KR101308049B1 - Pulling module for silicon ingot and an apparatus of manufacturing silicon single crystal ingot using the same - Google Patents

Abstract

The present invention provides a ingot pulling module including a cylindrical body, at least two or more ingot pulling portions formed inside the body, and a silicon single crystal ingot manufacturing apparatus using the same, thereby stably preventing ingot separation or breaking in the ingot manufacturing process. It will have the effect of making an ingot.

Description

Ingot pulling module and silicon single crystal ingot manufacturing device using the same {PULLING MODULE FOR SILICON INGOT AND AN APPARATUS OF MANUFACTURING SILICON SINGLE CRYSTAL INGOT USING THE SAME}

The present invention relates to a silicon single crystal ingot production technology by the Czochralski method, and more particularly, to an ingot pulling module and a silicon single crystal ingot production apparatus using the same.

The Czochralski (CZ) method is a typical method for manufacturing a single crystal ingot for a wafer used as an electronic component material such as a semiconductor. The Czochralski method melts silicon by placing silicon in a quartz crucible and heating the crucible, and solidifying the melt as a solid on the surface of the seed crystal while slowly pulling it while rotating the seed crystal in contact with the silicon melt. In accordance with the method for growing an ingot (ingot) having a predetermined diameter. In other words, the Czochralski method is a method of producing an ingot by growing a crystal while dipping a single crystal seed crystal in a silicon melt and slowly pulling it, which is generally divided into several process steps.

First, after a necking step of growing elongated crystals from seed crystals, a shouldering step is performed in which the crystals are grown in a radial direction to a target diameter, after which a crystal having a constant diameter is grown. Ingots are formed. This process is called the body growing step, where the grown part is made into a wafer.

The silicon single crystal ingot manufacturing apparatus using the Czochralski method consists of a circular chamber and a pulling mechanism for raising and growing a silicon ingot, and a crucible, a heater, a heat insulating material, a crucible support shaft for melting silicon and containing a melt in the chamber. Etc. structures are provided, such structures are called hot zone parts. Most of the hot zone parts are made of graphite, and the constituents of the hot zone parts vary depending on the characteristics and the manufacturer.

The Czochralski method described above has the advantage of continuously producing a constant diameter ingot, but there was a problem that can be separated from the seed crystals by the weight of the ingot itself in the ingot manufacturing process.

1 illustrates an ingot manufactured using a conventional ingot manufacturing apparatus according to the above-described Czochralski method described in Korean Patent Publication No. 10-2008-0056404. Referring to FIG. 1, according to the Czochralski method, a necking step of growing thin and long crystals from seed crystals is performed in the ingot manufacturing process, and the thickness of the ingot IG is inevitably thin (A). ) Is formed, and this portion (A) becomes more likely to be stressed as a result of the growth of the ingot (IG) and eventually break. As a result, when the ingot IG breaks and falls into the molten silicon, there is a problem of an increase in manufacturing cost due to the disposal of the molten silicon and a decrease in process efficiency due to the interruption of the manufacturing process.

Korean Patent Publication No. 10-2008-0056404 (published June 23, 2008)

The present invention has been proposed to solve the above-mentioned conventional problems, by providing an ingot pulling module including a cylindrical body, at least two or more ingot pulling portions formed inside the body, and a silicon single crystal ingot manufacturing apparatus using the same, an ingot It is an object of the present invention to stably manufacture an ingot by preventing separation of the ingot from seed crystals during the manufacturing process.

Ingot pulling module used in the silicon single crystal ingot production apparatus according to the Czochralski method of the present invention for solving the above problems, the cylindrical body; It may be formed to include at least two or more ingot impressions formed inside the body.

The ingot pulling module of the present invention further includes at least two grooves formed inside the body, and the ingot pulling portion includes: a connecting member having one end connected to the groove; A motor formed at the other end of the connection member; The shaft may be connected to the driving shaft of the motor, and may include a roller formed to contact the outer surface of the ingot.

In the ingot pulling module of the present invention, an elastic member may be formed on the outer peripheral surface of the roller, the elastic member may be made of a rubber (rubber) material, but is not limited thereto.

