KR101166006B1 - Support mechanisms and tightening structures for vibration actuator - Google Patents

Abstract

The support mechanism has a tuning-fork shape composed of a base member and a co-shaped holding member disposed on the upper end side thereof. In addition, an intermediate member is disposed between the base member and the sandwiching member, thereby forming a concave portion in the support mechanism. The stator of the vibration actuator is clamped by the tip portion of the clamping member. When the vibration actuator vibrates, the base member of the support mechanism and the clamping member become the node positions of vibration, and the vibration is insulated at this portion, so the base member hardly vibrates.

Description

SUPPORT MECHANISMS AND TIGHTENING STRUCTURES FOR VIBRATION ACTUATOR}

The present invention relates to a support mechanism and a fastening structure of a vibration actuator.

Vibration actuators for rotating the rotor using ultrasonic vibrations have been put to practical use. The vibrating actuator generates a standing wave or traveling wave on the surface of the stator by using a piezoelectric element, and presses the rotor to the stator to rotate the rotor through frictional force between them.

When the vibration actuator is applied to actual industrial use, it is necessary to fix the vibration actuator to any mounting member. At this time, it is desirable that the influence on the vibration of the vibration actuator is small.

For example, Patent Literature 1 includes a stator including a plurality of piezoelectric elements for generating longitudinal vibration in the Z-axis direction, bending vibration in the X-axis direction, and bending vibration in the Y-axis direction, thereby providing a driving force of multiple degrees of freedom. Cylindrical vibration actuators to be produced are described. In this vibration actuator, in the design stage, the node position of the longitudinal vibration in the Z-axis direction and the node position of the flexural vibration in the lateral direction are substantially matched, and the flange-shaped support mechanism 4530 as shown in FIG. The base portion 4530a is disposed near the node position of the vibration of the vibration actuator, and the tip portions of the four thin-shaped arm portions 4530b to 4530e extending radially outward of the vibration actuator are fixed to the mounting target member. When the vibration actuator vibrates, the thin arm portions 4530b to 4530e of the support mechanism 4530 are warped to suppress the influence on the vibration of the vibration actuator when the vibration actuator is fixed to the mounting target member.

Japanese Patent Application Laid-Open No. 11-220892

However, in the support mechanism 4530 as described in Patent Literature 1, the arm portions 4530b to 4530e can be sufficiently curved since the longitudinal vibration of the vibration actuator is in the form of using bending of a thin plate. The bending vibration in the direction cannot be sufficiently deflected because it is a form using the elongation and compression of the thin plate. Therefore, when the front-end | tip part of arm parts 4530b-4530e is fixed to a mounting object member, the influence on the vibration of a vibration actuator cannot fully be suppressed.

The present invention has been made to solve such a problem, and an object of the present invention is to provide a support mechanism and a fastening structure of a vibration actuator in which the influence on the vibration of the vibration actuator is suppressed when fixed to the member to be mounted.

MEANS TO SOLVE THE PROBLEM In order to solve the said subject, according to the support mechanism of the vibration actuator which concerns on this invention, as a support mechanism of the vibration actuator provided with a rotor and a stator, a support mechanism is a base member and one end side of a base member. The vibration actuator is formed in a tuning fork shape composed of a gripping member having a vertical cross section which is disposed in the base member and is opened in a predetermined direction extending from the base member toward the vibrating actuator, and the gripping member clamps the stator of the vibrating actuator. I support it.

This does not affect the vibration of the vibration actuator when it is fixed to the mounting object member. Moreover, while having high rigidity with respect to the vibration and external force of a vibration actuator, it does not limit the freedom of design of a vibration actuator.

The holding member of the support mechanism may be divided into at least two or more and may extend in a predetermined direction.

The holding member of the support mechanism is divided into at least two or more, extends perpendicularly to the predetermined direction, and may further extend in the predetermined direction.

The holding member of the support mechanism is divided into at least two or more, extends at an acute angle with respect to the predetermined direction, and may further extend in the predetermined direction.

The holding member of the support mechanism may be divided into at least two or more and extend in a predetermined direction while curving.

The clamping member of the support mechanism may have a bottomed cylindrical shape.

An intermediate member is disposed between the base member and the sandwiching member of the support mechanism, and the dimension of the surface in contact with the base member of the intermediate member may be smaller than the dimension of the surface on one side of the base member.

By the distal end portion of the clamping member of the supporting mechanism, the stator of the vibrating actuator may be clamped and the base end portion of the clamping member of the supporting mechanism and the stator of the vibrating actuator may be separated.

The clamping member of the support mechanism may be symmetrical with respect to the central axis of the support mechanism.

The stator of the vibration actuator may include a plurality of piezoelectric elements.

Moreover, according to the support mechanism of the vibration actuator concerning this invention, as a support mechanism of the vibration actuator provided with the stator which generate | occur | produces a longitudinal vibration and a lateral bending vibration, a support mechanism is the base and the base which are attached to a vibration actuator, The base portion extends outward and is fixed to the member to be mounted, and the base portion is disposed at a point corresponding to at least one vibration node of the longitudinal vibration and the transverse bending vibration of the vibration actuator, and a gap between the base portion and the arm portion. Is formed.

Thereby, when fixed to the attachment object member, the influence on the at least 1 vibration of the longitudinal vibration of a vibration actuator, and lateral bending vibration is suppressed. In addition, the size is also small, saving space.

It may be a stator in which the node positions of the longitudinal vibration and the lateral bending vibration substantially coincide.

Thereby, when fixed to the mounting object member, all the influence on the longitudinal vibration of the vibration actuator and the lateral bending vibration is suppressed.

The arm portion may have a mounting portion fixed to the member to be mounted, and the gap may be formed so as to traverse a straight line connecting the center of the base and the mounting portion of the arm portion.

Thereby, when fixing to the mounting object member, the influence on the bending vibration of the vibration actuator in the lateral direction is further suppressed.

The number of arm parts may be at least three.

The arm portion may extend along the outer periphery of the base.

As a result, the size is further smaller, which saves space.

Moreover, according to the fastening structure of the vibration actuator which concerns on this invention, it is a fastening structure of the vibration actuator provided with a rotor and a stator, and is provided between the fastening member which fastens a vibration actuator to a mounting object member, and between the base block of a stator, and a mounting object member. And a first vibration isolation member that is sandwiched.

