KR101170896B1 - Module device for digital hologram microscope - Google Patents

Abstract

The present invention relates to a digital hologram microscope device, and more particularly, to a digital hologram microscope device that can be compactly modularized to reduce the spatial size and to operate remotely between the light source and the measurement unit.

The modular digital holographic microscope device according to the present invention comprises a light source (1) for outputting a laser beam, a first lens (4) for focusing the laser beam into parallel light, and optically coupled to the first lens to the parallel A light source unit including a first beam-splitter (3) for separating light into a pair of beams; A first optical fiber 5 coupled to the light source unit on one side to transmit one of the pair of laser beams as a reference light source, and one of the pair of laser beams coupled to the light source unit on one side to transmit the other one as an object light source A transmission unit including a second optical fiber 6; And a reference light generating lens 10 for outputting reference light by making the transmitted reference light source into parallel light, a second lens 11 for outputting a laser beam as the object light source in parallel light, and the second lens ( 11 is optically coupled to the second beam-splitter 12 and the second beam-splitter 12 for injecting the beam transmitted through the objective lens 200, and passes the laser beam as the object light source. An objective lens 200 which reflects back from the sample 300 and passes back to form an object image formed optically, a beam combiner 13 for combining the object light and the reference light, And a measuring unit including an imaging device 100 optically coupled to a beam combiner to project a hologram generated by interference of the light of the reference light and the object light. The modular digital holographic microscope device according to the present invention is modularized into a light source unit and a measuring unit and combines the light source unit and the measuring unit with an optical fiber to reduce the spatial size of the digital hologram microscope device to be applicable to various measurement and inspection equipment fields, thereby limiting the measurement space. Has the advantage of providing a hardware system that does not receive.

Description

Modular device for digital hologram microscope

Fig. 1 is a diagram showing the configuration of a general transmission digital hologram microscope using a Mahgender interferometer.

Fig. 2 is a diagram showing the configuration of a general reflective digital hologram microscope using a Mahgender interferometer.

3 is an overall configuration diagram of the modular digital holographic microscope device of the present invention.

4 is a view showing a configuration system of the light source portion of the modular digital holographic microscope device of the present invention.

FIG. 5 is a view showing a configuration system of a measuring unit in the case of using the modular digital holographic microscope device of the present invention in a 'reflective' type.

FIG. 6 is a diagram showing a system for configuring a measurement unit in the case of using the modular digital holographic microscope device of the present invention in a 'transmission type'. FIG.

<Brief description of the main parts of the drawings>

1 laser beam

3, 12 beam-splitter

4 First Lens

5,6 optical fiber

7, 8 beam intensity control

10 Lens for reference light generation

11 2nd lens

13 beam-convener

60 light source

70 measuring section

100 imaging device

110, 130 fiber optic connector

400, 410 fiber optic connector

120 fiber optic connector

200 objective

300 samples (samples)

510, 520 collimator

530 collimator

The present invention relates to a digital hologram microscope device, and more particularly, to a digital hologram microscope device that can be compactly modularized to reduce the spatial size and to operate remotely between the light source and the measurement unit.

Digital hologram technology is used for imaging devices such as CCD (Charge Coupled Device) and CMOS, starting from the existing hologram technology (a method of reproducing a 3D image by providing a reference light and recording in the same manner as photographing using a hologram plate). It is a technique of acquiring hologram data of an object in real time using a semiconductor and acquiring three-dimensional data of the object by a method of numerical three-dimensional image reproduction. The conceptual methodology was proposed around 1980, and the development of the image pickup device and the speed of computer operation have led to the development of numerical 3D image reproducing methods. It is becoming. In this way, the three-dimensional data of the object is recorded by the hologram method, so that three-dimensional data of the object (sample) can be obtained by one-time shooting, and the three-dimensional data of the object can be reconstructed and displayed by numerical reproduction. In terms of processing and display, it can be expected to achieve an unparalleled performance improvement compared to the advanced microscopes developed earlier. Such three-dimensional data-related ability can meet the data display needs of a variety of objects, various applications are expected.