An apparatus for producing a silicon single crystal ingot by the Czochralski method of the present invention for solving the above problems includes a chamber in which silicon ingot is produced and ingot production is performed; An impression mechanism provided at an upper portion of the chamber to raise the ingot grown in the chamber through rotational and upward movement; An ingot pulling module provided at an upper portion of the chamber to raise the ingot; Including, the ingot pulling module, the cylindrical body; It may include at least two or more ingot impressions formed inside the body.

In the silicon single crystal ingot manufacturing apparatus of the present invention, the ingot pulling module further comprises at least two grooves formed in the body, the ingot pulling portion, one end is connected to the groove; A motor formed at the other end of the connection member; A roller connected to the drive shaft of the motor and formed to contact the outer circumferential surface of the ingot; . ≪ / RTI >

In the silicon single crystal ingot manufacturing apparatus of the present invention, an elastic member may be formed on the outer peripheral surface of the roller, and the elastic member may be made of rubber (rubber) material, but is not limited thereto.

In the silicon single crystal ingot manufacturing apparatus of the present invention described above, the pulling mechanism may be formed by including a rod formed with a seed crystal (end crystal) at the end.

According to the present invention, by providing a ingot pulling module having a motor and a roller to apply a rotational force during the ingot rise, it is possible to prevent the break of the ingot in the manufacturing process, it is possible to manufacture the ingot more stably.

In addition, according to the present invention, by dispersing the stress applied to the pulling mechanism due to the weight of the ingot, there is also an effect that can prevent cracking and breakage of the pulling mechanism.

In addition, according to the present invention, it is possible to manufacture a single crystal ingot continuously, thereby having the effect of obtaining an ingot with increased volume and thereby improving the manufacturing process efficiency.

1 shows an ingot manufactured using a conventional ingot manufacturing apparatus by the Czochralski method.
2 illustrates an ingot pulling module according to an embodiment of the present invention.
3 is a cross-sectional view showing the ingot pulling module shown in FIG.
Figure 4 schematically shows a silicon single crystal ingot manufacturing apparatus according to an embodiment of the present invention.

DETAILED DESCRIPTION OF THE PREFERRED EMBODIMENTS Hereinafter, preferred embodiments of the present invention will be described in detail with reference to the accompanying drawings. It should be understood, however, that the embodiments described herein and the configurations shown in the drawings are only a preferred embodiment of the present invention, and that various equivalents and modifications may be made thereto at the time of the present application. DETAILED DESCRIPTION OF EXEMPLARY EMBODIMENTS Hereinafter, exemplary embodiments of the present invention will be described in detail with reference to the accompanying drawings. In the following description, well-known functions or constructions are not described in detail to avoid obscuring the subject matter of the present invention. The following terms are terms defined in consideration of functions in the present invention, and the meaning of each term should be interpreted based on the contents throughout the present specification. The same reference numerals are used for portions having similar functions and functions throughout the drawings.

Figure 2 shows an ingot pulling module 10 according to an embodiment of the present invention, more specifically Figures 2 (a) and (b) is a perspective view of the ingot pulling module 10 according to an embodiment of the present invention. And plan view.

2 (a) and 2 (b), the ingot pulling module 10 according to the present invention includes a body 110 and at least two or more ingot pulling portions 200 formed inside the body 110. It is done by

Body 110 is a portion that serves to support the ingot pulling unit 200, made of a cylindrical shape. The material constituting the body 110 is not limited, but is preferably formed of a metal material having excellent durability and heat resistance.

The inside of the body 110 is provided with a groove 130 is connected to the ingot pulling unit 200, the number of the grooves 130 is preferably formed equal to the number of the ingot pulling unit 200.

Ingot pulling portion 200 is formed at least two inside the body 110, more preferably three or more are formed. This is to increase the contact area with the ingot in the future ingot manufacturing to increase the ingot more stably. The ingot pulling unit 200 includes a connection member (210, 230), the roller 250 and the motor (not shown) for transmitting a rotational force to the roller (250).

One end of the connection member 210 or 230 is connected to the groove 130, and the other end of the motor is formed. And the other end of the connection member (210, 230) is formed with a roller 250 shaft-axially coupled to the drive shaft of the motor. Here, the material of the connecting members 210 and 230 is not limited, but is preferably formed of a metal material having excellent durability and heat resistance, and may be formed of the same material as the body 110 described above. In addition, although (a) and (b) of FIG. 2 show that the connecting members 210 and 230 are formed in a form in which two members are separated from each other, this is only one example and may be made of one member. However, even when the connecting member is made of one member, the ends of the connecting member are preferably formed in a form separated from each other, for example, 'c' shape, as shown in (a) and (b) of FIG. . This is to allow the roller 250 to rotate.

