KR101309805B1 - Ingot slicing method - Google Patents

Abstract

Disclosed is a cutting method for cutting an ingot form of a workpiece to a predetermined thickness. The disclosed cutting method comprises concentrating a laser beam inside the object to form a first separation surface for separating the object to be processed in a direction crossing the thickness direction by a first modification region, and along the first separation surface. The object to be processed is separated to form a first separator. Then, the laser beam is focused on the inside of the first separator to form a second separation surface for separating in the direction crossing the thickness direction in the interior of the first separator by the plurality of second modification regions, and the second separation. Separating the first separator along the plane to form a plurality of second separators.

Description

Ingot slicing method

The present invention relates to an ingot cutting method, and to a method for slicing an ingot to a predetermined thickness using a laser beam.

Wafers, such as silicon and sapphire, used in semiconductor processes and the like are manufactured in the form of ingots. The ingot is cut to a predetermined thickness and introduced into the process in the form of a wafer.

Typically, a mechanical cutting method using a diamond wire is widely used. However, this mechanical cutting method has a large amount of material lost in the cutting process due to the thickness of the diamond wire. Typically, wafers are several hundred microns thick, with nearly 40% of the material lost during the cutting process. In addition, dust is generated during the cutting process. In addition, since the cut surface after cutting is not flat, a post-treatment step for polishing the cut surface is required, and a large process cost is required.

It is an object of the present invention to provide a cutting method capable of cutting an ingot using a laser beam instead of a mechanical cutting method.

An ingot cutting method according to an aspect of the present invention is a cutting method for cutting an ingot-shaped object to be cut to a predetermined thickness, by using a condenser lens to condense a laser beam inside the object and move the laser beam. Forming a first separation surface for separating the object to be processed in a direction crossing the thickness direction in the interior of the object by a plurality of first modification regions formed at the position of the light collecting point; Separating the object to be processed along the first separation surface to form a first separation material; By using the condenser lens, a laser beam is condensed inside the first separator and the laser beam is moved so that the second separator is formed inside the first separator by a plurality of second modified regions formed at a position of the condensing point. Forming a second separation surface for separating the separation material in a direction crossing the thickness direction; And separating the first separator along the second separation surface to form a plurality of second separators.

By positioning the light collecting points at a plurality of different positions in the thickness direction of the first separator, a plurality of second separation surfaces may be formed at different depths inside the first separator. The plurality of second separation surfaces may be formed in the order of being far from the far from the light incident surface of the first separation.

The working distance with respect to the light incident surface of the first separator of the condenser lens can be made constant. By using a zoom lens unit, the inclination of the laser beam with respect to the optical axis of the condenser lens may be positioned at different positions in the thickness direction of the first separator. The zoom lens unit may change the laser beam into light that is parallel to the optical axis of the condensing lens, fine diverging light, or fine converging light.

The laser beam may be separated into a plurality of laser beams by using an optical splitter and incident on the condensing lens. The optical separator may include a diffractive optical element.

The plurality of condensing points may be formed at the same depth by using the condensing lenses corresponding to the plurality of laser beams irradiated from the plurality of laser generators. Each of the plurality of laser beams may be separated into a plurality of light beams by using an optical splitter to be incident on the plurality of condensing lenses. The optical separator may include a diffractive optical element.

The plurality of condensing points may be formed at different depths by using the condensing lenses corresponding to the plurality of laser beams irradiated from the plurality of laser generators. Each of the plurality of laser beams may be separated into a plurality of light beams by using an optical splitter to be incident on the plurality of condensing lenses. The optical separator may include a diffractive optical element.