By using a CCD instead of a hologram film, the information input to the CCD is consistent with the phenomenon that is exposed to the holographic film, and the theory is also the same as the general principle of hologram.

In general, for recording a hologram, the laser beam is divided into two and one is used as reference light and the other is used as object light to record the interference patterns of two lights on the hologram plate. When the thus-recorded dry plate is developed, a hologram is produced, and by reproducing it using a laser beam, real and virtual images, which are three-dimensional images of the same shape as the sample, can be obtained.

The mathematical analysis shows that the intensity of the hologram I _H (x, y) at any position (x, y) on the hologram plate,

to be.

Where R is a reference wave and O is a sample wave, and R ^* and O ^* are conjugate complex numbers of a reference wave and a sample wave, respectively. The first term in Equation 1 is the intensity of reference light only, the second term is the intensity of object light only, and the third and fourth terms represent virtual images and realities, respectively.

On the other hand, when the CCD element is used instead of the hologram film, the overlapping angle of the reference light and the object light is limited by the limitation of the pixel size of the CCD device. Thus, in order to obtain hologram data, the off-axis hologram and in- Only line holograms (Gabor holograms) are available. Among them, in-line holograms have the advantage of obtaining images using the entire CCD.

However, when the in-line hologram is reproduced, there is a problem that the zero diffraction light and the real and virtual images are not distinguished and mixed and reproduced.

Known techniques for removing the zero diffraction light include a DC-suppression method, a method using a high frequency filter, and a method of removing the zero diffraction light by recording only the object light simultaneously with the hologram. However, only the zero diffraction light removal method can remove only the zero diffraction light, and it is difficult to solve the dual phase problem in which the actual and virtual images overlap. Therefore, at the time of reproducing the hologram, in addition to the zero diffraction light, one of the real image and the virtual image should be removed to obtain the information of the recorded sample.

Digital hologram microscopes can be classified into two types, one using an objective lens and the other not using an object lens, and again using a transmission lens and a reflection type digital hologram microscope. As shown in Fig. 2, it is a digital hologram recording / reproducing device using Mach-Zender type interferometer.

Fig. 1 is a diagram showing the configuration of a general transmission digital hologram microscope using a Mahgender interferometer. The beam radiated from the He-Ne laser light source is extended and collimated so as to be uniformly distributed spatially, and then split into a reference light source and an object light source in the beam splitter BS1. The image is combined by the reference light at BS2, and an interference fringe for generating a hologram is generated and photographed by the imaging device CCD. A microscope system constructed by applying a Mahzender-type interferometer has a large size of a light source unit and a part that makes reference light, a part that makes object light and a CCD that records the interference pattern by combining the object light and the reference light, and the recorded interference fringe numerically. It consists of software to analyze. The light source uses a coherent laser beam. As an example, a cw He-Ne laser having a wavelength of 632.8 nm is used. To generate the reference light, the laser beam of the light source is divided into two beams through a beam splitter and passed through a neutral filter to adjust the beam intensity and reflect it with a reflector. The reflected beam is magnified to a certain size using an objective lens, a pinhole and a lens, and parallel light having a TEM ₀₀ shape is made to generate a reference light. Also through the beam splitter

Another divided beam causes the object to be imaged at a certain distance with an objective lens in the light of a transmissive object. The intensity of the object light can be adjusted through a neutral filter. The magnification of the objective lens can be 10X, 20X, 50X, 100X, or the like.

Fig. 2 is a diagram showing the configuration of a general reflective digital hologram microscope using a Mahgender interferometer. The beam radiated from the He-Ne laser light source is extended and collimated so as to be uniformly distributed spatially, and then is separated into the reference light source and the object light source in the beam splitter BS1, and the object light source is separated in the beam combiner BS2. After being incident toward the sample (sample), it is reflected, is again incident on the beam-combiner BS2 and combined with the reference light to form an image. The interference fringe for generating a hologram is generated and photographed by the imaging device CCD.

