KR101335666B1 - Sealing device for the valve-door and vacuum isolation apparatus using it - Google Patents

Abstract

The present invention relates to a vacuum blocking device capable of shielding an entrance and exit formed in a working chamber, and more particularly, to a vacuum blocking device having a structure corresponding to thermal expansion and a valve sealing body used therein. The present invention can move the door opening and closing means including a valve plate for blocking the entrance and exit of the chamber to one side of the entrance, is connected to the housing forming the entrance, the support is formed with a through hole A plurality of cylinders including a panel, a cylinder housing slidably mounted to a rear side of the support panel, a piston rod extendable from the cylinder housing and coupled to the door opening and closing means through the through hole; An airtight wrap around the piston rod is provided, and the vacuum blocking device includes a valve sealing body coupled to the through hole and slidable along a longitudinal direction of the support panel.

Description

Sealing device for the valve-door and vacuum isolation apparatus using it}

The present invention relates to a vacuum blocking device capable of shielding an entrance and exit formed in a working chamber, and more particularly, to a vacuum blocking device having a structure corresponding to thermal expansion and a valve sealing body used therein.

The liquid crystal panel (eg, FPD) used in the image display apparatus needs to be processed in various vacuum regions according to low vacuum and ultra high vacuum, and a plurality of working chambers are intensively or sequentially lined to realize a vacuum state. Is formed. The entrance and exit of each working chamber is provided with a vacuum shutoff device such as a slot valve for maintaining a vacuum state therein.

The entrance and exit of the chamber has a limited area to the level required for the movement of the liquid crystal panel in order to maintain different vacuum conditions inside and outside. Normally, the entrance and exit is long in one direction and relatively short in width, such as the cross section of a plate such as a liquid crystal panel. According to the shape of the entrance and exit is formed a vacuum blocking device elongated to one side.

A general vacuum interrupting device is provided with a valve plate protruding toward an open entrance to block the entrance. This valve plate is operated by a plurality of air cylinders. In addition, the valve plate is installed to move to one side of the entrance for the movement of the liquid crystal panel, which is in charge of a pair of cylinders coupled to both ends of the long valve plate.

On the other hand, the internal environment of each chamber is different depending on the process. In particular, the interior of the chamber that handles the plasma has a high temperature environment, resulting in thermal expansion throughout the chamber, including the entrance and exit. The repetition of thermal expansion of such chambers causes a problem of structural stability, so that the chamber including the entrance is equipped with cooling means. However, the conventional vacuum interrupter is not provided with a separate countermeasure against thermal expansion. Failure to compensate for the extended length of the thermally expanded valve plate may cause problems such as stress concentration on the piston shaft of the cylinder for elevating the valve plate, resulting in poor reliability of the vacuum interrupter. In particular, when the entrance and the valve plate is made longer in accordance with the trend of the larger size of the liquid crystal panel in recent years, the increase in the length of the valve plate due to thermal expansion is further weighted, and it has become important to develop a vacuum circuit breaker to compensate for thermal expansion.

SUMMARY OF THE INVENTION The present invention has been made to solve the above-described problems, and is intended to enable a vacuum interruption device to cope with thermal expansion such as a valve plate that blocks an entrance and exit of a chamber.

In order to solve the above problems, the present invention provides an embodiment of the present invention, which is mounted to a support panel of a housing forming an entrance and exit of a chamber, and is connected to a rear door of an opening and closing means having a valve plate protruding to block the entrance and exit. And a plurality of cylinders connected to the door opening and closing means through each of the through holes, wherein a cylinder on one side in the longitudinal direction of the support panel is fixed to the support panel, and the remaining cylinders are supported by the support panel. The present invention provides a vacuum interrupter whose position can be moved along the longitudinal direction of the panel.

Specifically, the opening and closing means including a valve plate for blocking the entrance and exit of the chamber to move to one side of the entrance, the support panel is connected to the housing forming the entrance, the through-hole is formed, the A plurality of cylinders including a cylinder housing slidably mounted on a rear side of the support panel, a piston rod extendable from the cylinder housing and passing through the through hole and coupled to the door opening and closing means; and the piston rod. It surrounds hermetically around, and is coupled to the through-hole includes a valve sealing body that is slidable along the longitudinal direction of the support panel.

