KR101237999B1 - Method for aligning Metal Mask - Google Patents

Abstract

The present invention provides a support for a magnetic metal mask or a magnetic mask for the metal mask and an auxiliary magnetic material for preventing separation during the manufacturing process for aligning the metal mask in order to increase the precision of the electrode in the electrode pattern using the metal mask. It provides to include a step.

Support for metal mask, magnetic material for metal mask, auxiliary magnetic material for departure prevention

Description

Method for aligning metal mask

1 is a schematic diagram illustrating a method of aligning a metal mask, which is one example of the related art.

FIG. 2 is a perspective view showing a metal mask manufactured by the alignment method of the metal mask shown in FIG. 1. FIG.

3 is a method diagram schematically showing an alignment method of a metal mask as a first embodiment according to the present invention;

4 is a view for showing that the metal mask is magnetically aligned on the support for the metal mask shown in FIG.

5 is a perspective view showing a metal mask produced by the support for the metal mask shown in FIG.

Figure 6 is a second embodiment according to the present invention, a view showing that the metal mask is magnetically aligned (align) to the magnetic material for the metal mask.

FIG. 7 is a third embodiment according to the present invention, in which a metal mask is aligned with an auxiliary magnetic material for preventing separation of the metal mask on the magnetic material for the metal mask. FIG.

8 and 9 are plan views showing that the auxiliary magnetic material for prevention of departure is formed in the metal mask shown in FIG.

The present invention relates to a method of aligning a metal mask.

In general, an electroluminescent device is formed by stacking an inorganic material or an organic material between positive electrodes and recombining electrons and holes injected through an anode and a cathode to form an exciton, and energy of a specific wavelength by the energy from the excitons formed. It is a self-luminous display device using the phenomenon that light is generated.

The electroluminescent element requires a sophisticated and precise metal mask device because the metal electrode is formed on the transparent glass substrate of several tens to hundreds of micrometers (µm) or the like, which is an example of the conventional metal mask alignment method. Looking at as follows.

1 is a method diagram schematically showing an alignment method of a metal mask, which is one example of the related art.

As shown in FIG. 1, the alignment apparatus 100 for a metal mask, which is one example of the related art, includes a metal mask moving unit 102, a compression roller unit 104, a first belt transfer unit 106a, and the like.

First, the metal mask moving part 102 is installed so that the metal mask 1 may be sequentially and smoothly manufactured, and the compression roller parts 104: 104a and 104b are coiled metal masks 1. It is installed to flatten the.

In addition, the first belt transfer part 106a is connected to the metal mask moving part 102 and installed to move the metal mask 1.

In the conventional method of aligning a metal mask using the metal mask aligning device 100 as an example, the coil mask 104 has a thin metal mask 1 having a coil shape of about 50 μm. Since it is flattened by), the area where the compression roller portion 104 and the metal mask 1 are in contact with each other is not smoothly brought into surface contact, and the metal mask 1 is uneven as shown in FIG. 2. It becomes

When the electrode is formed into tens to hundreds of micrometers (μm) through a manufacturing process such as a photolithography method on the transparent glass substrate of the electroluminescent device by using the metal mask 1, the precision of the electrode is poor and serious. Preferably, a short circuit between the electrodes may cause a malfunction in driving the electroluminescent element, resulting in a shortening of the lifetime of the electroluminescent element.

In addition, when the uneven metal mask 1 is forcibly pressed by the compression roller 104 in order to have a flat surface, the metal mask 1 may be damaged or the metal mask 1 may be torn. This, in turn, leads to an increase in manufacturing costs.

In order to solve the above problems, the present invention performs a step of installing a metal mask support or a metal mask magnetic material and an anti-separation auxiliary magnetic material during the step of aligning the metal mask, thereby increasing the precision of the electrode when the electrode pattern Since the short circuit between the electrodes is prevented from occurring, a malfunction can be suppressed when the electroluminescent element is driven, and an object thereof is to be provided to extend the life of the electroluminescent element.