However, in the conventional structure as described above, the entire system of the digital hologram microscope is not separated from the light source unit including the light source, the beam splitter (BS1), various lenses, and the like and the measurement unit including the beam splitter (BS1), various lenses, and the like. Therefore, the spatial size occupied by the actual product increases, and it may limit the size of the product. Due to this limitation, it is difficult to design a product that can be applied in a narrow space, such as a digital microscope device for semiconductor process inspection equipment or a digital microscope device for inspection for an LCD manufacturing process.

As described above, the transmission and reflection type digital hologram device composed of the optical system using the conventional Mahzender interferometer has a large size and has a large space constraint to construct a measurement system in a spatially narrow place. It was difficult to design a product that can be applied in a place.

Accordingly, the technical problem to be achieved by the present invention is to reduce the size of the digital hologram microscope device as well as various measurement and inspection equipment by modularizing the digital hologram microscope device, which is a digital hologram recording and reproducing device, into a light source unit and a measurement unit and connecting the light source unit and the measurement unit with optical fibers. It is to provide hardware system that can be applied regardless of measurement space constraints.

Another object of the present invention is to provide a digital hologram microscope device capable of converting a digital hologram microscope device into a reflective or transmissive type according to a user's needs.

The present invention is a digital hologram recording and reproducing apparatus devised to achieve the above object,

A light source 1 for outputting a laser beam, a first lens 4 for focusing the laser beam into parallel light, and a first optically coupled to the first lens to separate the parallel light into a pair of beams A light source unit 60 including a beam splitter 3;

A first optical fiber 5 coupled to the light source unit on one side to transmit one of the pair of laser beams as a reference light source, and one of the pair of laser beams coupled to the light source unit on one side to transmit the other one as an object light source A transmission unit including a second optical fiber 6; And

A reference light generating lens 10 for outputting reference light by making the transmitted reference light source into parallel light, a second lens 11 for outputting a laser beam as the object light source in parallel light, and the second lens 11 And a second beam-splitter 12 for injecting a beam transmitted through the beam into the objective lens 200 and the second beam-splitter 12 optically and passing through a laser beam as the object light source. An objective lens 200 for reflecting and returning back from the object 300 to form an optically formed object light, a beam combiner 13 for combining the object light and the reference light, and the beam And a measuring unit optically coupled to the combiner and including an imaging device 100 on which a hologram generated by interference of the light of the reference light and the object light is projected.

According to another feature of the invention, the light source unit is optically coupled to the first beam-splitter 3 to fix the first optical fiber 5 to the first optical fiber 5 as a laser as the reference light source. A first optical fiber connector 400 for injecting a beam and optically coupled to the first beam splitter 3 to fix the second optical fiber 6 to the object optical source in the second optical fiber 6 It characterized in that it comprises a second optical fiber connector 130 for injecting a laser beam as.

According to another feature of the invention, the measuring unit is a first for fixing the first optical fiber (5) in order to enter the beam transmitted to the first optical fiber (5) incident to the reference light generation lens (10) A fourth optical fiber for detachably fixing the second optical fiber 6 so that a third optical fiber connector 410 and an object light source, which is a beam transmitted to the second optical fiber 6, are incident on the second lens 11; It characterized in that it comprises a connector (110).

According to another feature of the invention, the measuring unit is characterized in that it further comprises a collimated lens 510 for focusing the beam transmitted to the first optical fiber (5).

According to another feature of the invention, the measuring unit is characterized in that it further comprises a collimated lens 520 for focusing the beam transmitted to the second optical fiber (6).

According to another feature of the invention, the light source unit, the first beam intensity control unit 8 for adjusting the intensity of the beam incident on the first optical fiber 5 and the beam incident on the second optical fiber 6 It characterized in that it comprises a second beam intensity control unit 7 for adjusting the intensity of. The beam intensity adjusting units 7 and 8 adjust the amount of reference light and the amount of object light when holograms are recorded on the CCD image pickup device 100 on which the hologram by the interference of the reference light and the object light in the measuring unit is projected. A device for recording an interference fringe of a state.

