KR101159807B1 - Chip Scale Package of Image Sensor and Manufacturing Method Thereof - Google Patents
Chip Scale Package of Image Sensor and Manufacturing Method Thereof Download PDFInfo
- Publication number
- KR101159807B1 KR101159807B1 KR1020100043115A KR20100043115A KR101159807B1 KR 101159807 B1 KR101159807 B1 KR 101159807B1 KR 1020100043115 A KR1020100043115 A KR 1020100043115A KR 20100043115 A KR20100043115 A KR 20100043115A KR 101159807 B1 KR101159807 B1 KR 101159807B1
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- KR
- South Korea
- Prior art keywords
- printed circuit
- circuit board
- image sensor
- mold layer
- support mold
- Prior art date
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L24/00—Arrangements for connecting or disconnecting semiconductor or solid-state bodies; Methods or apparatus related thereto
- H01L24/93—Batch processes
- H01L24/95—Batch processes at chip-level, i.e. with connecting carried out on a plurality of singulated devices, i.e. on diced chips
- H01L24/97—Batch processes at chip-level, i.e. with connecting carried out on a plurality of singulated devices, i.e. on diced chips the devices being connected to a common substrate, e.g. interposer, said common substrate being separable into individual assemblies after connecting
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L2224/00—Indexing scheme for arrangements for connecting or disconnecting semiconductor or solid-state bodies and methods related thereto as covered by H01L24/00
- H01L2224/01—Means for bonding being attached to, or being formed on, the surface to be connected, e.g. chip-to-package, die-attach, "first-level" interconnects; Manufacturing methods related thereto
- H01L2224/42—Wire connectors; Manufacturing methods related thereto
- H01L2224/47—Structure, shape, material or disposition of the wire connectors after the connecting process
- H01L2224/48—Structure, shape, material or disposition of the wire connectors after the connecting process of an individual wire connector
- H01L2224/4805—Shape
- H01L2224/4809—Loop shape
- H01L2224/48095—Kinked
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L2224/00—Indexing scheme for arrangements for connecting or disconnecting semiconductor or solid-state bodies and methods related thereto as covered by H01L24/00
- H01L2224/01—Means for bonding being attached to, or being formed on, the surface to be connected, e.g. chip-to-package, die-attach, "first-level" interconnects; Manufacturing methods related thereto
- H01L2224/42—Wire connectors; Manufacturing methods related thereto
- H01L2224/47—Structure, shape, material or disposition of the wire connectors after the connecting process
- H01L2224/48—Structure, shape, material or disposition of the wire connectors after the connecting process of an individual wire connector
- H01L2224/481—Disposition
- H01L2224/48151—Connecting between a semiconductor or solid-state body and an item not being a semiconductor or solid-state body, e.g. chip-to-substrate, chip-to-passive
- H01L2224/48221—Connecting between a semiconductor or solid-state body and an item not being a semiconductor or solid-state body, e.g. chip-to-substrate, chip-to-passive the body and the item being stacked
- H01L2224/48225—Connecting between a semiconductor or solid-state body and an item not being a semiconductor or solid-state body, e.g. chip-to-substrate, chip-to-passive the body and the item being stacked the item being non-metallic, e.g. insulating substrate with or without metallisation
- H01L2224/48227—Connecting between a semiconductor or solid-state body and an item not being a semiconductor or solid-state body, e.g. chip-to-substrate, chip-to-passive the body and the item being stacked the item being non-metallic, e.g. insulating substrate with or without metallisation connecting the wire to a bond pad of the item
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L2224/00—Indexing scheme for arrangements for connecting or disconnecting semiconductor or solid-state bodies and methods related thereto as covered by H01L24/00
- H01L2224/01—Means for bonding being attached to, or being formed on, the surface to be connected, e.g. chip-to-package, die-attach, "first-level" interconnects; Manufacturing methods related thereto
- H01L2224/42—Wire connectors; Manufacturing methods related thereto
- H01L2224/47—Structure, shape, material or disposition of the wire connectors after the connecting process
- H01L2224/49—Structure, shape, material or disposition of the wire connectors after the connecting process of a plurality of wire connectors
- H01L2224/491—Disposition
- H01L2224/4912—Layout
- H01L2224/49171—Fan-out arrangements
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L2924/00—Indexing scheme for arrangements or methods for connecting or disconnecting semiconductor or solid-state bodies as covered by H01L24/00
- H01L2924/15—Details of package parts other than the semiconductor or other solid state devices to be connected
- H01L2924/181—Encapsulation
