KR101101315B1 - image processing based lithography system and method for coating target object - Google Patents

Abstract

A technique relating to a lithographic system is disclosed. In one embodiment, a lithography system includes at least one target object disposed on a substrate, a processor for imaging the target to define a light pattern for the coating layer of the target, and the light pattern defined by the processor. An exposure apparatus for providing light having the substrate to the substrate.

Description

Image processing based lithography system and method for coating target object}

TECHNICAL FIELD This disclosure relates generally to lithography systems, and more particularly to image processing based lithography systems and target coating methods.

Lithographic systems are apparatus used to form a desired pattern on a substrate. The exposure process using a lithography system is a key process in the semiconductor process. Through the exposure process, a desired pattern may be formed on the substrate. A patterned photomask can be used to form the desired pattern on the substrate. Since the pattern on the photomask is fixed in a specific pattern, there is a problem in that the photomask needs to be replaced to form a new pattern on the substrate. Frequent replacement of photomasks in semiconductor processes can lead to increased process costs and lower throughput. Thus, there is a need for a new lithography system that is cost effective and has high productivity.

In one embodiment, a lithography system is disclosed. The lithographic system comprises at least one target disposed on a substrate, a processor for image processing the target to define a light pattern for a coating layer of the target and the processor And an exposure apparatus for providing light having the light pattern defined by the substrate to the substrate.

In another embodiment, a target coating method is disclosed. The target coating method may include preparing a substrate having at least one target disposed on one surface thereof, image processing the target to determine a light pattern for the coating layer of the target, and generating light having the predetermined light pattern. Providing to the substrate.

In yet another embodiment, a target coating method is disclosed. The target coating method may include preparing a substrate having at least one target disposed on one surface thereof, forming a photoresist on at least a portion of the surface of the substrate and the target surface, and processing the target by imaging the target. Forming a weir for the coating layer of water and providing a resin to at least a portion of the surface of the substrate and the target surrounded by the weir.

The foregoing provides only optional concepts in a simplified form for the details that follow. This disclosure is not intended to limit the main or essential features of the claims or to limit the scope of the claims.

1 is a diagram illustrating a lithographic system according to one embodiment.
2 is a diagram illustrating an image processing based exposure apparatus, according to an exemplary embodiment.
3 is a flowchart illustrating a target coating method according to an embodiment.
4 to 6 is a view showing a target coating method according to an embodiment.
FIG. 7 illustrates a target including a coating layer formed by the target coating method described above with reference to FIGS. 4 to 6.
8 is a flowchart illustrating a target coating method according to another embodiment.
9 to 13 are views illustrating a target coating method according to another embodiment.
FIG. 14 is a view illustrating a target including a coating layer formed by the target coating method described above with reference to FIGS. 9 to 13.

Hereinafter, exemplary embodiments disclosed herein will be described in detail with reference to the accompanying drawings. Unless otherwise indicated in the text, like reference numerals in the drawings indicate like elements. The illustrative embodiments described above in the detailed description, drawings, and claims are not meant to be limiting, other embodiments may be utilized, and other changes may be made without departing from the spirit or scope of the technology disclosed herein. Those skilled in the art can arrange, configure, combine, and designate the components of the present disclosure, that is, the components generally described herein and described in the figures, in a variety of different configurations, all of which are expressly devised and It will be readily understood that they form part of. In order to clearly express various layers (or layers), regions, and shapes in the drawings, the width, length, thickness, or shape of the components may be exaggerated.

When one component is referred to as "placed in" or "formed in" another component, when one component is directly disposed or formed on the other component, as well as when additional components are interposed therebetween. It may also include.

When one component is referred to as "on" another component, it may include the case where the one component is directly above the other component, as well as the case where additional components are interposed therebetween.

