KR101359901B1 - Inline autoclave device joining a tray with a chamber - Google Patents

Abstract

The present invention relates to an inline autoclave apparatus for joining a tray with a chamber and more specifically, to an inline autoclave apparatus to join a tray with a chamber which forms a closed space while a tray in which a substrate is safely settled in an autoclave process directly combined with a chamber during movement and performs bubble elimination and adhesion process within the space at the same time. The present invention is able to form a space by raising the tray being closely attached to the chamber in the autoclave process and does not need to be equipped with an additional door or an opening/closing means to form a high pressure space.

Description

INLINE AUTOCLAVE DEVICE JOINING A TRAY WITH A CHAMBER}

The present invention relates to an inline autoclave apparatus in which a tray is coupled to a chamber, and more particularly, in an autoclave process in which a substrate is transported and bonded, a tray on which a substrate is seated directly forms a closed space while directly bonding with a chamber during movement. It relates to an inline autoclave device in which a tray is coupled to a chamber allowing simultaneous bubble removal and adhesion processes in this space.

In general, a conventional autoclave device is used for the purpose of removing bubbles contained in each panel product by arranging a plurality of panel products in a stacked form at the same time and heating and pressurizing them in a sealed state. The substrate product to be processed in such a conventional autoclave device is formed by laminating a substrate and a sheet, so that heating is performed from the outside of the substrate product to be processed. This takes a lot of time, since the internal pressure also takes a long time to reach the desired pressure has the disadvantage of significantly lower productivity.

In order to solve this problem, a technique for reducing the waiting time is disclosed by processing while continuously processing the input and discharge along the inlet and outlet formed in the front and rear ends.

1A is a front view of an autoclave device according to the prior art, and FIG. 1B is a side cross-sectional view showing the configuration of the autoclave device of FIG. 1A.

In the autoclave according to the related art, front and rear doors 22 and 24 are installed at the inlet 12 and the outlet 14 formed in the front and rear of the pressure vessel 10, and the doors 22 and 24 are door opening and closing means ( 30 is slide-opened and closed, the conveying means 70 is installed to be connected to the inlet 12 and outlet 14 of the pressure vessel 10, the pressure vessel 10 on one side of the pressure vessel (10) Pneumatic pressure supply means 40 and the air pressure discharge means 50 is installed in communication with the interior of the inside, the heating means 60 is built in the pressure vessel (10).

The pressure vessel 10 has a drum shape in which the inlet 12 and the outlet 14 are formed in front and rear wall surfaces. Transfer means 70 for transferring the workpiece to the front end of the inlet 12 and the rear end of the discharge port 14 is installed, the transfer means 70 is disposed between the inlet 12 and the discharge port 14, The workpiece is processed while the workpiece is continuously transferred from the inlet 12 of the pressure vessel 10 toward the outlet 14 by the transfer means 70. The conveying means 70 is composed of a roller 70 continuously installed in the front and rear ends of the inlet 12 and the outlet 14 and the inside of the pressure vessel 10, and a motor for driving the roller 70.

The doors 22 and 24 include a front door 22 and a rear door 24 that open and close the inlet 12 and the outlet 14 of the pressure vessel 10. The doors 22 and 24 are connected to the door opening and closing means 30, and slide in the up and down direction of the pressure container 10 in accordance with the operation of the door opening and closing means 30. To and from the outlet 14. The doors 22 and 24 are slide-opened in the transverse direction with respect to the pressure vessel 10, and the front spaces of the inlet 12 and the outlet 14 of the pressure vessel 10 are connected to the doors 22 and 24. Since it is not occupied by, the workpiece transfer means 70 can be installed up to just before the inlet 12 and the outlet 14.

