KR101298572B1 - Probe assembly having multiple bodies - Google Patents

Abstract

BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a probe structure for a probe card for testing electrical characteristics of a test object, and more particularly, to inspect a device having a plurality of narrow electrode pads, such as a display drive IC (DDI). It is related with the probe structure for probe cards which can be performed. The present invention is characterized by providing a probe structure in which a plurality of probe support blocks and a base block, which are slotted in advance, are combined. According to the present invention, a probe structure for measuring electrical characteristics of a measurement object, comprising: a base block having a first surface facing a measurement object and a second surface crossing the first surface, and a first surface of the base block; A probe support block having a third surface coupled to the second surface and a fourth surface coupled to the second surface of the base block, wherein a plurality of first slots are formed on the opposite side of the third surface and the fourth surface to accommodate the probes; The probe includes a first arm inserted into a first slot on an opposite side of the third surface, and a second arm electrically and physically connected to the first arm and inserted into a first slot on a fourth surface. And a first terminal formed at the end of the first arm and connected to the measuring device, and a second terminal formed at the end of the second arm and formed to contact the measurement object. do.

Description

Probe assembly having multiple bodies

BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a probe structure for a probe card for testing electrical characteristics of a test object, and more particularly, to inspect a device having a plurality of narrow electrode pads, such as a display drive IC (DDI). It is related with the probe structure for probe cards which can be performed.

DDI is an integrated circuit used for driving flat panel display devices. Attempts have been made to reduce the size of the DDI and add more signal processing terminals to the DDI for various reasons. As a result, the size and spacing of the terminals of the DDI are gradually decreasing.

As the terminal size and spacing of the DDI are reduced, many restrictions are placed on the DDI inspection. For example, a DDI applied to a display of a portable electronic device has a length of about 10 mm and a width of 1 mm or less, and a space between terminals is 30 m or less. The probe structure currently used to inspect the DDI having a narrow gap between terminals is a cantilever probe structure. The cantilever probe structure is made by sharpening the tip of metal pins such as tungsten and arranging a large number of such metal pins on an insulator. However, since such a probe structure is manufactured by a worker's manual work, there is a problem that productivity and precision are low.

In order to solve this problem, a vertical blade method has been proposed in which a plurality of slots are formed in a block made of an electrically insulating ceramic material using a dicing saw, and a vertical blade is mounted in the slot.

However, when the gap between terminals becomes narrow, the following problem arises. First, as the spacing between the terminals becomes narrower, the spacing between the slots must be narrowed, so that the thickness of the wall between the slot and the slot becomes thinner. Thus, the mechanical properties of the walls between the slots are significantly lowered. In addition, a shape in which the walls between the slots are deformed by heat generated in the process of processing occurs.

Second, when terminals are formed at both sides, such as DDI, a plurality of slots must be formed at both sides of the ceramic block. However, as shown in FIG. 14, since the width of the ceramic block must be narrow in order to measure a narrow measurement object such as a DDI, when a slot is processed by using a dicing saw on one side of the ceramic block, the other side of the ceramic block is also desired. There is a problem that the slot is not processed. In particular, when both terminals of the measurement object are formed at different intervals, slots having different intervals from each other should also be formed on both sides of the ceramic block. However, since the width of the ceramic block is narrow, both slots are formed at one time, thereby causing a problem in that slots having different intervals cannot be formed.

If the ceramic block is narrow, the unwanted parts are also processed because the outer diameter of a typical dicing saw is much larger than the width of a DDI. The outer diameter of a typical dicing saw is approximately 56-58 mm. When a slot having a depth of about 300 μm is processed using such a dicing saw, the width to be processed is about 8 mm at maximum. Therefore, if both slots are separated by 8 mm or more, the slot can be machined on one side without damaging the opposite side of the ceramic block. In the case of DDI for mobile phones, the width is about 1 mm, so both slots are about 1 mm apart. Therefore, it is impossible to process only one slot.

SUMMARY OF THE INVENTION The present invention has been made to improve the above-described problems, and an object of the present invention is to provide a probe structure capable of measuring electrical characteristics of a narrow measurement object having a spacing between terminals of 30 μm or less. Yet another object is to provide a probe structure having a plurality of blocks for machining a slot using a dicing saw.

