KR101206758B1 - Hybrid tandem type thin film Solar Cell and method of manufacturing the same - Google Patents

Abstract

The present invention, the first solar cell including a first photoelectric conversion portion made of an inorganic material; A second solar cell connected in series with the first solar cell and including a second photoelectric conversion unit made of an organic material; And a first stacked thin film solar cell including a first electrode and a second electrode serving as an electrode pair for collecting electrons or holes generated in the first solar cell and the second solar cell, and a method of manufacturing the same. ,

The hetero-layered thin film solar cell according to the present invention has an effect of improving battery efficiency by a combination of a first solar cell including inorganic materials having different wavelength wavelength bands and a second solar cell including organic materials. In addition, by using the organic material for the second solar cell can be formed in the air by applying the printing method or coating method, the second solar cell can be formed, compared to the conventional tandem thin film solar cell, the equipment cost is reduced and the process time is shortened It is effective.

Thin Film Solar Cell, Heterolayer

Description

Heterogeneous stacked thin film solar cell and method of manufacturing the same

The present invention relates to a thin film type solar cell, and more particularly, to a stacked thin film solar cell having a plurality of solar cells connected in series to improve battery efficiency.

Solar cells are devices that convert light energy into electrical energy using the properties of semiconductors.

The structure and principle of the solar cell will be briefly described. The solar cell has a PN junction structure in which a P (positive) type semiconductor and a N (negative) type semiconductor are bonded to each other. Holes and electrons are generated in the semiconductor by the energy of the incident solar light. At this time, the holes (+) are moved toward the P-type semiconductor by the electric field generated in the PN junction. Negative (-) is the principle that the electric potential is generated by moving toward the N-type semiconductor to generate power.

Such solar cells may be classified into a substrate type solar cell and a thin film type solar cell.

The substrate type solar cell is a solar cell manufactured using a semiconductor material such as silicon as a substrate, and the thin film type solar cell is a solar cell manufactured by forming a semiconductor in the form of a thin film on a substrate such as glass.

Although the substrate type solar cell is somewhat superior in efficiency to the thin film type solar cell, there is a limitation in minimizing the thickness in the process and the manufacturing cost is increased because an expensive semiconductor substrate is used.

Although the thin film type solar cell has a somewhat lower efficiency than the substrate type solar cell, the thin film type solar cell can be manufactured as a thin solar cell because it can be manufactured in a thin thickness, and a low cost material can be used to reduce manufacturing costs. It is suitable for mass production.

The thin film solar cell is manufactured by forming a front electrode on a substrate, a semiconductor layer such as silicon on the front electrode, and a back electrode on the semiconductor layer. Since the thin film type solar cell is inferior to the substrate type solar cell in terms of efficiency as described above, the thin film type battery having a so-called tandem structure in which two solar cells are stacked by forming the semiconductor layer in two layers to improve efficiency. Solar cells have been proposed.

Such a tandem thin film solar cell has the effect of increasing the efficiency of the solar cell by forming a semiconductor layer in two layers, but has the following disadvantages.

First, in the conventional tandem thin film solar cell, expensive semiconductor deposition equipment is additionally required to form two layers of a semiconductor layer such as silicon, and thus, there is a disadvantage in that equipment investment costs are increased during mass production.

Second, since the semiconductor deposition process is performed for a long time, the overall process time is increased when the semiconductor deposition process is repeatedly performed, and it is not easy to find the optimized deposition process conditions in order to obtain a high quality semiconductor layer. There is a disadvantage in that it is necessary to perform repeated experiments for a long time for him.

The present invention is designed to solve the problems of the conventional thin-film solar cell described above, while improving the cell efficiency by absorbing sunlight of various wavelengths, while minimizing the use of expensive semiconductor deposition equipment and shortening the process time, the productivity An object of the present invention is to provide a heterogeneous multilayer thin film solar cell excellent in terms of the present invention and a method of manufacturing the same.

The present invention to achieve the above object, a first solar cell including a first photoelectric conversion portion made of an inorganic material; A second solar cell connected in series with the first solar cell and including a second photoelectric conversion unit made of an organic material; And a first electrode and a second electrode serving as electrode pairs for collecting electrons or holes generated in the first solar cell and the second solar cell.

In this case, the first electrode is formed as a front electrode on one surface of the transparent substrate, the first solar cell is formed on the first electrode, the second solar cell is formed on the first solar cell, and the second The second electrode may be formed as a back electrode on the solar cell.