The door opening and closing means 30 includes a cylinder 30 installed in the vertical direction at each of the inlet 12 and the outlet 14 of the pressure vessel 10. As shown in FIG. 1A, the cylinders 30 are installed in pairs spaced apart from each other in the left and right directions of the pressure vessel 10. The lower ends of the piston rods 32 of the pair of cylinders 30 are connected by horizontal bars 11a, and the doors 22 and 24 are coupled to the horizontal bars 11a in an upright direction. . In addition, both ends of the horizontal bar (11a) is slidably coupled to a pair of door guides 11 installed in parallel with the piston rod 32 of the cylinder (30). Accordingly, as the piston rod 32 of the cylinder 30 expands and contracts, the doors 22 and 24 slide along the door guide 11 in the up and down direction of the pressure vessel 10 while the inlet of the pressure vessel 10 is opened. 12 and the discharge port 14 are opened and closed.

In the prior art, however, the workpiece to be introduced enters the inside of the pressure vessel together with the transfer means, and the processing is performed. The total volume of the space inside the pressure vessel is significantly larger than that of the workpiece, and separate opening and closing doors 22 and 24 ) Must be installed. In order to install a plurality of autoclave devices having such a structure, a lot of spaces and facilities are required, and thus there is a problem in that the processing time is large due to the pressure and temperature decrease.

KR 10-2006-0027944 A KR 10-2011-0072155 A

The present invention for solving the above problems is provided with a heating device for pushing up the tray that has been transported in the state in which the substrate is seated upward, the heating device is raised by the clamp close to both sides when the tray is in close contact with the chamber It is an object of the present invention to provide an inline autoclave device in which a tray is coupled to a chamber such that the state is maintained and an autoclaving process is performed in the space formed by the tray and the chamber.

The present invention devised to solve the above problems is to close the tray 130 for transporting the substrate on the conveyor 120 in the autoclave process in close contact with the chamber 160 to form a closed space to proceed the process An autoclave apparatus, comprising: a frame (110) comprising a lower support (111) and an upper cover (112) installed on an upper portion of the lower support (111); A heating device (140) installed to move up and down in the upper cover (112) to move the tray (130) up and down; A pair of left and right lower clamps 150 for generating a pushing force to support the bottom of the heating device 140 while moving in the left and right direction inside the upper cover 112 to fix the heating device 140 upward. Wow; A chamber (160) installed above the tray (130), the bottom surface of which is closed by the rising of the tray (130), and having an autoclave process in a state where the substrate is accommodated in an internal space; And a pair of left and right upper clamps 170 for fixing the tray 130, the heating device 140, and the chamber 160 from being separated from the left and right sides.

The heating device 140 is provided with a cartridge heater 142 for generating heat therein, the upper surface and the heater plate 141 of the flat shape on which the tray 130 is seated; A plate cylinder 143 installed on a bottom surface of the heater plate 141 to move the heater plate 141 up and down; It includes; lower clamp support 144 protruding downward from the bottom edge of the heater plate 141.

The lower clamp 150 includes two or four lower clamp cylinders 151 which are parallel to each other and move in opposite directions in both left and right sides; A support block 152 attached to the rod of the lower clamp cylinder 151 to move in parallel in the horizontal direction; And a roller 153 installed at an upper portion of the support block 152 and rotating in contact with a bottom surface of the lower clamp support 144.

The chamber 160 includes a flat rectangular parallelepiped body 161; A blocking wall 162 protruding relative to a bottom edge of the body 161; An o-ring 163 installed on a surface of the barrier wall 162 to be in close contact with an upper edge of the tray 130; And an air supply unit 164 formed on an upper surface of the body 161 to inject or discharge air into the internal space.

The upper clamp 170 may include two or four upper clamp cylinders 171 moving in opposite directions in parallel to each other at right and left sides; It is installed at the end of the upper clamp cylinder 171, and the U-shaped concave portion of the inner center to hold the heater plate 141, the tray 130, the chamber 160 at the same time to prevent separation, the rail A fixed arm 172 which slides in the left and right directions along 174; And a roller 173 installed at the end of the fixed arm 171 to contact the heater plate 141.