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L2924/00—Indexing scheme for arrangements or methods for connecting or disconnecting semiconductor or solid-state bodies as covered by H01L24/00
- H01L2924/15—Details of package parts other than the semiconductor or other solid state devices to be connected
- H01L2924/181—Encapsulation
- H01L2924/1815—Shape
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- Engineering & Computer Science (AREA)
- Computer Hardware Design (AREA)
- Microelectronics & Electronic Packaging (AREA)
- Power Engineering (AREA)
- Solid State Image Pick-Up Elements (AREA)
Abstract
The present invention relates to an image sensor package and a method of manufacturing the same, wherein by curing a liquid synthetic resin to form a support mold layer on a printed circuit board, the image sensor chip can be directly mounted on the printed circuit board, and accordingly a ceramic mold This eliminates the need for a further miniaturization, reduces manufacturing processes and manufacturing costs, and simultaneously forms a supporting mold layer on a printed circuit board module in which unit printed circuit boards are continuously formed, thereby providing a printed circuit board module based on a unit printed circuit board. By cutting a process, a plurality of image sensor packages can be manufactured at the same time, thereby providing an image sensor package and a method of fabricating the same.
Description
The present invention relates to an image sensor package and a manufacturing method thereof. More specifically, by curing the liquid synthetic resin to form a support mold layer on the printed circuit board, the image sensor chip can be directly mounted on the printed circuit board, thereby eliminating the need for a ceramic mold, which makes it possible to further reduce the size. Process and manufacturing costs are reduced, and a plurality of image sensors are formed by cutting a printed circuit board module based on a unit printed circuit board by simultaneously forming a supporting mold layer on a printed circuit board module in which unit printed circuit boards are continuously formed. The present invention relates to an image sensor package and a method of manufacturing the same, which can produce the package at the same time, thereby improving productivity.
In general, an image sensor is a semiconductor device, which is called a solid-state imaging device (CCD) or CMOS image sensor (CIS). An image sensor uses a photoelectric conversion device and a charge-coupled device to capture an object and electrically It means a device that outputs a signal, and is used in a wide variety of applications such as public welfare, industrial, broadcasting, and military. Recently, it is widely used in cameras, camcorders, multimedia, personal computers and surveillance cameras, and the demand is exploding.
Such an image sensor is manufactured and used in a package form, and a package means a form sealed with a plastic resin or ceramic so that an integrated circuit chip designed with a microcircuit can be mounted and used in an actual electronic device. Since a package generally has a much larger size than an integrated circuit chip embedded therein, miniaturization of the package size to a chip size is constantly being studied.
1 is a view schematically showing the structure of a conventional image sensor package according to the prior art.
As a general image sensor package, a ceramic package using ceramics is mainly used, and as shown in FIG. 1, the
The image sensor package having a general ceramic shape configured as described above has a problem in that its application range is limited because the overall shape of the
The present invention has been invented to solve the problems of the prior art, and an object of the present invention is to form a support mold layer on a printed circuit board by curing a liquid synthetic resin to mount an image sensor chip directly on the printed circuit board. It is possible to provide a miniaturized image sensor package and a manufacturing method by eliminating the need for ceramic molds.
Another object of the present invention is to form a support mold layer in such a manner as to cure a liquid synthetic resin and to easily seal the protective cover to the support mold layer through this, so that the horizontal state of the protective cover is automatically aligned and the manufacturing process is easy. In addition to reducing manufacturing costs, the present invention provides an image sensor package and a manufacturing method which are structurally stable and thus improve durability.
Yet another object of the present invention is to form a plurality of image sensor packages through a process of cutting a printed circuit board module based on a unit printed circuit board by simultaneously forming a support mold layer on a printed circuit board module in which a unit printed circuit board is continuously formed. It can be produced at the same time to provide an image sensor package manufacturing method that improves productivity.
