KR101231301B1 - Wet-type dust and waste gas collection apparatus having fine droplet spray and collection devices - Google Patents

Abstract

The wet dust and waste gas dust collector equipped with the fine droplet spraying and droplet collecting device according to the present invention is a wet scrubber apparatus for treating waste gas generated in a semiconductor factory, research institute, and university laboratory, the upper side having a gas outlet and a lower side. A scrubber body having a wastewater outlet and having a waste gas inlet at a side portion proximate a lower side thereof; A fine droplet injection device installed at the waste gas inlet and spraying fine droplets having a size of several to several tens of microns to the incoming waste gas; A cooling plate installed on the side wall surface of the body; At least one cooling device for cooling the cooling plate; And an excitation unit having the cooling plate.

Description

Wet-type dust and waste gas collection apparatus having fine droplet spray and collection devices}

BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a scrubber device, and more particularly, to a wet dust and waste gas dust collecting apparatus for treating waste gas emitted from a semiconductor device manufacturing industry and related laboratories and universities.

The waste gas discharged from the semiconductor device manufacturing process includes various harmful gases and nano-sized dusts, and dust and waste gas dust collectors capable of collecting them for the safety of experimenters and workers should be installed. Particularly, in a laboratory studying a semiconductor device manufacturing process, waste gases are generated in the same manner as an industrial facility in processes such as deposition and etching, and various harmful elements and nano-sized dusts are mixed in these waste gases. Neglecting dust collection will seriously affect the health of individual researchers, as well as environmental pollution.

In addition, various dusts having the size of nanoparticles in the waste gas are accumulated in the exhaust pipe during the discharge into the exhaust pipe, causing a need for periodic repair and repair of the exhaust pipe and reducing productivity.

Since such nano-sized dust particles and harmful gases are difficult to be effectively removed by a general scrubber device, a scrubber device having a complicated structure and a bulky structure must be manufactured in order to process waste gas harmless to a human body and the environment. There is a problem.

As an example of such a large scrubber apparatus, a wet scrubber apparatus is proposed. The wet scrubber apparatus is a method used to process waste gases emitted from semiconductor device manufacturing or various chemical industries, in which a large amount of liquid is injected into the waste gas to absorb harmful gas and dust in the liquid, and then the injection liquid is discharged from the lower portion of the scrubber. To be discharged.

Such a wet scrubber device according to the related art does not effectively react harmful substances and dust in the waste gas, and thus, a plurality of spray nozzles and chambers should be installed inside the scrubber body, and a large amount of liquid sprayed through the spray nozzle is ensured. And since the use of the discharged and recovered liquid has to be treated again, there is a problem such as the limitation of the installation site due to the enlargement of the process and apparatus.

The present invention has been made in view of the above problems, firstly, to minimize the amount of liquid sprayed from the wet scrubber, and second, to refine the droplets of the sprayed liquid into droplets of several to several tens of microns in size and the waste gas and spray droplets; 3) Wet dust and waste gas dust collector with microdroplet spray and drop collector with improved structure for easy installation in small lab of university as well as factory by miniaturizing the size of scrubber device The purpose is to provide a device.

The wet dust and waste gas dust collector equipped with the fine droplet spraying and droplet collecting device according to the present invention for achieving the above object is a wet scrubber apparatus for treating waste gas generated in a semiconductor-related factory, research institute and university laboratory. A scrubber body having a gas outlet at an upper side and a wastewater outlet at a lower side, and having a waste gas inlet at a side portion close to the lower side; A fine droplet injection device installed at the waste gas inlet and spraying fine droplets having a size of several to several tens of microns to the incoming waste gas; A cooling plate installed on the side wall surface of the body; At least one cooling device for cooling the cooling plate; And an excitation unit having the cooling plate.

The cooling plate has at least two plate-like members arranged to have a lower inclination angle at different heights. The cooling plate is a condensing device for condensing moisture. The cooling plate has a metal or ceramic material having excellent thermal conductivity and corrosion resistance. By processing, it may be provided on the inner wall of the scrubber body to be inclined downward within the angle range of 30 to 150 °, to increase the contact area with the waste gas and to allow the condensed liquid to fall to the bottom of the scrubber body by free fall.

According to another embodiment, the cooling plate may be installed to be perpendicular to the inner wall surface of the scrubber body, the mesh screen having a gap formed by 20 to 700 mesh using a metal or ceramic material having excellent thermal conductivity and corrosion resistance.