Another object of the present invention, by performing the alignment method of the metal mask, it is possible to suppress the damage of the metal mask or the tearing of the metal mask to improve the production yield and to provide an increase in the manufacturing cost can be suppressed Its purpose is to.

In order to achieve the above object, the present invention provides a metal mask (Metal), to prepare a support for a metal mask having a metal mask and magnetic properties, and (b) a metal mask on top of the support for the metal mask The laying step.

Another object of the present invention, the step of preparing the support for the metal mask, forming an alignment mark on the upper portion of the support for the metal mask to further install the magnetic material for the metal mask in the inner region of the alignment mark is added. It features.

Another object of the present invention, the step of installing the magnetic material for the metal mask is characterized in that the step of installing a magnetic sheet (sheet).

Another object of the present invention is characterized in that the magnetic sheet is stronger in magnetism than a support for a metal mask.

Another object of the present invention is to install a first anti-separation auxiliary magnetic body to correspond to the periphery of the alignment mark on the lower portion of the support for the metal mask, and inactive of the magnetic material for the metal mask to correspond to the first anti-separation auxiliary magnetic body And installing a second anti-separation auxiliary magnetic body in the area.

Another object of the present invention, the step of installing the first separation preventing auxiliary magnetic material and the second departure preventing auxiliary magnetic material is characterized in that each of the four or more steps to install.

Another object of the present invention is characterized in that the step of installing the first departure-avoidance auxiliary magnetic body and the second departure-avoidance auxiliary magnetic material is a step of integrally symmetrically installed on the basis of the magnetic material for the metal mask.

Hereinafter, with reference to the accompanying drawings will be described embodiments of the present invention in more detail.

≪ Embodiment 1 >

3 is a method diagram schematically showing an alignment method of a metal mask as a first embodiment according to the present invention. First, in the method of aligning the metal mask according to the present invention, a step of supporting the metal mask and installing a support for the metal mask having the metal mask and magnetic properties is further added. Looking at the alignment method of the metal mask according to the present invention, as shown in FIG.

As shown in FIG. 3, the method of aligning the metal mask using the metal mask aligning apparatus 300 is performed by using the metal mask aligning apparatus (100 in FIG. 1) described above with reference to FIG. 1. The metal mask moving part 102, the compression roller part 104, the 1st belt conveyance part 106a, etc. are provided similarly to the method of aligning a metal mask.

The functions of the respective components of the alignment device 300 for metal masks and the organic relationships therebetween are described in detail with respect to the respective components of the alignment device 100 for FIG. 1 described above with reference to FIG. 1. Since the functions and the organic relations between them are the same, respective descriptions thereof will be omitted below.

However, in the alignment method of the metal mask according to the present invention, the metal mask 1 is supported while supporting the metal mask 1 to align the metal mask 1 using the metal mask alignment device 300. ) And the support for the metal mask having a magnetic property (308) is further added.

In addition, although the metal mask 1 and the support for the metal mask 308 having magnetic properties are not shown, a separate material is sent to a manufacturing process step for forming a metal electrode using a pattern mask (not shown), which is a manufacturing process. The step of further installing the second belt conveying portion and the third belt conveying portions 306b and 306c is added. Here, a process of magnetically aligning the metal mask on the support for the metal mask in the method of aligning the metal mask according to the present invention will be described in detail with reference to FIG. 4.

FIG. 4 is a view for showing that the metal mask is magnetically aligned on the support for the metal mask shown in FIG. 3.

As shown in (a) and (b) of FIG. 4, the metal mask 1 having an uneven curved surface is placed on the metal mask moving part 102 by the compression roller part 104 of FIG. 1 In response to the operation of the belt conveyance unit 106a, it arrives at the support for metal mask 308.

