KR101267111B1 - Photosensitive resin composition and method for producing photosensitive resin used therein - Google Patents

Photosensitive resin composition and method for producing photosensitive resin used therein Download PDF

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KR101267111B1
KR101267111B1 KR1020117006587A KR20117006587A KR101267111B1 KR 101267111 B1 KR101267111 B1 KR 101267111B1 KR 1020117006587 A KR1020117006587 A KR 1020117006587A KR 20117006587 A KR20117006587 A KR 20117006587A KR 101267111 B1 KR101267111 B1 KR 101267111B1
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photosensitive resin
compound
reacting
zirconium
resin composition
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KR20110044326A (en
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히로시 우에이
가즈시게 오기와라
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쇼와 덴코 가부시키가이샤
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    • GPHYSICS
    • G03PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
    • G03FPHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
    • G03F7/00Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
    • G03F7/004Photosensitive materials
    • G03F7/027Non-macromolecular photopolymerisable compounds having carbon-to-carbon double bonds, e.g. ethylenic compounds
    • CCHEMISTRY; METALLURGY
    • C08ORGANIC MACROMOLECULAR COMPOUNDS; THEIR PREPARATION OR CHEMICAL WORKING-UP; COMPOSITIONS BASED THEREON
    • C08GMACROMOLECULAR COMPOUNDS OBTAINED OTHERWISE THAN BY REACTIONS ONLY INVOLVING UNSATURATED CARBON-TO-CARBON BONDS
    • C08G59/00Polycondensates containing more than one epoxy group per molecule; Macromolecules obtained by polymerising compounds containing more than one epoxy group per molecule using curing agents or catalysts which react with the epoxy groups
    • C08G59/18Macromolecules obtained by polymerising compounds containing more than one epoxy group per molecule using curing agents or catalysts which react with the epoxy groups ; e.g. general methods of curing
    • C08G59/68Macromolecules obtained by polymerising compounds containing more than one epoxy group per molecule using curing agents or catalysts which react with the epoxy groups ; e.g. general methods of curing characterised by the catalysts used
    • C08G59/681Metal alcoholates, phenolates or carboxylates
    • C08G59/685Carboxylates
    • CCHEMISTRY; METALLURGY
    • C08ORGANIC MACROMOLECULAR COMPOUNDS; THEIR PREPARATION OR CHEMICAL WORKING-UP; COMPOSITIONS BASED THEREON
    • C08FMACROMOLECULAR COMPOUNDS OBTAINED BY REACTIONS ONLY INVOLVING CARBON-TO-CARBON UNSATURATED BONDS
    • C08F283/00Macromolecular compounds obtained by polymerising monomers on to polymers provided for in subclass C08G
    • C08F283/10Macromolecular compounds obtained by polymerising monomers on to polymers provided for in subclass C08G on to polymers containing more than one epoxy radical per molecule
    • C08F283/105Macromolecular compounds obtained by polymerising monomers on to polymers provided for in subclass C08G on to polymers containing more than one epoxy radical per molecule on to unsaturated polymers containing more than one epoxy radical per molecule
    • CCHEMISTRY; METALLURGY
    • C08ORGANIC MACROMOLECULAR COMPOUNDS; THEIR PREPARATION OR CHEMICAL WORKING-UP; COMPOSITIONS BASED THEREON
    • C08FMACROMOLECULAR COMPOUNDS OBTAINED BY REACTIONS ONLY INVOLVING CARBON-TO-CARBON UNSATURATED BONDS
    • C08F290/00Macromolecular compounds obtained by polymerising monomers on to polymers modified by introduction of aliphatic unsaturated end or side groups
    • C08F290/02Macromolecular compounds obtained by polymerising monomers on to polymers modified by introduction of aliphatic unsaturated end or side groups on to polymers modified by introduction of unsaturated end groups
    • C08F290/06Polymers provided for in subclass C08G
    • CCHEMISTRY; METALLURGY
    • C08ORGANIC MACROMOLECULAR COMPOUNDS; THEIR PREPARATION OR CHEMICAL WORKING-UP; COMPOSITIONS BASED THEREON
    • C08FMACROMOLECULAR COMPOUNDS OBTAINED BY REACTIONS ONLY INVOLVING CARBON-TO-CARBON UNSATURATED BONDS
    • C08F290/00Macromolecular compounds obtained by polymerising monomers on to polymers modified by introduction of aliphatic unsaturated end or side groups
    • C08F290/02Macromolecular compounds obtained by polymerising monomers on to polymers modified by introduction of aliphatic unsaturated end or side groups on to polymers modified by introduction of unsaturated end groups
    • C08F290/06Polymers provided for in subclass C08G
    • C08F290/064Polymers containing more than one epoxy group per molecule
    • CCHEMISTRY; METALLURGY
    • C08ORGANIC MACROMOLECULAR COMPOUNDS; THEIR PREPARATION OR CHEMICAL WORKING-UP; COMPOSITIONS BASED THEREON
    • C08GMACROMOLECULAR COMPOUNDS OBTAINED OTHERWISE THAN BY REACTIONS ONLY INVOLVING UNSATURATED CARBON-TO-CARBON BONDS
    • C08G59/00Polycondensates containing more than one epoxy group per molecule; Macromolecules obtained by polymerising compounds containing more than one epoxy group per molecule using curing agents or catalysts which react with the epoxy groups
    • C08G59/14Polycondensates modified by chemical after-treatment
    • C08G59/1433Polycondensates modified by chemical after-treatment with organic low-molecular-weight compounds
    • C08G59/1438Polycondensates modified by chemical after-treatment with organic low-molecular-weight compounds containing oxygen
    • C08G59/1455Monocarboxylic acids, anhydrides, halides, or low-molecular-weight esters thereof
    • C08G59/1461Unsaturated monoacids
    • CCHEMISTRY; METALLURGY
    • C08ORGANIC MACROMOLECULAR COMPOUNDS; THEIR PREPARATION OR CHEMICAL WORKING-UP; COMPOSITIONS BASED THEREON
    • C08GMACROMOLECULAR COMPOUNDS OBTAINED OTHERWISE THAN BY REACTIONS ONLY INVOLVING UNSATURATED CARBON-TO-CARBON BONDS
    • C08G59/00Polycondensates containing more than one epoxy group per molecule; Macromolecules obtained by polymerising compounds containing more than one epoxy group per molecule using curing agents or catalysts which react with the epoxy groups
    • C08G59/14Polycondensates modified by chemical after-treatment
    • C08G59/1433Polycondensates modified by chemical after-treatment with organic low-molecular-weight compounds
    • C08G59/1438Polycondensates modified by chemical after-treatment with organic low-molecular-weight compounds containing oxygen
    • C08G59/1455Monocarboxylic acids, anhydrides, halides, or low-molecular-weight esters thereof
    • C08G59/1461Unsaturated monoacids
    • C08G59/1466Acrylic or methacrylic acids
    • CCHEMISTRY; METALLURGY
    • C08ORGANIC MACROMOLECULAR COMPOUNDS; THEIR PREPARATION OR CHEMICAL WORKING-UP; COMPOSITIONS BASED THEREON
    • C08LCOMPOSITIONS OF MACROMOLECULAR COMPOUNDS
    • C08L63/00Compositions of epoxy resins; Compositions of derivatives of epoxy resins
    • C08L63/10Epoxy resins modified by unsaturated compounds
    • GPHYSICS
    • G03PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
    • G03FPHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
    • G03F7/00Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
    • G03F7/004Photosensitive materials
    • G03F7/038Macromolecular compounds which are rendered insoluble or differentially wettable
    • GPHYSICS
    • G03PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
    • G03FPHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
    • G03F7/00Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
    • G03F7/004Photosensitive materials
    • G03F7/038Macromolecular compounds which are rendered insoluble or differentially wettable
    • G03F7/0388Macromolecular compounds which are rendered insoluble or differentially wettable with ethylenic or acetylenic bands in the side chains of the photopolymer
    • HELECTRICITY
    • H05ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
    • H05KPRINTED CIRCUITS; CASINGS OR CONSTRUCTIONAL DETAILS OF ELECTRIC APPARATUS; MANUFACTURE OF ASSEMBLAGES OF ELECTRICAL COMPONENTS
    • H05K3/00Apparatus or processes for manufacturing printed circuits
    • H05K3/22Secondary treatment of printed circuits
    • H05K3/28Applying non-metallic protective coatings
    • H05K3/285Permanent coating compositions
    • H05K3/287Photosensitive compositions

Abstract

본 발명의 감광성 수지 조성물은, (A) 3가의 유기인 화합물과 나프텐산 지르코늄 및 옥틸산 지르코늄의 적어도 1종의 존재하에서, 다관능 에폭시 화합물과 불포화 일염기산을 반응시키고, 이어 다염기산 무수물을 반응시키는 것에 의해 생성한 카복실 기에, 불포화 이중결합을 갖는 모노에폭시 화합물 및 수용성 모노에폭시 화합물을 반응시켜 얻을 수 있는 감광성 수지, (B) 에폭시 수지, (C) 광중합 개시제 및 (D) 반응성 희석제를 함유한다. 본 발명의 감광성 수지 조성물은, 크롬 화합물을 포함하지 않고, 자외선 노광 및 희알칼리 수용액에 의한 현상이 가능하며, 고감도이고, 더구나 열안정성 및 현상관리폭이 양호하며, 도막이 우수한 성능을 나타내는 솔더 레지스트 잉크로서 적합하다. The photosensitive resin composition of this invention reacts a polyfunctional epoxy compound and an unsaturated monobasic acid in presence of (A) trivalent organophosphorus compound, at least 1 sort (s) of zirconium naphthenate and zirconium octylate, and then reacts polybasic acid anhydride. And a photosensitive resin obtained by reacting a monoepoxy compound having an unsaturated double bond and a water-soluble monoepoxy compound, (B) an epoxy resin, (C) a photopolymerization initiator, and (D) a reactive diluent. . The photosensitive resin composition of the present invention does not contain a chromium compound, and is capable of developing by ultraviolet exposure and an aqueous alkali solution, and has high sensitivity, furthermore, good thermal stability and development control width, and a solder resist ink having excellent coating film performance. Suitable as.

