KR101291893B1 - Liquid Crystal Display Panel and Method For Fabricating Thereof - Google Patents

Abstract

The present invention relates to a liquid crystal display panel and a method of manufacturing the same that can prevent environmental pollution and improve yield.

The present invention includes a black matrix formed on a substrate and partitioning a cell region; And a color filter formed in the cell region partitioned by the black matrix, wherein the black matrix is made of DLC (Diamond Like Carbon) material.

Description

Liquid Crystal Display Panel and Method For Fabricating Thereof}

1 is a cross-sectional view showing a color filter array substrate employing a conventional chrome black matrix.

2 is a cross-sectional view showing a color filter array substrate employing a conventional resin black matrix.

3 is a cross-sectional view illustrating a liquid crystal display panel according to an exemplary embodiment of the present invention.

4 is a perspective view showing a DLC thin film manufacturing apparatus.

5 is a block diagram functionally blocking the DLC manufacturing apparatus of FIG.

6A to 6C are cross-sectional views illustrating a method of manufacturing a color filter array substrate of a liquid crystal display panel according to the present invention.

Fig. 7 is a sectional view showing the color filter array substrate of the liquid crystal display panel in IPS mode.

Fig. 8A is a sectional view of a color filter array substrate of a liquid crystal display panel of MVA mode.

Fig. 8B is a sectional view showing the color filter array substrate of the liquid crystal display panel in PVA mode.

    <Explanation of symbols for the main parts of the drawings>

2,102: upper substrate 4,104: black matrix

18,118: common electrode 6,106: color filter

70,170: Color Filter Array Substrate

80,180: thin film transistor array substrate

100,200: liquid crystal display panel 132: upper substrate

20,120 thin film transistor 152 liquid crystal

116: pixel electrode 175: overcoat layer

109: gate electrode 114, 142: semiconductor layer

140: source electrode 147: drain electrode

144: gate insulating film 150: protective film

108,138: alignment layer 231: case

232: cathode electrode 233: anode electrode

234: magnet assembly 174: rib

165: slit

BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a liquid crystal display panel, and more particularly, to a liquid crystal display panel and a method for manufacturing the same, which can prevent environmental pollution and improve yield.

In general, a liquid crystal display (LCD) displays an image corresponding to a video signal on a liquid crystal display panel in which liquid crystal cells are arranged in a matrix form by adjusting light transmittance of liquid crystal cells according to a video signal. To this end, the liquid crystal display device includes a liquid crystal display panel in which liquid crystal cells are arranged in an active matrix form, and driving circuits for driving the liquid crystal display panel.

The liquid crystal display panel is divided into a color filter array substrate and a thin film transistor array substrate facing each other with a liquid crystal interposed therebetween.

The thin film transistor array substrate includes a thin film transistor formed on a lower substrate, a pixel electrode, and the like, and the color filter array substrate includes a black matrix, a color filter, and the like sequentially formed on the upper substrate.

1 is a view showing a conventional color filter array substrate.

The color filter array substrate 70 illustrated in FIG. 1 includes a black matrix 4, a color filter 6, and a common electrode 18 sequentially formed on the upper substrate 2. In some cases, an overcoat layer may be further provided.

The black matrix 4 partitions the cell area in which the color filter 6 is to be formed, and prevents light leakage and absorbs external light to enhance contrast.

The color filter 6 is formed in the cell region partitioned by the black matrix 4 and partially formed over the black matrix 4. The color filter 6 is formed for each of R, G, and B to implement R, G, and B colors. The common electrode 18 is entirely formed on the color filter 6 and supplied with a reference voltage which is a reference when driving the liquid crystal.

As a conventional black matrix 4 material, chromium (Cr) is used. Chromium (Cr) is an opaque metal that can prevent light leakage and absorb external light. However, it is regulated as a heavy metal material due to environmental pollution.

Accordingly, a technique of forming a black matrix using an opaque resin instead of chromium (Cr) has been proposed.

2 is a cross-sectional view showing a color filter array substrate 70 including a black matrix 14 using an opaque resin.

The resin is formed by a coating method such as spin coating and spinless coating as an organic material. However, due to the thick thickness of the organic material, the area corresponding to the black matrix 14 has a protruding structure compared to other areas. Accordingly, it is more sensitive to external impacts than other regions, and cracks are easily generated due to the nature of the organic material. As a result, there arises a problem that the yield decreases, such as light leakage.