The first electrode is formed as a front electrode on one surface of the transparent substrate, the second solar cell is formed on the first electrode, the first solar cell is formed on the second solar cell, and the first solar cell The second electrode may be formed as a rear electrode thereon.

The second electrode is formed as a back electrode on one surface of an opaque substrate, the first solar cell is formed on the second electrode, the second solar cell is formed on the first solar cell, and the second solar cell The first electrode may be formed as a front electrode.

The second electrode is formed as a back electrode on one surface of an opaque substrate, the second solar cell is formed on the second electrode, the first solar cell is formed on the second solar cell, and the first solar cell The first electrode may be formed as a front electrode.

An intermediate interface layer may be further formed between the first solar cell and the second solar cell.

The first solar cell may further include a first transparent conductive layer formed on one surface facing the second solar cell.

The second solar cell may further include a second transparent conductive layer on one surface facing the first solar cell.

The first electrode may be formed of a transparent electrode layer, and the second electrode may be formed of a two-layer structure of a transparent electrode layer and an opaque electrode layer.

The first photoelectric conversion part may include amorphous silicon or microcrystalline silicon having a PIN structure, and the second photoelectric conversion part may include a photoelectric or conductive organic material.

The light wavelength band absorbed by the first photoelectric converter and the light wavelength band absorbed by the second photoelectric converter may be different from each other.

And a third solar cell including a third photoelectric conversion unit made of an organic material, wherein the optical wavelength band absorbed by the first photoelectric conversion unit, the optical wavelength band absorbed by the second photoelectric conversion unit, and The wavelength bands absorbed by the third photoelectric converter may be different from each other.

The present invention also provides a process for forming a first electrode as a front electrode on a transparent substrate; Forming a first solar cell including a first photoelectric conversion unit made of an inorganic material on the first electrode, and a second solar cell including a second photoelectric conversion unit made of an organic material and connected in series with the first solar cell; fair; And providing a second electrode as a back electrode on the first solar cell or the second solar cell.

The invention also provides a process for forming a second electrode as a back electrode on an opaque substrate; Forming a first solar cell including a first photoelectric conversion unit made of an inorganic material on the second electrode and a second photovoltaic cell including a second photoelectric conversion unit made of an organic material and connected in series with the first solar cell; fair; And providing a first electrode as a front electrode on the first solar cell or the second solar cell.

In this case, the first solar cell may be formed first, and then the second solar cell may be formed on the first solar cell. Alternatively, the second solar cell may be formed first, and then the first solar cell may be formed on the second solar cell.

The method may further include forming an intermediate interface layer between the first solar cell and the second solar cell.

The forming of the first solar cell may further include forming a first transparent conductive layer on one surface facing the second solar cell.

The forming of the second solar cell may further include forming a second transparent conductive layer on one surface facing the first solar cell.

The process of forming the second electrode may be formed in a two-layer structure of a transparent electrode layer and an opaque electrode layer.

The first photoelectric conversion unit may form amorphous silicon or microcrystalline silicon in a PIN structure, and the second photoelectric conversion unit may form a photoelectric or conductive organic material by printing or coating.

According to the present invention by the above configuration has the following effects.

The hetero-layered thin film solar cell according to the present invention has the effect of improving the photoelectric conversion efficiency of the battery by the combination of the first solar cell containing the inorganic material and the second solar cell containing the organic material. That is, by allowing the wavelength band of the light absorbed by the first solar cell to be different from the wavelength band of the light absorbed by the second solar cell, the solar cell may absorb sunlight in a wider band, thereby improving battery efficiency.

The heterogeneous stacked thin film solar cell according to the present invention can form a second solar cell by applying a printing method or a coating method in the air by using an organic material as the second solar cell, compared to a thin film solar cell having a conventional tandem structure. Equipment cost is reduced and process time is shortened.

Hereinafter, exemplary embodiments of the present invention will be described in detail with reference to the accompanying drawings.

<Heterogeneous stacked thin film solar cell>

1 is a schematic cross-sectional view of a heterogeneous stacked thin film solar cell according to a first embodiment of the present invention.

As can be seen in Figure 1, the hetero-layer stacked thin film solar cell according to the first embodiment of the present invention, the transparent substrate 110, the front electrode 200, the first solar cell 300, the intermediate interface layer 400, The second solar cell 500 and the back electrode 600 may be formed.

The transparent substrate 110 may be made of a transparent material such as glass or transparent plastic, and sunlight is incident into the solar cell through the transparent substrate 110.