Description

감광성 수지 조성물 및 그것에 사용되는 감광성 수지의 제조방법{Photosensitive resin composition and method for producing photosensitive resin used therein}Photosensitive resin composition and the manufacturing method of the photosensitive resin used for the same [Photosensitive resin composition and method for producing photosensitive resin used therein}

본 발명은, 감광성(photosensitive) 수지 조성물에 관한 것이고, 더욱 상세하게는 크롬 화합물을 포함하지 않고, 자외선 노광에 대하여 고감도이며, 얻어진 도막이 양호한 물성을 갖고, 희알칼리에 의해 현상가능한 감광성 수지 조성물에 관한 것이다. TECHNICAL FIELD The present invention relates to a photosensitive resin composition, and more particularly, to a photosensitive resin composition which does not contain a chromium compound, is highly sensitive to ultraviolet light exposure, and the obtained coating film has good physical properties and can be developed by a rare alkali. will be.

근년, 각종 프린트 배선판의 솔더 레지스트(solder resist) 잉크로서는, 희알칼리 현상형의 액상 솔더 포토레지스트 잉크가 널리 이용되고 있다. 희알칼리 현상형의 감광성 수지로서는, 예를 들어, 에폭시 아크릴레이트 수지의 수산기에 산 무수물을 반응시켜 얻을 수 있는 산(酸) 펜던트형 에폭시아크릴레이트 수지가 알려져 있다. 종래, 이와 같은 산 펜던트형 에폭시아크릴레이트 수지의 합성 촉매에는, 양호한 열안정성 및 현상관리폭을 얻기 위하여, 나프텐산크롬이 사용되어 왔다. 그러나, 작금의 환경 문제에 대한 의식 고조나 현상 후의 폐액 처리가 번잡한 점에서 보아, 나프텐산크롬과 같은 크롬 화합물을 합성 촉매로 하여 사용하는 것은 바람직하지 않다. 그래서, 예를 들어, 특허문헌 1에는, 유기인 화합물을 합성 촉매로서 사용하고, 소정 조건하에서 다관능 에폭시 수지와 불포화 일염기산을 반응시키고, 이어 산무수물을 반응시켜 얻을 수 있는 감광성 수지가 제안되어 있다. In recent years, as a solder resist ink of various printed wiring boards, a liquid alkali photoresist ink of a alkali development type has been widely used. As a photosensitive resin of a rare alkali developing type, the acid pendant type epoxy acrylate resin obtained by making an acid anhydride react with the hydroxyl group of an epoxy acrylate resin is known, for example. Conventionally, chromium naphthenate has been used in the synthesis catalyst of such an acid pendant epoxy acrylate resin in order to obtain good thermal stability and development control width. However, it is not preferable to use a chromium compound such as chromium naphthenate as a synthesis catalyst from the point of increasing awareness of environmental problems and the waste liquid treatment after development. Thus, for example, Patent Document 1 proposes a photosensitive resin obtained by using an organophosphorus compound as a synthesis catalyst, reacting a polyfunctional epoxy resin with an unsaturated monobasic acid under predetermined conditions, and then reacting an acid anhydride. It is.

선행기술문헌 Prior art literature

특허문헌 Patent literature

특허문헌 1: 일본국 특개 2005-41958호 공보Patent Document 1: Japanese Patent Application Laid-Open No. 2005-41958

발명의 개요Summary of the Invention

발명이 해결하고자 하는 과제 Problems to be solved by the invention

그러나, 특허문헌 1에 기재된 감광성 수지는, 최신의 솔더 레지스트 잉크에 요구되는 것과 같은 감도, 열안정성, 현상관리폭, 내열성, 내용매성 등의 성능을 높은 레벨로 균형맞게할 수는 없어, 아직 개선의 여지가 있다. However, the photosensitive resin described in Patent Literature 1 cannot improve the performance such as sensitivity, thermal stability, development control width, heat resistance, solvent resistance, and the like required for the latest solder resist ink, and is still improved. There is room.

따라서, 본 발명은, 크롬 화합물을 포함하지 않고, 자외선 노광 및 희알칼리 수용액에 의한 현상이 가능하며, 고감도이고, 더구나 열안정성 및 현상관리폭이 양호하며, 도막이 우수한 성능을 나타내는 솔더 레지스트 잉크로서 적합한 감광성 수지 조성물을 제공하는 것을 목적으로 하는 것이다. Therefore, the present invention does not contain a chromium compound and can be developed by ultraviolet exposure and an aqueous alkali solution, which is highly sensitive, and furthermore, has good thermal stability and development control width, and is suitable as a solder resist ink which exhibits excellent performance. It is an object to provide a photosensitive resin composition.

과제를 해결하기 위한 수단Means for solving the problem

본 발명자들은, 상술한 문제점을 해소하기 위하여 예의 검토한 결과, 3가의 유기인 화합물과 나프텐산 지르코늄 및 옥틸산 지르코늄의 적어도 1종의 존재하에서, 다관능 에폭시 화합물과 불포화 일염기산을 반응시키고, 이어 다염기산 무수물을 반응시키는 것에 의해 생성한 카복실 기에 불포화 이중결합을 갖는 모노에폭시 화합물 및 수용성 모노에폭시 화합물을 반응시켜 얻을 수 있는 감광성 수지를 배합한 감광성 수지 조성물이 상기 목적에 합치하는 것을 발견하고, 본 발명을 완성하기에 이르렀다. MEANS TO SOLVE THE PROBLEM As a result of earnestly examining in order to solve the above-mentioned problem, the present inventors reacted a polyfunctional epoxy compound and an unsaturated monobasic acid in presence of a trivalent organophosphorus compound, at least 1 sort (s) of zirconium naphthenate and zirconium octylate, Then, the photosensitive resin composition which mix | blended the photosensitive resin obtained by making the monoepoxy compound which has an unsaturated double bond and the water-soluble monoepoxy compound react with the carboxyl group produced | generated by making polybasic acid anhydride react, discovered that it met the said objective, The invention has been completed.

즉, 본 발명은, (A) 3가의 유기인 화합물과 나프텐산 지르코늄 및 옥틸산 지르코늄의 적어도 1종의 존재하에서, 다관능 에폭시 화합물과 불포화 일염기산을 반응시키고, 이어 다염기산 무수물을 반응시키는 것에 의해 생성한 카복실 기에 불포화 이중결합을 갖는 모노에폭시 화합물 및 수용성 모노에폭시 화합물을 반응시켜 얻을 수 있는 감광성 수지, (B) 에폭시 수지, (C) 광중합 개시제 및 (D) 반응성 희석제를 함유하는 것을 특징으로 하는 감광성 수지 조성물이다. That is, the present invention relates to reacting a polyfunctional epoxy compound with an unsaturated monobasic acid in the presence of at least one of (A) a trivalent organophosphorus compound, zirconium naphthenate and zirconium octylate, followed by reacting a polybasic acid anhydride. And a photosensitive resin obtained by reacting a monoepoxy compound having an unsaturated double bond and a water-soluble monoepoxy compound, a (B) epoxy resin, (C) a photopolymerization initiator, and (D) a reactive diluent. It is a photosensitive resin composition.

