KR101250982B1 - Method and device for manufacturing metal electrode pattern - Google Patents

Abstract

Metal electrode pattern manufacturing method of the present invention, the coating step of slot die coating the organometallic compound ink on the substrate; A preheating step of heating the coated substrate; A pattern forming step of irradiating a laser beam from a single laser source on the heated substrate through a laser scanner to form a pattern; A cleaning step of cleaning the substrate on which a pattern is formed; And a heating step after heating the washed substrate.

Description

METHOD AND DEVICE FOR MANUFACTURING METAL ELECTRODE PATTERN {METHOD AND DEVICE FOR MANUFACTURING METAL ELECTRODE PATTERN}

The present invention relates to a method and apparatus for manufacturing a metal electrode pattern.

Recently, the field that is attracting attention as the next generation technology is a flexible electronic device. The field in which the flexible electronic device is applicable may be variously applied to the next generation flexible display, solar cell, next generation mobile phone, and various electronic products. In addition, there is an increasing demand for thinning and high performance of products in the mining, display, semiconductor and bio industries. In addition, as electronic products become smaller and thinner, the most important field for the trend of changing from a conventional PCB to an FPCB is a flexible electronic device.

The most important field in manufacturing an electronic device on a flexible substrate is to form an electrode (pattern). In addition, the most important technology in the industry is production technology. There is a lot of data on how and how to form electrodes on such flexible substrates. However, in the industrial aspect, attention has been paid to how to combine this technology with production technology to increase the amount of electrode production per unit time.

On the other hand, there is a conventional semiconductor process as a method of forming an electrode on a substrate. Conventional semiconductor processes use photolithography and deposition processes. This method requires a mask process, a high manufacturing cost, and a high temperature process. Because of the high temperature required, fabrication on heat-sensitive polymer substrates is not possible. Due to this problem, the conventional semiconductor process has a lot of problems in the process of forming the electrode on the flexible substrate.

A process developed to solve this problem is developed a process for sintering metal particles from an organometallic compound ink using a laser, and there are patents and papers on such a process.

However, since the method of forming an electrode through sintering of metal particles from an organometallic compound ink using a laser is not a continuous process, the quality of the electrode is deteriorated due to the introduction of foreign matters between the processes and the processes. If the time becomes longer, there is a problem that the electrode is easily changed by various conditions. In addition, there is a limitation in the size of the substrate that can form a pattern, there is a problem that the electrode output per unit time is small because it is not a continuous process.

Korean Registered Patent Publication No. 10-0293479 (Registration Date: April 3, 2001)

An object of the present invention is to provide a method and apparatus for manufacturing a metal electrode pattern that can increase the pattern output per unit time.

The method of manufacturing a metal electrode pattern of the present invention according to claim 1, The coating step, the coating step of slot die coating the organometallic compound ink on the substrate; A preheating step of heating the coated substrate by a preheater; A pattern forming step of forming a pattern by irradiating a laser beam from a single laser source on the heated substrate through a laser scanner by a pattern forming unit; A washing step of washing the substrate on which the pattern is formed by a washing part; And a post heating step of heating the washed substrate by a post heating unit. The first substrate is disposed below the coating part, the preheating part and the pattern forming part, and the mounted substrate is passed through the lower part of the coating part and the lower part of the preheating part by the first transfer part on which the substrate is mounted. A first conveyance step of conveying horizontally up to; The second transfer part which is above the first transfer part and disposed below the pattern forming part, above the washing part, and above the post heating part, lifts the substrate positioned below the pattern forming part, and transfers the substrate to the washing part, and the washing is performed. And a second transfer step of lifting the substrate positioned in the portion and transferring the substrate to the heating unit. The coating step is performed when the substrate is positioned below the coating part by the first transfer step, and the preheating step is performed when the substrate is located below the preheat part by the first transfer step, The pattern forming step is performed when the substrate is positioned below the pattern forming part by the first conveying step, and the cleaning step is performed when the substrate is located on the cleaning part by the second conveying step, The post heating step is performed when the substrate is located in the post heating section by a second transfer step.