In the light source unit 60, the light transmitted to the first lens 4 for collecting the laser light output from the light source 1 has the smallest beam spot size at the focal length of the first lens 4 and at the focal length. The farther it is, the larger the beam spot size will be in proportion to the distance. Therefore, the beam intensity adjusting units 7 and 8 for adjusting the amount of light incident on the optical fiber are designed to be able to adjust the distance with the optical fiber 5 and another optical fiber 6, respectively. Beam intensity control can be controlled by simply reflecting the change in beam spot size through vertical and horizontal movement, or adjusting the amount of light through a combination of lenses.

In addition, the beam intensity adjusting units 7 and 8 for adjusting the amount of light incident on the optical fiber are independent of each other so that the amount of light incident on the optical fiber 5 can be adjusted irrespective of the amount of light incident on the other optical fiber 6. Do.

According to another feature of the invention, the first optical fiber 5 and the second optical fiber 6 are characterized in that the phase of the laser beam transmitted therein is maintained. If the phase of the light source is not maintained, the object light coupled to the beam combiner 13 and the reference light cannot meet to form an interference fringe, thereby losing the function of the digital hologram microscope proposed in the present invention. As an optical fiber that maintains the phase of the laser light source as described above, a single mode fiber is an example.

According to another feature of the invention, the measuring unit, the fifth optical fiber 6 to detachably fix the second optical fiber 6 in order to transmit the object light source, which is a beam transmitted through the second optical fiber 6 to the sample It characterized in that it comprises an optical fiber connector 510. In this case, the optical fiber 6 at one end is connected to the optical fiber connector 130 in the light source unit 60, and the other end is provided under the objective lens 200 and the objective lens coupled to the measuring unit 70. In order to use the sample 300 as a transmission light source for measuring, it has the characteristics of a transmission-type digital holographic microscope by being positioned at a point coinciding with the optical axis of the objective lens 200. That is, it is characterized in that it is used as the transmission light source of the sample to be measured.

According to another feature of the invention, the measurement unit, collimating lens 530 to match the optical axis of the object light source to focus and transmit the object light source, which is a beam transmitted through the second optical fiber 6 to the sample It further comprises a).

Hereinafter, a modular digital holographic microscope apparatus of the present invention will be described in detail with reference to the drawings. The objects and constructional features of the present invention will become more apparent from the accompanying drawings and the description of the detailed and preferred embodiments of the present invention described below. It should be noted that the same to similar parts in the drawings are described with the same to similar reference numerals for convenience of explanation and understanding.

Figure 3 shows an overall schematic diagram of a modular digital hologram microscope device, which is a digital hologram recording and reproducing apparatus invented in accordance with the present invention.

The modular digital holographic microscope device is largely composed of a light source unit 60, a measuring unit 70, and optical fibers 5 and 6 for coupling the light source unit and the light source of the measuring unit. The measuring unit 70 may be coupled to the objective lens 200 and may be coupled to objective lenses having various magnifications, for example, 5x, 10x, 20x, 50x, 100x, and the like. When the sample 300 is positioned outside the objective lens 200, the reflection type hologram device uses the light reflected from the surface of the sample 300 as the object light, and in the case of the 'transmission type hologram device' The light transmitted through 300 is used as the object light.

The light source unit 60 includes a light source 1 for outputting a laser beam, a first lens 4 for focusing the laser beam into parallel light, and optically coupled to the first lens to separate the parallel light into a pair of beams. A first beam-splitter 3.

The transmission unit is coupled to the light source unit at one side to transmit one of the pair of laser beams as a reference light source, and is coupled to the light source unit at one side to transmit the other one of the pair of laser beams as an object light source. It includes a second optical fiber (6).

The measurement unit 70 includes a reference light generating lens 10 for outputting reference light by making the transmitted reference light source into parallel light, a second lens 11 for outputting a laser beam as an object light source, and outputting the parallel light; A second beam splitter 12 for injecting a beam transmitted through the second lens 11 into the objective lens 200, and optically coupled to the second beam splitter 12, passes through a laser beam as an object light source. The objective lens 200 for returning the reflected light back from the sample 300 and passing it back to form an optically imaged object, the beam combiner 13 for combining the object light and the reference light, and the beam- And an imaging device 100 optically coupled to the combiner to project a hologram generated by interference of light of the reference light and the object light.