The present invention, a printed circuit board; An image sensor chip mounted on the printed circuit board and bonded to the wire by bonding; A protection dam formed along an edge of an upper surface of the image sensor chip; A protective cover disposed upwardly spaced from the image sensor chip; And a support mold layer formed to surround an outer circumference of the image sensor chip along the protection dam, and the protection cover is coupled to and supported by an upper end to seal the cavity between the protection cover and the image sensor chip. The support mold layer provides an image sensor package, wherein a liquid synthetic resin is cured by a curing process after being supplied to the printed circuit board.
In this case, the support mold layer may be formed by an epoxy resin.
In addition, the support mold layer may be formed to surround all the bonding wires for wire bonding and bonding the image sensor chip to the printed circuit board.
On the other hand, the present invention, a preparatory step of preparing a printed circuit board module in which a plurality of unit printed circuit boards are continuously formed on one panel; A bonding step in which an image sensor chip is mounted on each unit printed circuit board of the printed circuit board module and wire bonded to each other; A protection dam forming step of forming a protection dam around an edge of an upper surface of the image sensor chip; A support mold layer forming step of forming a support mold layer on the printed circuit board module to surround the outer periphery of each of the image sensor chips along the protection dam; A protective cover that covers all of the plurality of unit printed circuit boards may be mounted on an upper end of the support mold layer, and then the sealing cover and the support mold layer may be sealed to form a cavity between the protection cover and the image sensor chip. To combine the cover; And a cutting step of cutting the combination of the printed circuit board module and the protective cover coupled by the support mold layer based on the unit printed circuit board, respectively.
In this case, the forming of the support mold layer may include supplying a liquid synthetic resin to the printed circuit board module within a limit in which a supply region is limited by the protection dam; And a primary curing step of curing the liquid synthetic resin supplied to the printed circuit board module into a solid phase through a primary curing process to form the support mold layer.
In addition, the cover coupling step may be a mounting step of mounting the protective cover on the upper end of the support mold layer; And a second curing step of sealing the bonding of the protective cover and the support mold layer while sequentially changing the state of the support mold layer from the solid phase to the liquid phase and then from the liquid phase to the solid phase through a secondary curing process. have.
The image sensor package manufacturing method may further include an outer dam forming step of forming an outer dam along a circumference of the printed circuit board module.
The image sensor package manufacturing method may further include forming a unit outer dam along the periphery of each edge of the unit printed circuit board, and the supplying step may be performed in each area of the unit outer dam. It can be configured to distribute and supply each of the liquid synthetic resin by the same amount.
According to the present invention, by forming a support mold layer on a printed circuit board by curing the liquid synthetic resin, the image sensor chip can be directly mounted on the printed circuit board, thus eliminating the need for a ceramic mold, thereby further miniaturizing the image sensor package. It can work.
In addition, by forming the support mold layer by curing the synthetic resin in the liquid and easily sealing bonding the protective cover to the support mold layer through this, the manufacturing process is not only easy to reduce the manufacturing cost, but also structurally stable and durable There is an effect that can be improved.
In addition, by simultaneously forming a support mold layer on a printed circuit board module in which the unit printed circuit board is continuously formed, a plurality of image sensor packages can be simultaneously manufactured by cutting the printed circuit board module based on the unit printed circuit board. There is an effect that can improve the productivity.
1 is a cross-sectional view showing a schematic configuration of a conventional image sensor package according to the prior art,
2 is a cross-sectional view showing a schematic configuration of an image sensor package according to an embodiment of the present invention;
3 is an operation flowchart showing a manufacturing method of an image sensor package according to an embodiment of the present invention;
4 is a plan view conceptually showing the manufacturing step shape of the image sensor package according to an embodiment of the present invention;
5 is a cross-sectional view conceptually illustrating a shape of a manufacturing step of the image sensor package according to an embodiment of the present invention;
6 and 7 are a plan view and a cross-sectional view conceptually showing the manufacturing step shape of the image sensor package according to another embodiment of the present invention.