According to the ingot cutting method according to the present invention, compared to the conventional cutting method using a diamond wire, there is almost no material discarded in the cutting process, ingot compared to the conventional mechanical cutting method which generates almost 40% of cutting by-products It is possible to increase the efficiency of use, and to increase the price competitiveness of the cut wafer. In addition, in the cutting process using a laser beam, there is almost no thermal damage to the ingot and the quality of the cut surface is very good, so that the cut surface rarely needs to be processed after cutting. Therefore, process time and process cost can be saved. In addition, very high cutting speeds can be achieved compared to mechanical cutting methods. In addition, since the first separation process obtains the primary separation material having a predetermined thickness from the ingot, and the primary separation material is secondarily separated to obtain the desired wafer, the wafer having the desired thickness from the large ingot is obtained. The speed of work can be improved compared to the method of obtaining.

1 is a schematic configuration diagram of an embodiment of a cutting device for performing the ingot cutting method according to the present invention.
2 and 3 are views for explaining a process of forming a fine crack in the vicinity of the light collection point inside the object to be processed.
4 is a view for explaining a process of forming a separation surface by a fine crack by relatively moving the laser beam and the workpiece.
5 is a view showing a state of separating the object to be processed along the separation surface by applying a mechanical impact using the blade.
6 is a schematic structural diagram of an embodiment of an apparatus for performing cutting processing using two laser beams.
7 illustrates an optical configuration of an embodiment of a zoom lens unit.
FIG. 8 is a diagram illustrating a state in which a location of a light collecting point is changed by an embodiment of the zoom lens unit illustrated in FIG. 7.
9 illustrates an optical configuration of another embodiment of a zoom lens unit.
FIG. 10 is a view illustrating a position in which a focusing point is changed by an embodiment of the zoom lens unit shown in FIG. 9;
11 is a view showing a state in which a first separation surface is formed inside the ingot.
12 is a view showing the separation of the first separation by applying a mechanical impact using a blade along the first separation surface.
FIG. 13 is a view illustrating a state in which a second separation surface is formed inside the first separation material. FIG.
14 is a view showing the separation of the second separation by applying a mechanical impact using a blade along the second separation surface.
FIG. 15 is a view illustrating a plurality of second separation surfaces formed simultaneously. FIG.

Hereinafter, embodiments of the ingot cutting method and apparatus according to the present invention will be described in detail with reference to the accompanying drawings. In the drawings, like reference numerals refer to like elements, and the size and thickness of each element may be exaggerated for clarity of explanation.

The ingot cutting method according to the present invention condenses a laser beam inside the object to be processed, forms a modified region in which the physical properties are changed inside the object by multiphoton absorption or a corresponding physical and optical phenomenon, and by the modified region. An internal separation surface serving as a reference for separation is formed inside the object to be processed. The laser beam has a wavelength band that is transparent to the object to be processed. The laser beam may be an ultrashort pulsed laser beam whose pulse width is 1 kHz or less, preferably with a pulse width of picosecond order or femtosecond order. The peak power density of the laser beam may be at least 1 × 10 ⁸ (W / cm 2). These laser beams have very high light condensing properties and can condense to the diffraction limit. When the laser beam is focused inside the object to be processed, it is compressed temporally and spatially near the focusing point to form a state in which a very high peak power is locally concentrated. Then, the laser beam having transparency to the object to be processed exhibits very high absorption characteristics locally by multiphoton absorption or a corresponding nonlinear absorption effect. As a result, a modified region in which the physical properties of the material are changed is formed inside the object to be processed, and an internal separation surface can be formed by the modified region. After forming the inner isolation surface, the object can be cut by subjecting the object to the workpiece along the inner separation surface by physical impact, for example mechanical and thermal stress, or by natural cleavage from the outside.

1 is a configuration diagram showing an example of a laser processing apparatus. Referring to FIG. 1, a laser generator 100, a light collecting unit 200, and a stage 300 are shown. The laser generator 100 generates a laser beam (L). The laser beam L can be, for example, collimated parallel light. The laser beam L is reflected by the mirror 101 and is incident on the light converging unit 200, for example. The condensing unit 200 condenses the laser beam L inside the object to be processed 1.