또, 본 발명은, 3가의 유기인 화합물과 나프텐산 지르코늄 및 옥틸산 지르코늄의 적어도 1종의 존재하에서, 다관능 에폭시 화합물과 불포화 일염기산을 반응시키는 제1 공정, 제1 공정에서 얻어진 생성물에 다염기산 무수물을 반응시키는 제2 공정, 제2 공정에서 얻어진 생성물에 불포화 이중결합을 갖는 모노에폭시 화합물 및 수용성 모노에폭시 화합물을 반응시키는 제3 공정을 포함하는 것을 특징으로 하는 감광성 수지의 제조방법이다. Moreover, this invention is a product obtained by the 1st process and 1st process which make a polyfunctional epoxy compound and an unsaturated monobasic acid react in presence of at least 1 sort (s) of a trivalent organophosphorus compound, zirconium naphthenate, and zirconium octylate. A second step of reacting a polybasic acid anhydride, a third step of reacting a monoepoxy compound having an unsaturated double bond with a product obtained in the second step, and a water-soluble monoepoxy compound, the method of producing a photosensitive resin.

발명의 효과Effects of the Invention

본 발명에 의하면, 크롬 화합물을 포함하지 않고, 자외선 노광 및 희알칼리 수용액에 의한 현상이 가능하며, 고감도이며, 더구나 열안정성 및 현상관리폭이 양호하며, 도막이 우수한 성능을 나타내는 솔더 레지스트 잉크로서 적합한 감광성 수지 조성물을 제공할 수 있다. According to the present invention, it does not contain a chromium compound and can be developed by ultraviolet exposure and an aqueous alkali solution, and it is highly sensitive, and furthermore, it has good thermal stability and development control width, and is suitable as a solder resist ink having excellent coating performance. A resin composition can be provided.

발명을 실시하기Carrying out the invention 위한 형태 Form for

이하, 본 발명을 상세하게 설명한다. Hereinafter, the present invention will be described in detail.

먼저, 본 발명의 감광성 수지 조성물에 관하여 설명한다. First, the photosensitive resin composition of this invention is demonstrated.

본 발명의 감광성 수지 조성물에서 (A) 성분은, 3가의 유기인 화합물과 나프텐산 지르코늄 및 옥틸산 지르코늄의 적어도 1종의 존재하에서, 다관능 에폭시 화합물과 불포화 일염기산을 반응시키고, 이어 다염기산 무수물을 반응시키고, 이것에 의해 생성한 카복실 기에 불포화 이중결합을 갖는 모노에폭시 화합물 및 수용성 모노에폭시 화합물을 반응시켜 얻을 수 있는 감광성 수지이다. In the photosensitive resin composition of this invention, (A) component makes a polyfunctional epoxy compound and an unsaturated monobasic acid react in presence of trivalent organophosphorus compound, at least 1 sort (s) of zirconium naphthenate and zirconium octylate, and then polybasic acid anhydride. It is a photosensitive resin obtained by making it react, and making the carboxyl group produced | generated thereby react the monoepoxy compound and water-soluble monoepoxy compound which have an unsaturated double bond.

본 발명의 (A) 성분의 물성은, 합성시에 사용하는 촉매의 영향이 크고, 현상관리폭도 촉매의 영향을 받는 경향이 있다. 또, 상이한 특성을 지닌 촉매를 병용한 경우, 각각의 단점이 나오는 경향이 있지만, 본 발명자들은, 3가의 유기인 화합물을 나프텐산 지르코늄 및 옥틸산 지르코늄의 적어도 1종을 병용한 경우, 예상에 반하여, 크롬계 촉매를 사용한 경우와 동등한 물성을 얻을 수 있는 것을 발견하였다. The physical properties of the component (A) of the present invention are largely influenced by the catalyst used in the synthesis, and the development control width also tends to be affected by the catalyst. Moreover, when using a catalyst with different characteristics, each drawback tends to come out. However, the inventors have anticipated that when a trivalent organophosphorus compound is used in combination with at least one of zirconium naphthenate and zirconium octylate, It was found that the same physical properties as those obtained using a chromium-based catalyst can be obtained.

촉매의 사용량은, 다관능 에폭시 수지 및 불포화 일염기산의 총량 100 질량부에 대하여, 바람직하게는, 3가의 유기인 화합물과 나프텐산 지르코늄 및 옥틸산 지르코늄의 적어도 1종의 총량이 1.2 질량부 ~ 6.0 질량부로 되는 양이다. 그때, 나프텐산 지르코늄 및 옥틸산 지르코늄의 적어도 1종은, 질량 기준으로, 3가의 유기인 화합물의 적어도 4배 사용하는 것이 바람직하고, 4배 ~ 6배 사용하는 것이 더욱 바람직하다. 3가의 유기인 화합물과 나프텐산 지르코늄 및 옥틸산 지르코늄의 적어도 1종의 총량이 너무 적거나, 나프텐산 지르코늄 및 옥틸산 지르코늄의 적어도 1종의 사용량이 3가의 유기인 화합물의 4배 미만으로 되면, 반응 촉매로서 충분히 작용하지 않는 경우가 있다. 한편, 3가의 유기인 화합물이 너무 많으면, 얻어지는 감광성 수지의 열안정성이 저하되는 경향이 있고, 또, 나프텐산 지르코늄 및 옥틸산 지르코늄의 적어도 1종이 너무 많아도, 사용량에 어울리는 효과는 없어 경제적이지 않다. The amount of the catalyst used is preferably from 1.2 parts by mass to a total amount of at least one of trivalent organophosphorus compounds, zirconium naphthenate and zirconium octylate, with respect to 100 parts by mass of the total amount of the polyfunctional epoxy resin and the unsaturated monobasic acid. 6.0 mass parts. In that case, it is preferable to use at least 4 times of a trivalent organophosphorus compound by mass basis, and, as for at least 1 sort (s) of zirconium naphthenate and zirconium octylate, it is more preferable to use 4 times-6 times. When the total amount of at least one of the trivalent organophosphorus compound and zirconium naphthenate and zirconium octynate is too small, or the amount of at least one of zirconium naphthenate and zirconium octylate is less than four times that of the trivalent organophosphorus compound, It may not work enough as a reaction catalyst. On the other hand, when there are too many trivalent organophosphorus compounds, there exists a tendency for the thermal stability of the obtained photosensitive resin to fall, and even if there are too many at least 1 sort (s) of zirconium naphthenate and zirconium octylic acid, there is no effect suitable for a use amount, and it is not economical.

본 발명에서 사용되는 다관능 에폭시 화합물로서는, 특히 제한은 없지만, 예를 들어, 비스페놀 A형, 비스페놀 F형, 페놀노볼락형, 크레졸노볼락형, 비스페놀 A노볼락형, 환상 지방족 에폭시 수지, 복소환형 등의 에폭시 수지 및 이들에 브롬원자나 염소원자 등의 할로겐 원자를 도입한 것 등을 들 수 있다. 이들 중에서, 특히, 크레졸노볼락형 에폭시 수지가 바람직하다. There is no restriction | limiting in particular as a polyfunctional epoxy compound used by this invention, For example, bisphenol A type, bisphenol F type, phenol novolak type, cresol novolak type, bisphenol A novolak type, cyclic aliphatic epoxy resin, hetero Epoxy resins, such as cyclic, and the thing which introduce | transduced halogen atoms, such as a bromine atom and a chlorine atom, are mentioned. Among these, cresol novolak-type epoxy resins are particularly preferable.

본 발명에서 사용되는 불포화 일염기산으로서는, 1개의 카복실기와 1개 이상의 중합성 불포화 기를 갖는 일염기산이면 좋고, 예를 들어, 아크릴산, 메타크릴산, 크로톤산, 계피산, 소르비탄산, 아크릴산 다이머 등을 들 수 있다. 이들 중에서, 특히, 높은 활성 에너지 광경화성을 얻는 점에서, 아크릴산의 사용이 바람직하다. 이들의 불포화 일염기산은, 1종 단독으로 사용하여도 좋고, 2종 이상을 조합하여 사용하여도 좋다. The unsaturated monobasic acid used in the present invention may be monobasic acid having one carboxyl group and at least one polymerizable unsaturated group, and for example, acrylic acid, methacrylic acid, crotonic acid, cinnamic acid, sorbitanic acid, acrylic acid dimer and the like. Can be mentioned. Among them, the use of acrylic acid is particularly preferred from the viewpoint of obtaining high active energy photocurability. These unsaturated monobasic acids may be used individually by 1 type, and may be used in combination of 2 or more type.

이들 불포화 일염기산은, 다관능 에폭시 화합물의 에폭시기 1.0 당량에 대하여, 0.8 당량 ~ 1.1 당량 반응시키는 것이 바람직하다. 불포화 일염기산이 비율이 0.8 당량 미만이면, 보존안정성이 나빠지기도 하고, 합성시에 겔화 등의 문제가 생기는 경우가 있고, 한편, 1.1 당량을 초과하면, 취기(악취)가 발생하기도 하고, 내열성이 저하되는 경향이 있다. It is preferable to make these unsaturated monobasic acids react with 0.8 equivalent-1.1 equivalent with respect to 1.0 equivalent of the epoxy group of a polyfunctional epoxy compound. If the proportion of unsaturated monobasic acid is less than 0.8 equivalent, the storage stability may be deteriorated, and problems such as gelation may occur at the time of synthesis, while if it exceeds 1.1 equivalent, odor (odor) may occur and heat resistance may be caused. It tends to be lowered.

