KR101130049B1 - Piston coated diamond like carbon thin film and Method of manufacturing the same - Google Patents

Abstract

In the present invention, a diamond-like carbon thin film coating is formed by coating a diamond-like carbon thin film by plasma treatment using a hydrocarbon (C _n H _{2n + 2} ) and hydrogen (H ₂ ) as a reaction gas in a piston body made of steel. It relates to a piston and a method of manufacturing the same.

The piston manufactured by the present invention as described above maintains high hardness without any change in the microstructure of the piston material even after long-term use, and especially excellent in lubrication performance under low humidity conditions of rotating heavy equipment such as excavators, large cranes, etc. It is an advantage that it is suitable for use as a piston, which is an important part of the hydraulic pump for transmitting power.

Diamond-like carbon thin film, piston, ultrasonic cleaning, acid treatment, hydrogen etching, argon cleaning, interlayer deposition

Description

Diamond coated carbon like film and method of manufacturing the same

According to the present invention, a diamond-like carbon thin film is coated by a plasma treatment using hydrocarbon (C _n H _{2n + 2} ) and hydrogen (H ₂ ) as reaction gases on a piston body made of steel. It maintains high hardness without any change in the microstructure of the piston material and has excellent lubrication performance even under low humidity conditions. It is used as a piston, which is an important part of the hydraulic pump that transmits the power of rotating heavy equipment such as excavators and large cranes. The present invention relates to a diamond-like carbon thin film coated piston and a method of manufacturing the same.

In general, hydraulic pump is an important device for converting mechanical energy generated from main power sources such as electric motors and internal combustion engines into hydraulic energy. It is used for heavy equipment, tanks, etc. It is a product of size and used for the purpose of generating great power. In particular, it creates a large power with smooth movement in the Shanghai East and left and right rotations of heavy equipment to construct a safe and accurate operation.

As such, the parts of the piston pump, which are important parts for transmitting the power of heavy machinery such as excavators and large cranes, are manufactured and supplied by a few domestic companies. Although the nitride layer is clearly observed as shown in (100-times magnified optical micrograph), the nitride layer disappears as shown in the photograph of FIG. 1B (100-times magnified optical micrograph). Able to know. It can be seen that the internal structure of the piston material is changed by the heat generated inside when the piston pump is driven, and the hardness retained initially is lost due to the change of the structure, and the wear resistance is lowered. Since the falling phenomenon occurs, there is a problem such as long term unavailable. Therefore, it is imported from Bosch Rexroth (Germany), Kawasaki or Uchida (Japan) and applied to heavy equipment such as excavators, large cranes and military tanks. .

On the other hand, as a material for surface-treating parts such as pistons that require high physical properties as described above, a diamond like carbon (DLC) thin film is known, and such diamond-like carbon (DLC) is known. ) Thin film is one of amorphous carbon thin film and it has high hardness, lubricity, abrasion resistance, chemical stability, electrical insulation, and optical transmittance similar to diamond. When hydrogen is contained, the name of hydrogen-containing amorphous carbon, which emphasizes structural characteristics, is used. Recently, ultra-diamond-like carbon thin films manufactured by the FVA (Filtered Vacuum Arc) method have a very high sp ³ fraction and almost diamond. It is called ta-C (tetrahedral amorphous carbon) or aD (amorphous diamond) due to its mechanical properties and density, which is close to it. Especially, it has excellent lubricity under low humidity conditions and is suitable for lubricating coating of mechanical parts for aerospace industry. As is received, it is classified as a representative high lubrication high hardness material.

Diamond-like carbon thin film having the above characteristics has attracted the attention of many researchers because of its unique structure and excellent physical and chemical properties. The diamond-like carbon thin film is amorphous, unlike diamond and graphite, and therefore has a wide range of physical and chemical properties. In the case of carbon, sp ³ , sp ² , and sp ¹ hybrid bonds are possible in the case of carbon, so double and triple bonds are mixed as well as single bonds. In this regard, diamond-like carbon thin films have a more complex bonding structure than amorphous Si materials of the same group, and it is very important to understand the thin film structure and characteristics according to the synthesis conditions.

