KR101123726B1 - Ultrasonic vibtator for humidifier coated glass film and method for fabricating the same - Google Patents

Abstract

The present invention relates to an atomizer ultrasonic vibrator composed of a glass substrate and a method of manufacturing the same, by coating the glass substrate on the electrode layer of the piezoelectric vibrator by baking process, a high hardness glass protective layer excellent in corrosion resistance is thin and uniform on the electrode The present invention relates to an invention for improving surface life and preventing surface contamination of the ultrasonic vibrator for atomizer.

Description

Ultrasonic vibrator for atomizer consisting of glass substrate and manufacturing method {ULTRASONIC VIBTATOR FOR HUMIDIFIER COATED GLASS FILM AND METHOD FOR FABRICATING THE SAME}

The present invention relates to an ultrasonic vibrator for atomizing a glass substrate and a method for manufacturing the same, and more particularly, in an ultrasonic atomizer for atomizing a liquid using ultrasonic vibrations for the purpose of humidification, The present invention relates to a technique for producing a glass film protective layer for preventing contamination.

The piezoelectric vibrator is located in the lower part of the reservoir which always maintains a constant water level by the water supply part of the main body of the atomizer. At this time, when the liquid to be filled in the reservoir is the normal water, the front surface is installed in contact with the water in order to radiate ultrasonic waves from the bottom, the rear surface is composed of a structure connected to the oscillation circuit portion.

Next, the piezoelectric vibrator vibrates when ultrasonic power is supplied from the oscillation circuit, and the surface levitation occurs on the water surface under the influence of the acoustic radiation pressure caused by the vibration. Thus, the atomized state is formed by the finer particles while breaking the tension of the water.

The piezoelectric vibrator includes electrodes connected to a part of the front and outer circumferences and a part of the rear part of the piezoelectric vibrator to facilitate the supply of ultrasonic power when one side is exposed to water, and a partial electrode having a predetermined interval for electrical insulation with the piezoelectric vibrator. It is made of a structure to form.

1 is a cross-sectional view showing the ultrasonic vibrator housing for the atomizer according to the prior art.

Referring to FIG. 1, first, a piezoelectric vibrator 10 for generating ultrasonic waves is provided. At this time, the ultrasonic vibration is facilitated, the piezoelectric vibrator 10 is provided in an inclined form so that the area in contact with the water is increased, the vibrator fixing frame 20 is provided to support it.

Next, both sides of the vibrator fixing frame 20 is provided with a housing 30 for fixing the vibrator to the reservoir, and a fixing bolt hole 25 for coupling the housing 30 to the reservoir is provided.

Next, a lower portion of the piezoelectric vibrator 10 is provided with a first electrode terminal 50 for connecting the front electrode and a second electrode terminal 60 for connecting the rear electrode, and a first voltage input unit connected to each of them. 55 and a second voltage input section 65 are provided, respectively.

Here, the oscillator structure for generating ultrasonic waves is as follows.

2 and 3 are a plan view and a rear view showing an ultrasonic vibrator for an atomizer according to the prior art.

Referring to the plan view of FIG. 2, the front electrode layer 90 is formed on the upper surface of the vibrator 10, and referring to the rear view of FIG. 3, it can be seen that the rear electrode layer 95 is formed on the lower surface. . In this case, some of the electrode layers connected to the front electrode layer 90 are also connected to the edge of the rear surface, so that the first electrode terminals of FIG. 1 may be easily contacted.

The electrode of the ultrasonic vibrator for atomizer as described above is usually formed using a method of applying heat treatment to the piezoelectric vibrator through a method such as screen printing.

At this time, when the ultrasonic vibration in the liquid, the electrode is worn by the cavitation phenomenon and erosion action generated in the vibration process, and the atomization performance of the vibrator is significantly reduced.

This erosion effect can improve the life of the vibrator by forming a protective layer having a high Vickers hardness or a low corrosiveness on the electrode, and a method of forming a nickel plating layer as the protective layer of the vibrator is commonly used.

However, in this method, the piezoelectric vibrator is immersed in an acidic or alkaline solution during the plating process, so that the electrode layer may be eroded in this process.

Therefore, a problem may occur in that the adhesion between the electrode and the piezoelectric vibrator is lowered, and in order to prevent such a problem, an inconvenience of having to perform a copper plating process using an aqueous solution close to neutral or forming a thicker electrode with a thickness of 20 μm or more. There is a ham.