본 발명에서 사용하는 다염기산 무수물로서는, 무수 말레인산, 무수 숙신산, 무수 이타콘산, 무수프탈산, 테트라히드로 무수프탈산, 헥사히드로 무수프탈산, 엔도메틸렌 테트라히드로 무수프탈산, 메틸테트라히드로 무수프탈산, 무수 크로렌드산 등의 2염기산 무수물, 무수 트리멜리트산, 무수 피로멜리트산, 벤조페논테트라카복시산 무수물, 비페닐테트라카복시산 무수물 등의 다염기산 무수물 등을 들 수 있다. 이들 중에서, 특히, 전식성(電食性)이 우수한 점에서, 테트라히드로무수 프탈산, 헥사히드로 무수 프탈산의 사용이 바람직하다. Examples of the polybasic acid anhydride used in the present invention include maleic anhydride, succinic anhydride, itaconic anhydride, phthalic anhydride, tetrahydrophthalic anhydride, hexahydrophthalic anhydride, endomethylene tetrahydrophthalic anhydride, methyltetrahydrophthalic anhydride, and chromic anhydride. And polybasic acid anhydrides such as dibasic acid anhydride, trimellitic anhydride, pyromellitic anhydride, benzophenone tetracarboxylic anhydride, and biphenyltetracarboxylic anhydride. Among them, the use of tetrahydro phthalic anhydride and hexahydro phthalic anhydride is particularly preferable from the standpoint of excellent corrosion resistance.

이들 다염기산 무수물의 사용량은, 다관능 에폭시 화합물과 불포화 일염기산을 반응시켜 얻어진 생성물의 수산기 1.0 몰에 대하여 0.4몰~0.9몰로 되는 비율인 것이 바람직하고, 0.6몰 ~ 0.9몰의 비율로 반응시키는 것이 더욱 바람직하다. 다염기산 무수물의 사용량이 0.4몰 미만이면, 충분한 알칼리 현상성을 얻을 수 없는 경우가 있고, 한편, 0.9몰을 초과하면, 경화 도막의 전기특성 등이 저하되는 경향이 있다. It is preferable that the usage-amount of these polybasic acid anhydrides becomes 0.4 mol-0.9 mol with respect to 1.0 mol of hydroxyl groups of the product obtained by making a polyfunctional epoxy compound and unsaturated monobasic acid react, and it is made to react in the ratio of 0.6 mol-0.9 mol. More preferred. When the usage-amount of polybasic acid anhydride is less than 0.4 mol, sufficient alkali developability may not be obtained. On the other hand, when it exceeds 0.9 mol, there exists a tendency for the electrical characteristics etc. of a cured coating film to fall.

본 발명에서 사용하는 불포화 이중결합을 갖는 모노에폭시 화합물로서는, 예를 들어, 글리시딜 메타크릴레이트, 글리시딜 아크릴레이트, 다이셀 카가쿠고교 가부시끼가이샤제 사이크로머-A200, M100과 같은 지환식 에폭시기를 갖는 (메타)아크릴레이트를 들 수 있다. As a monoepoxy compound which has an unsaturated double bond used by this invention, For example, alicyclic compounds, such as glycidyl methacrylate, glycidyl acrylate, and Daicel Kagaku Kogyo Co., Ltd. cyclomer-A200, M100 (Meth) acrylate which has a formula epoxy group is mentioned.

수용성 모노에폭시 화합물로서는, 하기 화학식(I)로 표시되는 화합물(예를 들어, 나가세 켐텍스 가부시끼가이샤제 데나콜(등록상표) EX-145, EX-171 등), 하기 화학식(II)로 표시되는 화합물(예를 들어, 사카모토 야꾸힌 고교 가부시끼가이샤제, SY-GTA80) 등을 들 수 있다: As a water-soluble monoepoxy compound, it is represented by the compound represented by following formula (I) (for example, Denacol (EX-145) and EX-171 by Nagase Chemtex Co., Ltd.), and following formula (II) The compound (for example, Sakamoto Yakuhin Kogyo Co., Ltd., SY-GTA80) etc. are mentioned:

Figure 112011020927983-pct00001
Figure 112011020927983-pct00001

식 중에서, R1은 알킬기 또는 아릴 기를 나타내고, R2는 반복 단위 3 이상의 폴리에틸렌 옥사이드 또는 폴리프로필렌 옥사이드를 나타냄. In the formula, R 1 represents an alkyl group or an aryl group, and R 2 represents a polyethylene oxide or polypropylene oxide of 3 or more repeating units.

Figure 112011020927983-pct00002
Figure 112011020927983-pct00002

다염기산 무수물 유래의 카복실기와 결합하는 불포화 이중결합을 갖는 모노에폭시 화합물은, 수지의 최외부에 결합하고 있기 때문에, 자외선 조사시의 반응성 이 입체적으로 높고, 자외선 조사에 대하여 높은 광 감도를 갖는다. 또한, 수용성 모노에폭시 화합물은, 수지의 알칼리로의 친화성을 향상시키고, 이어 불포화 이중결합을 갖는 모노에폭시 화합물의 불포화 이중결합의 운동성을 적절히 억제하고, 보존시의 수지의 안정성을 부여한다. Since the monoepoxy compound which has an unsaturated double bond couple | bonded with the carboxyl group derived from polybasic acid anhydride is bound to the outermost part of resin, the reactivity at the time of ultraviolet irradiation is three-dimensionally high, and has high light sensitivity with respect to ultraviolet irradiation. In addition, the water-soluble monoepoxy compound improves the affinity of the resin to alkali, then appropriately suppresses the mobility of the unsaturated double bond of the monoepoxy compound having an unsaturated double bond, and imparts stability of the resin at the time of storage.

다염기산 무수물의 반응에 의해 생성한 카복실 기에 반응시키는 불포화 이중결합을 갖는 모노에폭시 화합물 및 수용성 모노에폭시 화합물의 양은, 얻어지는 감광성 수지의 감도, 현상성 및 전기특성 등을 고려하면, 생성한 카복실기 1몰에 대하여, 총량으로 0.15몰 ~ 0.25몰의 비율로 반응시키는 것이 바람직하다. 단, 그 때, 수용성 모노에폭시 화합물의 양은, 생성한 카복실기 1몰에 대하여, 0.03몰 미만의 비율인 것이 바람직하고, 0.01몰 ~ 0.025몰의 비율인 것이 더욱 바람직하다. 불포화 이중결합을 갖는 모노에폭시 화합물 및 수용성 모노에폭시 화합물의 총량이 0.15몰 미만이면, 본 발명의 목적의 하나인 고감도화의 효과가 불충분하게 되는 경향이 있고, 한편, 0.25몰을 초과하면, 알칼리 현상성이 저하되는 경향이 있다. 또한, 수용성 모노에폭시 화합물의 양을 0.03몰 이상으로 하여도 가해진 효과는 낮고, 전술한 알칼리 현상성의 면에서도 현실적이지 않다. The amount of the monoepoxy compound having an unsaturated double bond and the water-soluble monoepoxy compound reacted with the carboxyl group produced by the reaction of the polybasic acid anhydride is 1 mole of the carboxyl group produced in consideration of the sensitivity, developability and electrical properties of the obtained photosensitive resin. It is preferable to make it react with respect to the total amount with respect to the ratio of 0.15 mol-0.25 mol. However, at that time, the amount of the water-soluble monoepoxy compound is preferably less than 0.03 mole, more preferably 0.01 mole to 0.025 mole with respect to 1 mole of the produced carboxyl group. If the total amount of the monoepoxy compound and the water-soluble monoepoxy compound having an unsaturated double bond is less than 0.15 mole, the effect of high sensitivity, which is one of the objects of the present invention, tends to be insufficient, whereas if it exceeds 0.25 mole, alkali development There is a tendency for the sex to decrease. In addition, even if the amount of the water-soluble monoepoxy compound is 0.03 mol or more, the added effect is low, and it is not practical in view of the above-mentioned alkali developability.