In this case, a sliding means for sliding the cylinder with respect to the support panel is provided, the sliding means is spaced around the through hole, the support is coupled to the back of the support panel, the through hole is spaced apart from the support At least one guide rod slidably coupled to the support along the longitudinal direction of the panel and coupled to the guide rod, may further include a sliding case coupled to the cylinder housing of the cylinder. In addition, the sliding case may be a hexahedron opened toward the support panel.

Meanwhile, a periphery of the inner circumferential surface of the through hole is recessed to form a disk-shaped flow space, and the valve sealing body may be slidably mounted in the through hole and the flow space.

In addition, the valve sealing body specifically includes a cylindrical portion formed with a through hole surrounding the circumference of the piston rod, a flange extending from the outer peripheral surface of the cylindrical portion is inserted into the flow hole, the outer diameter of the cylindrical portion is through It is smaller than the inner diameter of the hole, the outer diameter of the flange may be smaller than the inner diameter of the flow space.

On the other hand, the inner circumferential surface of the through hole is provided with a plurality of seals surrounding the circumference of the piston rod, the seals toward the upper surface from the back of the support panel, at least one first seal having a plurality of contacts with the piston rod It may include at least one second seal capable of scraping off the lubricant applied to the piston rod, at least one third seal to separate the foreign matter attached to the piston rod.

In particular, the cross section of the first ring may have a cross shape, and the cross section of the second ring may have an English U shape open toward the rear surface of the support panel.

In addition, a fourth seal may be mounted on each of the upper and lower surfaces of the flange and in contact with the ceiling and bottom surfaces of the flow space.

In the valve sealing body according to the embodiment of the present invention, a through hole is formed, and the inner circumferential surface of the through hole protrudes from a cylindrical portion having a plurality of seals mounted thereon, and an outer circumferential surface of the cylindrical portion, and seals are formed at the edges of the upper and lower surfaces. A central hole corresponding to the through hole may be formed on the flange to be mounted and the upper portion of the cylindrical part, and an inner circumferential surface of the central hole may include a cover body to which a seal can be mounted.

Here, one end of the through-hole is enlarged to form an expansion portion capable of stacking a pair of seals, and the pair of seals mounted on the extension part may be detachably coupled to one end of the cylindrical portion. Position can be fixed.

In addition, the cross section of the seal mounted to the extension may be a lip protruding in the direction opposite to the cover body.

Furthermore, sealing grooves spaced apart from each other are formed at the other end of the through hole, and a cross section of the seals mounted on the sealing grooves may have a cross shape.

According to an embodiment of the present invention, the vacuum breaker that can control the chamber to solve the problems such as damage of the cylinder due to thermal expansion, thereby preventing fatigue damage of components such as the cylinder, thereby increasing the life Has

In addition, the valve sealing body is capable of effectively sealing the piston rod while sliding in the support panel, and has the effect of replacing the conventional bellows. In particular, each of the seals provided inside the valve sealing body penetrates the valve sealing body and effectively prevents air from leaking into the housing by the piston rod which repeats the reciprocating motion, while preventing the scattering of lubricant and the piston rod by the foreign matter. Prevents damage and improves the reliability of the vacuum interrupter.

1 is a perspective view schematically showing a state of use of the vacuum interrupter according to an embodiment of the present invention.
2 is a perspective view of an essential part of the vacuum interrupter shown in FIG.
Figure 3 is an exploded perspective view of the main part of the vacuum cut-off device shown in FIG.
Figure 4 is an exploded perspective view of the valve sealing body according to an embodiment of the present invention.
5 is a cross-sectional view of the valve sealing body shown in FIG. 4 assembled;
6 is a cross-sectional view showing a state of use of the vacuum interrupter shown in FIG.
FIG. 7 is an enlarged cross-sectional view of a portion shown in FIG. 6. FIG.
8 is a cross-sectional view showing another use state of the paper cutting device shown in FIG.

Hereinafter, with reference to the accompanying drawings will be described the configuration, function and operation of the valve sealing body and the vacuum interrupter using the same according to an embodiment of the present invention.

The terms first, second, etc. may be used to describe various elements, but the elements should not be limited by the terms. The terms are used only for the purpose of distinguishing one component from another. For example, without departing from the scope of the present invention, the first component may be referred to as a second component, and similarly, the second component may also be referred to as a first component. In addition, singular forms include plural forms unless the context clearly indicates otherwise.