The upper clamp 170 is installed on the upper surface of the fixed arm 172, the sliding block 175 is fixed to the rail 174 to be movable; A lower sliding plate 176 which is installed on an upper surface of the sliding block 175 and has an inclination in a lowering direction as it enters inward from the left and right sides of the autoclave device; It is installed in a fixed state above the lower sliding plate 176, the bottom surface is in contact with the top surface of the lower sliding plate 176, the bottom surface is formed with an inclined surface in the same direction as the lower sliding plate 176 And an upper sliding plate 177.

According to the present invention, in the autoclave process, the tray which is in close contact with the chamber can be raised as it is to form a space, and thus there is no need to provide a separate door or opening and closing means to form a high pressure space.

In addition, according to the present invention, since the tray being transported as it is raised and combined with the chamber, the process can be lowered as it is to be loaded on the conveyor as it is, the effect of the input and discharge of the process is made quickly.

1A is a front view of an autoclave device according to the prior art.
FIG. 1B is a side cross-sectional view showing the configuration of the autoclave device of FIG. 1A. FIG.
Figure 2 is a perspective view showing the structure of an autoclave according to an embodiment of the present invention.
3 is a front view showing the front structure of the autoclave of FIG.
4 is a side view showing the side structure of the autoclave of FIG.
Figure 5 is a perspective view showing a coupling structure of the lower clamp and the heating device.
6 is a side view showing the side structure of FIG.
7 is a perspective view showing a lower structure of the heating apparatus.
8 is a perspective view showing a state in which the lower clamp supports the heating device.
9 is a side view showing the side structure of FIG.
10 is an enlarged view illustrating an enlarged structure of a portion A of FIG. 9;
11 is a perspective view showing the structure of the lower clamp.
12 is a perspective view showing the lower structure of the chamber.
Figure 13 is a perspective view showing a state in which the heating device is coupled to the chamber.
14 is a side view showing the side structure of FIG.
FIG. 15 is an enlarged view illustrating an enlarged structure of part B of FIG. 14;
Figure 16 is a perspective view showing a coupling structure of the upper clamp and the chamber.
17 is a perspective view showing the lower structure of FIG.
18 is a side view showing the side structure of FIG.
19 is a side view showing a state in which the upper clamp is approaching and fixing the heating apparatus in FIG.
20 is an exploded perspective view showing the connection structure of the upper sliding plate and the lower sliding plate.
21 is a cross-sectional view showing a change in height according to the movement of the upper clamp.

Hereinafter, an "in-line autoclave apparatus in which a tray is coupled to a chamber" (hereinafter referred to as an "autoclave") according to an embodiment of the present invention will be described with reference to the drawings.

Figure 2 is a perspective view showing the structure of the autoclave according to an embodiment of the present invention, Figure 3 is a front view showing the front structure of the autoclave of Figure 2, Figure 4 is a side view showing the side structure of the autoclave of Figure 2 .

In the autoclave 100 of the present invention, the substrate (not shown), which is moved along the conveyor 120 while being placed on the tray 130, is introduced into the chamber 160, and the panel, film, and cover are removed while removing gas. It is used for the purpose of bonding etc. The substrate moves on the tray 130 while the substrate is seated, the tray 130 is raised to be coupled with the chamber 160, and adhesion of the substrate into the chamber 160 is performed.

The conveyor 120 is a device for moving the tray 130 in parallel by using a drive device such as a belt, a transfer roller, a chain, and the like, and injects the tray 130 into the frame 110.

The frame 110 includes a lower support 111 and an upper cover 112 installed above the lower support 111 to accommodate devices such as a heating device 140 and a lower clamp 150 in an interior space. . Frame 110 is generally made of a metal material, a light and rigid aluminum profile is mainly used. Conveyor 120 is preferably disposed to penetrate the inside of the upper cover (112).

The heating device 140 is installed to move up and down inside the upper cover 112. The heating device 140 functions to move the substrate and the tray 130 into the chamber 160 by moving upward while the tray 130 is seated. And the heating device 140 is provided with a heating means serves to heat the interior of the chamber 160.

