KR101370813B1 - Optical Module, Reflector Module, Light Module, and Apparatus for detecting level Comprising the Same - Google Patents

Abstract

The present invention provides an optical module capable of efficiently reflecting light emitted from a light source and measuring a horizontal level of a reflector even without being in contact with an object, and a housing for a horizontal measuring device having the same; And a mirror rotatably mounted to have at least one degree of freedom within the housing and having an angle controlled mirror.

Description

Optical module, reflector module, light source module and horizontal measuring device having same {Optical Module, Reflector Module, Light Module, and Apparatus for detecting level Comprising the Same}

The present invention relates to a horizontal measuring device, and more particularly, to an optical module, a reflecting plate module, a light source module and a horizontal measuring device having the same for measuring the horizontal of the object to be reflected.

In general, it is very important industrially to accurately measure the horizontality of the member in measuring the position information of the member. In many industries, the process is carried out on the assumption that the members are horizontal, so if the actual members are not horizontal, it may cause unexpected process problems.

For example, in order to maintain the integration and reliability of a high performance semiconductor device, maintaining the level of semiconductor manufacturing equipment should be preceded. In particular, in the ion implantation process of injecting ions onto the semiconductor wafer, it is essential to maintain the horizontality of the mount on which the semiconductor wafer is mounted in order to obtain an equal ion implantation effect on a plurality of dies formed on the semiconductor wafer. Therefore, in order to maintain the horizontal level, the user of the semiconductor facility often checks the level of the facility and takes necessary measures if there is an error.

Therefore, various methods have been proposed to measure the horizontality of the members in order to maintain the accuracy of the work process. In general, a level measuring device for measuring the horizontal state of a particular member is commonly referred to as a 'leveler', the leveler using a bubble or a horizontal level of the movement of the bubble or between the horizontal and the specific member The operator checks the level of separation with the naked eye.

However, such a conventional horizontal measuring device is not suitable for equipment that requires a strict horizontal because it checks the horizontal level with the naked eye, there was a problem that can not determine whether the level without contact with the object.

The present invention is to solve various problems including the above problems, an optical module, a reflector module, a light source module that can efficiently reflect the light emitted by the light source to measure the horizontal of the object even without contact with the object And to provide a horizontal measuring device having the same. However, these problems are exemplary and do not limit the scope of the present invention.

According to an aspect of the invention, the housing; And a mirror rotatably mounted to have at least one degree of freedom within the housing and having an angle adjusted.

The mirror has two degrees of freedom, and the optical module of the horizontal measuring device may further include an angle adjusting unit for adjusting the angle of the mirror.

The angle adjusting unit may include a first worm gear rotatably mounted to the housing and having an opening formed therein; A first worm shaft mounted on the housing so as to be tooth-connected with the first worm gear and capable of rotating the first worm gear; A second worm gear rotatably supporting the mirror and mounted to the opening of the first worm gear; And a second worm shaft mounted on the first worm gear to be tooth-coupled with the second worm gear and capable of rotating the second worm gear.

The first worm shaft may be disposed to be perpendicular to the rotation direction of the first worm gear.

The second worm shaft may be disposed to be perpendicular to the rotation direction of the second worm gear.

The optical module of the horizontal measuring device may further include a backlash control unit for adjusting the backlash between the first worm gear and the first worm shaft.

The backlash control unit may include at least one ball plunger installed in the housing.

According to another aspect of the invention, the main body; And a reflection plate rotatably mounted in the main body to have at least one degree of freedom, and an angle of which is adjusted; Provided is a reflector plate module of a horizontal measuring device.

The reflector may have two degrees of freedom, and the reflector module of the horizontal measuring apparatus may further include a reflector angle adjuster configured to adjust an angle of the reflector.

The reflection plate angle adjustment unit, the fixing plate fixed to the main body; A moving plate disposed inside the fixing plate and mounted with the reflection plate; A spring supporting the movable plate with respect to the fixed plate; An upper adjustment screw movably mounted at an upper edge between the movable plate and the fixed plate and moving the movable plate; And a lower adjustment screw movably mounted at a lower edge between the movable plate and the fixed plate and moving the movable plate. . ≪ / RTI >

An upper stopper mounted on the other edge of the upper side between the movable plate and the fixed plate to adjust a distance between the movable plate and the fixed plate; And a lower stopper mounted at the lower edge of the lower side between the movable plate and the fixed plate to adjust a separation distance between the movable plate and the fixed plate. As shown in FIG.

According to another aspect of the invention, the main body; And a light source rotatably mounted in the main body so as to have at least one degree of freedom; Provided is a light source module of a horizontal measuring device.

The light source has two degrees of freedom, and the light source module of the horizontal measuring device may further include a light source angle adjusting unit for adjusting the angle of the light source.