1 shows a specific use example in which a vacuum interrupter is used.

The entrance and exit 70 of the chamber is formed to correspond to the front panel 72 and the rear panel 73 facing the housing 7, respectively. The housing 7 is an empty hexahedron and the open lower part is blocked by the support panel 71 so that the inner space of the housing is hermetically sealed with respect to the outer space. The front panel 72 and the rear panel 73 are in communication with the front first working chamber C1 and the rear second working chamber C2, respectively. Process conditions in the first working chamber (C1) and the second working chamber (C2) may be different from each other, for example, the first working chamber (C1) has a process conditions of ultra-vacuum, room temperature, the second operation The chamber C2 may have relatively low vacuum and high temperature processing conditions.

On the other hand, the housing is not necessarily provided as a hexahedron as shown. Although not shown, the entrance is formed in the inner wall of the chamber, it may be fixed vertically on the inner wall surface of the periphery of the entrance of the support panel. Even in such a case, it is possible to configure a vacuum interruption device that is coupled to the support panel to block the entrance and exit.

Vacuum blocking device 10 according to an embodiment of the present invention is to position the door opening and closing means (1) that can block the doorway to the height of the doorway 70 or lower than the doorway 70, the support panel 71 Cylinders 2a and 2b coupled to

Specifically, the door opening and closing means 1 includes a valve plate 11 that can block the door. The valve plate 11 is a plate member having a length corresponding to the entrance and exit, and the front face is surrounded by a seal facing the entrance and exit 70. The valve plate 11 is coupled to protrude from one side of the support plate 12 having a length corresponding to the entrance and exit. Although not specifically illustrated, as is known, a plurality of air cylinders are installed in the support plate along the longitudinal direction of the support plate, and the rear surface of the valve plate is coupled to the piston of the air cylinder. Thus, the valve plate can protrude relative to the support plate by the operation of the air cylinders.

Furthermore, the valve plate may be provided at both the front and the rear of the support plate, in which case the valve plate may block the entrance and exit of the front panel and the entrance and exit of the rear panel, respectively.

In addition, the door opening and closing means may protrude the valve plate toward the doorway, and may be replaced with other components that can pressurize the valve plate around the doorway at a constant pressure.

In order for a work object such as a liquid crystal panel to pass through the doorway, the door opening / closing means 1 must be moved toward one side of the doorway 70 (the lower direction in the drawing). This door opening and closing means 1 is moved by the cylinders 2a and 2b installed on the support panel 71.

1 and 2 show the support panel and the cylinders.

Cylinders 2a and 2b are mounted on the rear surfaces of both ends of the support panel 71 in the longitudinal direction. The piston rod 22 of each cylinder 2a, 2b protrudes to the upper surface of the support panel 71. As shown in FIG. The end of the piston rod 22 is coupled to the support plate 12.

When the door opening and closing means is heated and thermally expanded according to the high temperature condition in the working chamber, the influence of the expansion along the longitudinal direction of the door opening and closing means 1 on the cylinder is large. Therefore, as shown in FIG. 2, the cylinder 2a on one side in the longitudinal direction of the support panel 71 is fixed to the support panel, and the remaining cylinders 2b are along the longitudinal direction of the support panel 71. By making the position moveable, it is possible to cope with thermal expansion along the longitudinal direction of the door opening and closing means. In other words, one cylinder is fixed in position and the other cylinder is slidably provided with respect to the support panel to change the cylinder on the other side according to the thermal expansion of the door opening and closing means. As a result, concentration of stress applied to the cylinder housing coupled to the piston rod and the support panel according to the thermal expansion of the door opening and closing means can be avoided, thereby preventing damage to the cylinder.

Although not shown, the door opening and closing means may be formed longer, and three or more cylinders may be mounted to stably support the door opening and closing means. In this case, the center cylinder can be configured to fix the position and to accommodate the thermal expansion of the opening and closing means by the other cylinders are slidably installed with respect to the support panel.

Hereinafter, referring to FIGS. 3 to 5, the coupling structure of the cylinder to the support panel and the valve sealing body used therein will be described in detail.

The support panel 71 is formed with a recessed groove 711 having a rectangular cross section, and a through hole 712 through which the piston rod 22 passes is formed at the bottom surface of the recessed groove 711. The inner diameter of the through hole 712 is larger than the outer diameter of the piston rod 22. The recessed groove 711 is provided with a valve sealing body 3 surrounding the circumference of the piston rod 22 to seal the inside of the housing.