The light collecting unit 200 may include a light collecting lens 210 and a zoom lens unit 220. The condenser lens 210 may have a high numerical aperture (N.A.) as much as possible. As the numerical aperture is higher, the energy of the laser beam L may be prevented from being absorbed from the surface of the object 400, and the laser beam L may be focused inside the object 400 with high efficiency. The processing object 400 is mounted on the stage 300. The stage 300 is provided with fixing means (not shown) capable of fixing the processing object 400. The fixing means can be for example a vacuum chuck. The stage 300 may be moved in the X direction or the X and Y directions by a moving means (not shown). As the moving means for moving the stage 300, various compositions commonly used in the art such as an XY table may be employed. Of course, the zoom lens unit 200 including the condenser lens 210 may be moved in the X and Y directions. In addition, when the mirror 1010 is a rotatable mirror, the laser beam L may be scanned in the first direction Y and / or the second direction Y by rotating the mirror. The condenser lens 210 may be a telecentric lens capable of injecting a laser beam L within a predetermined angle range perpendicularly to the object to be processed 400.

The object to be processed 400 may be a cylindrical or foot-shaped ingot. For example, the object to be processed 400 may be an ingot of a wafer used in a semiconductor process, such as a silicon ingot or a sapphire ingot.

Referring to FIG. 2, the laser beam L incident on the object 400 is collected by the condenser lens 210, and the light collecting point 1 of the laser beam L is located inside the object 400, that is, from the light incident surface 401. It is formed in a position away from the predetermined distance in the thickness direction (C). Since the laser beam L is transparent to the object to be processed 400, the laser beam L is transmitted without being absorbed at the light incident surface 401. The physical properties of the object to be processed 400 are changed to form the reformed region 2. That is, the energy of the laser beam L is absorbed by the object to be processed 400 near the condensing point 1, and instantaneously melts. After the laser beam L passes, cooling and shrinking and solidification occur. In addition, during the melting and cooling process, the material constituting the object 400 is expanded and contracted in the vicinity of the condensing point 1. As a result, the fine cracks 3 may be formed as shown in FIG. 3. have. The fine crack 3 may be formed in a thickness direction of the object to be processed 400 and in a direction orthogonal thereto. The modified region 2 may be an area including the fine cracks 3.

The object to be processed as shown in FIG. 4 by moving the laser beam L and the object to be processed 400 in the X direction and the Y direction to focus the laser beam L at a plurality of positions inside the object to be processed 400. Separation surface 5 by a plurality of fine cracks 3 can be formed inside the 400. The interval between the fine cracks 3 may be appropriately selected in consideration of the kind of material of the object to be processed 400, the physical properties, the strength of the laser beam L, and the like.

The separating surface 5 is a surface serving as a reference for separating the processing object 400 in a direction crossing the thickness direction. Adjacent fine cracks 3 in the separation surface 5 are connected to each other or spaced at a small interval so that the separation material 410 naturally separates from the object 400 based on the separation surface 5. Can be.

When not separated naturally, the physical crack may be applied to the object 400 so that the fine cracks 3 may propagate along the separation surface 5. For example, as shown in FIG. 5, using the blade 10 to apply a mechanical force along the separation surface 5 to propagate the fine cracks 3 along the separation surface 5 to propagate the separation 410. Can be separated. The method of propagating the fine cracks 3 along the separation surface 5 is not limited to the method using the blade 10. For example, the microcracks are subjected to a mechanical impact on the object 400 by a water jet method of shooting a water jet (not shown) onto the object 400, an aerosol jet method of shooting compressed air on the object 400, or the like. It is also possible to propagate (3) along the separation surface 5. In addition, the microcracks 3 may be propagated along the separation surface 5 by irradiating the laser beam to the object 400 to apply a thermal shock. In this case, the laser beam may be different from the laser beam L forming the separation surface 5. That is, in this case, the laser beam may have an appropriate energy capable of propagating along the separation surface 5 by impacting the microcracks 3 while the object 400 is properly heated and cooled. The wavelength band may be selected as a band that can be absorbed by the object 400.