The light source angle control unit, the fixing plate is fixed to the main body portion formed with a through hole on one side; A movable plate disposed inside the fixed plate such that one side of the light source is exposed to the fixed plate through the through hole; A spring supporting the movable plate with respect to the fixed plate; An upper adjustment screw movably mounted at an upper edge between the movable plate and the fixed plate and moving the movable plate; And a lower adjustment screw movably mounted at a lower edge between the movable plate and the fixed plate and moving the movable plate.

The light source module of the horizontal measuring device is an upper stopper mounted on the other edge of the upper side between the movable plate and the fixed plate and adjusting the separation distance between the movable plate and the fixed plate; And a lower stopper mounted at the lower edge of the lower side between the movable plate and the fixed plate to adjust a separation distance between the movable plate and the fixed plate; As shown in FIG.

According to another aspect of the invention, the light source to be adjusted to the angle, the main body portion is mounted to be spaced apart from the light source at a predetermined distance and the reflector is adjustable angle; A first optical module detachably mounted to the main body, the first optical module having a first mirror adapted to transmit light emitted from the light source and collect light reflected from the reflecting plate and reflect the light to the light receiving unit; And detachably mounted to the main body so as to be adjacent to the first optical module, reflect light transmitted through the first optical module to a reflector, collect light reflected from the reflector, and reflect the light to the first optical module. A second optical module mounted with a second mirror, the second mirror of which angle is adjusted so as to be adjusted; Provided is a horizontal measuring device.

The first optical module or the second optical module may further include an angle adjusting unit for adjusting the angle of the first mirror or the second mirror to have two degrees of freedom.

The light source and the reflector each have two degrees of freedom, and the horizontal measuring device comprises: a light source angle adjusting unit for adjusting the angle of the light source; And it may further comprise a reflector angle adjuster for adjusting the angle of the reflector.

According to an embodiment of the present invention made as described above, an optical module, a reflector module, a light source module and the like, which can efficiently reflect the light emitted by the light source to measure the horizontal of the object even without contacting the object Horizontal measuring device can be implemented. Of course, the scope of the present invention is not limited by these effects.

1 is a schematic perspective view of a horizontal measuring apparatus according to an embodiment of the present invention.
FIG. 2 is a plan view schematically illustrating the flow of light when the reflector of FIG. 1 is horizontal.
3 is a perspective view of the main body portion schematically shown in FIG.
4 is a perspective view of one embodiment of the first optical module of FIG. 3.
5 is a front view (a) and a plan view (b) of FIG.
6 is a front view of the state in which the angle of the mirror is adjusted as a front view of FIG.
7 is an exploded perspective view of the first worm gear and the first worm shaft region of FIG.
8 is a cross-sectional view illustrating one form of the backlash control unit illustrated in FIG. 5.
FIG. 9 is a perspective view of the region in which the (a) reflector angle adjusting unit and (b) the light source angle adjusting unit are mounted in FIG. 3.
FIG. 10 is a (a) side view and (b) top view showing the configuration of the reflector angle adjusting unit of FIG. 9. FIG.
FIG. 11 is a front view of the moving plate of FIG. 10.
FIG. 12 is a diagram illustrating an operation of FIG. 10A.

Hereinafter, embodiments of the present invention will be described in detail with reference to the accompanying drawings. It should be understood, however, that the invention is not limited to the disclosed embodiments, but may be embodied in many different forms and should not be construed as limited to the embodiments set forth herein. Rather, these embodiments are provided so that this disclosure will be thorough and complete, Is provided to fully inform the user. Also, for convenience of explanation, the components may be exaggerated or reduced in size.

1 is a schematic perspective view of a horizontal measuring apparatus according to an embodiment of the present invention, Figure 2 is a plan view schematically showing the flow of light when the reflector of Figure 1 is horizontal.

Referring to FIG. 1, the horizontal measuring device 100 is a device for measuring whether the reflector 160 is horizontal. The light source 110, the first mirror 120, the second mirror 130, and the reflector 140 are shown. ), The light receiver 150, and the light information calculator 170. Here, the light source 110, the first mirror 120, the second mirror 130, and the reflector plate 140 may be included in the main body 200 and may be installed on the side of the reflector 160. The main body 200 will be described later.

The reflector 160 mounts the member on its surface by mounting not only a member having a surface state capable of reflecting light itself, but also a predetermined member capable of reflecting light even if it does not reflect light itself. It can include any object that can reflect light.

The light source 110 is a device that emits light to the reflector plate 140, and the light emitted from the light source 110 may be viewed as light having straightness and having a property that may be sensed by the light receiving element. In this case, the light emitted from the light source 110 may include infrared rays, visible rays, ultraviolet rays, or the like. In addition, the light emitted may be emitted in the form of a laser. The emission means that light or a signal is transmitted from the active member with a certain directivity.

The reflective plate 140 may reflect the light emitted from the light source 110 back to the light source. Therefore, an optical path OP formed by reflecting the light emitted from the light source 110 by the reflector 140 may be formed between the light source 110 and the reflector 140.

