KR101209516B1 - X-ray analysis apparatus having shutter device - Google Patents

Abstract

PURPOSE: An X-ray inspection device with a shutter device is provided to control an X-ray irradiated region to a constant thickness, thereby irradiating a correct amount of X-ray beams in a correct shape to a correct position. CONSTITUTION: An X-ray inspection device comprises an X-ray generating unit(200), a detection unit, and a shutter device. The X-ray generating unit comprises an X-ray source emitting X-ray beams. The detection unit senses the X-ray beams. The shutter device comprises a fist shutter member(111) and a second shutter member(112) which are arranged on a path of the X-ray beams between the X-ray generating unit and the detection unit. The first and second shutter members are arranged to face each other and transferred in the circumferential direction of a virtual circle around the X-ray source, thereby opening the path of the X-ray beams through a space between the first and second shutter members and irradiating the X-ray beams to a desired range.

Description

X-ray inspection equipment with shutter device {X-RAY ANALYSIS APPARATUS HAVING SHUTTER DEVICE}

The present invention relates to an optical inspection apparatus, and more particularly, to an X-ray inspection apparatus capable of realizing a precise X-ray image in the inspection of a material or the like by irradiating the correct amount of X-ray beam to a desired portion.

In industrial or medical X-ray CT apparatus, a stage is generally disposed between mutually arranged X-ray sources and X-ray detectors, and the X-ray beam is examined by irradiating an object such as an object to be examined or a human body. Perform

The X-ray beam is irradiated onto the subject while the subject is held on the stage. X-ray transmission data is obtained from the X-ray detector each time the stage is rotated at a predetermined minute angle or the X-ray source and the module of the detector are rotated.

1 is a perspective view showing a conventional X-ray CT apparatus.

An X-ray detector 2 is disposed opposite to the X-ray generator 1, and a stage 3 for rotating a subject such as a mechanical device is disposed therebetween. The stage 3 is coupled to a table 5 for seating a subject or the like.

The CT device is a device for acquiring CT images of a large subject, such as an automobile engine, and the distance between the X-ray generator and the subject and the distance between the subject and the detector become important factors for accurate image acquisition. The irradiation range and transmission amount of the X-ray beam will be affected.

In detail, in the X-ray generator 1, the X-ray beam penetrates the subject while reaching the X-ray detector 2 while the radial cross-sectional area is enlarged, and limits the exposure range of unnecessary X-rays so that X-rays can be projected in the correct range. To this end, an X-ray CT apparatus with a predetermined shutter has recently been proposed.

However, in the X-ray CT apparatus having such a shutter, there is a problem that it is difficult to effectively limit the radiation range of the X-rays.

In particular, the members forming a predetermined shutter are made of a material such as lead. Due to the spatial limitations of the CT device, the thickness of the members forming the shutter is limited, and X-rays may be transmitted to each part of the shutter. In addition, the amount of X-rays to be transmitted is changed, and a difference in the amount of X-rays is generated for each part of the object that passes through the subject, thereby causing a problem that it is difficult to obtain an accurate image.

The present invention has been made to solve the above problems, an object of the present invention is to provide an X-ray inspection apparatus having a shutter device having a structure that can effectively vary the irradiation range of the X-ray in the X-ray inspection equipment, depending on the selection There is this.

Another object of the present invention is to provide an X-ray inspection apparatus having a shutter device having a predetermined thickness in consideration of a direction in which X-rays are radiated and having a shutter device capable of preventing undesirable transmission of the X-ray beam.

An X-ray inspection apparatus having a shutter device according to the present invention includes an X-ray generator including an X-ray source from which an X-ray beam is emitted, a detector detecting the X-ray beam, and a path of the X-ray beam between the X-ray generator and the detector. X-rays comprising a shutter device which is disposed in the and comprises a shutter unit which is moved along the circumferential direction of the virtual circle around the X-ray source to limit the range of the X-ray beam is emitted Provide inspection equipment. Therefore, it is possible to perform the inspection of the subject in the exact shape and amount of the X-ray beam emitted in the radial direction.