Between the light source unit 60 and the measurement unit 70, the optical fiber connector 400 of the light source unit and the optical fiber connector 410 of the measurement unit are connected by the optical fiber 5 to transfer a reference light source from the light source unit to the measurement unit.

One end side of the optical fiber 6 is coupled to the optical fiber connector 130 of the light source unit.

When utilized as a "reflective" digital holographic microscope device, the optical fiber connector 130 of the light source unit and the optical fiber connector 110 of the measurement unit is connected to the optical fiber 6 to transmit the object light source to the measurement unit 70.

When used as a 'transmissive' digital hologram microscope device, it also transmits the object light source to the measurement unit 70 by coupling one end of the optical fiber 6 to the optical fiber connector 120 coincident with the objective lens 200 . The collimator 510 may be coupled to the other end of the optical fiber 6 so as to make the object light source into the object light being parallel light. In this case, it is preferable that the end of the optical fiber 6 be positioned at the focal length of the lens of the collimator 510.

FIG. 4 is a view showing a light source unit of a modular digital hologram microscope device, which is a digital hologram recording and reproducing apparatus of the present invention shown in FIG.

The light source unit includes a laser 1, a first lens 4 which is a lens array for collecting and injecting laser light into an optical fiber, a first beam-splitter 3 that divides the laser light into a pair of beams, and an optical fiber for coupling an optical fiber Connectors 400 and 130, and beam intensity control unit (8, 7) for adjusting the intensity of the amount of light incident on the optical fiber, respectively.

The light source 1 outputs a laser beam. For example, a cw He-Ne laser having a wavelength of 632.8 nm, which is a coherent laser beam, may be used. Alternatively, a semiconductor laser having a coherent length of several mm may be used as the light source.

The laser beam is split into two beams through the first beam splitter 3 to produce a reference light source. The first beam-splitter 3 can be made, for example, using a half-mirror.

The light source unit 60 is optically coupled to the first beam splitter 3 to fix the first optical fiber 5 so as to inject a laser beam as a reference light source into the first optical fiber 5 ( 400 and a second optical fiber connector 130 optically coupled to the first beam-splitter 3 to fix the second optical fiber 6 to allow the laser beam as an object light source to enter the second optical fiber 6. It is provided. One beam of two beams divided by the first beam splitter 3 is generated as a reference light source and output. The output reference light source is incident on one end of the optical fiber 5. One end of the optical fiber 5 is incident on one end of the optical fiber 5 after adjusting the intensity of the incident light by adjusting the distance with a beam intensity adjusting unit 8 that adjusts the intensity of the amount of light that can be adjusted back and forth with respect to the incident optical axis. Lose. The beam output from the first lens 4 has a different beam spot size depending on the focal length, and thus the beam intensity can be adjusted only by adjusting the distance according to the axis length of the beam intensity controller 8.

Another beam divided through the first beam splitter 3 becomes an object light source and is incident on one end of the optical fiber 6. One end of the optical fiber 6 is incident on one end of the optical fiber 6 after adjusting the intensity of the incident light by adjusting the distance with an apparatus 7 for adjusting the intensity of another light which can be adjusted back and forth with respect to the incident optical axis. .

FIG. 5 is a view showing a measuring unit of a modular digital hologram microscope device, which is a digital hologram recording and reproducing device designed in FIG. 3, showing a state in which the present invention is used as a 'reflective' digital hologram microscope device.

The measuring unit 70 includes a reference light generating lens 10 for making the reference light source into parallel light, a second lens 11 that is a lens string for injecting the object light source into the parallel light, and the object light source as an objective lens. Second beam-splitter 12 for sending, objective lens 200 for measurement of sample, beam-conbiner 13 for combining object light and reference light, and hologram by interference of reference light and object light It is composed of an image pickup device 100. The imaging device may be a CCD or CMOS, etc., while the CCD has a wide operating range, high uniformity, high reliability, and shuttering, while a CMOS has low power consumption, fast operating speed, and windowing function.