In this case, the metal mask 1 is placed on the upper surface of the metal mask support 308 having magnetic properties to turn on the power electrically connected to the metal mask support 308. An attraction force between the support members for the mask 308 is generated, and the area where the metal mask 1 is brought into contact with each other to be unfolded is shown in FIG. Since the contact area becomes wider than the contact area, the metal mask 1 becomes flat as shown in FIG. 5.

By using the metal mask 1 on the support for magnetic metal mask 308, the electrode is formed on the transparent glass substrate of the electroluminescent device through a manufacturing process such as a photolithography method such as tens to hundreds of micrometers (μm). In this case, the precision of the electrode is increased, the short circuit between the electrodes can be prevented from occurring during the electrode pattern, and malfunctions can be suppressed when the electroluminescent element is driven, thereby extending the life of the electroluminescent element.

In addition, since the metal mask 1 has a magnetic surface, the support for magnetic metal mask 308 is electrically connected to a predetermined power source to form a flat surface. Therefore, the metal mask 1 may be damaged or the metal mask 1 may be torn. Since the phenomenon does not occur, the production yield is improved, and the increase in manufacturing cost can be suppressed.

On the other hand, in the manufacturing process for aligning the metal mask according to the present invention, a separate magnetic material can be installed on the support for metal mask 308 to further maintain the flat surface of the metal mask 1, the metal mask according to the present invention Looking at the alignment method of FIG. 6 and FIG.

≪ Embodiment 2 >

FIG. 6 is a diagram illustrating a metal mask magnetically aligned with a magnetic material for a metal mask according to a second embodiment of the present invention. First, in the alignment method of the metal mask according to the present invention, a step in which a magnetic sheet-like magnetic material in the form of a magnetic sheet is installed in an inner region of an alignment mark, which is an upper portion of the support for the metal mask, is further added. . Looking at the magnetic alignment of the metal mask to the magnetic material for the metal mask according to the present invention as shown in FIG.

As shown in (a) and (b) of FIG. 6, the metal mask 1 having an uneven curved surface is placed on the metal mask moving part 102 by the compression roller part 104 of FIG. 1 In response to the operation of the belt conveyance unit 106a, it arrives at the support for metal mask 308.

At this time, the metal mask (1 of FIG. 6) is a sheet having a stronger magnetic property than the metal mask support 308 in the inner region of the alignment mark A, which is the upper surface of the support for the metal mask 308 having magnetic properties. Since it is placed on the upper surface of the magnetic material 610 for the metal mask in the form of a sheet, it becomes flatter than the metal mask (1 in FIG. 4) manufactured through the alignment method of the metal mask described above with reference to FIG. 4.

Accordingly, the use of the metal mask 1 on the metal mask magnetic material 610 that is more magnetic than the support for the metal mask 308 increases the precision of the electrode at the time of the electrode pattern. Can be prevented.

In addition, since the metal mask 1 is a magnetic metal material for magnetic mask 308 is electrically connected to a predetermined power supply means to form a more flat surface, the metal mask 1 is damaged or the metal mask 1 is torn. Loss does not occur, and production yield is improved, thereby suppressing an increase in manufacturing cost.

On the other hand, it is possible to further maintain the flat surface of the metal mask (1) by installing the auxiliary magnetic material for preventing separation in the lower portion of the support for metal mask 308 according to the present invention, looking at the alignment method of the metal mask according to the present invention Next, as shown in FIG.

FIG. 7 is a third embodiment according to the present invention, in which a metal mask is aligned with an auxiliary magnetic material for preventing release of the metal mask. First, in the alignment method of the metal mask according to the present invention, when aligning the metal mask to the magnetic material for the metal mask magnetically connected to the support for the metal mask, the metal mask due to carelessness of the metal mask is further expanded In order to prevent the detachment of the mask is further provided with a step of installing the auxiliary magnetic material for preventing the departure. Such a process of aligning the metal mask with the auxiliary magnetic material for preventing separation in the magnetic material for the metal mask according to the present invention will be described with reference to FIG. 7.

