KR101283259B1 - 펌프에 있어서 기계식 피스톤의 위치 제어를 위한 시스템 및 방법 - Google Patents

펌프에 있어서 기계식 피스톤의 위치 제어를 위한 시스템 및 방법 Download PDF

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Publication number
KR101283259B1
KR101283259B1 KR1020137007190A KR20137007190A KR101283259B1 KR 101283259 B1 KR101283259 B1 KR 101283259B1 KR 1020137007190 A KR1020137007190 A KR 1020137007190A KR 20137007190 A KR20137007190 A KR 20137007190A KR 101283259 B1 KR101283259 B1 KR 101283259B1
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KR
South Korea
Prior art keywords
pump
motor
discharge
frequency
brushless
Prior art date
Application number
KR1020137007190A
Other languages
English (en)
Korean (ko)
Other versions
KR20130036380A (ko
Inventor
조오지 곤넬라
제임스 세트론
이라즈 가쉬가이
Original Assignee
엔테그리스, 아이엔씨.
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Priority claimed from PCT/US2005/042127 external-priority patent/WO2006057957A2/en
Application filed by 엔테그리스, 아이엔씨. filed Critical 엔테그리스, 아이엔씨.
Publication of KR20130036380A publication Critical patent/KR20130036380A/ko
Application granted granted Critical
Publication of KR101283259B1 publication Critical patent/KR101283259B1/ko

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Classifications

    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04B—POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS
    • F04B49/00—Control, e.g. of pump delivery, or pump pressure of, or safety measures for, machines, pumps, or pumping installations, not otherwise provided for, or of interest apart from, groups F04B1/00 - F04B47/00
    • F04B49/06—Control using electricity
    • F04B49/065—Control using electricity and making use of computers
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04B—POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS
    • F04B49/00—Control, e.g. of pump delivery, or pump pressure of, or safety measures for, machines, pumps, or pumping installations, not otherwise provided for, or of interest apart from, groups F04B1/00 - F04B47/00
    • F04B49/06—Control using electricity
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04B—POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS
    • F04B13/00—Pumps specially modified to deliver fixed or variable measured quantities
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04B—POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS
    • F04B17/00—Pumps characterised by combination with, or adaptation to, specific driving engines or motors
    • F04B17/03—Pumps characterised by combination with, or adaptation to, specific driving engines or motors driven by electric motors
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04B—POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS
    • F04B43/00—Machines, pumps, or pumping installations having flexible working members
    • F04B43/0009—Special features
    • F04B43/0081—Special features systems, control, safety measures
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04B—POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS
    • F04B43/00—Machines, pumps, or pumping installations having flexible working members
    • F04B43/02—Machines, pumps, or pumping installations having flexible working members having plate-like flexible members, e.g. diaphragms
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04B—POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS
    • F04B49/00—Control, e.g. of pump delivery, or pump pressure of, or safety measures for, machines, pumps, or pumping installations, not otherwise provided for, or of interest apart from, groups F04B1/00 - F04B47/00
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04B—POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS
    • F04B2201/00—Pump parameters
    • F04B2201/02—Piston parameters
    • F04B2201/0201—Position of the piston
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04B—POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS
    • F04B2201/00—Pump parameters
    • F04B2201/12—Parameters of driving or driven means
    • F04B2201/1208—Angular position of the shaft

Landscapes

  • Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • General Engineering & Computer Science (AREA)
  • Computer Hardware Design (AREA)
  • Reciprocating Pumps (AREA)
  • Control Of Positive-Displacement Pumps (AREA)
  • Control Of Motors That Do Not Use Commutators (AREA)
  • Exposure Of Semiconductors, Excluding Electron Or Ion Beam Exposure (AREA)
KR1020137007190A 2005-11-21 2006-11-20 펌프에 있어서 기계식 피스톤의 위치 제어를 위한 시스템 및 방법 KR101283259B1 (ko)

Applications Claiming Priority (7)

Application Number Priority Date Filing Date Title
PCT/US2005/042127 WO2006057957A2 (en) 2004-11-23 2005-11-21 System and method for a variable home position dispense system
WOPCT/US2005/042127 2005-11-21
US74166005P 2005-12-02 2005-12-02
US60/741,660 2005-12-02
US84172506P 2006-09-01 2006-09-01
US60/841,725 2006-09-01
PCT/US2006/044907 WO2007061957A2 (en) 2005-11-21 2006-11-20 System and method for position control of a mechanical piston in a pump

Related Parent Applications (1)

Application Number Title Priority Date Filing Date
KR1020087014266A Division KR101279747B1 (ko) 2005-11-21 2006-11-20 펌프에 있어서 기계식 피스톤의 위치 제어를 위한 시스템및 방법

Publications (2)

Publication Number Publication Date
KR20130036380A KR20130036380A (ko) 2013-04-11
KR101283259B1 true KR101283259B1 (ko) 2013-07-11

Family

ID=39592976

Family Applications (2)

Application Number Title Priority Date Filing Date
KR1020087014266A KR101279747B1 (ko) 2005-11-21 2006-11-20 펌프에 있어서 기계식 피스톤의 위치 제어를 위한 시스템및 방법
KR1020137007190A KR101283259B1 (ko) 2005-11-21 2006-11-20 펌프에 있어서 기계식 피스톤의 위치 제어를 위한 시스템 및 방법

Family Applications Before (1)