According to another embodiment, the cooling plate may be configured by installing a mesh screen and a flat plate together.

The excitation unit is preferably provided with an ultrasonic vibration device.

In the fine droplet injection device, injecting fine droplets having a size of several tens of microns to the waste gas, one or more ultrasonic vibrators are installed around the waste gas inlet pipe, and operate at a frequency of 30 kHz to 30 MHz to spray fine droplets. Do.

Further comprising a control unit for controlling the cooling device and the excitation unit, The control unit, Temperature sensing sensor for sensing the temperature of the cooling plate; A temperature control unit controlling a cooling temperature of the cooling device; And a frequency controller for controlling the frequency of the excitation unit.

On the other hand, it is also possible to configure the wet dust and waste gas dust collector by connecting two or more wet dust and waste gas dust collector in series as described above in series.

According to the present invention as described above, it is possible to effectively remove the harmful gas and nano dust in the waste gas discharged from the small scale laboratory of the semiconductor manufacturing plant, the relevant research institute and the university with only a small scale device. Therefore, it can be installed in very narrow space.

Moreover, the manufacturing cost of the manufacturing apparatus of a scrubber can be reduced. That is, conventionally, a large amount of water must be used to remove harmful elements or dust in the waste gas, and the scale of the scrubber is increased, but according to the present invention, a small amount of water less than 1/10 of the existing scrubber is used. This is because harmful elements and dust can be effectively removed.

In addition, since a powerful ultrasonic vibrator is connected to the cooling plate, the liquid or dust condensed on the cooling plate can be forcibly dropped, so that periodic cleaning or cleaning of the scrubber for removing foreign matters from the cooling plate is unnecessary.

1 shows a dust and waste gas dust collecting device having two cooling plates, a cooling device and an excitation unit;
2 is a plan sectional view of FIG.
3 and 4 are views showing a state in which only three cooling plates are installed, with the cooling device and the excitation unit removed;
5 and 6, in place of the cooling plate, a mesh screen is installed, these mesh screen is a view showing a state connected to the cooling device,
7 and 8 are views showing a state in which three cooling plates and a cooling device are installed so as to correspond to the respective cooling plates;
9 is a plan sectional view showing a state in which an excitation unit is installed on a mesh screen;
10 is a view showing an extract of a state in which a unit having a cooling device is installed on a cooling plate;
FIG. 11 is a view showing a state in which all units having a cooling device are installed on a mesh screen; FIG.
12 is a plan sectional view showing that waste gas is introduced from two waste gas inlets so as to be 90 ° to each other;
FIG. 13 is a view illustrating a wet dust and waste gas dust collecting device having both a cooling plate and a mesh screen at the same time, and having both a cooling unit and a unit having a cooling unit.

In the wet dust and waste gas dust collector according to the present invention, in order to effectively remove harmful gas elements and nano-sized dust particles in the waste gas, the liquid is sprayed into the air by ultrasonic waves in the order of several to several tens of microns, and the micro gas is contacted with the waste gas. After the harmful droplets and dust are absorbed by the droplets, the dew point principle allows the droplets of micron units floating in the waste gas to pass through a cooled metal plate or metal mesh to condense into liquids. Remove

The reason for spraying micron-sized droplets is to allow harmful elements and nano-sized dust in the waste gas to be absorbed in sufficient contact with the fine droplets. Thus, droplets that have absorbed harmful elements and dust in the waste gas remain in the gaseous state because they remain in the order of a few microns. As such, the droplets of the micron unit absorbing the dust are released through the exhaust pipe unless they are removed through a special treatment, so that the effect of the waste gas treatment cannot be obtained. The micron unit droplets that absorb the dust are required to have a separate device to collect again.

Since the droplets sprayed in microns are similar to the vapor state, the wet dust and waste gas dust collector according to the present invention contacts the waste gas containing the spray droplets by contacting the cooling plate cooled below the dew point, thereby providing water vapor containing the dust. Condensation in the form of dew removes harmful gases and dust trapped in the droplets. That is, the liquid condensed on the cold plate is collected by falling into the discharge tank of the lower end by free fall.

