KR101388144B1 - Metal foam-graphite heat radiation sheet and method the same - Google Patents

Metal foam-graphite heat radiation sheet and method the same Download PDF

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KR101388144B1
KR101388144B1 KR1020120091575A KR20120091575A KR101388144B1 KR 101388144 B1 KR101388144 B1 KR 101388144B1 KR 1020120091575 A KR1020120091575 A KR 1020120091575A KR 20120091575 A KR20120091575 A KR 20120091575A KR 101388144 B1 KR101388144 B1 KR 101388144B1
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South Korea
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metal foam
pores
graphite particles
heat
heat dissipation
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KR1020120091575A
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Korean (ko)
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KR20140025668A (en
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양우석
김형근
김희진
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전자부품연구원
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Abstract

Disclosed are a metal foam-graphite heat dissipation sheet and a manufacturing method. Metal foam-graphite heat dissipation sheet according to an embodiment of the present invention is a porous metal foam having a plurality of pores; And a plurality of graphite particles inserted into at least some of the plurality of pores.

Description

Metal foam-graphite heat dissipation sheet and manufacturing method {METAL FOAM-GRAPHITE HEAT RADIATION SHEET AND METHOD THE SAME}

The present invention relates to a heat dissipation sheet and a manufacturing method, and more particularly to a metal foam-graphite heat dissipation sheet and a manufacturing method.

Development such as large capacity and high integration of various electronic device parts (semiconductor package, LED module, etc.) due to high performance and high performance have caused a great deal of heat generation problem, and thus have a great influence on the deterioration of product performance and quality. Therefore, a heat dissipating device for efficiently removing heat generated from these parts is indispensable in order to prevent deterioration in performance and quality of products.

Conventionally, in the case of generating heat from a conventional electronic component, a heat sink having a fin formed on a metal plate having good thermal conductivity, such as copper or aluminum, is often used to dissipate heat to the outside, A method of manufacturing a heat dissipation material by using a porous metal foam having a high thermal conductivity is disclosed.

However, in the case of the above-described porous metal foam, there is an advantage that the heat radiation effect is improved by widening the air contact surface compared to the conventional fin type heat sink. However, the porous metal foam has some weakness in terms of strength, It is still not sufficient to cope with an increase in the calorific value accompanied with the increase in the amount of heat generated by the porous metal foams. Therefore, attempts have been made to improve the heat radiation effect of the porous metal foams.

Embodiments of the present invention provide a metal foam-graphite heat dissipation sheet having improved strength and heat dissipation characteristics and a method of manufacturing the same.

According to one aspect of the invention, the porous metal foam having a plurality of pores; And a plurality of graphite particles inserted into at least part of the plurality of pores.

In addition, it may further include graphene (graphene) formed on the surface of the metal foam.

At this time, the metal foam may be formed of at least one material selected from copper, nickel, silver, platinum, iron, stainless steel, and titanium, or an alloy thereof.

In addition, the graphite particles may be expanded by heat as expandable graphite particles and may be in close contact with the pores.

According to another aspect of the invention, the first step of forming a graphene on the surface of the porous metal foam having a plurality of pores; And inserting expandable graphite particles into at least a portion of the plurality of pores, thereby providing a metal foam-graphite heat dissipating sheet manufacturing method.

In addition, after the step 2, the graphite particles may further comprise the step of pressing the metal foam inserted into the pores.

Further, after the second step, the graphite particles may further include heat-treating the metal foam inserted in the pores.

At this time, the metal foam may be formed of at least one material selected from copper, nickel, silver, platinum, iron, stainless steel, and titanium, or an alloy thereof.

Embodiments of the present invention can improve the strength and heat dissipation properties of the heat-radiating sheet by inserting the graphite particles into the pores of the metal foam.

Further, by forming the graphene on the surface of the metal foam, the strength and heat dissipation characteristics of the heat radiation sheet can be further improved.