The first mirror 120 and the second mirror 130 may be spaced apart from each other at a predetermined distance between the light source 110 and the reflector plate 140. Both the first mirror 120 and the second mirror 130 may include at least one optical member that transmits some light and reflects the remaining light. For example, the optical member may be a semi-transmitting mirror.

In this case, the first mirror 120 and the second mirror 130 may be disposed at predetermined angles with respect to the optical path OP. In this case, the predetermined angle may be defined as an angle formed from a portion of the optical path OP extending toward the reflector 160 of the first mirror 120 or the second mirror 130.

For example, as shown in FIG. 2, the first mirror 120 and the second mirror 130 may be disposed at angles α and β with respect to the optical path OP, respectively. In this case, α and β may have the same angle to each other, and as an example, all may have an angle of 45 °. However, the present invention is not limited thereto and may include cases having different angles.

The first mirror 120 transmits the light emitted from the light source 110 to enter the second mirror 130, and transmits the light transmitted through the second mirror 130 or reflected by the second mirror 130. The light may be reflected to the light receiver 150. As in the present embodiment, the first mirror 120 may be formed of one transflective mirror, but is not limited thereto.

The second mirror 130 transmits the light reflected from the reflector 140 to reflect the light incident on the first mirror 120 or the light transmitted through the first mirror 120 to the reflector 160 as a horizontal measurement target. Then, the light reflected from the reflector 160 collects and reflects back to the first mirror 120. As shown in the present embodiment, the second mirror 130 may be formed of one transflective mirror, but is not limited thereto.

As described above, as the first mirror 120 and the second mirror 130 are positioned between the light source 110 and the reflector plate 140, the light emitted from the light source 110 is transferred to the first mirror 120 and the second mirror. After passing through the mirror 130, it may be reflected back to the light source 110 by the reflector 140.

Here, the light reflected by the reflector plate 140 and transmitted through the second mirror 130 and reaches the first mirror 120 and the light reflected from the reflector 160 and transmitted through the second mirror 130 and then the first Some of the light that reaches the mirror 120 may be reflected by the light receiver 150. The light receiver 150 receives the light reflected from the first mirror 120.

The light receiver 150 may include a controller capable of determining coordinates reaching the light receiver 150 as well as the presence or absence of light. For example, the light receiver 150 may include a CCD camera and software that coordinates and calculates the light received from the CCD camera.

The horizontal measurement apparatus 100 of this embodiment having such a configuration functions as follows.

When the light source 110 emits light, the light may pass through the first mirror 120 and reach the second mirror 130. The second mirror 130 forms a predetermined angle with the optical path OP, and the light emitted from the light source 110 is separated from the second mirror 130 in two directions and partially transmitted to the reflector 140. And some may be reflected to the reflector 160.

The light reflected by the reflector 140 may pass through the second mirror 130 to reach the first mirror 120. The first mirror 120 forms a predetermined angle with the optical path OP, and the light reflected by the reflector 140 is partially reflected by the light receiving unit 150.

The light received by the light receiver 150 through the above-described steps may be collected on the light receiver 150 in the form of a dot. In this case, the position of the light reflected by the reflector 140 collected by the light receiver 150 may be a reference point for determining whether the object to be measured, that is, the reflector 160, is horizontal.

Meanwhile, the light reflected by the reflector 160 is sequentially reflected by the second mirror 130 and the first mirror 120 and collected by the light receiving unit 150 in the same manner as described above. Again, the light reflected in this step may be collected on the light receiver 150 in the form of a dot.

When the position of the light reflected from the reflector 140 and collected by the light receiver 150 and the position of the light reflected by the reflector 160 and collected by the light receiver 150 are the same, that is, when the light receiver is recognized as one point The furnace OP and the reflector 160 can be said to be arranged in parallel with each other. The optical path OP forms a straight line due to the characteristic of the light that goes straight, and thus the reflector 160 parallel to the optical path OP is in a horizontal state. That is, it is determined whether the reflector 160 is inclined using the linearity of the light.

For example, as shown in FIG. 2, when the reflector 160 is horizontal, the light o reflected from the reflector 160 passes through the same path as the light r reflected from the reflector 140. When the light receiver 150 reaches the light receiver 150 through the mirror 120, the light receiver 150 recognizes the light as one light. As a result, the horizontal measurement apparatus 100 may determine that the reflector 160 is horizontal.

Meanwhile, in the horizontal measuring apparatus 100, the light source 110 and the reflector plate 140 forming the optical path OP should be parallel to each other and the first mirror 120 and the first mirror 120 disposed on the optical path OP. The two mirrors 130 should be arranged to be parallel to each other. Therefore, the light source 110, the reflector 140, the first mirror 120, and the second mirror 130 need to be configured to adjust the inclination angle.

First, before the horizontal measurement of the reflector 160, the inclination angle α of the first mirror 120 and the inclination angle β of the second mirror 130 may be aligned. .

