KR101232359B1 - Processing method for surface modifying of light guide plate for preventing deformation of light guide plate by heat of plasma - Google Patents

Abstract

PURPOSE: A treatment method for reforming the surface of a light guide plate capable of preventing the deformation of a light guide plate by a plasma heat is provided to improve the regularity of a surface reforming treatment by preventing the deformation of a light guide plate by plasma heat when treating a plasma by the surface reformation of a light guide plate. CONSTITUTION: A light guide plate(114) is settled on a plate support(112). The surface of a light guide plate is reformed by performing a plasma treatment on the surface of a light guide plate at the plasma treatment speed of 80mm/sec and two or more plasma treatment.

Description

PROCESSING METHOD FOR SURFACE MODIFYING OF LIGHT GUIDE PLATE FOR PREVENTING DEFORMATION OF LIGHT GUIDE PLATE BY HEAT OF PLASMA}

The present invention relates to a surface modification treatment method, and more particularly, to a surface modification treatment method of a light guide plate that can prevent thermal deformation of the light guide plate during plasma treatment.

Recently, many flat panel displays using liquid crystal displays (LCDs), plasma display panels (PDPs) and organic light emitting diodes (OLEDs) as display panels have been developed in place of existing cathode ray tubes (CRTs). have.

Since the LCD is not a self-luminous element, a backlight unit (BLU) for irradiating light to the liquid crystal display panel is provided to display an image using the light emitted from the backlight unit.

The backlight unit is configured to uniformly transmit light emitted from the light source, such as a cold cathode fluorescent lamp (CCFL) or a light emitting diode (LED), which emits light to the entire surface of the LCD. Light guide plate (LGP) of acrylic injection (Poly methyl methacrylate (PMMA)) acting.

The light guide plate is hydrophobic (hydrophobic) surface modification by using a plasma (Plasma), in which the light guide plate rises from the upper portion by the heat from the plasma to damage the uniformity of the surface modification treatment (uniformity). .

As a related prior document, there is Japanese Patent No. 3937225, which discloses only a light guide member subjected to surface modification by irradiation of energy rays, and a light guide plate by surface modification or plasma treatment of a light guide plate by plasma treatment. There is no disclosure of a technique for solving the problem of thermal deformation.

An object of the present invention is to provide a surface modification treatment method of a light guide plate that can prevent thermal deformation of the light guide plate during plasma treatment for surface modification of the light guide plate.

Surface modification treatment method of a light guide plate according to an embodiment of the present invention for achieving the above object comprises the steps of mounting a light guide plate on a plate support; And modifying the surface of the light guide plate by performing a plasma treatment on the surface of the light guide plate with a plasma processing speed of 80 mm / sec or more and the number of times of plasma treatment being two or more times.

The method for surface modification of a light guide plate according to the present invention includes at least any one of an increase in the processing speed and number of treatments of the plasma, maintaining a low surface temperature of the light guide plate during the plasma treatment process, or vacuum adsorption at the center of the light guide plate using a vacuum adsorption plate at the bottom of the plate support. By using one, it is possible to prevent deformation of the light guide plate due to plasma heat during plasma treatment for surface modification of the light guide plate, thereby improving the uniformity of the surface modification treatment.

1 is a view showing the layout of a plasma surface treatment apparatus according to the present invention.
2 is a view for explaining a surface modification treatment method of a light guide plate using a vacuum suction plate according to the present invention.

BRIEF DESCRIPTION OF THE DRAWINGS The advantages and features of the present invention, and how to accomplish them, will become apparent by reference to the embodiments described in detail below with reference to the accompanying drawings. However, the present invention is not limited to the embodiments disclosed below, but will be implemented in various forms, and only the present embodiments are intended to complete the disclosure of the present invention, and the general knowledge in the art to which the present invention pertains. It is provided to fully convey the scope of the invention to those skilled in the art, and the present invention is defined only by the scope of the claims. Like reference numerals refer to like elements throughout.

1 is a view showing the layout of a plasma surface treatment apparatus according to the present invention.

Referring to FIG. 1, the plasma surface treatment apparatus 100 according to an exemplary embodiment of the present invention includes a loading unit 110, a cooling module 120, a surface treatment module 130, and an unloading unit 140. Can be.