In addition, the X-ray inspection apparatus having a shutter device of the present invention, the X-ray inspection apparatus having a shutter device, characterized in that the shutter unit is arranged in a predetermined thickness with respect to the radial direction of the virtual circle around the X-ray source. To provide. Therefore, the amount by which the X-ray beam is emitted can be kept constant.

In addition, the X-ray inspection apparatus having a shutter device of the present invention, the first shutter member and the second shutter member disposed on both sides so that the shutter device facing each other, the first shutter member and the second shutter member arc-shaped It provides an X-ray inspection apparatus having a shutter device, characterized in that it comprises a guide for guiding to be transferred to. Therefore, accurate opening and closing of the X-ray beam path is possible.

In addition, the X-ray inspection apparatus having a shutter device of the present invention, the first shutter member and the second shutter member is formed so that the surface facing each other coincide with the radial direction of the virtual circle around the X-ray source on the plane It provides an X-ray inspection apparatus having a shutter device characterized in that. Therefore, since the facing surfaces of the shutter members are kept exactly the same as the direction of emission of the X-ray beam, accurate opening of the X-ray beam is possible.

In addition, in the X-ray inspection apparatus including the shutter device of the present invention, the guide portion supports the upper and lower sides of the first shutter member and the second shutter member, respectively, and the circumferential direction of the imaginary circle centered on the X-ray source is provided. According to the present invention provides an X-ray inspection apparatus having a shutter device characterized in that the upper guide rail and the lower guide rail made of an arc shape. Thus, the conveyance of the shutter members in the correct curved direction is possible.

In addition, the X-ray inspection apparatus having a shutter device of the present invention, the shutter device is coupled to the upper and lower sides of the first shutter member and the second shutter member is the first shutter member for the upper guide rail and the lower guide rail It provides an X-ray inspection apparatus having a shutter device characterized in that it further comprises a plurality of guide rollers for guiding the transfer of the second shutter member. Thus, accurate control is possible while minimizing friction.

In addition, the X-ray inspection apparatus having a shutter device of the present invention, the shutter device has a first piston rod and a second piston rod, one end of which is connected to the first shutter member and the second shutter member, respectively, and horizontally reciprocates; It provides an X-ray inspection apparatus having a shutter device comprising a first driving unit and a second driving unit for horizontally reciprocating the first piston rod and the second piston rod. Therefore, it is possible to determine the exact position by the piston rods.

In addition, the X-ray inspection apparatus having a shutter device of the present invention, the shutter device is coupled to the frame for supporting the guide portion, and to be rotatable in the horizontal direction on both sides of the frame, the first driving portion and the second driving portion Provided is an X-ray inspection apparatus having a shutter device, characterized in that it comprises a drive support member for supporting. Therefore, accurate support of the piston rod and the drive portion is possible, while appropriately coping with the curved transfer of the shutter members.

In addition, in the X-ray inspection apparatus having a shutter device of the present invention, the first piston rod and the second piston rod is connected to the first shutter member and the second shutter member at one end so as to be rotatable in a horizontal direction at a rod connecting portion. The driving unit support member rotates with respect to the frame when the first shutter member and the second shutter member are transported to open and close the X-ray beam path, and the first piston rod and the second piston rod are respectively formed in the first shutter member. Provided is an X-ray inspection apparatus having a shutter device, characterized in that rotating with respect to the shutter member and the second shutter member. Therefore, it is possible to remove the load of the piston rod by the curved transfer of the shutter member and to control the precise position.

In addition, the X-ray inspection apparatus having a shutter device of the present invention, the first driving unit and the second driving unit is connected to the first power providing unit and the second power providing unit coupled to the driving unit support member, respectively, via power transmission means. It provides an X-ray inspection apparatus having a shutter device characterized in that. Therefore, precise control is possible because it is controlled through a separate power providing means.