The valve sealing body 3 includes a cylindrical portion 31 surrounding the piston rod 22 and a flange 32 protruding from the outer circumferential surface of the cylindrical portion. In order to accommodate the flange 32, the periphery of the through hole 712 is formed to be recessed in a circular shape at the bottom surface of the recessed groove 711. The cover plate 713 having a hole corresponding to the through hole 712 is coupled to the periphery of the bottom recessed in this circle.

By the coupling of the cover plate 713, a cylindrical through hole 712 and a flow space recessed in a disc shape in the inner circumferential surface of the through hole (see 715 in FIG. 7) are formed. The flange 32 of the valve sealing body 3 is constrained in this flow space so as not to move in the thickness direction of the support panel.

At this time, the outer diameter of the cylindrical portion 31 of the valve sealing body 3 is smaller than the inner diameter of the through hole 712. The outer diameter of the flange 32 is smaller than the inner diameter of the flow space. As a result, the valve sealing body 3 is movable in the same plane as the support panel 71 inside the recessed groove 711.

On the other hand, by moving the cylinder 2b in parallel with the longitudinal direction of the support panel 71, it is composed of a support (41), a guide rod 42 and a sliding case 43 provided on the rear surface of the support panel 71. There is a sliding means (4).

The pair of supports 41 are coupled to the periphery of the through hole 712 at the rear surface of the support panel 71. Each support 41 forms a direction perpendicular to the longitudinal direction of the support panel 71, and is coupled to both sides side by side based on the through-hole 712. In addition, the support 41 is formed with a pair of holes 411 facing each other.

The guide rods 42 are slidably coupled to the holes 411 of the support 41 in a direction parallel to the longitudinal direction of the support panel. The through hole 712 is positioned between the guide bars 42 so that the guide bar 42 does not cover the through hole 712.

The sliding case 43 is coupled to both ends of the guide rod 42. In addition, the cylinder housing 21 is coupled to the sliding case 43. Therefore, the cylinder 2b, the sliding case 43, and the guide rod 42 are integral with each other and slide along the longitudinal direction of the support panel 71.

Further, although not necessarily required, the sliding case 43 is made of a hexahedron with one side open toward the support panel 71. The open circumference of one side is close to the moving sheet (see 714 of FIG. 6) recessed on the back of the support panel 71. Since the sliding case 43 has a box shape and surrounds the guide rod 42 and the support 41, it is possible for foreign matter to enter the guide rod 42, the support 41, or the through hole 712. It becomes possible to prevent it.

At this time, the number of holes of the support and the number of guide rods may be composed of one or more than three. In addition, it is possible to replace the sliding means described above to allow the sliding of the cylinder housing in the longitudinal direction of the support panel, the sliding means of other configurations such as ball spline, LM guide, etc. to prevent the cylinder housing from being separated from the support panel is applied. Can be.

The cylinder 2b can be moved along the longitudinal direction of the support panel 71 by the sliding means 4, and the valve sealing body 3 for enclosing and sealing the piston rod 22 of the cylinder 2b is penetrated. Since the support panel 71 is slidable in the longitudinal direction of the hole 712 and the flow space, the cylinder is hermetically maintained to maintain a vacuum inside the housing and at the same time, the cylinder can be moved relative to the support panel.

4 to 5 and 7 show a specific embodiment of the valve sealing body.

The valve sealing body 3 includes a cylindrical portion 31 which is engageable around the piston rod, a flange 32 protruding from the outer circumferential surface of the cylindrical portion 31, and a cover body 33. At this time, the cover body 33 can be manufactured to form a cylindrical body 31 and one body.

The cylindrical portion 31 is formed with a through hole 311 for wrapping the circumference of the piston rod. A plurality of seals are mounted on the inner circumferential surface of the passage hole 311.

The flange 32 protrudes from the outer peripheral surface of the cylindrical part 31. Sealing can be attached to the upper and lower edges of the flange 32.

In addition, the cover body 33 is coupled to the upper portion of the cylindrical portion 31 using a known fixing means such as a screw, the cover body 33 is formed with a through hole 311 and a concentric central hole 331 have. The center hole 331 is opposed to the piston rod 22 similarly to the passage hole 311. The inner circumferential surface of the central hole 331 can be mounted with a seal.