The lower clamp 150 supports the bottom of the heating device 140 while moving in the left and right direction inside the upper cover 112. The lower clamp 150 generates a pushing force so that the heating device 140 is fixed upward, which causes the tray 130 to be in close contact with the upper chamber 160.

The upper clamp 170 serves to hold the tray 130 and the heating device 140 from being separated from the chamber 160 while moving in the left and right directions, such as the lower clamp 150. As the tray 130 is in close contact with the chamber 160 by the upper clamp 170, autoclaving proceeds. The upper clamp 170 is generally installed above the upper cover 112. Since the upper clamp 112 has a function of holding the chamber 160, a part of the body may be exposed to the upper surface of the upper cover 112.

The workpiece to be subjected to autoclaving (substrate, panel, film, etc.) is transported along the conveyor 120 in a state seated on the tray 130 and enters into the upper cover 112. When the tray 130 arrives above the heating device 140, the heating device 140 rises and lifts the tray 130 upward, thereby separating the tray 130 from the conveyor 120. In this state, the tray 130 is no longer transported along the conveyor 120 in parallel.

The upper surface of the tray 130 lifted by the heating device 140 is in close contact with the bottom surface of the chamber 160. As a result, the substrate on the tray 130 enters the inner space of the chamber 160.

The lower clamp 150 pushes the heating device 140 upward while approaching the center and contacting the bottom of the heating device 140. Next, the upper clamp 170 closes to the center to support the bottom surface of the heating device 140. As a result, the tray 130 and the chamber 160 are in close contact with each other, and the inner space is sealed.

As air is injected into the chamber 160, the high pressure state is applied, and in this state, the autoclave process is performed.

When the adhesion of the substrate is completed, the tray 130 is separated from the chamber 160 as the respective devices move in reverse order. The separated tray 130 is lowered and placed on the conveyor 120, and then transferred for the next process.

The structure and operation of each component are described below.

5 is a perspective view showing a coupling structure of the lower clamp and the heating device, Figure 6 is a side view showing the side structure of Figure 5, Figure 7 is a perspective view showing the lower structure of the heating device, Figure 8 is a lower clamp to support the heating device 9 is a side view showing the side structure of FIG. 8, FIG. 10 is an enlarged view showing an enlarged structure of part A of FIG. 9, and FIG. 11 is a perspective view showing the structure of the lower clamp.

The heating device 140 and the lower clamp 150 are installed on the upper surface of the lower support 111 and inside the upper cover 112. The upper portion of the heating device 140 is provided with a flat plate heater plate 141. The heater plate 141 is provided with a cartridge heater 142 therein to produce high temperature heat. The tray 130 is seated on an upper surface of the heater plate 141, and the tray 130 and the substrate are heated by heat generated in the cartridge heater 142. A groove 141a into which a stopper (not illustrated) is inserted into the front surface of the heater plate 141 in the traveling direction is inserted. The movement of the tray 130 is prevented by the stopper, and the same groove 141a is formed in the heater plate 141.

The plate cylinder 143 is installed on the bottom surface of the heater plate 141. The plate cylinder 143 serves to move the heater plate 141 installed on the upper side up and down. The plate plate 143 allows the heater plate 141 to move upward with the chamber 160.

At least one lower clamp support 144 protruding downward is formed at a bottom edge of the heater plate 141. The lower clamp support 144 extends downward by a predetermined length, and the lower clamp 150 contacts the bottom surface of the lower clamp support 144. The lower clamp 150 generates a force for pushing the heating device 140 upward. The lower clamp support 144 is pushed up by the lower clamp 150 so that the heater plate 141 is in close contact with the chamber 160. do.

On the other hand, the lower clamp 150 serves to support the bottom surface of the heater plate 141 while moving in opposite directions from both left and right. To this end, the lower clamp 150 is provided with two or four lower clamp cylinders 151 on both sides. The lower clamp cylinder 151 is installed to move in the opposite direction in parallel with each other in the left and right. Preferably, they are installed in the direction of getting closer to each other or away from each other on the same line.