Alternatively, the inclination angle α of the first mirror 120 and the inclination angle β of the second mirror 130 may be adjusted in plan view as shown in FIG. The inclination of the first mirror 120 and the second mirror 130 may be adjusted.

As described above, the horizontal measuring apparatus 100 according to the present exemplary embodiment may adjust the inclination angle and the inclination of the first mirror 120 and the second mirror 130 as described above. And a main body 200 including a second mirror 130 and a reflecting plate 140.

3 is a perspective view of the main body portion schematically shown in FIG.

As shown in FIG. 3, the main body 200 may include a light source 110 (see FIG. 2), a reflector 140 (see FIG. 2), a first optical module 300, and a second optical module 400. Can be. The main body 200 may have a case having a rectangular parallelepiped shape. The light source 110 and the reflector plate 140 may be disposed on both sides of the case, respectively, and the first optical module 300 and the second optical module 400 may be detachably disposed in the central region of the case.

Through-holes 201 and 202 may be formed in the front or rear of the case so that light may be reflected to the reflector 160 (see FIG. 2) or the light receiving unit 150 (see FIG. 2) along the optical path. For example, the through holes 201 and 202 may be formed on one surface of a case of the main body 200 in which the first optical module 300 and the second optical module 400 are disposed.

 In the case of the main body 200, a second adjustment screw 355 (see FIG. 4) of the first optical module 300 and a fourth adjustment screw (not shown) of the second optical module 400 will be inserted and inserted, respectively. Long holes 202 and 204 can be formed to be. As will be described later, since the second worm shaft 350 of the first optical module 300 and the second worm shaft 450 of the second optical module 400 are configured to be rotatable, the long holes 202 and 204 are bent in an arc shape. Ellipses can be achieved. Adjustment screws may be fitted to the second worm shaft 350 and the second worm shaft 450 of the second optical module 400 exposed through the long holes 202 and 204, respectively.

The first optical module 300 may be disposed on the left side of the main body 200 to be adjacent to the light source 110. The first optical module 300 transmits the light emitted from the light source 110, collects the light reflected from the reflector 140, and reflects the light to the light receiving unit 150. ) May be included. Light reflected by the first mirror 120 of the first optical module 300 through the first through hole 201 formed in the case of the main body 200 may be emitted to the light receiving unit 150 (see FIG. 2). have. The first worm shaft 340 into which the first adjusting screw 345 (see FIG. 4) is inserted may be exposed on an upper portion of the first optical module 300.

The second optical module 400 may be disposed on the right side of the main body 200 as shown in FIG. 3 to be adjacent to the first optical module 300. The angle is adjusted to reflect the light transmitted through the first optical module 300 to the reflector 160 (see FIG. 2), collect the light reflected from the reflector 160, and reflect the light to the first optical module 300. The second mirror 130 (see FIG. 2) may be included. Light reflected by the second mirror 130 may be emitted through the second through hole 203 formed in the case of the main body 200. A second worm shaft 450 into which a third adjustment screw (not shown) is inserted may be exposed on an upper portion of the second optical module 400.

Here, the first optical module 300 and the second optical module 400 may include an angle adjusting unit for adjusting the angle of the first mirror 120 and the second mirror 130, respectively. Therefore, the first optical module 300 and the second optical module 400 is configured to adjust the angle of the first mirror 120 and the second mirror 130, respectively.

Hereinafter, since the first optical module 300 and the second optical module 400 have a similar configuration, the optical module of the horizontal measurement apparatus according to the present embodiment takes the configuration of the first optical module 300 as an example in order to avoid overlapping descriptions. Will be described.

4 is a perspective view of one embodiment of the first optical module of FIG. 3, FIG. 5 is a front view (a) and a plan view (b) of FIG. 4, and FIG. 6 is a front view of FIG. 5 with the angle of the mirror adjusted. 7 is an exploded perspective view of the first worm gear and the first worm shaft region of FIG. 5.

As shown in FIG. 4, the optical module of the horizontal measuring apparatus 100 according to the exemplary embodiment of the present invention includes a housing 310, a mirror 120 (see FIG. 6) mounted inside the housing 310, and a mirror. It is provided with an angle adjuster to adjust the angle while moving 120 has at least one degree of freedom.

The housing 310 may have a hexahedron shape as shown in FIG. 4, but the shape of the housing is not limited thereto. The housing 310 may be detachably mounted to the main body 200 (refer to FIG. 3), thereby facilitating exchange, repair, assembly and manufacture of the optical module. In the housing 310, a plurality of light passing holes 312 may be formed to move light along the light path. Light may be incident or transmitted from the light source 110 to the mirror 120 through the light passing hole 312.

The mirror 120 mounted to the housing 310 may move to have one or more degrees of freedom by the angle adjuster. In this embodiment, an example in which the angle is adjusted while moving the mirror 120 to have two degrees of freedom will be described. 4 to 6, the first worm gear 320, the first worm shaft 340, the first adjustment screw 345, the second worm gear 360, the second worm shaft 350, the first It can be made, including two adjustment screws (355).