In addition, the X-ray inspection apparatus having a shutter device of the present invention, the first power providing unit and the second power providing unit provides an X-ray inspection apparatus having a shutter device, characterized in that the synchronous control. Therefore, the center of the space opened by the shutter members provided at both sides can be accurately maintained at the center of the X-ray beam.

The X-ray inspection apparatus including the shutter device of the present invention includes a third shutter member and a fourth shutter member disposed above and below the shutter device so as to face each other, and the third shutter member and the fourth shutter member. It provides an X-ray inspection apparatus having a shutter device characterized in that it further comprises a guide for guiding to be transported in the shape. Therefore, the radiation range of the X-ray beam can be appropriately controlled on the upper, lower, left and right sides.

In addition, the X-ray inspection apparatus having a shutter device of the present invention, wherein the first shutter member and the second shutter member and the third shutter member and the fourth shutter member is disposed in close contact with each other in the front and rear sides arranged. It provides an X-ray inspection apparatus having a. Therefore, leakage of X-rays can be prevented and accurate control is possible.

On the other hand, the X-ray inspection apparatus having a shutter device of the present invention, the X-ray generating unit having an X-ray source for emitting the X-ray beam, are disposed to face on the path of the X-ray beam, are transported in mutually opposite directions therebetween The shutter device is opened so that the X-ray beam is radiated through a space, and a pair of shutter members each having a surface facing each other during the transfer process maintains a radial direction of a virtual circle centered on the X-ray source. It provides an X-ray inspection apparatus having a shutter device, characterized in that.

X-ray inspection apparatus having a shutter device according to the present invention, because the shutter member controls the area irradiated with the X-ray beam with a constant thickness in the direction of travel through the inner surface facing each other, so that the correct amount of X-ray irradiation in the correct position at the correct position It is possible, and the inspection accuracy of the X-ray inspection equipment is significantly improved.

In addition, since the shutter unit moves around the X-ray source to form a part of the arc, there is an effect of accurately controlling the X-ray beam emitted in the radial direction.

1 is a perspective view showing a conventional X-ray inspection apparatus.
2 is a conceptual diagram of an X-ray inspection apparatus having a shutter device of the present invention.
Figure 3 is a plan view showing the X-ray inspection equipment having a shutter device of the present invention.
4 is a front view showing the shutter device of FIG.
5 is a front view of a shutter device according to another embodiment of the present invention.

Hereinafter, with reference to the accompanying drawings will be described in more detail the X-ray inspection apparatus having a shutter device according to the present invention.

2 is a conceptual diagram illustrating an X-ray inspection apparatus having a shutter device according to the present invention.

The present invention basically includes an X-ray generator 200, a detector 300, and a shutter device 100.

The X-ray generator 200 may selectively use a closed type high voltage X-ray generator or an open type X-ray generator, and various wavelengths for measuring the structure of a material by using radio waves. If the equipment can generate electromagnetic waves can be made selectively.

In addition, as long as the detection unit 300 is a device capable of detecting the X-ray beam transmitted from the X-ray generator 200 and transmitted through the subject, various devices may be applied.

When the X-ray generator 200 defines one region where the emission of X-rays is started as the X-ray source 201, the X-ray beam 210 diffuses from the X-ray source 201 radially in cross-sectional area and the subject and the detector ( Toward 300).

The X-ray beam 210 emitted from the X-ray source 201 is preferably provided with a shutter for detecting the exposure of the undesired exposure or the accurate detection unit 300, in this case for implementing the X-ray image of the subject As described above, a problem in which the amount of the X-ray beam is not constant may occur.

Therefore, in the concept of the present invention, the shutter unit 110 of the shutter device 100 is shielded so as to irradiate the X-ray beam 210 in the correct direction, but the shutter unit 110 is a concentric circle centering on the X-ray source 201. Is transported along a portion of and serves to open or close part or all of the path of the X-ray beam (210).