Therefore, according to the metal electrode pattern manufacturing method of the invention according to claim 1, since the pattern production amount per unit time can be increased by pattern formation by performing a continuous process, it is efficient for pattern production. In addition, because the continuous process is made by automation rather than manual, no foreign matter is introduced into the pattern, and the pattern is not altered by the external environment.

In the method for manufacturing a metal electrode pattern according to claim 2, in the method for manufacturing a metal electrode pattern according to claim 1, in the preliminary heating step, heating is performed using infrared exposure or a hot plate.

Therefore, according to the method for manufacturing a metal electrode pattern according to the second aspect of the present invention, since the substrate coated with infrared exposure or a hot plate is heated, heat can be uniformly transferred to a large area.

In the method for manufacturing a metal electrode pattern according to claim 3, the method for manufacturing a metal electrode pattern according to the present invention according to claim 1, wherein in the pattern forming step, the substrate is arranged in a first axis direction and a second axis perpendicular to the first axis direction. Direction, the first axial direction and the third axial direction perpendicular to the second axial direction while moving the laser to form a pattern.

Therefore, according to the metal electrode pattern manufacturing method of the invention according to claim 3, since the substrate can be moved in space to irradiate a laser beam, it is suitable for mass production, large area, and mass production of patterns.

In the method of manufacturing a metal electrode pattern of the invention according to claim 4, in the method of manufacturing a metal electrode pattern of the invention according to claim 1, in the washing step, the cleaning solution containing the substrate is irradiated with ultrasonic waves to wash the substrate, and the cleaning solution is generated. The foreign matter is filtered and the cleaning liquid remaining on the substrate is removed by spraying nitrogen gas.

Therefore, according to the metal electrode pattern manufacturing method of the invention according to claim 4, it is possible to large-scale the area, mass production and automation of the pattern, it is possible to maintain the state of the cleaning liquid in the washing machine at the best.

In the method of manufacturing a metal electrode pattern of the invention according to claim 5, in the method of manufacturing a metal electrode pattern of the invention according to claim 1, in the post-heating step, the substrate is heated to a temperature greater than a temperature at which the specific resistance of the metal electrode decreases at a predetermined decrease rate. do.

Therefore, according to the metal electrode pattern manufacturing method of the invention according to claim 5, since the substrate is heated to a temperature larger than the temperature at which the specific resistance of the metal electrode forming the pattern decreases at a predetermined reduction rate, heat can be sufficiently applied to the substrate.

In the method for manufacturing a metal electrode pattern according to claim 6, in the method for manufacturing a metal electrode pattern according to claim 1, in the post-heating step, heating is performed using a hot chuck.

Therefore, according to the metal electrode pattern manufacturing method of the invention according to claim 6, since the substrate is heated using a hot chuck, heat can be uniformly applied to the substrate.

The invention is a metal electrode pattern manufacturing apparatus according to claim 7, the coating portion for slot-die coating the organometallic compound ink on the substrate; A preliminary heating unit which heats the substrate coated by the coating unit; A pattern forming unit for irradiating a laser beam from a single laser source onto the substrate heated by the preliminary heating unit through a laser scanner to form a pattern; A washing unit washing the substrate on which the pattern is formed in the pattern forming unit; And a heating unit after heating the substrate washed by the washing unit. The substrate may be disposed below the coating part, the preliminary heating part, and the pattern forming part, and the substrate may be mounted, and the mounted substrate may be horizontally lowered through the lower part of the coating part and the lower part of the pattern forming part through the lower part of the preliminary heating part. A first conveying part which is conveyed to the body; And a substrate disposed above the first transfer unit and disposed below the pattern forming unit, above the washing unit, and above the post heating unit, and lifting the substrate positioned below the pattern forming unit to the washing unit, and located in the washing unit. And a second transfer part for lifting the substrate and transferring the substrate to the post heating part. Further, when the substrate is positioned below the coating portion by the first transfer portion, slot die coating by the coating portion is performed, and when the substrate is positioned under the preheat portion by the first transfer portion, Preliminary heating by the preliminary heating unit is performed, and when the substrate is positioned below the pattern forming unit by the first transfer unit, pattern formation by the regular pattern forming unit is performed. In addition, when the substrate is located in the washing unit by the second transfer unit, washing by the washing unit is performed, and when the substrate is located in the post heating unit by the second transfer unit, the post heating unit After heating is performed.