A support block 152 is attached to the rod of the lower clamp cylinder 151. The support block 152 moves in parallel in the horizontal direction according to the movement of the rod. The roller 153 is installed on the upper portion of the support block 152. The roller 153 is installed so that the center of rotation is placed in the front-rear direction in parallel with the ground. The roller 153 is installed at a height in contact with the bottom surface of the lower clamp support 144 of the heating device 140. When the lower clamp cylinder 151 moves forward, the support block 152 moves to the bottom of the lower clamp support 144, and the roller 153 contacts the bottom of the lower clamp support 144. Since the support block 152 moves in the direction (left and right directions) in which the lower clamp support 144 is located, the roller 153 on which the rotating shaft is placed in the front and rear direction rotates while contacting the bottom surface of the lower clamp support 144. Therefore, the lower clamp 150 may push up the bottom of the heating device 140 while moving smoothly.

The movement of the roller 153 in contact with the bottom surface of the lower clamp support 144 as the support block 152 moves can be seen through FIGS. 8 and 9. In particular, in Figure 10 it can be seen that the contact state of the roller 153 and the lower clamp support 144 is shown in detail.

The support block 152 moves in the left and right directions by the operation of the lower clamp cylinder 151, but the movement direction can be accurately controlled while moving along the rail 154 installed below.

The lower clamp 150 is close to the center and supports the bottom of the heating device 140 after the heater plate 141 is raised and in close contact with the chamber 160.

On the other hand, Figure 12 is a perspective view showing the lower structure of the chamber, Figure 13 is a perspective view showing a state in which the heating device is coupled to the chamber, Figure 14 is a side view showing the side structure of Figure 13, Figure 15 is a portion B of Figure 14 An enlarged view showing an enlarged structure.

The chamber 160 is installed on the upper portion of the inside of the upper cover 112, the upper surface is a structure that can maintain a closed state except the air supply 164. The body 161 of the chamber 160 is made in a substantially flat rectangular parallelepiped shape, the bottom of which is open, and the edge of the bottom of the chamber 160 has a relatively protruding barrier wall 162. As the tray 130 contacts the blocking wall 162, an accommodation space for the autoclave process is formed in the chamber 160.

The O-ring 163 is provided on the surface of the blocking wall 162. When the tray 130 is in close contact with the O-ring 163, the space inside the chamber 160 may be completely sealed to maintain a high pressure state. The o-ring 163 may be made of a material such as urethane, silicone, rubber, stainless steel, or the like used in a general case.

An air hose is connected to the air supply unit 164 to inject or extract air into the chamber 160.

On the other hand, Figure 16 is a perspective view showing a coupling structure of the upper clamp and the chamber, Figure 17 is a perspective view showing the lower structure of Figure 16, Figure 18 is a side view showing the side structure of Figure 16, Figure 19 is an upper clamp in Figure 18 It is a side view which showed the state which approached and fixed the heating apparatus.

The upper clamp 170 serves to fix the heating device 140 that pushes up the tray 130 to maintain a firm coupling state with the chamber 160. When the heater plate 141 is raised and the tray 130 is in close contact with the bottom surface of the chamber 160, the upper and left upper clamps 170 move to the center and contact the bottom surface of the heater plate 141. The upper clamp 170 is fixed so that the heater plate 141 is not lowered by the lower portion of the c-shaped.

The upper clamp 170 has two or four upper clamp cylinders 171 moving in opposite directions parallel to each other on both sides. The fixed arm 172 is installed in the end of the upper clamp cylinder 171 in a symmetrical state facing each other.