The present invention is characterized in that it provides a probe structure in which a plurality of probe support blocks and a base block in which slots are processed in advance are combined to solve the above-described problem.

According to one aspect of the invention, in the probe structure for measuring the electrical properties of the object to be measured, the base having a first surface facing the measurement object and a second surface that is not parallel to the first surface and meets the first surface A block, a third face engaging with the first face of the base block, and a fourth face engaging with the second face of the base block, the probe being accommodated on the opposite face of the third face and the fourth face. And a probe support block having a plurality of first slots formed therein, wherein the probe comprises a first arm inserted into a first slot opposite to the third surface, and electrically and physically connected to the first arm. A second arm inserted into a first slot of the first arm; a first terminal formed at an end of the first arm and connected to a measurement device; and a second terminal formed at an end of the second arm and formed to contact a measurement object. Characterized in that it comprises The lobe structure is provided.

The probe support block extends from an opposite surface of the third surface, includes an extension surface of the fourth surface and an opposite surface thereof, and includes a second slot connected to the first slot and into which the second arm is inserted. It is preferable to further include a probe support.

In addition, at least one channel orthogonal to the first slots may be formed on a surface opposite to the third surface of the probe support block. This is to facilitate processing of the first slots.

In addition, a groove orthogonal to the first slots is formed on an opposite side of the third surface of the probe support block, and a fixing bar formed to fix the probes is inserted into the groove.

In addition, a fixing protrusion protruding in the direction of the probe support block is formed on the first surface of the base block, and a receiving groove formed to receive the fixing protrusion at a position corresponding to the fixing protrusion on the third surface of the probe support block. Is formed, it is preferable that the space between the fixing projections and the inner surface of the receiving groove is formed to accommodate the remaining amount of the adhesive applied to bond the first surface and the third surface. This is because the assembly accuracy can be improved.

In addition, it is preferable that the first arm of the probe has a protrusion formed to be inserted into the groove and a recess to insert the fixing bar.

In addition, the first terminal of the probe is formed with a terminal for coupling the conductor electrically connected to the measuring device, the terminals of the neighboring probes are formed to be different from each other when viewed from the direction perpendicular to the second surface Provided is a probe structure, characterized in that.

According to another aspect of the invention, in the probe structure for measuring the electrical properties of the object to be measured, the base having a first surface facing the measurement object and a second surface that is not parallel to the first surface and meets the first surface A block, a third surface engaging with the first surface of the base block, and a fourth surface engaging with the second surface of the base block, and having a plurality of first probes on the third surface and the fourth surface. And a first probe support block having first slots formed therein, wherein the first probe has a first arm inserted into the first slot of the third surface, and is electrically and physically connected to the first arm. A second arm inserted into a first slot of the first arm; a first terminal formed at an end of the first arm and connected to a measurement device; and a second terminal formed at an end of the second arm and formed to contact a measurement object. Probe spheres comprising Body is provided.

The first probe support block extends from an opposite surface of the third surface, has a surface extending from the fourth surface and an opposite surface thereof, is connected to the first slot, and has a second arm inserted therein. Preferably, the slot further comprises a first probe support.

In addition, a fifth surface coupled to the opposite surface of the third surface and a sixth surface coupled to the first probe support, and a plurality of receiving the second probe on the opposite surface and the sixth surface of the fifth surface And a second probe support block having third slots formed therein, wherein the second probe is electrically and physically connected to the third arm inserted into the third slot on the opposite side of the fifth surface. And a fourth arm inserted into the third slot of the sixth surface, a third terminal formed at the end of the third arm and connected to the measuring device, and formed at the end of the fourth arm and contacting the measurement object. And a fourth terminal, wherein the second slots are formed between the first slots so that the first probes and the second probes are alternately arranged so as not to overlap each other when viewed in a direction perpendicular to the first surface. Characterized by probe structures is provided.

The second probe support block extends from an opposite surface of the fifth surface, has a surface extending from the sixth surface and an opposite surface thereof, is connected to the third slot, and is inserted into the fourth arm. It is preferable to further include a second probe support formed with four slots.