 That is, the shutter unit 110 is disposed on a path of the X-ray beam 210 between the X-ray generator 200 and the detector 300, and is a virtual concentric circle centering on the X-ray source 201. It is transported along to limit the range in which the X-ray beam 210 is emitted.

The shutter unit 110 is transported along the guide unit 130 which is a predetermined transport path, and the guide unit 130 may be preferably made of a rail.

The shutter unit 110 may be guided along the guide unit 130. The shape of the guide unit 130 may form part of a virtual concentric circle centering on the X-ray source 201. Thus, the guide portion 130 is formed in an approximately arc shape.

In the drawing, the shutter unit 110 includes two shutter members as described below. Each shutter member is individually or synchronized, and is moved along the guide unit 130 to face the X-ray beam 210. An example of allowing the X-ray beam 210 to be irradiated in a desired range by opening a path of the present invention is illustrated, but one of the shutter members may be fixed and the other shutter member may be transferred to open and close the path.

The shutter unit 110 may be made of lead, and optionally made of a material capable of shielding X-ray beams or electromagnetic waves.

The shutter unit 110 is preferably formed in a substantially rectangular parallelepiped shape for the purpose of effectively shielding the X-ray beam. That is, as described above, since the X-ray beam 210 is radiated radially from the X-ray source 201, the thickness of the shutter member constituting the shutter unit 110 varies from site to site in view of the radial direction of the X-ray beam 210. In some sections of the surface, there may be a region through which the X-ray beam is transmitted, and there is a possibility that the transmission amount of the X-ray beam varies for each region.

Therefore, the shutter members constituting the shutter unit 110 preferably have a constant thickness in the radial direction centering on the X-ray source 201.

As another description, at least the inner surfaces of the pair of shutter members disposed on both sides may be formed in the radial direction of the concentric circle centering on the X-ray source 201. At this time, if the inner surface of the shutter member is formed in the radial direction of the concentric circle, the shape of the shutter member may be made selectively.

The shutter device 100 of the present invention includes a driving unit 120 so that the shutter unit 110 can be transported along a circumferential direction of a virtual concentric circle centering on the X-ray source 201. The driving unit 120 Is formed on each of the shutter members, and may be separately controlled or synchronously controlled, and the pair of shutter members may be driven together as one driving device.

3 is a plan view illustrating the shutter apparatus 100 of the present invention in more detail.

The shutter unit 110 includes a first shutter member 111 and a second shutter member 112 provided at both sides to allow the X-ray beam 210 to pass through a space between inner surfaces facing each other.

The first shutter member 111 and the second shutter member 112 may be moved along the guide portion 130 formed in an arc shape along the circumferential direction of a virtual concentric circle centering on the X-ray source 201. Each of the plurality of guide rollers 133 may be provided.

The guide rollers 133 support both sides or front and rear sides of the guide part 130, respectively, so that the shutter members 111 and 112 may be accurately moved along the guide part 130 without being separated from the path. do.

However, in the exemplary embodiment of the present invention, the guide unit 130 has a rail shape, and the shutter members 111 and 112 are provided with a guide roller 133, but an example of the transfer guide has been described. The 111 and 112 may be applied to various means such as being conveyed along a predetermined groove or conveyed by a link structure.

In the embodiment of FIG. 3, the long rod-shaped piston rods 141 and 142 connected to the shutter members 111 and 112 by the driving units 121 and 122 are horizontally reciprocated to guide the shutter members 111 and 112. An example of transferring along the unit 130 will be described.

Referring to the first shutter member 111 as an example, one end side of the first shutter member 111 has a flat shape as described above and a radial direction of a virtual concentric circle centering on the X-ray source 201. Is placed and moved.

