KR101229755B1

KR101229755B1 - Pump Management System

Info

Publication number: KR101229755B1
Application number: KR1020100095932A
Authority: KR
Inventors: 김성동; 김영환; 한상수
Original assignee: 김성동
Priority date: 2010-10-01
Filing date: 2010-10-01
Publication date: 2013-02-05
Also published as: KR20120034392A

Abstract

The present invention relates to a pump control system.
Pump control system according to an embodiment of the present invention is a vacuum pump used for the process of manufacturing a semiconductor, an LCD in a vacuum state at least one or more of the vacuum pump unit, the vacuum pump is disposed in the operation of the vacuum pump unit A vacuum pump sensing unit that senses various changes occurring in real time and transmits sensing data on the state of the sensed vacuum pump in real time, receives sensing data from a vacuum pump sensing unit, analyzes the sensing data, and analyzes the state of the vacuum pump. Display the data in real time and receive analysis data from the vacuum pump control unit and the vacuum pump control unit which transmits the analyzed data, and compare, store and display the reference data preset by the user and the analysis data. Include the central management server unit to notify the user if the error is out of range It is.

Description

Pump Control System

The present invention relates to a pump control system.

In general, a conventional vacuum pump operates for 24 hours to maintain a predetermined vacuum level of nine pumps per chamfer. If one of the booster pumps fails, the vacuum degree drops and the remaining pumps are also loaded with a lifetime. Shrinkage occurred.

In addition, even if the booster pump is broken, it is not displayed, causing inconveniences that the user must check every day while turning the line, and the equipment utilization rate is lowered.

It is an object of the present invention to provide a pump control system that can more efficiently manage the vacuum pump used in the process of manufacturing semiconductors and LCDs in a vacuum state and improve the convenience of use.

Pump control system according to an embodiment of the present invention is a vacuum pump used for the process of manufacturing a semiconductor, an LCD in a vacuum state at least one or more of the vacuum pump unit, the vacuum pump is disposed in the operation of the vacuum pump unit A vacuum pump sensing unit that senses various changes occurring in real time and transmits sensing data on the state of the sensed vacuum pump in real time, receives sensing data from a vacuum pump sensing unit, analyzes the sensing data, and analyzes the state of the vacuum pump. Display the data in real time and receive analysis data from the vacuum pump control unit and the vacuum pump control unit which transmits the analyzed data, and compare, store and display the reference data preset by the user and the analysis data. Include the central management server unit to notify the user if the error is out of range It is.

Pump control system according to an embodiment of the present invention can easily control the vacuum pump used in the process of manufacturing a semiconductor, LCD in a vacuum state has the effect of more efficient remote management and operation of the vacuum pump have.

In addition, the pump control system according to an embodiment of the present invention by displaying the state of the vacuum pump in real time, through which the user can easily grasp the state of the vacuum pump through the user stability and convenience of operation and maintenance of the vacuum pump There is an effect that sex can be improved.

In addition, the pump control system according to an embodiment of the present invention in real time by grasping the state of the vacuum pump used in the process of manufacturing a semiconductor, LCD in a vacuum state, to prepare in advance before the abnormality of the vacuum pump occurs At the same time, faulty vacuum pumps can be easily found, further improving management efficiency.

1 and 2 are for explaining a pump control system according to an embodiment of the present invention.
3 is for explaining a vacuum pump control unit according to an embodiment of the present invention.
4 is for explaining a first display unit according to an embodiment of the present invention.
5 is for explaining the central management server according to an embodiment of the present invention.

Hereinafter, exemplary embodiments of the present invention will be described in detail with reference to the accompanying drawings. The details of other embodiments are included in the detailed description and drawings. BRIEF DESCRIPTION OF THE DRAWINGS The advantages and features of the present invention and the manner of achieving them will become apparent with reference to the embodiments described in detail below with reference to the accompanying drawings. Like reference numerals refer to like elements throughout.

1 and 2 are for explaining a pump control system according to an embodiment of the present invention, Figure 3 is for explaining a vacuum pump control unit according to an embodiment of the present invention, Figure 4 is one of the present invention A first display unit according to an embodiment is described, and FIG. 5 illustrates a central management server unit according to an embodiment of the present invention.

1 to 5, the pump control system 100 according to an embodiment of the present invention includes a vacuum pump unit 110, a vacuum pump sensing unit 120, a vacuum pump control unit 130, and a central management server unit ( 140).

