KR101163513B1 - Apparatus for generating beam ion - Google Patents

Abstract

The present invention provides a photo ion generating device. The photo-ion generator includes a socket portion having one side open and an inner space formed therein; An electron beam generating module that is selectively coupled to the internal space of the socket to be detachable and generates an electron beam by receiving power from the outside; And a power applying unit providing power to the electron beam generating module. Therefore, the present invention enables the electron beam generating module to be detachable from the socket of the main body, and at the same time the power supply can be determined at the same time as the detaching operation.

Description

Photo-ion generator {APPARATUS FOR GENERATING BEAM ION}

BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a photo ion generating apparatus, and more particularly, to a photo ion generating apparatus that can easily and easily detach an electron beam generating module.

Typically, corona discharge is applied by applying a direct current high or alternating current high power source from the high power generator to the electrode needle as a means for bringing the charge amount of the object to be close to zero, and positive or negative ions by the electrode needle. An ion generating device is used to output the ions so that the ions are blown out as air oil in the charged material.

A conventional ion generating device is composed of a main body having a power supply unit and an electron beam generator provided in the main body.

The conventional electron beam generator is composed of a vacuum chamber to provide a vacuum space therein, a filament provided inside the vacuum chamber, a target and a light emitting window provided in the vacuum chamber, and electrodes for applying power to the filament do.

The electrodes of a conventional electron beam generator are usually manufactured in a rod shape projecting from the vacuum chamber.

Therefore, the rod-shaped electrode having the predetermined length is generally connected through a power supply unit and a wire installed in the main body. Alternatively, the manner in which the electrodes are connected to each other may be achieved by including other components installed in the main body.

However, in the conventional electron beam generator, since an area excluding the light emitting window is embedded in the main body, when an abnormality in the device in the electron beam generator occurs except the abnormality of the power supply itself, the electron beam generator is embedded in the main body. For this reason, there is a problem in that the entire body needs to be replaced or repaired.

That is, in the related art, since the electromagnet generator is built in the main body, it is difficult to detach and, even when detached, there is a problem that the connection problem with the power supply unit cannot be solved by the detachment.

The present invention was created to solve the above problems, an object of the present invention is to enable the electron beam generating module to be detachable from the socket portion of the main body, the ion generation that can determine the power supply at the same time as the detachment operation In providing a device.

Still another object of the present invention is to provide an ion generating device capable of stably applying power to an electron beam generating module that is detachable to a main body.

In a preferred embodiment, the present invention provides a photo ion generating device.

The photo-ion generator includes a socket portion having one side open and an inner space formed therein; An electron beam generating module that is selectively coupled to the internal space of the socket to be detachable and generates an electron beam by receiving power from the outside; And a power applying unit providing power to the electron beam generating module.

The socket part may include a socket part body in which the one side is opened and the internal space is provided, a first through hole penetrating the internal space from the center of the inner surface of the socket part body to the outside, and the socket part body. It is preferable to have a second through hole for penetrating the inner space to the outside at the inner circumferential portion and an annular support protrusion protruding from the inner surface of the inner space at a position surrounding the first through hole.

The power applying unit includes a first power applying unit and a second power applying unit for applying power, respectively.

The first power supply unit is disposed in the first through-hole, the first body is open on one side and the first space is formed therein, the first body is connected to the outer periphery of the first body is arranged to be slidable and the first body A first 'body having a first' space in communication with a first space of the first elastic body, the first elastic member disposed in the first space and the first 'space to elastically support the first body and the first' body And

The second power supply unit is disposed in the second through-hole, the second body having one side opened and a second space formed therein, the second body is disposed to be connected to the outer periphery of the second body and the second body A second elastic body having a second 'space in communication with the second space of the second elastic body disposed in the second space and the second space and elastically supporting the second body and the second body; It is preferable to have a member.