Preferably, at least one first channel orthogonal to the first slots is formed on a third surface of the first probe support block. In addition, it is preferable that at least one second channel orthogonal to the second slots is formed on a surface opposite to the fifth surface of the second probe support block. This is to facilitate the processing of the first slot and the second slot.

A groove orthogonal to the second slots is formed on an opposite side of the fifth surface of the second probe support block, and a fixing bar formed to fix the probes is inserted into the groove.

A fixing protrusion protruding in the direction of the first probe support block is formed on the first surface of the base block, and a third protrusion of the first probe supporting block is formed to receive the fixing protrusion at a position corresponding to the fixing protrusion. An accommodation groove is formed, and a space for accommodating the remaining amount of the adhesive applied to bond the first and third surfaces is formed between the fixing protrusion and the inner surface of the accommodation groove. This is because the assembly accuracy can be increased.

A support groove is formed to extend in a direction orthogonal to the first slots at a position that meets the second surface of the first surface of the base block, and the first probe further includes a support arm extending in a direction opposite to the second arm. It includes, the support arm is preferably inserted into the support groove. This is to prevent the scrub phenomenon of the first probe.

In the probe structure according to the present invention, terminals of the probes may be arranged in one or two rows according to the pad structure of the measurement object. When the pads of the object to be measured are arranged in one row, the second terminal of the first probe and the fourth terminal of the second probe are arranged in a straight line when viewed from the direction perpendicular to the first surface. When the pads are arranged in two rows, the second terminal of the first probe and the fourth terminal of the second probe are arranged in different straight lines parallel to each other.

Preferably, the first arm of the first probe is provided with a first protrusion protruding to be inserted into the receiving groove and a first recess into which the fixing protrusion is inserted.

In addition, it is preferable that the third arm of the second probe is provided with a second protrusion protruding to be inserted into the groove and a second recess into which the fixing bar is inserted.

In addition, terminals for coupling conductors electrically connected to a measuring device are formed in the first terminal of the first probe and the third terminal of the second probe, and the terminals and second probes of the first probes adjacent to each other are formed. These terminals are provided so as to have a height different from each other when viewed in a direction perpendicular to the second surface.

According to the probe structure of the present invention, an interval between terminals is 30 μm or less, and electrical characteristics of a narrow measurement object can be measured. In addition, the probe structure of the present invention includes a plurality of blocks, so that the slot can be processed by a relatively simple method using a dicing saw.

1 is a perspective view of one embodiment of a probe structure according to the present invention.
FIG. 2 is an exploded perspective view of the probe structure shown in FIG. 1.
3 is a perspective view of the base block shown in FIG. 1.
4 is a perspective view of the probe support block shown in FIG. 1.
5 is a perspective view of the probe shown in FIG. 1.
6 is a perspective view of another embodiment of a probe structure according to the present invention.
FIG. 7 is an exploded perspective view of the probe structure shown in FIG. 6.
8 is a perspective view of the base block shown in FIG. 6.
9 is a perspective view of the first probe support block shown in FIG. 6.
FIG. 10 is a perspective view of the second probe support block shown in FIG. 6.
FIG. 11 is a perspective view of the first probe shown in FIG. 6.
12 is a perspective view of the second probe shown in FIG. 6.
13 is a partial perspective view of another embodiment of a probe structure according to the present invention.
It is a figure for demonstrating the problem of slotting using a dicing saw.

Hereinafter, an embodiment of a probe structure according to the present invention will be described in detail with reference to the drawings.

1 is a perspective view of one embodiment of a probe structure according to the present invention, Figure 2 is an exploded perspective view of the probe structure shown in FIG. 1 and 2, the probe structure of the present embodiment includes a base block 10, a pair of probe support blocks 20, and a probe 40.

3 is a perspective view of the base block shown in FIG. 1. As can be seen in FIG. 3, the base block 10 is symmetrical. The base block 10 has the first surfaces 11 and the second surfaces 12 orthogonal to the first surfaces 11 and connected to the first surfaces 11. In addition, the base block 10 connects the second surfaces 12 and has a surface 13 parallel to the first surfaces 11. The base block 10 may be made of an insulating material, for example, ceramic, and may use zirconia (Zrconia, ZrO ₂ ) as the ceramic.