본 발명의 감광성 수지 조성물에서 (B) 성분인 에폭시 수지로서는, 비스페놀 A형 에폭시 수지, 비스페놀 F형 에폭시 수지, 수첨 비스페놀 A형 에폭시 수지, 페놀노볼락형 에폭시 수지, 크레졸노볼락형 에폭시 수지, 디시클로펜타디엔-페놀노볼락형 에폭시 수지, 페놀-크레졸노볼락 공축합형 에폭시 수지, 비스페놀 A 노볼락형에폭시 수지, 비스페놀 F 노볼락형 에폭시 수지 또는 그들의 할로겐화 에폭시 화합물, 트리페닐올메탄형 에폭시 수지, 알킬 치환 트리페닐올메탄형 에폭시 수지, 테트라페닐올에탄형 에폭시 수지 등의 다관능 페놀에 에피클로로히드린을 반응시켜 얻을 수 있는 에폭시 수지, 다관능 히드록시나프탈렌류 에피클로로히드린을 반응시켜 얻을 수 있는 에폭시 수지, 실리콘 변성 에폭시 수지, ε-카프로락톤 변성 에폭시 수지, 에피클로로히드린과 일급 또는 이급 아민과의 반응에 의해 얻어지는 글리시딜 아민형 에폭시 수지, 트리글리시딜 이소시아네이트 등의 복소환식 에폭시 수지 등을 들 수 있다. 이들의 에폭시 수지는, 1종 단독으로 사용하여도 좋고, 2종 이상을 조합하여 사용하여도 좋다. As an epoxy resin which is (B) component in the photosensitive resin composition of this invention, bisphenol-A epoxy resin, bisphenol F-type epoxy resin, hydrogenated bisphenol-A epoxy resin, phenol novolak-type epoxy resin, cresol novolak-type epoxy resin, and dish Clopentadiene-phenol novolac epoxy resins, phenol-cresol novolac co-condensation epoxy resins, bisphenol A novolac-type epoxy resins, bisphenol F novolac-type epoxy resins or their halogenated epoxy compounds, triphenylolmethane-type epoxy resins And polyfunctional phenols such as alkyl-substituted triphenylolmethane type epoxy resins, tetraphenylolethane type epoxy resins, and epoxy resins obtained by reacting epichlorohydrin with polyfunctional hydroxynaphthalene epichlorohydrin. Obtained epoxy resin, silicone modified epoxy resin, ε-caprolactone modified epoxy resin, epichloro It may be mentioned and gave first class or second class heterocyclic epoxy resin such as glycidyl amine type epoxy resin, triglycidyl isocyanate obtained by the reaction of the amine and the like. These epoxy resins may be used individually by 1 type, and may be used in combination of 2 or more type.

이들 에폭시 수지의 배합량은, 감광성 수지 100 질량부에 대하여, 바람직하게는 3질량부~100질량부, 더욱 바람직하게는 6 질량부 ~ 75질량부이다. 에폭시 수지의 배합량이 3질량부 미만이면, 감광성 수지 중의 카복실기가 실질적으로 반응하는 양에 미치지 않기 때문에, 내수성, 내알칼리성, 전기특성이 저하되는 경향이 있고, 한편, 100질량부를 초과하면, 미반응 에폭시기를 갖는 선상 중합체가 생성되기 때문에, 내열성, 내용매성이 불충분하게 되는 경우가 있다. The compounding quantity of these epoxy resins becomes like this. Preferably it is 3 mass parts-100 mass parts, More preferably, it is 6 mass parts-75 mass parts with respect to 100 mass parts of photosensitive resin. When the compounding quantity of an epoxy resin is less than 3 mass parts, since the carboxyl group in photosensitive resin does not reach the amount which substantially reacts, water resistance, alkali resistance, and an electrical property tend to fall, and when it exceeds 100 mass parts, it is unreacted. Since the linear polymer which has an epoxy group is produced, heat resistance and solvent resistance may become inadequate.

또한, 에폭시 수지의 밀착성, 내약품성, 내열성 등을 더욱 향상시키기 위하여, 에폭시 경화제를 병용하는 것이 바람직하다. 이와 같은 에폭시 경화제로서는, 이미다졸 유도체, 페놀 유도체, 디시안디아미드, 디시안디아미드 유도체, 멜라민, 멜라민수지, 히드라지드 유도체, 아민류, 산무수물 등을 들 수 있다. 이들 에폭시 경화제는, 1종 단독으로 사용하여도 좋고, 2종 이상을 조합하여 사용하여도 좋다. 에폭시 경화제의 배합량은, 에폭시 수지의 에폭시 기 1몰에 대하여, 경화제의 활성 수소량이 0.5몰~1.2몰로 되는 비율인 것이 바람직하다. Moreover, in order to further improve adhesiveness, chemical resistance, heat resistance, etc. of an epoxy resin, it is preferable to use an epoxy hardening | curing agent together. Examples of such epoxy curing agents include imidazole derivatives, phenol derivatives, dicyandiamide, dicyandiamide derivatives, melamine, melamine resins, hydrazide derivatives, amines, and acid anhydrides. These epoxy hardening | curing agents may be used individually by 1 type, and may be used in combination of 2 or more type. It is preferable that the compounding quantity of an epoxy hardening | curing agent is a ratio in which the active hydrogen amount of a hardening | curing agent becomes 0.5 mol-1.2 mol with respect to 1 mol of epoxy groups of an epoxy resin.

본 발명의 감광성 수지 조성물에서 (C) 성분인 광중합개시제로서는, 벤조인, 벤조인메틸 에테르, 벤조인 이소프로필 에테르, 벤조인 이소부틸 에테르 등의 벤조인 및 그의 유도체, 벤질, 벤질디메틸 케탈 등의 벤질 및 그의 유도체, 아세토페논, 2,2-디메톡시-2-페닐아세토페논, 2,2-디에톡시-2-페닐아세토페논, 1,1-디클로로아세토페논, 1-히드록시시클로헥실페닐케톤, 2-메틸-1-(4-메틸티오필)-2-모르폴리노프로판-1-온 등의 아세토페논 및 그의 유도체, 2-메틸 안트라퀴논, 2-클로로안트라퀴논, 2-에틸안트라퀴논, 2-t-부틸안트라퀴논 등의 안트라퀴논 및 그의 유도체, 티오크산톤, 2,4-디메틸 티오크산톤, 2-클로로티오크산톤 등의 티오크산톤 및 그의 유도체, 벤조페논, N,N-디메틸 아미노벤조페논 등의 벤조페논 및 그의 유도체를 들 수 있다. 이들의 광중합개시제는, 1종 단독으로 사용하여도 좋고, 2종 이상을 조합하여 사용하여도 좋다. 또한 필요에 따라서, 각종의 아민 화합물을 이들 광중합개시제와 병용하는 것에 의해, 광중합개시 효과가 촉진되는 것이 공지이고, 본 발명에 있어서도 조합하여 사용할 수 있다. As a photoinitiator which is (C) component in the photosensitive resin composition of this invention, benzoin, such as benzoin, benzoin methyl ether, benzoin isopropyl ether, benzoin isobutyl ether, its derivatives, benzyl, benzyl dimethyl ketal, etc. Benzyl and derivatives thereof, acetophenone, 2,2-dimethoxy-2-phenylacetophenone, 2,2-diethoxy-2-phenylacetophenone, 1,1-dichloroacetophenone, 1-hydroxycyclohexylphenylketone Acetophenone and derivatives thereof, such as 2-methyl-1- (4-methylthiofil) -2-morpholinopropane-1-one, 2-methyl anthraquinone, 2-chloroanthraquinone and 2-ethylanthraquinone , Anthraquinones and derivatives thereof, such as 2-t-butyl anthraquinone, thioxanthones and derivatives thereof, such as thioxanthone, 2,4-dimethyl thioxanthone and 2-chlorothioxanthone, benzophenone, N, N Benzophenones such as -dimethyl aminobenzophenone and derivatives thereof. These photoinitiators may be used individually by 1 type, and may be used in combination of 2 or more type. Moreover, it is known that the photoinitiator effect is accelerated | stimulated by using various amine compounds together with these photoinitiators as needed, and can also be used in combination also in this invention.

이들 광중합 개시제의 배합량은, 감광성 수지 100 질량부에 대하여, 바람직하게는 0.1질량부~20질량부, 더욱 바람직하게는 1질량부~10질량부이다. 광중합 개시제의 배합량이 0.1질량부 미만이면, 광중합개시제로서의 효과를 충분하게 얻을 수 없는 경우가 있고, 한편, 20질량부를 초과하여도 배합량에 어울리는 효과는 없어 경제적이지 않다. The compounding quantity of these photoinitiators becomes like this. Preferably it is 0.1 mass part-20 mass parts, More preferably, it is 1 mass part-10 mass parts with respect to 100 mass parts of photosensitive resin. When the compounding quantity of a photoinitiator is less than 0.1 mass part, the effect as a photoinitiator may not fully be acquired, On the other hand, even if it exceeds 20 mass parts, there is no effect suitable for a compounding quantity, and it is not economical.