In addition, the first stepped portion formed at the end of the first body is formed so as to cross each other with the first stepped end formed at the end of the first 'body, the sliding movement distance is limited,

The second stepped portion formed at the end of the second body is formed to engage with the second stepped end formed at the end of the second 'body, so that the sliding movement distance is limited,

It is preferable that the end of the first body and the end of the second body protruding into the inner space are convex.

In addition, the thread is formed on the inner circumference of the opening on one side of the socket portion.

And, the electron beam generating module,

Coupled with the socket portion, a light emitting window is provided at one end, a cylindrical insulating tube made of an insulating material, and disposed inside the insulating tube, by applying power from the outside to generate an electron beam to generate the light emitting window It is preferable to have an electron beam generator for accelerating, and an electrode connection portion disposed at the other end of the insulated tube and to which an external power supply electrode is fitted to apply power to the electron beam generator.

Here, one end of the insulated tube is provided with a cap,

The cap has a disk-shaped cap body having the light emitting window in which a target in which the electron beam is collided is formed, and a thread and a screw extending from one surface of the cap body along one end of the insulating tube and formed in the opening at an outer circumference thereof. It is preferable to have a cylindrical extension body which is formed with another thread to be coupled, and a support electrode whose outer surface is in close contact with the inner circumference of the extension body and whose end is supported on one end surface of the insulated tube.

And, the support electrode,

One end is in contact with one surface of the cap body, the first support electrode of the cylindrical shape in close contact with the inner circumference of the extension body extending a predetermined length, and extends a predetermined length along the outer periphery of the other end of the first support electrode, the bottom surface is the insulated tube It is preferable to have a second support electrode in close contact with one end surface of the second support electrode and a third support electrode formed on the outer circumference of the second support electrode and bent to surround the outer circumference of the one end of the insulating tube.

In addition, the electron beam generating unit,

It is preferable to have a filament having a cylindrical focus electrode tube disposed inside the insulated tube and a pair of ground rods disposed inside the focus electrode tube to receive power.

In addition, the electrode connection portion,

A hollow first electrode part disposed at an inner circumference of the other end of the insulating tube and connected to any one of the pair of ground rods, connected to the other end of the focus electrode tube, and connected to the second power supply unit; A second electrode part disposed inside the one electrode part, having a groove shape, and having an upper surface connected to the other one of the pair of ground rods, and connected to the first power applying part; It is preferable to provide the cylindrical fixing member which consists of an insulating material, fixing two electrode parts mutually.

Here, the first electrode unit,

A first upper electrode having an outer surface connected to any one of the pair of ground rods and connected to the other end of the focus electrode tube, and having an upper end of the fixing member supported on an inner surface thereof, and an insulating tube from a lower end of the first upper electrode; A first extension electrode extending a predetermined length to extend along an inner circumference of the other end, and an outer surface of the first extension electrode extending from a lower end of the first extension electrode and having an outer surface closely attached to the inner circumference of the insulator tube and surrounding the other end surface of the insulator tube And a first lower electrode connected to an end of the second 'body,

The second electrode unit,

A second disc-shaped upper end electrode having an upper surface connected to any one of the pair of ground rods, and a second extension electrode extending a predetermined length from the outer circumference of the second upper electrode along the inner circumference of the first electrode part; And a second lower electrode extending from a lower end of the second extension electrode to be bent outwardly to the outside of the second extension electrode to support the lower end of the fixing member and connected to an end of the first body. It is desirable to.

In addition, it is preferable that an annular gap is formed between the inner circumference of the first electrode portion and the outer circumference of the second electrode portion.

Here, the cylindrical fixing member is fitted into the gap and fixed,

The first upper electrode includes an annular first main support body for tightly supporting the upper surface of the fixing member and a first sub support extending from an outer circumference of the first main supporting body to closely wrap the outer circumference of the upper end of the fixing member. Formed into a body,

The second lower electrode may include a second main support body which closely contacts the inner circumference of the lower end of the fixing member, and a second sub which is extended to open from the outer circumference of the second main support body to closely support the lower surface of the fixing member. It is preferably formed of a support body.