In the vacuum pump unit 110, at least one or more vacuum pumps used in a process of manufacturing a semiconductor, an LCD, or the like are disposed in a vacuum. The vacuum pump unit 110 may include a first vacuum pump (Pump1) to 120th vacuum pump (Pump120).

The vacuum pump sensing unit 120 senses various changes generated in the vacuum pump that is disposed and operated in the vacuum pump unit 110 in real time, and senses the sensed vacuum pumps. This is to transmit the sensing data about the state in real time. The vacuum pump sensing unit 120 checks in real time whether the vacuum pump is run or down, and checks the power of the vacuum pump and the current of the vacuum pump. Sensing and transmitting the vibration of the current and the vacuum pump. Here, the vacuum pump is run, the vacuum pump is normally operated, and the vacuum pump is down, the vacuum pump is stopped. As such, the vacuum pump sensing unit 120 senses or checks the vacuum pump in real time, so that the state of the vacuum pump can be easily recognized. Accordingly, it is possible to easily grasp the state change of the vacuum pump (Pump) through the vacuum pump sensing unit 120 can efficiently check whether the vacuum pump (Pump) is operating normally or abnormally.

At this time, the vacuum pump sensing unit 120 is disposed in a one-to-one correspondence with the vacuum pump (Pump) that is disposed and operated in the vacuum pump 110. That is, when the first vacuum pump Pump1 to the 120th vacuum pump Pump120 are disposed, the vacuum pump sensing unit 120 also includes the first vacuum pump Pump1 sensing unit 120 to the 120th vacuum pump sensing unit 120. It is configured to include 120. As such, the vacuum pump sensing unit 120 is formed as many as the number of the vacuum pumps, so that the state of each vacuum pump can be confirmed more quickly and accurately. Therefore, it is possible to prevent the vacuum pump from being damaged.

The vacuum pump controller 130 receives sensing data from the vacuum pump sensing unit 120, displays the state of the vacuum pump in real time while analyzing the sensing data, and transmits the analyzed data. . As shown in FIG. 3, the vacuum pump controller 130 includes a first control communication unit 131, a vacuum pump analysis unit 133, a first display unit 135, and a second control communication unit 139. Can be configured.

The first control communication unit 131 receives the sensing data from the vacuum pump sensing unit 120 through wireless or wired lines. The first control communication unit 131 may include Bluetooth, ZigBee, RS-232, and the like. Accordingly, the first control communication unit 131 receives the sensing data in real time from the vacuum pump sensing unit 120 using Bluetooth, ZigBee, RS-232, etc., and provides the sensing data to the vacuum pump analyzing unit 133. .

The vacuum pump analyzer 133 receives sensing data through the first control communication unit 131 and analyzes the sensing data in real time. The vacuum pump analysis unit 133 is provided with the sensing data to quickly perform the power of the vacuum pump, the current of the vacuum pump, and the vibration of the vacuum pump in real time. Can be analyzed. This analysis makes it easy to check whether the vacuum pump is Run or Down.

The first display unit 135 displays the state of the vacuum pump in real time through the analyzed analysis data. As shown in (a) of FIG. 4, the first display unit 135 has a vacuum pump run or down through sensing data or analysis data provided from the vacuum pump sensing unit 120. It is possible to display the power of the vacuum pump, the current of the vacuum pump, and the vibration of the vacuum pump in real time.

That is, the user may use a plurality of vacuum pumps for manufacturing semiconductors, LCDs, etc. in a vacuum state through a state of a vacuum pump displayed on the first display unit 135. Pump) can be checked. Accordingly, the number of the vacuum pump (Pump) that is abnormal among the plurality of vacuum pump (Pump), the number of the vacuum pump (Dump) down due to a failure, the vacuum pump that is normally run ( You can see how many pumps you have at a glance. Here, the first display unit 135 can identify the broken vacuum pump more easily by displaying or blinking the down vacuum pump in red.

This can efficiently check whether a failure or abnormality occurs due to a broken or abnormal vacuum pump through the displayed analysis data. Accordingly, it is possible to quickly find a countermeasure for a vacuum pump in which a failure or an abnormality occurs. Therefore, it is possible to respond quickly to a vacuum pump in which a failure or an abnormality occurs.