The fixing protrusion 15 is formed on the first surface 11 of the base block 10. The fixing protrusion 15 is formed to extend in one direction across the first surface 11. The fixing protrusion 15 protrudes in the direction of the probe support block 20.

The pair of probe support blocks 20 are coupled to the left and right sides of the base block 10, respectively. Since the width of the DDI is about 1 mm, the probe support blocks 20 on the left and right sides are separated by about 1 mm from each other.

4 is a perspective view of the probe support block shown in FIG. 1. Referring to FIG. 4, the probe support block 20 may be coupled to the third surface 21 coupled with the first surface 11 of the base block 10 and the second surface 12 of the base block 10. It has a fourth surface 22. It also has a probe support 23 which extends from the opposite side of the third side 21 and has an extension side 29 of the fourth side 22 and an opposite side 30 parallel to it. The probe support block 20 can be manufactured using zirconia similarly to the base block 10.

A plurality of first slots 24 are formed on the opposite side and the fourth side 22 of the probe support block 20. In the case of the DDI probe support block, the distance between the plurality of first slots 24 is about 30 μm, and the width of the first slots 24 is about 15 μm. The thickness of the walls between the first slots 24 is 15 μm. In the present invention, since the probe support block 20 is processed before joining to the base block 10, even when the width of the DDI is 1 mm or less, the first slot 24 can be processed using a diamond dicing saw. have.

In addition, a second slot 31 penetrating the extension surface 29 of the fourth surface 22 and the opposite surface 30 parallel to the probe support portion is formed. The second slot 31 is connected to the first slot 24. The first slot 24 and the second slot 31 can be processed at one time using a dicing saw.

The receiving groove 25 corresponding to the fixing protrusion 15 is formed long on the third surface 21 of the probe support block 20. When the fixing protrusion 15 is inserted into the receiving groove 25, the sides of the fixing protrusion 15 are in contact with the sides surrounding the receiving groove 25 so that the coupling between the probe support block 20 and the base block 10 is possible. It increases the precision. On the other hand, a space is formed between the upper surface of the fixing protrusion 15 and the receiving groove 25. This space is formed by the adhesive applied to the first surface 11 of the base block 10 and the third surface 21 of the probe support block 20 to join the probe support block 20 and the base block 10. Inflow. An epoxy resin, glass frit, etc. can be used as an adhesive agent. The probe support block 20 and the base block 10 made of a ceramic material such as zirconia have a very smooth surface. Therefore, the adhesive applied to the first surface 11 and the third surface 21 is the first surface 11 and the third surface 21 in order to join the probe support block 20 and the base block 10. When it is in close contact with each other, it flows along the first surface 11 and the third surface 21.

On the opposite side of the third surface 21 of the probe support block 20 is a groove 26 orthogonal to the first slots 24. The groove 26 is inserted with a fixing bar 27 having electrical insulation. The fixing bar 27 is fixed to the groove 26 using an adhesive such as epoxy. The fixing bar 27 serves to fix the probes 40 inserted into the first slots 24.

In addition, a plurality of channels 28 orthogonal to the first slots 24 are formed on the opposite side of the third surface 21 of the probe support block 20. This is to facilitate slotting. The plurality of channels 28 are formed before processing the first slots 24. The larger the number of channels 28 and the wider the channel 28, the easier the processing of the first slot 24, but the lower the mechanical strength of the probe support block 20.

5 is a perspective view of the probe shown in FIG. 1. Referring to FIG. 5, the probe 40 may include a first arm 41, a second arm 42 electrically connected to the first arm 41, and a first end formed at an end of the first arm 41. And a second terminal 44 formed at the end of the terminal 43 and the second arm 42. The first terminal 43 of the probe 40 is connected to the substrate of the measuring device, and the second terminal 44 contacts the terminal of the measurement object. The probe 40 is manufactured by etching a thin metal plate.

The first arm 41 is inserted into the first slot 24 and the second arm 42 is inserted into the second slot 31. The first arm 41 is provided with a protrusion 45 protruding in the direction of the third surface 21. A recess 47 is formed on the opposite side of the protrusion 45. The protrusion 45 is inserted into the lower portion of the groove 26, and the fixing bar 27 is inserted into the upper portion of the groove 26 to press the recess 47.

