KR101127731B1 - Ring-type source for OLED vapor deposition with device for fixing a heat wire in ring-type source - Google Patents

Abstract

The present invention relates to an annular evaporation source for the deposition process of a large-area organic thin film device and a heat ray fixing device thereof. In particular, a plurality of pieces of crucibles having an annular or regular polygonal shape are heated by resistance heating with a double annular hot wire to form an organic material contained in the crucible. In depositing on a large-area substrate, it is possible to form a thin film layer with a uniform thickness over a large area without rotating a large substrate, to prevent frequent refilling of organic materials due to the increase in the use of organic materials, and to use different evaporation sources. It is to improve the mass production of large area organic thin film devices by providing a method of simultaneously depositing materials in one chamber and a method of installing and fixing a heating wire that transmits uniform heat to the crucible. Hot-wire fixing device for fixing annular heating wire and supporting that hot wire fixing device The invention relates to a thermal insulation door for a wire retainer receiving unit and these pieces crucible and wraps the device housing and the bottom of the device and the height-adjustable leg and the piece of crucible temperature in the evaporation source which supports the annular flange assembly from holding.

Evaporation source, crucible

Description

Ring-type source for OLED vapor deposition with device for fixing a heat wire in ring-type source}

1 is a perspective view showing an embodiment of the annular evaporation source device provided with a heat ray fixing device of the present invention

Figure 2 is a cross-sectional view of the A-A cross section of an embodiment of the annular evaporation source device having a heat cover fixing device covered with a heat insulating cover of the present invention

Figure 3 is a perspective view showing the top and bottom of the piece hot wire fixing device constituting the hot wire fixing device of the present invention.

Figure 4 is a perspective view and a cross-sectional view showing a state in which the heating wire is installed on the piece hot wire fixing device constituting the hot wire fixing device of the present invention.

5 is a perspective view showing a heat ray fixing device support device of the present invention

Figure 6 is a perspective view showing a state in which the hot wire fixing device and the hot wire fixing device support device is coupled to fix the hot wire of the present invention

7 is a perspective view showing a housing of the annular evaporation source of the present invention;

8 is a sectional view showing a bottom device of the annular evaporation source of the present invention and a sectional view taken along the line B-B.

Figure 9 is a perspective view and a cross-sectional view showing a heat insulating cover covering the top of the annular evaporation source of the present invention

Figure 10 is a perspective view showing the height adjustment leg of the annular evaporation source of the present invention

<Description of the code | symbol about the main part of drawing>

1: heating wire 2: organic material

3: hot wire upper ring 4: hot wire lower ring

10: inner housing 11: inner housing inner wall

12: inner housing outer wall 13: inner support protrusion

14: inner housing water pipe portion 15: inner housing water pipe

20: internal hot wire fixing device base 21: hot wire fixing device base

22: lower part of the heat fixing device support device 23: connection support

24: support for hot wire fixing device 25: support space

26: inner wall of the support device 27: outer wall of the support device

30: internal hot wire fixing device 31: upper piece hot wire fixing device

32: lower piece hot wire fixing device 33: hot wire through hole

34: protrusion 35: heated wire support

36: hot wire fixing groove

40: engraving crucible 41: cover

42: spout 43: inner wall of sculpture

44: engraving crucible outer wall 45: thermocouple insertion groove

50: external hot wire fixing device 60: external hot wire fixing device

70: outer housing 71: outer housing inner wall

72: outer housing outer wall 73: outer support protrusion

74: outer housing water pipe portion 75: external housing water pipe

80: floor apparatus 81: crucible base support groove

82: crucible base 83: inner frame

84: outer edge 85: inner tube hole

86: external water pipe hole 87: thermocouple inlet hole

88: connection thread tab 89: power cable entry hole

90: insulation cover 91: insulation cover hole

92: Clasp

100: height adjustment leg 101: upper tab bolt

102: upper leg 103: lower leg

104: lower tap bolt 105: screw tap hole

106: captive screw 107: graduation

The low molecular organic EL thin film heats a crucible containing a low molecular organic material by applying a current to a heating wire wound around the crucible, and the heat transferred to the crucible increases the temperature of the organic material in the crucible, and as the temperature of the organic material increases, The crucible in the form of and is formed in a way that is deposited on the substrate a lot, this time consisting of a crucible, a heating wire, a housing, etc. is called an evaporation source, and most have been using a point evaporation source or a linear evaporation source.