The front electrode 200 is formed on the transparent substrate 110 and may be made of a transparent conductive material such as ZnO, ZnO: B, ZnO: Al, SnO ₂ , SnO ₂ : F, ITO (Indium Tin Oxide), or the like. have. The front electrode 200 may be stacked using a sputtering method, a metal organic chemical vapor deposition (MOCVD) method, an atmospheric pressure chemical vapor deposition (APCVD) method, or the like.

Since the front electrode 200 is a surface on which solar light is incident, it is important to allow the incident sunlight to be absorbed to the inside of the solar cell as much as possible. For this purpose, the front electrode 200 is subjected to a texturing process. The surface of can be formed into an uneven structure. The texture processing process is a process of forming a surface of a material with an irregular concave-convex structure and processing it into a shape such as the surface of a fabric. The texture growth method using chemical vapor deposition, an etching process using photolithography, a chemical solution It may be performed through an anisotropic etching process using, or a groove forming process using mechanical scribing. As such, when the front electrode 200 is formed of an uneven structure, the ratio of incident solar light to the outside of the solar cell is reduced, and the sunlight is emitted into the solar cell by scattering of the incident sunlight. The rate of absorption is increased, thereby increasing the efficiency of the solar cell.

The first solar cell 300 may include a first photoelectric converter 310 and a first transparent conductive layer 330.

The first photoelectric converter 310 is formed on the front electrode 200 and is made of an inorganic material. As the inorganic material constituting the first photoelectric converter 310, a silicon semiconductor material such as amorphous silicon or microcrystalline silicon may be used. Specifically, the first photoelectric converter 310 may have a PIN structure in which a P-type semiconductor layer, an I-type semiconductor layer, and an N-type semiconductor layer made of the silicon-based semiconductor material are sequentially stacked. The first photoelectric conversion unit 310 having the PIN structure may form a silicon-based semiconductor material using a plasma CVD method or the like.

The first transparent conductive layer 330 is formed on the first photoelectric converter 310 and is transparent, such as ZnO, ZnO: B, ZnO: Al, SnO ₂ , SnO ₂ : F, or Indium Tin Oxide (ITO). The conductive material may be formed using a sputtering method or a metal organic chemical vapor deposition (MOCVD) method. The first transparent conductive layer 330 serves to enhance absorption of sunlight by refracting and scattering sunlight in various ways and may be omitted in some cases.

The intermediate interface layer 400 is formed in a region between the first solar cell 300 and the second solar cell 500, and between the first solar cell 300 and the second solar cell 500. In addition to improving the interfacial properties it serves to enhance the absorption of sunlight.

The intermediate interface layer 400 may be formed of an inorganic transparent conductive film such as ZnO, ZnO: B, ZnO: Al, SnO ₂ , SnO ₂ : F, ITO (Indium Tin Oxide), and polyparaphenylene vinylene (PPV: poly-). or an organic conductive film such as para-phenylene vinylene), polystyrenesulfonate, PEDOT (Poly (3,4-ethylenedioxythiophene)), or a mixed film thereof. The intermediate interface layer 400 may be formed in a concave-convex structure in order to improve the solar absorption rate of the solar cell. The intermediate interface layer 400 may be omitted.

The second solar cell 500 is formed on the intermediate interface layer 400, or when the intermediate interface layer 400 is omitted, is formed on the first solar cell 300.

The second solar cell 500 is connected to the first solar cell 300 in series, so that the holes and electrons generated by the first solar cell 300 and the second solar cell 500 are respectively It is collected by moving to the first electrode 200 and the second electrode 600.

The second solar cell 500 may include a second photoelectric converter 510 and a second transparent conductive layer 530.

The second transparent conductive layer 530 is formed on the intermediate interface layer 400 or the first solar cell 300, and ZnO, ZnO: B, ZnO: Al, SnO ₂ , SnO ₂ : F, ITO ( A transparent conductive material such as indium tin oxide may be formed by sputtering or metal organic chemical vapor deposition (MOCVD). The second transparent conductive layer 530 may be omitted in the same manner as the first transparent conductive layer 330.

The second photoelectric converter 510 is formed on the second transparent conductive layer 530 and is made of an organic material. As the organic material constituting the second photoelectric converter 510, a conductive or photoelectric organic material may be used.

