JP5270363B2 - 高繰返し率ガス放電レーザ用の改良されたスペクトル測定 - Google Patents

高繰返し率ガス放電レーザ用の改良されたスペクトル測定 Download PDF

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JP5270363B2
JP5270363B2 JP2008542299A JP2008542299A JP5270363B2 JP 5270363 B2 JP5270363 B2 JP 5270363B2 JP 2008542299 A JP2008542299 A JP 2008542299A JP 2008542299 A JP2008542299 A JP 2008542299A JP 5270363 B2 JP5270363 B2 JP 5270363B2
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JP2009505116A5 (enExample
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ロバート ジェイ ラファック
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サイマー インコーポレイテッド
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    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01J—MEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT, POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRARED, VISIBLE OR ULTRAVIOLET LIGHT; COLORIMETRY; RADIATION PYROMETRY
    • G01J3/00—Spectrometry; Spectrophotometry; Monochromators; Measuring colours
    • G01J3/12—Generating the spectrum; Monochromators
    • G01J3/26—Generating the spectrum; Monochromators using multiple reflection, e.g. Fabry-Perot interferometer, variable interference filters
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01J—MEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT, POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRARED, VISIBLE OR ULTRAVIOLET LIGHT; COLORIMETRY; RADIATION PYROMETRY
    • G01J3/00—Spectrometry; Spectrophotometry; Monochromators; Measuring colours
    • G01J3/02—Details
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01J—MEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT, POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRARED, VISIBLE OR ULTRAVIOLET LIGHT; COLORIMETRY; RADIATION PYROMETRY
    • G01J3/00—Spectrometry; Spectrophotometry; Monochromators; Measuring colours
    • G01J3/02—Details
    • G01J3/0202—Mechanical elements; Supports for optical elements
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01J—MEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT, POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRARED, VISIBLE OR ULTRAVIOLET LIGHT; COLORIMETRY; RADIATION PYROMETRY
    • G01J3/00—Spectrometry; Spectrophotometry; Monochromators; Measuring colours
    • G01J3/02—Details
    • G01J3/0205—Optical elements not provided otherwise, e.g. optical manifolds, diffusers, windows
    • G01J3/0237—Adjustable, e.g. focussing
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01J—MEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT, POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRARED, VISIBLE OR ULTRAVIOLET LIGHT; COLORIMETRY; RADIATION PYROMETRY
    • G01J3/00—Spectrometry; Spectrophotometry; Monochromators; Measuring colours
    • G01J3/02—Details
    • G01J3/027—Control of working procedures of a spectrometer; Failure detection; Bandwidth calculation
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01J—MEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT, POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRARED, VISIBLE OR ULTRAVIOLET LIGHT; COLORIMETRY; RADIATION PYROMETRY
    • G01J3/00—Spectrometry; Spectrophotometry; Monochromators; Measuring colours
    • G01J3/02—Details
    • G01J3/0286—Constructional arrangements for compensating for fluctuations caused by temperature, humidity or pressure, or using cooling or temperature stabilization of parts of the device; Controlling the atmosphere inside a spectrometer, e.g. vacuum
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01J—MEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT, POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRARED, VISIBLE OR ULTRAVIOLET LIGHT; COLORIMETRY; RADIATION PYROMETRY
    • G01J3/00—Spectrometry; Spectrophotometry; Monochromators; Measuring colours
    • G01J3/02—Details
    • G01J3/0291—Housings; Spectrometer accessories; Spatial arrangement of elements, e.g. folded path arrangements
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01J—MEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT, POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRARED, VISIBLE OR ULTRAVIOLET LIGHT; COLORIMETRY; RADIATION PYROMETRY
    • G01J3/00—Spectrometry; Spectrophotometry; Monochromators; Measuring colours
    • G01J3/28—Investigating the spectrum
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01J—MEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT, POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRARED, VISIBLE OR ULTRAVIOLET LIGHT; COLORIMETRY; RADIATION PYROMETRY
    • G01J3/00—Spectrometry; Spectrophotometry; Monochromators; Measuring colours
    • G01J3/46—Measurement of colour; Colour measuring devices, e.g. colorimeters
    • G01J3/50—Measurement of colour; Colour measuring devices, e.g. colorimeters using electric radiation detectors
    • G01J3/51—Measurement of colour; Colour measuring devices, e.g. colorimeters using electric radiation detectors using colour filters