As used herein, the term “coating layer” may be used as a concept including a three-dimensional structure having an arbitrary shape disposed on a target as well as a thin film having a uniform thickness disposed on a target. The three-dimensional structure may be, for example, a thin film having a thickness variation, a microlens, a microrail, a protrusion, or the like. The above example is an example for understanding, and in addition to the above example, a three-dimensional structure having any shape that may be formed by the image processing based lithography system of the present disclosure may be used as the “coating layer”.

1 is a diagram illustrating a lithographic system according to one embodiment. Referring to FIG. 1, the lithographic system 100 includes a substrate 110, at least one target 120, and an image processing based exposure apparatus 130. The image processing based exposure apparatus 130 includes a processor 140 and an exposure apparatus 150. In some other embodiments, the lithographic system 100 may optionally further include a first coater 160. In some other embodiments, lithography system 100 may optionally further include a second coating device (2nd coater) 170.

At least one target 120 is disposed on the substrate 110. Various substrates may be used as the substrate 110. The substrate 110 may be, for example, a semiconductor substrate (such as a silicon substrate), a glass substrate, a plastic substrate, or a circuit board (such as a printed circuit board (PCB)). In the figure, a semiconductor substrate is illustrated as the substrate 110. In another embodiment, as shown in the figure, a flexible substrate may be used as the substrate 110. The flexible substrate can be, for example, a plastic substrate, a plastic film or a flexible PCB. When a flexible substrate is used as the substrate 110, the flexible substrate may be deformed by an external force. In this case, the arrangement of the at least one target 120 disposed on the substrate 110 may be changed. The external force may be a tensile force or a compressive force applied to the substrate 110. That is, the horizontal distance (for example, the X-axis direction) or the vertical distance (for example, the Y-axis direction) between the at least one target 120 disposed on the substrate 110 may be changed by the external force.

Various targets may be used as the target 120. In one example, target 120 may be a microchip. The microchip may be a chip having an area of less than 1 mm 2. For example, the microchip may have a size of 10 μm × 10 μm × 20 μm. As another example, the target 120 may be a semiconductor chip. The semiconductor chip may be, for example, at least one chip selected from a light emitting device (LED) chip, a radio-frequency identification (RFID) chip, a complementary metal-oxide semiconductor (CMOS) chip, and a combination thereof. The chip selected from the microchip, the LED chip, the RFID chip, the CMOS chip, and a combination thereof may be manufactured on a semiconductor wafer through a semiconductor process. As another example, the target 120 may be a microstructure. The microstructures are at least one selected from, for example, cells, semiconductor nanoparticles, general nanoparticles, inorganic structures, heterogeneous polymer beads, microparticles, microstructures, and combinations thereof. Can be. The above example is an example for understanding, and various objects may be used as the target 120 in addition to the above example.

The image processing based exposure apparatus 130 includes a processor 140 and an exposure apparatus 150. The processor 140 image-processes the target 120 to determine a light pattern for the coating layer of the target 120. Processor 140 may be, for example, a computer vision system. In one embodiment, the processor 140 may include a camera (not shown) and an image processor (not shown). The exposure apparatus 150 provides the substrate 110 with light having the light pattern defined by the processor 140. In one embodiment, the exposure apparatus 150 may include a light source (not shown) and a spatial light modulator (not shown). The spatial light modulator may modulate the light provided from the light source according to a signal provided from the processor 140. A detailed description of the image processing based exposure apparatus 130 including the processor 140 and the exposure apparatus 150 will be described in detail with reference to FIG. 2.