As described above, the microcracks 3 are propagated along the separation surface 5 by applying mechanical and thermal shocks to the processing object 400 on which the separation surface 5 is formed, and the separation object based on the separation surface 5. 410 may be separated from the object to be processed 400.

In the process of forming the separation surface 5 by the laser beam (L), the thermal stress may be accumulated in the interior of the object 400 by the difference in the heat dissipation rate according to the position, thereby processing the object 400 Warping may be caused. This warpage may cause disturbance of the optical path when the laser beam L is incident into the object 400, which degrades the uniformity of the modified region 2, thereby reducing the quality of the separation surface 5. You can drop it. Therefore, it is necessary to perform the processing as soon as possible.

In view of this, as shown in FIG. 1, an optical splitter 230 for dividing the laser beam L into a plurality of laser beams may be employed. The optical separator 230 may be implemented by, for example, employing a plurality of transflective mirrors and appropriately selecting transmittances of the transflective mirrors. In addition, the optical separator 230 may be implemented by a diffractive optical element having a diffraction order. For example, the laser beam L can be separated into three or more by employing a diffraction optical element having a diffraction order of at least three orders. By employing the optical separator 230, the plurality of light collecting points 1 can be formed inside the object 400 by one scan, thereby reducing the processing time and reducing the thermal effect.

In addition, as shown in FIG. 6, by employing two laser generators 100, the processing time may be shortened by irradiating two laser beams L1 and L2 onto the processing object 400 at the same time. Of course, the two laser beams L1 and L2 may be formed by separating the laser beam L generated from one laser generator 100 using a semi-transmissive mirror or the like. Here, each of the two laser beams L1 and L2 may be separated into a plurality of laser beams using, for example, a diffraction optical element (FIG. 1: 230). In addition, although not shown in the drawings, it is also possible to use three or more laser beams.

The condenser lens 210 has a fixed focal length, and the condensing point 1 is formed inside the object 400 corresponding to the focal length. In order to form the separating surface 5 at different depths inside the object 400, it is necessary to adjust a working distance (FIG. 1: WD: Working Distance), which is a distance between the condenser lens 210 and the object 400. There is. In order to adjust the working distance, the object to be processed 400 must be moved in the Z direction or the condenser lens 210 must be moved in the Z direction. However, since the condenser lens 210 has a very large numerical aperture and the working distance WD is only a few millimeters, there is a danger that the condenser lens 210 and the processing object 400 come into contact with each other in the process of adjusting the working distance WD. have.

In order to solve this problem, without changing the working distance WD, that is, the condenser lens 210 is positioned at a fixed position with respect to the object 400, and between the laser generator 100 and the condenser lens 210 The zoom lens unit 220 may be disposed on the camera. The zoom lens unit 220 changes the inclination of the laser beam L with respect to the optical axis of the condenser lens 210, thereby causing the thickness direction C of the object 1 to be processed by the condenser lens 210. Change the position of. That is, the zoom lens unit 220 converts the laser beam L into light parallel to the optical axis of the condenser lens 210, fine divergent light, or fine converging light and enters the condenser lens 210, thereby converging the condensing point ( The position of the thickness direction C of 1) is changed.

7 is a diagram illustrating an example of an optical configuration of the zoom lens unit 400. Referring to FIG. 7, a zoom lens 221 and a fixed lens 222 are shown. The zoom lens 221 is a lens moved along the optical axis 211 and has a negative power. That is, the zoom lens 221 emits the collimated laser beam L irradiated from the laser generator 100 as a concave lens in proportion to its power. The fixed lens 222 is fixedly disposed between the zoom lens 221 and the condenser lens 210. The fixed lens 222 injects parallel light, fine divergent light, or fine converging light to the condenser lens 210 with respect to the optical axis 211 of the condenser lens 210 according to the position of the zoom lens 221.