In addition, as shown in FIG. 4B, the first display unit 135 also displays basic information of the vacuum pump. In this way, even the basic information of the vacuum pump (Pump) can be easily identified by the user, so it is easy to know the information on the first vacuum pump (Pump1) to 120 formed in the vacuum (Pump120). Accordingly, it is possible to easily identify and manage the replacement period for the parts that enter the vacuum pump.

In addition, the first display unit 135 is formed of a touch screen that allows a user to directly check or control the information displayed. As such, since the first display unit 135 is formed as a touch screen, the user touches a UI or the like displayed on the first display unit 135, thereby causing a vacuum pump. You can check the status for.

The second control communication unit 139 transmits the analysis data provided through the vacuum pump analysis unit 133 to the central management server unit 140 in real time via wireless or wired. The second control communication unit 139 may include Bluetooth, ZigBee, RS-232, and the like. Accordingly, the second control communication unit 139 receives the analysis data from the vacuum pump analysis unit 133 in real time using Bluetooth, ZigBee, RS-232, etc. and provides them to the central management server unit 140. .

In addition, the vacuum pump control unit 130 may include a locking unit 137 for limiting the use of other users than the user. The lock unit 137 may automatically switch from the unlocked state to the locked state if the first display unit 135 does not operate for a predetermined time. As such, by including the locking unit 137 or by switching to the locked state, it is possible to prevent the loss of sensing data and analysis data by a user other than the user, thereby preventing a safety accident.

At least one vacuum pump controller 130 described above may be formed. That is, the vacuum pump controller 130 controls the vacuum pump sensing unit 120 for each group. For example, the first vacuum pump controller 1 may determine the first vacuum pump Pump1 to the eighth vacuum pump Pump8 from the first vacuum pump sensing unit Interface1 to the eighth vacuum pump sensing unit Interface8. The sensing data is provided, and the second vacuum pump controller (Contoller2) is the ninth vacuum pump (Pump9) to the sixteenth vacuum pump (Pump16) from the ninth vacuum pump sensing unit (Interface9) to the sixteenth vacuum pump sensing unit (Interface16). The sensing data for the ..., ..., the 15th vacuum pump control unit (Contoller15) from the 113th vacuum pump sensing unit (Interface113) to the 120th vacuum pump sensing unit (Interface120) from the 113th vacuum pump (Pump113) The sensing data for the 120th vacuum pump Pump120 may be provided. As such, the vacuum pump control unit 130 controls the vacuum pump sensing unit 120 in groups so that the state of the vacuum pump can be grasped more quickly and accurately, and the response thereto can be made more efficient. Accordingly, the equipment operation rate of the vacuum pump can be improved.

In addition, although not shown, the vacuum pump controller 130 is a network port, a port for input / output setting, an analog input channel, an analog input channel, a PMW output channel, It may include a digital input channel (Digital Input Channal) and a digital output channel (Digital Output Channal).

The central management server 140 receives the analysis data from the vacuum pump control unit 130, compares, stores, and displays the reference data preset by the user and the analysis data, and when the analysis data is out of the error range of the reference data, the user To inform. As shown in FIG. 5, the central management server 140 may include an analysis storage unit 141, a comparison storage unit 143, a second display unit 145, and a notification unit 147. have.

The analysis storage unit 141 receives analysis data from the vacuum pump control unit 130 and stores the analysis data. The analysis storage unit 141 stores the analysis data provided from the vacuum pump control unit 130, but stores all the information on the vacuum pump (Pump) classified by various fields. By classifying and storing analysis data in various fields, a user can efficiently manage or control a plurality of vacuum pumps.

The comparison storage unit 143 compares and analyzes the reference data preset by the user and the analysis data, and stores the comparison data of the comparative analysis. The comparison storage unit 143 classifies and stores the analyzed analysis data by various fields, thereby efficiently knowing the change in the vacuum pump that varies depending on the environment. Accordingly, the user can more efficiently manage or control the plurality of vacuum pumps.

As such, the exchange period for the parts that enter the vacuum pump may be easily identified and managed through analysis data or comparison data stored in the analysis storage unit 141 or the comparison storage unit 143. Accordingly, it is possible to grasp the user in advance the time to replace the parts of the vacuum pump (Pump), it is possible to prevent the failure to the vacuum pump (Pump) in advance.