Accordingly, an object of the present invention is to provide a liquid crystal display panel and a method of manufacturing the same that can prevent environmental pollution and improve yield.

In order to achieve the above object, a liquid crystal display device according to an embodiment of the present invention, a black matrix formed on a substrate and partitioning a cell region, a color filter formed on a cell region partitioned by the black matrix, and on the color filter. The common electrode is positioned, and the black matrix is made of DLC (Diamond Like Carbon) material.

In some cases, the liquid crystal display may further include an overcoat layer disposed on the color filter.

According to an aspect of the present invention, there is provided a method of manufacturing a liquid crystal display panel, the method comprising: forming a black matrix formed of a DLC (Diamond Like Carbon) material on a cell region; Forming a color filter in a cell region partitioned by the black matrix; Forming a common electrode on the color filter. In some cases, the method may further include forming an overcoat layer on the color filter.

The forming of the black matrix may include separating the hydrocarbon gas into cations and electrons; Colliding the electrons with the hydrocarbon-based cation to generate a carbon cation; Depositing the carbon cation on the substrate to form a DLC thin film; Patterning the DLC thin film.

In particular, the hydrocarbon gas uses any one of acetylene (C ₂ H ₂ ), methane (CH ₄ ), benzene (C ₆ H ₆ ).

In addition, the collision of electrons with the hydrocarbon-based cations to generate carbon cations includes trapping the electrons using a magnetic field to increase the number of collisions between the electrons and the hydrocarbon-based cations.

Forming the DLC thin film by depositing the carbon cations on the substrate includes reciprocating the substrate to deposit the carbon cations on the substrate by scanning.

The method may further include forming a common electrode formed on the color filter and having a slit.

Forming a common electrode on the color filter; The method may further include forming ribs on the common electrode.

Other objects and features of the present invention will become apparent from the following description of embodiments with reference to the accompanying drawings.

Hereinafter, exemplary embodiments of the present invention will be described with reference to FIGS. 3 to 8B.

3 is a cross-sectional view illustrating a liquid crystal display panel 100 according to the present invention.

The liquid crystal display panel 100 illustrated in FIG. 3 is divided into a color filter array substrate 170 and a thin film transistor array substrate 180 which face each other with the liquid crystal 152 therebetween.

The color filter array substrate 170 includes a black matrix 104, a color filter 106, a common electrode 118, and an upper alignment layer 108 sequentially formed on the upper substrate 102. In some cases, an overcoat layer may be further formed.

The thin film transistor array substrate 180 includes a thin film transistor 120 formed on the lower substrate 132, a pixel electrode 116, a lower alignment layer 138, and the like.

In the color filter array substrate 170, the black matrix 104 corresponds to the region of the thin film transistor 120, the gate lines (not shown), and the data lines (not shown) of the thin film transistor array substrate 180. The cell region in which the color filter 106 is to be formed is divided. The black matrix 104 prevents light leakage and absorbs external light to increase contrast. The color filter 106 is formed over the cell region partitioned by the black matrix 104 and the black matrix 104. The color filter 106 is formed for each of R, G, and B to implement R, G, and B colors. The common electrode 118 is formed on the entire surface of the upper substrate 102 and is supplied with a reference voltage which is a reference when driving the liquid crystal 152.

In some cases, an overcoat layer may be formed on the color filter 106.

In the thin film transistor array substrate 180, the thin film transistor 120 includes a gate electrode 109 formed on the lower substrate 132 together with a gate line, and the gate electrode 109 and the gate insulating layer 144 therebetween. Semiconductor layers 114 and 142 overlapping each other, and source / drain electrodes 140 and 147 formed together with data lines (not shown) with the semiconductor layers 114 and 142 interposed therebetween. The thin film transistor 120 supplies a pixel signal from the data line to the pixel electrode 116 in response to a scan signal from the gate line.

The pixel electrode 116 is a transparent conductive material having a high light transmittance and is in contact with the drain electrode 147 of the thin film transistor 120 with the passivation layer 150 therebetween. The upper and lower alignment layers 108 and 138 for liquid crystal alignment are formed by applying an alignment material such as polyimide and then performing a rubbing process or by alignment using ultraviolet rays.

A diamond like carbon (DLC) thin film is used as the black matrix 104 in the liquid crystal display panel 100 having the above structure.