The above-described zoom lens unit 220 is a kind of beam expander optical system, but the difference is that the zoom lens 221 having power for enlarging light is moved. When the zoom lens 221 is positioned at a predetermined reference position, the light passing through the fixed lens 222 is parallel to the optical axis 211 of the condenser lens 210 as shown by a solid line in FIG. 8. ), And the light collecting point 1-1 is formed. In this state, the zoom lens unit 220 becomes a beam expander optical system having a general fixed magnification. When the zoom lens 221 approaches the fixed lens 222 around the reference position or is spaced apart from the fixed lens 222, the inclination of the light lens passing through the fixed lens 222 with respect to the optical axis of the condensing lens 210 is changed. The position of the light collecting point 1 is changed by the change of the inclination. That is, by changing the inclination, the position of the light collecting point 1 can be changed without moving the light collecting lens 210 in the direction of the optical axis 211. For example, when the zoom lens 221 is moved in a direction away from the fixed lens 222 at the reference position, the light passing through the fixed lens 222 of the condensing lens 210 as shown by a dotted line in FIG. 8. It becomes a fine converging light L2 having a slope in the direction of converging with respect to the optical axis 211, and the condensing point 1-2 approaching the condensing lens 210 is formed as compared to the condensing point 1-1. When the zoom lens 221 is moved in the direction approaching the fixed lens 222 at the reference position, the light passing through the fixed lens 222 is the optical axis (2) of the condensing lens 210 as shown by the dashed line in FIG. A fine divergence light L3 having a slope in the direction of divergence with respect to 211 is formed, and a condensing point 1-3 is spaced apart from the condensing lens 210 compared to the condensing point 1-1.

In addition, as the incident height of the light beam incident on the condenser lens 210 is higher, an optical system having a high numerical aperture can be realized. Since the zoom lens unit 220 basically has a function of a beam expander, it is incident on the condenser lens 210. By expanding the luminous flux of the laser beam L, a high numerical aperture optical system can be realized. In addition, by implementing an optical system with a high numerical aperture, the quality of the uniform focusing point 1 can be formed by substantially canceling the change in the amount of aberration according to the positional change of the focusing point 1 in the object 400. have.

9 illustrates another example of the optical configuration of the zoom lens unit 220. Referring to FIG. 9, first and second zoom lenses 223 and 224 and a fixed lens 225 are illustrated. The first zoom lens 223 moves along the optical axis 211 and has a negative power. That is, the first zoom lens 223 emits the collimated laser beam L irradiated from the laser generator 100 as a concave lens in proportion to its power. The second zoom lens 224 moves along the optical axis 211 and has positive power. That is, the second zoom lens 224 compresses the laser beam L emitted by the first zoom lens 223 in proportion to its power as a convex lens. The fixed lens 225 is fixedly disposed between the second zoom lens 224 and the condenser lens 210. The fixed lens 225 collects light parallel to the optical axis 211 of the condenser lens 210, finely divergent light, or fine converging light according to the positions of the first and second zoom lenses 223 and 224. Incident at 210.

When the first and second zoom lenses 223 and 224 are positioned at a predetermined reference position, the light passing through the fixed lens 225 as shown by the solid line in FIG. 10 is transmitted to the optical axis of the condensing lens 210. Light L1 ′ parallel to 211 is formed, and a light collecting point 1-1 is formed. In this state, the zoom lens unit 220 becomes a beam expander optical system having a general fixed magnification. When the first and second zoom lenses 223 and 224 approach the fixed lens 225 around the reference position or are spaced apart from the fixed lens 225, the light condensing lens 210 of the light passing through the fixed lens 225 may be used. Slope of the optical axis 211 is changed, and the position of the light collecting point 1 is changed by the change of the tilt. That is, by changing the inclination, the position of the light collecting point 1 can be changed without moving the light collecting lens 210 in the direction of the optical axis 211. For example, in order to form the fine converging light L2 ′, the first zoom lens 223 is moved in a direction away from the fixed lens 225 at the reference position, and the condensing lens ( Condensing point 1-2 approached to 210 is formed. When the first zoom lens 223 is moved in a direction approaching the fixed lens 225 at the reference position, the light passing through the fixed lens 225 is shown by the dashed-dotted line in FIG. 9. It becomes a fine divergence light L3 ′ having a slope in a direction diverging with respect to the optical axis 211, and forms a condensing point 1-3 spaced apart from the condensing lens 210 as compared to the condensing point 1-1. .