The second photoelectric converter 510 may be made of a low molecular or high molecular organic material using an electron donor and an electron acceptor. As the electron donor, a hydrazone compound, a pyrazoline compound, a triphenylmethane compound, a triphenylamine compound, tetrathiofluvarene, tetraphenyltetrathioflavarene, poly (3-alkylthiophene), polyparaphenylene vinyl Lene derivatives, polyfluorene derivatives, and the like. Examples of the electron acceptor include group III-V compound semiconductor crystals such as InP, InAs, GaP, GaAs, CdSe, CdS, CdTe, and ZnS. Although a low molecular material, an electroconductive polymer, etc. which consist of crystal | crystallization, oxide semiconductor crystal | crystallizations, such as ZnO, SiO2, TiO2, Al2O3, CuInSe2, CuInS, a flaren derivative, etc. are mentioned, It is not necessarily limited to these.

The second photoelectric conversion unit 510 may be printed or coated in the air, such as screen printing, inkjet printing, gravure printing, or microcontact printing. Since it can be formed using the method, the process time is shortened and the equipment cost is reduced. However, it may be formed by depositing a low molecular organic material in a vacuum.

The back electrode 600 is formed on the second solar cell 500 and may have a two-layer structure of a transparent electrode layer 630 and an opaque electrode layer 610. However, the back electrode 600 may be made of only the opaque electrode 610 in some cases.

The transparent electrode layer 630 is formed on the second solar cell 500 and includes a transparent conductive material such as ZnO, ZnO: B, ZnO: Al, SnO ₂ , SnO ₂ : F, or Indium Tin Oxide (ITO). It may be formed using a sputtering method or a metal organic chemical vapor deposition (MOCVD) method.

The opaque electrode layer 610 is formed on the transparent electrode layer 630, Ag, Al, Ag + Al, Ag + Mg, Ag + Mn, Ag + Sb, Ag + Zn, Ag + Mo, Ag + Ni, Metal materials such as Ag + Cu, Ag + Al + Zn, etc. are formed by sputtering or the like, or pastes of the metal materials are screen printed or inkjet printed. It may be formed using a printing method such as gravure printing or microcontact printing.

In the hetero-layer stacked thin film solar cell according to the present invention as described above, the battery efficiency can be improved by the combination of the first solar cell 300 and the second solar cell 500, for this purpose, the first solar cell ( The wavelength of light absorbed by 300 may be different from the wavelength of light absorbed by the second solar cell 500, and the solar cell may absorb sunlight in a wider band. More specifically, the first photovoltaic unit 310 and the first solar cell 300 absorb relatively short wavelength light, and the second solar cell 500 absorbs relatively long wavelength light. It is preferable to form the second photoelectric conversion unit 510. However, in a special case, the first photoelectric converter 310 and the second photoelectric converter 510 may use a similar optical wavelength band, and in this case, each solar cell is connected in series, so that the photocurrent is maintained as it is. Even if it is reduced or small, the light conversion efficiency may be increased due to the effect of increasing the voltage.

The first photoelectric conversion unit 310 may be made of amorphous silicon or microcrystalline silicon. In general, the amorphous silicon absorbs light in a band of about 300 to 800 nm, and in the case of the microcrystalline silicon, it is about 500 to 1200 nm. Absorbs light. In addition, the second photoelectric conversion unit 510 may be formed of a photoelectric or conductive organic polymer, and may absorb light in a range of about 400 to 1200 nm or light in a range of about 900 to 1700 nm, depending on a material. In some cases, it may absorb a band similar to that of the inorganic wavelength band.

Therefore, when the first photoelectric conversion unit 310 of the first solar cell 300 is made of microcrystalline silicon absorbing light in the 500 to 1200nm band, the second photoelectric conversion unit of the second solar cell 500 510 is preferably made of a material that absorbs light in the 900 to 1700nm band.

In addition, when the first photovoltaic unit 310 of the first solar cell 300 is made of amorphous silicon absorbing light in the 300 to 800nm band, the second photovoltaic unit of the second solar cell 500 ( 510 is preferably made of a material that absorbs light in the 400 to 1200nm band. In this case, a third solar cell including a third photoelectric conversion unit made of a material absorbing light in the 900 to 1700 nm band may be further configured to enhance the absorbing light wavelength band.

In the hetero-layered thin film solar cell according to the present invention, the cell efficiency is improved by the combination of the first solar cell 300 and the second solar cell 500, and the second solar cell 500 is atmosphere by using an organic material. The second solar cell 500 can be formed by applying a printing method or a coating method among them, thereby reducing the equipment cost and reducing the processing time.