This suppresses the influence on the vibration of the vibration actuator when it is fastened to the mounting object member and fixed. It also does not limit the design freedom of the vibration actuator.

You may provide the 2nd vibration insulating member clamped between a mounting object member and a fastening member.

Thereby, the influence on the vibration of a vibration actuator is further suppressed when it fastens to a mounting object member.

The first vibration insulating member may have a thin plate shape.

As a result, when the vibration actuator is fastened and fixed, it is very small and space is saved.

* A 2nd vibration isolation member may be thin plate shape.

As a result, when the vibration actuator is fastened and fixed, it is very small and space is saved.

The bottom part of the base block may be fastened to the mounting object member.

The side part of a base block may be fastened to the attachment object member.

The fastening member may be a bolt, a female thread portion may be formed in the base block, and a bolt through hole for penetrating the bolt may be formed in the mounting target member.

The fastening member may be a bolt and a nut, and a bolt through hole for penetrating the bolt may be formed in the base block and the mounting target member.

Thereby, since the base block and the fastening member are not directly helically coupled, the vibrating system does not include the fastening member when the vibrating actuator vibrates, and the influence of the fastening member on the vibration of the vibrating actuator is suppressed. In addition, no loss of vibration energy occurs between the base block and the fastening member.

The stator of the vibration actuator may include a plurality of piezoelectric elements.

The outer diameter of the base block may be larger than the outer diameter of the vibrator of the stator.

As a result, when the vibration actuator vibrates, the displacement of the base block of the stator becomes smaller than the displacement of the portion in contact with the rotor, and the influence on the vibration of the vibration actuator is further suppressed when fastened to the mounting target member.

According to the support mechanism and the fastening structure of the vibration actuator according to the present invention, the influence on the vibration of the vibration actuator when it is fixed to the mounting object member is suppressed.

1 is a perspective view showing a vibration actuator and a supporting mechanism according to Embodiment 1 of the present invention.
It is a perspective view which shows the support mechanism of the vibration actuator which concerns on Embodiment 2 of this invention.
It is a perspective view which shows the support mechanism of the vibration actuator which concerns on Embodiment 3 of this invention.
It is a perspective view which shows the support mechanism of the vibration actuator which concerns on Embodiment 4 of this invention.
It is a perspective view which shows the support mechanism of the vibration actuator which concerns on Embodiment 5 of this invention.
FIG. 6 is a perspective view showing a vibration actuator and a support mechanism according to Embodiment 6 of the present invention. FIG.
It is a perspective view which shows the support mechanism of the vibration actuator which concerns on Embodiment 7 of this invention.
8 is a perspective view showing a vibration actuator and a support mechanism according to Embodiment 8 of the present invention.
It is a perspective view which shows the support mechanism of the vibration actuator which concerns on Embodiment 8 of this invention.
It is a perspective view which shows the support mechanism of the vibration actuator which concerns on Embodiment 9 of this invention.
It is a perspective view which shows the support mechanism of the vibration actuator which concerns on Embodiment 10 of this invention.
It is a perspective view which shows the support mechanism of the vibration actuator which concerns on Embodiment 11 of this invention.
It is a perspective view which shows the vibration actuator which concerns on Embodiment 12 of this invention.
It is a front partial sectional drawing which shows the fastening structure of the vibration actuator which concerns on Embodiment 12 of this invention.
It is a bottom view which shows the fastening structure of the vibration actuator which concerns on Embodiment 12 of this invention.
It is a front partial sectional drawing which shows the fastening structure of the vibration actuator which concerns on Embodiment 13 of this invention.
It is a bottom view which shows the fastening structure of the vibration actuator which concerns on Embodiment 13 of this invention.
18 is a front partial cross-sectional view showing a fastening structure of a vibration actuator according to Embodiment 14 of the present invention.
It is a bottom view which shows the fastening structure of the vibration actuator which concerns on Embodiment 14 of this invention.
It is a perspective view which shows the support mechanism of the vibration actuator which concerns on a prior art.

Carrying out the invention  Form for

EMBODIMENT OF THE INVENTION Hereinafter, embodiment of this invention is described based on an accompanying drawing.

Embodiment 1

The structure of the support mechanism of the vibration actuator which concerns on Embodiment 1 of this invention is demonstrated using FIG.

First, the structure of the vibration actuator 1010 which concerns on Embodiment 1 is demonstrated. As shown in FIG. 1, the vibrator 1010 has a stator 1014 sandwiched between the base block 1011 and the stator 1012, and has a substantially cylindrical shape by these. Is formed. In the stator 1012, a recess 1015 is formed on the side opposite to the surface in contact with the vibrator 1013, and the lower part of the spherical rotor 1016 is accommodated and rotatably supported in the recess 1015. It is.

On the upper part of the stator 1012, a supporting member 1017 is disposed. The support member 1017 has an annular portion 1018 fixed on an upper surface of the stator 1012, an inverted L-shaped angle portion 1019 extending upward from the annular portion 1018, and an angle portion 1019. The preload part 1020 is formed in the front-end | tip of ().

Here, for convenience of description, the central axis of the stator 1014 from the base block 1011 toward the stator 1012 is defined as the Z axis, and the X axis in the direction perpendicular to the Z axis is perpendicular to the Z axis and the X axis. It is assumed that the Y axis extends.

The preload part 1020 is in contact with the vertex vicinity which is the highest point in the + Z axis direction of the rotor 1016. The angle part 1019 of the support member 1017 is elastic, and the preload part 1020 is pressed by the rotor 1016 by this, and gives the rotor 1016 the preload of the Z-axis direction.

The vibrator 1013 is for generating ultrasonic vibrations in the stator 1012 to rotate the rotor 1016 around the X axis, and the first piezoelectric element 1013a and the Y axis direction for generating longitudinal vibration in the Z axis direction. It consists of the 2nd piezoelectric element 1013b which generate | occur | produces the bending vibration of the.