When the first zoom lens 223 is moved, the second zoom lens 244 is also moved to compress the light emitted by the first zoom lens 233 in proportion to its power. The second zoom lens 244 is moved in a direction to reduce the change in the incident height of the light incident on the fixed lens 225. That is, the second zoom lens 244 may function as a compensation lens that compensates for the difference in the incident height of the laser beam 1 incident on the fixed lens 225 according to the position of the first zoom lens 233. When the incident height of light incident on the fixed lens 225 is changed, the amount of spherical aberration is changed. The change in the amount of spherical aberration may affect the quality uniformity of the light collecting point 1. The zoom lens unit 220 according to the present exemplary embodiment employs a second zoom lens 244 to move in a direction to compensate for a difference in incident height of light incident on the fixed lens 225 according to the movement of the first zoom lens 233. Spherical aberration can be compensated for. Compensation here means eliminating or minimizing changes in spherical aberration. The compensation of the incident height or the compensation of the spherical aberration may be implemented by moving the second zoom lens 244 in the same direction as the moving direction of the first zoom lens 233, for example. That is, when the first zoom lens 233 is moved away from the fixed lens 225 and the divergence amount is increased, the second zoom lens 244 may also be moved in the same direction so that the compression amount is increased. When 233 is moved in the direction approaching the fixed lens 225 and the divergence amount decreases, the second zoom lens 244 may also be moved in the direction approaching the fixed lens 225 to reduce the amount of compression. As the distance between the first zoom lens 233 and the fixed lens 225 is closer, the distance between the first zoom lens 233 and the second zoom lens 244 may be greater. However, the above description is just an example, and the direction and distance of the relative movement with respect to the first zoom lens 233 of the second zoom lens 244 may be optically determined by the first zoom lens 233 and the second zoom lens 244. It may vary depending on the configuration.

Referring to FIG. 8, when the parallel light L1 is emitted from the fixed lens 222, the fine convergent light L2 and the fine divergent light L3 are emitted based on the incident height of the light incident on the fixed lens 222. The difference in the incident heights of light at the time of display is indicated by h1 and h2, respectively. Similarly, referring to FIG. 10, when the parallel light L1 ′ is emitted from the fixed lens 225, the fine converging light L2 ′ and the fine diverging light are based on the incident height of the light incident on the fixed lens 225. The difference in incidence height of light when L3 ') is emitted is indicated by h1' and h2 ', respectively. According to the zoom lens unit 220 illustrated in FIGS. 9 and 10, a difference in incident height of light may be reduced as compared to the zoom lens unit 220 illustrated in FIGS. 7 and 8. In other words, h1> h1 'and h2> h2' can be set. Therefore, the change in the numerical aperture in the case of forming the light collecting points 1-1, 1-2, 1-3 can be reduced to form the light collecting points 1-1, 1-2, 1-3 of uniform quality. Can be. In addition, by minimizing the change in the amount of spherical aberration by the lens system, it is possible to form the light collecting points 1-1, 1-2, 1-3 of uniform quality.

As described above, the zoom lens unit 220 may be used to change the position of the light converging point 1, that is, the depth, in the interior of the object 400, and may be focused at a desired position inside the object 400. (1) can be formed. Therefore, the position of the light collecting point 1 can be changed without changing the working distance WD of the light collecting lens 210.