FIG. 2 is a schematic cross-sectional view of a heterogeneous stacked thin film solar cell according to a second embodiment of the present invention, except that the positions of the first solar cell 300 and the second solar cell 500 are changed. It is the same as the heterogeneous stacked thin film solar cell according to the embodiment. Therefore, the same reference numerals are given, and detailed description of the same configuration will be omitted.

As can be seen in Figure 2, in the hetero-layer stacked thin film solar cell according to the second embodiment of the present invention, the front electrode 200 is formed on the transparent substrate 110, the second aspect on the front electrode 200 The cell 500 is formed, the intermediate interface layer 400 is formed on the second solar cell 500, and the first solar cell 300 is formed on the intermediate interface layer 400. 1 The back electrode 600 may be formed on the solar cell 300.

The second solar cell 500 includes a second photoelectric converter 510 formed on the front electrode 200 and a second transparent conductive layer 530 formed on the second photoelectric converter 510. The first solar cell 300 may include the first transparent conductive layer 330 formed on the second solar cell 500 when the intermediate interface layer 400 or the intermediate interface layer 400 is omitted. And a first photoelectric converter 310 formed on the first transparent conductive layer 330. The first transparent conductive layer 330 and the second transparent conductive layer 530 may be omitted.

Such a heterogeneous stacked thin film solar cell according to the second embodiment of the present invention, as compared with the heterogeneous stacked thin film solar cell according to the first embodiment described above, has a protective effect of the second solar cell 500 that is weak to moisture or oxygen. There is an advantage to be promoted. That is, the second photoelectric converter 510 made of an organic material included in the second solar cell 500 has a weak disadvantage in moisture or oxygen. According to the second embodiment of the present invention as shown in FIG. Since the first solar cell 300 is formed on the second solar cell 500, the first solar cell 300 prevents moisture or oxygen from penetrating into the second solar cell 500. have.

3 is a schematic cross-sectional view of a heterogeneous stacked thin film solar cell according to a third embodiment of the present invention, which is designed to allow sunlight to be incident in a direction opposite to the substrate by using an opaque substrate 130. Different from the hetero-layered thin film solar cell according to the example. In addition, the same reference numerals are assigned to the same components, and detailed descriptions of the same components will be omitted.

As can be seen in Figure 3, in the hetero-layer stacked thin film solar cell according to the third embodiment of the present invention, the back electrode 600 is formed on the opaque substrate 130, the first aspect on the back electrode 600 The cell 300 is formed, the intermediate interface layer 400 is formed on the first solar cell 300, the second solar cell 500 is formed on the intermediate interface layer 400, and the second 2 The front electrode 200 may be formed on the solar cell 500.

As the opaque substrate 130, stainless steel, an opaque plastic substrate, or the like may be used. In this case, a flexible solar cell can be easily implemented.

The back electrode 600 may have a two-layer structure of an opaque electrode layer 610 formed on the opaque substrate 130 and a transparent electrode layer 630 formed on the opaque electrode layer 610.

The first solar cell 300 includes a first photoelectric converter 310 formed on the back electrode 600 and a first transparent conductive layer 330 formed on the first photoelectric converter 310. The second solar cell 500 may include the second transparent conductive layer 530 formed on the first solar cell 300 when the intermediate interface layer 400 or the intermediate interface layer 400 is omitted. ) And a second photoelectric converter 510 formed on the second transparent conductive layer 530. The first transparent conductive layer 330 and the second transparent conductive layer 530 may be omitted.

4 is a schematic cross-sectional view of a heterogeneous stacked thin film solar cell according to a fourth exemplary embodiment of the present invention, except that the positions of the first solar cell 300 and the second solar cell 500 are changed. It is the same as the heterogeneous stacked thin film solar cell according to the third embodiment.

As can be seen in Figure 4, in the hetero-layer stacked thin film solar cell according to the fourth embodiment of the present invention, the back electrode 600 is formed on the opaque substrate 130, the second aspect on the back electrode 600 The cell 500 is formed, the intermediate interface layer 400 is formed on the second solar cell 500, and the first solar cell 300 is formed on the intermediate interface layer 400. 1 The front electrode 200 may be formed on the solar cell 300.