Next, the structure of the support mechanism 1030 is demonstrated. The support mechanism 1030 has a tuning fork shape. Here, the tuning fork shape is a shape composed of a base member and a sandwiching member having a vertical cross section disposed at one end thereof and opening in a predetermined direction extending from the base member toward the vibration actuator 1010. That is, as shown in FIG. 1, the support mechanism 1030 is arrange | positioned at the base member 1031 which has an external shape of a square pillar shape, and the upper end side which is one end of the base member 1031, divided into two, and a base member It is comprised by the U-shaped clamping member 1032 which extends perpendicular | vertical to the + Z-axis direction which is a predetermined direction extended toward the vibration actuator 1010 in 1031, and further extends in the + Z-axis direction. Here, the vertical cross section which cut | disconnected the clamping member 1032 in the YZ plane is open toward + Z axis direction. In addition, the clamping member 1032 has a shape symmetrical with respect to the central axis O of the supporting mechanism 1030 (2 overlapped with the original clamping member 1032 when rotated 180 degrees around the central axis O). Symmetrical shape). Further, a rectangular columnar intermediate member 1033 is disposed between the base member 1031 and the sandwiching member 1032. The dimension of the surface which contact | connects the base member 1031 of the intermediate member 1033 is smaller than the dimension of the surface of the upper side of the base member 1031, and the constricted part is formed in the support mechanism 1030 by this. And the stator 1014 of the vibration actuator 1010 is pinched and fixed by the tip part 1032a of the clamping member 1032, and the stator 10 of the vibrating actuator 1010 and the base end part 1032b of the clamping member 1032 are fixed. 1014) is away. In addition, in order to cope with bending vibration in the Y axis direction by the second piezoelectric element 1013b, it is preferable that the contact surface 1040 of the clamping member 1032 and the vibration actuator 1010 is disposed so as to be perpendicular to the Y axis. . Moreover, it is preferable that the direction of the center axis | shaft O becomes parallel with a Z-axis direction.

Next, the operation of the support mechanism of the vibration actuator according to the first embodiment of the present invention will be described.

Now, when AC voltages of 90 degrees in phase difference are applied to the first piezoelectric element 1013a and the second piezoelectric element 1013b in the stator 1014 of the vibration actuator 1010, Z by the first piezoelectric element 1013a is applied. The longitudinal vibration in the axial direction and the bending vibration in the Y-axis direction by the second piezoelectric element 1013b combine to generate an elliptic motion in the YZ plane in the stator 1012 in contact with the rotor 1016, and the rotor 1016 Rotate around the X axis. At this time, between the base member 1031 and the holding member 1032 of the support mechanism 1030 becomes the node of vibration, and the vibration of the vibration actuator 1010 is insulated at this portion, so the base member 1031 is Almost no vibration

As described above, according to the support mechanism of the vibration actuator according to the first embodiment of the present invention, when the vibration actuator 1010 vibrates, vibration is insulated between the base member 1031 and the clamping member 1032, and the base The member 1031 hardly vibrates. Therefore, even if the base member 1031 is fixed to the mounting object member, the vibration of the vibration actuator 1010 is not affected.

Moreover, since the contact surface 1040 area of the clamping member 1032 and the vibration actuator 1010 can fully be secured, it has high rigidity with respect to the vibration and external force of the vibration actuator 1010.

Moreover, since it is not necessary to match the node part of the longitudinal vibration of the Z-axis direction by the 1st piezoelectric element 1013a, and the node part of the bending vibration of the Y-axis direction by the 2nd piezoelectric element 1013b, it is a vibration actuator 1010. The degree of freedom in design is not limited.

In addition, since there is almost no portion extending in the radial direction (the direction perpendicular to the + Z axis, that is, in the XY plane) of the vibration actuator 1010, the space is small.

Embodiment 2 Fig.

Next, the support mechanism of the vibration actuator concerning Embodiment 2 of this invention is demonstrated using FIG. In addition, in description of subsequent embodiment, since the code | symbol same as the code | symbol of FIG. 1 is the same or similar component, the detailed description is abbreviate | omitted.

The support mechanism 1230 according to the second embodiment is divided into two and extended at an acute angle with respect to the + Z axis direction instead of the co-shaped holding member 1032 according to the first embodiment, and further extended in the + Z axis direction. It is comprised using the V-shaped clamping member 1232. Here, the vertical cross section which cut | disconnected the V-shaped clamping member 1232 in the YZ plane is open toward + Z axis direction. In addition, the clamping member 1232 is a shape (twisted symmetry) which is symmetric with respect to the central axis O of the support mechanism 1230. And the stator 1014 of the vibration actuator is clamped by the tip part 1232a of the clamping member 1232.

Even if the support mechanism 1230 is comprised using such a V-shaped clamping member 1232, the same effect as Embodiment 1 can be acquired.

In addition, the sandwiching member 1232 has three corner portions in total at the joint portions of the tip portion 1232a and the proximal portion 1232b, and the portion in contact with the intermediate member 1033, so that the sandwiching member 1232 has more corner portions. You may form.

Embodiment 3:

Next, the support mechanism of the vibration actuator concerning Embodiment 3 of this invention is demonstrated using FIG.

The support mechanism 1330 which concerns on Embodiment 3 is U-shaped clamping member 1332 extended in + Z-axis direction while being divided into two and curved in circular arc shape instead of the co-shaped clamping member 1032 in Embodiment 1. It is configured using. Here, the vertical cross section which cut | disconnected the U-shaped clamping member 1332 in the YZ plane is open toward + Z axis direction. In addition, the clamping member 1332 is a shape symmetrical (twice symmetry) with respect to the central axis O of the support mechanism 1330. And the stator 1014 of the vibration actuator is clamped by the tip part 1332a of the clamping member 1332.

Even if the support mechanism 1330 is comprised using such a U-shaped clamping member 1332, the effect similar to Embodiment 1 can be acquired.

Embodiment 4.

Next, the support mechanism of the vibration actuator which concerns on Embodiment 4 of this invention is demonstrated using FIG.

The intermediate member 1033 in Embodiment 1 was comprised by the single columnar member. On the other hand, in the support mechanism 1430 which concerns on Embodiment 4, the intermediate member 1433 is comprised by two columnar members.

Even if the support mechanism 1430 is comprised using the intermediate member 1433 comprised from such two columnar members, the effect similar to Embodiment 1 can be acquired.

In addition, the number of the columnar members which comprise the intermediate member 1433 may be three or more.

Embodiment 5.

Next, the support mechanism of the vibration actuator which concerns on Embodiment 5 of this invention is demonstrated using FIG.

