KR101266165B1 - Calibration Position Device For Thin Tube Of Laser Processing - Google Patents
Calibration Position Device For Thin Tube Of Laser Processing Download PDFInfo
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- KR101266165B1 KR101266165B1 KR1020100138664A KR20100138664A KR101266165B1 KR 101266165 B1 KR101266165 B1 KR 101266165B1 KR 1020100138664 A KR1020100138664 A KR 1020100138664A KR 20100138664 A KR20100138664 A KR 20100138664A KR 101266165 B1 KR101266165 B1 KR 101266165B1
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- workpiece
- light emitting
- runout
- rotating body
- xyz stage
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- Optics & Photonics (AREA)
- Plasma & Fusion (AREA)
- Mechanical Engineering (AREA)
- Laser Beam Processing (AREA)
- Length Measuring Devices By Optical Means (AREA)
- Human Computer Interaction (AREA)
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- General Physics & Mathematics (AREA)
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Abstract
The present invention, the base 100: the rotating body XYZ stage 200 is installed so as to be movable in the X, Y, Z axis direction on the upper surface of the base 100, the operation control by the control unit 700: the rotation Rotor 300 installed in the entire XYZ stage 200, fixed to the workpiece (M), the operation controlled by the control unit 700 to rotate the workpiece (M) about the axis: the rotating body XYZ stage Sensor block XYZ stage 400 disposed on the opposite side of the base and movable in the X, Y, Z-axis direction from the upper surface of the base 100: installed in the sensor block XYZ stage 400 in the longitudinal direction Sensor block 500 for measuring the runout of the workpiece (M) through the runout sensor 410 wrapped around the outer surface of the projected workpiece (M) and outputs a measurement value: to the sensor block XYZ stage 400 It is installed, the operation control by the control unit 700 for processing the workpiece (M) through the laser Laser 600: Receives the measured value from the runout sensor 410 and calculates a correction value according to the runout displacement of the workpiece (M) through mutual comparison with the reference value already set, the rotating body XYZ through the correction value And a controller 700 for operation control of the stage 200 to correct an error due to a runout displacement.
According to an embodiment of the present invention, the runout of the workpiece generated during rotation is measured using a runout sensor, the measured value is transmitted to the controller, and the controller calculates a correction value through mutual comparison with the set value. By correcting the position of the rotating body XYZ stage holding the workpiece, there is an advantage that the laser for processing can be precisely processed without losing focus on the workpiece.
Description
The present invention relates to a position correction device for laser processing of a thin tube, and to explain in more detail, the runout of the workpiece is measured (detected) through the runout sensor and outputs the measured value to the controller, and The laser is a thin tube that can be processed precisely without losing the focus on the workpiece by correcting the position of the rotating body XYZ stage holding the workpiece by calculating a correction value through mutual comparison with the set value. A position correction device for machining.
Recently, with the development of medical technology, the medical demand for microfabricated parts is increasing. One of them is a catheter and a stent used in brain or heart surgery. These products can be used to pattern drugs for drug delivery, vessel support, etc. by laser or electronic distance measurement (EDM) on metal tubes of several millimeters (mm) or hundreds of micro (μm) diameter (hereinafter referred to as workpieces). Is processed. The processing on such a workpiece is easy due to the small diameter of the workpiece and can be easily bent because of difficulty in mounting the workpiece and runout due to rotation of the workpiece, even if non-contact processing such as laser processing without direct contact with the workpiece is used. Laser processing is not easy
The above-mentioned run out means that the central axis of the rotating body rotates and is shaken by a predetermined displacement while the rotating body rotates, and is generally caused by an imbalance, external force or shape error of the rotating body.
Methods for measuring such runout are largely divided into a contact method and a non-contact method.
The contact method is a device for directly contacting and measuring a workpiece. Typically, a dial gauge, a pressure gauge generally referred to as an indicator, and an electric micrometer are used.
However, the contact methods are not applicable to the measurement of the runout to the workpiece in the high-speed rotation state, and moreover, if the contact type measuring device is easily installed in the workpiece of several millimeters (mm) or hundreds of micro (μm) in diameter. Because of the warping problem, it could not be applied further.
On the other hand, the non-contact method is a device for measuring by using the optical in a state arranged adjacent to the workpiece, typically using an eddy current sensor, a capacitive sensor, an optical sensor.
The non-contact measuring instruments are capable of high-speed measurement of the workpiece, but in general, the non-contacting method using a field requires a target measuring area that is 30% larger than the cross section of the sensor to be measured, Therefore, a noise called electrical runout may occur. In particular, there is a problem in that performance such as sensitivity and measurement area changes depending on the diameter (size) of the workpiece to be measured.