One end of the first piston rod 141 is rotatably connected to the rod connecting portion 115 at the other end side of the first shutter member 111. As described above, since the first piston rod 141 performs horizontal reciprocating motion, the first piston rod 141 may not be properly guided when the first shutter member 111 moves in an arc shape. The angle formed by the first shutter member 111 and the first piston rod 141 according to the horizontal movement is to be continuously changed.

The first piston rod 141 is reciprocated by the first driving unit 121, which will be described later.

The second shutter member 112 is disposed to face the center line of the X-ray beam 210 with respect to the first shutter member 111, and like the first shutter member 111, the second piston rod 142 and the rod are disposed. It is hinged by the connection part 115 and is conveyed by the 2nd drive part 122. As shown in FIG.

According to the concept of the present invention, an isosceles quadrangular space is formed between the first shutter member 111 and the second shutter member 112, and an area in which the X-ray beam 210 is radiated through the space is limited, thereby being an appropriate range. The X-ray beam 210 can be irradiated accurately.

However, in the concept of the present invention, an example of limiting the range of the left and right sides of the X-ray beam 210 has been described, but the first shutter member 111 and the second shutter member 112 may be provided on the upper and lower sides, and will be described later. Of course, it may be provided in two pairs on the upper and lower sides.

4 is a front view illustrating the shutter apparatus illustrated in FIG. 3 in more detail.

In FIG. 4, an inner surface of the first shutter member 111 and the second shutter member 112 closely adheres to each other to completely close the path of the X-ray beam 210.

When the first shutter member 111 and the second shutter member 112 are completely in contact with each other to close the path of the X-ray beam 210, the first shutter member 111 and the second shutter member 112 face each other. An approximately square shape may be formed, and the square shape may have a position and a size that may include a circular cross-sectional area when the X-ray beam 210 passes.

The first shutter member 111 and the second shutter member 112 may include a plurality of guide rollers 133 on the upper side and / or the lower side, respectively, and the guide rollers 133 may have an arc shape. It guides to be transported in an arc shape along the 130.

Preferably, the guide rollers 133 are provided in pairs at the front and rear sides of the upper and lower sides of the shutter members 111 and 112, respectively, and support the front and rear sides of the guide part 130, respectively. The shutter member 112 is disposed so as not to be separated from the guide part 130.

The guide unit 130 is composed of an upper guide rail 132 and a lower guide rail 131 for accurate feeding of the first and second shutter members 111 and 112, and the shutter device 100. It is coupled to the frame 101 forming the upper and lower sides of the.

As described above, the upper guide rail 132 and the lower guide rail 131 form a planar arc shape and form part of a concentric circle centering on the X-ray source 201 as described with reference to FIG. 2.

That is, the upper guide rail 132 is coupled to the bottom of the frame 101, the upper surface is provided on the upper side of the shutter device 100, and the lower guide rail 131 is on the upper portion of the frame 101 provided on the lower side Coupled to each other, while supporting the upper and lower sides of the first shutter member 111 and the second shutter member 112 via the guide roller 133 therebetween, the virtual center of the X-ray source 201 of the shutter members. Guide the movement of the concentric circles in the circumferential direction.

Meanwhile, one end side surfaces of the first shutter member 111 and the second shutter member 112 face each other, and the other end side is connected to the first piston rod 141 and the second piston rod 142, respectively. Drive force for transport is provided.

The first piston rod 141 and the second piston rod 142 are connected to each other by the rod connecting portion 115 at the other end side of the first shutter member 111 and the second shutter member 112 to be horizontal to each other. It is hinged to allow rotation in the direction.

Preferably, the rod connecting portion 115 is a fixing member (115a) is fixed to the other side of the first shutter member 111 and the second shutter member 112 and the pin coupling in the space formed between the fixing member The rotating member 115b may be coupled to each other and secure one end side of the first piston rod 141 and the second piston rod 142.