The seals mounted on the valve sealing body 3 are at least one first seal 61 having a plurality of contacts with the piston rod 22 from the back of the support panel, and at least one that can scrape the lubricant applied to the piston rod. The second seal 62 and at least one third seal 63 for separating the foreign matter attached to the piston rod is sequentially installed toward the upper surface of the support panel.

The first sealing 61 is mounted in the sealing grooves 311a spaced apart from the passage hole 311, and a cross section thereof has a cross shape. Specifically, the cross section of the first seal 61 has a substantially rectangular cross section, and each corner 611 is rounded. Further, the sides of the rectangle are recessed toward the center, and the cross section is similar to a four leaf clover. As a result, the pair of protrusions 612 protruding from the upper and lower inner surfaces of the first sealing 61 come into contact with the piston rod 22 at two portions.

Alternatively, the first seal may be formed with a plurality of ribs to contact the piston rod in two or more places.

The first seal can effectively block the air from outside the housing from entering the inside of the housing in a vacuum state by contacting the circumference of the piston rod and the plurality of contacts. In addition, the first sealing may be more effectively prevented from entering the outside air into the housing as a plurality of the first seal is provided in the longitudinal direction of the piston rod.

On the other hand, the cross section of the second seal 62 has a shape of the letter 'U' opened in the opposite direction to the direction toward the cover body 33, that is, toward the rear surface 71a of the support panel 71. The lip 621 which folds on the outer circumferential surface of the piston rod 22 protrudes toward the rear surface 71a of the support panel 71, so that the lip 621 protruding when the piston rod 22 is raised is the piston rod 22. Grease (not shown) applied to the grease can be scraped off. In addition, an empty space 622 is formed inside the protruding lip 621 so that a part of the excess lubricant scraped off fills the space 622. The second seal may be provided with a plurality along the longitudinal direction of the piston rod. In addition to scraping off the lubricant, the second seal also serves to prevent air from entering the housing by contacting the circumference of the piston rod.

Meanwhile, the third seal 63 is mounted on the inner circumferential surface of the central hole 331 of the cover body 33. Since the cover body can be manufactured integrally with the cylindrical part, in this case, the third seal is mounted on the upper part of the cylindrical part, that is, the upper part of the passage hole toward the opening and closing means.

The third seal has a function of releasing foreign matter from the piston rod to prevent foreign matter attached to the piston rod from reaching the second seal or the first seal, a function of preventing air from the outside of the housing from entering the inside of the housing, and scraping of lubricant. Has the function. In this case, the foreign matter may be small pieces or dust that are mainly separated from the workpiece while passing through the inside of the housing.

In addition, although not shown, a plurality of third seals may be installed.

On the other hand, as a structure for mounting the second seal 62, one end of the through-hole 311 is formed to form an expansion portion 312, the inner diameter of the pair can be stacked, the expansion portion 312, this expansion portion 312 The pair of second seals 62 may be mounted on the cover, and the cover body 33 may be configured to fix the position of the second seals 62.

The expanded portion 312 having an enlarged inner diameter is opened toward one end of the passage hole 311. Accordingly, the second seals 62 may be loaded and the cover body 33 may be coupled to one end of the cylindrical portion 31 to prevent the second seal 62 from falling out. In this case, at least one spacer P for pressing the upper end of the second seal 62 may be further interposed between the cover body 33 and the second seal 62.

When the cover body is separated from the cylindrical part, since the extension part is exposed, it has an advantage that it is easy to replace the second seal which has reached the end of life or is damaged. In addition, since the second sealing structure is sequentially stacked, the plurality of second sealing can be easily replaced at a time.

On the other hand, the upper and lower surfaces of the flange 32 are provided with a fourth sealing 64 in contact with the ceiling surface 715a and the bottom surface 715b of the flow space 715. The portion where the fourth seal 64 is mounted on the upper surface of the flange 32 protrudes toward the ceiling surface 715a of the flow space 715 to form the sheet 321. A recessed sealing seat 322 is formed in the seat 321, and the fourth sealing 64 is mounted to the sealing seat 322. Such seats and sealing seats are formed symmetrically on the lower surface of the flange.

The fourth seals seal the space between the flow space and the flange, thereby preventing outside air from entering the interior of the housing.