Therefore, according to the metal electrode pattern manufacturing apparatus of the invention according to claim 7, when the pattern is formed on a light substrate through the continuous process can be increased in the pattern production per unit time, it is efficient for the pattern production. In addition, because the continuous process is made by automation rather than manual, no foreign matter is introduced into the pattern, and the pattern is not altered by the external environment.

The metal electrode pattern manufacturing apparatus of the present invention according to claim 8, the coating unit for slot-die coating the organometallic compound ink on the substrate; A preliminary heating unit which heats the substrate coated by the coating unit; A pattern forming unit for irradiating a laser beam from a single laser source onto the substrate heated by the preliminary heating unit through a laser scanner to form a pattern; A washing unit washing the substrate on which the pattern is formed in the pattern forming unit; And a heating unit after heating the substrate washed by the washing unit. In addition, the first roll is disposed on the side opposite to the side on which the preliminary heating portion is disposed, based on the coating portion, the substrate is wound; The second roll is disposed on the side opposite to the side on which the washing unit is disposed, based on the post heating unit, and the second roll is wound in a direction opposite to the direction in which the substrate is wound around the first roll. The first roll and the substrate may be unrolled from the first roll and wound around the second roll via the coating part, the preheating part, the pattern forming part, the washing part, and the post heating part. The second roll rotates. Further, by the rotation of the first roll and the second roll, slot die coating by the coating part is performed when the substrate is located in the coating part, and the preheating part when the substrate is located in the preheat part. Preliminary heating is performed, the pattern is formed by the pattern forming unit at all times when positioned in the pattern forming unit, the washing is performed by the washing unit when placed in the washing unit, and is located in the post heating unit. Post-heating by the post-heating unit is performed.

Therefore, according to the metal electrode pattern manufacturing apparatus of the invention according to claim 8, when the pattern is formed on the flexible substrate by performing the continuous process, the amount of pattern production per unit time can be increased, which is efficient for pattern production. In addition, because the continuous process is made by automation rather than manual, no foreign matter is introduced into the pattern, and the pattern is not altered by the external environment.

A metal electrode pattern manufacturing apparatus of the invention according to claim 9, The metal electrode pattern manufacturing apparatus of the invention according to claim 7, wherein the first transfer unit, Belt conveyor; And a substrate mounting unit disposed on the belt conveyor, wherein the substrate is mounted to transfer the substrate by a conveyor operation of the belt conveyor. In addition, the substrate mounting portion is transferred by the conveyor operation of the belt conveyor, so that the substrate is sequentially positioned below the coating portion, the preliminary heating portion, and the pattern forming portion.

Therefore, according to the metal electrode pattern manufacturing apparatus of the invention according to claim 9, since the substrate can be mounted and transported, a continuous process of the coating portion, the preheating portion, and the pattern forming portion is possible, and thus the manufacturing can be performed quickly.

The metal electrode pattern manufacturing apparatus of the invention according to claim 10, The metal electrode pattern manufacturing apparatus of the invention according to claim 7, wherein the second transfer unit, a straight rail having a locking step; And a robot arm that is caught by the latching jaw of the straight rail and is disposed to move along the longitudinal direction of the straight rail and lifts the substrate to move the substrate. In addition, the robot arm moves along the straight rail to lift the substrate, and then moves along the straight rail to lower the substrate so that the substrate is positioned in the washing section and the post heating section.

Therefore, according to the metal electrode pattern manufacturing apparatus of the invention according to claim 10, since the robot arm can move along the straight rail, the continuous process of the washing section and the post-heating section is possible, which enables rapid manufacturing.