The base member 1031 in Embodiment 1 was comprised by the single columnar member. On the other hand, in the support mechanism 1530 which concerns on Embodiment 5, the base member 1531 is comprised by two columnar members.

Even if the support mechanism 1530 is comprised using the base member 1531 comprised by such two columnar members, the effect similar to Embodiment 1 can be acquired.

In addition, three or more may be sufficient as the number of the columnar members which comprise the base member 1531.

Embodiment 6.

Next, the structure of the support mechanism of the vibration actuator which concerns on Embodiment 6 of this invention is demonstrated using FIG.

First, the structure of the vibration actuator 1610 in Embodiment 6 is demonstrated. The stator 1614 of the vibration actuator 1610 is X in addition to the first piezoelectric element 1013a for generating longitudinal vibration in the Z axis direction and the second piezoelectric element 1013b for generating bending vibration in the Y axis direction. The 3rd piezoelectric element 1613c which generate | occur | produces the bending vibration of an axial direction is provided. Thus, when any two of the first to third piezoelectric elements of the vibration actuator 1610 are selected and an alternating voltage having a phase difference of 90 degrees is applied, respectively, the stator 1614 vibrates and the rotor 1016 causes the X, Y, and Z axes. Rotate around either.

In order to correspond to the vibration actuator 1610 which generates the bending vibration in the X-axis direction in addition to the longitudinal vibration in the Z-axis direction and the bending vibration in the Y-axis direction as described above, the support mechanism 1630 according to the sixth embodiment is Instead of the co-shaped clamping member 1032 in Embodiment 1, it is divided into four pieces, is extended perpendicularly to the + Z axis direction, and is comprised using the clamping member 1632 extended further in the + Z axis direction. Here, the vertical cross section cut | disconnected in the YZ plane and the vertical cross section cut | disconnected in the ZX plane are open toward + Z axis direction, respectively. Moreover, the clamping member 1632 is a symmetrical shape with respect to the central axis O of the support mechanism 1630 (four times overlapping with the original clamping member 1632 when rotated 90 degrees around the central axis O). Symmetrical shape). And the stator 1614 of the vibration actuator 1610 is clamped by the tip part 1632a of the clamping member 1632, and the base end part 1632b of the clamping member 1632 and the stator of the vibration actuator 1610 are fixed. 1614 is apart. In addition, in order to cope with bending vibration in the Y-axis direction by the second piezoelectric element 1013b, the contact surface 1640a of the clamping member 1632 and the vibration actuator 1610 is disposed so as to be perpendicular to the Y-axis, In order to cope with bending vibration in the X-axis direction by the three piezoelectric elements 1613c, it is preferable that the contact surface 1640b is disposed so as to be perpendicular to the X-axis.

By constructing the support mechanism 1630 using the four clamping members 1632, the vibration actuator 1610 which generates longitudinal vibration in the Z-axis direction, bending vibration in the Y-axis direction, and bending vibration in the X-axis direction. Also in the case of), the same effect as in the first embodiment can be obtained.

Embodiment 7.

Next, the support mechanism of the vibration actuator concerning Embodiment 7 of this invention is demonstrated using FIG. In addition, in the following description, since the code | symbol same as the code | symbol of FIG. 6 is the same or similar component, the detailed description is abbreviate | omitted.

The support mechanism 1730 according to the seventh embodiment is configured by using a cylindrical cylindrical holding member 1732 having a bottom instead of the four holding members 1632 divided in the sixth embodiment. Here, the vertical cross section which cut | disconnected the clamping member 1732 in arbitrary planes containing a Z axis | shaft is open toward + Z axis direction. And the stator 1614 of the vibration actuator is clamped by the tip part 1732a of the clamping member 1732.

Even if the support mechanism 1730 is configured using such a bottomed cylindrical holding member 1732, the same effects as those in the sixth embodiment can be obtained.

Moreover, the clamping member 1732 may be a bottomed cylinder shape, and may be a bottomed polygon cylinder shape, such as a bottomed rectangular cylinder.

Other embodiments.

In Embodiments 1 to 7, the stators 1014 and 1614 of the vibration actuators 1010 and 1610 included a plurality of piezoelectric elements 1013a, 1013b and 1613c, but provided with a stator including only one piezoelectric element. You may use the support mechanism which concerns on Embodiment 1-7 of this invention with respect to a vibration actuator.

In Embodiments 1-7, although the base members 1031 and 1531 were comprised by the square columnar member, polygonal columnar members, such as a cylindrical member and a triangular column, a conical member, a polygonal member, or a spherical member You may be comprised by. Moreover, you may be comprised by the member of a more complicated shape according to the shape of a mounting object member.

In Embodiments 1-5, the clamping members 1032, 1232, 1332 were divided into two, and in Embodiment 6, the clamping members 1632 were divided into four, but these were three, five, eight, etc. It may be divided into.

In Embodiments 1-7, although the holding member 1032, 1232, 1332, 1632, 1732 was symmetrical with respect to the center axis | shaft O, they were adjusted by adjusting the mounting position to a vibration actuator. It is good also as a shape asymmetrical with respect to. In addition, the direction of the center axis O may be in a non-parallel relationship with the Z axis direction.

In Embodiments 1-7, although the thickness, length, and cross-sectional shape of the holding member 1032, 1232, 1332, 1632, 1732 were constant as shown in FIGS. 1-7, you may have a change in these.

In Embodiments 1-7, although the intermediate member 1033,1433 was comprised by the square columnar member, you may be comprised by polygonal columnar members, such as a cylindrical member or a triangular pillar.

In Embodiments 1-7, you may make a hole in the base member 1031, 1531.

In Embodiments 1-7, the base member 1031, 1531, the clamping member 1032, 1232, 1332, 1632, 1732, and the intermediate member 1033, 1433 may each be a separate member, and may be formed integrally. do.

In Embodiments 1-7, various means, such as a bolt and a nut, adhesion | attachment, welding, can be used as a means which fixes the contact surface of a vibration actuator and a support mechanism.

In Embodiments 1-7, the above-mentioned effect of a support mechanism does not depend so much on the material of a support mechanism, but originates mainly in the shape. Therefore, various materials, such as iron, aluminum, stainless steel, can be used as a material of a support mechanism. Moreover, it is good also as a material same as the base block of a vibration actuator. Moreover, you may integrally form the base block of a vibration actuator, and a support mechanism.