The first worm gear 320 may have an opening 322 formed therein and may be rotatably mounted to the housing 310. As illustrated in FIG. 7, the first worm gear 320 may have a donut shape in which a tooth 321 is formed on an outer circumferential surface and a circular opening 322 is formed on an inner circumferential surface. The shape of the tooth 321 and the opening 322 is not limited to the shape shown. The mirror 120 may be mounted in the opening 322 of the first worm gear 320.

The first worm shaft 340 has a worm 341 that is tooth-coupled with the teeth 321 of the first worm gear 320 may be mounted to the housing 310. Since the first worm shaft 340 is tooth-coupled with the first worm gear 320, when the first worm shaft 340 rotates, the first worm gear 320 may be rotated. The first worm shaft 340 may be arranged to intersect to be perpendicular to the rotation direction of the first worm gear 320, but may be disposed at an appropriate angle without forming a vertical. The first worm shaft 340 may move clockwise or counterclockwise along the X-Y plane about the Z axis.

As the first worm shaft 340 rotates, the first worm gear 320 may rotate clockwise or counterclockwise on the X-Z plane. Since the first worm gear 320 may rotate on the X-Z plane, the mirror 120 mounted in the opening of the first worm gear 320 may have a first degree of freedom capable of rotating on the X-Z plane.

If the gear ratio between the first worm shaft 340 and the first worm gear 320 is adjusted, the first worm gear 320 may be moved finely, and thus the mirror 120 may be precisely controlled on the X-Z plane.

The first adjustment screw 345 may be coupled to one end of the first worm shaft 340 exposed to the housing 310. As the user rotates the first adjusting screw 345 exposed to the outside of the housing 310, the first worm gear 320 toothed to the first worm shaft 340 may be rotated.

The second worm gear 360 may rotatably support the mirror 120 and may be mounted in the opening 322 of the first worm gear 320. One side of the second worm gear 360 may have a bar shape in which a tooth (not shown) is formed on an outer circumferential surface thereof, and the other side supports the support 380 and the rotating shaft 370 so as to support rotation while surrounding the mirror 120. Can be made. The second worm gear 360 may be vertically disposed in the opening of the first worm gear 320 along the Z axis direction, and may be inclined at a predetermined angle on the Z axis.

The second worm shaft 350 may be mounted on the first worm gear 320 to be tooth-coupled with the second worm gear 360. The second worm shaft 350 may be disposed to intersect to be perpendicular to the rotation direction of the second worm gear 360. For example, as shown in FIG. 5, the second worm shaft 350 may be disposed long on the Y axis so as to rotate about the Y axis. One end of the second worm shaft 350 may be tooth-coupled with the second worm gear 360 and the other end may be exposed to the front surface of the first worm gear 320.

The second adjustment screw 355 may be coupled to the second worm shaft 350. As the user rotates the second adjustment screw 355 exposed to the outside of the first worm gear 320, the second worm gear 360 teeth-coupled to the second worm shaft 350 may be rotated. Therefore, the second worm gear 360 may rotate clockwise or counterclockwise on the X-Y plane about the Z axis.

Since the second worm gear 360 can rotate on the XY plane, the mirror 120 connected to the second worm gear 360 while being mounted in the opening of the first worm gear 320 has a second degree of freedom that can rotate on the XY plane. Can have If the gear ratio between the second worm shaft 350 and the second worm gear 360 is adjusted, the second worm gear 360 may be moved finely, and thus the mirror 120 may be precisely controlled on the X-Y plane.

Accordingly, as shown in FIG. 6, the tilt of the mirror 120 may be adjusted while moving clockwise or counterclockwise on the XZ plane, and the tilt angle may be adjusted because the mirror 120 may move clockwise or counterclockwise about the Z axis. have.

As such, since the optical module of the horizontal measuring apparatus of the present embodiment includes an angle adjusting unit capable of moving the mirror 120 to have two degrees of freedom, the mirror 120 may be adjusted as well as the inclination angle.

On the other hand, the first worm gear 320 moving in accordance with the rotation to the first worm shaft 340 may be more stable to maintain the inclination of the adjusted mirror 120 when the moving position is fixed. Between the first worm shaft 340 and the first worm gear 320, there is a gap, a gap called a backlash (backlash).

The optical module of the horizontal measurement apparatus of the present embodiment may further include a backlash control unit for adjusting the backlash between the first worm gear 320 and the first worm shaft 340. At least one backlash control unit may be mounted to the housing 310. For example, as illustrated in FIG. 5, two backlash adjustment units may be installed inside the housing 310 in the upper region and the lower region so as to be adjacent to the teeth 321 of the first worm gear 320.

8 is a cross-sectional view illustrating one form of the backlash control unit illustrated in FIG. 5.