And, the support protrusion is fitted into the gap,

The support protrusion is preferably located between the outer circumference of the fixing member and the inner circumference of the first electrode portion.

In addition, the second extension electrode preferably has at least one bending point.

In addition, the other end of the focus electrode tube may be formed to be bent to surround the outer surface of the first upper electrode.

The present invention enables the electron beam generating module to be detachable from the socket of the main body, and has the effect of determining the power supply at the same time as the detaching operation.

In addition, the present invention has the effect that the electron beam generating module can be easily replaced.

In addition, the present invention has the effect that the power source can be stably applied to the removable electron beam generating module.

Hereinafter, with reference to the accompanying drawings, it will be described the photo ion generating device of the present invention.

1 is a partially cutaway perspective view showing a photo ion generating device of the present invention. 2 is an exploded perspective view showing a photo ion generating device of the present invention. 3 is an exploded perspective view illustrating the electron beam generating module of FIG. 2. Figure 4 is a cross-sectional view showing a state before coupling of the socket portion and the electron beam generating module of the main body according to the present invention. FIG. 5 is an enlarged cross-sectional view of a symbol A of FIG. 4. FIG. 6 is an enlarged cross-sectional view of a symbol B of FIG. 4. 7 is a cross-sectional view showing a state after coupling of the socket portion of the main body and the electron beam generating module according to the present invention.

1 to 4, the photo ion generating apparatus of the present invention is largely composed of a main body 800 and an electron beam generating module 100. Here, the electron beam generating module 100 is selectively removable through the socket portion 600 formed in the main body 800.

Herein, the electron beam includes, but is not limited to, X-ray generation in particular. The electron beam generating module 100 may be detachable by being screwed to the main body 800, or may be detachable by forming a screw hole for coupling with the main body 800 at the edge of the cap body 210. In addition to this can be combined and separated by a variety of ways, which will be understood by those skilled in the art will not be described in detail.

Next, the configuration of the photo ion generating device will be described in detail.

One side is opened in the main body 800, and a socket part 600 having an inner space is formed. In addition, a power applying unit 700 may be installed in the main body 800.

First, the socket part 600 may be integrally formed with the main body, or may be provided as a separate member and attached to the main body 800.

 The socket part 600 includes a socket part body 610 in which one side is opened and the inner space 601 is provided, and the inner space 601 from the center of the inner side of the socket part body 610 to the outside. The first through hole 621 to pass through, the second through hole 522 through the inner space 601 from the inner peripheral portion of the inner surface portion of the socket body 610 to the outside, and the first through hole ( It consists of an annular support protrusion 611 which protrudes from the inner surface of the inner space 601 at the position surrounding the 621.

Preferably, the diameter of the first through hole 621 may be formed to be wider than a diameter of the second through hole 522 by a predetermined size.

In addition, another thread S is formed on the inner circumference of the opening of the socket part 600.

Next, the power applying unit 700 will be described.

4 to 6, the power applying unit 700 may include a first power applying unit 710 for applying power to the first electrode portion 510 and the second electrode portion 520, which will be described below. And a second power supply unit 720.

The first power applying unit 710 is disposed in the first through hole 621 and has a first body 711 having one side open and a first space 711a formed therein. A first stepped portion 711b is formed at an end of the first body 711 at an open side.

The first body 711 is slidably connected to the first body 712 having a first space 712a communicating with the first space 711a. Here, the first body 711 is disposed to be fitted to the first 'body 712, the first' step 712b formed at the end of the first 'body 712 is the first step ( 711b). Accordingly, the sliding distance of the first and first bodies 711 and 712 may be limited. In addition, a first elastic member 713 is provided in the first space 711a and the first 'space 712a to elastically support the first body 711 and the first' body 712. .

Accordingly, the first body 711 is in a fixed state in the first through hole 621 and is electrically connected to a power source from the outside, and the first body 712 is a second electrode described below. It is an electrode substantially connected with the part 520.