You may combine Embodiment 1-7 and the other embodiment mentioned above.

Embodiment 8:

The structure of the support mechanism of the vibration actuator which concerns on Embodiment 8 of this invention is demonstrated using FIG. 8 and FIG.

First, the structure of the vibration actuator 2010 which concerns on Embodiment 8 is demonstrated. As shown in FIG. 8, the vibrating actuator 2010 has a stator 2014 between which the vibrator 2013 is sandwiched between the base block 2011 and the stator 2012, and has a substantially cylindrical shape by these. Is formed. In the stator 2012, a recessed portion 2015 is formed on the side opposite to the surface in contact with the vibrator 2013, in which the lower half of the spherical rotor 2016 is accommodated and rotatably supported. It is.

On the upper part of the stator 2012, the support member 2017 is arrange | positioned. The support member 2017 has an annular portion 2018 fixed on the upper surface of the stator 2012 and an inverted L-shaped angle portion 2019 extending upward from the annular portion 2018, and the angle portion ( The preload part 2020 is formed in the front-end | tip of 2019.

Here, for convenience of description, the central axis of the stator 2014 facing the stator 2012 in the base block 2011 is defined as the Z axis, and the X axis in the direction perpendicular to the Z axis is perpendicular to the Z axis and the X axis. It is assumed that the Y axis extends.

The preload part 2020 is in contact with the vertex vicinity which is the highest point in the + Z axis direction of the rotor 2016. The angle part 2019 of the support member 2017 is elastic, and the preload part 2020 is pressurized by the rotor 2016 by this, and gives the rotor 2016 the preload of the Z-axis direction.

The vibrator 2013 is for generating ultrasonic vibration in the stator 2012 to rotate the rotor 2016 around the X axis, and the first piezoelectric element 2013a and the Y axis direction generating longitudinal vibration in the Z axis direction. It consists of the 2nd piezoelectric element 2013b which generate | occur | produces the bending vibration of the. In addition, in the design stage, at least one vibration node of the longitudinal vibration in the Z axis direction and the bending vibration in the Y axis direction is adjusted to be positioned in the vicinity between the vibrator 2013 and the base block 2011, and at that point The flange-shaped support mechanism 2030 is arrange | positioned.

Moreover, it is further preferable that it adjusts so that the node position of the longitudinal vibration of a Z-axis direction and the bending vibration of a Y-axis direction may substantially correspond, and the support mechanism 2030 is arrange | positioned at the point.

Next, the structure of the support mechanism 2030 is demonstrated. As shown in FIG. 9, the support mechanism 2030 is comprised from the base part 2030a which has a disk-shaped shape, and four thin plate-shaped arm parts 2030b-2030e extended outward from the base part 2030a. .

A bolt through hole is drilled in the center of the base 2030a, and the base 2030a is sandwiched between the vibrator 2013 and the base block 2011 of the vibration actuator 2010, and the vibration actuator 2010 is not shown by a bolt (not shown). It is fixed to).

The arm portions 2030b and 2030c extend in opposite directions from one end of the base 2030a along their outer periphery, respectively. The arm portions 2030d and 2030e extend from opposite ends of the base 2030a in opposite directions, respectively, along its outer circumference. Here, the connection parts A1 and B1 connected to the base 2030a in the arm parts 2030b to 2030e are the center of the base 2030a and the mounting part 2032 of the arm parts 2030b to 2030e (shown in FIG. It is arrange | positioned equally in the position which avoids the straight line which connects the part fixed to the mounting object member which is not attached.

A slit 2031 is formed between the base 2030a and the arm parts 2030b to 2030e, respectively, and forms a straight line connecting the center of the base 2030a and the mounting portions 2032 of the arm parts 2030b to 2030e. Crossing. Moreover, the bolt through hole for fixing to the mounting object member which is not shown in the attachment part 2032 of arm part 2030b-2030e is drilled.

Next, the operation of the support mechanism of the vibration actuator according to Embodiment 8 of the present invention will be described.

Now, when AC voltages having a phase difference of 90 degrees are respectively applied to the first piezoelectric element 2013a and the second piezoelectric element 2013b in the stator 2014 of the vibration actuator 2010, Z by the first piezoelectric element 2013a is applied. The longitudinal vibration in the axial direction and the bending vibration in the Y-axis direction by the second piezoelectric element 2013b combine to generate an elliptical motion in the YZ plane in the stator 2012 that comes into contact with the rotor 2016. Rotate around the X axis. At this time, since the slit 2031 is formed in the support mechanism 2030, the node of any of the longitudinal vibration in the Z axis direction and the bending vibration in the Y axis direction is positioned at the point where the support mechanism 2030 is disposed. Even if it does so, arm part 2030b-2030e can fully bend with respect to the vibration.

In particular, when the position of the longitudinal vibration in the Z axis direction and the bending vibration in the Y axis direction is almost coincident with the point where the support mechanism 2030 is disposed, the longitudinal vibration in the Z axis direction and the Y axis direction are adjusted. Arm parts 2030b-2030e can fully bend with respect to both bending vibrations.

As described above, according to the support mechanism of the vibration actuator according to the eighth embodiment of the present invention, since the support mechanism 2030 is formed with the slits 2031, when the vibration actuator 2010 vibrates, the Z-axis direction The arm portions 2030b to 2030e can sufficiently bend with respect to at least one of the longitudinal vibration and the bending vibration in the Y-axis direction (the vibration where the vibration node is located at the point where the support mechanism 2030 is disposed). Thereby, even if the attachment part 2032 of the arm parts 2030b-2030e of the support mechanism 2030 is fixed to the mounting object member which is not shown in figure, the influence on the vibration of the vibration actuator 2010 is suppressed.

In addition, since the length L1 of the arm portions 2030b to 2030e can be sufficiently secured even if there is almost no portion extending outward of the vibration actuator 2010, the size is also small and space is saved.

Embodiment 9.

Next, the support mechanism of the vibration actuator concerning Embodiment 9 of this invention is demonstrated using FIG. In addition, in description of subsequent embodiment, since the code | symbol same as the code | symbol of FIG. 8 and FIG. 9 is the same or similar component, the detailed description is abbreviate | omitted.

The support mechanism 2230 which concerns on Embodiment 9 is comprised from the base part 2230a which has a disk-shaped shape, and four thin plate-shaped arm parts 2230b-2230e extended outward from the base part 2230a.