In addition, by expanding the graphite particles into the pores of the metal foam, expanding the graphite particles through a pressing process and a heat treatment process, and bringing the graphite particles into close contact with the pores, the high thermal conductivity of the graphite can be effectively utilized.

1 is a view schematically showing a metal foam-graphite heat dissipation sheet according to an embodiment of the present invention.
2 and 3 is a process diagram schematically showing a metal foam-graphite heat dissipation sheet manufacturing method according to an embodiment of the present invention.
4 is a diagram schematically illustrating various methods of inserting graphite particles into pores.
5 and 6 schematically illustrate the post-treatment process after graphite particles are inserted.

Hereinafter, embodiments of the present invention will be described in detail with reference to the accompanying drawings.

1 is a view schematically showing a metal foam-graphite heat dissipation sheet 100 (hereinafter referred to as a heat dissipation sheet) according to an embodiment of the present invention.

Referring to FIG. 1, the heat dissipation sheet 100 includes a porous metal foam 110 having a plurality of pores 110a, and a plurality of graphite particles 130 inserted into at least a portion of the pores 110a. .

The porous metal foam 110 is made of a metal, and refers to a porous substrate having numerous bubbles therein. Examples of the metal include, but are not limited to, at least one material selected from copper, nickel, silver, platinum, iron, stainless steel, and titanium, or an alloy thereof.

The pores 110a formed in the metal foam 110 may be classified into an open cell type and a closed cell type depending on whether the pores 110a are closed or open. Particularly, in the case of electrons, the pores 110a in the metal foam 110 are connected to each other, and thus gas or fluid can pass easily. In the embodiments of the present invention, the metal foam 110 is a concept including both the open-type and the closed-type types.

The size of the metal foam 110 is not limited, and the shape is not limited to a specific shape. 1, the shape of the metal foil 110 is shown in a sheet form. It is possible to use such a metal foam 110 that has been commercialized.

On the other hand, the size of the pores 110a is not limited, and may have a size of, for example, 400 탆 to 600 탆. In addition, the size of the pores 110a formed in the metal foam 110 may not be uniform, and pores 110a having various sizes may be formed.

The graphite particles 130 are inserted into the pores 110a. At this time, the graphite particles 130 are inserted into all of the pores 110a present in the metal foam 110 as well as among the pores 110a. It also includes a case where it is inserted at least in part.

Graphite particles 130 may be expandable graphite particles. The expandable graphite particles are formed by compressing the graphite powder after chemically treating it, and the expandable graphite particles can be expanded by heat. It is possible to use such expandable graphite particles that have been commercialized.

When the graphite particles 130 are expandable graphite particles, after the graphite particles 130 are inserted into the pores 110a of the metal foam 110, the graphite particles 130 are expanded to expand the graphite particles 130 through heat treatment. The graphite particles 130 may be placed in close contact with the pores 110a.

The graphite particles 130 are known to have a thermal conductivity of at least two times higher than those of copper and aluminum, and are also relatively lighter than metals, so that the graphite particles 130 have a heat dissipation sheet 100 when the graphite particles 130 are inserted into the metal foam 110. In addition to achieving a reduction in weight, heat dissipation characteristics are also improved.

The size of the graphite particles 130 may be a size that can be inserted into the pores (110a) of the metal foam 110, it is not limited to a specific size. For example, it is possible to process the commercialized graphite particles in accordance with the metal foam pore size to be inserted by ball milling, compression molding, heat treatment, or the like.

On the other hand, the method of inserting the graphite particles 130 into the pores (110a) of the metal foam 110 may be various, this will be supplemented in the description for the manufacturing method of the heat radiation sheet 100 will be described. .

Meanwhile, the heat dissipation sheet 100 may further include graphene 120 formed on the surface of the metal foam 110. The graphene 120 may be grown by chemical vapor deposition (CVD) on the surface of the metal foam 110 made of metal, which will be described later by supplementing the manufacturing method of the heat dissipation sheet 100. Shall be. In addition, in the present specification, "surface" of the metal foam 110 is used to mean that each surface of the metal foam 110 and the inner surface of the pores 110a of the metal foam 110 are used.