According to the present invention, since the pattern yield per unit time can be increased, the pattern production is more efficient than the pattern formation by the manual process.

1 is a flow chart of a metal electrode pattern manufacturing method according to an embodiment of the present invention.
2A to 2E are cross-sectional views of a metal electrode pattern manufacturing process according to an embodiment of the present invention.
3 is a perspective view illustrating a process of forming a pattern by moving a substrate in FIG. 2C.
4 is a front view of the metal electrode pattern manufacturing apparatus according to the first embodiment of the present invention.
5 is a plan view showing an example of pattern formation according to the present invention.
6 is a front view of a metal electrode pattern manufacturing apparatus according to a second embodiment of the present invention.

Hereinafter, embodiments of the present invention will be described with reference to the accompanying drawings. However, the embodiments of the present invention may be modified into various other forms, and the scope of the present invention is not limited to the embodiments described below. The shape and the size of the elements in the drawings may be exaggerated for clarity and the same elements are denoted by the same reference numerals in the drawings.

1 is a flow chart of a metal electrode pattern manufacturing method according to an embodiment of the present invention, Figures 2a to 2e is a cross-sectional view of the metal electrode pattern manufacturing process according to an embodiment of the present invention. A method of manufacturing a metal electrode pattern will be described with reference to FIGS. 1 and 2A through 2E.

First, an organometallic ink 1 is slot die coated on the substrate 10 (coating step S100). The substrate 10 may be a hard substrate such as glass and a flexible substrate such as PI, PET, and PEN. The organometallic compound ink may be a silver organometallic compound ink, and the organometallic compound ink is not limited to the silver organometallic compound ink but may be any organometallic compound ink. The use of spin coating, a coating method using a conventional single laser beam, is not suitable for large area and mass production. The reason is that the thickness of the ink coating varies depending on the distance from the central axis during rotation for ink coating, and is not uniformly coated on the substrate. In addition, since the ink is dispersed in the surroundings during spin coating, the ink coating may adversely affect the substrate or the equipment. Poor uniformity of the ink coating is not suitable for performing the process in large areas.

To solve this problem, slot die coating is used. Since all parts of the coating equipment are sealed in the slot die coating, there is no change in viscosity and foreign matter introduction to the coating liquid over time, and uniform coating is possible. In addition, the reproducibility and stability of the coating is excellent, and the state of the coating liquid can be preserved in the best state, so it is a coating method that is very suitable for large area and mass production of ink coating.

After step S100, the coated substrate 10 is heated (preliminary heating step, S200). The coated substrate 10 may be heated using infrared exposure or a hot plate 20. In an embodiment of the present invention, the substrate 10 is heated by using the hot plate 20. Conventional preheating uses a contact type heat transfer method using a hot plate. However, this approach is unable to evenly transfer heat to the substrate because of the temperature gradients that take into account the large area, mass production and automation aspects of the substrate. That is, since uniformity of heat transfer falls, it is not suitable for large area, mass production, and automation.

To solve this problem, heat is applied using a non-contact type infrared lamp (IR). In addition to the infrared lamp, a metal layer may be provided on the hot plate to uniformly transmit heat in a large area. With regard to heat transfer equipment, any equipment that can transfer heat evenly in a large area is possible.

After operation S200, a pattern is formed by irradiating a laser beam from a single laser source 30 on the heated substrate 10 through a laser scanner 35 (pattern forming step S300). . In this case, the laser scanner 35 may be moved on a substrate to scan a laser beam in various directions to form various patterns, and the substrate 10 may be moved to form a pattern having a desired shape (see FIG. 3). That is, a plurality of patterns can be made by moving the substrate 10 on a plane.