As shown in FIG. 8, the backlash control unit 390 may include at least one ball plunger. A thread 391 may be formed on an outer circumferential surface of the ball plunger-shaped backlash control unit 390 so as to be easily coupled to the housing 310. The ball plunger-shaped backlash adjuster 390 is mounted with a ball 395 that is elastically supported by a spring 393 and is in close contact with the teeth 321 to the first worm gear 320.

When the first worm gear 320 is rotated, the ball 395 in close contact with one of the teeth 321 is in a state of pressing the spring 393, and when the rotation of the first worm gear 320 is stopped, the spring ( 393 is elastically restored and the ball 395 is in close contact with the other teeth 321 to reduce the backlash.

Therefore, since the moved position of the first worm gear 320 moving along the first worm shaft 340 may be fixed by the backlash adjuster 390, the inclination of the adjusted mirror 120 may be maintained more stably. Can be.

Since the optical module of the horizontal measuring device of the present embodiment can move the mirror to have at least one degree of freedom, it is possible to individually adjust the inclination angle of the mirror of the first optical module and the second optical module, as well as to replace the optical module. , Repair, assembly, etc. can be facilitated.

FIG. 9 is a main perspective view of an area in which the (a) reflector angle adjusting unit and (b) the light source angle adjusting unit are mounted in FIG. 3, and FIG. FIG. 11 is a front view of the moving plate of FIG. 10, and FIG. 12 is a view showing the operation of FIG.

As shown in FIG. 9A, the main body 200 includes a reflector plate 500 to which the reflector plate 140 (see FIG. 2) is movably mounted, and as shown in FIG. 9B. The unit 200 may include a light source module 600 on which the light source 110 is mounted. Here, the reflector plate module 500 and the light source module 600 may form both side portions of the main body 200.

The reflecting plate module 500 and the light source module 600 may be rotatably installed in the main body 200 so that the reflecting plate 140 and the light source 110 have at least one degree of freedom. Accordingly, the angle of the reflector plate 140 and the light source 110 can be adjusted.

For example, each of the reflector plate 500 and the light source module 600 is the angle of the reflector to adjust the angle of the reflector 140 and the light source 110 so that the light source 110 and the reflector 140 have two degrees of freedom, respectively. It may be configured to include a light source and an angle adjusting unit.

The reflector angle adjusting unit and the light source angle adjusting unit may have a similar configuration. For convenience of description, the configuration of the reflecting plate angle adjusting unit will be described, and the light source angle adjusting unit will be described below with reference to other parts of the reflecting plate angle adjusting unit.

10, the fixed plate 510, the movable plate 520, the spring 530, 590, the upper adjustment screw 560, the lower adjustment screw 540, the upper stopper 570 and the lower plate as shown in FIG. It may include a stopper 580.

The fixing plate 510 may be fixed to the main body 200 to form side surfaces of the main body 200. For example, the fixing plate 510 may be formed of a rectangular plate, and the spiral grooves 511 and 512 to which the screws 501 and 502 may be coupled to the side of the fixing plate 510 for screwing with the main body 200. ) May be formed.

The moving plate 520 may be disposed inside the fixed plate 510. For example, the moving plate 520 is formed of a rectangular plate and may be disposed in the inner space of the main body 200 while having a size smaller than the area of the fixed plate 510. The reflective plate 140 may be mounted on one side of the moving plate 520, and the other side of the moving plate 520 may be adjacent to the fixed plate 510. The reflective plate 140 may be disposed in the central area of the moving plate 520 as shown in FIG. 11.

The springs 530 and 590 support the movable plate 520 with respect to the fixed plate 510. The springs 530 and 590 may be formed of at least one. For example, as illustrated in FIG. 9, two springs 530 and 590 may be mounted at upper and side regions of the fixing plate 510 and the moving plate 520, respectively.

One side and the other side of the springs 530, 590 may be fixed to the fixed plate 510 and the moving plate 520, respectively. For example, both ends of the springs 530 and 590 may be fixed to the fixing plate 510 and the moving plate 520 by welding. Alternatively, the fixing plate 510 and the moving plate 520 may be provided with a through hole (not shown), a connecting bar (not shown), and the like to mount the springs 530 and 590 to the fixing plate 510 and the moving plate 520 in an assembled form. This may be formed. The springs 530 and 590 may support the load of the moving plate 520 while separating the moving plate 520 from the fixed plate 510 by a predetermined distance.

The upper adjustment screw 560 is movably mounted on the upper edge between the movable plate 520 and the fixed plate 510, and serves to move the upper region of the movable plate 520. The body of the upper adjustment screw 560 may be inserted into the screw hole formed in the fixing plate 510 to be movable. One end of the upper adjustment screw 560 is fixed to the moving plate 520, the other end may be coupled to the upper adjustment knob 565.

When the user rotates the upper adjustment knob 565, the upper adjustment screw 560 may move the moving plate 520 while the length exposed between the moving plate 520 and the fixed plate 510 is changed.