However, when some foreign matter remains on the cooling plate and accumulates, the cooling capacity is deteriorated and wet dust and waste gas dust collectors need to be repaired. Therefore, a powerful ultrasonic vibrator is installed on the cooling plate to remove the foreign matter remaining on the cooling plate. The condensation material is dropped by contact and vibration of the cold plate at tens of kHz. Since foreign matter accumulated on the surface of the cooling plate can be dropped by ultrasonic vibration method, it is unnecessary to periodically repair or clean the wet dust and waste gas dust collector generated by the accumulation of foreign matter.

Hereinafter, the wet dust and waste gas dust collector according to the present invention having the above-described characteristics will be described with reference to the drawings.

1 is a view schematically showing a wet dust and waste gas dust collector according to an embodiment of the present invention.

As shown, the wet dust and waste gas dust collector includes a scrubber body 100, a fine droplet injection device 200, a cooling plate 300, a cooling device 400, and an excitation unit 500.

The scrubber body 100 is provided to have a substantially cylindrical shape, the gas outlet 110 is formed on the upper side, the waste water outlet 120 is formed on the lower side. In addition, a waste gas inlet 130 is formed at a position adjacent to the bottom surface of the side wall surface of the body 100.

The fine droplet injection device 200 is installed at the waste gas inlet 130 to spray fine droplets having a size of several to several tens of microns to the incoming waste gas. The fine droplet injector 200 sprays fine droplets by operating at a frequency of 30 kHz to 30 MHz by installing one or more ultrasonic vibrators around the waste gas inlet pipe when injecting fine droplets of several to several tens of microns to the waste gas. It is desirable to.

The size and number of ultrasonic vibrators installed in the fine droplet injection device 200 should be adjusted according to the size of the scrubber body 100 and the amount of waste gas discharged. The sprayed water vapor is mixed with the introduced waste gas and then contacted the cooling plate 300 cooled below the dew point of the waste gas.

The cooling plate 300 is installed on the side wall surface of the body 100, and various embodiments of the present invention are determined according to the arrangement structure thereof.

The cooling plate 300 is provided with at least two plate-like members 310 and 320 disposed to have a downward inclination angle, as shown in FIGS. 1 and 2. Preferably, as shown in FIG. 2, each of the plate members 310 and 320 may be provided to face each other. In addition, only the gas flowing in order to be discharged to the gas outlet 110 to obstruct the flow path of the flowing air, but not completely blocked. The cooling plate 300 is a condensing device for condensing water, and preferably, a metal or ceramic material having excellent thermal conductivity and corrosion resistance is processed into a plate shape. In addition, the cooling plate 300 is installed on the inner wall of the scrubber body 100 to be inclined downward at an angle of 30 to 150 ° to widen the contact area with the waste gas and to allow the condensed liquid to fall down by the free fall to the bottom of the scrubber body 100. Prepared.

Meanwhile, instead of the cooling plate 300, the mesh screen 600 having a gap formed between 20 meshes and 700 meshes using a metal or ceramic material having excellent thermal conductivity and corrosion resistance is perpendicular to the inner wall surface of the scrubber body 100. It may be installed, or may be configured by installing the mesh screen 600 and the cooling plate 300 together. The arrangement and configuration of the cold plate and / or the mesh screen will be described later in more detail.

Cooling device 400 is to cool the cooling plate 300, at least one is preferably provided. The cooling device 400 may be configured using a thermoelectric element having a small volume and easy operation, and when a plurality of cooling plates 300 are used, the cooling device 400 is individually for each cooling plate 300. Is preferably installed. In addition, it is preferable to have a heat dissipation fin 410 for dissipating heat transferred from the cooling plate 300.

The excitation unit 500 has the cooling plate, and can be deleted if necessary. The excitation unit 500 is preferably provided with an ultrasonic vibration device, in this case, it may be composed of an ultrasonic vibrator 510 and a booster 520.

On the other hand, as shown in Figure 1, the control unit 700 for controlling the cooling device 400 and the excitation unit 500 may be further included, the control unit 700 is the cooling plate 300 It may be provided with a temperature sensor and a temperature control unit for sensing the temperature of the temperature control unit, and a frequency control unit for controlling the frequency of the excitation unit 500.

On the other hand, it is also possible to configure the wet dust and waste gas dust collector by connecting two or more wet dust and waste gas dust collector in series as described above in series.

The structure and operation of each embodiment of the wet dust and waste gas dust collector according to the present invention configured as described above will be described in more detail with the accompanying drawings.