The loading unit 110 is a component that supplies the object to be treated to the surface treatment module 130. The target object used in the embodiment of the present invention is a light guide plate 114.

The loading unit 110 includes a chuck 115, a vertical driving unit 116, and a horizontal driving unit 117. The chuck 115 may move the plate support 112 on which the light guide plate 114 is mounted to a transfer conveyor 119. In one example, the plate support 112 is a carrier plate. The vertical driving unit 116 drives the chuck 115 in the vertical direction. The horizontal driver 117 includes the chuck 115 to move the vertical driver 116 in the horizontal direction.

The cooling module 120 is a component for lowering the surface temperature of the light guide plate 114 by spraying a cooling gas (Cold Air) on the surface of the light guide plate 114. The cooling module 120 may include a cooling gas supply pipe, a cooler, a cooling gas injection hole, and an internal air passage.

The surface treatment module 130 is a component that hydrophobicly treats the surface of the light guide plate 114 using plasma. In the present invention, an atmospheric pressure plasma is generated and the plasma is sprayed on the surface of the light guide plate 114 to modify the surface of the light guide plate 114 hydrophobicly.

The surface treatment module 130 includes an electrode part, a processing gas introduction part, a processing gas supply path, an intake and exhaust part, and a cooling part. The electrode unit is installed side by side with a plurality of electrodes coupled to the dielectric at regular intervals. The plasma is generated by the high voltage in the electrode portion. The heat dissipation part is attached to the outside of the electrode part. And the processing gas introduction portion is provided in contact with the outer surface of the electrode provided on the outer side of the electrode, the processing gas is introduced from the upper side, and communicates with the protruding heat sink from the lower side discharge the processing gas to the protruding heat sink side. do.

The process gas supply path is provided above the electrode unit and the heat dissipation unit, and provides a path through which the process gas passing through the heat dissipation unit is supplied to the electrode unit. The intake and exhaust units are respectively provided in separate spaces on the left and right sides of the processing gas introduction unit, a first gas passage connected to the outside is formed at an upper portion thereof, and a second gas passage connected to the outside is formed at a lower portion thereof. The plasma generated by the intake and exhaust unit and the gas generated in the surface modification process are sucked and discharged to the outside.

In the present invention, the light guide plate 114 is horizontally modified while being horizontally moved by the transfer conveyor 119 while scanning the plasma injected by the surface treatment module 120 as if it were scanned.

The cooling unit is a component for lowering a temperature of a plasma nozzle plate to which plasma of the surface treatment module 130 is injected.

The unloading unit 140 includes a chuck 145, an up-and-down driving unit 146, and a horizontal driving unit 147. The function of the unloading unit 140 is the light guide plate 114 on which the chuck 145 is hydrophobically modified. The seat plate support 112, which is seated, may be different from the lowering of the transport conveyor 119, and the rest of the functions may be the same as the loading unit 110, and thus description thereof will be omitted.

Hereinafter, the surface modification treatment method of the light guide plate according to the embodiments of the present invention will be described.

First, the surface modification treatment method of the light guide plate according to the first embodiment of the present invention can be achieved by increasing the treatment speed of the plasma and the number of treatments of the plasma.

Referring to Figure 1, After mounting one or more light guide plates 114 on the plate support 112, the plate support 112 on which the light guide plate 114 is seated on the transfer conveyor 119 is loaded by the loading unit 110.

For example, the light guide plate 114 may be a poly methyl methacrylate (PMMA) plate material. For example, the plate support 112 may be a carrier plate.

Subsequently, the surface of the light guide plate 114 is plasma treated with a plasma processing speed of 80 mm / sec or more and the plasma processing number of times being 2 or more times.

The plasma treatment may be performed such that the surface of the light guide plate 114 is hydrophobicly modified by spraying plasma through an intake and exhaust unit of the surface treatment module 130.

After the surface treatment module 130 supplies the processing gas for generating plasma into the reaction chamber through the gas injection hole, when power is applied to the electrode unit, plasma is generated in the space between the electrodes of the electrode unit.

The plasma may be prepared by using a fluorine-based gas such as nitrogen trifluoride (NF ₃ ) or carbon trifluoride (CF ₃ ) as a processing gas.