 In addition, the second power applying unit 720 may have substantially the same configuration as the first power applying unit 710.

The second power supplying unit 720 is disposed in the second through hole 622 and has a second body 721 having one side open and a second space 721a formed therein, and the second body 721. And a second 'body 722 having a second' space 722a connected to an outer circumference of the slidable and slidable and communicating with the second space 721a of the second body 721 and the second space. The second elastic member 723 is disposed in the 721a and the second 'space 722a to elastically support the second body 721 and the second' body 722.

In addition, the second stepped jaw (not shown) formed at the end of the second body 721 is formed to engage with the second stepped jaw (not shown) formed at the end of the second 'body 722 to slide The travel distance is limited.

On the other hand, the end of the first 'body 712 and the end of the second' body 722 protruding into the inner space 601 is preferably formed convex. Therefore, when the end of the first body 712 and the end of the second body 722 are connected to the second electrode 520 and the first electrode 510, respectively, the area to be connected is determined. In addition to minimizing, the elastic force by the first and second elastic members 713 and 723 may serve to alleviate the physical impact force applied to each of the electrode parts 510 and 520 to a predetermined level or less.

As described above, the main body 800, the socket part 600, and the power applying unit 700 according to the present invention are configured as described above. Therefore, the electron beam generating module 100 according to the present invention may be selectively detachable to the socket part 600.

Next, to describe the electron beam generation module 100 according to the present invention.

1 to 7, the electron beam generating module 100 of the present invention is largely composed of a cap 200, an insulating tube 300, an electron beam generating unit 400, and an electrode connecting unit 500. A feature of the present invention is that the electron beam generating module 100 is configured to be selectively detachable from the socket portion 600 of the main body 800.

Next, the configuration of the electron beam generating module 100 will be described in detail.

The insulation tube 300 is formed in a cylindrical shape having a predetermined length. Preferably, the length of the insulation tube 300 is preferably formed to be fitted to the socket portion 600. In addition, the insulating tube 300 is preferably made of an insulating material of silicon material.

The cap 200 is installed at one end of the insulation tube 300.

The cap 200 includes a cam body 210, an extension body 220 extending from one surface of the cap body 210, and a support electrode 230 connected to the extension body 220.

The cap body 210 is formed in a disc shape. In addition, the cap body 210 has a light emitting window 211 having a target 212 is formed.

The extension body 220 is formed in a cylindrical shape, it is formed to protrude a predetermined length from one surface of the cap body 210. In addition, a thread 221 is formed on an outer circumference of the extension body 220. Here, the screw thread 221 is a member that performs a function that can be screwed in the socket portion (not shown).

In addition, the support electrode 230 has a structure in which an outer surface is in close contact with the inner circumference of the extension body 220 and an end thereof is supported on one end surface of the insulating tube 300.

One end of the support electrode 230 is in contact with one surface of the cap body 210, the first support electrode 231 having a cylindrical shape is in close contact with the inner circumference of the extension body 220, and extends a predetermined length. The second support electrode 232 which extends a predetermined length along the outer circumference of the other end of the first support electrode 231 and whose bottom surface is in close contact with one end surface of the insulating tube 300, and is formed on the outer circumference of the second support electrode 232. And a third support electrode 233 which is bent to surround one end of the insulating tube 300 and is integrally formed with each other.

Therefore, the support electrode 230 may support the cap body 210 and the extension body 220 to attach to one end of the insulation tube 300.

An electron beam generator 400 is disposed inside the insulator tube 300.

The electron beam generator 400 is a cylindrical focus electrode tube 410 disposed inside the insulation tube 300, and a pair of grounds disposed inside the focus electrode tube 410 and receiving power. It consists of filaments 420 having rods 431 and 432.

Here, the pair of ground rods 431 and 432 may include a first ground rod 431 and a second ground rod 432. The pair of ground rods 431 and 432 serve as electrodes through which a current supplied from the outside can flow. Accordingly, the pair of ground rods 431 and 432 may apply the current to the filament 420 which is installed to connect the ends of the pair of ground rods 431 and 432.