Graphene 120 not only has a stronger strength than steel, but is known as a material having a higher thermal conductivity than diamond boasting the highest thermal conductivity. Therefore, when the graphene 120 is formed on the surface of the metal foam 110, the strength and heat dissipation characteristics of the heat dissipation sheet 100 may be greatly improved.

The metal foam-graphite heat dissipation sheet 100 described above may be utilized as a heat dissipation material in various electronic devices (for example, semiconductor packages, LED modules, and insulated gate bi-polar transitor (IGBT) modules). It is possible to be used to replace the heat sink (heat radiating sheet) used in.

Hereinafter, a metal foam-graphite heat dissipation sheet manufacturing method according to an embodiment of the present invention will be described.

2 and 3 is a process diagram schematically showing a metal foam-graphite heat dissipation sheet manufacturing method (hereinafter, a method for manufacturing a heat dissipation sheet) according to an embodiment of the present invention.

Referring to FIG. 2, in the method of manufacturing a metal foam-graphite heat dissipating sheet, first, a porous metal foam 110 having a plurality of pores 110a is prepared (step 1), and at least some of the plurality of pores 110a are formed. Insert the expandable graphite particles 130 (step 2).

In this case, the graphene 120 may be formed on the surface of the metal foam 110 before the graphite particles 130 are inserted. In relation to FIG. 2, the graphene 120 shows the metal foam 110 formed on the surface thereof.

In general, graphene 120 can be grown by applying a carbon source and heat to a support comprising a metal catalyst (chemical vapor deposition, CVD). In embodiments of the present invention, the metal foam 110 may be used as the support. The carbon source is selected from the group consisting of carbon monoxide, carbon dioxide, methane, ethane, ethylene, ethanol, acetylene, propane, butane, butadiene, pentane, pentene, cyclopentadiene, hexane, cyclohexane, benzene, toluene and combinations thereof Can be used. For example, when the carbon source is heat-treated at a temperature of 300 ° C. to 2000 ° C. while being supplied in a gaseous phase, the carbon source may be cooled to bond the graphene 120 to the surface of the metal foam 110. You can grow.

Such chemical vapor deposition (CVD) types include high temperature chemical vapor deposition (RTCVD), inductively coupled plasma chemical vapor deposition (ICP-CVD), low pressure chemical vapor deposition (LPCVD), atmospheric pressure chemical vapor deposition (APCVD), metal organic Chemical Vapor Deposition (MOCVD) or Chemical Vapor Deposition (PECVD) and the like are known for each process, so detailed description thereof will be omitted.

In addition, before forming the graphene 120 on the surface of the metal foam 110 may further include a step of pre-processing the metal foam 110 through hydrogen gas (step 1 above).

Next, referring to FIG. 3, the expandable graphite particles 130 are inserted into at least a portion of the pores 110a of the metal foam 110. Since the metal foam 110 and the expandable graphite particles 130 have been described above, redundant description thereof will be omitted. Meanwhile, the method may further include processing the expandable graphite particles 130 in accordance with the size of the pores 110a before inserting the expandable graphite particles 130 into the pores 110a.

The method for inserting the expandable graphite particles 130 into the pores 110a of the metal foam 110 may be various, and in FIG. 4, various methods for inserting the graphite particles 130 into the pores 110a may be described. Shown schematically. Meanwhile, for convenience of description, the graphene 120 formed on the metal foam 110 is not shown in FIG. 4.

First, after putting the metal foam 110 in the water tank (10) containing the solution (s) containing the graphite particles, heat treatment to evaporate the solution (s) graphite particles in the pores (110a) of the metal foam 110 130 may be inserted (FIG. 4A).