In the case of the point evaporation source, since the organic material is deposited on the substrate, a thin film is formed in the portion close to the point evaporation source and a thin film is formed in the distant substrate so that the thin film is not made uniform, so the point evaporation source is installed far from the center of the substrate. And rotate the substrate. In this case, however, the size of the deposition chamber is increased, the substrate must be rotated while holding the substrate, and the microparticles generated by the rotation adversely affect the organic thin film and the uniformity of the thin film is not obtained as desired. In addition, the larger the substrate, the worse these problems become.

The linear evaporation source is designed to increase the size of the deposition chamber or to rotate the substrate in such a way that the evaporation source is fixed and the substrate is linearly moved or the substrate is fixed and the evaporation source is linearly reciprocated to deposit gaseous organic materials from the linear evaporation source onto the substrate. It eliminates the problems such as, but organic materials are deposited at the center of the substrate, and both ends of the substrate are relatively less deposited, so the uniformity of the thin film cannot be secured. I can't.

As described above, the conventional evaporation sources have a problem of uniformity of the thickness of the organic EL thin film and microparticles generated by the rotation or linear motion of the substrate. In the case of producing large area organic EL substrates, it is not easy to rotate or linearly move large substrates, and the use of organic materials increases, so the capacity to contain organic materials should be increased. The present invention is used for a variety of substrates from small area substrates to large area substrates in a fixed state without the rotation or linear motion of the substrate to heat the organic material contained in the crucible and the evaporation source to form an organic EL thin film of uniform thickness The present invention provides an annular evaporator having a heat wire fixing device for fixing heat wires at regular intervals so that even heat is transmitted to organic materials.

Referring to Figure 1 showing an embodiment of the present invention will be described in detail the configuration of the present invention. There are four height adjusting legs 100 are fitted at the bottom and the bottom device 80 to raise the crucible 40 on the top to have an annular or regular polygonal shape, on the inner rim 83 of the floor device 80. There are housings 10 and 70 in which the inner housing 10 rises and the outer housing 70 rises on the outer border 84, and a heating wire as shown in FIG. 6 in the space between the inner housing 10 and the outer housing 70. Heat wire fixing device (30, 60) and the installation of the heating wire fixing device support device (20, 50) (2) is installed, the heating wire is fixed to the support protrusions (13, 73) of the housing (10, 70) There is a fixing device (30, 60) and its supporting devices (20, 50), and there is a sculpture crucible 40 inserted in the space between the two is a view showing a cross section of AA of FIG. 2.

In Figure 2, the crucible 40 containing the organic material (2) is coupled to form a plurality of annular or regular polygonal shape, can be fitted with a heat conduction band used to measure the temperature of each of the crucible 40 There is an insertion groove 45, and there is a cover 41 having an ejection opening 42 at the top so that the organic material 2 can be heated to exit the crucible in a gaseous state. The cover 41 is cut at an angle as shown in FIG. 2 and the outlet 42 is directed out of the housing at a vertical and constant angle, and the outlet 42 of each of the crucibles 40 is annular when viewed from above the annular evaporation source. The organic gas ejected from each of the outlet passages 42 is evenly deposited on the large-area substrate to form a thin film having a uniform thickness. A plurality of engraving crucibles 40 are placed on the crucible pedestal 82 of the floor apparatus 80.

An embodiment of the annular evaporation source apparatus is as follows according to the number of organic materials used simultaneously to form the organic EL thin film in one co-deposition chamber.

(1) When one organic material 2 is used, in this case, the same organic material 2 is contained in all the crucibles 40 and heated to deposit the organic EL thin film on the substrate.

(2) When two organic materials (2) are used, one of which is a high amount of host organic material and one of a low amount of dopant organic material, in this case, all the crucibles 40 A multi-point evaporation source having a multi-nozzle type crucible containing a host organic material and containing a dopant organic material is installed at the inner center of the annular evaporation source to simultaneously deposit the host organic material and the dopant organic material on the substrate.