The measuring unit 70 may include a third optical fiber connector 410 for fixing the first optical fiber 5 so that the beam transmitted and incident to the first optical fiber 5 may be incident on the reference light generating lens 10. It may include a fourth optical fiber connector 110 for detachably fixing the second optical fiber 6 in order to enter the object light source that is a beam transmitted to the second optical fiber 6 to the second lens (11). The other end of the optical fiber 5 is coupled to the optical fiber connector 410 and the distance from the other end of the optical fiber 5 to the reference light generating lens 10 coincides with the focal length of the lens. In general, the laser beam passing through a single mode fiber is TEM ₀₀ Is a Gaussian beam. Therefore, collimating with the lens 10 is rather easy.

The collimator 520 may be coupled to make the beam focus immediately after the optical fiber 6 is coupled with the measurement unit 70. The collimator 520 is coupled to another optical fiber connector 110 of the measuring unit 70 to serve as a reflective digital hologram microscope. In addition, the second lens 11, which is a lens array, is incident on the objective lens 200 to serve as an object light source. In consideration of the second lens 11 and the objective lens 200 to make a beam corresponding to the parallel light through the design. By making the object light source corresponding to the parallel light in this way, the phase of the object light source incident on the sample can be predicted, and the three-dimensional information about the sample can be obtained by measuring the phase changed by the sample.

FIG. 6 is a schematic diagram showing an embodiment in which a modular digital hologram microscope device, which is a digital hologram recording and reproducing apparatus designed in the present invention shown in FIG. 3, is used as a 'transmissive' digital hologram device.

In the present exemplary embodiment, the measuring unit 70 includes a fifth optical fiber connector to detachably fix the second optical fiber 6 so as to transmit an object light source, which is a beam transmitted through the second optical fiber 6, to the sample 300. 510. That is, although the second optical fiber 6 is coupled to the fourth optical fiber connector 110 in the embodiment as the 'reflective' digital hologram device of FIG. 5, in the embodiment as the 'transmissive' digital hologram device of FIG. 6, the second optical fiber is The point at which 6 is coupled to the fifth optical fiber connector 120 is different.

As such, after the optical fiber 6 transmitting the object light source from the light source unit 60 is coupled with the optical fiber connector 120, the optical fiber 6 is then optically coupled with the collimator 530 to focus the object light source to make parallel light. In the embodiment as the 'reflective' digital hologram device of FIG. 5, the collimators 510 and 520 are optional components because the lenses 10 and 11 can produce parallel light, but the embodiment as the 'transmissive' digital hologram device of FIG. 6. In the object light source output from the second optical fiber 6 must be transmitted directly to the sample 300, so the collimator 530 is an essential component because the object light is to be parallel light.

In this embodiment, the optical fiber connector 120 and collimator 530 are mounted such that the objective lens 200 and the optical axis coincide, so that the device according to the present invention has a function such as a 'transmissive' digital hologram microscope. The optical fiber connector 120 and the collimator 530 are positioned far enough from the focal length of the objective lens 200 so that the sample 300 can be conveniently placed when the sample 300 is placed. As the parallel light collected from the collimator 530 passes through the sample, the phase changes, and by measuring the changed phase, three-dimensional information about the sample can be obtained.

According to the modular digital holographic microscope device according to the present invention, it is possible to reduce the spatial size of the digital holographic microscope device, and therefore, to limit the measurement space in the field of various measurement and inspection equipment, such as the inspection device of the semiconductor equipment or the LCD device inspection device There is an effect that it is possible to provide a hardware system that can be applied without receiving.