After the step S300, the substrate 10 having the pattern is washed (washing step, S400). Specifically, the cleaning liquid remaining on the substrate 10 is cleaned by irradiating ultrasonic waves to the cleaning liquid containing the substrate 10, filtering the foreign substances generated in the cleaning liquid, and spraying nitrogen gas. Remove Conventionally, it was washed using various washing solutions such as N-hexane (N-Hexane), acetone. In one embodiment of the present invention, the cleaning liquid is contained in the cleaning container and the substrate is immersed in the cleaning liquid as in the prior art to remove the organometallic compound ink remaining on the substrate. However, for large area, mass production and automation, cleaning is performed using a washer that includes the function of filtering foreign substances in the cleaning liquid. The reason for this is that the washed part is present in the wash liquid and loses the benefit of washing due to sticking again.

After step S400, the washed substrate 10 is heated (post heating step, S500). The cleaned substrate 100 may be heated using a hot chuck 40. Regarding the heating temperature of the cleaned substrate 10, the substrate 10 is heated to a temperature higher than the temperature at which the specific resistance of the metal electrode forming the pattern decreases at a predetermined decrease rate. As such, the continuous process by the step S100 ~ S500 is made by automation, not manual, foreign matter is not introduced into the pattern, the pattern is not altered by the external environment.

3 is a perspective view illustrating a process of forming a pattern by moving a substrate in FIG. 2C. Referring to FIG. 3, it can be seen that a pattern is formed by irradiating a laser beam from a single laser source 30 on the substrate 10. At this time, the substrate 10 is moved in the first axial direction, the second axial direction perpendicular to the first axial direction, the first axial direction and the third axial direction perpendicular to the second axial direction, and irradiates a laser beam with a pattern. Can be formed. Here, the first axial direction, the second axial direction, and the third axial direction are perpendicular to each other. For example, the first axis, the second axis, and the third axis may be the X axis, the Y axis, and the Z axis, which are commonly used spatial coordinate axes.

In particular, in order to move the substrate 10 up or down (in the Z axis), the substrate 10 is placed on an apparatus (substrate mounting portion of FIG. 4) on which the substrate 10 can be mounted. Must be moved up or down.

Alternatively, the substrate 10 may be moved only on the X and Y axes, and the plurality of laser sources 30 may be moved up or down. For the movement of the substrate 10 and the movement of the laser source 30, a control device capable of driving them must be separately configured.

4 is a front view of the metal electrode pattern manufacturing apparatus according to the first embodiment of the present invention. Referring to FIG. 4, the metal electrode pattern manufacturing apparatus is used to form a pattern on a hard substrate such as glass. The coating part 100, the preliminary heating part 200, the pattern forming part 300, and the washing part 400 are formed. ), And may include a heating unit 500, a first transfer unit 600, and a second transfer unit 700.

The coating unit 100 slot-die coats the organometallic compound ink on the substrate 10. The substrate 10 may be a hard substrate such as glass and a flexible substrate such as PI, PET, and PEN. The organometallic compound ink may be a silver organometallic compound ink, and the organometallic compound ink is not limited to the silver organometallic compound ink but may be any organometallic compound ink.

The preliminary heating unit 200 heats the substrate coated in the coating unit 100. The coated substrate 10 may be heated using infrared exposure or a hot plate 20. In the first embodiment of the present invention, the substrate 10 is heated by using the hot plate 20.

The pattern forming unit 300 forms a pattern by irradiating a laser beam from a single laser source 30 on the substrate 10 heated by the preliminary heating unit 200 through the laser scanner 35. That is, the single laser source 30 is fixed to the laser scanner 35, and the laser beam is continuously irradiated onto the substrate 10 as the laser scanner 35 moves from one side of the substrate 10 to the other side. Can be.

In relation to the pattern formation of the pattern forming unit 300, the substrate 10 may move in the X-axis direction, the Y-axis direction, and the Z-axis direction to form a pattern by irradiating a laser beam. At this time, the pattern may be formed regardless of the type of the pattern. For example, the Bezel pattern may be formed as illustrated in FIG. 5.

The cleaning unit 400 cleans the substrate on which the pattern is formed in the pattern forming unit 300. Specifically, the cleaning liquid remaining on the substrate 10 is cleaned by irradiating ultrasonic waves to the cleaning liquid containing the substrate 10, filtering the foreign substances generated in the cleaning liquid, and spraying nitrogen gas. Remove

The heating unit 500 heats the substrate washed by the washing unit 400. Regarding the heating temperature of the cleaned substrate 10, the substrate 10 is heated to a temperature higher than the temperature at which the specific resistance of the metal electrode forming the pattern decreases at a predetermined decrease rate.