The first coating apparatus 160 may supply a photoresist (not shown) to at least a portion of the surface of the substrate 110 and the target 120. Various devices may be used as the first coating device 160. The first coating device 160 may be, for example, a spin coater, a spray coater, or the like. As another example, the first coating device 160 may comprise a fluid tube (not shown). The fluid tube may surround the target 120. In this case, the photoresist may be supplied to the fluid tube to supply the photoresist to at least a portion of the surface of the substrate 110 and the target 120. Various kinds of materials may be used as the material of the fluid tube. The material of the fluid tube may be, for example, a polymer compound (eg, poly-dimethyl siloxane (PDMS)). In some embodiments, the fluid tube may further include an inlet tube (not shown) and an outlet tube (not shown), respectively required for injecting and discharging the photoresist. In this case, the space between the fluid tube and the substrate 110 is surrounded by the fluid tube and the substrate 110, and the external space may be connected only by the inlet tube and the outlet tube. The inner wall of the fluid tube may further include an oxygen inhibition layer (not shown). The photocurable liquid in contact with the oxygen unpolymerized layer is not cured by light (for example, ultraviolet rays). Thus, the oxygen unpolymerized layer performs the function of the adhesion preventing layer. The above example may be used as various apparatuses in addition to the examples for understanding.

Various types of photoresists may be used as the photoresist. The photoresist may be a positive resist or a negative resist. In one example, the photoresist may not include a phosphor. In this case, the cured photoresist may be used, for example, as a transparent layer or molding. As another example, the photoresist may include a phosphor. In this case, the cured photoresist may be used as a fluorescent film as an example. Various kinds of phosphors may be used as the phosphor. The phosphor may be selected, for example, from red phosphors, green phosphors, blue phosphors, yellow phosphors, and combinations thereof. When the LED chip is used as the target 120, light having various colors or various color temperatures may be adjusted by adjusting the light wavelength of the LED chip, the light intensity of the LED chip, the type of the phosphor, and the concentration of the phosphor. white light having a temperature). Color temperature refers to the absolute temperature K (Kelvin) based on white that the color of emitted light varies with temperature.

The second coating apparatus 170 may form a conductive film or an insulating film on at least a portion of the surface of the substrate 110 and the target 120. Various devices may be used as the second coating device 170. The second coating device 170 may be, for example, a spin coater, a spray coater, a physical vapor deposition (PVD) equipment, a chemical vapor deposition (CVD), a plating equipment, etc. The above examples are various examples in addition to the understanding. In some other embodiments, when only the photoresist is used, the second coating apparatus 170 may be omitted.

2 is a diagram illustrating an image processing based exposure apparatus, according to an exemplary embodiment. 2, an image processing based exposure apparatus includes a processor 140 and an exposure apparatus 150. In some other embodiments, the image processing based exposure apparatus 130 may optionally further include a beam splitter 180, a demagnification lens 182, and an illuminator 184. have.

The processor 140 image-processes the target 120 to determine a light pattern for the coating layer of the target 120. Processor 140 may be, for example, a computer vision system. In the drawing, a processor 140 including a camera 142 and an image processor 144 is represented as an example. The camera 142 photographs the target 120 image, and provides the image processor 144 with an electrical signal corresponding to the captured target 120 image. The target 120 image captured by the camera 142 may be a moving image or a still image. For example, the camera 142 may convert light reflected from the target 120 into an electrical signal in an analog form. The camera 142 may include, for example, an image lens 146 and an image sensor 148. The image lens 146 receives the light from the beam splitter 180 and transmits the light to the image sensor 148, and performs a function of forming an image on the image sensor 148. The image sensor 148 functions to form the electrical signal corresponding to the incident light. Various sensors may be used as the image sensor 148. The image sensor 148 may be, for example, a photodiode, a phototransistor, a charge coupled device (CCD), or the like.

The image processor 144 determines a light pattern suitable for the coating layer of the target 120 according to the image of the target 120 captured by the camera 142. The image processor 144 may be, for example, a personal computer (PC) or notebook computer. In one example, the image processor 144 may include a sampler and a quantizer for sampling and quantizing the electrical signal provided from the camera 142.