Hereinafter, exemplary embodiments of the present invention will be described in detail with reference to the accompanying drawings. First of all, in adding reference numerals to the components of each drawing, it should be noted that the same reference numerals are used as much as possible even if displayed on different drawings. In addition, in describing the present invention, when it is determined that the detailed description of the related well-known configuration or function may obscure the gist of the present invention, the detailed description thereof will be omitted.
2 is a cross-sectional view showing a schematic configuration of an image sensor package according to an embodiment of the present invention.
The image sensor package according to an embodiment of the present invention is a chip scale package in which the size of the package is reduced to a chip size, and includes a printed
The
The
A
The
The
In more detail, as shown in FIG. 2, a liquid synthetic resin is formed on the outer printed
Meanwhile, the liquid synthetic resin may use an epoxy resin having excellent adhesion according to an embodiment of the present invention, and the
According to such a structure, the image sensor package according to an embodiment of the present invention, unlike the prior art, may be configured by mounting the
The present invention also provides a manufacturing method of the image sensor package described above, and looks at the image sensor package manufacturing method as follows.
3 is an operation flowchart illustrating a manufacturing method of an image sensor package according to an embodiment of the present invention, and FIGS. 4 and 5 are plan views conceptually illustrating shapes of manufacturing steps of the image sensor package according to an embodiment of the present invention. And cross section.
As described above, the image sensor package according to an embodiment of the present invention mounts the
In order to simultaneously manufacture a plurality of image sensor packages, first, a printed circuit board module P having a plurality of unit printed
Each unit printed
After the wire bonding of the
Subsequently, in the state in which the
On the other hand, according to the process of forming the
When the
When the printed circuit board module P and the
Therefore, in the image sensor package manufacturing method according to an embodiment of the present invention, a plurality of unit printed
For example, the liquid crystal resin for the method of manufacturing the image sensor package described above using an epoxy resin will be described. First, the printed circuit board module P having the unit printed
Here, the curing process is a process of applying heat to the synthetic resin of the liquid for a predetermined time, the liquid synthetic resin is generally cured to a solid phase through such a curing process, the first curing according to an embodiment of the present invention The process is a process of curing the solid resin by applying heat to the synthetic resin in the liquid phase, the second curing process is changed to a liquid phase by applying heat to the
On the other hand, the
6 and 7 are a plan view and a cross-sectional view conceptually showing the manufacturing step shape of the image sensor package according to another embodiment of the present invention.
6 and 7 is a method of manufacturing an image sensor package according to another embodiment of the present invention to form an
Such a manufacturing method may be independently controlled for each unit printed
The above description is merely illustrative of the technical idea of the present invention, and those skilled in the art to which the present invention pertains may make various modifications and variations without departing from the essential characteristics of the present invention. Therefore, the embodiments disclosed in the present invention are intended to illustrate rather than limit the scope of the present invention, and the scope of the technical idea of the present invention is not limited by these embodiments. The scope of protection of the present invention should be construed according to the following claims, and all technical ideas falling within the scope of the same shall be construed as falling within the scope of the present invention.
100: printed circuit board 200: image sensor chip
300: protective dam 400: protective cover
500: support mold layer 600: outer dam
700: unit dam outside P: printed circuit board module
Claims (8)
A bonding step in which an image sensor chip is mounted on each unit printed circuit board of the printed circuit board module and wire bonded to each other;
A protection dam forming step of forming a protection dam around an edge of an upper surface of the image sensor chip;
A support mold layer forming step of forming a support mold layer on the printed circuit board module to surround the outer periphery of each of the image sensor chips along the protection dam;
A protective cover that covers all of the plurality of unit printed circuit boards may be mounted on an upper end of the support mold layer, and then the sealing cover and the support mold layer may be sealed to form a cavity between the protection cover and the image sensor chip. Making a cover coupling step; And
Cutting step of cutting the combination of the printed circuit board module and the protective cover bonded by the support mold layer based on the unit printed circuit board, respectively
Including,
The supporting mold layer forming step
A supply step of supplying a liquid synthetic resin to the printed circuit board module within a limit in which a supply region is limited by the protection dam; And
Primary curing step of curing the liquid synthetic resin supplied to the printed circuit board module to a solid phase through a primary curing process to form the support mold layer
Including,
The cover coupling step
A mounting step of mounting the protective cover on an upper end of the support mold layer; And
Secondary curing to align the horizontal state of the protective cover while sequentially changing the state of the support mold layer from the solid phase to the liquid phase through the secondary curing process, and the protective cover and the support mold layer sealingly bonded Ring steps
Image sensor package manufacturing method comprising a.