The first terminal 43 is provided with a terminal 46 to which a conductive wire connected to the measuring device substrate can be coupled. The terminals 46 of the first terminal 43 are formed to have different heights of the terminals 46 when viewed in a direction perpendicular to the second surface 12. This is to ensure sufficient space to facilitate connecting the conductors to the terminals 46.

6 is a perspective view of another embodiment of the probe structure according to the present invention, Figure 7 is an exploded perspective view of the probe structure shown in FIG. 6 and 7, the probe structure according to the present embodiment includes a base block 110, a pair of first probe support blocks 120, a pair of second probe support blocks 150, and a first probe 140. And second probes 170.

8 is a perspective view of the base block shown in FIG. 6. As can be seen in FIG. 8, the base block 110 is orthogonal to the first surfaces 111 and the first surfaces 111 facing the object to be measured and the second surface 112 connected to the first surfaces 111. Have them. In addition, the base block 110 connects the second surfaces 112 and has a surface 113 parallel to the first surfaces 111.

The fixing protrusion 115 is formed on the first surface 111 of the base block 110. The fixing protrusion 115 is formed to extend in one direction across the first surface 111. The fixing protrusion 115 protrudes in the direction of the first probe support block 120.

In addition, the support groove 114 is formed to be elongated in a direction orthogonal to the first slots 124 at a position that meets the second surface 112 of the first surface 111 of the base block 110.

9 is a perspective view of the first probe support block shown in FIG. 6. Referring to FIG. 9, the first probe support block 120 may include a third surface 121 coupled to the first surface 111 of the base block 110 and a second surface 112 of the base block 110. It has a fourth surface 122 that engages. In addition, it has a first probe support portion 123 extending from the opposite surface of the third surface 121, and having an extension surface 129 of the fourth surface 122 and an opposite surface 130 parallel to it.

A plurality of first slots 124 is formed on the third surface 121 and the fourth surface 122 of the first probe support block 120. In addition, a second slot 131 penetrates an extension surface 129 of the fourth surface 122 of the first probe support 123 and an opposite surface 130 parallel to the extension surface 129. The second slot 131 is connected to the first slot 124. The first slot 124 and the second slot 131 may be processed using a dicing saw, respectively.

The receiving groove 125 corresponding to the fixing protrusion 115 is formed long on the third surface 121 of the first probe support block 120. When the fixing protrusion 115 is inserted into the receiving groove 125, the side surfaces of the fixing protrusion 115 are in contact with the side surfaces forming the receiving groove 125 and the first probe support block 120 and the base block 110. It increases the coupling precision of. In addition, a space for accommodating the adhesive is formed between the upper surface of the fixing protrusion 115 and the receiving groove 125.

A plurality of first channels 120 orthogonal to the first slots 124 are formed on the third surface 121 of the first probe support block 120. This is to facilitate the processing of the first slot 124. The plurality of first channels 128 are formed before processing the first slots 124.

The pair of second probe support blocks 150 are coupled to the first probe support blocks 120, respectively.

FIG. 10 is a perspective view of the second probe support block shown in FIG. 6. Referring to FIG. 10, the second probe support block 150 may include a fifth surface 151 and a second probe support block 150 coupled to opposite surfaces of the third surface 121 of the first probe support block 120. Has a sixth surface 152 that engages with the first probe support. It also has a second probe support 153 extending from the opposite side of the fifth side 151 and having an extending side 159 of the sixth side 152 and an opposite side side 160 parallel thereto. Like the base block 110, the second probe support block 150 may be manufactured using zirconia.

A plurality of third slots 154 are formed on opposite surfaces of the fifth surface 151 and the sixth surface 152 of the second probe support block 150. In addition, a fourth slot 161 penetrating through an extension surface 159 of the sixth surface 152 of the second probe support portion and an opposite surface 160 parallel to the extension surface 159 is formed. The fourth slot 161 is connected to the third slot 154. The third slot 154 and the fourth slot 161 may be processed at once using a dicing saw.