Second, the metal particles 110 in the water tank (10) containing the solution (s) containing graphite particles (dipping, dipping), the graphite particles 130 in the pores (110a) of the metal foam 110 Can be inserted (FIG. 4B).

Third, after putting the metal foam 110 in the water tank 10 containing the solution (s) containing graphite particles, the solution (s) is aspirated into another container 12 by using an aspirator (13). By doing so, the graphite particles 130 may be inserted into the pores 110a of the metal foam 110. At this time, it is possible to arrange the filter paper 11 under the metal foam 110 (Fig. 4C).

Fourth, by spraying the solution (s) containing the graphite particles to the surface of the metal foam 110 using the spray gun 20 (spray process), the graphite particles 130 in the pores (110a) of the metal foam 110 ) Can be inserted (FIG. 4D).

The above enumerated methods are exemplified, and in addition, the method of inserting the expandable graphite particles 130 into the metal foam 110 may vary.

5 and 6 are diagrams schematically showing a post-treatment process after the graphite particles 130 are inserted.

5 and 6, in the method of manufacturing a heat dissipation sheet, pressing the metal foam 110 into which the graphite particles 130 are inserted into the pores 110a after the second step (hereinafter, pressing step) and metal The method may further include heat treating the foam 110 (hereinafter, referred to as a heat treatment step). It is noted that the pressing step and the heat treatment step are not time series steps. That is, it is possible to undergo the pressing step and the heat treatment step of the metal foam 110 into which the graphite particles 130 are inserted, and conversely, it is possible to undergo the heat treatment step and the pressing step.

The pressing step may be performed by arranging the metal foam 110 between the presses P as shown in FIG. 5, and pressing the upper and lower portions of the metal foam 110. The metal foam 110 can be made more dense through the pressing step. The pressing pressure and time are not specified, for example, the pressing step can be performed at a press pressure of 2000 rpm for 1 minute.

The heat treatment step may be performed by heat-treating the metal foam 110 as shown in FIG. Through the heat treatment step, the expandable graphite particles 130 inserted into the metal foam 110 may be expanded and placed in close contact with the pores 110a. The heat treatment may be performed through a microwave oven or the like, and the heat treatment temperature is not limited to a specific temperature and may be performed at a temperature of, for example, 900 to 1000 ° C.

After the post-treatment step of the pressing step and the heat treatment step, the graphite particles can be expanded and adhered to the inside of the pores. Thus, the high thermal conductivity of the graphite can be effectively utilized, and the metal foam- A heat-radiating sheet can be manufactured.

Hereinafter, a test example of the present invention will be described. However, it is apparent that the following test examples do not limit the present invention.

Test Example

The thermal diffusivity and thermal conductivity of the copper metal foams (Comparative Example 1), copper metal foams formed with graphene (Comparative Example 2), and copper metal foams (examples) in which graphite particles were inserted and graphenes were formed were measured .

The specific heat (Cp) was measured using differential scanning calorimetry (DSC) equipment, and the thermal diffusivity and thermal conductivity were measured using LFA (laser flash analysis) equipment. The measurement results are summarized in Table 1 below.

Thickness (mm) Weight (mg) Thermal Diffusion Coefficient (mm 2 / s) Specific heat (C p , J / g · k) Density (g / cm 3) Thermal conductivity (W / m · k) Comparative Example 1
(Cu foam) 0.7 39 30 0.388 0.85 9.89 Comparative Example 2
(graphene / Cu foam) 0.76 40 39 0.392 0.85 12.99 Example
(graphite / graphene / Cu foam) One 37 111 0.704 0.85 66.42

Referring to Table 1, it can be seen that the thermal diffusivity and thermal conductivity of the heat-radiating sheet according to the embodiments are very large as compared with those of Comparative Examples 1 and 2. As a result, Is greatly improved.

As described above, the embodiments of the present invention can enhance the strength and heat radiation characteristics of the heat-radiating sheet by inserting the graphite particles into the pores of the metal foam. Further, by forming the graphene on the surface of the metal foam, the strength and heat dissipation characteristics of the heat radiation sheet can be further improved.

