KR101244622B1 - Isolation device for flexible thin solar cell - Google Patents

Abstract

The present invention relates to a gas barrier device of a solar cell manufacturing process, comprising: a chamber into which a solar cell substrate is loaded and unloaded; A plurality of position adjustments including an vortex blade formed on an inner side surface of the chamber and protruding obliquely in a direction opposite to a direction in which the solar cell substrate is transferred, and protruding with respect to a traveling direction in which the solar cell substrate is transferred; Rollers, a blocking blade protruding from the chamber toward the concave traveling line of the solar cell substrate formed by the positioning roller, and a vortex generation protruding from the vortex blade to further create a vortex between the plurality of vortex blades The plate may be provided to prevent outside air from flowing into the process chamber and stably prevent the process gas inside the process chamber from flowing out of the process chamber.

Description

Gas barrier device for flexible thin film solar cell {ISOLATION DEVICE FOR FLEXIBLE THIN SOLAR CELL}

The present invention relates to a gas shutoff device, and more particularly, to a gas shutoff device for preventing a gas of a toxic substance from flowing between chambers when a flexible film is transferred between chambers during a manufacturing process of a flexible silicon thin film solar cell. will be.

A solar cell is a device that converts light energy into electrical energy using the properties of a semiconductor. When the energy particles called photons in the solar light hit the i-layer, electrons and holes are generated by the photovoltaic effect. The electrons move toward the N (negative) layer and the holes move toward the P (positive) layer. Therefore, light energy can be converted into electrical energy by taking out electrons / holes generated by the photovoltaic effect from the upper electrode and the back electrode electrically connected to the solar cell.

Amorphous thin film solar cells typically use a hydrogenated amorphous silicon (a-Si: H) thin film. In addition, since the diffusion distance of the carrier is much smaller than that of the crystalline silicon substrate due to the properties of the material itself, the hydrogenated amorphous silicon thin film is an intrinsic amorphous silicon in which impurities are not added between the p-type amorphous silicon and the n-type amorphous silicon. The pin junction structure with the layer inserted is mainly used.

PECVD using SiH4 and H2 gas is most commonly used as a deposition method for hydrogenated amorphous silicon (a-Si: H) thin films. Among the solar cells manufactured by using the PECVD method, the flexible thin film silicon solar cell is a low-cost and light-weight flexible substrate instead of a glass substrate, and can be continuously produced using a roll-to-roll process and can be mass-produced. It is aiming at low cost of battery manufacturing.

In order to manufacture such a solar cell, a process of loading a substrate into a deposition apparatus for forming a semiconductor layer, a sputtering apparatus for forming an electrode, and a deposition apparatus for forming an antireflection layer, and the process of unloading the substrate from each device are repeated. You will proceed.

However, since the process proceeds in such a process apparatus (hereinafter referred to as a 'process chamber'), the process is performed under vacuum, so that the substrate is loaded into each process chamber or the substrate is unloaded out of the process chamber. During the process, it is necessary to prevent the outside air from flowing into the process chamber and to prevent the process gas inside the process chamber from flowing out of the process chamber. In particular, SiH4, H2, doping gases (CH4, PH3, B2H6) and the like used in the deposition of a silicon thin film are used, and these gases must be blocked as a poisonous material, and the process at the time of incorporation into subsequent processes. There is a risk of poor performance.

When such a toxic doping gas flows into another chamber, there is a problem in that the characteristics of the thin film are greatly reduced.

In particular, the i-layer of the process chamber deposits an intrinsic silicon thin film in which doping gas is not introduced at all. This layer serves as an absorbing layer that absorbs the irradiated sunlight and generates electrons. Should absolutely block the mixing of, the prior art had a problem that it does not stably block the inflow of gas.

The present invention is to solve the above-mentioned problems of the prior art, the gas blocking device is disposed between the load lock chamber (Load Lock chamber), the process chamber, the unload lock chamber (Unload Lock Chamber) so that the outside air is the process chamber It is an object of the present invention to provide a gas barrier device of a flexible thin film solar cell that prevents the process gas inside the process chamber from flowing out of the process chamber while preventing the gas from flowing into the process chamber.

Another object of the present invention is to provide a gas blocking device for installing a blade in the gas blocking device to block the communication of the process gas or the outside air flowing from the outside.