The third slots 154 and the fourth slots 161 are alternately arranged so that the first probes 140 and the second probes 170 do not overlap each other when viewed in a direction perpendicular to the first surface 111. , Between the first slots 124 and the second slots 131. Since the spacing between the first slots 124 is about 30 μm, and the spacing between the third slots 154 is also about 30 μm, when arranged in this way, the first probe 140 and the second probe 170 are disposed. It can be arranged at intervals of about 15㎛.

A groove 156 orthogonal to the third slots 154 is formed on an opposite surface of the fifth surface 151 of the second probe support block 150. The groove 156 is inserted with a fixing bar 157 having electrical insulation. The fixing bar 157 is fixed to the groove 156 using an adhesive such as epoxy. The fixing bar 157 serves to fix the second probes 170 inserted into the third slots 154.

On the opposite side of the fifth surface 151 of the second probe support block 150, a plurality of second channels 158 orthogonal to the third slots 154 are formed. This is to facilitate the processing of the third slot 154. The plurality of second channels 158 are formed before processing the third slots 154.

FIG. 11 is a perspective view of the first probe shown in FIG. 6. Referring to FIG. 11, the first probe 140 supports the first arm 141 and the second arm 142 and the first arm 141, which are electrically and physically connected to the first arm 141. The arm 148 includes a first terminal 143 formed at an end of the first arm 141 and a second terminal 144 formed at an end of the second arm 142.

The first arm 141 is inserted into the first slot 124 and the second arm 142 is inserted into the second slot. The first protrusion 145 is formed on the first arm 141, and the first recess 147 is formed on the opposite side of the first protrusion 145. The first protrusion 145 is inserted into the receiving groove 125 formed in the third surface 121 of the first probe support block 120. The fixing protrusion 115 inserted into the receiving groove 125 is inserted into the first recess 147.

The support arm 148 is inserted into the support groove 114 of the base body. The support arm 148 serves to prevent the scrub phenomenon that is pushed while the second terminal 144 of the first probe 140 is in close contact with the pad of the measurement object during the measurement process. The support arm 148 is supported by the surrounding second surface 112 and the surface facing the second surface 112 of the support groove 114 to prevent the second terminal 144 from being pushed forward or backward during the measurement process. do.

The first terminal 143 is formed with a terminal 146 to which the conductor connected to the measuring device substrate can be coupled.

12 is a perspective view of the second probe shown in FIG. 6. Referring to FIG. 12, the second probe 170 is formed at the end of the third arm 171, the fourth arm 172, and the third arm 171 electrically and physically connected to the third arm 171. And a fourth terminal 174 formed at the end of the third terminal and the fourth arm 172. The third terminal 173 of the second probe 170 is connected to the substrate of the measuring device, and the fourth terminal 174 contacts the terminal of the measurement object.

The third arm 171 is inserted into the third slot 154, and the fourth arm 172 is inserted into the fourth slot 161. A second protrusion 175 protruding toward the fifth surface 151 is formed in the third arm 171. The second recess 177 is formed on the opposite side of the second protrusion 175. The second protrusion 175 is inserted into the lower portion of the groove 156 of the second probe support block 150, and the fixing bar 157 is inserted into the upper portion of the groove 156 to open the second recess 177. Press

The third terminal 173 is provided with a terminal to which a conductive wire connected to the measuring device substrate can be coupled.

6 and 7, terminals of the first arm 141 of the first probes 140 adjacent to each other and terminals of the third arm 171 of the second probes 170 may have a second surface 112. When viewed from the direction perpendicular to the) is formed so that the height is different from each other.

When viewed from the direction perpendicular to the first surface 111, the second terminal 144 of the first probe 140 and the fourth terminal 174 of the second probe 170 are disposed in a straight line.

13 is a partial perspective view of another embodiment of a probe structure according to the present invention. In this embodiment, the shape of the second probe 270 is changed, so that the second terminal 144 of the first probe 140 and the fourth terminal 274 of the second probe 270 are arranged in parallel with each other. Since there is no difference from the embodiment shown in FIG. 6 except for the arrangement, the same parts are assigned the same reference numerals and description thereof will be omitted.