Application Number Title Priority Date Filing Date
KR1020087014266A KR101279747B1 (ko) 2005-11-21 2006-11-20 펌프에 있어서 기계식 피스톤의 위치 제어를 위한 시스템및 방법

Country Status (6)

Country Link
EP (1) EP1954946B1 (ja)
JP (2) JP5339915B2 (ja)
KR (2) KR101279747B1 (ja)
CN (1) CN103016324B (ja)
TW (2) TWI493107B (ja)
WO (1) WO2007061957A2 (ja)

Families Citing this family (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US9753443B2 (en) * 2014-04-21 2017-09-05 Synerject Llc Solenoid systems and methods for detecting length of travel
DE102015201884B4 (de) * 2015-02-04 2023-07-27 Schaeffler Technologies AG & Co. KG Fluidische Betätigungsanordnung
FR3050513B1 (fr) * 2016-04-26 2018-11-16 Erca Dispositif de distribution de produit liquide ou pateux
DE102017112975B3 (de) * 2017-06-13 2018-10-25 KNF Micro AG Membranpumpe
JP6920923B2 (ja) * 2017-08-25 2021-08-18 株式会社Ｓｃｒｅｅｎホールディングス ポンプ装置および基板処理装置
DE102019117731A1 (de) * 2019-07-01 2021-01-07 Ebm-Papst St. Georgen Gmbh & Co. Kg Verfahren zur Positionserfassung der Membran einer elektromotorisch angetriebenen Membranpumpe

Citations (2)

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US6348124B1 (en) 1999-12-14 2002-02-19 Applied Materials, Inc. Delivery of polishing agents in a wafer processing system
US6506030B1 (en) 1999-01-05 2003-01-14 Air Products And Chemicals, Inc. Reciprocating pumps with linear motor driver

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US5018A (en) * 1847-03-13 Improvement in machinery for combing wool
JPS63255575A (ja) * 1987-04-10 1988-10-21 Yoshimoto Seisakusho:Kk ポンプ装置
US5167837A (en) * 1989-03-28 1992-12-01 Fas-Technologies, Inc. Filtering and dispensing system with independently activated pumps in series
US5312233A (en) 1992-02-25 1994-05-17 Ivek Corporation Linear liquid dispensing pump for dispensing liquid in nanoliter volumes
US5336884A (en) * 1992-07-01 1994-08-09 Rockwell International Corporation High resolution optical hybrid absolute incremental position encoder
US5947702A (en) * 1996-12-20 1999-09-07 Beco Manufacturing High precision fluid pump with separating diaphragm and gaseous purging means on both sides of the diaphragm
JPH11356081A (ja) * 1998-06-09 1999-12-24 Matsushita Electric Ind Co Ltd インバータ装置
US6390780B1 (en) * 1998-09-24 2002-05-21 Rule Industries, Inc. Pump and controller system and method
CN1590761A (zh) * 1998-11-23 2005-03-09 米利波尔公司 用于精密泵设备的泵调节器
US7029238B1 (en) * 1998-11-23 2006-04-18 Mykrolis Corporation Pump controller for precision pumping apparatus
US6575264B2 (en) * 1999-01-29 2003-06-10 Dana Corporation Precision electro-hydraulic actuator positioning system
US6464464B2 (en) * 1999-03-24 2002-10-15 Itt Manufacturing Enterprises, Inc. Apparatus and method for controlling a pump system
AU776367B2 (en) * 1999-09-03 2004-09-09 Fenwal, Inc. Systems and methods for control of pumps
JP2001342989A (ja) * 2000-05-30 2001-12-14 Matsushita Electric Ind Co Ltd Ｄｃポンプの駆動制御方法
JP2002106467A (ja) * 2000-09-28 2002-04-10 Techno Excel Co Ltd トラバース機構駆動式流体ポンプ
US6520520B2 (en) * 2000-10-31 2003-02-18 Durrell U. Howard Steering stabilizer with trimming accumulator
JP4576739B2 (ja) * 2001-04-02 2010-11-10 パナソニック電工株式会社 ポンプ用モータ駆動制御装置
JP4684478B2 (ja) * 2001-07-04 2011-05-18 株式会社荏原製作所 給水装置の制御方法
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Patent Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US6506030B1 (en) 1999-01-05 2003-01-14 Air Products And Chemicals, Inc. Reciprocating pumps with linear motor driver
US6348124B1 (en) 1999-12-14 2002-02-19 Applied Materials, Inc. Delivery of polishing agents in a wafer processing system

Also Published As

Publication number Publication date
JP2009529847A (ja) 2009-08-20
TW200726914A (en) 2007-07-16
KR20080068918A (ko) 2008-07-24
KR20130036380A (ko) 2013-04-11
JP5339915B2 (ja) 2013-11-13
WO2007061957A8 (en) 2007-08-16
CN103016324A (zh) 2013-04-03
EP1954946A2 (en) 2008-08-13
CN103016324B (zh) 2016-08-10
TW201350680A (zh) 2013-12-16
TWI405905B (zh) 2013-08-21
KR101279747B1 (ko) 2013-06-27
JP2013150549A (ja) 2013-08-01
TWI493107B (zh) 2015-07-21
WO2007061957A3 (en) 2007-10-04
EP1954946B1 (en) 2014-11-05
WO2007061957B1 (en) 2007-12-06
EP1954946A4 (en) 2010-05-26
JP5674853B2 (ja) 2015-02-25
WO2007061957A2 (en) 2007-05-31

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