In the case of the eddy current type sensor or the capacitive type sensor, it is possible to measure only the workpiece having a diameter of 2 to 3 times larger than the diameter of the measuring probe, and thus the runout of the workpiece having a diameter of several millimeters (mm) or several hundred micro (μm) can be measured. There is a limit of impossible measurement.
The optical sensor may be classified into a reflective type and a transmissive type. The reflective type is sensitive to the surface roughness and surface characteristics of the reflective surface, and the transmissive type has a problem in that resolution below the pixel size of the image sensor cannot be obtained.
The present invention has been made to solve the above problems, and measures (detects) and corrects the runout displacement of a relatively thin workpiece in a few micrometers or several micro units, and precisely processes the workpiece by using a laser. It is an object of the present invention to provide a position correction device for laser processing of thin tubes.
According to an aspect of the present invention,
Base:
Rotor body XYZ stage is installed on the upper surface of the base so as to be movable in the X, Y, Z axis direction, the operation control by the control unit:
A rotating body installed on the rotating body XYZ stage, the workpiece being fixed, and controlled by a control unit to rotate the workpiece about an axis;
A sensor block XYZ stage disposed on the opposite side of the rotating body XYZ stage and installed to be movable in the X, Y, and Z axes in the upper surface of the base:
A sensor block installed on the sensor block XYZ stage and surrounding the outer surface of the workpiece protruding in the longitudinal direction to measure a runout of the workpiece through a runout sensor to output a measured value;
A processing laser is installed on the sensor block XYZ stage, and is controlled by a control unit to process a workpiece through a laser.
The measured value is inputted from the runout detection sensor to calculate a correction value according to the runout displacement of the workpiece through mutual comparison with a preset reference value, and by operating the rotating body XYZ stage based on the correction value, the error according to the runout displacement is determined. And a control unit for correcting.
According to an embodiment of the present invention, the runout of the workpiece generated during rotation is measured using a runout sensor, the measured value is transmitted to the controller, and the controller calculates a correction value through mutual comparison with the set value. By correcting the position of the rotating body XYZ stage holding the workpiece, there is an advantage that the laser for processing the workpiece can be precisely processed without losing focus on the workpiece.
1 to 4 is a combined perspective view, an exploded perspective view, a front view and a right side view of the position correction device for the laser processing of the thin tube according to the present invention.
Figure 5 is a block diagram showing the correlation between each component in the position correction device for laser processing of a narrow tube according to the present invention.
6a and 6b show an embodiment of a position correction device for the laser processing of the narrow tube according to the present invention.
Hereinafter, with reference to the accompanying drawings will be described in detail.
1 to 4, the position correction device for the laser processing of the narrow tube according to the present invention, the
The
In the present embodiment, the
The rotating
The rotating body Z-
The rotating body
The rotating body Y-
On the other hand, the rotating body Z-
The rotating
Next, the sensor
The sensor
Referring to FIG. 2, the sensor block Z-
The sensor block
Subsequently, the sensor block Y-
On the other hand, in the case of the other end portion of the lead screw (111 ', 415a, 424a) protruding outward, the operator may manually operate the outer surface through the knurling operation, in the present embodiment, the first end portion of the lead screw ( The driving unit 110 ', the second' driving
Referring to FIG. 4, the
The
The
The first
The first
In particular, the first
Briefly describing the principle of the
For example, as illustrated in FIG. 6B, the workpiece M may receive light from the first
Meanwhile, light emitting part
The optical fiber refers to an optical fiber that uses a glass having a high refractive index at its center and a glass having a low refractive index at its center to cause total reflection of light passing through the central glass. As a result, the structure is relatively simple, it is easy to transmit light in a desired path, and it is widely used in each field because it has the advantage of very little energy loss and little external influence during transmission.
In the present invention, after the light provided from the first
On the other hand, it is preferable that the light emitting part
Installed in the sensor
In the present exemplary embodiment, the sensor
Next, the correlation between the components including the
As illustrated in FIG. 5, the first
Referring to the operation relationship in the embodiment of the present invention made of such a configuration as follows.
As shown in FIG. 1, one end of the workpiece M is inserted into and fixed to the fixing
The micropores are formed in the circumferential surface along the longitudinal direction of the workpiece M through the laser of the
On the other hand, for the next micropore work is to rotate the
The
Therefore, when the workpiece M is placed in the normal position as shown in FIG. 6B while the position of the
It will be understood by those skilled in the art that various changes in form and details may be made therein without departing from the spirit and scope of the present invention as defined by the appended claims.