The first transfer unit 600 is disposed below the coating unit 100, the preliminary heating unit 200, and the pattern forming unit 300, and the substrate is mounted on the lower side of the coating unit 100. The lower side of the heating unit 200 is horizontally transferred to the lower side of the pattern forming unit 300. The first conveying unit 600 is a belt conveyor 600a and a substrate mounting unit 600b disposed on the belt conveyor 600a and having a substrate mounted thereon to transfer the substrate by the conveyor operation of the belt conveyor 600a. It includes. By transferring the substrate mounting part 600b by the conveyor operation of the belt conveyor 600a, the substrate is sequentially positioned below the coating part 100, the preliminary heating part 200, and the pattern forming part 300. In the first embodiment, the first transfer unit 600 is implemented as a belt conveyor 600a and a substrate mounting unit 600b, but is not limited thereto, and any means capable of transferring the substrate 10 may be used.

In relation to the operation of the first transfer unit 600, when the substrate is positioned below the coating unit 100 by the first transfer unit 600, slot die coating by the coating unit 100 is performed, and the first transfer unit 600 is performed. When the board | substrate is located under the preheating part 200 by 600, the preheating by the preheating part 200 is performed. In addition, when the board | substrate is located under the pattern formation part 300 by the 1st conveyance part 600, pattern formation by the pattern formation part 300 is performed.

The second transfer part 700 is disposed above the first transfer part 600, is disposed below the pattern forming part 300, above the washing part 400, and above the post heating part 500, and is provided with the pattern forming part 300. Lift the substrate located on the lower side of the transfer to the washing unit 400, and lifts the substrate located in the washing unit 400 and then transfer to the heating unit 500. The second transfer part 700 is disposed to be caught by the straight rail 700a having the locking step and the locking step of the straight rail 700a and move along the longitudinal direction of the straight rail 700a, and to lift the substrate to move the substrate. Robot arm 700b is included. The robot arm 700b moves along the straight rail 700a to lift up the substrate, and again moves along the straight rail 700a to lower the substrate, thereby cleaning the substrate 400 and the post heating part 500. ). In the first embodiment, although the second transfer part 700 is implemented with a straight rail 700a and a robot arm 700b, the second transfer part 700 is not limited thereto and may be any means capable of transferring the substrate 10.

In relation to the operation of the second transfer unit 700, when the substrate is positioned in the washing unit by the second transfer unit 700, washing by the washing unit 400 is performed, and the substrate is transferred by the second transfer unit 700. When located in the post-heating part 500, post-heating by the post-heating part 500 is performed.

As such, since the continuous process by the first transfer unit 600 and the second transfer unit 700 is performed by automation rather than manual operation, foreign matter is not introduced into the pattern, and the pattern is not deteriorated by the external environment.

6 is a front view of a metal electrode pattern manufacturing apparatus according to a second embodiment of the present invention. Referring to FIG. 6, the metal electrode pattern manufacturing apparatus uses a roll to roll method used to form a pattern on a flexible substrate such as PI, PET, and PEN. The coating part 100 ′ is prepared. The heating unit 200 ′, the pattern forming unit 300 ′, the washing unit 400 ′, the post heating unit 500 ′, the first roll 600 ′ and the second roll 700 ′ may be included. .

Here, the coating part 100 ', the preheating part 200', the pattern forming part 300 ', the washing part 400', and the post heating part 500 'are coated in the first embodiment described above. The unit 100, the preheating unit 200, the pattern forming unit 300, the washing unit 400, and the same as the post-heating unit 500 are omitted.

The first roll 600 'is disposed on the side opposite to the side on which the preliminary heating part 200' is disposed, based on the coating part 100 ', and the substrate is wound.

