KR101364005B1 - 높은 반복율의 가스 방전 레이저를 위한 개선된 스펙트럼측정법 - Google Patents

높은 반복율의 가스 방전 레이저를 위한 개선된 스펙트럼측정법 Download PDF

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KR101364005B1
KR101364005B1 KR1020087001729A KR20087001729A KR101364005B1 KR 101364005 B1 KR101364005 B1 KR 101364005B1 KR 1020087001729 A KR1020087001729 A KR 1020087001729A KR 20087001729 A KR20087001729 A KR 20087001729A KR 101364005 B1 KR101364005 B1 KR 101364005B1
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bandwidth
output
spectrum
width
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Korean (ko)
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KR20080081890A (ko
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로버트 제이. 라팍
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사이머 엘엘씨
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    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01J—MEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT, POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRARED, VISIBLE OR ULTRAVIOLET LIGHT; COLORIMETRY; RADIATION PYROMETRY
    • G01J3/00—Spectrometry; Spectrophotometry; Monochromators; Measuring colours
    • G01J3/12—Generating the spectrum; Monochromators
    • G01J3/26—Generating the spectrum; Monochromators using multiple reflection, e.g. Fabry-Perot interferometer, variable interference filters
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01J—MEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT, POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRARED, VISIBLE OR ULTRAVIOLET LIGHT; COLORIMETRY; RADIATION PYROMETRY
    • G01J3/00—Spectrometry; Spectrophotometry; Monochromators; Measuring colours
    • G01J3/02—Details
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01J—MEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT, POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRARED, VISIBLE OR ULTRAVIOLET LIGHT; COLORIMETRY; RADIATION PYROMETRY
    • G01J3/00—Spectrometry; Spectrophotometry; Monochromators; Measuring colours
    • G01J3/02—Details
    • G01J3/0202—Mechanical elements; Supports for optical elements
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01J—MEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT, POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRARED, VISIBLE OR ULTRAVIOLET LIGHT; COLORIMETRY; RADIATION PYROMETRY
    • G01J3/00—Spectrometry; Spectrophotometry; Monochromators; Measuring colours
    • G01J3/02—Details
    • G01J3/0205—Optical elements not provided otherwise, e.g. optical manifolds, diffusers, windows
    • G01J3/0237—Adjustable, e.g. focussing
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01J—MEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT, POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRARED, VISIBLE OR ULTRAVIOLET LIGHT; COLORIMETRY; RADIATION PYROMETRY
    • G01J3/00—Spectrometry; Spectrophotometry; Monochromators; Measuring colours
    • G01J3/02—Details
    • G01J3/027—Control of working procedures of a spectrometer; Failure detection; Bandwidth calculation
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01J—MEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT, POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRARED, VISIBLE OR ULTRAVIOLET LIGHT; COLORIMETRY; RADIATION PYROMETRY
    • G01J3/00—Spectrometry; Spectrophotometry; Monochromators; Measuring colours
    • G01J3/02—Details
    • G01J3/0286—Constructional arrangements for compensating for fluctuations caused by temperature, humidity or pressure, or using cooling or temperature stabilization of parts of the device; Controlling the atmosphere inside a spectrometer, e.g. vacuum
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01J—MEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT, POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRARED, VISIBLE OR ULTRAVIOLET LIGHT; COLORIMETRY; RADIATION PYROMETRY
    • G01J3/00—Spectrometry; Spectrophotometry; Monochromators; Measuring colours
    • G01J3/02—Details
    • G01J3/0291—Housings; Spectrometer accessories; Spatial arrangement of elements, e.g. folded path arrangements
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01J—MEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT, POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRARED, VISIBLE OR ULTRAVIOLET LIGHT; COLORIMETRY; RADIATION PYROMETRY
    • G01J3/00—Spectrometry; Spectrophotometry; Monochromators; Measuring colours
    • G01J3/28—Investigating the spectrum
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01J—MEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT, POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRARED, VISIBLE OR ULTRAVIOLET LIGHT; COLORIMETRY; RADIATION PYROMETRY
    • G01J3/00—Spectrometry; Spectrophotometry; Monochromators; Measuring colours
    • G01J3/46—Measurement of colour; Colour measuring devices, e.g. colorimeters
    • G01J3/50—Measurement of colour; Colour measuring devices, e.g. colorimeters using electric radiation detectors
    • G01J3/51—Measurement of colour; Colour measuring devices, e.g. colorimeters using electric radiation detectors using colour filters