It is still another object of the present invention to provide a gas shutoff apparatus for injecting inert gas into the chamber without affecting the process process even if it is somewhat introduced into the process chamber.

In order to achieve the above object, the gas barrier device of the present invention comprises a chamber in which the solar cell substrate is carried in and out; The inner surface of the chamber is characterized in that it comprises a vortex blade formed to protrude obliquely in a direction opposite to the direction in which the solar cell substrate is transferred.

Here, the solar cell substrate is characterized in that it comprises a plurality of position adjustment rollers are arranged to protrude with respect to the traveling direction in which the transfer.

In addition, it characterized in that it further comprises a blocking blade protruding from the chamber toward the concave progress line of the solar cell substrate formed by the positioning roller.

In addition, it is characterized in that it further comprises a vortex generating plate protruding from the vortex blade to further generate a vortex between a plurality of vortex blades.

In addition, the vortex blade is formed, characterized in that it further comprises an exhaust hole for exhausting the gas introduced into the chamber.

In addition, the swirl blade further comprises a gas injection unit for injecting an inert gas into the chamber.

In the gas shutoff device according to the present invention having the configuration as described above, a gas shutoff device is disposed between a load lock chamber, a process chamber, and an unload lock chamber so that external air is introduced into the process chamber. It is possible to stably prevent the process gas inside the process chamber from flowing out of the process chamber as well as preventing the gas from flowing into the process chamber.

That is, the gas shutoff device forms a vortex in the chamber using a blade, or guides the process gas or the outside air into the process chamber where the next process is to proceed by introducing the process gas or the outside air introduced into the chamber into the exhaust hole. It can be reliably prevented.

In addition, inert gas is injected into the chamber to prevent process gas or external air from flowing into the process chamber where subsequent processes are to be performed, and inert gas is injected into the chamber, even though a small amount of inert gas flows into the process chamber. Even if it is, it can be configured stably so as not to affect the process process.

1 is a view showing the arrangement of the gas shutoff device according to the present invention,
2 is a view showing an embodiment in which the vortex blade is installed in the gas shutoff device according to the present invention,
3 is a view showing a second embodiment of blocking the process gas through the arrangement of the transfer line in the gas shutoff device according to the present invention,
4 is a view showing that the blocking blade is installed in FIG.
5 is a view showing that the vortex blade is further installed in FIG.
6 is a view illustrating an exhaust hole, a gas suction pump, and a gas injection unit included in a blade of the gas shutoff device according to the present invention;
7 to 8 is a view showing that the vortex generating plate is further installed on the blade of the gas shutoff device according to the present invention.

Hereinafter, with reference to the accompanying drawings will be described in detail embodiments according to the present invention. Here, in describing the embodiments according to the present invention, the same reference numerals are used for the same components, and description thereof may be omitted as necessary.

Referring to Figure 1, the gas shutoff device 1 according to the present invention relates to a gas shutoff device disposed between the solar cell manufacturing process, the load lock chamber (L / L), the process chamber (2), the unload lock It is disposed between the chambers UL / L to prevent outside air from flowing into the process chamber and to prevent process gas inside the process chamber from flowing out of the process chamber.

First embodiment

Referring to FIG. 2, the gas shutoff device 1 according to the present invention includes a chamber 10 and a vortex blade 20. In the present embodiment, the solar cell substrate is an example of a flexible thin film solar cell substrate.

The chamber 10 has a space formed therein so that the transfer line 3 to which the solar cell substrate 2 is transferred may be disposed. And one side of the chamber 10, the entrance 40 through which the solar cell substrate 2 enters along the transfer line 3 and the exit through which the solar cell substrate 2 enters along the transfer line 3 on the other side ( 50) is formed.

As shown in FIG. 2, the vortex blade 20 is formed to protrude obliquely in a direction opposite to the direction in which the solar cell substrate 2 is transported on the inner surface of the chamber 10. The vortex blades 20 are provided in plurality in spaced intervals in the chamber. Therefore, the vortex blade 20 induces a flow of process gas or external air introduced from the outside of the chamber 10 in an inclined direction so that the process gas or external air introduced from the outside flows to the outside of the chamber 10. Prevent spills.