Hereinafter, an embodiment of the ingot cutting method according to the present invention.

The ingot cutting method of this embodiment is characterized in that after cutting the ingot first to a predetermined thickness, the cut primary separation is separated again to a predetermined thickness to obtain a secondary separation having a desired thickness.

Referring to FIG. 11, the light converging unit 200 condenses the laser beam L inside the first distance d1 in the thickness direction from the light incident surface 501 of the ingot 500. In this case, by employing the zoom lens unit 220, the position of the light collecting point 1 may be adjusted without changing the working distance WD. The first distance d1 may be appropriately selected in consideration of the thickness of the wafer to be finally obtained.

In the vicinity of the light collecting point 1, the physical properties of the ingot 500 are locally changed by multiphoton absorption or a nonlinear absorption effect corresponding thereto to form the first modified region 2-1. That is, the energy of the laser beam L is absorbed by the ingot 500 in the vicinity of the condensing point 1 and instantaneously melts, and after the laser beam L passes, cooling and contracting and solidification occur. In addition, the material constituting the ingot 500 is expanded and contracted near the condensing point 1 during the melting and cooling process, and the fine cracks 3 are formed by the expansion and contraction. As shown in FIG. 11, the laser beam L and the ingot 500 are relatively moved in the X and Y directions to focus the laser beam L at a plurality of positions inside the ingot 500. The first separation surface 5-1 by the plurality of fine cracks 3 is formed inside the 500.

Next, a physical impact may be applied to the ingot 500 so that the micro cracks 3 may propagate along the first separation surface 5-1. For example, as shown in FIG. 12, the blade 10 is used to apply a mechanical force along the first separation surface 5-1 to guide the microcracks 3 along the first separation surface 5-1. By propagation, the first separator 510 may be separated.

Next, the first separator 510 is mounted on the stage 300, and the first separator 510 is separated into a predetermined thickness.

Referring to FIG. 13, the light converging unit 200 condenses the laser beam L inside the second distance d2 in the thickness direction from the upper surface 511 of the first separator 510. In this case, by employing the zoom lens unit 220, the position of the light collecting point 1 may be adjusted without changing the working distance WD. 13 by moving the laser beam L and the first separator 510 relatively in the X and Y directions to focus the laser beam L at a plurality of positions inside the first separator 510. As described above, a second separation surface 5-2 formed by the second reformed region 2-2 and the plurality of fine cracks 3 is formed in the first separator 510. Next, for example, the second crack may be propagated along the second separation surface 5-2 by applying mechanical force along the second separation surface 5-2 using the blade 10 to propagate the second cracks along the second separation surface 5-2. Separation 521 may be separated.

In this case, before irradiating the laser beam L to the first separator 510, the back surface 512 of the first separator 510 is polished to further flatten the back surface 512. Can be. The planarization process can be performed by, for example, a polishing method using a compound.

As illustrated in FIG. 13, a plurality of second separation surfaces 5-2 and 5-3 at positions spaced apart from a second distance d2 and a third distance d3 inside the first separator 510. May be formed. When the second separation surface 5-2 is formed first and then the second separation surface 5-3 is formed, the laser beam L must pass through the second separation surface 5-2. A second separation where the path of the laser beam L is distorted or the laser beam L is scattered and positioned below by the second reformed region 2-2 for forming the second separation surface 5-2 in FIG. The quality of the surface 5-3 can be reduced. Therefore, the second separation surface 5-3 far from the upper surface 511, which is the light incident surface, is formed first, and then the second separation surface 5-2, which is closer to the upper surface 511, which is the light incident surface, is formed. As a result, a plurality of second separation surfaces 5-2 and 5-3 having uniform quality can be obtained. In this way, the plurality of second separators 521-523 can be obtained by forming the plurality of second separation surfaces 5-2 and 5-3.