Therefore, various techniques for forming diamond-like carbon on the surface of the piston material as described above have been researched and developed. As a patent applied to such a technique, Korean Laid-Open Patent Publication No. 2002-0055500 discloses a piston. The surface of the piston is caused by the surface damage caused by friction and wear due to the reciprocating motion in the process of hydraulic generation, causing malfunction of the hydraulic generator. To improve this problem, sputter cleaning is carried out by using a bias in the argon atmosphere on the surface of the piston. Step, the second step of depositing an intermediate layer by bias in a mixed atmosphere of argon and silane, and introducing a hydrocarbon gas and a vias of -300 to -600V to form a diamond-like carbon film 1.0 to 10 탆 thick on the piston. Of the hydraulic generator piston, characterized in that the three-step process of coating with A diamond-like carbon film coating method is known, and in the piston of a high pressure piston in a cylinder part of a control or injection valve for injecting water, especially used in a combustion engine in Korean Patent Laid-Open Publication No. 2005-0010481, the piston The piston is characterized in that a groove and a wear protection layer are formed in the surface area, wherein the wear protection layer is made of diamond-like carbon (DLC) or one or more ceramic materials, in particular Al ₂ O ₃ , SiO ₂ , TiN, etc. Although a piston for a high pressure piston in a cylinder part is known to include one of the materials, in the case of the above patents, there is a large difference in hardness, which is the main physical property of the thin film, depending on the conditions for synthesizing the diamond-like carbon thin film. There was a problem.

Therefore, the present invention is to solve the problems as described above, the first ultrasonic cleaning using trichloroethylene (TCE) and the second ultrasonic cleaning using ethyl alcohol in the pretreatment process during the surface treatment of the piston 5 The acid treatment is performed to cause fine corrosion on the piston surface using% nitric acid solution, thereby improving the deposition force of the intermediate layer on the piston surface to improve the adhesion between the piston material and the diamond-like carbon thin film. An object of the present invention is to provide a diamond-like carbon thin film coated piston and a method of manufacturing the same.

In the present invention, the piston is charged into the chamber and then etched using hydrogen on the piston surface in the thin film forming process, thereby increasing the adhesion of the diamond-like carbon thin film coating layer on the surface of the piston etched by hydrogen etching, and thus prolonged use. Edo piston thin film coating piston and its manufacturing method characterized in that it can maintain a high hardness without changing the microstructure of the piston body, and can maintain high lubrication under low humidity conditions due to the characteristics of the diamond-like carbon thin film Providing is another task.

In addition, the present invention, by depositing the intermediate layer using the vacuum pressure of the chamber using the HMDSO (hexamethyldisiloxane) solution during the deposition of the intermediate layer, which ensures safety unlike the conventional method using high risk and difficult to handle SiH ₄ Another object of the present invention is to provide a diamond-like carbon thin film coated piston and a manufacturing method thereof.

In the present invention for achieving the above object in the method for producing a diamond-like carbon thin film coated piston,

The piston is a pretreatment process of ultrasonic cleaning and acid treatment,

The pretreated piston is charged into a chamber, and then hydrogen etching, argon cleaning, interlayer deposition and thin film formation process of diamond carbon thin film coating,

The method for producing a diamond-like carbon thin film coated piston characterized by passing through the problem solving means.

The present invention also provides a diamond-like carbon thin film coated piston characterized in that the diamond-like carbon thin film is coated on the surface of the piston by the above method.