The second roll 700 ′ is disposed on the side opposite to the side on which the cleaning unit 400 ′ is disposed on the basis of the post heating unit 500 ′, and opposite to the direction in which the substrate is wound on the first roll 600 ′. Wind in the direction.

In connection with the operation of the first roll 600 'and the second roll 700', the substrate is unrolled from the first roll 600 ', thereby coating portion 100', preheating portion 200 ', pattern The first roll 600 'and the second roll 700' are wound on the second roll 700 'via the forming part 300', the washing part 400 'and the post heating part 500'. Rotate In addition, by the rotation of the first roll 600 'and the second roll 700', slot die coating by the coating part 100 'is performed when the substrate is located in the coating part 100', and is preliminary. The preliminary heating by the preheater 200 'is performed when the heating unit 200' is positioned, and the pattern forming by the pattern forming unit 300 'is performed when the pattern forming unit 300' is positioned and washed. The washing by the washing unit 400 'is performed when positioned at the portion 400', and the post-heating by the post heating portion 500 'is performed when the washing portion 400' is positioned.

As described above, since the continuous process by the first roll 600 'and the second roll 700' is performed by automation rather than manual, foreign matter is not introduced into the pattern, and the pattern is not altered by the external environment.

The present invention is not limited by the above-described embodiment and the accompanying drawings. It will be understood by those skilled in the art that various changes in form and details may be made therein without departing from the spirit and scope of the invention as defined by the appended claims, .

10: substrate
20: hot plate
30: single laser source
35: laser scanner
40: hot chuck
100, 100 ': coating part
200, 200 ': preheater
300, 300 ': pattern forming section
400, 400 ': cleaning part
500, 500 ': post heating part
600: first transfer unit
600a: Belt Conveyor
600b: Board Mount
600 ': 1st roll
700: second transfer part
700a: straight rail
700b: robot arm
700 ': second roll

Claims (10)

