KR101250234B1 - System and method of testing liquid crystal display device and method of fabricating liquid crystal display device using thereof - Google Patents

Abstract

The auto probe system of the liquid crystal display device according to the present invention is capable of rapid inspection, and analyzes an input unit for inputting inspection information for the liquid crystal panel from a process line of the liquid crystal panel, and analyzes the inspection information input through the input unit. And a determination unit for determining whether the liquid crystal panel has been subjected to the auto probe inspection, and an autoprobe device for inspecting the liquid crystal panel in which the auto probe inspection has been determined by the determination unit. The auto probe inspection apparatus includes a test stage on which a liquid crystal panel is placed and outputs light to the liquid crystal panel, and inputs an inspection signal to the liquid crystal panel, and a polarizing plate positioned on the liquid crystal panel.

LCD, auto probe, inspection information, defect information, analysis, storage

Description

Liquid crystal display device inspection system and method, and manufacturing method of liquid crystal display device using the same {SYSTEM AND METHOD OF TESTING LIQUID CRYSTAL DISPLAY DEVICE AND METHOD OF FABRICATING LIQUID CRYSTAL DISPLAY DEVICE USING THEREOF}

1 is a cross-sectional view of a general liquid crystal display device.

2 is a flowchart showing a conventional method for manufacturing a liquid crystal display device.

3A is a block diagram showing a drive element array line of a liquid crystal display device according to the present invention;

3B is a block diagram illustrating a color filter line of a liquid crystal display device according to the present invention.

3C is a block diagram showing a cell line of a liquid crystal display according to the present invention.

4 is a flowchart showing an autoprobe system according to the present invention.

5 is a view showing an auto probe inspection apparatus according to the present invention.

6 is a view showing an auto probe inspection method according to the present invention.

Description of the Related Art [0002]

110: drive element array line 120: color filter line

130: cell line 152: input unit

154: storage unit 155: failure analysis unit

157: determination unit 170: auto probe inspection device

172: inspection table

BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to an inspection system for liquid crystal display devices, and more particularly, to a liquid crystal display device auto probe system capable of a rapid inspection by performing an auto probe inspection on the basis of information input and inspected at each manufacturing process line.

2. Description of the Related Art Recently, various portable electronic devices such as a mobile phone, a PDA, and a notebook computer have been developed. Accordingly, there is a growing need for a flat panel display device for a light and small size. Such flat panel displays are being actively researched, such as LCD (Liquid Crystal Display), PDP (Plasma Display Panel), FED (Field Emission Display), VFD (Vacuum Fluorescent Display), but mass production technology, ease of driving means, Liquid crystal display devices (LCDs) are in the spotlight for reasons of implementation.

LCD is a device for displaying information on the screen using the refractive anisotropy of the liquid crystal. As shown in FIG. 1, the LCD 1 is a liquid crystal layer 7 formed between the first substrate 3 and the second substrate 5 and between the first substrate 3 and the second substrate 5. Consists of. The first substrate 3 is a drive element array substrate. Although not shown in the drawing, a plurality of pixels are formed on the first substrate 3, and a driving element such as a thin film transistor (hereinafter referred to as TFT) is formed in each pixel. The second substrate 5 is a color filter substrate, and a color filter layer for real color is formed. In addition, a pixel electrode and a common electrode are formed on the first substrate 3 and the second substrate 5, respectively, and an alignment film for aligning liquid crystal molecules of the liquid crystal layer 7 is coated.

The first substrate 3 and the second substrate 5 are bonded by a sealing material 9, and a liquid crystal layer 7 is formed therebetween to drive the first substrate 3. The device displays the information by controlling the amount of light passing through the liquid crystal layer by driving the liquid crystal molecules.

The manufacturing process of the liquid crystal display device is largely divided into a driving element array substrate process of forming a driving element on the first substrate 3, a color filter substrate process of forming a color filter on the second substrate 5, and a cell process. The process of the liquid crystal display device will be described with reference to FIG. 2 as follows.

First, a plurality of gate lines and data lines arranged on the first substrate 3 to define a pixel region are formed by a driving element array process, and the gate line and the gate line are formed in each of the pixel regions. A thin film transistor which is a driving element connected to the data line is formed (S101). In addition, a pixel electrode connected to the thin film transistor through the driving element array process and driving the liquid crystal layer as a signal is applied through the thin film transistor is formed.

In addition, the second substrate 3 is formed with a color filter layer and a common electrode of R, G, B to implement color by a color filter process (S104).

