KR101281210B1 - 펌프에서의 밸브 시퀀싱 시스템 및 방법 - Google Patents

펌프에서의 밸브 시퀀싱 시스템 및 방법 Download PDF

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KR101281210B1
KR101281210B1 KR1020087016017A KR20087016017A KR101281210B1 KR 101281210 B1 KR101281210 B1 KR 101281210B1 KR 1020087016017 A KR1020087016017 A KR 1020087016017A KR 20087016017 A KR20087016017 A KR 20087016017A KR 101281210 B1 KR101281210 B1 KR 101281210B1
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South Korea
Prior art keywords
valve
dispensing
delete delete
pressure
motor
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Korean (ko)
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KR20080080604A (ko
Inventor
조지 고넬라
제임스 케드론
이라 개시게
폴 매군
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엔테그리스, 아이엔씨.
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    • H—ELECTRICITY
    • H02—GENERATION; CONVERSION OR DISTRIBUTION OF ELECTRIC POWER
    • H02K—DYNAMO-ELECTRIC MACHINES
    • H02K44/00—Machines in which the dynamo-electric interaction between a plasma or flow of conductive liquid or of fluid-borne conductive or magnetic particles and a coil system or magnetic field converts energy of mass flow into electrical energy or vice versa
    • H02K44/02—Electrodynamic pumps
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04B—POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS
    • F04B13/00—Pumps specially modified to deliver fixed or variable measured quantities
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04B—POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS
    • F04B7/00—Piston machines or pumps characterised by having positively-driven valving
    • F04B7/0076—Piston machines or pumps characterised by having positively-driven valving the members being actuated by electro-magnetic means
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
    • Y10T137/00—Fluid handling
    • Y10T137/8593—Systems
    • Y10T137/877—With flow control means for branched passages
    • Y10T137/87885—Sectional block structure

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  • Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • General Engineering & Computer Science (AREA)
  • Power Engineering (AREA)
  • Details Of Reciprocating Pumps (AREA)
  • Reciprocating Pumps (AREA)
  • Exposure Of Semiconductors, Excluding Electron Or Ion Beam Exposure (AREA)
  • Jet Pumps And Other Pumps (AREA)
KR1020087016017A 2005-12-02 2006-11-20 펌프에서의 밸브 시퀀싱 시스템 및 방법 Active KR101281210B1 (ko)

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
US74216805P 2005-12-02 2005-12-02
US60/742,168 2005-12-02
PCT/US2006/044980 WO2007067342A2 (en) 2005-12-02 2006-11-20 System and method for valve sequencing in a pump

Publications (2)

Publication Number Publication Date
KR20080080604A KR20080080604A (ko) 2008-09-04
KR101281210B1 true KR101281210B1 (ko) 2013-07-02

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ID=38123367

Family Applications (1)

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KR1020087016017A Active KR101281210B1 (ko) 2005-12-02 2006-11-20 펌프에서의 밸브 시퀀싱 시스템 및 방법

Country Status (6)

Country Link
US (1) US8025486B2 (https=)
JP (1) JP5253178B2 (https=)
KR (1) KR101281210B1 (https=)
CN (1) CN101356715B (https=)
TW (1) TWI395870B (https=)
WO (1) WO2007067342A2 (https=)

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US12331736B2 (en) 2021-09-02 2025-06-17 Semes Co., Ltd. Pump, chemical liquid supplying unit, and substrate treating apparatus

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US8753097B2 (en) 2005-11-21 2014-06-17 Entegris, Inc. Method and system for high viscosity pump
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KR101281210B1 (ko) 2005-12-02 2013-07-02 엔테그리스, 아이엔씨. 펌프에서의 밸브 시퀀싱 시스템 및 방법
US8083498B2 (en) 2005-12-02 2011-12-27 Entegris, Inc. System and method for position control of a mechanical piston in a pump
EP1958039B9 (en) 2005-12-02 2011-09-07 Entegris, Inc. I/o systems, methods and devices for interfacing a pump controller
US7878765B2 (en) 2005-12-02 2011-02-01 Entegris, Inc. System and method for monitoring operation of a pump
US7850431B2 (en) 2005-12-02 2010-12-14 Entegris, Inc. System and method for control of fluid pressure
KR101308175B1 (ko) 2005-12-05 2013-09-26 엔테그리스, 아이엔씨. 분배 체적의 오차 보상 방법, 다단계 펌프, 및 시스템 컴플라이언스 보상 방법
TWI402423B (zh) 2006-02-28 2013-07-21 Entegris Inc 用於一幫浦操作之系統及方法
US7494265B2 (en) 2006-03-01 2009-02-24 Entegris, Inc. System and method for controlled mixing of fluids via temperature
US8727744B2 (en) * 2010-02-26 2014-05-20 Entegris, Inc. Method and system for optimizing operation of a pump
US8684705B2 (en) 2010-02-26 2014-04-01 Entegris, Inc. Method and system for controlling operation of a pump based on filter information in a filter information tag
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US9213043B2 (en) 2012-05-15 2015-12-15 Wellstat Diagnostics, Llc Clinical diagnostic system including instrument and cartridge
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TWI670417B (zh) 2014-05-28 2019-09-01 Entegris, Inc. 活塞總成及泵抽系統
US10155208B2 (en) * 2014-09-30 2018-12-18 Taiwan Semiconductor Manufacturing Co., Ltd. Liquid mixing system for semiconductor fabrication
KR20220120724A (ko) * 2015-06-23 2022-08-30 엔테그리스, 아이엔씨. 장방형 다이어프램 밸브
US11772234B2 (en) 2019-10-25 2023-10-03 Applied Materials, Inc. Small batch polishing fluid delivery for CMP
CN111398563A (zh) * 2020-04-10 2020-07-10 中国地质调查局水文地质环境地质调查中心 一种抽水试验地下水水位流量调节装置
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WO2007067342A3 (en) 2007-11-29
WO2007067342A2 (en) 2007-06-14
TW200726917A (en) 2007-07-16
US8025486B2 (en) 2011-09-27
US20100262304A1 (en) 2010-10-14
TWI395870B (zh) 2013-05-11
CN101356715A (zh) 2009-01-28
JP2009517888A (ja) 2009-04-30
CN101356715B (zh) 2012-07-18
JP5253178B2 (ja) 2013-07-31

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