(3) When two host organic materials are used, in this case half of the crucibles (40) contain one host organic material and the other half contain the other host organic material. If so, different host organic materials are alternately contained in adjacent crucibles 40 so that they contain different organic materials so that they are symmetrical to each other. Since the evaporation temperature of the two hot wires (1) using and install the two hot wires (1) according to the engraving crucible (40).

(4) In case of using two host organic materials and one dopant organic material, in this case, two host organic materials are put in the sculptural crucibles 40 in the same manner as in the above (3) and placed in the center of the circular evaporation source. A multi-point evaporation source containing a dopant is installed to deposit three organic materials (2) at the same time.

(5) If the host organic material or dopant organic material is to be added, in this case, the host organic materials are divided into the culling crucibles 40 so that the symmetry of each organic material is maintained and the dopant organic material is annular. Further evaporation sources are added to the evaporation source for deposition.

Another embodiment of the annular evaporation source device is as follows according to the size of the organic EL substrate.

(1) In the case of the initial research level, in this case, various experiments are conducted to find the conditions for obtaining a high quality organic EL thin film. Therefore, only one fragment crucible 40 of the annular evaporation source contains organic matter (2). Since the circular evaporation source is symmetrical, the conditions found in the experiments are useful.

(2) When the organic EL substrate is small (200x200mm, 370x470mm), in this case, the outlet 42 of the cover 41 of the engraving crucible 40 of the annular evaporation source is adjusted and the organic material 2 is symmetrical in half of the engraving crucibles. It is then deposited to make a small organic EL substrate.

(3) When the organic EL substrate is large (500x600mm, 730x920mm), in this case, depositing the organic material (2) contained in all the crucible 40 to make a large organic EL substrate.
That is, it is possible to control the amount of evaporated organic matter by controlling the number of pieces of the crucible.

FIG. 3 shows the engraving hot wire fixing devices 30 and 60, and FIG. 4 is a view showing a state in which the engraving hot wire fixing devices 30 and 60 and the heating wire 1 are coupled to each other. Is composed of the upper piece hot wire fixing device 31, the lower piece hot wire fixing device 32, the hot wire support 35, it is installed on both sides of the inner and outer walls of the engraving crucibles. The upper and lower piece hot wire fixing devices 31 and 32 have the same structure, that is, the upper piece hot wire fixing device is located at the upper part of the wall of the carving crucible, and the heating wire rings 3 and 4 penetrate the lower part in the shape of a long cube. The heating wire through-hole 33 is long and has a predetermined width and a predetermined depth along the center in the long axis direction, the upper portion is a space for inserting the heating wire support 35 of the rectangular parallelepiped in the direction perpendicular to the long axis direction (1) A plurality of holes are drilled at regular intervals at the same width as the width between the adjacent hot wires 1 and the adjacent hot wires 1 to form a plurality of protrusions and are connected to the lower heat wire through-holes. In addition, the lower piece hot wire fixing device is located in the middle or lower portion of the engraving crucible wall has the same shape as the upper piece hot wire fixing device but is installed upside down. In addition, the heated wire support 35 is located in a plurality of insertion spaces between the protrusions of the upper piece hot wire fixing device in the shape of a cuboid, and the hot wire fixing groove of the round groove shape is dug horizontally on the top.
4, the hot wire 1 passes through the hot wire through hole 33 of the lower piece hot wire fixing device 32, and ascends to the hot wire through hole 33 of the upper piece hot wire fixing device 31, and the heated wire ( The heating wire support 35 is inserted into the upper ring 3 of 1) so that the upper ring 3 of the heating wire 1 is fixed to each of the heating wire fixing grooves 36, and the lower ring 4 of the heating wire 1 is fixed. Can be seen hanging on each of the protrusions 34 of the lower piece hot wire fixing device. As described above, the fixing method of the heating wire 1 is arranged along the inner wall and the outer wall of both sides of the crucible so that the heating wire 1 is inserted into and fixed to the engraving heating wire fixing device. The heat of is evenly transmitted to the engraving crucibles 40 so that the temperature of a specific portion of the engraving crucible 40 is high or low so that the ejection distribution of the organic gas is not asymmetric, so that the organic EL thin film having a uniform thickness To form.