The second solar cell 500 includes a second photoelectric converter 510 formed on the back electrode 600 and a second transparent conductive layer 530 formed on the second photoelectric converter 510. The first solar cell 300 may include the first transparent conductive layer 330 formed on the second solar cell 500 when the intermediate interface layer 400 or the intermediate interface layer 400 is omitted. And a first photoelectric converter 310 formed on the first transparent conductive layer 330. The first transparent conductive layer 330 and the second transparent conductive layer 530 may be omitted.

Such a heterogeneous stacked thin film solar cell according to the fourth embodiment of the present invention, similar to the heterogeneous stacked thin film solar cell according to the second embodiment described above, the protection effect of the second solar cell 500 that is weak to moisture or oxygen. Has the advantage of being promoted.

 <Method of manufacturing heterogeneous stacked thin film solar cell>

5A to 5E are manufacturing process diagrams of a heterogeneous stacked thin film solar cell according to an embodiment of the present invention, which relates to a process of manufacturing a heterogeneous stacked thin film solar cell according to FIG. 1.

First, as shown in FIG. 5A, the front electrode 200 is formed on the transparent substrate 110.

The transparent substrate 110 may use glass or transparent plastic.

The front electrode 200 is sputtered or MOCVD (Metal Organic Chemical Vapor Deposition) of a transparent conductive material such as ZnO, ZnO: B, ZnO: Al, SnO ₂ , SnO ₂ : F, ITO (Indium Tin Oxide), or the like. It can be formed using a) method or the like. The front electrode 200 may have a concave-convex structure on its surface through a texture processing process.

Next, as can be seen in Figure 5b, to form a first solar cell 300 on the front electrode (200).

The first solar cell 300 forming process includes forming a first photoelectric converter 310 on the front electrode 200 and a first transparent conductive layer 330 on the first photoelectric converter 310. It may include the step of forming a.

The process of forming the first photoelectric converter 310 may be a process of forming a semiconductor layer having a PIN structure made of a silicon semiconductor material such as amorphous silicon or microcrystalline silicon by using plasma CVD.

The process of forming the first transparent conductive layer 330 may be performed using a sputtering method or a metal organic chemical vapor deposition (MOCVD) method such as ZnO, ZnO: B, ZnO: Al, SnO ₂ , SnO ₂ : F, The transparent conductive material such as indium tin oxide (ITO) may be stacked, and the first transparent conductive layer 330 may be omitted.

Next, as can be seen in Figure 5c, to form an intermediate interface layer 400 on the first solar cell (300).

The interfacial layer 400 may be formed using a sputtering method or a metal organic chemical vapor deposition (MOCVD) method such as ZnO, ZnO: B, ZnO: Al, SnO ₂ , SnO ₂ : F, ITO. (Indium Tin Oxide) may be made of a process of laminating an inorganic transparent conductive film, or using a printing method or a coating method polyparaphenylene vinylene (PPV: poly-para-phenylene vinylene), polystyrenesulfonate (polystyrenesulfonate) , PEDOT (Poly (3,4-ethylenedioxythiophene)) and the like may be made of a process of laminating an organic conductive film. In some cases, the inorganic transparent conductive film and the organic conductive film may be stacked in duplicate.

The intermediate interfacial layer 400 may be formed into a concave-convex structure through a texture processing process. The intermediate interface layer 400 may be omitted.

Next, as can be seen in Figure 5d, to form a second solar cell 500 on the intermediate interface layer (400).

The process of forming the second solar cell 500 may include forming a second transparent conductive layer 530 on the intermediate interface layer 400 and a second photoelectric converter 510 on the transparent conductive layer 530. It may include the step of forming a.

The process of forming the second transparent conductive layer 530 may be performed using a sputtering method or a metal organic chemical vapor deposition (MOCVD) method such as ZnO, ZnO: B, ZnO: Al, SnO ₂ , SnO ₂ : F, It may be a process of laminating a transparent conductive material such as indium tin oxide (ITO). The second transparent conductive layer 530 may be omitted.

The process of forming the second photoelectric converter 510 may include screen printing, inkjet printing, gravure printing, or fine printing of organic materials such as conductive or photoelectric organic materials. It may be formed by a lamination process using a printing method such as slit coating or spin coating, or a printing method such as microcontact printing. In some cases, however, it may be formed by vacuum deposition. Specific examples of the organic material are the same as described above, so a detailed description thereof will be omitted.

Next, as shown in FIG. 5E, a back electrode 600 is formed on the second solar cell 500.

The process of forming the back electrode 600 includes forming a transparent electrode layer 630 on the second solar cell 500 and forming an opaque electrode layer 610 on the transparent electrode layer 630. Can be done. However, the back electrode 600 may be formed of only the opaque electrode 610.