The motor (not shown) serves to transfer the driving force to the roller 250 according to the rotation of the drive shaft, and may be formed of a known DC motor, but is not limited thereto.

The roller 250 receives the driving force from the motor and rotates to closely contact the outer circumferential surface of the ingot to be manufactured to transmit the rotational force. The roller 250 may further include an elastic member 270 on the outer circumferential surface to improve adhesion to the ingot, rubber may be used as the material of the elastic member 270, but is not limited thereto. Rather, it will be said that the elastic member 270 of the present invention can be made of all elastic materials that are currently developed and commercialized or can be implemented according to future technological developments.

Ingot pulling module of the present invention described above, while supporting the ingot in the subsequent ingot manufacturing process and at the same time by applying a rotational force to the ingot, as a result, the effect of preventing the break of the ingot in the manufacturing process and more stable ingot It will provide an effect that can be produced.

3 illustrates a front surface of the ingot pulling unit 200 of FIG. 2. 2 and 3, the ingot pulling unit 200 of the present invention includes a connecting member 210 and 230, a roller 250, and a motor 220 for transmitting rotational force to the roller 250. The connecting members 210 and 230 may be formed in a form in which two members are separated from each other, as shown in FIGS. 2A, 2B, and 3, or as one member, although not shown in the drawing. It may be made as described above in the description of FIG.

The motor 220 is formed at the ends of the connection members 210 and 230. The motor 220 of the present invention serves to transmit a driving force to the roller 250 by the rotation of the drive shaft 221, it may be formed on at least one other end of the connection member. That is, it may be formed only in any one of the other end of the connection member (210, 230) and may be formed on both other ends of the connection member (210, 230).

On the other hand, Figure 3 is shown in the form that the roller 250 is directly connected to the drive shaft 221 of the motor 220 is rotated in the same direction as the rotation direction of the drive shaft 221, this is only one example and is connected There is no limit to the form. That is, the roller 250 of the present invention may be formed in any form capable of receiving a driving force from the drive shaft 221 of the motor 220. An elastic member 270 is formed on the outer circumferential surface of the roller 250 as described above in FIG. 2 to increase adhesion to an ingot manufactured later.

4 schematically shows an apparatus for producing a silicon single crystal ingot (hereinafter referred to as an ingot manufacturing apparatus 1) by the Czochralski method according to an embodiment of the present invention. 2 to 4, the ingot manufacturing apparatus 1 according to the embodiment of the present invention has a cylindrical shape as a seed crystal is rotated while being immersed in a state of being immersed in a silicon melt (MS, Melted Silicon). Grows an ingot (IG). The ingot manufacturing apparatus 1 includes a chamber 20 in which ingot manufacturing is performed by receiving a molten silicon (MS), and is provided at an upper portion of the chamber 20 in the chamber 20 through rotational and upward movements. An impression mechanism 50 for raising the grown ingot IG is provided, and an ingot pulling module (10 of FIG. 2) is provided at the top of the chamber to raise the ingot IG.

The chamber 20 is a portion that provides a space in which the ingot IG is grown. The chamber 20 has a cylindrical structure and is surrounded by the crucible 23 and the crucible 23 in which the silicon melt MS is accommodated inside the chamber 20. Is provided in the heater 21 is provided to apply heat to melt the silicon, not shown in the figure, but the heat insulating member for preventing the heat generated from the heater 21 to spread outside the heater 21 to the outside It is preferable that further be provided.

Meanwhile, a crucible support shaft 30 for elevating and rotating the crucible 23 may be provided below the crucible 23, and the crucible support shaft 30 may rotate and raise the crucible 23 while melting the silicon melt. (MS) serves to keep the solid-liquid interface at the same height.

The pulling mechanism 50 is a part for growing a cylindrical ingot IG through rotational and upward movement in a state in which a seed crystal formed at the end is immersed in a melted silicon (MS). May be formed in the form of a cable or in the form of a shaft (or rod), preferably in the form of a shaft (or rod) in order to produce a large ingot (IG), but is not limited thereto.