Arm portions 2230b and 2230c extend from opposite ends of base 2230a in opposite directions, respectively, along the tangential direction thereof. The arm portions 2230d and 2230e extend from opposite ends of the base 2230a in opposite directions, respectively, along the tangential direction thereof. Here, the connection parts A2 and B2 connected to the base 2230a in the arm parts 2230b to 2230e connect the center of the base 2230a and the mounting part 2232 of the arm parts 2230b to 2230e. It is arrange | positioned evenly in the position which avoids a straight line.

Slits 2231 are formed between the base 2230a and the arm parts 2230b to 2230e, respectively, and form a straight line connecting the center of the base 2230a and the mounting portions 2232 of the arm parts 2230b to 2230e. Crossing.

Even when such a support mechanism 2230 is used, the arm portions 2230b to 2230e can be sufficiently bent by the slit 2231, and the length L2 can be sufficiently secured, which is the same as that of the eighth embodiment. The effect can be obtained.

Embodiment 10.

Next, the support mechanism of the vibration actuator concerning Embodiment 10 of this invention is demonstrated using FIG.

The support mechanism 2330 which concerns on Embodiment 10 is comprised from the base part 2330a which has a disk-shaped shape, and the six thin plate-shaped arm parts 2330b-2330g extended outward from the base part 2330a.

Arm portions 2330b and 2330c extend from opposite base 2330a in opposite directions along their tangential direction, respectively. Arm portions 2330d and 2330e also extend from opposite base 2330a in opposite directions, respectively, along the tangential direction thereof. The arm portions 2330f and 2330g also extend from the base 2330a in opposite directions along the tangential direction, respectively. Here, the connection parts A3, B3, C3 connected with the base 2330a in the arm parts 2330b-2330g are the center of the base 2330a, and the attachment part 2332 of the arm parts 2330b-2330g. It is arrange | positioned evenly in the position which avoids the straight line which connects.

A slit 2331 is formed between the base 2330a and the arm parts 2330b to 2330g, respectively, and forms a straight line connecting the center of the base 2330a and the mounting portions 2332 to the arm parts 2330b to 2330g. Crossing.

Even when such a support mechanism 2330 is used, the arm portions 2330b to 2330g can be sufficiently bent by the slit 2331, and the length L3 can be sufficiently secured, which is the same as that of the eighth embodiment. The effect can be obtained.

Embodiment 11.

Next, the support mechanism of the vibration actuator concerning Embodiment 11 of this invention is demonstrated using FIG.

The support mechanism 2430 which concerns on Embodiment 11 is comprised from the base part 2430a which has a disk-shaped shape, and the three thin plate-shaped arm parts 2430b-2430d extended outward from the base part 2430a.

Arm parts 2430b-2430d extend counterclockwise from the base 2430a along the outer periphery, respectively. Here, the connection parts A4, B4, C4 connected with the base 2430a in the arm parts 2430b-2430d are the center of the base 2430a and the attachment part 2432 of the arm parts 2430b-2430d. It is arrange | positioned evenly in the position which avoids the straight line which connects.

Slits 2431 are formed between the base 2430a and the arm parts 2430b to 2430d, respectively, and form a straight line connecting the center of the base 2430a and the mounting portions 2432 of the arm parts 2430b to 2430d. Crossing.

Even when such a support mechanism 2430 is used, the arm portions 2430b to 2430d can be sufficiently bent by the slit 2431, and the length L4 can be sufficiently secured, which is the same as that of the eighth embodiment. The effect can be obtained.

Other embodiments.

In the embodiments 8 to 11, the rotor 2016 rotates around the X axis (the so-called ultrasonic motor) was described as an example, but the support mechanism according to the embodiments 8 to 11 of the present invention is also described for other vibration actuators. Can be used. For example, implementation of this invention about the vibration actuator provided with the stator which generate | occur | produces the longitudinal vibration of a Z-axis direction, the bending vibration of an X-axis direction, and the bending vibration of a Y-axis direction as described in patent document 1. You may use the support mechanism which concerns on the form 8-11.

In Embodiments 8 to 11, when the node positions of the longitudinal vibration in the Z-axis direction and the bending vibration in the Y-axis direction of the vibration actuator are different, or when a higher-order vibration mode is used, the nodes of the vibration are present at a plurality of points. do. In such a case, the support mechanisms 2030, 2230, 2330, and 2430 may be disposed at the plurality of vibration node positions of the vibration actuator, respectively.

In Embodiments 8 and 9, the number of arm portions of the support mechanisms 2030 and 2230 is two, and in Embodiment 10, the number of arm portions of the support mechanism 2330 is six, and in the eleventh embodiment, the support mechanism 2430 The number of arm parts in was 3, but you may have more arm parts.

In Embodiment 8 and 9, in order to respond to the bending vibration of the Y-axis direction by the 2nd piezoelectric element 2013b of the vibration actuator 2010, the support mechanisms 2030 and 2230 are arm parts 2030b-2030e, Although it is preferable to arrange | position so that connection part A1, A2 and connection part B1, B2 in 2230b-2230e may be parallel to an X-axis, you may arrange | position these so that it may become parallel to a Y-axis.

In the embodiments 8 to 11, as means for attaching and fixing the bases 2030a, 2230a, 2330a, and 2430a of the support mechanisms 2030, 2230, 2330, and 2430 to the vibration actuator 2010, a clamp and a bolt are used. In addition to fixing, various means such as bonding and welding can be used.

In Embodiments 8-11, the mounting portions 2032, 2232, 2332, 2432 of the arm portions 2030b-2030e, 2230b-2230e, 2330b-2330g, 2430b-2430d of the support mechanisms 2030, 2230, 2330, 2430. ) As a means for fixing to the mounting object member, various means such as adhesion, clamping, welding, etc. can be used in addition to fixing with bolts.

In Embodiments 8-11, iron, aluminum, stainless steel, etc. can be used as a material of the support mechanisms 2030, 2230, 2330, 2430. Moreover, you may make it the same material as the base block 2011 of the stator 2014 of the vibration actuator 2010. FIG. Moreover, you may integrally form the base block 2011 of the stator 2014 of the vibration actuator 2010, and the support mechanisms 2030, 2230, 2330, 2430.

Embodiment 12.