The process of forming the transparent electrode layer 630 may be performed by sputtering or metal organic chemical vapor deposition (MOCVD), using ZnO, ZnO: B, ZnO: Al, SnO ₂ , SnO ₂ : F, ITO (Indium And a transparent conductive material such as tin oxide.

The process of forming the opaque electrode layer 610 may be performed using Ag, Al, Ag + Al, Ag + Mg, Ag + Mn, Ag + Sb, Ag + Zn, Ag + Mo, Ag + using a sputtering method or the like. It may be made of a process of laminating metal materials such as Ni, Ag + Cu, Ag + Al + Zn, and the like. The paste of the metal materials may be screen printed, inkjet printed, or gravure. It may be made by a lamination process using a printing method such as a printing method (gravure printing) or a microcontact printing (microcontact printing).

Meanwhile, by forming the second solar cell 500 instead of the first solar cell 300 in FIG. 5B, and forming the first solar cell 300 instead of the second solar cell 500 in FIG. 5D, The heterogeneous stacked thin film solar cell according to FIG. 2 may be manufactured.

6A to 6E are diagrams illustrating a manufacturing process of a heterogeneous stacked thin film solar cell according to another exemplary embodiment of the present invention, which relates to a heterogeneous stacked thin film solar cell according to FIG. 3. Detailed description of the same configuration as the above-described embodiment will be omitted.

First, as shown in FIG. 6A, the back electrode 600 is formed on the opaque substrate 130.

The process of forming the back electrode 600 may include a process of forming an opaque electrode layer 610 on the opaque substrate 130 and a process of forming a transparent electrode layer 630 on the opaque electrode layer 610. It may be made only by the process of forming the opaque electrode layer 610.

As the opaque substrate 130, stainless steel, an opaque plastic substrate, or the like may be used.

Next, as can be seen in Figure 6b, to form a first solar cell 300 on the back electrode 600.

The first solar cell 300 forming process includes forming a first photoelectric conversion unit 310 on the back electrode 600 and a first transparent conductive layer 330 on the first photoelectric conversion unit 310. It may include the step of forming a.

Next, as can be seen in Figure 6c, to form an intermediate interface layer 400 on the first solar cell (300).

Next, as can be seen in Figure 6d, to form a second solar cell 500 on the intermediate interface layer (400).

The process of forming the second solar cell 500 includes forming a second transparent conductive layer 530 on the intermediate interface layer 400 and a second photoelectric conversion unit 510 on the transparent conductive layer 530. It may include the step of forming a.

Next, as shown in FIG. 6E, the front electrode 200 is formed on the second solar cell 500.

Meanwhile, by forming the second solar cell 500 instead of the first solar cell 300 in FIG. 6B, and forming the first solar cell 300 instead of the second solar cell 500 in FIG. 6D, The hetero-layered thin film solar cell according to FIG. 4 described above may be manufactured.

1 is a schematic cross-sectional view of a heterogeneous stacked thin film solar cell according to a first embodiment of the present invention.

Figure 2 is a schematic cross-sectional view of a heterogeneous stacked thin film solar cell according to a second embodiment of the present invention.

3 is a schematic cross-sectional view of a heterogeneous stacked thin film solar cell according to a third embodiment of the present invention.

4 is a schematic cross-sectional view of a heterogeneous stacked thin film solar cell according to a first embodiment of the present invention.

5A to 5E are schematic process cross-sectional views of a heterogeneous stacked thin film solar cell according to an embodiment of the present invention.

6A to 6E are schematic process cross-sectional views of a heterogeneous stacked thin film solar cell according to another embodiment of the present invention.

DESCRIPTION OF THE REFERENCE NUMERALS OF THE DRAWINGS FIG.

110: transparent substrate 130: opaque substrate

200: front electrode 300: the first solar cell

400: intermediate interface layer 500: second solar cell

600: rear electrode

Claims (20)