Among the upper portions of the chamber 20, the ingot pulling module 10 described above with reference to FIG. 2 is provided outside the ingot IG that rotates and rises by the pulling mechanism 50.

The ingot pulling module 10 includes a cylindrical body 110 having a groove 130 therein and an ingot pulling unit 200 connected to an inner groove 130 of the body 110, and an ingot pulling unit 10. 200 includes the connecting members 210 and 230, the roller 250, and the motor 220 transmitting the rotational force to the roller 250, as described above with reference to FIG. 2.

At this time, the roller 250 of the ingot pulling module 10 is formed to be in close contact with the outer circumferential surface of the ingot IG rotated and raised by the raising mechanism 50, the elastic member on the outer circumferential surface of the roller 250 to improve the adhesion 270 may be further provided as described above in the description of FIG. 2.

When the ingot IG is rotated and raised by the raising mechanism 50 to bring the outer circumferential surface into close contact with the roller 250 of the ingot raising module 10, the motor transmits the driving force to the roller 250 and transmits the driving force. The roller 250 that receives and rotates transmits a rotational force to the ingot IG in close contact. Accordingly, even if the ingot IG grows and the weight increases, the ingot IG is supported by the ingot pulling module 10, thereby preventing the ingot IG from being broken from the pulling mechanism 50. Accordingly, it is possible to manufacture the ingot more stably ingot (IG), and also to be able to continuously manufacture a bulky ingot (IG) has the effect of improving the process efficiency. In addition, as the ingot pulling module 10 supports the ingot IG and transmits the rotational force, the stress of the pulling mechanism 50 is dispersed by dispersing the stress applied to the pulling mechanism 50 due to the weight of the ingot IG. And it also has the effect of preventing damage.

While the present invention has been particularly shown and described with reference to exemplary embodiments thereof, it is to be understood that the invention is not limited to the disclosed exemplary embodiments, but, on the contrary, Those skilled in the art will appreciate that many suitable modifications and variations are possible in light of the present invention. Accordingly, all such suitable modifications and variations and equivalents should be considered to be within the scope of the present invention.

1: Ingot manufacturing device
20: chamber
21: heater
23: crucible
30: crucible support shaft
50: impression mechanism
10: Ingot raising module
110: Body
130: home
200: ingot impression unit
210, 230: connecting member
220: motor
250: roller
270: elastic member

Claims (9)

In the ingot pulling module used in the silicon single crystal ingot production apparatus by the Czochralski method,
A cylindrical body;
At least two or more ingot impressions formed inside the body; And
At least two grooves formed inside the body,
The ingot impression portion,
A connecting member having one end connected to the groove;
A motor formed at the other end of the connection member; And
Ingot pulling module comprising a roller which is coupled to the drive shaft of the motor, the roller formed in contact with the outer peripheral surface of the ingot.
delete The method according to claim 1,
Ingot pulling module formed on the outer peripheral surface of the roller, the elastic member.
The method according to claim 3,
The elastic member, the ingot pulling module formed of a rubber (rubber) material.
In the silicon single crystal ingot production apparatus by the Czochralski method,
A chamber in which ingot manufacturing is performed by receiving a silicon melt;
An impression mechanism provided at an upper portion of the chamber to raise the ingot grown in the chamber through rotational and upward movement; And
It is provided on the upper portion of the chamber includes an ingot pulling module for lifting the ingot,
The ingot raising module,
A cylindrical body;
At least two or more ingot impressions formed inside the body; And
At least two grooves formed inside the body,
The ingot impression portion,
A connecting member having one end connected to the groove;
A motor formed at the other end of the connection member; And
An apparatus for manufacturing a silicon single crystal ingot, the shaft being coupled to a drive shaft of the motor and formed to contact the outer circumferential surface of the ingot.
delete The method according to claim 5,
Silicon single crystal ingot manufacturing apparatus formed with an elastic member on the outer peripheral surface of the roller.
The method of claim 7,
The elastic member is a silicon single crystal ingot manufacturing apparatus formed of a rubber (rubber) material.
The method according to any one of claims 5, 7, and 8,
The pulling mechanism is a silicon single crystal ingot manufacturing apparatus comprising a rod having a seed crystal (seed crystal) formed at the end.

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