The present embodiment is for measuring the electrical characteristics of the measurement object in which the pads are arranged in two rows in order to narrow the gap between the pads, and the second terminal 144 of the first probe 140 and the second probe 270 are formed. The four terminals 274 are parallel to each other and are arranged in different straight lines at regular intervals. This embodiment has an advantage that the distance between the first probe 140 and the second probe 270 can be narrowed compared to the embodiment shown in FIG.

The fourth terminal 274 of the second probe 270 so that the second terminal 144 of the first probe 140 and the fourth terminal 274 of the second probe 270 are arranged in different lines. Is formed on an extension line of the fourth arm 272, unlike the fourth terminal 174 of the embodiment shown in FIG.

While one embodiment of the present invention has been described above, it is apparent that various modifications are possible without departing from the scope of the present invention.

For example, although one or two pairs of probe support blocks are coupled to the left and right sides of the base block, the probe support blocks may be coupled to the top, bottom, left, and right sides of the base block when the measurement target has measurement terminals on four sides. have.

The fixing protrusion has been described as being formed in a direction orthogonal to the slots, but may be formed in a direction parallel to the slots.

In the embodiment shown in FIG. 6, the second probe support block and the second probe may not be coupled.

10, 110: base block 11, 111: first page
12, 112: 2nd page 15, 115: fixing protrusion
20: probe support blocks 21, 121: third surface
22, 122: 4th surface 23: probe support part
24, 124: slot 1 25, 125: receiving groove
26, 156 groove 27, 157 fixing bar
28: channel 31, 131: second slot
40: probe 41, 141: first arm
42, 142: Second arm 43, 143: Terminal 1
44, 144: Terminal 2 45: protrusion
46, 146, 176: terminal 47: recess
114: support groove 120: first probe support block
123: first probe support 128: first channel
140: first probe 145: first projection
147: first recess 148: support
150: second probe support block 151: fifth surface
152: sixth surface 153: second probe support
154: third slot 158: second channel
161: fourth slot 170, 270: second probe
171: third arm 172: fourth arm
173 Terminal 3 174 Terminal 3
175: second projection 177: the second recess

Claims (26)