Example 1

As described above, the microdroplet spray apparatus 200 using ultrasonic waves is mounted on one side surface of the scrubber body 100, and the liquid is sprayed to a size of several tens of microns to maximize the reaction with harmful elements and dust in the waste gas. On the other hand, the liquid sprayed to a size of several microns unit is the same as the water vapor state, the conventional wet treatment apparatus can not collect the sprayed vapor back to the liquid state and discharged. That is because the liquid crystal in the sprayed vapor state is discharged to the exhaust pipe with the flow of waste gas.

Therefore, in the present invention, by installing the cooling plate 300 and the cooling device 400 to condense moisture in the scrubber body 100 to collect the water droplets of several to several tens of microns sprayed into the waste gas separately, the The droplets impinged on the cooling plate 300 having a relatively low temperature by the cooling device 400 may be condensed on the surface of the cooling plate 300. The condensed liquid is discharged to the bottom of the scrubber body (100).

On the other hand, by installing the excitation unit 500 provided with an ultrasonic vibration device on the outer wall of the scrubber body 100 so as to effectively separate the condensed water from the cooling plate 300, the cooling plate 300 condensed with water as described above ) By applying ultrasonic vibration booster 520 to the vibration plate periodically. On the other hand, the fine droplet spraying device 200, by spraying the liquid in the unit size of several tens to several microns using an ultrasonic vibrator, as described above, the size of the sprayed spray when spraying the liquid using the ultrasonic wave As shown, it is inversely proportional to the frequency of the ultrasonic vibrator. Therefore, by driving the frequency of the oscillator from several tens of kHz to several tens of MHz, the droplet size can be controlled to several tens to tens of microns.

(T: surface tension of liquid, ρ: density of liquid, f: frequency)

Meanwhile, the dew point is a temperature at which moisture condenses into a liquid when moisture in the air is saturated, and the higher the humidity in the air, the higher the dew point. In the present invention, by lowering the air mixed with the waste gas and sprayed water vapor to a specific temperature or less, by condensing the water in a liquid state, it is possible to collect and remove harmful elements and nano dust in the liquid state. For example, in the case of waste gas having a relative humidity of 70%, the dew point is about 14.2 ° C when the waste gas temperature is 20 ° C. Therefore, when the waste gas is in contact with the cooling plate 300 cooled below the appropriate dew point, the moisture in the waste gas may be condensed into a liquid.

In more detail, a method of condensing moisture is provided by installing a metal cooling plate 300 cooled below a dew point in a path through which waste gas containing a micron unit of water vapor flows in the scrubber body 100. When the waste gas is brought into contact with the cooling plate 300 or the mesh screen 600, fine droplets contacted with these are condensed thereon, and the condensed water is collected in a drainage tank at the bottom of the scrubber body 100 by free fall. To be discharged.

At this time, the cooling plate 300 is provided in various shapes to maximize contact with the waste gas. In this way, if the area of the cooling plate 300 in contact with the waste gas is designed as large as possible, the condensation efficiency can be increased, and the size of the cooling device can be reduced.

As shown, the cooling plate 300 may be designed in various ways to widen the area in contact with the waste gas and to allow the condensed liquid to fall to the lower end by free fall. 3 and 4, the cooling device 400 is removed, the three planar metal plate (310 ', 320', 330 ') is inclined to the inner wall surface of the scrubber body 100, the installation They are arranged at intervals of 120 ° with different heights. The angle of inclination with the inner wall surface of the scrubber body can be adjusted in the range of 30 to 150 degrees. The number of cooling plates 300 may be adjusted according to the diameter of the scrubber body 100 and the amount of waste gas to be treated.

[Example 2]

5 and 6 show that the mesh screen 600 made of a metal or ceramic material having good thermal conductivity and excellent corrosion resistance is used as a substitute for the cooling plate 300. The mesh screen 600 has a ring-shaped screen body 610 corresponding to the inner circumferential surface of the scrubber body 100 to form a mesh using a wire member or the like. At this time, the hole (m) size of the mesh can be used from 700 mesh to 20 mesh. The larger the number of meshes has the advantage of more contact with the waste gas, but because there is a problem that obstructs the flow of the waste gas, the size of the hole m of the mesh screen 600 needs to be adjusted according to the flow rate of the waste gas.

As shown, the mesh screen 600 is connected to the cooling device 400 installed on the outer wall of the scrubber body 100 and cooled. At this time, as shown in Figure 6, by providing a plurality of cooling device 400, it is possible to improve the cooling performance of the mesh screen 600. The operation principle according to the second embodiment is not significantly different from the first embodiment described above, and thus redundant description is omitted.