In the plasma processing, when the plasma processing speed is performed at a high speed of 80 mm / sec or more to prevent thermal deformation of the light guide plate 114, the plasma processing number is twice or more to increase the speed during the plasma processing. Compensating for a decrease in the density of the plasma.

However, as described above, if the number of times of plasma treatment is taken twice or more, there is a concern that the amount of production may be reduced. Therefore, in order to improve this, two or three sets of plasma modules may be installed in parallel to perform plasma treatment.

As a result, the surface of the light guide plate 114 is hydrophobically modified by the plasma injected to the surface of the light guide plate 114 during the plasma treatment.

Subsequently, the light guide plate 114 surface-modified hydrophobicly on the transfer conveyor 119 is lowered by the unloading unit 140.

According to the first embodiment of the present invention, the center of the light guide plate 114 by the heat of the plasma during the plasma processing process for the surface modification of the light guide plate 114 by increasing the processing speed of the plasma and the number of times the plasma is processed. It is possible to improve the uniformity of the surface modification treatment by suppressing the phenomenon that the portion rises upward.

Next, the surface modification treatment method of the light guide plate according to the second embodiment of the present invention can be achieved by maintaining the surface temperature of the light guide plate at a low temperature below a certain temperature during the plasma treatment.

Referring to Figure 1, The light guide plate 114 is seated on the plate support 112 on the transfer conveyor 119 by the loading unit 110.

 For example, the light guide plate 114 may be a PMMA plate. In one example, the plate support 112 may be a carrier plate.

Thereafter, the surface of the light guide plate 114 is plasma treated while the surface temperature of the light guide plate 114 is maintained at a low temperature below a predetermined temperature.

In the plasma treatment, in order to prevent deformation of the light guide plate 114 due to heat of the plasma, the surface temperature of the light guide plate 114 is preferably maintained at 25 ° C. or less.

In the plasma treatment, three methods may be largely used to maintain the surface temperature of the light guide plate 114 below a predetermined temperature (25 ° C.).

First, the light guide plate 114 is precooled just before the plasma treatment.

The pre-cooling of the light guide plate 114 may be performed by spraying a cooling gas on the surface of the light guide plate 114 using the cooling means of the cooling module 120.

For example, a cooling radiator may be used as the cooling means. For example, nitrogen or a clean dry air (CDA) may be used as the cooling gas.

When pre-cooling the light guide plate 114, the surface of the light guide plate 114 to a relative value through the measurement of the temperature inside the reaction chamber during the cooling gas or the cooling process in a sampling form using a laser thermometer (not shown). The temperature can be known.

In this case, the temperature of the cooling gas or the temperature inside the reaction chamber during the cooling process maintains the surface temperature of the light guide plate 114 at a target surface temperature (25 ° C.) or lower during plasma treatment for surface modification of the light guide plate 114. In order to do this, the temperature must be lower than the target surface temperature (25 ° C) of the light guide plate 114.

Here, the laser thermometer may be provided in the plasma processing apparatus 100 or separately provided outside the plasma processing apparatus 100.

Second, the plate support 112 which is pre-cooled is used before the light guide plate 114 is seated on the plate support 112.

The pre-cooling of the plate support 112 may be performed by injecting a cooling gas to the surface of the plate support 112 using the cooling means of the cooling module 120.

For example, a cooling radiator may be used as the cooling means. For example, nitrogen or a clean dry air (CDA) may be used as the cooling gas.

During pre-cooling of the plate support 112, the plate support 112 to a relative value through the measurement of the temperature inside the reaction chamber during the cooling gas or the cooling process in a sampling form using a laser thermometer (not shown). The surface temperature of is known.

In this case, the temperature of the cooling gas or the temperature inside the reaction chamber during the cooling process maintains the surface temperature of the light guide plate 114 at a target surface temperature (25 ° C.) or lower during plasma treatment for surface modification of the light guide plate 114. In order to do this, the temperature must be lower than the target surface temperature (25 ° C) of the light guide plate 114.

Here, the laser thermometer may be provided in the plasma processing apparatus 100 or separately provided outside the plasma processing apparatus 100.

On the other hand, the pre-cooling of the plate support 112 is a cooling gas to the surface of the plate support 112 using a separate cooling means from the outside of the plasma processing apparatus 100, not the cooling module 120. It may be carried out by spraying, in which case the process conditions may be the same as when using the cooling module 120.