Subsequently, an alignment film is applied to the first substrate 3 and the second substrate 5, respectively, and then alignment control force or surface is applied to the liquid crystal molecules of the liquid crystal layer formed between the first substrate 3 and the second substrate 5. The alignment layer is rubbed to provide a fixing force (ie, a pretilt angle and an orientation direction) (S102 and S105). Subsequently, a spacer is disposed on the first substrate 3 to maintain a constant cell gap, and the sealing substrate 9 is applied to the outer side of the second substrate 5, and then the first substrate is coated. Pressure is applied to (3) and the second substrate (5) (S103, S106, S107).

On the other hand, the first substrate 3 and the second substrate 5 is made of a large area glass substrate. In other words, a plurality of panel regions are formed on a large area glass substrate, and a TFT and a color filter layer, which are driving elements, are formed in each of the panel regions. Must be processed (S108). Thereafter, the liquid crystal is injected into the liquid crystal panel processed as described above through the liquid crystal inlet, and the liquid crystal inlet is encapsulated to form a liquid crystal layer.

Inspection of the liquid crystal panel is commonly referred to as auto probe inspection. The auto probe test applies a signal to the completed liquid crystal panel to check whether various electric devices operate without abnormality, there is no disconnection in a pattern, or a desired color is realized. This auto probe test is to check whether the liquid crystal panel is finally defective as a final test.

By the way, such an auto probe inspection has the following problems. Since the auto probe inspection is the final inspection of the manufactured liquid crystal panel, all liquid crystal panels should be inspected to prevent the shipment of defective products. Therefore, not only the time required for auto probe inspection is consumed, but even when defects occur, integrated management of defect data is impossible, and thus, effective defect management is impossible.

SUMMARY OF THE INVENTION The present invention has been made in view of the above points, and the inspection results of the process line are input to determine whether or not to carry out the auto probe inspection and determine the range of the auto probe inspection. It is an object to provide a system and auto probe inspection method.

Another object of the present invention is to provide a method of manufacturing a liquid crystal display device to which the auto probe system is applied.

In order to achieve the above object, the autoprobe system of the liquid crystal display device according to the present invention is analyzed by analyzing an input unit to which the inspection information for the liquid crystal panel is input from the process line of the liquid crystal panel, and the inspection information input through the input unit And a determination unit for determining whether the liquid crystal panel is to be inspected for auto probe based on the information of the analyzer, and an auto probe device for inspecting the liquid crystal panel for which the auto probe inspection is determined by the determination unit.

The auto probe inspection apparatus includes a test stage on which a liquid crystal panel is placed and outputs light to the liquid crystal panel, and inputs an inspection signal to the liquid crystal panel, and a polarizing plate positioned on the liquid crystal panel.

The auto probe system includes a storage unit which stores inspection information and analyzed defect information of the liquid crystal panel.

In addition, the auto probe inspection method according to the present invention comprises the steps of inputting the inspection information for the liquid crystal panel from the process line of the liquid crystal panel, analyzing the input inspection information, and based on the analyzed information And determining the probe inspection, and inspecting the liquid crystal panel in which the auto probe inspection is determined.

The present invention provides an autoprobe system capable of executing a quick test. The reason why the auto-probe time is consumed is that all the liquid crystal panels manufactured are inspected. Therefore, in order to proceed with the rapid auto probe inspection, the inspection range of the liquid crystal panel to be inspected must be determined in advance, and the number of the liquid crystal panels to be inspected must be minimized. On the other hand, the defect of the liquid crystal panel does not occur in a specific process, but occurs in the entire process, and each of the lines for executing these processes is provided with an inspection line for inspecting whether the defect occurs after the process is completed.

Therefore, in the present invention, the auto probe inspection is performed based on the result of inspection at each process line. That is, the inspection result of each process line is predicted whether or not the defect in the process on the basis of the inspection of the liquid crystal panel to determine whether or not, even if a failure occurs to determine the type of failure and the appropriate auto probe inspection.

Hereinafter, with reference to the accompanying drawings will be described in detail the auto probe system according to the present invention.

In general, in order to manufacture a liquid crystal display device it must go through various processes. As described above, this process roughly consists of a drive element array process, a color filter process, and a cell process. In the driving element array process, various electrode patterns such as a thin film transistor and a pixel electrode are formed on a first substrate, and a color filter and a common electrode are formed on a second substrate in a color filter process. In the cell process, an alignment layer is formed on the first substrate and the second substrate, and the first substrate and the second substrate are bonded to each other.