100: base 200: rotating body XYZ stage
210: rotating body Z-axis transfer frame 220: rotating body X-axis transfer frame
230: rotating body Y axis transfer frame 300: rotating body
400: sensor block XYZ stage 410: sensor block Z axis transport frame
420: X-axis transfer frame of sensor block 430: Y-axis transfer frame of sensor block
500: sensor block 510: runout detection sensor
511a: first
512a: second
513a.514a: light emitting part optical fiber 513b.514b: light receiving part optical fiber
600: laser for processing 700: control unit
M: Workpiece
Claims (4)
Rotor body XYZ stage is installed on the upper surface of the base so as to be movable in the X, Y, Z axis direction, the operation control by the control unit:
A rotating body installed on the rotating body XYZ stage, the workpiece being fixed, and controlled by a control unit to rotate the workpiece about an axis;
Sensor block XYZ stage disposed on the opposite side of the rotating body XYZ stage and movable in the X, Y, Z-axis direction from the upper surface of the base: the outer surface of the workpiece protruding in the longitudinal direction installed on the sensor block XYZ stage Sensor block that measures the runout of the workpiece through the wrapped runout sensor and outputs the measured value:
A processing laser is installed on the sensor block XYZ stage, and is controlled by a control unit to process a workpiece through a laser.
The measured value is inputted from the runout detection sensor to calculate a correction value according to the runout displacement of the workpiece through mutual comparison with a preset reference value, and by operating the rotating body XYZ stage based on the correction value, the error according to the runout displacement is determined. Control unit to calibrate:
Runout detection sensor is installed in the sensor block,
A first light emitting unit and a first light receiving unit disposed to correspond to the first light emitting unit and receiving light provided from the first light emitting unit and converting the light into an electrical signal;
A second light emitting unit and a second light receiving unit which is disposed to correspond to the second light emitting unit and receives light provided from the first light emitting unit and converts the light into an electrical signal,
And the first light emitting unit and the first light receiving unit, the second light emitting unit, and the second light receiving unit are alternately disposed so as not to be in contact with each other.
The sensor block XYZ stage is operation controlled by a control unit for adjusting the position of the sensor block position correction device for laser processing of a narrow tube.
The light emitting part optical fiber and the light receiving part optical fiber are further provided on the first light emitting part and the second light emitting part and the first light receiving part and the second light receiving part.
After the light emitted from the first light emitting unit and the second light emitting unit passes through each light emitting unit optical fiber, it is irradiated to the first light receiving unit and the second light receiving unit through the corresponding light receiving unit optical fiber Position correction device for laser processing.
Priority Applications (1)
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KR1020100138664A KR101266165B1 (en) | 2010-12-30 | 2010-12-30 | Calibration Position Device For Thin Tube Of Laser Processing |
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KR1020100138664A KR101266165B1 (en) | 2010-12-30 | 2010-12-30 | Calibration Position Device For Thin Tube Of Laser Processing |
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KR20120076899A KR20120076899A (en) | 2012-07-10 |
KR101266165B1 true KR101266165B1 (en) | 2013-05-21 |
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KR1020100138664A KR101266165B1 (en) | 2010-12-30 | 2010-12-30 | Calibration Position Device For Thin Tube Of Laser Processing |
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Citations (4)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP2008030108A (en) | 2006-07-31 | 2008-02-14 | Nippei Toyama Corp | Device for supporting workpiece in laser beam machine |
JP2010012479A (en) | 2008-07-01 | 2010-01-21 | Amada Co Ltd | Method and apparatus for laser-machining pipe material |
JP2010125517A (en) | 2008-12-01 | 2010-06-10 | Komatsu Ntc Ltd | Laser machining method for pipe |
JP2010279953A (en) * | 2009-06-02 | 2010-12-16 | Pulstec Industrial Co Ltd | Laser beam machining apparatus, and focus servo control method of the same |
-
2010
- 2010-12-30 KR KR1020100138664A patent/KR101266165B1/en not_active IP Right Cessation
Patent Citations (4)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP2008030108A (en) | 2006-07-31 | 2008-02-14 | Nippei Toyama Corp | Device for supporting workpiece in laser beam machine |
JP2010012479A (en) | 2008-07-01 | 2010-01-21 | Amada Co Ltd | Method and apparatus for laser-machining pipe material |
JP2010125517A (en) | 2008-12-01 | 2010-06-10 | Komatsu Ntc Ltd | Laser machining method for pipe |
JP2010279953A (en) * | 2009-06-02 | 2010-12-16 | Pulstec Industrial Co Ltd | Laser beam machining apparatus, and focus servo control method of the same |
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KR20120076899A (en) | 2012-07-10 |
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