Fixed arm 172 is a substantially U-shaped device, the recessed portion is installed to face each other from left and right. And when the fixed arm 172 gathers in the center, the concave portion of the inner center grips the heater plate 141, the tray 130, and the chamber 160 at the same time. The heater plate 141 is in close contact with the tray 130 and the chamber 160 in the order of overlapping from the bottom, the fixed arm 172 is simultaneously on the bottom of the heater plate 141, and the upper surface of the chamber 160 Contact. A roller 173 is provided at the end of the fixed arm 172 in contact with the bottom surface of the heater plate 141 to reduce friction with the heater plate 141 when the fixed arm 172 moves.

The fixed arm 172 may move along the rail 174 to precisely control the direction and the moving distance.

 The heater plate 141, the tray 130, and the chamber 160 remain in close contact with each other inside the fixed arm 172, unless the fixed arm 172 retreats backward. Due to the condition, the tray 130 and the chamber 160 are not separated during the autoclave process.

On the other hand, Figure 20 is an exploded perspective view showing a connection structure of the upper sliding plate and the lower sliding plate, Figure 21 is a cross-sectional view showing the height change according to the movement of the upper clamp.

The upper clamps 170 are installed at the left and right sides to fix the tray 130 and the chamber 160 while moving toward the center. When the thickness of the tray 130 or the height of the chamber 160 is changed, the upper clamp 170 is not firmly fixed. Does not cause problems. The present invention forms a structure that the height can be changed when the upper clamp 170 is moved in order to be able to use the device having a variety of thickness or height.

20 illustrates a structure of the components constituting the upper portion of the fixed arm 172. The sliding block 175 is installed on the upper surface of the fixed arm 172. The sliding block 175 is movably fixed to the rail 174 and performs a sliding movement along the longitudinal direction of the rail 174 (left and right directions of the autoclave). The lower sliding plate 176 is installed on the upper surface of the sliding block 175. Accordingly, when the fixed arm 172 moves by the upper clamp cylinder 171, the sliding block 175 and the lower sliding plate 176 move together.

The upper sliding plate 177 is installed in a separate component fixed so that the fixed arm 172 does not move together. The upper sliding plate 177 is positioned above the lower sliding plate 176, and the bottom surface of the upper sliding plate 177 moves in contact with the upper surface of the lower sliding plate 176.

However, the bottom surface of the upper sliding plate 177 and the upper surface of the lower sliding plate 176 are made in a form inclined at a predetermined angle. The angles formed on the respective surfaces are the same, and the two sliding plates 176 and 177 move in parallel along the surfaces in contact with each other by making the angles flat.

In the present invention, the upper surface of the lower sliding plate 176 is inclined in the direction of lowering while entering inward from the left and right of the autoclave 100. That is, the plate attached to the fixed arm 172 on the right is lowered in a way that goes to the left, the plate attached to the fixed arm 172 on the left is lowered to the right to form a slope.

And the bottom surface of the upper sliding plate 177 in contact with the inclined surface is formed in the same direction. That is, the bottom of the plate on the upper side of the fixed arm 172 on the right side is formed in the inclined surface in the direction of lowering the height to the left, the bottom of the plate on the upper side of the fixed arm 172 on the left goes to the right An inclined surface is formed in a direction of decreasing height.

When the fixed arm 172 slides in the center direction in the state having such a structure, the lower sliding plate 176 moves along the bottom surface of the upper sliding plate 177, and the bottom surface of the upper sliding plate 177 is The lower sliding plate 176 is also lowered down because the shape is gradually down. This causes the fixed arm 172 to move downward. Since the fixed arm 172 on the opposite side is moved in the same manner, the fixed arms 172 on both the left and right sides are gathered toward the center while being slightly lowered.

On the contrary, when the fixed arm 172 opens in the left and right directions, the fixed arm 172 moves in the opposite direction, and thus the fixed arms 172 on both the left and right sides rise slightly upward. In the autoclave 100 of the present invention, by adjusting the angle of the inclined surface formed on the upper and lower surfaces of the lower sliding plate 176 and the upper sliding plate 177, the vertical movement distance of the fixed arm 172 can be freely adjusted. .