The above-mentioned seals are not limited to the ones shown, but may be replaced with seals of other configurations that smoothly perform respective functions such as separation of lubricant, removal of foreign matter, optimization of airtightness, and the like.

In the present invention, since the valve sealing body is in contact with the piston rod and the support panel through the seals, the interior space of the housing can be sufficiently sealed. Therefore, the valve sealing body according to the present invention can replace the bellows used in the prior art. Normally, bellows that can be used in a high vacuum environment require high cost, are easily vulnerable to being torn by sharp foreign objects, and have a relatively short life. However, the valve sealing body according to the present invention can overcome the disadvantages of the existing bellows, and has the advantage that the structure can also be simplified.

2 and 6 to 8, the operation of the vacuum interrupter according to the embodiment shown will be described.

In FIG. 2, the cylinder 2a mounted at one end of the door opening and closing means is fixed in position with respect to the support panel 71, so as to match the installation height with the cylinder 2b slidably mounted with respect to the support panel at the other end. The member having the same protruding length as the sliding means of the cylinder provided at the other end is coupled to the support panel in the state.

6 and 7 are cross-sectional views showing the coupling relationship of the cylinder coupled to the other side of the support panel.

The valve sealing body 3 is provided so that the center of the through-hole 712 of the support panel 71 and the center of the through-hole 311 are substantially the same. Therefore, the inner circumferential surface of the through hole 712 and the outer circumferential surface of the cylindrical portion 31 are spaced apart from each other on the left and right sides. In addition, the flange 32 is inserted into the flow space 715, and the edges of both ends of the flange 32 are also spaced apart from both ends of the inner circumferential surface of the flow space 715. The fourth seal 64 attached to the flange 32 is in contact with the flow space 715 and shields the housing inner space above the support panel 71.

On the other hand, the cylinder housing 21 is coupled to the sliding case 43, the guide rod 42 to which the sliding case 43 is coupled, by the support (41) fixed to the support panel 71 by the support panel ( It is coupled to the back surface 71a of 71. In addition, the piston rod 22 of the cylinder 2b extends above the support panel 71 through the passage hole 311 of the valve sealing body 3 and is connected to the door opening and closing means 1. .

Each of the seals 61 to 63 provided in the passage hole 311 is hermetically sealed between the piston rod 22 and the valve sealing body 3. When the piston rod 22 is lowered and attached to the piston rod 22 and the foreign matter to penetrate the through-hole 712 is blocked by the third sealing provided in the central hole 331 of the cover body 33. Therefore, it is possible to prevent the piston rod and other seals from being damaged due to foreign matter intrusion.

In addition, when the piston rod 22 is raised, the lubricant applied around the piston rod 22 is mostly removed by the second seals 62 provided at the center portion of the passage hole 311. Therefore, the lubricant applied to the piston rod is scattered in the vacuum state inside the housing to solve the problem of contaminating a work object such as a liquid crystal panel.

In addition, during the reciprocating operation of the piston rod 22, the airtightness of the inner space of the housing is smoothly achieved by the first sealings 61 which are in multi-contact with the piston rod 22 at the lower end of the passage hole 311. .

On the other hand, Figure 8 is a cross-sectional view showing a state in which the piston is moved to the right with respect to the support panel as the door opening and closing means is thermally expanded.

The piston rod 22 is horizontally moved in the right direction of the drawing by thermal expansion of the opening and closing means. As a result, the valve sealing body 3 surrounding the piston rod 22 is also moved in the right direction with respect to the support panel 71 as shown.

In addition, the cylinder housing 21, the sliding case 43 and the guide rod 42 moves to the right with respect to the support 41 by the horizontal movement of the piston rod 22, so that the cylinder itself moves to the right.

The movement of the cylinder can be made freely in the longitudinal direction of the support panel according to the thermal expansion of the door opening and closing means. In this way, the cylinder is movable in the support panel in accordance with the thermal expansion and exit opening and closing means to solve the problems caused by the thermal expansion.