FIG. 5 shows the hot wire fixing device holders 20 and 50 supporting the hot wire fixing device, wherein the hot wire fixing device holders 20 and 50 have upper and lower portions of an annular or regular polygonal shape, and both inner walls and Double installed on the outer wall, the supporting spaces 25 are formed to insert and fix each piece of the hot wire fixing device, and has a two-layer structure connected by rectangular connection supports 23 at the upper and lower portions. The upper part and the lower part of the hot wire fixing device support device 20 and 50 have the same structure, but the structure of the lower part is turned upside down, and the support space is formed by a plurality of hot wire fixing device support supports connected to both walls and the bottom of the wall. Both walls are formed to have a minimum height to fix the heat carrier base. The upper piece hot wire fixing device 31 is inserted in the upper portion of the hot wire fixing device support device (20, 50) and the lower piece hot wire fixing device (32) is inserted in the lower portion of the hot wire fixing device support (24) Is supported by. In the actual installation, after installing the internal hot wire fixing device support device 20 in the inner housing 10, insert each piece of hot wire fixing device (31, 32) into the internal hot wire fixing device support device 20 and heat wire (1) Install in pieces hot wire fixing device 31, 32 in the same manner as described above. The outer housing 70 also installs the heating wire 1, the external heating wire fixing device 60 and the heating wire fixing device support device 50 in the same manner. These inner housings 10 and outer housings 70 are installed on the bottom device 80 and inserting the crucibles 40 into the space between the two housings 10, 70 to create an annular evaporation source.
6 shows a combination of the hot wire 1, the hot wire fixing device 30 and the hot wire fixing device support device 20. The hot wire fixing device (30, 60) and the hot wire fixing device support device (20, 50) prevents deformation due to thermal deformation of the hot wire (1) or external impact that may occur during crucible installation or organic material recharge. The shape of is kept constant so that the temperature distribution in the crucible is not changed so that an organic EL thin film layer having a uniform thickness is formed continuously, and the heating wire 1 is protected to use the annular evaporation source for a long time.

7 shows a structure of the housings 10 and 70, and the housings 10 and 70 have a double annular structure of the inner housing 10 and the outer housing 70, and the inner housing 10 and the outer housing 70. Has a similar structure. The housings 10 and 70 may fix and wrap a plurality of pieces of crucibles, the pieces of hot wire fixing devices and the hot wire fixing device support device, so that the inner housing 10 is an inner support protrusion 13 on the outer wall 12. Is protruded so that the heat fixing device support device 20 is lowered and caught, and there is a water pipe 15 under the inner wall 11, and the height of the water pipe part 14 is lower than the height of the inner housing 10. The same form. The water pipes 14 and 74 quickly cool the heated housings 10 and 70 when recharging the organic material 2 after the deposition process or when the deposition equipment is opened for other reasons, so that the work can be smoothly performed. The height of the water pipes 14 and 74 is lower than the height of the jet or the housings 10 and 70 of the crucible so that the temperature of the upper part of the housings 10 and 70 is higher than the temperature of the lower part so that the organic material from the jet port 42 ( 2) to prevent the gas from growing by depositing on the housings 10 and 70. The outer housing 70 also has a diameter larger than that of the inner housing 10 and the positions of the outer support protrusion 73 and the water pipe 74 are different from those of the inner housing 10. The water pipes formed in the water pipe parts 14 and 74 have water inlets and water outlets, and the water pipes 15 and 75 are formed in a double spiral along the periphery of the housings 10 and 70 or a plurality of pipes are formed in a vertical straight line. It is connected in a staggered manner.

As shown in FIG. 8, the bottom device 80 has edges 83 and 84 that support the inner housing 10 and the outer housing 70 in a donut shape, and the outer water pipe has water pipes 15 and 75 of the housing. There are water pipe holes (85, 86) connected to the), and the crucible pedestal support grooves 81 are provided at the bottom outside the edge, so that the crucible pedestal 82 is inserted into the groove, and to measure the temperature of each crucible 40 There are a plurality of heat conduction insertion holes 87 for inserting a heat conduction band for the power supply, and there is a power supply lead inlet hole 89 for supplying electric current to the heating wire, and the height adjustment leg 100 can be inserted in the bottom bottom surface. There is a connecting screw tab 88. The crucible pedestal 82 has a "L" lying on its back so that the crucible is fixed in the annular evaporation source and the heated crucible is in direct contact with the floor so that heat is not lost. In addition, by adjusting and changing the height of the crucible base 82, it is possible to use a crucible having a different capacity. For example, to increase the height of the crucible base 82 and use a small crucible crucible 40 or a crucible Lower the height of the pedestal 82 and the case of using a large and large capacity crucible (40).