In addition, the vortex blade 20 is a process gas or external air that flows from the outside of the chamber 10 along the transfer line 3 along with the progress of the solar cell substrate 2. Air rises along the vortex blade 20 protruding obliquely and is formed as a vortex between the plurality of vortex blades 20 so as to stay between the vortex blades and not flow out of the chamber.

In addition, the end of the vortex blade 20 is disposed adjacent to the transfer line 3 of the solar cell substrate, the process gas or the outside air introduced along the transfer line 3 from the outside of the chamber 10. Is configured to facilitate climbing up the vortex blade to form a vortex.

Here, the arrow shows the flow of process gas or external air flowing along the transfer line 3.

Second Embodiment

3 is a view showing another embodiment of the present invention. Referring to FIG. 3, the gas shutoff device 1 according to the present invention includes a chamber 10, an entrance port 40, and an exit port 50. In addition, the transfer line 3 is arranged to transfer the feed roller 60 in the chamber to transfer the solar cell substrate 2 in a roll to roll (Roll to Roll) method.

In addition, the transfer line 3 may further include a position adjusting roller 70 such that the transfer line 3 is disposed to protrude in correspondence to the traveling direction in which the solar cell substrate is transferred.

As shown in FIG. 3, the transfer line 3 has a plurality of positioning rollers 70 adjacent to the inner side of the chamber 10. A part of the plurality of position adjusting rollers 70 is disposed to have a predetermined angle with respect to the traveling direction of the solar cell substrate. As shown in FIG. 3, a part of the positioning roller is arranged in a zigzag form so as to be adjacent to an inner surface of the chamber, and is configured to block a flow of process gas flowing along the traveling direction of the solar cell substrate.

That is, the flow of the process gas or the outside air introduced along the transfer line 3 is not only blocked by the projected transfer line 3 but also the deflection of the substrate in a space other than the process chamber by arranging the positioning roller. Can be prevented.

Here, the arrow shows the flow of process gas or external air flowing along the transfer line 3.

Meanwhile, referring to FIG. 4, the gas shutoff device 1 according to the present invention may further include a blocking blade 30.

Here, the blocking blade 30 is arranged to protrude from the chamber 10 toward the recessed portion of the transfer line 3 protruding from the chamber 10 as shown in FIG. 4. Therefore, the flow of the process gas or the outside air introduced along the transfer line 3 hits the blocking blade 30 to be blocked.

In addition, as shown in Figure 5, the gas shutoff device of the present invention can be configured to include both the vortex blade and the blocking blade and the positioning roller.

Here, the vortex blade 20 is formed to protrude inclined in the direction opposite to the direction in which the solar cell substrate 2 is transferred to the inner surface of the chamber 10. Therefore, the vortex blade 20 induces a flow of process gas or external air introduced from the outside of the chamber 10 in an inclined direction so that the process gas or external air introduced from the outside flows to the outside of the chamber 10. Prevent spills. In addition, the vortex blade 20 causes the process gas or the outside air introduced from the outside of the chamber 10 along the transfer line 3 to form a vortex to form a vortex such that the process gas or the exterior is inclined direction of the vortex blade 20. Further induces air flow.

Thus, the process gas or the outside air that proceeds together along the solar cell substrate is first blocked by arranging the transfer line 3 to protrude in the traveling direction, and the process gas blocked by the protruding transfer line is blocked. Through the vortex blade 20 and the blocking blade 30 disposed to be inclined, it can be blocked more stably.

Hereinafter, the blades 20 and 30 refer to the vortex blade 20 and the blocking blade 30 in the description.

The gas shutoff device 1 according to the present invention may further include an exhaust hole 21 and an exhaust passage 22 formed in the blades 20 and 30.

Referring to FIG. 6, an exhaust path 22 is formed in the vortex blade 20 of the gas shutoff device 1 according to the present invention so as to communicate with the outside, and an exhaust hole 21 is formed in the exhaust path 22. This is in communication. Accordingly, the flow of process gas or external air induced in the inclined direction of the vortex blade 20 is exhausted to the outside through the exhaust hole 21. That is, the process gas or the outside air introduced along the transfer line 3 is exhausted to the outside through the exhaust hole 21, thereby preventing the inside of the process chamber adjacent to the chamber 10.

Here, the exhaust hole 21 is an example formed in the vortex blade 20, but may be formed inside the blocking blade 30 or the chamber 10.