10: vacuum interrupter
1: opening and closing means
11 valve plate 12 support plate
2a, 2b: cylinder
21: cylinder housing 22: piston rod
3: valve sealing body
31: cylindrical portion 311: through hole 311a: sealing groove
312 extension part P spacer 32 flange
321: seat 322: sealing seat 33: cover body 331: central hole
4: sliding means
41: support 411: hole 42: guide rod 43: sliding case
61,62,63,64: Shilling
611: corner 612: protrusion 621: lip 622: space
7: Housing
71: support panel 71a: rear 711: recessed groove
712: through hole 713: cover plate 714: moving sheet
715: fluid space 715a: ceiling 715b: floor
72: front panel 73: rear panel 70: doorway
C1, C2: Working chamber

Claims (14)

It is mounted to the support panel of the housing forming the entrance and exit of the chamber,
Door opening and closing means having a valve plate protruding to block the door,
A plurality of cylinders connected to the support panel having a through hole formed therein and connected to the door opening and closing means through the through hole;
Including;
The cylinder connected to one side of the support panel is fixed to the support panel, the cylinder connected to the other side of the support panel is connected to the support panel by sliding means to move together in accordance with the expansion and contraction of the door opening and closing means
Vacuum breaker. In order to move the door opening and closing means including a valve plate for blocking the door of the chamber to one side of the door,
A support panel connected to the housing forming the entrance and having a through hole therein;
A plurality of cylinders having a cylinder housing located at the rear side of the support panel and a piston rod extendable from the cylinder housing and connected to the opening and closing means through the through hole;
A valve sealing body disposed in the through-hole and airtightly wrapped around the piston rod to seal the inside of the housing;
Sliding means is connected to the cylinder housing and slidably mounted on one surface of the support panel
/ RTI >
According to the expansion and contraction of the door opening and closing means, the cylinder and the valve sealing body can slide in parallel along the longitudinal direction of the support panel by the sliding means.
Vacuum breaker. 3. The method of claim 2,
Wherein the sliding means comprises:
A support spaced apart from the periphery of the through hole and coupled to a rear surface of the support panel;
At least one guide rod spaced apart from the through-hole and slidably coupled to the support along the longitudinal direction of the support panel;
Is coupled to the guide rod, the vacuum blocking device further comprises a sliding case coupled to the cylinder housing of the cylinder. 4. The method of claim 3,
The sliding case is a vacuum cut-off device is a cube that is open toward the support panel. 3. The method of claim 2,
The inner circumference of the through hole is recessed to form a disk-shaped flow space,
And the valve sealing body is slidably mounted in the through hole and the flow space. The method of claim 5,
The valve sealing body is
Cylindrical portion is formed with a through hole surrounding the circumference of the piston rod,
A flange extending from an outer circumferential surface of the cylindrical portion and inserted into the flow space;
The outer diameter of the cylindrical portion is smaller than the inner diameter of the through hole, the outer diameter of the flange is characterized in that the vacuum blocking device is smaller than the inner diameter of the flow space. The method of claim 6,
The inner circumferential surface of the through hole is provided with a plurality of seals surrounding the circumference of the piston rod,
The seals toward the upper surface from the back of the support panel,
At least one first seal having a plurality of contacts with the piston rod,
At least one second seal capable of scraping off the lubricant applied to the piston rod,
And at least one third seal that sequentially separates the foreign matter attached to the piston rod. In claim 7,
Cross section of the first sealing is a vacuum cut-off device having a cross shape. 9. The method of claim 8,
Cross section of the second sealing is a vacuum cut-off device of the U-shaped English opening toward the rear surface of the support panel. The method of claim 6,
And a fourth seal on each of the upper and lower surfaces of the flange and in contact with the ceiling and bottom surfaces of the flow space. A through hole is formed, and a cylindrical portion having a plurality of seals mounted on an inner circumferential surface of the through hole;
A flange protruding from the outer circumferential surface of the cylindrical portion, the sealing being mounted on edges of the upper and lower surfaces;
A valve sealing body coupled to an upper portion of the cylindrical portion and formed with a central hole corresponding to the through hole, and the inner peripheral surface of the central hole includes a cover body to which a sealing is mountable. 12. The method of claim 11,
One end of the through-hole is expanded to form an extension that can be laminated a pair of seals,
The pair of seals mounted on the expansion part is a valve sealing body is fixed in position by the cover body detachably coupled to one end of the cylindrical portion. The method of claim 12,
A cross section of the seal mounted to the expansion portion is a valve sealing body with a lip protruding in a direction opposite to the cover body. 12. The method of claim 11,
Sealing grooves spaced apart from each other are formed at the other end of the through-hole, the cross section of the seals mounted on each of the sealing grooves is a cross-sectional valve sealing body.

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