The exposure apparatus 150 provides the substrate 110 with light having the light pattern defined by the processor 140. In one embodiment, the exposure apparatus 150 may include a light source 152 and a spatial light modulator 154. The light source 152 may be, for example, an ultraviolet light source or a visible light source. Light source 152 may include, for example, an ultraviolet light source collimator 156 and an ultraviolet filter 158. The ultraviolet light source collimator 156 performs a function of outputting parallel ultraviolet light. The ultraviolet light source collimator 156 may include, for example, a 200W UV lamp (not shown) and a fiber-based light guiding system (not shown). The ultraviolet filter 158 performs a function of selectively providing ultraviolet light to the spatial light modulator 154 among the light provided by the ultraviolet light source collimator 156. The spatial light modulator 154 modulates the light provided by the light source 152 according to the signal provided by the processor 140. The spatial light modulator 154 may be, for example, a digital micromirror array manufactured in the form of a two-dimensional array as shown in the drawing. The spatial light modulator 154 may be manufactured in a one-dimensional array form as shown in the figure. In addition, the spatial light modulator 154 may be manufactured using other methods, such as a liquid crystal display (LCD), not a micromirror, as shown in the drawing. Light modulation in the spatial light modulator 154 is programmable. That is, the spatial light modulator 154 may selectively transmit incident light of a desired pixel among the pixels included in the spatial light modulator 154 to the substrate 110 at a desired time.

The beam splitter 180 performs a function of transferring the modulated light provided from the exposure apparatus 150 to the substrate 110 via the reduction lens 182. In addition, the beam splitter 180 performs a function of transferring the image transmitted from the substrate 110 via the reduction lens 182 to the camera 142. The beam splitter 180 may be, for example, a half mirror as shown in the drawing.

The reduction lens 182 reduces the light provided from the exposure apparatus 150 and provides the reduced light to the substrate 110. As the reduction lens 182, microscope objective lenses having various magnifications such as 2x, 4x, 10x, 20x, 40x, 60x, and the like may be used. In one example, a 10x microscope objective lens may be used to project the image of the exposure apparatus 150 as the reduction lens 182 at a demagnification factor of approximately 8.9 to the final object plane.

An illuminator 184 functions to provide illumination so that the camera 142 may acquire an image of the substrate 110. Cured photoresists (not shown) and uncured photoresists (not shown) have only a small difference in refractive index, so that off-axis illumination ( illumination) is preferred.

Referring again to FIGS. 1 and 2, the lithographic system 100 of the present disclosure includes an image processing based exposure apparatus 130. The image processing based exposure apparatus 130 may image the target 120 to determine a light pattern for the coating layer of the target 120. The light pattern may be programmed by the processor 140. Frequent replacement of photomasks in semiconductor processes can lead to increased process costs and lower productivity. With the lithographic system 100 of the present disclosure, the problem of having to replace the photomask for forming a new pattern does not arise. Thus, a new lithography system can be obtained which is cost effective and has high productivity. In addition, the lithographic system 100 of the present disclosure may form a three-dimensional coating layer having any shape on the surface of the target 120 without using a photomask.

3 is a flowchart illustrating a target coating method according to an embodiment. Referring to FIG. 3, the target coating method begins at 310 blocks. In block 310, a substrate having at least one target disposed on one surface is prepared. In block 320, the target is imaged to define a light pattern for the coating layer of the target. In an embodiment, the determining of the light pattern may include obtaining the target image and performing a black and white image conversion of the obtained target image. In block 330, light having the predetermined light pattern is provided to the substrate. In an embodiment, the providing of the light having the predetermined light pattern to the substrate may include providing a light source and modulating the light provided by the light source according to the determined light pattern.

In some other embodiments, the target coating method may optionally further include forming a photoresist on at least a portion of the substrate and the surface of the target. The photoresist is selectively cured by the light having the defined light pattern. For example, in performing the process of forming the photoresist, a photoresist may be formed on at least a portion of the surface of the substrate and the target by using a fluid tube including the photoresist therein. In this case, the thickness of the cured photoresist positioned on the upper surface of the target may be adjusted according to the distance between the inner surface of the fluid tube and the upper surface of the target.