The first piston rod 141 and the second piston rod 142 are connected to the first driving unit 121 and the second driving unit 122 to perform a horizontal reciprocating motion, respectively, the first driving unit 121 and the first driving unit 121 and the second driving unit 122. The two driving units 122 are supported by the frame 101, but are coupled to be rotatable in the horizontal direction.

In more detail, the coupling relationship between the driving units 121 and 122 will be described. In the shutter device 100, the shutter device 100 is vertically disposed at both end sides of the frame 101 provided at the upper and lower sides thereof, and the upper and lower ends thereof are respectively arranged in the frame 101. A driving unit support member 102 may be further provided.

The driving unit support member 102 supports the first driving unit 121 and the second driving unit 122 on the central side of the height direction, and is rotatably coupled to the frame 101. Preferably, the driving unit support members 102 disposed at both ends are coupled to each other so as to be pin-coupled to the frame 101 so as to be rotatable in the horizontal direction, respectively, and a bearing may be interposed at the coupling portion for reducing frictional force. Can be.

The first driving unit 121 and the second driving unit 122 are preferably fixed to penetrate the driving unit support member 102, and the first piston rod 141 and the second piston rod 142 are the driving unit ( 121 and 122 are arranged to move the piston through.

The first driving unit 121 and the second driving unit 122 may be formed of a stepping motor, but through a power connection unit in a state where a separate power providing unit is coupled to the driving unit support member 102 for efficiency of power control. It may be connected to the driving units.

That is, the first power supply unit 151 is coupled to the driving unit support member 102 adjacent to the first driving unit 121, and the power for reciprocating the first piston rod 141 is the first power supply unit 151. Can be delivered by In this case, the first power providing unit 151 may be made of a stepping motor to directly move the first piston rod 141, and may be made of a motor that provides rotational power to transmit a rotational motion to the first driving unit 121. The first driving part 121 is made of a ball screw nut and the first piston rod 141 is made of a shaft formed with a screw thread to convert the rotational motion into a reciprocating linear motion. In this case, the power transmission means may be a rotational power transmission means such as a gear.

The configuration for transmitting power to the second driver 122 is the same as described in the first driver 121 and will be omitted.

However, the first power providing unit 151 and the second power providing unit 152 may be made of one power providing unit to drive the first driving unit 121 and the second driving unit 122 together. As shown, each may be controlled. Of course, the first power providing unit 151 and the second power providing unit 152 may operate in synchronization.

In addition, according to the arrangement relationship, one of the first shutter member 111 and the second shutter member 112 is disposed in a fixed state with respect to the frame 101, and the other is moved in an arc shape through the driving unit so that the X-rays It is also possible to adjust the area to which the beam 210 is irradiated.

Referring to the operation of the shutter device 100 according to the arrangement relationship as described above, as shown in FIG. 4 with the state that the irradiation of the X-ray beam 210 toward the detection unit 300, that is, the front is completely blocked The control unit (not shown) transmits a control signal to the first power providing unit 151 and the second power providing unit 152. Accordingly, the first power providing unit 151 and the second power providing unit 152 transmit the rotation or linear motion to the first driving unit 121 and the second driving unit 122, and the first piston rod 141. ) And the horizontal reciprocating motion of the second piston rod 142. When the first piston rod 141 and the second piston rod 142 start to move in the outward direction of the shutter device 100, the first shutter member 111 and the second shutter connected by the rod connecting part 115 are started. The member 112 moves along the upper guide rail 132 and the lower guide rail 131 provided in the frame 101 through the guide roller 133 to open the space therebetween.

As described above, since the upper guide rail 132 and the lower guide rail 131 form part of the circumference around the X-ray source 201, the first shutter member 111 and the second shutter member 112 are formed. Is transported along a virtual concentric circle centering on the X-ray source 201, the inner surface of the first shutter member 111 and the second shutter member 112 facing the plane in the radial direction of the virtual concentric circle continuously It is conveyed in the state arranged accordingly. According to this concept, the first shutter member 111 and the second shutter member 112 may shield at a constant thickness with respect to the traveling direction of the X-ray beam 210. It should be noted that this leads to an advantage that the amount of the X-ray beam 210 that passes through the subject and reaches the detection unit 300 can be kept constant regardless of the region.