In general, DLC thin films are similar to diamond in terms of high hardness, electrical insulation, low friction coefficient and wear resistance. In particular, it is actively used in hard disks, VTR head drums, and glass products.

The DLC thin film is a material that is not concerned with environmental pollution, and the mechanical strength is also tens to hundreds of times higher than that of the resin black matrix, and thus it can withstand physical forces externally.

Therefore, by using the DLC thin film as the black matrix, it is possible to prevent environmental pollution and at the same time reduce the yield.

The DLC thin film may be formed by PECVD, laser deposition, or the like.

The present invention proposes a DLC thin film manufacturing method more effective than PECVD, laser deposition method.

4 is a perspective view showing a DLC manufacturing apparatus.

The DLC manufacturing apparatus includes a case 231, a cathode electrode 232 fastened to an upper surface of the case 231, and a lower portion of the cathode electrode 232 insulated from the case 231 by a predetermined insulator. The magnet assembly 234 for advancing the etching gas ions excited by the anode electrode 233, the cathode electrode 232, and the anode electrode 233 in a predetermined direction, and the case 231 through the gas line. It includes a gas supply unit 235 for discharging the gas supplied to the back side into the case 231.

The case 231 has a hollow rectangular parallelepiped structure, and the case 231 has an anode electrode 233 and a gas supply part 235 mounted therein in an internal space, and the case 231 has a gas inside the bottom surface thereof. A gas injection hole 237 through which a gas supplied through the line is injected is formed. The anode electrode 233 is formed with a slit-shaped gas groove 236 through which gas ions excited in a plasma state are emitted.

The magnet assembly 234 uses a permanent magnet or an electromagnet, and when a strong magnetic field is applied between the narrow gaps, an electric charge is trapped between the gaps, and a lot of plasma is generated, which is emitted through the gas groove 236 to improve the ionization rate of the gas. You can increase it.

In this case, the gas groove 236 is positioned to correspond to the gas injection hole 237 positioned on the bottom surface of the case 231 and to surround the gas holes 239 formed in the gas supply part 235.

The cathode electrode 232 is a first cathode electrode 232a fixed to the upper surface of the case 231 through a jack screw, and the second cathode electrode 232b formed on the lower surface of the first cathode electrode 232a. )

At this time, the first cathode electrode 232a is formed in a ring shape and is fastened to the upper surface of the case 231, and the second cathode electrode 232b is positioned to overlap the anode electrode 233 having the gas grooves 236. In addition, by being coupled to the magnet assembly 234 does not prevent the gas ions are discharged to the outside through the gas groove 236.

The anode electrode 233 is inserted into and fixed to a gap formed between the case 231 and the gas supply part 235, and is spaced apart from the second cathode electrode 232b constituting the cathode electrode 232 by a predetermined distance.

At this time, the cathode electrode 232 and the anode electrode 233 in conjunction with a drive power applied from the outside to induce a high voltage between the electrodes to excite the gas supplied from the gas supply unit 235 as gas ions in the plasma state Do this.

The magnet assembly 234 traps the gas supplied from the gas supply unit 235 between the cathode electrode 232 and the anode electrode 233 and advances the gas ions excited in the plasma state in the direction in which the substrate is located. To perform.

DLC thin film can be formed using a DLC manufacturing apparatus having such a configuration. FIG. 5 is a block diagram functionally blocking the DLC manufacturing apparatus of FIG. 4.

Referring to FIG. 5, a hydrocarbon gas, for example, acetylene (C ₂ H ₂ ), methane (CH ₄ ), benzene (C ₆ H ₆ ), or the like is supplied from the gas supply unit 235, and the anode electrode 233 is supplied. Maintaining a high voltage between the and the cathode electrode 232 generates a plasma in which the hydrocarbon gas is separated into electrons and hydrocarbon cations.

For example, when acetylene (C ₂ H ₂ ) is used as a hydrocarbon gas, acetylene (C ₂ H ₂ ) is separated into electrons (e ⁻ ) and acetylene cations (C ₂ H ₂ ⁺ ), as shown in Chemical Formula 1.

_{C 2 H 2 -> C 2} H 2 + + e -

Afterwards, electrons (e ⁻ ) collide with C ₂ H ₂ ⁺ to generate carbon cations (C ⁺ ).