9 is a perspective view and a cross-sectional view of the insulating cover 90, the insulating cover 90 is latched at both ends and curved in the same shape as the cover of the engraving crucible and the same or larger hole 91 at the outlet 42 position Formed to cover the engraving crucible, the hot wire and the hot wire fixing device over the inner housing and the outer housing, thereby preventing the radiant heat of the hot wire 1 from being transferred to the upper substrate or mask while maintaining the temperature of the upper portion of the annular evaporation source at a high temperature. By preventing the organic material (2) gas from the ejection opening 42 is deposited on the evaporation source to grow and protect the heat inside the crucible so that the organic material (1) gas is constantly ejected. In addition, by installing a side heat reflector (not shown) outside the heating wire (1) on the left and right of the engraving crucible (40) and installing a bottom heat reflector (not shown) between the hot wire fixing device support device and the floor device (80) By reflecting the radiant heat of the crucible (40) to protect the heat inside the crucible.

10 is a perspective view of the height adjusting leg 100, the upper leg 102 and the lower leg 103, the upper leg 102 has an upper threaded tap bolt 101, the connection screw of the floor device The lower leg 103 has a lower threaded tap bolt 104 and is connected to the flange. Since the upper leg 102 is hollow, the lower leg 103 is inserted into the lower leg 103 and the tightening screw 106 is tightened to the threaded tap hole 105 on the side. The lower leg 103 has a scale 107 to easily adjust the height of the annular evaporation source.

The present invention relates to an annular evaporation source used as an evaporation source from the fabrication of a small area organic EL substrate to the fabrication of a large area organic EL substrate and a hot wire fixing device, wherein the ejection opening 42 of the cover 41 of the engraving crucible 40 is provided. By adjusting the angle and the method of using the engraving crucible (40) to improve the uniformity of the thickness of the organic EL thin film deposited without rotation of the substrate in the small area organic EL production and large area organic EL production as well as the initial research purpose The invention is effective to reduce the emission of fine particles and to increase the use rate of the organic material (2)

Claims (20)