In this case, each driving element array process, color filter process, and cell process are made of a plurality of processes, each of which is performed in a corresponding process line.

3A through 3C illustrate the driving element array line 110, the color filter line 120, and the cell line 130, respectively.

As shown in FIG. 3A, the driving element array line 110 includes a gate line 111, an active line 113, a source / drain line 115, a pixel electrode line 116, and an inspection line 118. have. When the first substrate is input to the gate line 110, metal is stacked on the first substrate and etched by a photolithography process to form a gate electrode and a gate line on the first substrate. The first substrate on which the gate electrode is formed is input to the active line 113 to form a semiconductor layer by a photolithography process, and a dopant is doped into the semiconductor layer to form a source / drain region, and at the source / drain line 115. Source and drain electrodes are formed in the source / drain regions. Subsequently, the first substrate is input to the pixel electrode line to form a pixel electrode made of a transparent conductive material such as indium tin oxide (ITO) or indium zinc oxide (IZO).

As described above, the thin film transistor and various metal patterns (eg, gates) are formed on the first substrate through the gate line 111, the active line 113, the source / drain line 115, and the pixel electrode line 116. Lines, data lines, gate pads, data pads, etc.) are formed. As described above, the first substrate on which the thin film transistor is formed is input to the inspection line 118 provided in the driving element array line 110 to check whether the thin film transistor is driven and disconnection of various patterns.

As shown in FIG. 3B, the color filter line 120 includes a black matrix line 121, a color filter line 123, a common electrode line 125, and an inspection line 127. When the second substrate is input to the black matrix line 121, metals such as chromium oxide are stacked and etched by a photolithography process to form a black matrix, followed by R on the second substrate by the color filter line 123. (Red), G (Green), and B (Blue) color filter layers are formed. In addition, the second substrate is input to the common electrode line to form a common electrode made of a transparent conductive material such as ITO or IZO. As described above, the second substrate on which the color filter layer, the common electrode, and the like are formed is input to the inspection line and the defect is inspected.

As shown in FIG. 3C, the first and second substrates passing through the driving element array line 110 and the color filter line 120 are input to the cell line 130. That is, the first substrate is input to the first alignment layer line 131 of the cell line 130 to form a first alignment layer by an alignment layer coating process and a rubbing process, and the second substrate is a second alignment layer line of the cell line 130. Input to 132, the second alignment film is formed by the alignment film coating step and the rubbing step. As described above, the first substrate and the second substrate on which the first alignment layer and the second alignment layer are formed are input to the first inspection line 133 and the second inspection line 133, respectively, to inspect the formation state and the alignment state of the alignment layer. .

Thereafter, the first substrate and the second substrate are input to the bonding line 136 and are bonded to each other and then cut into a unit liquid crystal panel at the cutting line 138.

As described above, each manufacturing line is provided with inspection lines 118, 127 and 138 to check whether a defect has occurred in the process proceeded to the substrate, and the result is transmitted to the autoprobe system.

In the auto probe system, an auto probe test is performed based on a test result transmitted from the manufacturing line. The auto probe system is illustrated in FIG. 4.

As shown in FIG. 4, the auto probe system 150 according to the present invention includes an input unit 151 for inputting a defective state of a substrate inspected in a liquid crystal panel manufacturing line, and a substrate input through the input unit 152. A storage unit 154 in which inspection information is stored, a defect analysis unit 155 analyzing the inspection information of each substrate stored in the storage unit 154, and analyzing whether the substrate is defective or not, and the defect; On the basis of the information analyzed by the analysis unit 155, the determination unit 157 for determining whether or not to perform the auto probe inspection of the substrate and the inspection object, the defect information of the substrate for the storage unit 154, failure analysis information, auto It is composed of a display unit 158 for indicating whether or not the probe inspection execution and the inspection portion to inform the operator.

The storage unit 154 not only stores the defect information transmitted in the previous process for each liquid crystal panel, but also stores the defect information analyzed in the defect analysis unit 155. That is, not only the defect information of each liquid crystal panel such as whether the liquid crystal panel that is the target of auto probe inspection and the defective region, but also various processed information such as defect statistics for each liquid crystal panel or defect statistics for each region during the accumulated period. Save it.

The determination unit 157 determines whether to proceed with the auto probe inspection, the main inspection method, etc. according to the defect information analyzed by the failure analysis unit 155. In addition, the display unit 158 displays various necessary information such as whether or not the inspection is executed and various defect information analyzed, for example, defect statistics for each liquid crystal panel and defect statistics for each part. Of course, the display unit 158 also displays the results of the current auto probe inspection.