Accordingly, the filament 420 is heated to a predetermined temperature and emits electrons to the outside.

In addition, the focus electrode tube 410 accelerates the emitted electrons to strike the target 212 provided in the cap body 210.

In addition, the other end of the focus electrode tube 410 may be bent to surround the outer surface of the first upper electrode 511 of the first electrode unit 510 described below. Accordingly, the focus electrode tube 410 may be stably fixed to the first electrode part 510.

Accordingly, by hitting the target 212 of the cap body 210 forming the anode, it is possible to generate an electron beam to the outside through the light emitting window 211.

The other end of the insulating tube 300 is provided with an electrode connecting portion 500.

The electrode connection part 500 includes a first electrode part 510 and a second electrode part 520.

The first electrode part 510 is disposed at an inner circumference of the other end of the insulating tube 300 and is connected to any one of the pair of ground rods 431 and 432 (first ground rod 431), and the focus electrode tube ( It is made of a hollow shape connected to the other end of the 410.

The second electrode part 520 is disposed inside the first electrode part 510, has a groove shape, and has an upper surface thereof on the other side of the pair of ground rods 431 and 432 (second ground rod 432). )).

In addition, the electrode connection part 500 has a cylindrical fixing member 530 that fixes the first electrode part 510 and the second electrode part 520 to each other and is made of an insulating material.

The cylindrical fixing member 530 may serve to airtight the inside of the insulating tube 300 from the outside. That is, the inside of the insulation tube 300 to maintain the vacuum state.

Here, the first electrode part 510 and the second electrode part 520 will be described in more detail.

The first electrode 510 has an outer surface connected to the first ground rod 431, a first upper end connected to the other end of the focus electrode tube 410, and an upper end of the fixing member 530 supported on the inner surface. An electrode 511, a first extension electrode 512 extending a predetermined length from the lower end of the first upper electrode 511 along the inner circumference of the other end of the insulating tube 300, and an outer surface of the first extension electrode The first lower electrode 513 is extended from the lower end of the 512 and the outer surface is in close contact with the inner circumference of the insulating tube 300 and bent to surround the other end surface of the insulating tube 300.

Accordingly, the first electrode part 510 is a cathode electrode, and serves to apply power supplied from the outside to the first ground rod 431.

In addition, the second electrode part 520 has a disk-shaped second upper electrode 521 having an upper surface connected to the second ground rod 432, and the first upper electrode circumference of the second upper electrode 521. The second extension electrode 522 extends for a predetermined length to extend along the inner circumference of the electrode unit 510, and extends a predetermined length from a lower end of the second extension electrode 522 to the outside of the second extension electrode 522. The second lower electrode 523 is bent to open to support the lower end of the fixing member 530.

Therefore, the second electrode part 520 is a cathode electrode, and may serve to apply power supplied from the outside to the second ground rod 432.

Here, the first electrode portion 510 and the second electrode portion 520 form a cylindrical electrode, except that the second electrode portion 520 has a cylindrical shape and its upper surface is the first upper electrode 511. ) Forms a groove shape.

On the other hand, between the inner circumference of the first electrode portion 510 and the outer circumference of the second electrode portion 520 is formed an annular gap (G) in which a power supply electrode (not shown) is fitted.

Here, it is preferable that the cylindrical fixing member 530 used as the insulating tube 300 is fixedly fitted to the gap G. Accordingly, the fixing member 530 maintains a vacuum state by sealing the internal space of the insulating tube 300, that is, the space where the electron beam generator 400 is located, from the outside, and is a cathode electrode. Insulate the electrode 510 and the second electrode 520 from each other.

The fixing method of the fixing member 530 fixedly installed as described above will be described.

The first upper electrode 511 of the first electrode part 510 may include an annular first main support body 511a for closely supporting an upper surface of the fixing member 530, and the first main support body ( The first sub support body 511b extends from the outer circumference of 511a and closely wraps around the outer circumference of the upper end of the fixing member 530.