In this case, the light guide plate 114 mounted on the pre-cooled plate support 112 is cooled by receiving cold air from the pre-cooled plate support 112 during the plasma processing process. The surface temperature can be maintained below the target surface temperature (25 ° C.).

Third, during the plasma treatment, the surface of the light guide plate 114 is plasma treated while maintaining plasma heat at 30 ° C. or lower.

The plasma hot air is maintained at 30 ° C. or lower by maintaining a plasma nozzle plate to which plasma is sprayed to be lowered by a predetermined temperature (20 ° C.) or lower using a cooling means of the surface treatment module 130. Can be achieved by heat exchange in a plasma nozzle.

In this case, during the plasma treatment process, the light guide plate 114 may be indirectly cooled by plasma heat maintained at 30 ° C. or lower, and as a result, the surface temperature of the light guide plate 114 may become a target surface during the plasma treatment process. The temperature can be maintained below 25 ° C.

In the above three cases, the surface of the light guide plate 114 is hydrophobically modified by plasma injected to the surface of the light guide plate 114 during the plasma treatment.

Subsequently, the light guide plate 114 surface-modified hydrophobicly on the transfer conveyor 119 is lowered by the unloading unit 140.

According to the surface modification treatment of the light guide plate according to the second embodiment of the present invention, since the plasma treatment process may be performed at a low light guide plate surface temperature of 25 ° C., there is no fear of deformation of the light guide plate 114 by plasma heat. The uniformity of the surface modification treatment for the light guide plate 114 may be improved.

Next, the surface modification treatment method of the light guide plate according to the third embodiment of the present invention may be achieved by vacuum-adsorbing the central portion of the light guide plate using a vacuum adsorption plate attached to the lower surface of the plate support before the plasma treatment.

2 is a view for explaining a surface modification treatment method of a light guide plate using a vacuum suction plate according to the present invention.

1 and 2, The loading unit 110 loads the plate support 112 on which the light guide plate 114 is seated corresponding to each of the one or more vacuum adsorption plates 210 attached to the lower surface on the transfer conveyor 119.

For example, the light guide plate 114 may be a PMMA plate. In one example, the plate support 112 may be a carrier plate.

The vacuum suction plate 210 is attached to the plate support 112 opposite to the region where the light guide plate 114 is to be seated, and is disposed to correspond to a central portion of the region where the light guide plate 114 is to be seated.

Thereafter, the vacuum adsorption plate 210 is vacuum adsorbed to the central portion of the light guide plate 114.

Next, the surface of the light guide plate 114 in which the central portion is vacuum-adsorbed is subjected to plasma treatment.

The plasma treatment may be performed by spraying plasma on the surface of the light guide plate 114 through the intake and exhaust of the surface treatment module 130.

The plasma may be prepared by using a fluorine-based gas such as nitrogen trifluoride (NF ₃ ) or carbon trifluoride (CF ₃ ) as a processing gas.

During the plasma treatment, the surface of the light guide plate 114 is hydrophobically modified by plasma injected onto the surface of the light guide plate 114.

During the plasma treatment, since the central portion of the light guide plate 114 is vacuum-adsorbed by the vacuum adsorption plate 210, the phenomenon in which the center portion of the light guide plate 114 rises upward by the plasma heat may be suppressed.

Subsequently, the plate support member 112 on which the light guide plate 114 which is hydrophobically surface-modified on the transfer conveyor 119 is seated by the unloading unit 140 is lowered.

According to the surface modification process of the light guide plate 114 according to the third embodiment of the present invention, the center portion of the light guide plate 114 by plasma heat through the vacuum adsorption of the central portion of the light guide plate 114 using the vacuum adsorption plate 210. The uniformity of the surface modification process for the light guide plate 114 may be improved by suppressing the phenomenon of rising above this.

Meanwhile, by bringing the surface temperature of the light guide plate to a desired temperature through an optional combination of pre-cooling the light guide plate just before the plasma treatment, pre-cooling the plate support before mounting the light guide plate, and / or maintaining plasma heat below a certain temperature during the plasma treatment process. Of course, thermal deformation due to plasma heat may be optimized during surface modification of the light guide plate.