If the determination unit 157 determines that the inspection should be performed on the liquid crystal panel to be the current auto probe inspection object, the liquid crystal panel undergoes the auto probe inspection by the auto probe inspection apparatus 170 shown in FIG. 5.

As shown in FIG. 5, the auto probe inspection apparatus 170 of the liquid crystal panel includes a test table 172 on which a liquid crystal panel 101 is placed and a lamp is installed therein, and outputs light to the liquid crystal panel 101. A camera positioned on the inspection table 172 and photographing an alignment mark (not shown) formed in an outer region of the liquid crystal panel 101 placed on the inspection table 172 to determine whether the liquid crystal panel is aligned on the inspection table 172. 174, a jig 182 installed below the test table 172, a polarizer 180 is supported, and a hole (not shown) is formed, and a jig 182 formed in the test table 172. It is composed of a plurality of jig pins 176 inserted into the hole to fix the jig 182 to the test table 172 to fix the polarizing plate 180 on the liquid crystal panel 101.

The test table 172 forms an inclination of about 60 ° with the ground, and a lamp is provided therein. In addition, although not shown in the drawing, the inspection table 172 is provided with a pin that contacts the pad of the liquid crystal panel 101 and applies an inspection signal to the liquid crystal panel 101. When the operator places the liquid crystal panel 101 on the test table in the auto probe inspection apparatus 170, the camera 174 photographs the alignment mark formed on the liquid crystal panel 101 to inform the alignment state of the liquid crystal panel 101. When the liquid crystal panel 101 is aligned, the operator inserts the jig pin 176 formed on the inspection table 172 into the hole formed in the jig 182 to position the polarizer 180 on the liquid crystal panel 101. When the inspection signal is applied to the liquid crystal panel 101 in this state, the transmittance of light passing through the liquid crystal panel 101 varies according to the inspection signal to display various images. The operator inspects the liquid crystal panel 101 for abnormality by observing the light passing through the polarizing plate 180, that is, the image. At this time, the inspection by the inspection device 170 includes a variety of inspection, such as lighting inspection, pattern inspection, color inspection.

The inspection by the auto probe inspection device 170 is performed only for the liquid crystal panel 101 determined by the determination unit 157 to be defective. In addition, even when the auto probe test is performed, the auto probe test is performed according to the defect information analyzed by the failure analysis unit 155. That is, not all the inspections are carried out, but only the items that are suspected of being defective and need to be inspected again. For example, when a defect occurs or is suspected to be defective in the driving element array process, a lighting inspection or a pattern inspection is performed.

In this way, the inspection proceeds only for the liquid crystal panel 101 that requires inspection according to the analyzed defect information, and even when the inspection proceeds, only the necessary information needs to be executed according to the defect information, thereby enabling rapid auto probe inspection.

Hereinafter, a method of performing an auto probe inspection using the auto probe system will be described with reference to FIG. 6.

First, as illustrated in FIG. 6, when defect information checked in the driving element array process, the color filter process, and the cell process is input (S201), the information is stored in the storage unit 154 and at the same time, the defect analysis unit ( 155), it is analyzed (S202). That is, the liquid crystal panel 101 is analyzed to determine whether there is a defect, where there is a defect, and whether such a defect is acceptable enough or whether the disposal or repair is necessary. . Meanwhile, the analyzed information is stored in the storage unit 154 to collectively manage the defect information of the liquid crystal panel 101.

When the liquid crystal panel 101 is loaded into the auto probe area (S203), the determination unit 157 determines whether the current liquid crystal panel 101 needs to be inspected based on the information analyzed by the failure analysis unit 155. Determine (S204). If there is no defect or no doubt during the inspection of each process line, it is determined that the liquid crystal panel 101 is in a very normal state, and it is determined that a separate auto probe inspection is not necessary, and the liquid crystal panel 101 is shipped as a good product. (S209).

When the liquid crystal panel 101 has a defect or suspects a defect during the previous process line inspection, the liquid crystal panel 101 checks the defect information such as the defect type or the defect region based on the defect information analyzed by the defect analysis unit 155 ( S205), an auto probe inspection corresponding to the defective type or defective portion is performed (S206). If a defect occurs in the auto probe inspection (S207), the liquid crystal panel 101 is discarded or repaired according to the degree of defect (S208), and if the defect does not occur (S207), the liquid crystal panel 101 is judged as good quality. It is shipped (S209).