본 발명의 감광성 수지 조성물에서 (D) 성분인 반응성 희석제는, 활성 에너지 광선에 대한 경화성 및/또는 감광성 수지 조성물을 레지스트 잉크로서 사용하는 경우의 도공성을 향상시키는 목적으로 사용하는 것이다. 반응성 희석제로서는, 활성 에너지 광선 경화성이 있는 모노머류가 바람직하고, 2-히드록시에틸 아크릴레이트, 2-히드록시프로필 아크릴레이트, N-피롤리돈, N-아크릴로일모르폴린, N,N-디메틸 아크릴아미드, N,N-디에틸아크릴아미드, N,N-디메틸 아미노에틸아크릴레이트, N,N-디메틸 아미노프로필 아크릴레이트, 메톡시폴리에틸렌글리콜 아크릴레이트, 에톡시폴리에틸렌글리콜 아크릴레이트, 멜라민아크릴레이트, 페녹시에틸아크릴레이트, 페녹시프로필 아크릴레이트, 에틸렌글리콜 디아크릴레이트, 디프로필렌글리콜 디아크릴레이트, 폴리디프로필렌글리콜 디아크릴레이트, 트리메틸올프로판 트리아크릴레이트, 펜타에리트리톨 트리아크릴레이트, 펜타에리트리톨 테트라아크릴레이트, 디펜타에리트리톨 헥사아크릴레이트, 글리세린 디아크릴레이트, 이소보로닐아크릴레이트, 디시클로펜테닐옥시에틸 아크릴레이트 및 이들에 대응하는 각종 메타크릴레이트를 들 수 있다. 이들의 반응성 희석제는, 1종 단독으로 사용하여도 좋고, 2종 이상을 조합하여 사용하여도 좋다. The reactive diluent which is (D) component in the photosensitive resin composition of this invention is used for the purpose of improving the coating property at the time of using curable and / or photosensitive resin composition with respect to active energy rays as a resist ink. As a reactive diluent, monomers with active energy ray-curable are preferable, and 2-hydroxyethyl acrylate, 2-hydroxypropyl acrylate, N-pyrrolidone, N-acryloyl morpholine, N, N- Dimethyl acrylamide, N, N-diethyl acrylamide, N, N-dimethyl aminoethyl acrylate, N, N-dimethyl aminopropyl acrylate, methoxy polyethylene glycol acrylate, ethoxy polyethylene glycol acrylate, melamine acrylate , Phenoxyethyl acrylate, phenoxypropyl acrylate, ethylene glycol diacrylate, dipropylene glycol diacrylate, polydipropylene glycol diacrylate, trimethylolpropane triacrylate, pentaerythritol triacrylate, pentaeryte Lititol tetraacrylate, dipentaerythritol hexaacrylate, glycerin diacrylate, Isoboroyl acrylate, dicyclopentenyloxyethyl acrylate, and various methacrylates corresponding to these are mentioned. These reactive diluents may be used individually by 1 type, and may be used in combination of 2 or more type.

반응성 희석제의 배합량은, 감광성 수지 100 질량부에 대하여, 바람직하게는5 질량부~200 질량부, 더욱 바람직하게는 10 질량부~ 100 질량부이다. 반응성 희석제의 배합량이, 5 질량부 미만이면, 광 감도를 충분하게 얻을 수 없는 경우가 있고, 한편, 200 질량부를 초과하면, 감광성 수지 조성물을 레지스트 잉크로서 사용하는 경우에 점도가 너무 낮아지고, 경화 도막으로서의 내성이 불충분하게 되는 경우가 있다. The compounding quantity of a reactive diluent becomes like this. Preferably it is 5 mass parts-200 mass parts, More preferably, it is 10 mass parts-100 mass parts with respect to 100 mass parts of photosensitive resin. If the compounding quantity of the reactive diluent is less than 5 parts by mass, sufficient light sensitivity may not be obtained. On the other hand, if it exceeds 200 parts by mass, the viscosity becomes too low when the photosensitive resin composition is used as a resist ink, and the curing is performed. The resistance as a coating film may become inadequate.

또한, 도공성의 조정을 위하여, 반응성 희석제와 함께 용매를 사용할 수 있다. 이와 같은 용매로서는, 메틸에틸케톤, 메틸이소부틸 케톤, 시클로헥사논 등의 케톤류, 톨루엔, 크실렌 등의 방향족 탄화수소, 에틸셀로솔브, 부틸셀로솔브, 카르비톨, 부틸카르비톨 등의 카르비톨류, 아세트산에틸, 아세트산부틸, 셀로솔브 아세테이트, 부틸셀로솔브 아세테이트, 에틸카르비톨 아세테이트 등을 들 수 있다. 이들의 용매는 1종 단독으로 사용하여도 좋고, 2종 이상을 조합하여 사용하여도 좋다. Moreover, a solvent can be used with a reactive diluent for adjustment of coatability. As such a solvent, ketones such as methyl ethyl ketone, methyl isobutyl ketone and cyclohexanone, aromatic hydrocarbons such as toluene and xylene, carbitols such as ethyl cellosolve, butyl cellosolve, carbitol and butyl carbitol And ethyl acetate, butyl acetate, cellosolve acetate, butyl cellosolve acetate, ethyl carbitol acetate and the like. These solvent may be used individually by 1 type, and may be used in combination of 2 or more type.

본 발명의 감광성 수지 조성물을 액상 레지스트 잉크로서 사용하는 경우에 는, 상술한 (A) ~ (D) 성분 이외에, 또한 필요에 따라서, 실리카, 탄산칼슘, 황산바륨, 클레이, 탈크 등의 무기 충전제, 프탈로시아닌 그린, 프탈로시아닌 블루, 산화티탄, 카본블랙 등의 착색안료, 소포제, 레벨링제 등의 각종 첨가제, 하이드로퀴논, 레조르시놀, 카테콜, 피로가롤, 하이드로퀴논 모노메틸 에테르, t-부틸카테콜, 페노티아진 등의 중합방지제를 첨가할 수 있다. In the case of using the photosensitive resin composition of the present invention as a liquid resist ink, in addition to the components (A) to (D) described above, if necessary, inorganic fillers such as silica, calcium carbonate, barium sulfate, clay, talc, Various additives such as coloring pigments such as phthalocyanine green, phthalocyanine blue, titanium oxide, carbon black, antifoaming agent, leveling agent, hydroquinone, resorcinol, catechol, pyrogarol, hydroquinone monomethyl ether, t-butylcatechol And polymerization inhibitors such as phenothiazine can be added.

이어서, 본 발명의 감광성 수지의 제조방법에 관하여 설명한다. Next, the manufacturing method of the photosensitive resin of this invention is demonstrated.

제1 공정에서는, 3가의 유기인 화합물과 나프텐산 지르코늄 및 옥틸산 지르코늄의 적어도 1종의 존재하에서, 다관능 에폭시 화합물과 불포화 일염기산을 공지의 방법으로 반응시킨다. 또한, 이 반응은, 반응시의 열중합을 방지하는 점에서, 하이드로퀴논, 메틸 하이드로퀴논 등의 공지의 중합방지제를 계내에 첨가하기도 하고, 계내에 공기를 흡입하면서 실시하는 것이 바람직하다. In a 1st process, a polyfunctional epoxy compound and unsaturated monobasic acid are made to react by a well-known method in presence of a trivalent organophosphorus compound, at least 1 sort (s) of zirconium naphthenate and zirconium octylate. In addition, since this reaction prevents thermal polymerization at the time of reaction, it is preferable to add well-known polymerization inhibitors, such as hydroquinone and methyl hydroquinone, in a system, and to carry out inhaling air in a system.

제1 공정에서 반응온도는, 바람직하게는 60℃~150℃이고, 반응시간은, 바람직하게는 5시간~20시간이다. 다관능 에폭시 화합물이 액상인 경우, 무용매로 반응시키는 것이 가능하지만, 다관능 에폭시 화합물이 고형인 경우, 용매 중에서 반응시키는 것이 바람직하다. 여기서 사용하는 용매로서는, 예를 들어, 메틸에틸케톤, 시클로헥사논 등의 케톤류, 톨루엔, 크실렌 등의 방향족 탄화수소류, 디프로필렌글리콜 디메틸 에테르 등의 글리콜 에테르류, 아세트산에틸, 부틸셀로솔브 아세테이트, 카르비톨 아세테이트, 에틸카르비톨 아세테이트, 부틸카르비톨 아세테이트, 디프로필렌글리콜 모노메틸 에테르 아세테이트 등의 에스테르류, 석유 에테르, 석유 나프타, 솔벤트 나프타 등의 석유계 용매를 들 수 있다. In 1st process, reaction temperature becomes like this. Preferably it is 60 degreeC-150 degreeC, and reaction time becomes like this. Preferably it is 5 hours-20 hours. When the polyfunctional epoxy compound is liquid, it is possible to react with a solvent, but when the polyfunctional epoxy compound is solid, it is preferable to react in a solvent. Examples of the solvent used herein include ketones such as methyl ethyl ketone and cyclohexanone, aromatic hydrocarbons such as toluene and xylene, glycol ethers such as dipropylene glycol dimethyl ether, ethyl acetate, butyl cellosolve acetate, Esters such as carbitol acetate, ethyl carbitol acetate, butylcarbitol acetate, dipropylene glycol monomethyl ether acetate, and petroleum solvents such as petroleum ether, petroleum naphtha, and solvent naphtha.

제2 공정에서는, 제1 공정에서 얻어진 생성물에 다염기산 무수물을 공지의 방법으로 반응시킨다. 제2 공정에서 반응온도는, 바람직하게는 80℃~120℃이고, 반응시간은, 바람직하게는 1시간~6시간이다. In a 2nd process, polybasic acid anhydride is made to react with the product obtained by the 1st process by a well-known method. The reaction temperature in the second step is preferably 80 ° C to 120 ° C, and the reaction time is preferably 1 hour to 6 hours.