Although the preferred embodiments of the present invention have been disclosed for illustrative purposes, those skilled in the art will appreciate that various modifications, additions and substitutions are possible, without departing from the scope and spirit of the invention as disclosed in the accompanying claims. These changes and modifications may be made without departing from the scope of the present invention. Accordingly, the scope of the present invention should be determined by the following claims.

100: plasma surface treatment apparatus 110: loading unit
112: plate support 114: light guide plate
115, 145: chuck 116, 146: vertical drive
117, 147: horizontal drive unit 119: conveying conveyor
120: cooling module 130: surface treatment module
140: unloading unit 210: vacuum suction plate

Claims (14)

Mounting a light guide plate on a plate support; And
And treating the surface of the light guide plate by modifying the surface of the light guide plate by setting the processing speed of the plasma to be 80 mm / sec or more, and performing the plasma treatment at least twice.
And thermal deformation of the light guide plate is prevented during plasma treatment on the surface of the light guide plate.
The method of claim 1,
The plasma treatment is a surface modification treatment method of a light guide plate, characterized in that performed by installing two or three sets of plasma modules in parallel.
Mounting a light guide plate on a plate support;
Cooling the light guide plate to lower the surface temperature of the light guide plate; And
Plasma treatment of a surface of the light guide plate having a lower surface temperature to modify the surface of the light guide plate;
And thermal deformation of the light guide plate is prevented during plasma treatment on the surface of the light guide plate.
The method of claim 3, wherein
The cooling of the light guide plate is performed by spraying a cooling gas onto the surface of the light guide plate by a cooling means immediately before the plasma treatment.
Mounting a light guide plate on a pre-cooled plate support; And
Plasma treating the surface of the light guide plate to modify the surface of the light guide plate;
And thermal deformation of the light guide plate is prevented during plasma treatment on the surface of the light guide plate.
The method of claim 5, wherein
The pre-cooling of the plate support is performed by spraying a cooling gas on the surface of the plate support with a cooling means.
The method according to claim 4 or 6,
The cooling is,
And the temperature of the cooling gas or the temperature of the reaction chamber during the cooling is lower than the surface temperature of the light guide plate during the plasma treatment.

Mounting a light guide plate on a plate support; And
Plasma treatment of the surface of the light guide plate while maintaining plasma heat at 30 ° C. or lower, thereby modifying the surface of the light guide plate;
And thermal deformation of the light guide plate is prevented during plasma treatment on the surface of the light guide plate.
Mounting a light guide plate corresponding to each of the vacuum suction plates on a plate support having one or more vacuum suction plates attached to a lower surface thereof;
Vacuum suction of a central portion of the light guide plate with the vacuum suction plate; And
Plasma treatment of the surface of the light guide plate having the central portion vacuum-adsorbed to modify the surface of the light guide plate;
And thermal deformation of the light guide plate is prevented during plasma treatment on the surface of the light guide plate.
The method according to any one of claims 1, 3, 5, 8 and 9,
The plasma treatment
In the plasma surface treatment apparatus having a surface treatment module surface plasma treatment method characterized in that the surface of the light guide plate is modified to be hydrophobic by spraying the plasma to the surface of the light guide plate through the intake and exhaust portion of the surface treatment module.
11. The method of claim 10,
The plasma is a surface modification treatment method of the light guide plate, characterized in that using a fluorine-based gas as the processing gas.
Mounting a light guide plate on a plate support; And
And modifying the surface of the light guide plate by performing plasma treatment on the surface of the light guide plate while maintaining the surface temperature of the light guide plate at 25 ° C. or less.
And thermal deformation of the light guide plate is prevented during plasma treatment on the surface of the light guide plate.
13. The method of claim 12,
The light guide plate is pre-cooled immediately before the plasma treatment, the light guide plate is cooled by a plate support pre-cooled during the plasma treatment, or the light guide plate is cooled by plasma heat maintained at 30 ° C. or lower during the plasma treatment, and thus the light guide plate is The surface modification treatment method of the light guide plate characterized by the above-mentioned.
14. The method according to claim 8 or 13,
And the plasma hot air is maintained by heat-exchanging plasma gas in the plasma nozzle through a plasma nozzle plate cooled to 20 ° C. or lower by a cooling means.

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