The lower adjustment screw 540 is movably mounted on the lower edge between the movable plate 520 and the fixed plate 510, and serves to move the lower region of the movable plate 520. The body of the lower adjustment screw 540 may be inserted into the screw hole formed in the fixing plate 510 so as to be movable. One end of the lower adjustment screw 540 is fixed to the moving plate 520, the other end may be coupled to the lower adjustment knob 545.

When the user rotates the lower adjustment knob 545, the lower adjustment screw 540 may move the movable plate 520 while the exposed length is changed between the movable plate 520 and the fixed plate 510.

The upper stopper may be mounted on the other upper edge between the movable plate 520 and the fixed plate 510, and may adjust a separation distance between the movable plate 520 and the fixed plate 510. For example, the upper stopper 570 may be formed in a bead shape, one side of the upper stopper 570 may be fixed to the moving plate 520 and the other side may be contacted or spaced apart from the fixing plate 510.

The lower stopper 580 may be mounted at the other lower edge between the movable plate 520 and the fixed plate 510 and adjust a separation distance between the movable plate 520 and the fixed plate 510. For example, the lower stopper 580 may also be formed in a bead shape, and one side of the lower stopper 580 may be fixed to the moving plate 520 and the other side may be contacted or spaced apart from the fixing plate 510.

The reflection plate angle adjusting unit having such a configuration may operate as shown in FIG. 12.

For example, when the lower adjustment knob 545 is rotated so that the lower adjustment screw 540 moves as shown in the right arrow direction, as shown in FIG. 12A, the lower adjustment screw 540 moves fixed to one side. The plate 520 may be moved toward the fixed plate 510. In this case, the springs 530 and 590 may be compressed, and the lower stopper 580 fixed to one side of the moving plate 520 may be spaced apart from the fixing plate 510.

On the contrary, when the lower adjustment knob 540 is rotated so that the lower adjustment screw 540 moves in the direction of the left arrow, as shown in FIG. ) May be moved away from the fixing plate 510. In this case, the springs 530 and 590 may be tensioned, and the lower stopper 580 fixed to one side of the movable plate 520 forms a pivot shaft so that the other side thereof rotates with respect to the fixed plate 510. can do.

As such, the lower adjustment screw 540 may move the movable plate 520 to rotate on the X-Z plane while the exposed length between the movable plate 520 and the fixed plate 510 is changed. Therefore, since the movable plate 520 is moved to have one degree of freedom by the lower adjustment screw 540, the installation angle of the reflector plate 140 may be adjusted.

Although the operation is not shown in detail in the same principle, referring to the drawing shown in FIG. 10B, the upper adjustment screw 560 has a movable plate while the exposed length between the movable plate 520 and the fixed plate 510 is changed. It can be seen that 520 can be moved to rotate on the XY plane. Therefore, since the movable plate 520 moves to have one degree of freedom by the upper adjusting screw 560, the reflecting plate 140 may have two degrees of freedom and the installation angle may be adjusted.

On the other hand, the light source angle adjusting unit may have a configuration similar to the above-described reflector angle adjusting unit. That is, as shown in (b) of FIG. 9, the light source angle adjusting unit includes a fixed plate 610, a moving plate 620, springs 630 and 690, an upper adjustment screw 660, a lower adjustment screw 640, and an upper portion. It may include a stopper 670 and the lower stopper 680.

The fixing plate 610 may be fixed to the main body 200 and a through hole 611 may be formed at one side thereof. One side of the light source 110 may be exposed to the outside of the fixing plate 510 through the through hole 611. The through hole 611 may have an appropriate shape according to the shape of the light source 110, and may have a hole area having a size that does not come into contact with the light source 110 as the light source 110 moves. The moving plate 620 is provided with a light source 110, and the light source 110 can move together with the moving plate 620.

The light source angle adjusting unit may move the moving plate 620 to rotate on the X-Z plane and the X-Y plane by the upper adjusting screw 660 and the lower adjusting screw 640, as in the aforementioned reflecting plate angle adjusting unit. Therefore, since the movable plate 620 is moved to have two degrees of freedom by the upper adjustment screw 660 and the lower adjustment screw 640, the light source 110 can be adjusted while the installation angle has two degrees of freedom.

The reflection plate module and the light source module of the horizontal measuring device of the present embodiment can not only adjust the inclination angle with respect to the reflection plate and the light source so as to have at least one degree of freedom, but also can be detached from the main body, thereby replacing, repairing, and assembling the reflection plate and the light source. Etc. can be facilitated.

While the present invention has been described with reference to exemplary embodiments, it is to be understood that the invention is not limited to the disclosed exemplary embodiments, but, on the contrary, is intended to cover various modifications and equivalent arrangements included within the spirit and scope of the invention.

For example, in the above-described embodiment, the horizontal measuring apparatus equipped with two mirrors whose angles are adjusted, but the present invention may be applied to the horizontal measuring apparatus equipped with one or three or more mirrors whose angles are adjusted. will be.