On the other hand, in Figure 4 showing the state in front of the shutter device 100 is an X-ray beam 210 is formed in a circular shape, the X-ray beam 210 is radiated from the X-ray source 201 as a whole as a whole It is formed in a substantially conical shape.

Therefore, as described above, when the shutter apparatus 100 is disposed to limit only the left and right sides of the X-ray beam 210 region, the shape of the X-ray beams 210 of the upper and lower sides cannot be controlled.

A configuration for solving this will be described with reference to FIG. 5.

5 is a front sectional view showing another embodiment of the shutter device capable of accurately controlling the irradiation area of the X-ray beam from up, down, left and right.

In the embodiment of FIG. 5, the shutter device includes a first shutter device and a second shutter device. The first shutter device 100 arranged in the horizontal direction is the same as described above with reference to FIGS. do.

The second shutter device 400 is configured in the same manner as the first shutter device 100, but is orthogonal to the first shutter device 100, and is disposed at the front or rear side of the first shutter device 100.

In order to prevent leakage of the X-ray beam 210, the front or rear surfaces of the first shutter member 111 and the second shutter member 112 and the third and fourth shutter members 413 and 414 are separated. The rear or front face is preferably in close contact or abutment.

The third shutter member 413 and the fourth shutter member 414, which are transferred upward and downward from the second shutter device 400, are in close contact with each other and the center of the first shutter member 111 of the first shutter device 100 is close to each other. And the second shutter member 112 coincide with the center of the state in close contact with each other. The center coincides with the center line of the X-ray beam 210.

The second shutter device 400 includes a second frame 401 disposed on both sides in the vertical direction, and the driving unit support member 402 is coupled to the upper and lower sides of the second frame 401 to be rotatable in the front and rear directions. The third driving part 423 and the fourth driving part 424 are respectively supported. In addition, the third driving part 423 and the fourth driving part 424 are connected to the third power providing part 453 and the fourth power providing part 454 to receive power for rotational or linear motion and receive a third piston. The rod 443 and the fourth piston rod 444 are capable of reciprocating linear motion.

According to the vertical movement of the third piston rod 443 and the fourth piston rod 444, the third shutter member 413 and the fourth shutter member 414 are guide members provided in the second frame 401. Accordingly, it is moved along the circumferential direction of the virtual concentric circle centering on the X-ray source 201.

As such, when the shutter device includes the first shutter device 100 and the second shutter device 400, the X-ray beam 210 is emitted in a substantially square pyramid shape.

As described above, the first shutter member 111, the second shutter member 112, the third shutter member 413, and the fourth shutter member 414 face each other in the upper, lower, left, and right areas of the X-ray beam 210. When controlling the area where the X-ray beam is irradiated with a certain thickness in the direction of travel through the inner surface of the beam, it is possible to irradiate the correct amount of X-ray with the correct shape at the correct position, which is an advantage that the inspection accuracy of the X-ray inspection equipment is significantly improved. Will continue.

In the foregoing, the present invention has been described in detail based on the embodiments and the accompanying drawings. However, the scope of the present invention is not limited by the above embodiments and drawings, and the scope of the present invention will be limited only by the content of the following claims.