In addition, the second lower electrode 523 of the second electrode part 520 may include a second main support body 523a in close contact with an inner circumference of the lower end of the fixing member 530, and the second main support body ( The second sub support body 523b extends to open from the outer periphery of 523a and closely supports the bottom surface of the fixing member 530.

Therefore, as described above, the outer circumference, the inner circumference, the upper end surface and the lower end surface of the fixing member 530 may be installed at fixed positions by the first and second electrode parts 510 and 520.

Here, a predetermined space is further formed between the first electrode portion 510 and the outer circumference of the fixing member 530. This is a space exposed to the outside from the other end of the insulating tube 300, and forms an annular space. In addition, since the annular support protrusion (not shown) is fitted in the annular space, the position of the electron beam generating module 100 of the present invention may be fixed by the support protrusion. Preferably, since the support protrusion may be formed on the inner surface of the inner space of the socket portion, the electron beam generating module 100 of the present invention may be easily fixed to the socket portion.

In addition, at least one bending point may be formed in the second extension electrode 522 according to the present invention. Therefore, when the impact is applied to the second electrode portion 520 from the outside, since the impact can be easily absorbed by the bending point, the shape deformation of the second electrode portion 520 is substantially minimized. Can be.

Of course, the bending point mentioned above may be adopted in the same manner as in the first electrode unit 510 as well.

Next, the process of fitting the electron beam generating module 100 to the socket part 600 will be described with reference to FIGS. 1 to 7.

The electron beam generating module 100 according to the present invention may be introduced into the internal space 601 of the socket body 610 through the opening of the socket part 600.

In this case, the cap 200 of the electron beam generating module 100 is located in the opening of the socket part 600, and thus, the insulation tube 300 may be located in the internal space 601 of the socket part body 610. Can be.

In addition, at the other end of the insulating tube 300, the annular support protrusion 611 is between the first electrode portion 510 and the second electrode portion 520, that is, the first electrode portion 510 It can achieve a state fitted in the annular space formed between the inner circumference of the and the outer circumference of the fixing member 530. Therefore, the insulation tube 300 may be prevented from being twisted in the internal space 601 of the socket body 610.

In addition, an end of the first body 712 of the first power applying unit 710 may be fitted into the groove of the second electrode unit 520. Accordingly, an end of the first body 712 may be connected to an end surface of the second upper electrode 521 of the second electrode unit 520. In this case, the first power applying unit 710 has a predetermined elastic force is formed by the first elastic member 713, the first 'body 712 is sliding a predetermined length along the outer periphery of the first body 711 Can be.

At the same time, an end of the second body 722 of the second power applying unit 720 may be connected to the first electrode unit 510. Accordingly, an end of the second body 722 may be connected to a bottom surface of the first lower electrode 513 of the first electrode part 510. In this case, the second power applying unit 720 is a predetermined elastic force is formed by the second elastic member 723, the second 'body 722 is a predetermined length sliding movement along the outer periphery of the second body 721 Can be.

In this state, when the cap 200 is rotated in one direction, preferably in the direction in which the screw is coupled, the electron beam generating module 100 including the cap 200 is rotated so that the thread of the cap 200 ( 221 and the other thread S formed in the opening of the socket 600 are screwed together and the electron beam generating module 100 is inserted into the internal space 601 of the socket 600 in a predetermined depth. .

At this time, the support protrusion 611 guides the rotation of the electron beam generating module 100 in a state of being fitted in the annular space, and the first body 712 is the second upper electrode of the second electrode portion 520 ( The second body 722 may be rotated in a state of being connected to a bottom surface of the 521, and the second body 722 may be rotated in a state of being connected to a bottom surface of the first lower electrode 513 of the first electrode part 510.