In addition, the method of forming a separate intermediate layer is difficult to implement due to the extremely difficult process conditions due to the characteristics of the plating process, and the production efficiency, production cost, environment and process control of the piezoelectric vibrator, such as the generation of deadly toxic waste solution during the process. Many problems are raised in the world.

The present invention is a new protective layer to prevent the erosion of the electrode of the piezoelectric vibrator, to facilitate the process of manufacturing the vibrator, there is no side effect and no problem in terms of environmental regulation, the glass substrate to form the glass on the ultrasonic vibrator for atomizer It is an object of the present invention to provide a method for producing the coated atomizer ultrasonic vibrator.

In addition, an object of the present invention is to provide an ultrasonic atomizer vibrator formed by the above-described method, the glass atomizer vibrator capable of heat treatment at a low temperature such that the electrode is not damaged and excellent in corrosion resistance.

The method of manufacturing an atomizer ultrasonic vibrator according to the present invention includes the steps of (a) forming a disk-shaped ultrasonic vibrator, (b) forming a front electrode layer on an upper surface of the ultrasonic vibrator, and (c) a lower portion of the ultrasonic vibrator. Forming a first rear electrode layer connected to the front electrode layer on a portion of the surface, and forming a second rear electrode layer on the remaining portion of the lower surface of the ultrasonic vibrator; and (d) attaching a glass substrate to the upper portion of the front electrode layer. , Performing a baking process to coat the glass substrate on the ultrasonic vibrator.

Here, the disk-shaped ultrasonic vibrator of step (a) is characterized in that it is formed using a PSN (Pb (Sb, Nb) O ₃ ) -PZT (Pb (Zr, Ti) O ₃ ) -based piezoceramic material,

The step (a) is (a1) mixing PbO, ZrO _2, Nb ₂ O ₅ sb ₂ O ₃ and TiO ₂ oxide to form a raw material, and (a2) 100 parts by weight of the total solids of the raw material Adding Nb ₂ O ₅ or MnO ₂ in an amount ratio of 0.1 to 3.0 parts by weight, and (a3) forming the product of step (a2) using a solid phase synthesis method into piezoelectric powders, and (a4) the piezoelectric particles. Forming the powder by a dry molding method and (a5) is characterized in that it comprises the step of firing the resultant of the step (a4) for 1 to 3 hours at 1100 ~ 1300 ℃ to complete the vibrator sintered body. At this time, the step (a1) is x Pb (Sb _1/2 Nb _1/2 ) O ₃ + (1-x) Pb (Zr _1-y Ti _y ) O ₃ (x = 0 ~ 0.1, y = 0.47 ~ It is characterized by mixing in the ratio of 0.53).

In addition, the front electrode layer is formed using Ag (silver) paste or titanium nitride (TiN; TiN), and the first rear electrode layer and the second rear electrode layer are screen printed using Ag (silver) paste. Characterized in that the method is formed, and the first rear electrode layer and the second rear electrode layer connected to the front electrode layer are immersed in silicon oil at 100 to 140 ° C., and then a voltage of 1.5 to 4.5 KV is applied for 5 to 30 minutes to polarize them. Characterized in that the treatment, the glass substrate is selected from among a substrate comprising a slide glass, tempered glass, silica glass and acid-resistant materials, characterized in that attached to the upper portion of the front electrode layer using an organic adhesive, The baking process is characterized in that it is carried out in the temperature range of 500 ~ 900 ℃.

In addition, the atomizer ultrasonic vibrator according to the present invention is characterized by having a resonant frequency of 1.0 ~ 6.0 MHz by the above-described method.

The method for manufacturing the atomizer ultrasonic vibrator coated with a glass substrate according to the present invention prevents the erosion of the electrode formed on the ultrasonic vibrator, and is easy to carry out the process of manufacturing the vibrator, there are no side effects, and there is no problem in terms of environmental regulation. Do not. That is, the present invention provides an effect of improving production efficiency, reducing production costs, and easily performing environmental protection and process control.

In addition, the present invention provides an effect that can increase the life of the ultrasonic vibrator for atomizer by forming a glass film protective layer capable of heat treatment at a low temperature not to damage the electrode and excellent corrosion resistance.

The present invention applies to whole household or industrial atomizers that emit ultrasonic waves to cause mist to occur with a capillary effect on the liquid surface. In this case, the present invention forms a glass protective layer on the front electrode layer in order to protect the ultrasonic vibrator for the generation of ultrasonic waves. Hereinafter, a method of stably coating the glass substrate without damaging the electrode layer, thereby preventing contamination of the ultrasonic vibrator for atomizing and increasing the life thereof will be described in detail.