Therefore, the true technical protection scope of the present invention will be defined by the technical spirit of the appended claims.

100: horizontal measuring device 110: light source 120, 130: mirror
140: reflector 150: light receiving unit 160: the reflector
170: optical information calculating unit 200: main body 201, 203: through hole
202, 204: long hole 300, 400: optical module 340, 440: first worm shaft
350, 450: second worm shaft 310: housing 320: first worm gear
321: tooth 322: opening 360: second worm gear
380: support 390: backlash control unit 391: main body
393: spring 395: ball 500: reflector angle adjuster
600: light source angle control unit 510, 610: fixed plate 520, 620: moving plate
530, 590, 630, 690: Spring 560, 660: Upper adjustment screw
565, 665: Upper adjustment knob 540, 640: Lower adjustment screw
545, 645: Lower adjustment knob 570, 670: Upper stopper
580, 680: lower stopper

Claims (18)

A main body unit on which an angle light source for adjusting the angle and a reflector plate disposed to be spaced apart from the light source at a predetermined distance are mounted;
A first optical module detachably mounted to the main body, the first optical module having a first mirror adapted to transmit light emitted from the light source and collect light reflected from the reflecting plate and reflect the light to the light receiving unit; And
It is detachably mounted to the main body to be adjacent to the first optical module, and reflects the light transmitted through the first optical module to the reflector to collect the light reflected from the reflector to reflect to the first optical module. A second optical module mounted with a second mirror whose angle is adjusted;
Comprising a level measuring device. The method of claim 1,
The first optical module further comprises a first mirror angle adjusting unit for adjusting the angle of the first mirror to have two degrees of freedom. 3. The method of claim 2,
The first optical module has a housing,
The first mirror angle adjusting unit,
An opening formed in an inner side of the first worm gear rotatably mounted to the housing;
A first worm shaft mounted on the housing so as to be tooth-connected with the first worm gear and capable of rotating the first worm gear;
A second worm gear rotatably supporting the first mirror and mounted to the opening of the first worm gear; And
And a second worm shaft mounted on the first worm gear to be tooth-coupled with the second worm gear and capable of rotating the second worm gear. The method of claim 3,
And the first worm shaft is disposed to intersect the rotation direction of the first worm gear. The method of claim 3,
And the second worm shaft is disposed to intersect the direction of rotation of the second worm gear. The method of claim 3,
The first mirror angle adjustment unit, the horizontal measuring device further comprises a backlash control unit for adjusting the backlash between the first worm gear and the first worm shaft. The method according to claim 6,
The backlash control unit includes a horizontal measuring device including at least one ball plunger installed in the housing. The method of claim 1,
The second optical module further comprises a second mirror angle adjusting unit for adjusting the angle of the second mirror to have two degrees of freedom. The method of claim 1,
And a reflector angle adjuster for adjusting an angle of the reflector so that the reflector has two degrees of freedom. 10. The method of claim 9,
The reflector angle adjustment unit,
A fixed plate fixed to the main body;
A moving plate disposed inside the fixing plate and mounted with the reflection plate;
A spring supporting the movable plate with respect to the fixed plate;
An upper adjustment screw movably mounted at an upper edge between the movable plate and the fixed plate and moving the movable plate; And
A lower adjustment screw movably mounted at a lower edge between the movable plate and the fixed plate and moving the movable plate;
Containing, level measuring device. 11. The method of claim 10,
The reflector angle adjustment unit,
An upper stopper mounted on the other edge of the upper side between the movable plate and the fixed plate to adjust a separation distance between the movable plate and the fixed plate; And
A lower stopper mounted at the lower edge of the lower side between the movable plate and the fixed plate to adjust a separation distance between the movable plate and the fixed plate;
It further comprises a level measuring device. The method of claim 1,
And a light source angle adjusting unit for adjusting an angle of the light source so that the light source has two degrees of freedom. The method of claim 12,
The light source angle adjusting unit,
A fixing plate fixed to the main body and having a through hole formed at one side thereof;
A movable plate disposed inside the fixed plate such that one side of the light source is exposed to the fixed plate through the through hole;
A spring supporting the movable plate with respect to the fixed plate;
An upper adjustment screw movably mounted at an upper edge between the movable plate and the fixed plate and moving the movable plate; And
A lower adjustment screw movably mounted at a lower edge between the movable plate and the fixed plate and moving the movable plate;
Containing, level measuring device. 14. The method of claim 13,
The light source angle adjusting unit,
An upper stopper mounted on the other edge of the upper side between the movable plate and the fixed plate to adjust a separation distance between the movable plate and the fixed plate; And
A lower stopper mounted at the lower edge of the lower side between the movable plate and the fixed plate to adjust a separation distance between the movable plate and the fixed plate;
It further comprises a level measuring device. delete delete delete delete

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