제3 공정에서는, 제2 공정에서 얻어진 생성물에 불포화 이중결합을 갖는 모노에폭시 화합물 및 수용성 모노에폭시 화합물을 공지의 방법으로 반응시킨다. 제3 공정에서 반응온도는, 바람직하게는 60℃~150℃이고, 반응시간은, 바람직하게는 0.5 시간~20 시간이다. In a 3rd process, the monoepoxy compound and water-soluble monoepoxy compound which have an unsaturated double bond are made to react with the product obtained by the 2nd process by a well-known method. In 3rd process, reaction temperature becomes like this. Preferably it is 60 degreeC-150 degreeC, and reaction time becomes like this. Preferably it is 0.5 hour-20 hours.

실시예Example

이하, 본 발명을 실시예에 의해 더욱 상세하게 설명하지만, 본 발명은 이들 실시예에 한정되는 것은 아니다. Hereinafter, the present invention will be described in more detail by way of examples, but the present invention is not limited to these examples.

<합성예 1>&Lt; Synthesis Example 1 &

교반기, 기체도입관 및 환류관을 구비한 플라스크에, 에틸카르비톨 아세테이트 192 질량부를 투입하고, 그것에 크레졸노볼락형 에폭시 수지(토우토 카세이 가부시끼가이샤제 에포토토(등록상표) YDCN704, 에폭시 당량 206) 206 질량부(1 당량)를 용해시켰다. 이어, 아크릴산 72 질량부(1.0몰), 하이드로퀴논 0.23 질량부, 트리페닐포스핀 0.4 질량부 및 나프텐산 지르코늄(금속 함유량 6 질량%) 2질량부를 투입하고, 액면하부의 기체도입관으로부터 공기를 흡입하면서 130℃에서 10 시간 반응을 계속하여, 산가 0.5 mgKOH/g의 반응물(에폭시 아크릴레이트)을 얻었다. 여기에 테트라히드로무수 프탈산 111.03 질량부(0.73몰)를 가하고, 120℃에서 2시간 더 반응시켜, 고형분 산가 105.3 mgKOH/g의 반응물을 얻었다. 여기에 글리시딜 메타크릴레이트 22.72 질량부(0.16몰) 및 데나콜(등록상표) EX-145(나가세 켐텍스 가부시끼가이샤제, 에폭시 당량 450) 9 질량부(0.02몰)를 가하고, 120℃에서 3시간 더 반응시켜, 더욱 비휘발분이 60%로 되도록 에틸카르비톨 아세테이트를 추가하여, 고형분 산가 73.4 mgKOH/g의 감광성 수지 A를 얻었다. 192 parts by mass of ethylcarbitol acetate was added to a flask equipped with a stirrer, a gas introduction tube, and a reflux tube, and cresol novolac-type epoxy resin (Efototo (registered trademark) YDCN704, manufactured by Toto Kasei Kabushiki Kaisha), epoxy equivalent 206) 206 parts by mass (1 equivalent) was dissolved. Subsequently, 72 parts by mass of acrylic acid (1.0 mole), 0.23 parts by mass of hydroquinone, 0.4 parts by mass of triphenylphosphine, and 2 parts by mass of zirconium naphthenate (6% by mass of metal) were introduced, and air was introduced from the gas introduction pipe under the liquid level. The reaction was continued for 10 hours at 130 ° C. while inhaling to obtain a reactant (epoxy acrylate) having an acid value of 0.5 mgKOH / g. 111.03 parts by mass (0.73 mol) of tetrahydrophthalic anhydride was added thereto, and the mixture was further reacted at 120 ° C for 2 hours to obtain a reaction product having a solid acid value of 105.3 mgKOH / g. 22.72 parts by mass of glycidyl methacrylate (0.16 mole) and 9 parts by mass (0.02 mole) of Denacol (registered trademark) EX-145 (manufactured by Nagase Chemtex Co., Ltd., epoxy equivalent 450) were added at 120 ° C. The mixture was further reacted for 3 hours, and ethylcarbitol acetate was further added so that the nonvolatile content became 60% to obtain a photosensitive resin A having a solid acid value of 73.4 mgKOH / g.

<합성예 2>&Lt; Synthesis Example 2 &

나프텐산 지르코늄(금속 함유량 6 질량%) 2 질량부 대신 옥틸산 지르코늄(금속 함유량 12 질량) 2 질량부를 사용하는 이외는, 합성예 1과 동일한 작업을 실시하여 감광성 수지 B를 얻었다.  Photosensitive resin B was obtained by the same operation as in Synthesis Example 1, except that 2 parts by mass of zirconium octylate (12 parts by mass of metal) was used instead of 2 parts by mass of naphthenate of zirconium (metal content 6% by mass).

<비교 합성예 1(특허문헌 1의 실시예 1에 상당함)>Comparative Synthesis Example 1 (equivalent to Example 1 of Patent Document 1)

교반기, 기체도입관 및 환류관을 구비한 플라스크에, 에틸카르비톨 아세테이트 192 질량부를 투입하고, 그것에 크레졸노볼락형 에폭시 수지(토우토 카세이 가부시끼가이샤제 에포토토(등록상표) YDCN704, 에폭시 당량 206) 206 질량부(1 당량)를 용해시켰다. 이어, 아크릴산 72 질량부(1.0몰), 2,6-디-t-부틸-4-메톡시페놀 2.17 질량부, 트리페닐포스핀 0.415 질량부를 투입하고, 액면하부의 기체도입관 으로부터 공기를 흡입하면서 130℃에서 10 시간 반응을 계속하여, 산가 1.0 mg KOH/g의 반응물(에폭시 아크릴레이트)을 얻었다. 이것에 테트라히드로무수 프탈산111.03질량부(0.73몰) 및 나프텐산리튬(금속 함유량 3%) 0.707 질량부를 가하고, 120℃에서 2시간 더 반응시켜, 고형분 산가 105.3 mgKOH/g의 반응물을 얻었다. 여기에 글리시딜 메타크릴레이트 22.72 질량부(0.16몰) 및 데나콜(등록상표) EX-145(나가세 켐텍스 가부시끼가이샤제, 에폭시 당량 450) 9 질량부(0.02몰)를 가하고, 120℃에서 3시간 더 반응시키고, 이어 비휘발분이 60%로 되도록 에틸카르비톨아세테이트를 추가하여, 고형분 산가 73.4 mgKOH/g의 감광성 수지 C를 얻었다. 192 parts by mass of ethylcarbitol acetate was added to a flask equipped with a stirrer, a gas introduction tube, and a reflux tube, and cresol novolac-type epoxy resin (Efototo (registered trademark) YDCN704, manufactured by Toto Kasei Kabushiki Kaisha), epoxy equivalent 206) 206 parts by mass (1 equivalent) was dissolved. Next, 72 parts by mass (1.0 mol) of acrylic acid, 2.17 parts by mass of 2,6-di-t-butyl-4-methoxyphenol and 0.415 parts by mass of triphenylphosphine were added thereto, and air was sucked in from the gas inlet pipe under the liquid level. The reaction was continued for 10 hours at 130 ° C. while obtaining a reactant (epoxy acrylate) having an acid value of 1.0 mg KOH / g. 111.03 mass parts (0.73 mol) of tetrahydro phthalic anhydride and 0.707 mass part of lithium naphthenates (metal content 3%) were added to this, and it was made to react at 120 degreeC for further 2 hours, and the reaction material of 105.3 mgKOH / g of solid acid value was obtained. 22.72 parts by mass of glycidyl methacrylate (0.16 mole) and 9 parts by mass (0.02 mole) of Denacol (registered trademark) EX-145 (manufactured by Nagase Chemtex Co., Ltd., epoxy equivalent 450) were added at 120 ° C. The mixture was further reacted for 3 hours, and then ethylcarbitol acetate was added so that the nonvolatile content became 60% to obtain a photosensitive resin C having a solid acid value of 73.4 mgKOH / g.

표 1에 나타내는 배합비율에 따라서 각 성분을 배합하고, 3롤에 의해 충분히 혼련하여, 감광성 수지 조성물을 제조하였다. 표 1중의 감광성 수지의 질량은, 수지 고형분의 값으로 나타내었다. Each component was mix | blended according to the compounding ratio shown in Table 1, it knead | mixed enough by 3 rolls, and the photosensitive resin composition was manufactured. The mass of the photosensitive resin of Table 1 was shown by the value of resin solid content.