Advantages and features of the present invention and methods for achieving them will be apparent with reference to the embodiments described below in detail with the accompanying drawings. However, the present invention is not limited to the embodiments disclosed below, but will be implemented in various different forms, and only the embodiments make the disclosure of the present invention complete, and those skilled in the art to which the present invention pertains. It is provided to fully inform the person having the scope of the invention, which is defined only by the scope of the claims. Like reference numerals refer to like elements throughout.

Hereinafter, an ultrasonic vibrator coated with a glass substrate and a method of manufacturing the same will be described in detail with reference to the accompanying drawings. At this time, the configuration of the present invention corresponding to the piezoelectric vibrator is indicated as an atomizer ultrasonic vibrator, the present invention is not limited by the notation method.

Figure 4 is a perspective view of the atomizer ultrasonic vibrator and a method for manufacturing the same according to the present invention, Figure 5 is a rear view showing the ultrasonic vibrator for atomization according to the present invention, Figure 6 is an ultrasonic atomizer for the atomizer according to the present invention It is a top view which shows the slide glass which coats the surface of a vibrator.

Referring to FIG. 4, first, a disk type ultrasonic vibrator 100 is formed.

Here, the ultrasonic vibrator is preferably formed using a PSN (Pb (Sb, Nb) O ₃ ) -PZT (Pb (Zr, Ti) O ₃ ) -based piezoceramic material. At this time, a method of manufacturing a PSN (Pb (Sb, Nb) O ₃ ) -PZT (Pb (Zr, Ti) O ₃ ) -based piezoceramic material is as follows.

First, PbO, ZrO _2, Nb ₂ O ₅ sb ₂ O ₃ and TiO ₂ oxides were added to Pb (Sb1 / 2 Nb1 / 2) O3 + (1-x) Pb (Zr1-y Tiy) O3 (x = 0 ~ 0.1, y = 0.47 ~ 0.53) to form a raw material by mixing.

Next, Nb ₂ O ₅ or MnO ₂ is added in an amount ratio of 0.1 to 3.0 parts by weight based on 100 parts by weight of the total solids of the raw material.

Next, the resultant is formed into a piezoelectric powder using a solid phase synthesis method.

After the piezoceramic powder is manufactured in the same manner as described above, the piezoelectric powder is molded by dry molding to form a disk-shaped ultrasonic vibrator 100, and the resulting molding is baked at 1100 to 1300 ° C. for 1 to 3 hours. To complete the vibrator sintered body. At this time, the resonant frequency of the vibrator sintered body is preferably to be 1.0 ~ 6.0 MHz. If the resonant frequency band is less than 1.0MHz, the atomization performance may be lowered. If the resonant frequency band is greater than 6.0MHz, the efficiency is reduced because the power consumption is greater than the ratio of atomization performance improvement.

Next, the front electrode layer 110 is formed on the upper surface of the vibrator sintered body in the shape of the ultrasonic vibrator 100, and the first rear electrode layer 130 connected to the front electrode layer 110 is formed on a portion of the lower surface of the vibrator sintered body. The ultrasonic vibrator 100 is completed (see FIG. 5). In this case, as an embodiment for connecting the front electrode layer 110 and the first rear electrode layer 130, a method of forming the auxiliary electrode layer 115 on the side of the ultrasonic vibrator 100 may be performed. Here, one embodiment for connecting the front electrode layer 110 and the first rear electrode layer 130, in addition to the simple side connection is possible using a separate connection, such as a wire, it may also be connected by a through hole. Therefore, the present invention is not limited by the connection method.

Next, the second rear electrode layer 140 is formed on the remaining portion of the lower surface of the ultrasonic vibrator 100 (see FIG. 5).

In this case, the second rear electrode layer 140 may be formed by a screen printing method using Ag (silver) paste.

Thereafter, the first rear electrode layer 130 and the second rear electrode layer 140 connected to the front electrode layer 110 are immersed in silicon oil at 100 to 140 ° C., and a voltage of 1.5 to 4.5 KV is applied for 5 to 30 minutes. Is applied to perform polarization treatment. If the treatment time is less than 5 minutes, the polarization treatment effect may be insufficient, and if the treatment time is over 30 minutes, the polarization treatment is already completed, and there is a fear of unnecessary waste of power. By the polarization treatment as described above, the durability of the ultrasonic vibrator 100 according to the present invention can be improved, but in order to improve corrosion resistance and other surface properties, the following process should be performed.