[Example 3]

FIG. 7 and FIG. 8 schematically show three circular cooling plates 300 and a case where the cooling unit 400 is installed on these cooling plates 300.

As shown, the cooling unit 400 uses a thermoelectric element that is simple to install and easy to drive as a cooling device. The cooling part of the cooling device 400 is installed toward the inside of the scrubber body 100 to be installed in the scrubber body 100, the cooling plate 300, the heat sink (heatsink, 410) is the outside of the scrubber body 100 Face up. On the other hand, the cooling device 400 is preferably a thermoelectric element, but if necessary using the cooling device or cryogenic pump (cryogenic pump) and the like can have the same effect. On the other hand, the thermoelectric element used in the cooling unit 400, it is necessary to adjust the number and the amount of applied current according to the size of the scrubber body 100 and the amount of waste gas.

Meanwhile, as illustrated in FIGS. 9 and 10, the excitation unit 500 may be further installed in the wet dust and waste gas dust collectors according to the first to third embodiments. That is, the liquid condensed on the cooling plate 300 or the mesh screen 600 falls into the liquid collecting device (discharge tank) installed at the bottom by free fall, but is separated from some cooling plate 300 or the mesh screen 600. There may be foreign matter remaining. In order to remove such foreign matter, it is preferable to install an excitation unit 500 provided with an ultrasonic vibration device capable of applying strong vibration to the cooling plate 300 and the mesh screen 600. The excitation unit 500 includes an ultrasonic vibrator 510 and a booster 520. The booster 520 forcibly separates the condensed liquid and dust from the cooling plate 300 or the mesh screen 600 by vibrating the cooling plate 300 or the mesh screen 600 at a frequency of several kHz to several tens of kHz. do.

By using the excitation unit 500 having a powerful ultrasonic vibrator, the cooling plate 300 or the mesh screen 600 is periodically vibrated, thereby constantly cooling the cooling plate 300 or the mesh screen 600. At the same time, it is possible to obtain an effect of preventing droplets and dust from accumulating on the cooling plate 300 or the mesh screen 600. The moisture condensed on the cooling plate 300 or the mesh screen 600 as described above is removed to the discharge tank together with the dust and harmful gas in the waste gas, and the purified air is sent to the gas outlet 110.

Example 4

In the wet dust and waste gas dust collector according to the present invention, the ultrasonic microdroplet spray device and the cooling plate 300 or the mesh screen 600 for water condensation may be combined in various forms. FIG. 11 shows a mesh screen 600 made of a metal material having excellent thermal conductivity and corrosion resistance as in the third embodiment, which is designed as a form of water and cooling parts for moisture condensation.

In this case, the mesh screen 600 has a 200 mesh, the diameter of the waste gas inlet 130 is 200mm, the inner diameter of the scrubber body 100 is 300mm, the height of the scrubber body 100 is designed to be 500mm. . The above dimensions are changeable depending on the flow rate of the waste gas introduced.

As shown in FIG. 12, a fine droplet spraying device 200 composed of two ultrasonic water vapor spraying devices (2.4MHz) disposed at a 90 ° interval to the waste gas inlet 130 is installed. Waste gas mixed with water vapor by the fine droplet spraying device 200 is introduced into the scrubber body 100.

Waste gas mixed with the introduced water vapor passes through a metal mesh screen 600 installed at an upper portion thereof, and the metal mesh screen 600 has a cooling device 400 installed outside the scrubber body 100. Since the waste gas passing through the mash screen 600 is cooled below the dew point temperature, the water in the waste gas condenses as a liquid on the mesh, and when condensed to a certain size, the free gas falls through the four thermoelectric elements. It will fall to the discharge tank 101 by.

On the other hand, the excitation unit 500 is applied to the metal mesh screen 600 by vibrating, dropping the remaining liquid is not falling well due to free fall of the liquid condensed on the mesh screen 600. Preferably, the condensed liquid is forcibly dropped by collecting the condensed liquid by vibrating the frequency of about 28 kHz and collected in the drain 101 of the lower end. The vibrating unit 500 periodically vibrates the cooled mesh screen 600 with ultrasonic waves to prevent the metallic mesh screen 600 from being blocked by condensed water and to prevent foreign matter such as droplets and dust from accumulating. Thus, the cooling capacity of the mesh screen 600 is continuously maintained.