A plurality of crucibles joined to form an annular or regular polygonal shape, A plurality of pieces of hot wire fixing devices which are dually installed on both inner and outer walls of the plurality of pieces of combined crucibles and fixed with a hot wire; An annular or regular polygonal hot wire fixing device supporting device for inserting and fixing the plurality of pieces of hot wire fixing devices; An annular inner and outer housing surrounding the plurality of engraving crucibles, the engraving hot wire fixing devices, and the hot wire fixing device support device; A floor apparatus for supporting the plurality of engraving crucibles, the engraving hot wire fixing devices, and the hot wire fixing device support device; An insulating cover covering an upper portion of the housing; Annular evaporation source device having a heat wire fixing device, characterized in that consisting of the height adjustment leg provided in the bottom device. 2. The annular evaporation source device according to claim 1, wherein the heating wire is dually arranged along both inner and outer walls of the engraving crucibles and inserted into and fixed to the engraving heating wire fixing device. According to claim 1 or claim 2, wherein the upper piece of the hot wire fixing device is located in the upper portion of the carving crucible wall, the shape of the elongated hexahedron in the lower portion of the hot wire through hole along the center in the major axis direction It is long and has a depth, and the upper part of the heating wire support space of the rectangular parallelepiped in the direction perpendicular to the long axis direction is formed in a plurality at regular intervals to form a plurality of protrusions and is connected to the heating wire through hole in the lower portion Annular evaporation source device provided with a device. The apparatus of claim 3, wherein the lower piece hot wire fixing device is located at the middle or lower portion of the wall of the carving crucible and has the same shape as the upper piece hot wire fixing device but is installed upside down. Annular evaporation source device provided with. The heating wire of claim 3, wherein the heating wire support has a rectangular parallelepiped shape and is located in a plurality of insertion spaces between the protrusions of the upper piece heating wire fixing device, and the heating wire fixing grooves having a round groove shape are horizontally dug in the upper portion. Annular evaporation source device with a fixed device. According to claim 4, wherein the lower ring of the heating wire is hooked to the projections of the lower piece hot wire fixing device, respectively, and the upper ring of the hot wire is fastened to the hot wire fixing groove of the hot wire supporter of the upper piece hot wire fixing device, respectively. Annular evaporation source device provided with a hot wire fixing device. According to claim 1, wherein the wire fixing device support device is installed on both sides of the inner wall and the outer wall of the engraving crucible, the upper and the lower portion of the annular or regular polygonal shape, the upper and the lower portion of the rectangular connection support Is connected to each other, the annular evaporation source device having a hot wire fixing device, characterized in that a plurality of support spaces for inserting and fixing the piece hot wire fixing device is formed. The method of claim 7, wherein the upper portion and the lower portion of the heat fixing device support device is of the same structure or the structure of the lower side upside down, the supporting space is a plurality of heat fixing device support connected to both walls and the bottom of the wall. An annular evaporation source device having a hot wire fixing device, characterized in that it is formed as a support and both walls have a minimum height to fix the hot wire support. The annular evaporation source according to claim 1, wherein the housing has a double annular structure and a plurality of support protrusions are formed at a predetermined height along a wall forming an internal space between the dual structures. Device. 10. The annular evaporation source device according to claim 1 or 9, wherein a water pipe portion is provided on the inner wall of the inner housing and the outer wall of the outer housing to be lower than the height of the jet of the crucible or the height of the housing. The water pipe of claim 10, wherein the water pipe formed in the water pipe portion of the housing has an inlet port and an outlet port, and has a double spiral structure or a plurality of pipes formed vertically and connected to each other from above and below. Annular evaporation source device. According to claim 1, wherein the flooring device has a donut-shaped rim supporting the inner housing and the outer housing, the rim has a water pipe hole, the bottom of the plural crucible pedestal is fitted to the base of the crucible And a plurality of insertion holes and a power line inlet hole into which a support groove and a heat conduction band for measuring the temperature of the engraving crucible are inserted, and a connection screw tab is formed on the bottom surface thereof. The method of claim 12, wherein the crucible holder is "L" shaped and fitted in the support groove of the base device, the hot wire fixing, characterized in that the exchange of the crucibles of different capacities can be exchanged by adjusting the height of the base. Annular evaporation source device provided with a device. The lower leg according to claim 12, wherein the height adjusting leg includes an upper leg and a lower leg, and the hollow upper leg has an upper screw tab bolt to be connected to a connection screw tab of the floor device, and the lower leg is connected to a flange. An annular evaporation source device having a hot wire fixing device, characterized in that it has a screw tap bolt. 15. The method according to claim 14, wherein the lower leg of the height adjusting leg has a scale, and is inserted into the upper leg by inserting a fastening screw into the screw tap hole formed in the upper leg to adjust the height of the evaporation source, characterized in that Annular evaporation source device having a hot wire fixing device. According to claim 1, wherein the insulating cover is latched at both ends and curved in the same shape as the cover of the crucible, the same or larger hole is formed in the outlet position, the piece across the inner housing and the outer housing An annular evaporation source device comprising a crucible, the hot wire and the hot wire fixing device. The annular evaporation source device according to claim 1, wherein a side surface heat reflection plate is positioned outside the heating wires on the left and right sides of the engraving crucible, and a bottom heat reflection plate is positioned between the heat wire fixing device support device and the floor device. 2. The annular evaporation source device according to claim 1, wherein the evaporation amount of the organic material is controlled by adjusting the number of pieces of the crucible. 2. The annular evaporation source device according to claim 1, wherein when two or more kinds of organic materials to be deposited in the same chamber are alternately contained in the crucibles, different organic materials are evaporated. . 20. The method of claim 19, wherein when the evaporation alternately containing the different organic material to the evaporation to the carving crucible, hot wires for each organic material is produced and installed in each of the hot wire fixing device of the engraving crucible containing the organic material Annular evaporation source device provided with a device.

Images