Here, the line width c, which is the maximum thickness of the first rear electrode layer 130, is preferably within 5 to 15% of the total diameter a of the ultrasonic vibrator 100. That is, in the case of the ultrasonic vibrator 100 having a diameter of 10 mm, the line width c of the first rear electrode layer 130 should be 0.5 to 1.5 mm. When the line width c of the first rear electrode layer 130 is less than 0.5 mm (less than 5% of the total diameter a), connection of the electrode terminals is not easy, and the line width c of the first rear electrode layer 130 is prevented. When () exceeds 1.5mm (more than 15% of the total diameter (a)), the area of the second rear electrode layer 140 formed is reduced, which may cause a problem that the distribution of the applied voltage is not made properly. In addition, the line width d of the second rear electrode layer 140 may be formed within 60 to 80% of the total diameter (a) of the ultrasonic vibrator 100. When the line width d of the second rear electrode layer 140 is less than 60% of the total diameter a, the connection of the electrode terminals is not easy, and the line width d of the second rear electrode layer 140 is the total diameter a. If it exceeds 80%, the area for forming the first rear electrode layer 130 is reduced, which may cause a problem in that the distribution of the applied voltage is not properly performed.

Next, the glass substrate 120 as shown in FIG. 6 is positioned above the front electrode layer 110, and then the baking process is performed to coat the glass substrate 120 on the ultrasonic vibrator 100. At this time, the diameter (b) of the glass substrate 120 is preferably formed to be 80 to 95% of the total diameter (a) of the ultrasonic vibrator (100). When the diameter (b) of the glass substrate 120 is less than 80% of the total diameter (a) of the ultrasonic vibrator 100, the front electrode layer 110 may not be sufficiently protected, and 95% of the total diameter (a) may not be sufficiently protected. When exceeding, damage may occur to the glass substrate 120 coated by the portion of the ultrasonic vibrator 100 is processed when coupled to the housing.

In addition, the glass substrate 120 has a strong corrosion and corrosion resistance, it is preferable to use a slide glass (Slide Glass) class or more strong strong acid, alkali, aroma, sterilizing water, environmental chemicals and the like. At this time, the composition of the glass substrate 120 for the slide glass is SiO ₂ 50 ~ 55% by weight, Al ₂ O ₃ 16 ~ 20% by weight, K ₂ O 1 ~ 4%, Na ₂ O 15 ~ 20% by weight, CaO 5 It is preferable to include 10 to 10% by weight and 10 to 15% by weight of B ₂ O ₅ , to be formed in a thickness range of 10 to 100㎛.

Next, the baking process for baking the glass substrate 120 directly is preferably carried out in the temperature range of 500 ~ 900 ℃.

When coating a conventional stainless steel, Ni plating or glassy electrode, there was a problem that the coating is not normally performed at a temperature of 900 ° C. or less. Therefore, for the same process as the organic solvent evaporation process of the paste was forced to form a coating process in the range of more than 900 ℃ temperature, in this case there was a risk of damaging other devices such as the electrode layer.

However, in the present invention, by using the glass substrate 120 as a coating medium, a baking process of 500 ~ 900 ℃ temperature range is possible. In the temperature range below 500 ° C, the baking process may not be performed normally, so a temperature of at least 500 ° C is necessary. However, 500 ° C. is not a temperature at which the electrode can be damaged, and therefore, the temperature range is completely harmless in the ultrasonic vibrator manufacturing process. In this regard, the present invention does not have to go through a high temperature process in excess of 900 ℃ to act as a risk factor, it is possible to further improve the characteristics of the ultrasonic vibrator.

On the other hand, the glass substrate may be attached with an adhesive, or may be attached using a glass component contained in the electrode without a separate adhesive. In particular, when bonded in such a process can be easily performed to ensure corrosion resistance even in a low temperature range of 500 ~ 700 ℃. In addition, since the components of the glass and the adhesive force are not significantly related, there is an advantage in that the glass composition and the physical properties are freely selected.

In particular, when a glass substrate is attached, unlike other materials such as stainless, it is transparent, and thus the integrity of the adhesive form can be visually selected, thereby ensuring the stability of the quality.

In addition, the glass substrate may be used as a glass substrate is not only resistant to corrosion resistant glass, mechanically resistant tempered glass, glass of pure silica, but also acid resistant substrates of other materials such as alumina.