The method of claim 1, further comprising an outer dam forming step of forming an outer dam along the circumference of the printed circuit board module.
The method may further include forming a unit outer dam along the periphery of each unit printed circuit board.
The supplying step of the image sensor package manufacturing method, characterized in that for supplying each of the synthetic resin of the liquid distribution in the same amount to each of the unit outer dam inner region.
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
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KR1020100043115A KR101159807B1 (en) | 2010-05-07 | 2010-05-07 | Chip Scale Package of Image Sensor and Manufacturing Method Thereof |
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KR1020100043115A KR101159807B1 (en) | 2010-05-07 | 2010-05-07 | Chip Scale Package of Image Sensor and Manufacturing Method Thereof |
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KR20110123567A KR20110123567A (en) | 2011-11-15 |
KR101159807B1 true KR101159807B1 (en) | 2012-06-26 |
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Cited By (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US9966401B2 (en) | 2015-03-04 | 2018-05-08 | Samsung Electronics Co., Ltd. | Package for image sensor with outer and inner frames |
US9972580B2 (en) | 2015-12-31 | 2018-05-15 | Samsung Electronics Co., Ltd. | Semiconductor package and method for fabricating the same |
Families Citing this family (4)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
KR102195988B1 (en) * | 2016-02-18 | 2020-12-29 | 닝보 써니 오포테크 코., 엘티디. | Array imaging module and molded photosensitive assembly, cirduit board assembly and manufacturing method thereof for electronic device |
US10321028B2 (en) | 2016-07-03 | 2019-06-11 | Ningbo Sunny Opotech Co., Ltd. | Photosensitive assembly and camera module and manufacturing method thereof |
WO2018006673A1 (en) | 2016-07-03 | 2018-01-11 | 宁波舜宇光电信息有限公司 | Photosensitive component, and camera module and manufacturing method therefor |
KR20200109519A (en) * | 2019-03-13 | 2020-09-23 | 엘지이노텍 주식회사 | Camera Module |
Citations (4)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
KR20050120146A (en) * | 2004-06-18 | 2005-12-22 | 삼성테크윈 주식회사 | Electronic-circuit module package |
KR20060040317A (en) * | 2004-11-05 | 2006-05-10 | 삼성전자주식회사 | Image sensor assembly and fabrication methdo thereof |
KR20060045888A (en) * | 2004-06-10 | 2006-05-17 | 삼성전자주식회사 | Assembling method and structure of image sensor packages |
KR20060080521A (en) * | 2005-01-05 | 2006-07-10 | 어드벤스드 칩 엔지니어링 테크놀로지, 인크. | Fbga and cob package structure for image sensor |
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2010
- 2010-05-07 KR KR1020100043115A patent/KR101159807B1/en active IP Right Grant
Patent Citations (4)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
KR20060045888A (en) * | 2004-06-10 | 2006-05-17 | 삼성전자주식회사 | Assembling method and structure of image sensor packages |
KR20050120146A (en) * | 2004-06-18 | 2005-12-22 | 삼성테크윈 주식회사 | Electronic-circuit module package |
KR20060040317A (en) * | 2004-11-05 | 2006-05-10 | 삼성전자주식회사 | Image sensor assembly and fabrication methdo thereof |
KR20060080521A (en) * | 2005-01-05 | 2006-07-10 | 어드벤스드 칩 엔지니어링 테크놀로지, 인크. | Fbga and cob package structure for image sensor |
Cited By (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US9966401B2 (en) | 2015-03-04 | 2018-05-08 | Samsung Electronics Co., Ltd. | Package for image sensor with outer and inner frames |
US9972580B2 (en) | 2015-12-31 | 2018-05-15 | Samsung Electronics Co., Ltd. | Semiconductor package and method for fabricating the same |
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KR20110123567A (en) | 2011-11-15 |
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