However, in the present invention, the ultrasonic cleaning is performed by the first ultrasonic cleaning using trichloroethylene (TCE) and the second ultrasonic cleaning of the second ultrasonic cleaning using ethyl alcohol,

The acid treatment is treated by immersing the piston in 5% nitric acid solution for 5-10 seconds,

And the thin film formation process consisting of the four steps of hydrogen etching, argon cleaning, intermediate layer deposition and diamond-like carbon thin film coating is preferably maintained at 200 ℃ temperature in the chamber,

The hydrogen etching exhausts the gas in the chamber so that the pressure is maintained at 10 ^-5 to 10 ^-6 Torr, and then again generates 600 W of RF plasma for 20 to 30 minutes in a hydrogen (H ₂ ) atmosphere of 4 x 10 ^-2 Torr. To etch the material surface of the piston,

The argon cleaning is performed by exhausting the gas in the chamber to maintain a pressure of 10 ^-5 to 10 ^-6 Torr, and then again using 600 W RF plasma for 40 to 60 minutes in an argon (Ar) atmosphere of 3 x 10 ^-2 Torr. To clean,

The intermediate layer deposition is to exhaust the gas in the chamber to maintain a pressure of 10 ^-5 ~ 10 ^-6 Torr, and then again using a 600W RF plasma for 10-20 minutes in a 10 ^-2 Torr HMDSO (hexamethyldisiloxane) atmosphere Deposit an intermediate layer on the surface,

The diamond-like carbon thin film coating exhausts the gas in the chamber so that the pressure is maintained at 10 ^-5 to 10 ^-6 Torr, and then 20 × 30 volumes of hydrocarbon (C _n H _{2n + 2} ) at 4 × 10 ^-2 Torr. Diamond-like carbon thin film coating using 600W RF plasma for 120-180 minutes in the atmosphere of% and hydrogen (H ₂ ) 70-80% by volume,

The hydrocarbon (C _n H _{2n + 2} ) is preferably used by mixing one or more of hydrocarbons such as methane, ethane, propane, butane and pentane.

According to the above problem solving means, the piston manufactured by the present invention maintains a high hardness without any change in the microstructure of the piston material even when used for a long time, especially in low humidity conditions, such as excavator, large crane, etc. Its advantage is that it is suitable for use as a piston, which is an important part of the hydraulic pump that transmits power of rotating heavy equipment.

Hereinafter, exemplary embodiments of the present invention will be described in detail with reference to FIGS. 2 to 3B, and the same reference numerals are used for components which perform the same functions in the above drawings. On the other hand, in the drawings and detailed description showing and referring to the configuration and operation easily understood by those skilled in the art of surface treatment of the piston is briefly or omitted.

Hereinafter, the method for manufacturing the diamond-like carbon thin film coated piston according to the present invention will be described in detail with reference to FIGS. 2 to 3B.

2 is a diagram attached to the present invention relates to a process chart showing a process of coating a diamond-like carbon thin film according to the present invention on a piston.

In the present invention, as shown in Figure 2 in the method for producing a diamond-like carbon thin film coated piston,

The piston is a pretreatment process of ultrasonic cleaning and acid treatment,

The pretreated piston is charged into a chamber, and then hydrogen etching, argon cleaning, interlayer deposition and thin film formation process of diamond carbon thin film coating,

Through the diamond-like carbon thin film coating piston is characterized in that it is manufactured.

It is preferable that the material of the piston applied in the present invention is SACM645, and the diamond-like carbon (DLC) thin film applied to the piston surface treatment is one of amorphous carbon thin films and has high hardness, lubricity, abrasion resistance, chemical stability, and electrical properties similar to diamond. Insulating and optically transmissive materials are called ta-C (tetrahedral amorphous carbon) or a-D (amorphous diamond) due to their mechanical properties and density close to diamond. It is becoming.

Hereinafter, the method for producing a diamond-like carbon thin film coated piston according to the present invention will be described in detail for each process as follows.

First, the ultrasonic cleaning in the pretreatment process is a step for removing the processing oil adsorbed on the surface of the piston body in the processing step of the piston, the first ultrasonic cleaning using trichloroethylene (TCE), followed by the second using ethyl alcohol It is preferable to perform a two-step ultrasonic cleaning of the ultrasonic cleaning.

The ultrasonic cleaning is preferably performed for 5 minutes, and the ultrasonic cleaning time is not necessarily limited to the time defined above, and may be appropriately adjusted according to the amount of foreign matter on the complement surface of the piston. Excessive ultrasonic cleaning causes surface corrosion in ethylene trichloride (TCE).