The fastening structure of the vibration actuator according to Embodiment 12 of this invention is demonstrated using FIGS. 13-15.

First, the structure of the vibration actuator 3010 which concerns on Embodiment 12 is demonstrated. As shown in FIG. 13, in the vibration actuator 3010, a vibrator 3013 is sandwiched between the base block 3011 and the stator 3012, whereby the stator 3014 has an approximately cylindrical shape. Is formed. In the stator 3012, a recess 3015 is formed on the side opposite to the surface in contact with the vibrator 3013, and the lower half of the spherical rotor 3016 is accommodated in the recess 3015 and rotatably supported. It is.

On the upper part of the stator 3012, the support member 3017 is arrange | positioned. The support member 3017 has an annular portion 3018 fixed on an upper surface of the stator 3012 and an inverted L-shaped angle portion 3019 extending upward from the annular portion 3018, and includes an angle portion ( The preload part 3020 is formed in the front-end | tip of 3019.

Moreover, the outer diameter of the base block 3011 of the stator 3014 is formed larger than the outer diameter of the vibrator 3013, The tab hole 3011a by which the female thread was cut | disconnected in the bottom part of the base block 3011 is a stator 3014. Four points are formed evenly on the same circumference of the periphery of the center axis O of (circle).

Here, for convenience of description, the central axis O of the stator 3014 facing the stator 3012 in the base block 3011 is defined as the Z axis, and the X axis in the direction perpendicular to the Z axis is represented by the Z axis and the X axis. It is assumed that the Y axis extends perpendicularly to the axis.

 The preload part 3020 is in contact with a vertex near the highest point in the + Z axis direction of the rotor 3016. The angle part 3019 of the support member 3017 is elastic, and the preload part 3020 is pressed by the rotor 3016 by this, and gives the rotor 3016 the preload of the Z-axis direction.

The oscillator 3013 is for rotating the rotor 3016 around the X axis by generating ultrasonic vibrations in the stator 3012. The first piezoelectric element 3013a and the Y axis direction generating longitudinal vibration in the Z axis direction. It consists of the 2nd piezoelectric element 3013b which generate | occur | produces the bending vibration of the.

Next, the structure which fastens the said vibration actuator 3010 to a mounting object member is demonstrated.

As shown in FIG. 14 and FIG. 15, a bolt through hole 3031 for penetrating the shaft portion 3040a of the bolt 3040 has a central axis O of the stator 3014 in the disk-shaped fixing plate 3030. Four points are formed evenly on the same circumference of the periphery, and the external thread is cut | disconnected at the front-end | tip of the axial part 3040a of the bolt 3040. Then, the shaft portions 3040a of the four bolts 3040 pass through the bolt through holes 3031 of the fixing plate 3030, respectively, and spirally engage the tab holes 3011a of the base block 3011 of the vibration actuator 3010. Thus, the bottom portion of the base block 3011 of the vibration actuator 3010 is fastened to the fixed plate 3030. In addition, between the base block 3011 and the fixed plate 3030, a vibration-shaped sheet 3050 having a disc shape (that is, a sheet shape) in which a disc shape is cut out in a circular shape is sandwiched, and the fixed plate 3030 and the bolt 3040 are sandwiched. A thin plate-shaped vibration insulating sheet 3060, which is disc-like and has been circularly cut out inside, is sandwiched between the head portions 3040b of the same.

Subsequently, the operation of the fastening structure of the vibration actuator according to the twelfth embodiment of the present invention will be described.

Now, when an alternating voltage of 90 degrees in phase difference is applied to the first piezoelectric element 3013a and the second piezoelectric element 3013b in the stator 3014 of the vibration actuator 3010, Z by the first piezoelectric element 3013a is applied. The longitudinal vibration in the axial direction and the bending vibration in the Y-axis direction by the second piezoelectric element 3013b combine to generate an elliptic motion in the YZ plane in the stator 3012 in contact with the rotor 3016, so that the rotor 3016 Rotate around the X axis. At this time, since the vibration of the vibration actuator 3010 is insulated by being attenuated by the vibration insulating sheets 3050 and 3060, the fixed plate 3030 hardly vibrates.

As described above, according to the fastening structure of the vibration actuator according to the twelfth embodiment of the present invention, since the vibration is insulated by the vibration insulation sheets 3050 and 3060 when the vibration actuator 3010 vibrates, the fixed plate 3030 ) Rarely vibrates. Therefore, the influence on the vibration of the vibration actuator 3010 at the time of being fastened and fixed to the fixed plate 3030 is suppressed.

In addition, since the base block 3011 of the vibration actuator 3010 is fastened to the fixed plate 3030 by the bolt 3040, it has high fastening force. Therefore, it has high rigidity with respect to the vibration and external force of the vibration actuator 3010.

In addition, since it is not necessary to design the vibration actuator 3010 in consideration of the vibration system including the fixed plate 3030, the freedom of design of the vibration actuator 3010 is not limited.

In addition, since no special supporting mechanism or the like is used, it is very small and saves space.

In addition, since the outer diameter of the base block 3011 of the vibration actuator 3010 is formed larger than the outer diameter of the vibrator 3013, the displacement of the base block 3011 is smaller than the displacement of the portion in contact with the rotor 3016. Lose. This viscosity contributes to suppressing the influence on the vibration of the vibration actuator 3010 when it is fastened and fixed to the fixed plate 3030.

Embodiment 13.

Next, the fastening structure of the vibration actuator which concerns on Embodiment 13 of this invention is demonstrated using FIG. 16 and FIG. In addition, in description of subsequent embodiment, since the code | symbol same as the code | symbol of FIGS. 13-15 is the same or similar component, the detailed description is abbreviate | omitted.

In the fastening structure of the vibration actuator which concerns on Embodiment 12, the bottom part of the base block of a vibration actuator was fastened to the mounting object member. On the other hand, in the fastening structure of the vibration actuator which concerns on Embodiment 13, the side part of the base block of a vibration actuator is fastened to the mounting object member.