In addition, the blades 20 and 30 may further include a gas suction pump 23 disposed in communication with the exhaust hole 21. Therefore, the process gas or the outside air exhausted through the exhaust hole 21 can be forcibly exhausted to the outside by the suction force of the gas suction pump 23 as well as the suction amount of the gas suction pump 23. .

That is, the gas suction pump 23 may adjust the intensity of the flow of the process gas or the outside air, that is, the suction amount, and adjust the suction amount of each blade 20, 30 to control the process gas or the outside air in the chamber 10. You can also adjust the direction of flow.

On the other hand, the end of the vortex blade 20 may further include a gas injection unit 24 for injecting an inert gas toward the transfer line (3). Here, the gas injection unit 24 is disposed at the end of the vortex blade 20 to be disposed adjacent to the transfer line 3 to efficiently block the process gas or the outside air flowing along the transfer line 3 Although it is taken as an example, it may be disposed at the end of the blocking blade 30, it is also disposed on the inner surface of the chamber 10 can be injected to the inert gas toward the transfer line 3, of course.

In addition, the inert gas is supplied through the gas injection passage 26 as a gas of high pressure or high density, and is injected toward the transfer line 3 from the gas injection portion 24. Therefore, the inlet gas of high pressure or high density is filled in the chamber 10, so that process gas or external air can be prevented from entering the chamber 10.

Here, the inert gas may be helium (He), neon (Ne), argon (Ar), krypton (Kr), xenon (Xe), radon (Rn) and the like. Therefore, the inert gas does not affect the process gas, and even if a trace amount of the inert gas enters the process chamber, the inert gas does not react in the deposition process in the process chamber deposited on the solar cell substrate 2.

Referring to FIGS. 7 to 8, the vortex blades include a vortex generating plate 25a protruding vertically from the vortex blade 20 and a vortex generating plate 25b protruding in a convex shape on the surface of the vortex blade 20. It may further include. Process gas or external air introduced along the transfer line 3 strikes the vortex generating plates 25a and 25b of the vortex blade 20 to further activate the vortices formed in the chamber 10.

Here, the vortex generating plate (25a, 25b) is an example that is disposed in the vertical protrusion and concave-convex shape from the vortex blade 20, but is not necessarily limited to this, various shapes that can further activate the vortex in the chamber 10 In addition, when the vortex blade 20 is disposed, it is a matter of course that the vortex generating plate (not shown) may be formed on the inner surface of the chamber 10. Here, the arrow shows the flow of process gas or external air flowing along the transfer line 3.

While the invention has been shown and described with reference to certain preferred embodiments thereof, it is to be understood that the invention is not limited to the disclosed embodiments. Those skilled in the art will appreciate that various modifications, additions and substitutions are possible, without departing from the scope of the appended claims, The genius will be so self-evident. Accordingly, the true scope of the present invention should be determined by the technical idea of the appended claims.

1: gas barrier device 2: solar cell substrate
3: transfer line 10: chamber
20: vortex blade 30: blocking blade
40: entrance door 50: exit door
60: feed roller 70: positioning roller

Claims (6)

delete In the gas shutoff device disposed between a plurality of chambers for manufacturing a solar cell,
A chamber into which the solar cell substrate is loaded and unloaded;
A vortex blade formed on the inner surface of the chamber to protrude obliquely in a direction opposite to the direction in which the solar cell substrate is transferred;
Gas blocking device of a flexible thin film solar cell, characterized in that it comprises a plurality of positioning rollers protruding with respect to the traveling direction in which the solar cell substrate is transferred.
The method of claim 2,
And a blocking blade protruding from the chamber toward the concave traveling line of the solar cell substrate formed by the position adjusting roller.
The method of claim 3,
And a vortex generating plate protruding from the vortex blade to further generate a vortex between a plurality of vortex blades.
In the gas shutoff device disposed between a plurality of chambers for manufacturing a solar cell,
A chamber into which the solar cell substrate is loaded and unloaded;
A vortex blade formed on the inner surface of the chamber to protrude obliquely in a direction opposite to the direction in which the solar cell substrate is transferred;
The gas blocking device of the flexible thin film solar cell, which is formed in the vortex blade and has an exhaust hole for exhausting the gas introduced into the chamber.
The method of claim 5,
The vortex blade further comprises a gas injection unit for injecting an inert gas into the chamber gas blocking device of the flexible thin film solar cell.

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