In the present invention, the acid treatment is a process to increase the adhesion to the coating layer by generating a fine corrosion phenomenon on the surface of the piston body with the removal of foreign matter not properly removed from the surface of the piston body during ultrasonic cleaning. In this step, the acid treatment is preferably performed by immersing the piston in 5% nitric acid solution for 5 to 10 seconds. If the acid treatment time is less than 5 seconds, foreign matter attached to the piston surface may not be completely removed or the piston surface may not be corroded. If the acid treatment time exceeds 10 seconds, Although the adhered foreign matter is completely removed, there is a concern that the surface of the piston may be excessively corroded, thereby lowering the adhesion of the coating layer.

In the present invention, a thin film formation process consisting of hydrogen etching, argon cleaning, intermediate layer deposition, and diamond-like carbon thin film coating was performed using RF-CVD using 13.56 MHz RF plasma. And the thin film forming process consisting of the four stages all maintained the temperature in the chamber at 200 ℃, for the low vacuum (~ 10 ^-3 Torr) exhaust pump, and for the high vacuum (10 ^-3 ~ 10 ^-6 Torr) Turbopumps were used respectively. In order to increase the concentration of pure gas, high vacuum exhaust was performed by using a turbo pump for each process.

In the present invention, hydrogen etching (H ₂ etching) is to exhaust the gas in the chamber to maintain a pressure of 10 ^-5 ~ 10 ^-6 Torr, and then 20 ~ in a hydrogen (H ₂ ) atmosphere of 4 × 10 ^-2 Torr again It is desirable to etch the material surface of the piston using 600 W RF plasma for 30 minutes.

At this time, when the piston is exposed to hydrogen (H ₂ ) plasma less than the time limit described above, there is a fear that the surface of the piston may not be etched properly, when the piston is exposed for more than the time limit described above the etching rate is increased and the surface is It will be damaged. In addition, the temperature in the chamber was maintained at 200 ° C to minimize the hydrogen is chemically absorbed on the piston surface.

In the present invention, the argon cleaning (Ar Cleaning) is to exhaust the gas in the chamber to maintain a pressure of 10 ^-5 ~ 10 ^-6 Torr, and then again 40 ~ 60 in an argon (Ar) atmosphere of 3 × 10 ^-2 Torr It is preferable to use 600W RF plasma for a minute.

At this time, when the piston is exposed to the argon (Ar) plasma for less than the time limit described above, there is a fear that the cleaning effect of the reaction chamber substrate is weak, and if the time limit is exceeded, the argon flow rate and the plasma treatment time become longer. Rather, there is a possibility that the surface state of the substrate is worsened to lower the adhesive force.

In the present invention, the interlayer deposition is performed by exhausting the gas in the chamber so that the pressure is maintained at 10 ^-5 to 10 ^-6 Torr, and then again in a 10 ^-2 Torr HMDSO (hexamethyldisiloxane) atmosphere for 10 to 20 minutes at 600 W. It is desirable to deposit an intermediate layer on the piston surface using RF plasma.

In this process, in the case of silane (SiH ₄ ), which is often used as an intermediate layer for coating a diamond-like carbon thin film, in consideration of its high risk and difficulty in handling, gas flow control is performed using a vacuum pressure of a chamber of HMDSO in a liquefied state. The method of vaporizing an appropriate amount with the apparatus (MFC) was used.

The above step is to form an intermediate layer of a thin film which improves the adhesion of the diamond-like carbon thin film. When the plasma reaction time is less than the time defined above, a uniform intermediate layer cannot be obtained on the surface of the material. If the reaction time exceeds the time defined above, the contamination in the chamber may be serious.

In the present invention, the thickness of the intermediate layer to be formed on the surface of the piston is preferably 0.2 ~ 0.6㎛, the thickness of the intermediate layer is not necessarily limited to the above thickness, can be appropriately adjusted according to the needs of the consumer or the needs of the manufacturer. have.