While the present invention has been particularly shown and described with reference to exemplary embodiments thereof, many modifications and changes may be made by those skilled in the art without departing from the spirit and scope of the invention as defined in the appended claims. The present invention can be variously modified and changed by those skilled in the art, and it is also within the scope of the present invention.

10: water tank 11: filter paper
12: another vessel 13:
20: spray gun s: graphite particle-containing solution
100: Metal foam-graphite heat-radiating sheet
110: Metal Foam 110a: Porosity
120: graphene 130: graphite particles

Claims (8)

Porous metal foam having a plurality of pores;
A plurality of expandable graphite particles inserted into at least a portion of the plurality of pores and expanded by heat to be in close contact with the inside of the pores; And
Metal foam-graphite heat dissipation sheet including graphene is formed on each side of the metal foam and the inner surface of the pore. delete The method according to claim 1,
The metal foam is formed of at least one material selected from copper, nickel, silver, platinum, iron, stainless steel and titanium or alloys thereof. delete Forming a graphene by chemical vapor deposition on each surface of the porous metal foam having a plurality of pores and the inner surface of the pores;
Inserting expandable graphite particles into at least a portion of the plurality of pores; And
And pressing and heat treating the metal foam to expand the graphite particles so as to be in close contact with the inside of the pores. delete delete The method of claim 5,
Wherein the metal foam is formed of at least one material selected from copper, nickel, silver, platinum, iron, stainless steel, and titanium or an alloy thereof.
KR1020120091575A 2012-08-22 2012-08-22 Metal foam-graphite heat radiation sheet and method the same KR101388144B1 (en)

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Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN104291324A (en) * 2014-09-09 2015-01-21 上海纳米技术及应用国家工程研究中心有限公司 Preparation method of graphene foams
US20220238412A1 (en) * 2021-01-22 2022-07-28 DTEN, Inc. Elastic thermal connection structure

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CN108109975A (en) * 2018-01-03 2018-06-01 梧州三和新材料科技有限公司 A kind of high heat conduction cooling fin of three-dimensional foam metallic framework and preparation method thereof
CN108172554B (en) * 2018-03-27 2024-02-06 梧州三和新材料科技有限公司 High-heat-conductivity and high-heat-radiation sheet and preparation method thereof
CN110049661A (en) * 2019-05-17 2019-07-23 台州思碳科技有限公司 A kind of graphite multicellular metal foil heat dissipation film and preparation method thereof
CN116544321B (en) * 2023-07-06 2024-04-02 季华实验室 Preparation method of light-emitting chip, light-emitting chip and display panel

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KR20070079891A (en) * 2006-02-03 2007-08-08 김경일 Radiator sheet
JP2010153538A (en) 2008-12-25 2010-07-08 Sumitomo Electric Ind Ltd Heat dissipation material and method of manufacturing the same
KR20110016287A (en) * 2009-08-11 2011-02-17 고양미 Coating method with colloidal graphine oxides
KR101037168B1 (en) 2010-06-04 2011-05-26 지성수 Printed circuit board and manufacturing method thereof

Patent Citations (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
KR20070079891A (en) * 2006-02-03 2007-08-08 김경일 Radiator sheet
JP2010153538A (en) 2008-12-25 2010-07-08 Sumitomo Electric Ind Ltd Heat dissipation material and method of manufacturing the same
KR20110016287A (en) * 2009-08-11 2011-02-17 고양미 Coating method with colloidal graphine oxides
KR101037168B1 (en) 2010-06-04 2011-05-26 지성수 Printed circuit board and manufacturing method thereof

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN104291324A (en) * 2014-09-09 2015-01-21 上海纳米技术及应用国家工程研究中心有限公司 Preparation method of graphene foams
US20220238412A1 (en) * 2021-01-22 2022-07-28 DTEN, Inc. Elastic thermal connection structure

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