[Example 5]

13 shows a coupling structure of Example 1 and Example 4 as another embodiment of the present invention.

That is, the basic configuration is the same as those of the first and fourth embodiments, but as a device for condensation of water, the cooling plate 300 and the cooled mesh screen 600 are simultaneously provided. That is, two flat plate cooling plate 300 and the metal mesh screen 600 is disposed, the waste gas containing the water flowing from the waste gas inlet 130, so that the downward inclination angle is 60 ° first It collides with the surface, colliding with the two planar cooling plates 300 arrange | positioned. The planar cooling plate 300 allows water vapor and waste gas to be more uniformly mixed and simultaneously performs the function of the cooling plate to condense moisture primarily. The waste gas that has risen up through the planar cooling plate 300 contacts the metal mesh screen 600 to further condense moisture. The water condensed as above falls into the sump by free fall.

At this time, the planar cooling plate 300 and the mesh screen 600 are cooled by the cooling devices 400a, 400b, 400c provided separately, and with this, an excitation for removing moisture and foreign matter that does not fall freely. Each of the units 500a, 500b, 500c is provided with one thermoelectric cooling element. The number of flat cooling plates 300 and the number of thermoelectric elements may be adjusted according to the amount of waste gas and the size of the scrubber body 100. The temperature of the cooling plate 300 is controlled by controlling the applied voltage and the current according to the specifications of the cooling element.

On the other hand, although not shown, it is also possible to use a series of wet dust and waste gas dust collector configured as described above in series. In this case, although the volume of the device is somewhat increased, there is an advantage that it is possible to reliably remove fine contaminants.

The technical object of the present invention is not limited to the above-mentioned technical objects and other technical objects which are not mentioned can be clearly understood by those skilled in the art from the following description will be.

100; Scrubber body 200; Fine droplet spraying device
300; Cold plate 400; Chiller
500; Excitation unit 600; Mash screen
700; The control unit

Claims (9)

In the wet dust and waste gas dust collecting device for processing waste gas generated in semiconductor-related factories, research institutes and university laboratories,
A scrubber body having a gas outlet at an upper side and a wastewater outlet at a lower side, and having a waste gas inlet at a side portion close to the lower side;
A fine droplet injection device installed at the waste gas inlet and spraying fine droplets having a size of several to several tens of microns to the incoming waste gas;
A cooling plate installed on the side wall surface of the body;
At least one cooling device for cooling the cooling plate;
An excitation unit having said cooling plate; And
And a control unit for controlling the cooling device and the excitation unit.
The control unit includes:
A temperature sensor for sensing a temperature of the cooling plate;
A temperature control unit controlling a cooling temperature of the cooling device; And
Wet dust and waste gas dust collecting device comprising a; frequency control unit for controlling the frequency of the excitation unit. Wet dust and waste gas dust collector, characterized in that.
The method of claim 1, wherein the cooling plate,
Wet dust and waste gas dust collector, characterized in that at least two or more plate-like members arranged to have a lower inclination angle are arranged at different heights.
The method of claim 1, wherein the cooling plate,
This is a condensing device that condenses moisture. It is a metal or ceramic material with excellent thermal conductivity and corrosion resistance. It is installed on the inner wall of the scrubber to be inclined downward at an angle of 30 ° to 150 ° to widen the contact area with waste gas, and the condensing liquid is scrubber. Wet dust and waste gas dust collector, characterized in that to fall by free fall to the bottom of the body.
The method of claim 1, wherein the cooling plate,
A wet dust and waste gas dust collector comprising a mesh screen having a gap formed between 20 meshes and 700 meshes using a metal or ceramic material having excellent thermal conductivity and corrosion resistance so as to be perpendicular to the inner wall of the scrubber body.
The method of claim 3, wherein the cooling plate,
Wet dust and waste gas dust collector, characterized in that the mesh screen and the plane plate installed together.
The method of claim 1,
The excitation unit is a wet dust and waste gas dust collector, characterized in that the ultrasonic vibration device.
According to claim 1, The fine droplet injection device,
In spraying fine droplets of several to several tens of microns in the waste gas, at least one ultrasonic vibrator is installed around the waste gas inlet pipe and operated at a frequency of 30 kHz to 30 MHz to spray fine droplets. Device.
delete A wet dust and waste gas dust collector, characterized in that two or more of the above-described wet dust and waste gas dust collectors described in any one of claims 1 to 7 are connected in series.

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