A first solar cell including a first photoelectric conversion unit made of an inorganic material; A second solar cell connected in series with the first solar cell and including a second photoelectric conversion unit made of an organic material; And It comprises a first electrode and a second electrode which acts as an electrode pair for collecting electrons or holes generated in the first solar cell and the second solar cell, The intermediate interface layer is further formed between the first solar cell and the second solar cell, the intermediate interface layer is a hetero-layer thin film solar cell, characterized in that consisting of a single layer of metal oxide. The method of claim 1, The first electrode is formed as a front electrode on one surface of the transparent substrate, the first solar cell is formed on the first electrode, the second solar cell is formed on the first solar cell, and the second solar cell The second stacked thin film solar cell of claim 2, wherein the second electrode is formed as a back electrode. The method of claim 1, The first electrode is formed as a front electrode on one surface of the transparent substrate, the second solar cell is formed on the first electrode, the first solar cell is formed on the second solar cell, and the first solar cell The second stacked thin film solar cell of claim 2, wherein the second electrode is formed as a back electrode. The method of claim 1, The second electrode is formed as a back electrode on one surface of an opaque substrate, the first solar cell is formed on the second electrode, the second solar cell is formed on the first solar cell, and the second solar cell The heterojunction thin film solar cell of claim 1, wherein the first electrode is formed as a front electrode. The method of claim 1, The second electrode is formed as a back electrode on one surface of an opaque substrate, the second solar cell is formed on the second electrode, the first solar cell is formed on the second solar cell, and the first solar cell The heterojunction thin film solar cell of claim 1, wherein the first electrode is formed as a front electrode. delete The method of claim 1, The first solar cell is a heterogeneous stacked thin film solar cell, characterized in that the first transparent conductive layer is further formed on one surface facing the second solar cell. The method of claim 1, The second solar cell is a heterogeneous stacked thin film solar cell, characterized in that the second transparent conductive layer is further formed on one surface facing the first solar cell. The method of claim 1, The first electrode is made of a transparent electrode layer, the second electrode is a heterogeneous stacked thin film solar cell, characterized in that consisting of a two-layer structure of a transparent electrode layer and an opaque electrode layer. The method of claim 1, The first photoelectric conversion part comprises amorphous silicon or microcrystalline silicon having a PIN structure, and the second photoelectric conversion part comprises a photoelectric or conductive organic material. The method of claim 1, The wavelength band absorbed by the first photoelectric converter and the wavelength band absorbed by the second photoelectric converter are different from each other. The method of claim 1, And a third solar cell including a third photoelectric conversion unit made of an organic material, wherein the optical wavelength band absorbed by the first photoelectric conversion unit, the optical wavelength band absorbed by the second photoelectric conversion unit, and The wavelength band of light absorbed by the third photoelectric conversion unit is different from each other. Forming a first electrode as a front electrode on the transparent substrate; Forming a first solar cell including a first photoelectric conversion unit made of an inorganic material on the first electrode, and a second solar cell including a second photoelectric conversion unit made of an organic material and connected in series with the first solar cell; fair; And And forming a second electrode as a back electrode on the first solar cell or the second solar cell, The method further includes the step of forming an intermediate interface layer between the first solar cell and the second solar cell, wherein the intermediate interface layer is a method of manufacturing a heterogeneous stacked thin film solar cell, characterized in that consisting of a single layer of metal oxide. . Forming a second electrode as a back electrode on the opaque substrate; Forming a first solar cell including a first photoelectric conversion unit made of an inorganic material on the second electrode and a second photovoltaic cell including a second photoelectric conversion unit made of an organic material and connected in series with the first solar cell; fair; And And forming a first electrode as a front electrode on the first solar cell or the second solar cell, The method further includes the step of forming an intermediate interface layer between the first solar cell and the second solar cell, wherein the intermediate interface layer is a method of manufacturing a heterogeneous stacked thin film solar cell, characterized in that consisting of a single layer of metal oxide. . The method according to claim 13 or 14, First forming the first solar cell and then forming the second solar cell on the first solar cell, or first forming the second solar cell and then forming the first solar cell on the second solar cell Method for producing a heterogeneous stacked thin film solar cell, characterized in that to form a solar cell. delete The method according to claim 13 or 14, The process of forming the first solar cell further comprises the step of forming a first transparent conductive layer on one surface facing the second solar cell. The method according to claim 13 or 14, The process of forming the second solar cell further comprises the step of forming a second transparent conductive layer on one surface facing the first solar cell. The method according to claim 13 or 14, The process of forming the second electrode is a method of manufacturing a heterogeneous stacked thin film solar cell, characterized in that formed in a two-layer structure of a transparent electrode layer and an opaque electrode layer. The method according to claim 13 or 14, The first photoelectric conversion unit forms amorphous silicon or microcrystalline silicon in a PIN structure, and the second photoelectric conversion unit forms a photoelectric or conductive organic material by printing or coating. Manufacturing method.

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