As shown in FIG. 6, when using a plurality of laser beams L1 and L2, a plurality of second separation surfaces 5-2 and 5-3 may be formed simultaneously. At this time, as shown in FIG. 15, the laser beam L2 for forming the second separation surface 5-3 away from the light incident surface 511 is close to the light incident surface. The second separation surface 5-3 may be formed first by arranging the second separation surface 5-3 so as to be preceded in the processing direction rather than the laser beam L1 for forming the second separation surface 5-2.

In the above-described embodiment, the first distance d may be selected to be twice or more than the thickness of the second separator 521 to be finally separated. For example, in the case where a 0.25 mm wafer is to be obtained from the ingot 500, after separating the first separator having a thickness of 1 mm from the ingot 500, three second separations are formed inside the first separator. By forming the surface, four second separators having a thickness of 0.25 mm can be obtained.

According to the ingot cutting method as described above, compared to the conventional cutting method using a diamond wire, there is almost no material discarded in the cutting process. Therefore, the use efficiency of the ingot can be improved compared to the conventional mechanical cutting method in which almost 40% of cutting by-products are generated, and the price competitiveness of the cut wafer can be improved. In addition, in the cutting process using a laser beam, there is almost no thermal damage to the ingot and the quality of the cut surface is very good, so that the cut surface rarely needs to be processed after cutting. Therefore, process time and process cost can be saved. In addition, very high cutting speeds can be achieved compared to mechanical cutting methods. In addition, since the first separation process obtains the primary separation material having a predetermined thickness from the ingot, and the primary separation material is secondarily separated to obtain the desired wafer, the wafer having the desired thickness from the large ingot is obtained. The speed of work can be improved compared to the method of obtaining.

While the invention has been shown and described with reference to certain preferred embodiments thereof, it will be understood by those skilled in the art that various changes and modifications may be made without departing from the scope of the invention as defined by the appended claims.

A, B ... first, second direction L, L1, L2 ... laser beam
1 ... condensing point 2 ... modified area
3 ... fine crack 5 ... separation surface

Claims (14)

A cutting method for cutting an ingot form of a workpiece to a predetermined thickness,
Condensing a laser beam inside the object to be processed using a condenser lens and moving the laser beam to the inside of the object to be processed by a plurality of first modified regions formed at a position where the laser beam is focused Forming a first separation surface for separating the in a direction crossing the thickness direction;
Separating the object to be processed along the first separation surface to form a first separation material;
By using the condenser lens, a laser beam is condensed inside the first separator and the laser beam is moved so that the laser beam is condensed inside the first separator by a plurality of second modified regions formed at a location where the laser beam is collected. Forming a second separation surface for separating the first separation material in a direction crossing the thickness direction;
And separating the first separator along the second separation surface to form a plurality of second separators.
Forming the second separation surface,
A plurality of light collecting points are formed at different positions in the thickness direction inside the first separator by using the plurality of focusing lenses corresponding to each of the plurality of laser beams irradiated from a plurality of laser generators, Ingot cutting method for forming a plurality of the second separation surface at the same time in a different position in the thickness direction therein. delete delete The method of claim 1,
Ingot cutting method, characterized in that the working distance to the light incident surface of the first separation of the plurality of condensing lens is constant. 5. The method of claim 4,
And using a zoom lens unit to change the inclination of the laser beam with respect to the optical axis of the condenser lens to position the condensing points at different positions in the thickness direction of the first separator. The method of claim 5,
And the zoom lens unit changes the laser beam into light parallel to the optical axis of the condenser lens, fine divergent light, or fine converging light. delete delete delete delete delete delete The method according to any one of claims 1 or 4 to 6,
And a plurality of laser beams are separated into a plurality of light beams using an optical splitter and incident on the plurality of condensing lenses. The method of claim 13,
And the optical separator comprises a diffractive optical element.

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