In addition, according to the modular digital hologram microscope device according to the present invention, there is an effect that a digital hologram microscope device capable of converting the digital hologram microscope device to a reflective or transmissive type according to the needs of the user. For example, to obtain an image reflected from the surface of the sample, as shown in FIG. 5, the second optical fiber 6 may be attached to the fourth optical fiber connector 110 to be used as a 'reflective' digital holographic microscope device. In order to obtain an image transmitted through the sample, as shown in FIG. 6, the second optical fiber 6 may be attached to the fifth optical fiber connector 120 to be used as a “transmission type” digital hologram microscope device.

In the foregoing specification, the best embodiments of the present invention have been disclosed using specific terms. That is, the present invention is not limited to the embodiments and drawings described above, the true technical protection scope of the present invention should be defined by the technical spirit of the appended claims. In addition, one of ordinary skill in the art can derive various modifications and other equivalent embodiments by permutation, deletion, merging, etc. from the purpose and configuration of the present invention. I understand that it belongs.

Claims (9)

A light source 1 for outputting a laser beam, a first lens 4 for focusing the laser beam into parallel light, and a first beam-splitter for separating the parallel light incident through the first lens into a pair of beams A light source unit including (3); A first optical fiber 5 coupled to a light source unit at one side to transmit one of the pair of laser beams as a reference light source, and a second coupled to the light source unit at one side to transmit the other one of the pair of laser beams as an object light source A transmission unit including an optical fiber 6; And A reference light generating lens 10 for outputting reference light by making the transmitted reference light source into parallel light, a second lens 11 for outputting a laser beam as the object light source in parallel light, and the second lens 11 The beam is incident through the second beam splitter 12 and the second beam splitter 12 for injecting the beam transmitted through the beam into the objective lens 200, and passes the laser beam as the object light source. An objective lens 200 which reflects back from the sample 300 and passes back to form an object image formed optically, a beam combiner 13 for combining the object light and the reference light, A measurement unit including an imaging device (100) on which a hologram generated by the interference of the reference light and the object light is projected by the object light and the reference light being combined in a beam combiner; Modular digital holographic microscope device comprising a. The method of claim 1, The light source unit, The first optical fiber 5 is fixed to the first optical fiber 5 by which one of the pair of beams emitted from the light source 1 through the first beam splitter 3 is incident. A first optical fiber connector 400 for injecting a laser beam as a reference light source, The second optical fiber 6 is fixed to the second optical fiber 6 by which the other one of the pair of beams emitted from the light source 1 through the first beam splitter 3 is incident. And a second optical fiber connector (130) for injecting a laser beam as the object light source. 3. The method of claim 2, The measuring unit, A third optical fiber connector 410 for fixing the first optical fiber 5 to inject the beam transmitted and incident to the first optical fiber 5 into the lens 10 for generating reference light; And a fourth optical fiber connector 110 for detachably fixing the second optical fiber 6 so that the object light source, which is a beam transmitted to the second optical fiber 6, is incident on the second lens 11. A modular digital holographic microscope device. The method of claim 1, The measuring unit, Modular digital holographic microscope device characterized in that it further comprises a collimator (510) for the beam is incident through the first optical fiber (5) to emit parallel light. The method of claim 1, The measuring unit, Modular digital holographic microscope device characterized in that it further comprises a collimator (520) for the beam is incident through the second optical fiber (6) to emit parallel light. The method of claim 1, The light source unit, And a first beam intensity adjusting unit for adjusting the intensity of the beam incident on the first optical fiber 5, and a second beam intensity adjusting unit for adjusting the intensity of the beam incident on the second optical fiber 6. Modular digital holographic microscope device. The method of claim 1, The first optical fiber (5) and the second optical fiber (6), characterized in that the characteristics of the phase of the laser beam transmitted therein is characterized in that the modular digital holographic microscope device. 3. The method of claim 2, The measuring unit, And a fifth optical fiber connector 510 for detachably fixing the second optical fiber 6 to transmit the object light source, which is a beam transmitted through the second optical fiber 6, to the sample. Digital holographic microscope device. 9. The method of claim 8, The measuring unit, And a collimator 530 for matching the optical axis of the object light source to focus and transmit the object light source, which is a beam transmitted through the second optical fiber 6, to the sample. .

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