Magnet assembly 234 is electron (e ^-), the gas ions excited by plasma state and simultaneously to trap a increase in the amount of carbon cation (C ⁺⁾ i.e., proceed to carbon cation (C ⁺⁾ in the direction in which the substrate is positioned Let's do it.

Here, the DLC thin film forming process is performed at room temperature and the substrate is reciprocated on the DLC manufacturing apparatus so that the DLC thin film can be formed on the substrate in a scanning manner. As gas ions are deposited by the scan method, the uniformity of the DLC thin film is very good.

After the DLC thin film is formed in this manner, a photolithography process and an etching process are performed. As shown in FIG. 6A, the black matrix 104 made of the DLC thin film can be formed on the upper substrate 102. do.

After the red resin is deposited on the upper substrate 102 on which the black matrix 104 is formed, the red color filter R is formed by patterning the red resin by a photolithography process and an etching process using a mask.

After the green resin is deposited on the upper substrate 102 on which the red color filter R is formed, the green color filter G is formed by patterning the green resin by a photolithography process and an etching process using a mask.

After the blue resin is deposited on the upper substrate 102 where the green color filter G is formed, the blue resin is patterned by a photolithography process and an etching process using a mask to form a blue color filter B. As a result, as shown in FIG. 6B, the red (R), green (G), and blue (B) color filters 106 are formed on the upper substrate 102 on which the black matrix 104 is formed.

Thereafter, in the case of the TN mode liquid crystal display panel, the common electrode 118 is formed as shown in FIG. 6C, and in the case of the IPS mode liquid crystal display panel, the overcoat layer 175 is formed as shown in FIG. 7. do.

As described above, a technique for forming a DLC thin film having a high mechanical strength with a black matrix is not limited to the above-described TN and IPS modes, but a multi-domain vertical alignment (MVA) for forming ribs on the common electrode, and a slit on the common electrode. It can also be used for Patterned Vertical Alignment (PVA).

8A is a cross-sectional view illustrating a color filter array substrate of an MVA mode liquid crystal display panel.

The color filter array substrate of the MVA mode liquid crystal display panel forms ribs 174 of inorganic or organic material on the common electrode 118, and forms an upper alignment layer 108 on the entire surface of the common electrode 118 on which the ribs 174 are formed. . Accordingly, one pixel of the rib 174 may be a multi-domain divided into a plurality of regions having different liquid crystal alignments. That is, the MVA mode uses the rib 174 as the electric field distortion means.

8B is a cross-sectional view illustrating a color filter array substrate of a PVA mode liquid crystal display panel.

The color filter array substrate of the PVA mode liquid crystal display panel includes a slit 165 by selectively removing the common electrode 118 to distort the electric field to control the liquid crystal alignment. An upper alignment layer 108 is formed on the common electrode 118 on which the slit 165 is formed. That is, the PVA mode uses the slit 165 as the electric field distortion means.

As described above, the liquid crystal display panel and the method of manufacturing the same according to the embodiment of the present invention can form a black matrix with a DLC thin film having good mechanical strength, thereby preventing environmental pollution and preventing yield reduction.

Claims (14)

delete delete delete delete delete Forming a black matrix formed of a DLC (Diamond Like Carbon) material on the substrate and partitioning the cell region; Forming a color filter in a cell region partitioned by the black matrix; Forming the black matrix, Separating the hydrocarbon gas into cations and electrons; Colliding the electrons with the hydrocarbon-based cation to generate a carbon cation; Depositing the carbon cation on the substrate to form a DLC thin film; And patterning the DLC thin film. delete The method of claim 6, The hydrocarbon gas is It is any one of acetylene (C ₂ H ₂ ), methane (CH ₄ ), benzene (C ₆ H ₆ ) The manufacturing method of the liquid crystal display panel. The method of claim 6, Colliding the electron with the hydrocarbon-based cation to generate a carbon cation And trapping the electrons by using a magnetic field to increase the number of collisions between the electrons and the hydrocarbon-based cations. The method of claim 6, Depositing the carbon cation on the substrate to form a DLC thin film And reciprocating the substrate to deposit the carbon cations on the substrate in a scanning manner. The method of claim 6, Forming a common electrode on the color filter. The method of claim 6, And forming a planarization layer on the color filter. The method of claim 6, And forming a common electrode formed over the color filter and having a slit. The method of claim 6, Forming a common electrode on the color filter; And forming a rib on the common electrode.

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