In the present invention, the diamond-like carbon thin film coating (DLC Coating) is to exhaust the gas in the chamber to maintain a pressure of 10 ^-5 ~ 10 ^-6 Torr, and then again 4 × 10 ^-2 Torr of hydrocarbon (C _n H _{2n +2} ) It is preferable to coat the diamond-like carbon thin film using 600W RF plasma for 120 to 180 minutes in an atmosphere of 20 to 30% by volume and 70 to 80% by volume of hydrogen (H ₂ ).

In the present invention, when the hydrocarbon (C _n H _{2n + 2} ) is less than 20% by volume, the diamond-like carbon thin film may not be sufficiently coated, and the hydrocarbon (C _n H _{2n + 2} ) may exceed 30% by volume. In this case, overcoating phenomenon may occur and the adhesion strength may drop.

In the present invention, the hydrocarbon (C _n H _{2n + 2} ) used to generate the diamond-like carbon thin film is preferably used by mixing one or more of hydrocarbons such as methane, ethane, propane, butane and pentane. More preferred is methane (CH ₄ ).

In the present process, hydrogen (H ₂ ) is used as a support for activating carbon ion decomposed in hydrocarbons as plasma as a support for accelerating the plasma to produce an excellent film.

In addition, in this process, the pressure of synthesizing the diamond-like carbon thin film was 4 × 10 ⁻² Torr, and 600W RF plasma was used. In the case where the initial temperature in the chamber was room temperature, the temperature in the chamber was kept constant at 200 ° C in consideration of the fact that the temperature rises to near 100 ° C over time due to the heat of plasma reaction. The thickness of the diamond-like carbon thin film coating layer can be adjusted by adjusting the synthesis time.

In addition, in the present invention, when the plasma reaction time is less than the time defined above, a uniform diamond-like carbon thin film coating layer may not be obtained on the surface of the piston, and when the time limit is exceeded, the overcoating phenomenon may occur. There is a fear that the adhesive force may occur and the adhesion strength may be reduced.

In the present invention, the thickness of the diamond-like carbon thin film coating layer formed on the surface of the piston is preferably 0.2 to 0.6 µm, and the thickness of the diamond-like carbon thin film coating layer is not necessarily limited to the above thickness, but is required by the consumer or the manufacturer. Can be adjusted according to the needs of the.

The piston coated with the diamond-like carbon thin film by the above method maintains high hardness without any change in the microstructure of the piston material even after long-term use, and especially in conditions with low humidity, such as excavator, large crane, etc. It is suitable for use as a piston, which is an important part of hydraulic pump that transmits power of rotating heavy equipment.

Hereinafter, embodiments of the present invention will be described in detail below, but the technical configuration of the present invention is not necessarily limited only to the following embodiments.

1. Preparation of diamond-like carbon thin film coated piston

(Example 1)

end. Pretreatment process

The molded piston (SACM645) was subjected to primary ultrasonic cleaning using ethylene trichloride (TCE) and secondary ultrasonic cleaning using ethyl alcohol for 5 minutes, and then the piston surface was immersed in 5% nitric acid solution for 5 seconds. Removed foreign substances on the.

I. Thin Film Forming Process

After the piston was pretreated according to the above method into the chamber, the temperature in the chamber was maintained at 200 ° C., and a 0.3 μm-thick intermediate layer was deposited by hydrogen etching and argon cleaning. The process was carried out to produce a diamond-like carbon thin film coated piston of 0.3㎛ thickness.

Under the conditions of the thin film forming process, hydrogen etching was performed to maintain the pressure in the chamber at 10 ^-5 Torr and then etch the surface of the piston using 600W RF plasma for 30 minutes in an H ₂ atmosphere of 4 × 10 ^-2 Torr,

Argon cleaning was performed by maintaining the pressure in the chamber at 10 ^-5 Torr and then using 600W RF plasma for 60 minutes in an Ar atmosphere of 3 × 10 ^-2 Torr.