10 ... X-ray inspection equipment 100 ... Shutter device
101 Frame 102 Drive member
110 ... Shutter section 111 ... First shutter member
112 ... 2nd shutter member 115 ... Rod connection
120 ... Drive 121 ... First Drive
122.2nd drive part 130 ... guide part
131 Lower guide rail 132 Upper guide rail
133 ... Guide Roller 141 ... First Piston Rod
142 ... 2nd piston rod 151 ... 1st power supply
152 2nd power supply unit 200 ... X-ray generator
201 X-ray source 210 X-ray beam
300 ... detector 400 ... second shutter

Claims (14)

An X-ray generator including an X-ray source from which the X-ray beam is emitted;
A detector detecting the X-ray beam; And
Disposed on the path of the X-ray beam between the X-ray generator and the detection unit, and moved along the circumferential direction of the virtual circle centered on the X-ray source to open the path of the X-ray beam through the inner space facing each other; And a shutter device comprising a first shutter member and a second shutter member disposed on both sides so as to face each other so that the X-ray beam is irradiated to a desired range. The method of claim 1,
The first shutter member and the second shutter member, X-ray inspection apparatus having a shutter device, characterized in that arranged in a constant thickness with respect to the radial direction of the virtual circle around the X-ray source. The method of claim 1,
The shutter device,
And a guide unit for guiding the first shutter member and the second shutter member in an arc shape. The method of claim 3,
The first shutter member and the second shutter member, X-ray inspection apparatus having a shutter device, characterized in that the surfaces facing each other coincide with the radial direction of the virtual circle around the X-ray source on a plane. 5. The method of claim 4,
The guide unit,
An upper guide rail and a lower guide rail which support upper and lower sides of the first shutter member and the second shutter member, respectively, and have an arc shape along the circumferential direction of a virtual circle centering on the X-ray source. X-ray inspection equipment having a shutter device. The method of claim 5,
The shutter device,
And a plurality of guide rollers coupled to upper and lower sides of the first shutter member and the second shutter member to guide the transfer of the first shutter member to the second shutter member with respect to the upper guide rail and the lower guide rail. X-ray inspection equipment having a shutter device. The method of claim 3,
The shutter device,
A first piston rod and a second piston rod having one end portion connected to the first shutter member and the second shutter member, respectively, and horizontally reciprocating;
X-ray inspection apparatus having a shutter device, characterized in that it comprises a first driver and a second driver for horizontal reciprocating movement of the first piston rod and the second piston rod. The method of claim 7, wherein
The shutter device,
A frame supporting the guide part;
X-ray inspection apparatus having a shutter device, characterized in that it is coupled to both sides of the frame so as to rotate in a horizontal direction, the driving unit support member for supporting the first driving unit and the second driving unit. 9. The method of claim 8,
The first piston rod and the second piston rod are connected to the first shutter member and the second shutter member so as to rotate in a horizontal direction at a rod connecting portion at one end thereof.
The driving member support member rotates with respect to the frame during the transfer of the first and second shutter members to open and close the X-ray beam path, and the first and second piston rods are respectively disposed in the first shutter member. And a shutter device which rotates with respect to the second shutter member. 10. The method of claim 9,
And the first driving unit and the second driving unit are connected to the first power providing unit and the second power providing unit which are coupled to the driving unit supporting member, respectively, through power transmission means. The method of claim 10,
And the first power supply unit and the second power supply unit are controlled in synchronization with each other. The method of claim 3,
The shutter device,
A third shutter member and a fourth shutter member disposed above and below to face each other;
And a guide part for guiding the third shutter member and the fourth shutter member to be transferred in an arc shape. The method of claim 12,
And the first shutter member and the second shutter member, and the third and fourth shutter members are disposed in close contact with each other in front and rear directions. An X-ray generator including an X-ray source from which the X-ray beam is emitted;
A first shutter member and a second shutter member disposed on both sides to face each other and transferred in opposite directions to limit a range in which the X-ray beam is radiated; And
And a guide part configured to guide the first and second shutter members to an arc shape.
The first shutter member and the second shutter member X-ray inspection apparatus having a shutter device, characterized in that the surfaces facing each other during the transfer process to maintain the radial direction of the virtual circle around the X-ray source on a plane.

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