As described above, when the glass substrate is used, the surface is smooth and there is no need for a separate processing step, and the form with the adhesive can be confirmed with the naked eye, so that the poor adhesion can be selected and the composition of the glass also varies. There are various advantages to control the color of the glass.

As described above, the coating method of the glass substrate according to the present invention forms a high hardness glass substrate having excellent corrosion resistance on the electrode layer thinly and uniformly, thereby forming an excellent protective layer on the vibrator without any adverse effect on the electrode. . Therefore, this invention can improve the lifetime of the ultrasonic vibrator for atomizers. In addition, by not using a plating process to form a protective layer, it is possible to solve the environmental regulation side problems, and to facilitate the implementation in the manufacturing process management aspects.

Hereinafter, the characteristics of the ultrasonic vibrator according to the present invention will be described in detail with reference to preferred embodiments and comparative examples.

Example 1

1 mol of PbO, 0.5 mol of ZrO _{2 and} 0.5 mol of TiO ₂ were mixed, and 0.5 to 1.5 parts by weight of Nb ₂ O ₅ or MnO ₂ was added at a content ratio of 100 parts by weight of the total solids. The piezoelectric powder is formed by the solid phase synthesis method. Next, the piezoelectric powder is molded by dry molding to form a disk-shaped ultrasonic vibrator having a diameter of 20 mm and a thickness of 1.25 mm, and then fired at 1200 ° C. for 2 hours to complete the vibrator sintered body.

Next, a front electrode layer, a first rear electrode layer and a second rear electrode layer having a front surface of 10 mu m thickness are formed on the front and rear surfaces of the vibrator sintered body by a screen printing method using silver paste.

Next, the slide glass having a thickness of 100 μm is processed in the same manner as the shape of the vibrator sintered body and then placed on the front electrode layer. At this time, the diameter of the slide glass was formed to 18mm.

Then, heat treatment was carried out for 30 minutes in an electric furnace at 800 ℃ to form a glass film protective layer having a high corrosion resistance of the front electrode layer surface.

Thereafter, the ultrasonic vibrator manufactured as described above was immersed in 150 ° C. silicon oil and polarized by applying a high voltage of 4 kV for 10 minutes.

Next, the ultrasonic vibrator prepared as described above was applied to a 20-watt atomizer and the amount of atomization per ml was measured, and the results are shown in Table 1 below.

Example 2

All the same process as in Example 1, but the thickness of the slide glass was used 10㎛.

Comparative Example 1

All the same process as in Example 1, but the thickness of the slide glass was used 8㎛.

Comparative Example 2

All the same process as in Example 1, but the thickness of the slide glass was used 105㎛.

Comparative Example 3

All processes were performed in the same manner as in Example 2, but a nickel plated layer having a thickness of 10 μm was formed instead of the slide glass as a protective layer, and the plated layer formation temperature was set at 1200 ° C.

 [Table 1]

division Amount of atomization per hour (ml) Example 1 480 Example 2 450 Comparative Example 1 500 Comparative Example 2 380 Comparative Example 3 400

As shown in Table 1, in the case of Examples 1 and 2, which are ultrasonic vibrators according to the present invention, both showed excellent atomization amount. At this time, the amount of atomization showed a tendency to decrease slightly as the thickness of the slide glass to be a protective coating layer, but there was no problem in the overall function.

Here, when comparing the amount of atomization of Comparative Example 1 when comparing the Example 1 and Comparative Example 1, the characteristics of Comparative Example 1 was shown to be better, but when comparing the amount of atomization according to the actual corrosion resistance and operating time The result was obtained.

Table 2 shows the results of evaluating corrosion phenomenon and durability occurring during operation of the atomizer, using acetic acid of pH 5 to accelerate the corrosion phenomenon, the operating time was adjusted to 1 to 500 hours.

TABLE 2

Uptime (h) Amount of atomization (ml) Example 1 Comparative Example 1 Comparative Example 3 One 480 500 400 10 470 450 380 24 465 430 365 100 462 415 345 500 460 405 330

As shown in Table 2, in the case of Example 1 according to the present invention, even if the operating time increases, it can be seen that the corrosion or contamination of the ultrasonic vibrator does not occur much to maintain initial performance. On the other hand, in the case of Comparative Example 1, the initial performance was better than that of Example 1, but because the thickness of the protective layer is thin, it can be seen that the function of the protective layer becomes weaker as the operating time increases. In addition, in the case of Comparative Example 3, when the nickel plating layer was formed, the electrode layer was damaged during the plating process, and the initial performance was decreased, and the atomization performance was also drastically decreased due to the acceleration of corrosion of the nickel plating layer with the increase of the operating time.