Interlayer deposition ensured that the pressure in the chamber was maintained at 10 ^-5 Torr, and then the intermediate layer was deposited on the piston surface using 600 W RF plasma for 20 minutes in a 10 ^-6 Torr HMDSO atmosphere.

The diamond-like carbon thin film coating maintains the pressure in the chamber at 10 ^-5 Torr, then at 600 W for 180 minutes in a 4 x 10 ^-2 Torr atmosphere of 30 volume% methane (CH ₄ ) and 70 volume% hydrogen (H ₂ ). Diamond-like carbon thin film coating was performed using RF plasma.

(Example 2)

Pretreatment was carried out by the same method as in Example 1, but acid treatment was carried out for 10 seconds, and the conditions of the thin film formation process were carried out under the conditions as described below to prepare a diamond-like carbon thin film coated piston. The thicknesses of the intermediate layer and the diamond-like carbon thin film coating layer were respectively 0.3 μm, the same thickness as in Example 1.

Under the conditions of the thin film forming process, hydrogen etching was performed to maintain the pressure in the chamber at 10 ⁻⁶ Torr and then etch the surface of the piston using 600 W RF plasma for 20 minutes in an H ₂ atmosphere of 4 × 10 ⁻² Torr,

Argon cleaning was performed by maintaining the pressure in the chamber at 10 ^-6 Torr and then using 600W RF plasma for 40 minutes in an Ar atmosphere of 3 × 10 ^-2 Torr.

Interlayer deposition was performed to maintain the pressure in the chamber at 10 ^-6 Torr and then to deposit the intermediate layer on the piston surface using 600 W RF plasma for 10 minutes in a 10 ^-2 Torr HMDSO atmosphere.

The diamond-like carbon thin film coating maintains the pressure in the chamber at 10 ^-6 Torr and then maintains 600 W for 120 minutes in a 4 × 10 ^-2 Torr atmosphere of 30 volume% methane (CH ₄ ) and 70 volume% hydrogen (H ₂ ). Diamond-like carbon thin film coating was performed using RF plasma.

(Comparative Example 1)

Unlike the method of Example 1, ultrasonic cleaning was performed in the pretreatment step for 5 seconds and the acid treatment was not performed, and the thin film formation process was performed by the same method as in Example 1 to prepare a diamond-like carbon thin film coated piston. The thicknesses of the intermediate layer and the diamond-like carbon thin film coating layer were the same as those of Example 1, respectively.

(Comparative Example 2)

A diamond-like carbon thin film coating piston was prepared by performing the pretreatment step in the same manner as in Example 2, but performing argon cleaning without performing hydrogen etching, followed by only the intermediate layer formation and diamond carbon thin film coating. . The thicknesses of the intermediate layer and the diamond-like carbon thin film coating layer were the same as those of Example 2, respectively.

2. Evaluation of diamond-like carbon thin film coated piston

Examples 1 and 2 and Comparative Examples 1 and 2 are the hardness test according to the adhesion test and the Nano-Indentation Test according to the scratch test (Scratch Test) method as shown in Table 1 below. Is the same as

Test Items
Example Comparative example One 2 One 2 Adhesive force (N) 25 23 18 15 Hardness (HV) 2,100 2,000 1,800 1,500

As shown in Table 1, Examples 1 and 2 were found to be excellent in both the adhesion and hardness of the physical properties compared to Comparative Examples 1 and 2.

It is assumed that Comparative Example 1 had lower adhesion than that of Examples 1 and 2 due to not performing the pretreatment process of acid treatment, and Comparative Example 2 showed lower adhesion than Comparative Examples 1 and 2. , The pretreatment process was carried out by the same method as the method of 2, but the hydrogen etch was not performed in the thin film formation process, so that the adhesion between the piston surface and the intermediate layer was weakened, Adhesion is also weakened.

Therefore, Comparative Examples 1 and 2 have weak adhesion even though the physical properties of hardness are the same as those of Examples 1 and 2, so when the piston is used for a long time, the durability of the piston is weakened due to the peeling of the coating layer of the coating layer. Problems will arise.