In the probe structure for measuring the electrical properties of the measurement object,
A base block having a first surface facing the object to be measured and a second surface not parallel to the first surface and meeting the first surface;
A third surface that engages with the first surface of the base block and a fourth surface that engages with the second surface of the base block; A probe support block in which one slot is formed,
The probe may include a first arm inserted into a first slot on an opposite side of the third surface, a second arm electrically and physically connected to the first arm and inserted into a first slot on a fourth surface of the probe; A probe structure comprising: a first terminal formed at one end of the arm and connected to a measuring device; and a second terminal formed at the end of the second arm and formed to contact the measurement object. The method of claim 1,
The probe support block extends from an opposite surface of the third surface, has an extension surface of the fourth surface and an opposite surface thereof, and has a second slot connected to the first slot and into which the second arm is inserted. A probe structure further comprising a probe support. The method of claim 1,
At least one channel orthogonal to the first slots is formed on an opposite side of the third surface of the probe support block. The method of claim 1,
And a groove orthogonal to the first slots is formed on a surface opposite to the third surface of the probe support block, and a fixing bar formed to fix the probes is inserted into the groove. The method of claim 1,
A fixing protrusion protruding in the direction of the probe support block is formed on the first surface of the base block, and a receiving groove is formed on the third surface of the probe support block to accommodate the fixing protrusion at a position corresponding to the fixing protrusion. Probe structure, characterized in that. The method of claim 5,
And a space for accommodating the remaining amount of the adhesive applied to adhere the first and third surfaces between the fixing protrusion and the inner surface of the receiving groove. 5. The method of claim 4,
Probe structure, characterized in that the first arm of the probe is formed with a projection protruding to be inserted into the groove. 5. The method of claim 4,
Probe structure characterized in that the first arm of the probe is formed with a recess so that the fixing bar is inserted. The method of claim 1,
Terminals for coupling conducting wires electrically connected to the measuring device are formed in the first terminal of the probe, and terminals of neighboring probes are formed to have different heights when viewed from a direction perpendicular to the second surface. Probe structure. In the probe structure for measuring the electrical properties of the measurement object,
A base block having a first surface facing the object to be measured and a second surface not parallel to the first surface and meeting the first surface;
A third surface coupled to the first surface of the base block and a fourth surface coupled to the second surface of the base block, the first surface to accommodate the first probes on the third surface and the fourth surface; A first probe support block in which slots are formed;
The first probe has a first arm inserted into a first slot of the third surface, a second arm electrically and physically connected to the first arm and inserted into a first slot of a fourth surface, and the first arm. And a first terminal formed at the end of the arm and connected to the measuring device, and a second terminal formed at the end of the second arm and in contact with the measurement object. The method of claim 10,
The first probe support block extends from an opposite surface of the third surface, has a surface extending from the fourth surface and an opposite surface thereof, is connected to the first slot, and has a second arm inserted therein. Probe structure further comprises a slotted first probe support. 12. The method of claim 11,
A fifth surface coupled to the opposite surface of the third surface and a sixth surface coupled to the first probe support portion, and a plurality of agents to accommodate the second probes on the opposite surface and the sixth surface of the fifth surface; Further comprising a second probe support block formed with three slots,
The second probe may include a third arm inserted into a third slot opposite to the fifth surface, a fourth arm electrically and physically connected to the third arm and inserted into a third slot on the sixth surface; A third terminal formed at the end of the third arm and connected to the measurement device, and a fourth terminal formed at the end of the fourth arm and formed to contact the measurement object,
And the second slots are formed between the first slots such that the first probes and the second probes are alternately disposed so as not to overlap each other when viewed in a direction perpendicular to the first surface. The method of claim 12,
The second probe support block extends from an opposite surface of the fifth surface, has a surface extending from the sixth surface and an opposite surface thereof, is connected to the third slot, and is inserted into the fourth arm. The probe structure further comprises a second probe support formed with four slots. The method of claim 10,
And at least one first channel orthogonal to the first slots is formed on a third surface of the first probe support block. The method of claim 12,
And at least one second channel orthogonal to the second slots is formed on a surface opposite to the fifth surface of the second probe support block. The method of claim 12,
And a groove orthogonal to the second slots is formed on an opposite side of the fifth surface of the second probe support block, and a fixing bar formed to fix the second probes is inserted into the groove. The method of claim 10,
A fixing protrusion protruding in the direction of the first probe support block is formed on the first surface of the base block, and a third protrusion of the first probe supporting block is formed to receive the fixing protrusion at a position corresponding to the fixing protrusion. Probe structure characterized in that the receiving groove is formed. 18. The method of claim 17,
And a space for accommodating the remaining amount of the adhesive applied to adhere the first and third surfaces between the fixing protrusion and the inner surface of the receiving groove. The method of claim 10,
A support groove is formed to be elongated in a direction orthogonal to the first slots at a position meeting the second surface of the first surface of the base block,
The first probe further comprises a support arm extending in a direction opposite to the second arm, wherein the support arm is inserted into the support groove. The method of claim 12,
2. The probe structure of claim 1, wherein the second terminal of the first probe and the fourth terminal of the second probe are disposed in a straight line when viewed in a direction perpendicular to the first surface. The method of claim 12,
When viewed from the direction perpendicular to the first surface, the second terminals of the first probe are arranged in a straight line, and the fourth terminal of the second probe is parallel to the second terminals and is arranged in another straight line at a predetermined interval. Probe structure, characterized in that disposed on. 18. The method of claim 17,
And a first protrusion protruding from the first arm of the first probe to be inserted into the receiving groove. 18. The method of claim 17,
Probe structure, characterized in that formed in the first arm of the first probe is a first recess portion into which the fixing projection is inserted. 17. The method of claim 16,
And a third protrusion protruding from the third arm of the second probe to be inserted into the groove. 17. The method of claim 16,
The third structure of the second probe probe structure, characterized in that the second concave portion into which the fixing bar is inserted. The method of claim 12,
The first terminal of the first probe and the third terminal of the second probe are formed with terminals for coupling conducting wires electrically connected to the measuring device, and the terminals of the first probes and the terminals of the second probes which are adjacent to each other. They are formed so that the height is different from each other when viewed from the direction perpendicular to the second surface.

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