While the present invention has been described with reference to exemplary embodiments, it is to be understood that the invention is not limited to the disclosed embodiments, but, on the contrary, As will be understood by those skilled in the art. Therefore, it should be understood that the above-described embodiments are to be considered in all respects as illustrative and not restrictive, the scope of the invention being indicated by the appended claims rather than the foregoing description, It is intended that all changes and modifications derived from the equivalent concept be included within the scope of the present invention.

100: autoclave 110: frame
111: lower support 112: upper cover
120: conveyor 130: tray
140: heating device 141: heater plate
142: cartridge heater 143: plate cylinder
144: lower clamp support 150: lower clamp
151: lower clamp cylinder 152: support block
153: roller 154: rail
160: chamber 161: body
162: barrier wall 163: O-ring
164: air supply unit 170: upper clamp
171: upper clamp cylinder 172: fixed arm
173: roller 174: rail
1 75: sliding block 176: lower sliding plate
177: upper sliding plate

Claims (6)

In the autoclave process, the tray 130 for transporting the substrate on the conveyor 120 is in close contact with the chamber 160 to form an airtight space.
A frame 110 formed of a lower support 111 and an upper cover 112 installed on an upper portion of the lower support 111;
A heating device (140) installed to move up and down in the upper cover (112) to move the tray (130) up and down;
A pair of left and right lower clamps 150 for generating a pushing force to support the bottom of the heating device 140 while moving in the left and right direction inside the upper cover 112 to fix the heating device 140 upward. Wow;
A chamber (160) installed above the tray (130), the bottom surface of which is closed by the rising of the tray (130), and having an autoclave process in a state where the substrate is accommodated in an internal space;
A tray is coupled to the chamber, including a pair of left and right upper clamps 170 for accessing the tray 130, the heating device 140, and the chamber 160 from separation from both sides. Inline autoclave device. The method of claim 1,
The heating device 140 is
A cartridge heater 142 generating heat therein, and a flat heater plate 141 on which the tray 130 is seated;
A plate cylinder 143 installed on a bottom surface of the heater plate 141 to move the heater plate 141 up and down;
And a lower clamp support (144) protruding downward from the bottom edge of the heater plate (141). 3. The method of claim 2,
The lower clamp 150 is
Two or four lower clamp cylinders 151 moving in parallel and opposite directions on both left and right sides;
A support block 152 attached to the rod of the lower clamp cylinder 151 to move in parallel in the horizontal direction;
And a roller (153) installed on an upper portion of the support block (152) and rotating in contact with the bottom surface of the lower clamp support (144). 3. The method of claim 2,
The chamber 160 is
A flat rectangular parallelepiped body 161;
A blocking wall 162 protruding relative to a bottom edge of the body 161;
An o-ring 163 installed on a surface of the barrier wall 162 to be in close contact with an upper edge of the tray 130;
And an air supply unit (164) formed on an upper surface of the body (161) to inject or discharge air into the internal space. 3. The method of claim 2,
The upper clamp 170 is
Two or four upper clamp cylinders 171 moving in opposite directions parallel to each other on both left and right sides;
It is installed at the end of the upper clamp cylinder 171, and the U-shaped concave portion of the inner center to hold the heater plate 141, the tray 130, the chamber 160 at the same time to prevent separation, the rail A fixed arm 172 which slides in the left and right directions along 174;
And a roller (173) installed at the end of the fixed arm (171) in contact with the heater plate (141). The tray is coupled to the chamber. 6. The method of claim 5,
The upper clamp 170 is
A sliding block 175 installed on an upper surface of the fixed arm 172 and movably fixed to the rail 174;
A lower sliding plate 176 which is installed on an upper surface of the sliding block 175 and has an inclination in a lowering direction as it enters inward from the left and right sides of the autoclave device;
It is installed in a fixed state above the lower sliding plate 176, the bottom surface is in contact with the top surface of the lower sliding plate 176, the bottom surface is formed with an inclined surface in the same direction as the lower sliding plate 176 And an upper sliding plate (177); wherein the tray is coupled to the chamber.

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