As described above, the ultrasonic vibrator for atomizer according to the present invention can form a protective layer excellent in corrosion resistance and durability without damaging the electrode layer by using a coating process using a glass substrate of 10 ~ 100㎛ thickness, It can dramatically increase performance and increase lifetime. Therefore, the atomizer ultrasonic oscillator has a resonant frequency of 1.0 ~ 6.0 MHz, there is an advantage that can be applied to a variety of domestic and industrial atomizing device operated by a 20-watt power supply.

Although the above has been described with reference to one embodiment of the present invention, various changes and modifications can be made at the level of those skilled in the art. Such changes and modifications may belong to the present invention without departing from the scope of the present invention. Therefore, the scope of the present invention will be determined by the claims described below.

1 is a cross-sectional view showing the ultrasonic vibrator housing for the atomizer according to the prior art.

2 and 3 are a plan view and a rear view of the atomizer ultrasonic vibrator according to the prior art.

Figure 4 is a perspective view of the atomizer ultrasonic vibrator and a method for manufacturing the same according to the present invention.

5 is a rear view showing the ultrasonic vibrator for an atomizer according to the present invention.

Figure 6 is a plan view showing a slide glass coating the surface of the ultrasonic vibrator for atomizer according to the present invention.

Claims (10)

(a) forming a disc shaped ultrasonic vibrator; (b) forming a front electrode layer on an upper surface of the ultrasonic vibrator; (c) forming a first rear electrode layer connected to the front electrode layer on a portion of the lower surface of the ultrasonic vibrator, and forming a second rear electrode layer on the remaining portion of the lower surface of the ultrasonic vibrator; And (d) attaching a glass substrate to the top of the front electrode layer, and then performing a baking process to coat the glass substrate on the ultrasonic vibrator. In the step (c), the first rear electrode layer and the second rear electrode layer connected to the front electrode layer are immersed in silicon oil at 100 to 140 ° C., and then polarized by applying a voltage of 1.5 to 4.5 KV for 5 to 30 minutes. Ultrasonic vibrator manufacturing method for atomizer, characterized in that. The method of claim 1, The disk-type ultrasonic vibrator of step (a) is formed using a PSN (Pb (Sb, Nb) O ₃ ) -PZT (Pb (Zr, Ti) O ₃ ) -based piezoceramic material Method of manufacturing oscillator. The method of claim 1, Step (a) is (a1) mixing PbO, ZrO _2, Nb ₂ O ₅ sb ₂ O _3, and TiO ₂ oxides to form a raw material; (a2) adding Nb ₂ O ₅ or MnO ₂ in an amount ratio of 0.1 to 3.0 parts by weight based on 100 parts by weight of the total solids of the raw material; (a3) forming the resultant of step (a2) into piezoelectric powder using solid phase synthesis; (a4) molding the piezoelectric powder by dry molding; And (a5) firing the resultant of the step (a4) for 1 to 3 hours at 1100 ~ 1300 ℃ to complete the vibrator sintered body, characterized in that it comprises an ultrasonic vibrator for atomizer. The method of claim 3, wherein Step (a1) is x Pb (Sb _1/2 Nb _1/2 ) O ₃ + (1-x) Pb (Zr _1-y Ti _y ) O ₃ (x = 0-0.0.1, y = 0.47-0.53) Ultrasonic vibrator manufacturing method for atomizing, characterized in that mixing at a ratio of. The method of claim 1, The front electrode layer is a method of manufacturing an ultrasonic vibrator for atomizer, characterized in that formed using Ag (silver) paste or titanium nitride (TiN; Titanium Nitride). The method of claim 1, The first rear electrode layer and the second rear electrode layer is a method of manufacturing an ultrasonic vibrator for atomizer, characterized in that formed by the screen printing method using Ag (silver) paste. delete The method of claim 1, The glass substrate is selected from among a substrate comprising a slide glass, tempered glass, silica glass and acid-resistant material, and the ultrasonic vibrator manufacturing method for atomizer, characterized in that attached to the upper portion of the front electrode layer using an organic adhesive. The method of claim 1, The baking step is a method for producing an ultrasonic vibrator for atomizer, characterized in that performed in the temperature range of 500 ~ 900 ℃. The atomizer ultrasonic vibrator manufactured by the method of any one of claims 1 to 6, 8 and 9 and having a resonant frequency of 1.0 to 6.0 MHz.

Images