The second display unit 145 displays the analysis data and the comparison data in real time. The second display unit 145 may display analysis data and comparison data for each time in real time. Accordingly, it is possible to easily grasp how the vacuum pump has changed for each time zone. In addition, since the second display unit 145 has substantially the same configuration, function, and effect as the first display unit 135 described above, a detailed description thereof will be omitted.

The notification unit 147 transmits a warning signal to the user that the user can recognize when the analysis data is out of an error range of the reference data. In this case, the warning signal may be transmitted as an SMS text message to the user's mobile phone, and various methods such as a siren sound and an LED lamp may be used. In other words, the warning signal can be used as long as it can recognize the user.

Here, when the warning signal is generated through the notification unit 147, the first display unit 135 or the second display unit 145 may blink so that the user can recognize it. Accordingly, the user can recognize that an abnormality occurs in the vacuum pump in various ways.

Through the central management server 140 described so far, the user can easily remotely manage or monitor a plurality of vacuum pumps operating in a vacuum state.

The present invention has been described and illustrated in connection with a preferred embodiment for illustrating the principles of the present invention, but the present invention is not limited to the configuration and operation as shown and described.

Rather, those skilled in the art will appreciate that many modifications and variations of the present invention are possible without departing from the spirit and scope of the appended claims.

Accordingly, all such appropriate modifications and changes, and equivalents thereof, should be regarded as within the scope of the present invention.

110: vacuum pump unit 120: vacuum pump sensing unit
130: vacuum pump control unit 131: first control communication unit
133: vacuum pump analysis unit 135: first display unit
137: locking unit 139: second control communication unit
140: central management server unit 141: analysis storage unit
143: comparison storage unit 145: second display unit

Claims

A vacuum pump unit in which at least one vacuum pump is used in a process of manufacturing a semiconductor and an LCD in a vacuum state;
A vacuum pump sensing unit configured to sense, in real time, various changes occurring in the vacuum pump disposed and operated in the vacuum pump unit, and to transmit sensing data about the state of the sensed vacuum pump in real time;
A vacuum pump controller which receives the sensing data from the vacuum pump sensing unit, displays the state of the vacuum pump in real time while analyzing the sensing data, and transmits the analyzed data; And
Central management that receives the analysis data from the vacuum pump control unit compares, stores, and displays the reference data preset by the user and the analysis data, and notifies the user when the analysis data is out of the error range of the reference data. It includes a server;
The vacuum pump control unit
A first control communication unit which receives the sensing data from the vacuum pump sensing unit via wireless or wired;
A vacuum pump analyzer configured to receive the sensing data through the first control communication unit and analyze the sensing data in real time;
A first display unit displaying the state of the vacuum pump in real time through the analyzed data; and
A second control communication unit which transmits the analysis data provided through the vacuum pump analysis unit to the central management server in real time via wireless or wired;
Pump control system comprising a.

delete

The method according to claim 1,
The central management server unit
An analysis storage unit receiving the analysis data from the vacuum pump control unit and storing the analysis data;
A comparison storage unit for comparing and analyzing the reference data preset by the user and the analysis data, and storing comparison data analyzed by comparison;
A second display unit displaying the analysis data and the comparison data in real time; And
A notification unit for transmitting a warning signal to the user that the user can recognize when the analysis data is out of an error range of the reference data;
Pump control system comprising a.

The method according to claim 1,
The vacuum pump sensing unit
And a pump control system that senses and transmits the power of the vacuum pump, the current of the vacuum pump, and the vibration of the vacuum pump while checking in real time whether the vacuum pump is running or down.

5. The method of claim 4,
The first display unit
The real-time display of the run or down state of the state of the vacuum pump, the power of the vacuum pump, the current of the vacuum pump and the vibration of the vacuum pump through the sensing data provided from the vacuum pump sensing unit, and the vacuum Pump control system that also displays basic information about the pump.

6. The method of claim 5,
The first display unit is a pump control system formed of a touch screen that the user can directly check or control the information displayed.

The method of claim 6,
The first display unit
If the analysis data is out of the error range of the reference data pump control system for blinking so that the user can recognize.

The method according to any one of claims 1, 3, 4, 5 and 6,
The vacuum pump control unit includes a locking unit for limiting the use of a user other than the user.

The method of claim 8,
And the vacuum pump controller automatically switches from the unlocked state to the locked state if the first display unit does not operate for a predetermined time.