In the present invention, Figure 3a is a photograph showing the appearance of the piston showing the shape of a typical steel material before coating the diamond-like carbon thin film, Figure 3b is a piston of Example 1 coated with a diamond-like carbon thin film according to the present invention It was confirmed that the black film was well coated after the diamond-like carbon thin film was coated with the photograph of the appearance state.

As described above, a technique of coating a diamond-like carbon thin film according to a preferred embodiment of the present invention on a piston is illustrated according to the above description and drawings, but this is merely described, for example, and does not depart from the spirit of the present invention. It will be apparent to those skilled in the art that various changes and modifications can be made within the scope.

delete

1A and 1B are photographs showing that the microstructure state of the piston material before use and the microstructure state of the piston material after use are enlarged by 100 times with optical micrographs for a conventional general piston;
2 is a process chart showing a process of coating a diamond-like carbon thin film on a piston according to the present invention;

Figure 3a is a photograph of the appearance of the piston showing the shape of a typical steel material before coating a diamond-like carbon thin film,

Figure 3b relates to a photograph of the appearance of the piston of Example 1 coated with a diamond-like carbon thin film according to the present invention.

Claims (10)

In the method for producing a diamond-like carbon thin film coated piston, The piston is a pretreatment process of ultrasonic cleaning and acid treatment, The pretreated piston is charged into a chamber, and then hydrogen etching, argon cleaning, interlayer deposition and thin film formation process of diamond carbon thin film coating, Though, The ultrasonic cleaning is carried out two steps of the first ultrasonic cleaning using trichloroethylene (TCE) and the second ultrasonic cleaning using ethyl alcohol, The acid treatment is treated by immersing the piston in 5% nitric acid solution for 5-10 seconds, The thin film formation process consisting of four steps of hydrogen etching, argon cleaning, intermediate layer deposition and diamond phase carbon thin film coating maintains the temperature in the chamber at 200 ° C, The hydrogen etching exhausts the gas in the chamber so that the pressure is maintained at 10 ^-5 to 10 ^-6 Torr, and then again generates 600 W of RF plasma for 20 to 30 minutes in a hydrogen (H ₂ ) atmosphere of 4 x 10 ^-2 Torr. A method for producing a diamond-like carbon thin film coated piston, comprising etching the material surface of the piston by using the same. delete delete delete delete The method of claim 1, The argon cleaning is performed by exhausting the gas in the chamber to maintain a pressure of 10 ^-5 to 10 ^-6 Torr, and then again using 600 W RF plasma for 40 to 60 minutes in an argon (Ar) atmosphere of 3 x 10 ^-2 Torr. Method for producing a diamond-like carbon thin film coated piston characterized in that the washing. The method of claim 1, The intermediate layer deposition is to exhaust the gas in the chamber to maintain a pressure of 10 ^-5 ~ 10 ^-6 Torr, and then again using a 600W RF plasma for 10-20 minutes in a 10 ^-2 Torr HMDSO (hexamethyldisiloxane) atmosphere A method for producing a diamond-like carbon thin film coated piston, comprising depositing an intermediate layer on the surface. The method of claim 1, The diamond-like carbon thin film coating exhausts the gas in the chamber to maintain a pressure of 10 ^-5 to 10 ^-6 Torr, and then again 20 to 30 volumes of hydrocarbon (C _n H _{2n + 2} ) of 4 × 10 ^-2 Torr. Method for producing a diamond-like carbon thin film coating piston, characterized in that the coating of diamond-like carbon thin film using 600W RF plasma for 120 to 180 minutes in the atmosphere of 70% to 80% by volume of hydrogen (H ₂ ). The method of claim 8, The hydrocarbon (C _n H _{2n + 2} ) is a method for producing a diamond-like carbon thin film coating piston, characterized in that used by mixing one or more of methane, ethane, propane, butane, pentane. A diamond-like carbon thin film coated piston, wherein a diamond-like carbon thin film is coated on the surface of a piston by the method of any one of claims 1 and 6 to 9.

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