Subsequently, when power is applied to the first and second electrode portions 510 and 520 through the power applying unit 700, the filament 420 is heated and emits electrons, and the emitted electrons are the focus electrode tube 410. It is accelerated toward the target 212 by. Therefore, while colliding with the target 212, an electron beam such as X-ray may be generated and radiated to the outside through the light emission window 211.

When the electron beam generating module 100 operated as described above is replaced with another electron beam generating module, when the electron beam generating module 100 is rotated in a direction opposite to the screw coupling direction, the electron beam generating module ( 100 may be easily removed from the socket portion 600 of the main body 800. Subsequently, a new electron beam generating module may be installed in the socket part 600 in the coupling manner as described above.

Although the preferred embodiments of the present invention have been disclosed for illustrative purposes, those skilled in the art will appreciate that various modifications, additions and substitutions are possible, without departing from the scope and spirit of the invention as disclosed in the accompanying claims. Of course.

Therefore, the scope of the present invention should not be limited to the described embodiments, but should be determined not only by the claims below, but also by the equivalents of the claims.

1 is a partially cutaway perspective view showing a photo ion generating device of the present invention.

2 is an exploded perspective view showing a photo ion generating device of the present invention.

3 is an exploded perspective view illustrating the electron beam generating module of FIG. 2.

Figure 4 is a cross-sectional view showing a state before coupling of the socket portion and the electron beam generating module of the main body according to the present invention.

FIG. 5 is an enlarged cross-sectional view of a symbol A of FIG. 4.

FIG. 6 is an enlarged cross-sectional view of a symbol B of FIG. 4.

7 is a cross-sectional view showing a state after coupling of the socket portion of the main body and the electron beam generating module according to the present invention.

* Description of Signs of Main Parts of Drawings *

100: electron beam generating module 200: cap

210: cap body 220: extension body

230: support electrode 300: insulated tube

400: electron beam generator 410: focus electrode tube

420: filament 431: first ground rod

432: second ground rod 500: electrode connection

510: first electrode portion 520: second electrode portion

530: fixing member 600: socket portion

610: socket body 700: power supply

710: first power supply unit 711: first body

712: first body 713: first elastic member

720: second power supply unit 721: second body

722: second body 723: second elastic member

Claims (17)