As described above, in the auto probe system of the liquid crystal display device according to the present invention, it is determined whether to perform the auto probe inspection on the liquid crystal panel based on the inspection information of the previous process, and only the necessary inspection is performed even during the auto probe inspection. Rapid auto probe inspection is possible. In addition, in the present invention, not only the test result and the analyzed result and the result executed in the auto probe inspection apparatus are stored in the storage unit but also the information is analyzed and stored, so that the integrated management of the defective liquid crystal panel is prevented. This makes it possible to more effectively prevent a defect from occurring in the liquid crystal panel.

 By the way, in the above description, a method of manufacturing a liquid crystal display device of a specific method is disclosed, and an inspection line of each process line is also limited to a specific position, but the present invention is not limited to this specific method or process line. For example, in the driving element array process, an inspection is performed after all patterns are formed, but an inspection may be performed after each pattern formation, and the inspection result may be input to the auto probe system. In other words, the auto probe system of the present invention may be applied to all process lines for manufacturing a liquid crystal display device as long as the inspection result of each process line can be input.

As described above, based on the defect information of the liquid crystal panel input from the liquid crystal panel processing line, it is determined whether to check the auto probe of the liquid crystal panel. Therefore, a quick auto probe inspection is possible.

Claims (18)

An input unit for inputting inspection information on the liquid crystal panel from a process line of the liquid crystal panel; An analysis unit analyzing the inspection information input through the input unit; A determination unit which determines whether or not an auto probe test is performed on the liquid crystal panel based on the information of the analysis unit; A storage unit which stores inspection information on the liquid crystal panel input through the input unit and defect information analyzed by the analysis unit; And And an autoprobe device for inspecting a liquid crystal panel in which the auto probe inspection is determined by the judging unit. According to claim 1, wherein the auto probe inspection device, An inspection table on which a liquid crystal panel is placed and outputs light to the liquid crystal panel, and inputs an inspection signal to the liquid crystal panel; And Autoprobe system of the liquid crystal display device consisting of a polarizing plate positioned on the upper portion of the liquid crystal panel. 3. The auto probe system of claim 2, further comprising a camera installed on an upper side of the inspection table to photograph the liquid crystal panel to determine alignment of the liquid crystal panel. delete delete The autoprobe system according to claim 1, wherein the storage unit stores defect statistics for each liquid crystal panel or defect statistics for each region. The autoprobe system according to claim 1, further comprising a display unit which displays the defect information of the substrate, the defect analysis information, whether to execute the auto probe inspection, and the inspection site. The autoprobe system according to claim 1, wherein the process line of the liquid crystal panel includes a driving element array process, a color filter process, and a cell process. Inputting inspection information on the liquid crystal panel from a process line of the liquid crystal panel; Analyzing input inspection information; Determining whether the liquid crystal panel is subjected to an auto probe test based on the analyzed information; Displaying defect information of the substrate, defect analysis information, whether or not to perform an auto probe inspection, and an inspection region; And And inspecting the liquid crystal panel in which the auto probe inspection is determined. 10. The method of claim 9, further comprising the step of storing the inspection information for the liquid crystal panel. 10. The method of claim 9, further comprising the step of storing the analyzed test information. 10. The method of claim 9, wherein the process line of the liquid crystal panel comprises a driving element array process, a color filter process, and a cell process. delete Forming a drive element array on the first substrate; Inspecting a defect of the first substrate; Forming a color filter on the second substrate; Inspecting a defect of the second substrate; Bonding the first substrate and the second substrate to each other; Inspecting defects of the bonded first substrate and the second substrate; Defect information of the first substrate, defect information of the second substrate. Displaying defect information, defect analysis information, auto probe inspection execution, and inspection area of the bonded first and second plates; And Defect information of the first substrate and failure information of the second substrate. And performing an auto probe inspection on the basis of the defect information of the first and second plates bonded together. 15. The method of claim 14, wherein performing the auto probe test comprises: Defect information of the first substrate and defect information of the second substrate. Inputting defect information of the bonded first substrate and the second plate; Defect information of the first substrate and defect information of the second substrate. Analyzing defect information of the bonded first substrate and the second plate; Determining whether the liquid crystal panel is subjected to an auto probe test based on the analyzed information; And And inspecting the liquid crystal panel in which the auto probe inspection is determined. The defect information of the first substrate and the defect information of the second substrate. And storing the defect information of the bonded first substrate and the second plate. The method of claim 14, further comprising storing the analyzed test information. delete

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