이어서, 미리 면처리시킨 프린트 배선기판에, 상기 감광성 수지 조성물을 30μm~40μm로 되도록 스크린 인쇄법에 의해 도공하고, 80℃에서 20분간 예비 건조 후, 실온까지 냉각하여 건조 도막을 얻었다. 이 도막을, 오크 세이사쿠죠제 초고압수은등 노광장치를 이용하여 250 mJ/cm2로 노광하고, 그 후, 열풍건조기를 이용하여 150℃에서 30분간 가열하여 경화 도막을 얻었다. 얻어진 도막에 관하여, 이하에 나타내는 평가시험방법에 따라서, 각종 물성평가를 실시하였다. 이들의 결과를 표 2에 나타내었다. Subsequently, the photosensitive resin composition was coated on the printed wiring board previously subjected to surface treatment by a screen printing method so as to have a thickness of 30 μm to 40 μm, preliminarily dried at 80 ° C. for 20 minutes, and then cooled to room temperature to obtain a dry coating film. This coating film was exposed at 250 mJ / cm <2> using the oak Seisakujo ultrahigh pressure mercury lamp exposure apparatus, Then, it heated at 150 degreeC for 30 minutes using the hot air dryer, and obtained the cured coating film. Various physical property evaluation was performed about the obtained coating film according to the evaluation test method shown below. The results are shown in Table 2.

<감도><Sensitivity>

예비건조 후의 건조 도막에 감도 측정용 스탭타블렛(코닥 21단)을 설치하고, 오쿠 세이사쿠죠 제조의 고압수은등 노광장치를 이용하여 250 mJ/cm2로 노광하고, 1% 탄산나트륨 수용액을 사용하여, 스프레이압 2.0 kgf/mm2로 60초간 현상을 실시한 후의 노광 부분이 제거되지 않은 부분의 단수를 측정하였다. 제거되지 않은 부분의 단수가 클수록 고감도이다. A step tablet (Kodak 21 stage) for sensitivity measurement was installed in the dry coating film after preliminary drying, and it exposed at 250 mJ / cm <2> using the high pressure mercury lamp exposure apparatus by Oku Seisakujo, and used the 1% sodium carbonate aqueous solution, The number of stages of the part in which the exposed part after removing image development for 60 second by 2.0 kgf / mm <2> of spray pressures was measured. The higher the number of stages of the unremoved part, the higher the sensitivity.

<현상관리폭><Development management width>

예비건조 시간을 20분, 40분, 60분 또는 80분으로 변경한 건조 도막을 사용하여, 1% 탄산나트륨 수용액을 사용하여, 스프레이압 2.0 kgf/mm2로 현상을 실시하고, 현상 후의 도막의 유무를 관찰하여, 하기 기준으로 평가하였다. 건조 시간이 길어도 현상가능한 것만큼 현상관리폭이 양호하다. Using a dry coating film with a preliminary drying time of 20 minutes, 40 minutes, 60 minutes or 80 minutes, using a 1% aqueous sodium carbonate solution, development was carried out at a spray pressure of 2.0 kgf / mm 2 , and the presence or absence of the coating film after development Was observed and evaluated based on the following criteria. Even if the drying time is long, the development control width is as good as that which can be developed.

○: 현상 시간 60초 후, 육안으로 도막 없음. (Circle): After 60 second of development time, there is no coating visually.

△: 현상 시간 120초 후, 육안으로 도막 없음. (Triangle | delta): After 120 seconds of image development time, there is no coating film visually.

×: 현상 시간 120초 후, 육안으로 잔막 있음. X: After 120 seconds of developing time, there is a residual film visually.

<땜납내열성><Solder Heat Resistance>

경화 도막을, JIS C6481에 준하여, 전면이 땜납에 잠기도록 띄우고, 260℃의 땜납욕에 10초간, 3회 띄우고, 꺼낸 후, 팽윤 또는 박리 등의 도막의 상태를 관찰하고, 하기 기준으로 평가하였다. The cured coating film was floated so that the whole surface was submerged in solder according to JIS C6481, floated three times in a 260 ° C. solder bath for 10 seconds, and taken out. Then, the state of the coating film such as swelling or peeling was observed and evaluated according to the following criteria. .

○: 외관 변화 없음. ○: no change in appearance.

×: 외관 변화 있음. X: There is a change in appearance.

<내용매성><Contents Selling>

경화 도막을 염화 메틸렌에 30분간 침지시킨 후의 도막 상태를 평가하였다. The coating film state after immersing a cured coating film in methylene chloride for 30 minutes was evaluated.

○: 외관 변화 없음. ○: no change in appearance.

△: 외관이 약간 변화 있음. (Triangle | delta): Appearance changes slightly.

×: 도막이 박리한 것. X: The coating film peeled off.

<열안정성><Thermal Stability>

감광성 수지 A ~ C 각각의 수지 고형분 100 질량부에 대하여, 트리메틸올프로판 트리아크릴레이트 10 질량부를 가하여 10분 혼합하고, 시험관에 넣어, 120℃에서 유동성이 없어질 때까지의 시간을 겔화 시간으로 하여 평가하였다. 결과를 표 3에 나타내었다. With respect to 100 mass parts of resin solid content of each photosensitive resin A-C, 10 mass parts of trimethylol propane triacrylates were added, it mixed for 10 minutes, and it puts into a test tube, making time until fluidity disappears at 120 degreeC as gelling time. Evaluated. The results are shown in Table 3.

Figure 112011020927983-pct00003
Figure 112011020927983-pct00003

Figure 112011020927983-pct00004
Figure 112011020927983-pct00004

Figure 112011020927983-pct00005
Figure 112011020927983-pct00005

Claims (5)

(A) 3가의 유기인 화합물과 나프텐산 지르코늄 및 옥틸산 지르코늄의 적어도 1종의 존재하에서, 다관능 에폭시 화합물과 불포화 일염기산을 반응시키고, 이어 다염기산 무수물을 반응시키는 것에 의해 생성한 카복실 기에 불포화 이중결합을 갖는 모노에폭시 화합물 및 수용성 모노에폭시 화합물을 반응시켜 얻을 수 있는 감광성 수지, (B) 에폭시 수지, (C) 광중합 개시제 및 (D) 반응성 희석제를 함유하는 것을 특징으로 하는 감광성 수지 조성물. (A) Unsaturation in the carboxyl group produced by reacting a polyfunctional epoxy compound with an unsaturated monobasic acid in the presence of at least one of a trivalent organophosphorus compound, zirconium naphthenate and zirconium octylate, and then reacting the polybasic anhydride. A photosensitive resin composition comprising a photosensitive resin obtained by reacting a monoepoxy compound having a double bond and a water-soluble monoepoxy compound, (B) an epoxy resin, (C) a photopolymerization initiator, and (D) a reactive diluent. 제 1항에 있어서, 상기 감광성 수지가, 상기 카복실 기 1 몰에 대하여, 상기불포화 이중결합을 갖는 모노에폭시 화합물 및 상기 수용성 모노에폭시 화합물을 총량으로 0.15 몰 ~ 0.25 몰(단, 수용성 모노에폭시 화합물은 0.03 몰 미만) 반응시켜 얻어진 것임을 특징으로 하는 감광성 수지 조성물. The method of claim 1, wherein the photosensitive resin is 0.15 mol to 0.25 mol in total amount of the monoepoxy compound having the unsaturated double bond and the water-soluble monoepoxy compound with respect to 1 mole of the carboxyl group (However, the water-soluble monoepoxy compound is Less than 0.03 mole). 제 1항 또는 제 2항에 있어서, 상기 나프텐산 지르코늄 및 옥틸산 지르코늄의 적어도 1종을, 질량 기준으로, 3가의 유기인 화합물의 적어도 4배 사용하는 것을 특징으로 하는 감광성 수지 조성물. The photosensitive resin composition according to claim 1 or 2, wherein at least one of zirconium naphthenate and zirconium octylate is used at least four times as large as a trivalent organic compound on a mass basis. 3가의 유기인 화합물과 나프텐산 지르코늄 및 옥틸산 지르코늄의 적어도 1종의 존재하에서, 다관능 에폭시 화합물과 불포화 일염기산을 반응시키는 제1 공정,
제1 공정에서 얻어진 생성물에 다염기산 무수물을 반응시키는 제2 공정,
제2 공정에서 얻어진 생성물에 불포화 이중결합을 갖는 모노에폭시 화합물 및 수용성 모노에폭시 화합물을 반응시키는 제3 공정을 포함하는 것을 특징으로 하는 감광성 수지의 제조방법.
A first step of reacting a polyfunctional epoxy compound with an unsaturated monobasic acid in the presence of at least one of a trivalent organophosphorus compound, zirconium naphthenate and zirconium octylate,
A second step of reacting the polybasic acid anhydride with the product obtained in the first step,
And a third step of reacting the product obtained in the second step with the monoepoxy compound having an unsaturated double bond and the water-soluble monoepoxy compound.
제 4항에 있어서, 공기를 흡입하면서 상기 제1 공정에서 반응을 실시하는 것을 특징으로 하는 감광성 수지의 제조방법. The method for producing a photosensitive resin according to claim 4, wherein the reaction is carried out in the first step while inhaling air.
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