A coating step of slot die coating the organometallic compound ink on the substrate by the coating part;
A preheating step of heating the coated substrate by a preheater;
A pattern forming step of forming a pattern by irradiating a laser beam from a single laser source on the heated substrate through a laser scanner by a pattern forming unit;
A washing step of washing the substrate on which the pattern is formed by a washing part; And
A heating step after heating the washed substrate by a heating unit;
Including,
The first substrate is disposed below the coating part, the preheating part and the pattern forming part, and the mounted substrate is passed through the lower part of the coating part and the lower part of the preheating part by the first transfer part on which the substrate is mounted. A first conveyance step of conveying horizontally up to;
The second transfer part which is above the first transfer part and disposed below the pattern forming part, above the washing part, and above the post heating part, lifts the substrate positioned below the pattern forming part, and transfers the substrate to the washing part, and the washing is performed. A second transfer step of lifting the substrate positioned in the portion and transferring the substrate to the heating unit;
Further comprising:
The coating step is performed when the substrate is positioned below the coating part by the first transfer step, and the preheating step is performed when the substrate is located below the preheat part by the first transfer step, The pattern forming step is performed when the substrate is positioned below the pattern forming part by the first transfer step,
The cleaning step is performed when the substrate is located in the cleaning part by the second transfer step, and the post heating step is performed when the substrate is located in the post heating part by the second transfer step,
Metal electrode pattern manufacturing method. The method of claim 1,
In the preliminary heating step, heating using infrared exposure or hot plate,
Metal electrode pattern manufacturing method. The method of claim 1,
In the pattern forming step, the substrate is moved in a first axis direction, a second axis direction perpendicular to the first axis direction, the first axis direction, and a third axis direction perpendicular to the second axis direction. To irradiate to form a pattern,
Metal electrode pattern manufacturing method. The method of claim 1,
In the washing step,
Washing the substrate by irradiating ultrasonic waves to the cleaning liquid containing the substrate,
Filtering foreign substances generated in the washing liquid,
Removing the cleaning liquid remaining on the substrate by spraying nitrogen gas,
Metal electrode pattern manufacturing method. The method of claim 1,
In the post heating step, the substrate is heated to a temperature greater than a temperature at which the specific resistance of the metal electrode decreases at a predetermined decrease rate.
Metal electrode pattern manufacturing method. The method of claim 1,
In the post heating step, the heating using a hot chuck,
Metal electrode pattern manufacturing method. A coating unit for slot-die coating an organometallic compound ink on a substrate;
A preliminary heating unit which heats the substrate coated by the coating unit;
A pattern forming unit for irradiating a laser beam from a single laser source onto the substrate heated by the preliminary heating unit through a laser scanner to form a pattern;
A washing unit washing the substrate on which the pattern is formed in the pattern forming unit; And
A heating unit after heating the substrate washed by the washing unit;
Including,
The substrate is disposed below the coating part, the preliminary heating part and the pattern forming part, and the substrate is mounted, and the mounted substrate is horizontally transferred to the lower side of the pattern forming part via the lower part of the coating part and the lower side of the preliminary heating part. A first transfer unit; And
The substrate is located above the first transfer part and disposed below the pattern forming part, above the washing part, and above the post heating part, and lifts the substrate positioned below the pattern forming part to the washing part, and is located in the washing part. A second transfer part for lifting the substrate and transferring the substrate to the post heating part;
Further comprising:
When the substrate is positioned below the coating portion by the first transfer portion, slot die coating by the coating portion is performed, and when the substrate is positioned below the preliminary heating portion by the first transfer portion, the preliminary Preliminary heating by a heating part is performed, and when the said board | substrate is located under the said pattern formation part by the said 1st conveyance part, pattern formation by a constant pattern formation part is performed,
When the substrate is located in the washing section by the second transfer section, washing is performed by the washing section, and when the substrate is located in the post heating section by the second transfer section, After the heating is done,
Metal electrode pattern manufacturing apparatus. A coating unit for slot-die coating an organometallic compound ink on a substrate;
A preliminary heating unit which heats the substrate coated by the coating unit;
A pattern forming unit for irradiating a laser beam from a single laser source onto the substrate heated by the preliminary heating unit through a laser scanner to form a pattern;
A washing unit washing the substrate on which the pattern is formed in the pattern forming unit; And
A heating unit after heating the substrate washed by the washing unit;
Including,
A first roll on the side opposite to the side on which the preheating unit is disposed, based on the coating unit, on which the substrate is wound;
A second roll disposed on a side opposite to a side on which the washing unit is disposed, based on the post heating unit, and wound in a direction opposite to a direction in which the substrate is wound around the first roll;
Further comprising:
The first roll and the second roll are unrolled from the first roll so that the substrate is wound around the second roll through the coating part, the preheating part, the pattern forming part, the washing part, and the post heating part. The roll rotates,
By the rotation of the first roll and the second roll, slot die coating by the coating part is performed when the substrate is located in the coating part, and by the preheating part when it is located in the preheat part. Pre-heating is performed, pattern formation by a constant pattern formation part is performed when it is located in the said pattern formation part, washing | cleaning by the said washing | cleaning part is performed when it is located in the said washing | cleaning part, and said after After the heating is performed by the heating unit,
Metal electrode pattern manufacturing apparatus. The method of claim 7, wherein
The first transfer unit
Belt conveyer; And
A substrate mounting unit disposed on the belt conveyor and configured to transport the substrate by mounting the substrate on a conveyor of the belt conveyor;
Including,
By transferring the substrate mounting portion by the conveyor operation of the belt conveyor, the substrate is sequentially located below the coating portion, the preheating portion and the pattern forming portion,
Metal electrode pattern manufacturing apparatus. The method of claim 7, wherein
Wherein the second conveying portion comprises:
Straight rail formed with a locking jaw; And
A robot arm that is caught by the latching jaw of the straight rail and is disposed to move along the longitudinal direction of the straight rail and lifts the substrate to move the substrate;
/ RTI >
By moving the robot arm along the straight rail to lift the substrate, and again along the straight rail to lay down the substrate, the substrate is located in the washing section and the post-heating unit,
Metal electrode pattern manufacturing apparatus.

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