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  • Physics & Mathematics (AREA)
  • Spectroscopy & Molecular Physics (AREA)
  • General Physics & Mathematics (AREA)
  • Spectrometry And Color Measurement (AREA)
  • Lasers (AREA)
KR1020087001729A 2005-06-27 2006-06-23 높은 반복율의 가스 방전 레이저를 위한 개선된 스펙트럼측정법 Expired - Fee Related KR101364005B1 (ko)

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
US11/169,202 2005-06-27
US11/169,202 US7317536B2 (en) 2005-06-27 2005-06-27 Spectral bandwidth metrology for high repetition rate gas discharge lasers
PCT/US2006/024464 WO2008054346A2 (en) 2005-06-27 2006-06-23 Improved spectral metrology for high repetition rate gas discharge laser

Related Child Applications (1)

Application Number Title Priority Date Filing Date
KR1020127016577A Division KR101280917B1 (ko) 2005-06-27 2006-06-23 높은 반복율의 가스 방전 레이저를 위한 개선된 스펙트럼 측정법

Publications (2)

Publication Number Publication Date
KR20080081890A KR20080081890A (ko) 2008-09-10
KR101364005B1 true KR101364005B1 (ko) 2014-02-17

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KR1020087001729A Expired - Fee Related KR101364005B1 (ko) 2005-06-27 2006-06-23 높은 반복율의 가스 방전 레이저를 위한 개선된 스펙트럼측정법
KR1020127016577A Expired - Fee Related KR101280917B1 (ko) 2005-06-27 2006-06-23 높은 반복율의 가스 방전 레이저를 위한 개선된 스펙트럼 측정법

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Country Status (5)

Country Link
US (1) US7317536B2 (enExample)
EP (1) EP1946054A4 (enExample)
JP (2) JP5270363B2 (enExample)
KR (2) KR101364005B1 (enExample)
WO (1) WO2008054346A2 (enExample)

Families Citing this family (14)

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US7822084B2 (en) * 2006-02-17 2010-10-26 Cymer, Inc. Method and apparatus for stabilizing and tuning the bandwidth of laser light
US7852889B2 (en) * 2006-02-17 2010-12-14 Cymer, Inc. Active spectral control of DUV light source
US7659529B2 (en) * 2007-04-13 2010-02-09 Cymer, Inc. Method and apparatus for vibration reduction in laser system line narrowing unit wavelength selection optical element
US8520186B2 (en) * 2009-08-25 2013-08-27 Cymer, Llc Active spectral control of optical source
US8837536B2 (en) 2010-04-07 2014-09-16 Cymer, Llc Method and apparatus for controlling light bandwidth
US8599381B2 (en) 2011-01-19 2013-12-03 Massachusetts Institute Of Technology Gas detector for atmospheric species detection
US9207119B2 (en) 2012-04-27 2015-12-08 Cymer, Llc Active spectral control during spectrum synthesis
US9715180B2 (en) 2013-06-11 2017-07-25 Cymer, Llc Wafer-based light source parameter control
US9065248B2 (en) * 2013-11-20 2015-06-23 Cymer, Llc Systems and methods to more accurately estimate a fluorine concentration in a source laser
CN104316185B (zh) * 2014-10-29 2017-12-19 中国科学院光电研究院 一种同时监测激光光谱及光谱能量分布的方法和装置
US10288483B2 (en) 2017-04-09 2019-05-14 Cymer, Llc Recovering spectral shape from spatial output
JP6983633B2 (ja) * 2017-11-24 2021-12-17 浜松ホトニクス株式会社 ウェハの検査方法、及びウェハ
WO2019111315A1 (ja) * 2017-12-05 2019-06-13 ギガフォトン株式会社 エキシマレーザ装置、及び電子デバイスの製造方法
CN111175424B (zh) * 2020-02-24 2022-04-08 大连依利特分析仪器有限公司 一种基于多级信号校准的二极管阵列检测器及校准方法

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Also Published As

Publication number Publication date
EP1946054A4 (en) 2011-11-16
KR101280917B1 (ko) 2013-07-02
WO2008054346A2 (en) 2008-05-08
US20070013913A1 (en) 2007-01-18
WO2008054346A3 (en) 2008-10-09
EP1946054A2 (en) 2008-07-23
KR20120089350A (ko) 2012-08-09
JP5270363B2 (ja) 2013-08-21
US7317536B2 (en) 2008-01-08
JP2012198235A (ja) 2012-10-18
JP2009505116A (ja) 2009-02-05
KR20080081890A (ko) 2008-09-10
JP5553860B2 (ja) 2014-07-16

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