Specifically, as shown in FIGS. 16 and 17, in the vibrating actuator 3210, the tab hole 3211a is formed at the side of the base block 3211 of the stator 3214 to form a central axis of the stator 3214. O) Four points are formed evenly around. In addition, the box-shaped member 3230, which is opened up and down, is disposed to surround the side surface of the vibration actuator 3210, and a bolt through hole 3321 is formed in the central portion of each side of the box-shaped member 3230. Then, the shaft portions 3240a of the four bolts 3240 penetrate through the bolt through holes 3321 of the box-shaped member 3230, respectively, and spiral into the tab holes 3211a of the base block 3211 of the vibration actuator 3210. By being engaged, the side part of the base block 3211 of the vibration actuator 3210 is fastened to the box-shaped member 3230. In addition, the vibration insulating sheet 3250 is sandwiched between the base block 3211 and the box-shaped member 3230, and the vibration insulating sheet 3260 is provided between the box-shaped member 3230 and the head portion 3240b of the bolt 3240. ) Is sandwiched.

Even if the fastening structure of such a vibration actuator is used, the effect similar to Embodiment 12 can be acquired.

Embodiment 14.

Next, the fastening structure of the vibration actuator which concerns on Embodiment 14 of this invention is demonstrated using FIG. 18 and FIG.

In the fastening structure of the vibration actuator which concerns on Embodiment 12 and 13, a vibration actuator is fastened to a mounting object member by a helical coupling of the bolt through the mounting object member to the tab hole formed in the bottom part or side part of the base block of the vibration actuator. there was. On the other hand, in the fastening structure of the vibration actuator which concerns on Embodiment 14, a vibration actuator is fastened to a mounting object member by a helical coupling with a nut through the side part of the mounting object member and the base block of a vibration actuator.

Specifically, as shown in FIGS. 18 and 19, in the vibration actuator 3310, a bolt through hole 3311a is formed along the Y axis in the side of the base block 3311 of the stator 3314. have. In addition, the box-shaped member 3330, which is opened up and down, is disposed so as to surround the side surface of the vibration actuator 3310, and a bolt through-hole (in the center portion of two opposite sides perpendicular to the Y-axis direction of the box-shaped member 3330). 3331a and 3331b are formed, respectively. The shaft portion 3340a of the one bolt 3340 includes the bolt through hole 3331a of the box-shaped member 3330, the bolt through hole 3311a of the base block 3311 of the vibration actuator 3310, and the box. The base block 3311 of the vibration actuator 3310 is fastened to the box-shaped member 3330 by helically coupling the nut 3370 through the bolt through hole 3331b of the shaped member 3330. Further, the vibration insulating sheet 3350 is sandwiched between the base block 3311 and the box-shaped member 3330, and between the box-shaped member 3330 and the head portion 3340b and the nut 3370 of the bolt 3340. The vibration insulating sheet 3360 is sandwiched.

In such a fastening structure of the vibration actuator, since the base block 3311 of the vibration actuator 3310, the bolt 3340, and the nut 3370 are not directly helically coupled, the bolt 3340 when the vibration actuator 3310 vibrates. ) And a nut 3370. Therefore, the influence of the bolt 3340 and the nut 3370 on the vibration of the vibration actuator 3310 is suppressed. In addition, no loss of vibration energy occurs between the base block 3311 of the vibration actuator 3310 and the fastening member.

Other embodiments.

In the 12th to 14th embodiments, the rotor 3016 rotates around the X axis has been described as an example. However, the fastening structure according to the 12th to 14th embodiments of the present invention is also described for other vibration actuators. Can be used. For example, implementation of this invention about the vibration actuator provided with the stator which generate | occur | produces the longitudinal vibration of a Z-axis direction, the bending vibration of an X-axis direction, and the bending vibration of a Y-axis direction as described in patent document 1. You may use the fastening structure which concerns on the form 12-14.

In Embodiments 12-14, the vibration actuators 3010, 3210, 3310 were provided with the stator 3014, 3214, 3314 containing the some piezoelectric elements 3013a-3013b, but contain only one piezoelectric element. You may use the fastening structure which concerns on Embodiment 12-14 of this invention with respect to the vibration actuator provided with a stator.

In Embodiments 12-14, the outer diameter of the base block 3011, 3211, 3311 of the stator 3014, 3214, 3314 in the vibration actuator 3010, 3210, 3310 is formed larger than the outer diameter of the vibrator 3013. Although it is preferable, it may be formed in the same manner or smaller.

In Embodiments 12-14, the diameters of the vibration insulation sheets 3050, 3250, 3350, 3060, 3260, 3360 are as shown in FIGS. 14, 16, and 18 of the bolts 3040, 3240, 3340. Although smaller than the diameter of the head parts 3040b, 3240b, and 3340b, it may be larger. In addition, the shape of the vibration insulation sheet 3050, 3250, 3350, 3060, 3260, 3360 may be another shape, such as a rectangular shape.

In Embodiments 12-14, rubber, resin, felt, etc. can be used as a material of the vibration insulation sheet 3050, 3250, 3350, 3060, 3260, 3360.

In Embodiments 12-14, the vibration insulation sheet 3060, 3260, 3360 may be abbreviate | omitted.

In Embodiments 12 and 13, the fastening member may be a pin, a rivet, or the like in addition to the bolts 3040 and 3240.

In combination with Embodiments 12 to 14, both the bottom part and the side part of the base block of the vibration actuator may be fastened to the mounting target member. For example, a rectangular plate may be arranged at the bottom of the box-shaped member 3230 in the thirteenth embodiment, and the bottom portion of the base block 3211 of the vibration actuator 3210 may be fastened to the rectangular plate.

Claims (5)

A support mechanism of a vibration actuator having a stator for generating longitudinal vibration and transverse bending vibration,
The support mechanism has a base attached to the vibration actuator, and an arm portion extending outwardly from the base and fixed to a member to be mounted,
The base is disposed at a point corresponding to at least one vibration node of the longitudinal vibration and the transverse bending vibration of the vibration actuator,
A support mechanism for a vibration actuator, characterized in that a gap is formed between the base and the arm portion. The method of claim 1,
It is a stator with which the node position of the said longitudinal vibration and the bending vibration of the said transverse direction coincides, The support mechanism of the vibration actuator characterized by the above-mentioned. The method of claim 1,
The arm portion has a mounting portion fixed to the mounting target member,
And the gap is formed so as to traverse a straight line connecting the center of the base and the mounting portion of the arm portion. The method of claim 1,
And the number of the arm portions is at least three. The method of claim 1,
And the arm portion extends along an outer circumference of the base.

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