As shown in FIGS. 7A and 7B, the metal mask 1 having an uneven curved surface is placed on the metal mask moving part 102 by the compression roller part 104 of FIG. 1 In response to the operation of the belt conveyance unit 106a, it arrives at the support for metal mask 308.

In this case, the metal mask 1 has a magnetic shape that is stronger than the metal mask support 308 in the inner region of the alignment mark A, which is the upper surface of the support for the metal mask 308 having magnetic properties. The auxiliary magnetic material 712 for preventing the separation of the metal mask 1 is further disposed on the upper surface of the magnetic material 610 for the metal mask, and to prevent the metal mask 1 from being inadvertently detached while widening the surface area of the metal mask 1.

Here, the departure preventing auxiliary magnetic body 712 (hereinafter, referred to as a 'second departure preventing auxiliary magnetic body' for convenience of description) is not illustrated to correspond to the periphery of the alignment mark A on the lower portion of the support for metal mask 308. The first departure preventing auxiliary magnetic body (not shown) is installed, and the second departure preventing auxiliary magnetic body 712 is disposed in the inactive area B of the metal mask 1 to correspond to the first departure preventing auxiliary magnetic body (not shown). Is installed more.

In this case, for convenience of description, the number of the second departure preventing auxiliary magnetic bodies 712 is illustrated as four, but the present invention is not limited thereto. As shown in FIG. 8, the inactive area B of the metal mask 1 is illustrated. 9 or more, or as shown in FIG. 9, may be provided at an edge portion on the inactive region B of the metal mask 1. It becomes flatter than the metal mask (1 of FIG. 4, 1 of FIG. 6) manufactured by the alignment method.

Accordingly, the metal mask 1 is placed on the upper portion of the metal mask magnetic material 610 that is stronger in magnetism than the support for the metal mask 308, and is fixed by the separation preventing auxiliary magnetic material 712. It is possible to further increase, and thus it is possible to further prevent the short circuit between the electrodes.

In addition, since the metal mask 1 is electrically connected to the magnetic metal mask 308 and the anti-separation auxiliary magnetic body 712 with magnetic power by a predetermined power source to form a more flat surface, the metal mask 1 may be damaged. Alternatively, the phenomenon in which the metal mask 1 is not torn does not occur, so that the production yield is improved, and the increase in manufacturing cost can be suppressed.

It will be understood by those skilled in the art that the present invention may be embodied in other specific forms without departing from the spirit or essential characteristics thereof. Therefore, it should be understood that the above-described embodiments are to be considered in all respects as illustrative and not restrictive, the scope of the invention being indicated by the appended claims rather than the foregoing description, It is intended that all changes and modifications derived from the equivalent concept be included within the scope of the present invention.

According to the alignment method of the metal mask of the present invention made as described above, the following effects can be obtained.

First, the method of aligning the metal mask is a step of installing the support for the metal mask or the magnetic material for the metal mask and the auxiliary magnetic material for preventing separation, thereby increasing the precision of the electrode and preventing short between electrodes in the electrode pattern. Therefore, malfunction can be suppressed at the time of driving the electroluminescent element, which has the effect of extending the life of the electroluminescent element.

Second, by using the alignment method of the metal mask it is possible to suppress the damage of the metal mask or the tearing of the metal mask to improve the production yield, there is another effect that can increase the manufacturing cost.

Claims (7)

Supporting a metal mask and preparing a support for a metal mask having magnetic properties with the metal mask; Passing the metal mask through a compression roller to flatten the metal mask; Placing the metal mask on top of the support for the metal mask; And Alignment of the metal mask including turning on a power source electrically connected to the support for the metal mask so that an attraction force between the metal mask and the support for the metal mask is generated so that the metal mask is brought into contact with and flattened. align) method. delete delete delete delete delete delete

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