quite different, such as differential signal or single-ended signal, NRZ (none return to zero), or RZ And the state of the transmission line may be terminated or high impedance while data is not being transmitted. The driver 117 can form an appropriate signal waveform and determine the transmission line state according to the electrical specifications of this DUT 16. [

The address, input data, and timing signal driven by the driver 117 are applied to the DUT tray 15 via the connection 13 and finally applied to the DUT 16. [ The driver 117, the connection unit 13, and the DUT tray 15 may be separately configured for each channel.

The connection unit 13 includes a connection connector, a cable, a Hi-Fix board, and the like, and can ensure reliable exchange of electrical signals between the ALPG board 11 and the DUT tray 15.

The DUT tray 15 is fabricated to mechanically secure a plurality of DUTs 16 and to apply appropriate power and signals to the respective DUTs 16 for testing.

The measurement unit 118 can read out the result of operation in accordance with the address to which the DUT 16 is applied, the input data, and the timing signal. For example, if the DUT 16 is a semiconductor device belonging to a kind of memory, the measuring unit 118 can read the data stored in the addresses accessed by the test pattern.

The judging unit 119 judges whether the circuit element corresponding to the specific address in the DUT 16 is defective by comparing the data read from the DUT 16 by the measuring unit 118 with the desired result data in the test pattern .

On the other hand, the measuring unit 118 can also detect the address applied to the DUT 16 and the waveform of the input data and the timing signals. For example, if it is detected that the strobe signal is applied later than the other signals The skew adjusting unit 121 adjusts the skew value of the strobe signal according to the detection result and stores the skew value in the skew value table 112 so that the timing of the strobe signal coincides with the timing of the other signals.

The operator computer 17 may program the programmable processors to modify the test program or implement various components within the ALPG board 11 depending on the type of the DUT and may in particular determine the skew values in the skew value table 112 .

3 is a flowchart illustrating a skew adjustment method of a burn-in test apparatus according to an embodiment of the present invention.

Referring to FIG. 3, in step S31, the burn-in test apparatus 10 stores, in the skew value table 112, skew values necessary to be adjusted with respect to a specific test pattern to be applied to the DUT 16. [

In step S32, the skew timing set adjusted by applying the skew value referenced in the skew value table 112 to the original timing set with respect to the specific test pattern is determined as the timing set for the test pattern.

In step S33, a test vector is generated and stored based on the test pattern and the timing set.

In step S34, a timing signal, address, and input data are generated in accordance with the test vector and applied to the DUT.

In an optional step S35, a skew value is determined according to the skew measurement measured in the detected waveform with respect to the generated timing signal, address, and input data, and stored in the skew value table 112. [

While the present invention has been particularly shown and described with reference to exemplary embodiments thereof, it is to be understood that the invention is not limited to the disclosed exemplary embodiments, but, on the contrary, Modification is possible. Accordingly, the spirit of the present invention should be understood only in accordance with the following claims, and all of the equivalent or equivalent variations will fall within the scope of the present invention.

Test device with 10 times 11 ALPG board
111 pattern generating unit 112 skew value table
113 event memory 114 timing generator
115 address generator 116 data generator
117 Driver 118 Measuring section
119 judgment section 121 skew control section
13 Connection 15 DUT tray
16 DUT 17 Operator Computer

Claims (6)

A skew value table storing skew values to be adjusted with respect to the test patterns;
A test pattern to be inputted to the semiconductor device under test (DUT) is specified according to the progress of the test, a skew value read from the skew value table is applied to the original timing set information with respect to the test pattern, A pattern generator for generating a test vector based on the specified test pattern and the timing set;
An event memory for storing the test vector;
A timing generator for generating a timing signal according to the specified timing set;
An address generator for generating an arbitrary address according to the timing signal and the test pattern;
A data generator for generating input data to be stored in the arbitrary address according to the timing signal and the test pattern; And
And a driver for applying the input data to the DUT based on the timing signal and the generated address. delete The apparatus of claim 1, further comprising: a measurement unit for measuring a waveform characteristic of signals applied to the DUT by the driver; And
And a skew adjusting unit for determining a skew value to be adjusted with respect to a specific signal based on the measured waveform characteristics. A test pattern to be input to the semiconductor device under test (DUT) is specified according to the progress of the test, skew values corresponding to the test patterns are referred to from a skew value table storing skew values to be adjusted with respect to the test patterns An algorithm pattern generation board for specifying a timing set of the test patterns, generating a test vector based on the specified test pattern and the timing set, and generating and outputting a timing signal, an address, and input data according to the test vector;
A DUT tray for electrically and mechanically fixing the DUTs; And
And a connection for transmitting the output timing signal, address, and input data to the DUT tray. Storing in a skew value table skew values that need adjustment with respect to test patterns to be applied to a semiconductor device under test (DUT);
Determining a timing set for the test pattern by setting a skew timing set adjusted by applying a skew value referenced in the skew value table to an original timing set with respect to the test pattern;
Generating and storing a test vector based on the test pattern and the specified timing set; And
Generating a timing signal, an address, and input data according to the test vector, and applying the generated timing signal, address, and input data to the DUT. The method of claim 5,
Determining a skew value to be adjusted according to the skew measurement value measured in the detected waveform with respect to the generated timing signal, address, and input data, and storing the skew value in the skew value table. How to adjust skew.

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