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  • Physics & Mathematics (AREA)
  • Spectroscopy & Molecular Physics (AREA)
  • General Physics & Mathematics (AREA)
  • Spectrometry And Color Measurement (AREA)
  • Lasers (AREA)
JP2008542299A 2005-06-27 2006-06-23 高繰返し率ガス放電レーザ用の改良されたスペクトル測定 Active JP5270363B2 (ja)

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
US11/169,202 2005-06-27
US11/169,202 US7317536B2 (en) 2005-06-27 2005-06-27 Spectral bandwidth metrology for high repetition rate gas discharge lasers
PCT/US2006/024464 WO2008054346A2 (en) 2005-06-27 2006-06-23 Improved spectral metrology for high repetition rate gas discharge laser

Related Child Applications (1)

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JP2012129065A Division JP5553860B2 (ja) 2005-06-27 2012-06-06 高繰返し率ガス放電レーザ用の改良されたスペクトル測定

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JP2009505116A JP2009505116A (ja) 2009-02-05
JP2009505116A5 JP2009505116A5 (enExample) 2009-08-06
JP5270363B2 true JP5270363B2 (ja) 2013-08-21

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JP2008542299A Active JP5270363B2 (ja) 2005-06-27 2006-06-23 高繰返し率ガス放電レーザ用の改良されたスペクトル測定
JP2012129065A Active JP5553860B2 (ja) 2005-06-27 2012-06-06 高繰返し率ガス放電レーザ用の改良されたスペクトル測定

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US (1) US7317536B2 (enExample)
EP (1) EP1946054A4 (enExample)
JP (2) JP5270363B2 (enExample)
KR (2) KR101364005B1 (enExample)
WO (1) WO2008054346A2 (enExample)

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US8520186B2 (en) * 2009-08-25 2013-08-27 Cymer, Llc Active spectral control of optical source
US8837536B2 (en) 2010-04-07 2014-09-16 Cymer, Llc Method and apparatus for controlling light bandwidth
US8599381B2 (en) 2011-01-19 2013-12-03 Massachusetts Institute Of Technology Gas detector for atmospheric species detection
US9207119B2 (en) 2012-04-27 2015-12-08 Cymer, Llc Active spectral control during spectrum synthesis
US9715180B2 (en) 2013-06-11 2017-07-25 Cymer, Llc Wafer-based light source parameter control
US9065248B2 (en) * 2013-11-20 2015-06-23 Cymer, Llc Systems and methods to more accurately estimate a fluorine concentration in a source laser
CN104316185B (zh) * 2014-10-29 2017-12-19 中国科学院光电研究院 一种同时监测激光光谱及光谱能量分布的方法和装置
US10288483B2 (en) 2017-04-09 2019-05-14 Cymer, Llc Recovering spectral shape from spatial output
JP6983633B2 (ja) * 2017-11-24 2021-12-17 浜松ホトニクス株式会社 ウェハの検査方法、及びウェハ
WO2019111315A1 (ja) * 2017-12-05 2019-06-13 ギガフォトン株式会社 エキシマレーザ装置、及び電子デバイスの製造方法
CN111175424B (zh) * 2020-02-24 2022-04-08 大连依利特分析仪器有限公司 一种基于多级信号校准的二极管阵列检测器及校准方法

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Also Published As

Publication number Publication date
EP1946054A4 (en) 2011-11-16
KR101280917B1 (ko) 2013-07-02
WO2008054346A2 (en) 2008-05-08
US20070013913A1 (en) 2007-01-18
WO2008054346A3 (en) 2008-10-09
EP1946054A2 (en) 2008-07-23
KR20120089350A (ko) 2012-08-09
US7317536B2 (en) 2008-01-08
JP2012198235A (ja) 2012-10-18
JP2009505116A (ja) 2009-02-05
KR101364005B1 (ko) 2014-02-17
KR20080081890A (ko) 2008-09-10
JP5553860B2 (ja) 2014-07-16

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