A socket part of which one side is opened and an internal space is formed; An electron beam generating module that is selectively coupled to the internal space of the socket to be detachable and generates an electron beam by receiving power from the outside; And It includes a power supply for providing power to the electron beam generating module, The socket portion, A socket portion body in which the one side is opened and the inner space is provided, a first through hole penetrating the inner space from the center of the inner surface portion of the socket portion body to the outside, and an inner peripheral portion of the inner surface portion of the socket portion body; A second through hole penetrating the inner space to the outside, and an annular support protrusion protruding from the inner surface of the inner space at a position surrounding the first through hole, The power supply unit, And a second power supply unit disposed in the first through hole to apply power and a second power supply unit disposed in the second through hole to apply power. delete The method of claim 1, The first power supply unit is disposed in the first through-hole, the first body is open on one side and the first space is formed therein, the first body is connected to the outer periphery of the first body is arranged to be slidable and the first body A first 'body having a first' space in communication with a first space of the first elastic body, the first elastic member disposed in the first space and the first 'space to elastically support the first body and the first' body And The second power supply unit is disposed in the second through-hole, the second body having one side opened and a second space formed therein, the second body is disposed to be connected to the outer periphery of the second body and the second body A second 'body having a second' space in communication with a second space of the second elastic member disposed in the second space and the second 'space to elastically support the second body and the second' body. Photo-ion generating device comprising a. The method of claim 3, The first stepped portion formed at the end of the first body is formed to engage with the first stepped end formed at the end of the first 'body is limited sliding distance, The second stepped portion formed at the end of the second body is formed so as to cross each other and the second stepped end formed at the end of the second 'body photo ion generating device characterized in that the sliding movement distance is limited. The method of claim 3, An end of the first body and the end of the second body protruding into the inner space is formed convex. The method of claim 3, And a thread is formed on an inner circumference of the opening of one side of the socket part. The method of claim 6, The electron beam generating module, Coupled with the socket portion, a light emitting window is provided at one end, a cylindrical insulating tube made of an insulating material, and disposed inside the insulating tube, by applying power from the outside to generate an electron beam to generate the light emitting window And an electrode connection portion disposed at the other end of the insulated tube and to which an external power supply electrode is fitted to apply power to the electron beam generator. 8. The method of claim 7, One end of the insulated tube is provided with a cap, The cap has a disk-shaped cap body having the light emitting window in which a target in which the electron beam is collided is formed, and a thread and a screw extending from one surface of the cap body along one end of the insulating tube and formed in the opening at an outer circumference thereof. And a cylindrical extension body having another thread to be joined, and a support electrode whose outer surface is in close contact with the inner circumference of the extension body and whose end is supported by one end surface of the insulated tube. 9. The method of claim 8, The support electrode, One end is in contact with one surface of the cap body, the first support electrode of the cylindrical shape in close contact with the inner circumference of the extension body extending a predetermined length, and extends a predetermined length along the outer periphery of the other end of the first support electrode, the bottom surface is the insulated tube And a second support electrode in close contact with one end surface of the second support electrode, and a third support electrode formed on an outer circumference of the second support electrode and bent to surround one end of the insulation tube. 8. The method of claim 7, The electron beam generating unit, And a filament having a cylindrical focus electrode tube disposed inside the insulated tube and a pair of ground rods disposed inside the focus electrode tube to receive power. The method of claim 10, The electrode connection portion, A hollow first electrode part disposed at an inner circumference of the other end of the insulating tube and connected to any one of the pair of ground rods, connected to the other end of the focus electrode tube, and connected to the second power supply unit; A second electrode part disposed inside the one electrode part, having a groove shape, and having an upper surface connected to the other one of the pair of ground rods, and connected to the first power applying part; And a cylindrical fixing member made of an insulating material, the two electrode portions being fixed to each other. 12. The method of claim 11, The first electrode unit, A first upper electrode having an outer surface connected to any one of the pair of ground rods and connected to the other end of the focus electrode tube, and having an upper end of the fixing member supported on an inner surface thereof, and an insulating tube from a lower end of the first upper electrode; A first extension electrode extending a predetermined length to extend along an inner circumference of the other end, and an outer surface of the first extension electrode extending from a lower end of the first extension electrode and having an outer surface closely attached to the inner circumference of the insulator tube and surrounding the other end surface of the insulator tube And a first lower electrode connected to an end of the second 'body, The second electrode unit, A second disc-shaped upper end electrode having an upper surface connected to any one of the pair of ground rods, and a second extending electrode extending a predetermined length from the outer periphery of the second upper electrode along the inner periphery of the first electrode part; And a second lower electrode which extends from a lower end of the second extension electrode and extends to extend outwardly of the second extension electrode to support the lower end of the fixing member and is connected to an end of the first body. Photo-ion generator characterized in that it comprises. The method of claim 12, An annular gap is formed between an inner circumference of the first electrode portion and an outer circumference of the second electrode portion. The method of claim 13, The cylindrical fixing member is fitted into the gap and fixedly installed, The first upper electrode includes an annular first main support body for tightly supporting the upper surface of the fixing member and a first sub support extending from an outer circumference of the first main supporting body to closely wrap the outer circumference of the upper end of the fixing member. Formed into a body, The second lower electrode may include a second main support body in close contact with the inner circumference of the lower end of the fixing member, and a second sub support extending from the outer circumference of the second main support body to closely support the bottom surface of the fixing member. Photo-ion generating device, characterized in that formed in the body. 15. The method of claim 14, The support protrusion is fitted into the gap, And the support protrusion is positioned between an outer circumference of the fixing member and an inner circumference of the first electrode portion. The method of claim 12, And the second extension electrode has at least one bending point. The method of claim 12, And the other end of the focus electrode tube is bent to surround the outer surface of the first upper electrode.

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