In some other embodiments, the target coating method is performed before the process of forming the photoresist, and may further include forming an additional coating layer on at least a portion of the surface of the target. In addition, the target coating method may be performed after the process of forming the additional coating layer, and may further include a process of forming a pattern by selectively etching the additional coating layer. In this case, a coating layer formed by light provided by the process of the 320 blocks and the 330 blocks may be used as an etching mask for selective etching of the additional coating layer. The coating layer may be a cured photoresist. The method of etching the additional coating layer may be a dry etch or wet etch method commonly used in a semiconductor process. Various materials may be used as the additional coating layer. In one example, the additional coating layer may be a conductive film. As another example, the additional coating layer may be an insulating film.

In some other embodiments, the target coating method may be performed after the preparation of the substrate, and may further include changing the placement of the target. In this case, a flexible substrate can be used as the substrate. The flexible substrate can be modified by various methods. In one embodiment, the flexible substrate may be deformed by increasing the flexible substrate by applying a tensile force in at least one direction selected from an X-axis direction, a Y-axis direction, and a combination thereof. In another embodiment, the flexible substrate may be deformed by compressing the flexible substrate by applying a compressive force in at least one direction selected from an X-axis direction, a Y-axis direction, and a combination thereof. The compressive force may be a restoring force of the flexible substrate as well as a compressive force applied from the outside. The restoring force may be a restoring force corresponding to a tensile force applied to the flexible substrate. The above examples are examples for understanding, and the flexible substrate may be modified by various methods. Hereinafter, a method for coating a target according to an embodiment will be described in detail with reference to FIGS. 4 to 6.

4 to 6 is a view showing a target coating method according to an embodiment.

Referring to FIG. 4, first, a substrate 410 on which at least one target 420 is disposed is prepared. 4 (a) and 4 (b) show a plan view and a sectional view, respectively. Sectional drawing of the figure is sectional drawing along the IV-IV 'line of a top view. When a flexible substrate is used as the substrate 410, the flexible substrate may be deformed by an external force. In this case, the arrangement of the at least one target 420 disposed on the substrate 410 may be changed. Since the substrate 410 and the target 420 are substantially the same as the substrate 110 and the target 120 described above with reference to FIG. 1, a detailed description thereof will be omitted for convenience of description. For brevity, the following description will be made using a semiconductor chip as the target 420. However, this description does not limit the method of coating the target 420 to specific types or specific targets.

Referring to FIG. 5, a photoresist 430 is formed on at least a portion of the surface of the substrate 410 and the target 420. (A), (b) and (c) is sectional drawing. Referring to FIG. 5A, the photoresist 430 may be formed on at least a portion of the surface of the substrate 410 and the target 420 by a coating method generally used in a semiconductor process. In the drawing, the photoresist 430 formed to have a uniform thickness on the surface of the target 420 is represented as an example. As another example, as shown in the figure, a photoresist 430 having various thickness variations may be formed on the surface of the target 420. The coating method may be, for example, a spin coating method, a spray coating method, or the like. As an example, when the spin coating method is used as the coating method, the thickness of the photoresist 430 disposed on the upper surface of the target 420 may be controlled by the type of the photoresist, the spin coating time, the spin coating speed, and the like. have. In another embodiment, when the spray coating method is used as the coating method, the thickness and thickness variation of the photoresist 430 located on the upper surface of the target 420 may be adjusted by adjusting the type of photoresist, the spray position, and the like. Can be. Referring to FIG. 5B, the photoresist 430 may be formed on at least a portion of the surface of the substrate 410 and the target 420 using the fluid tube 440 including the photoresist therein. have. In this case, the thickness of the photoresist 430 positioned on the upper surface of the target 420 may be adjusted according to the distance G1 between the inner surface of the fluid tube 440 and the upper surface of the target 420. Referring to FIG. 5C, the photoresist 430 has a surface of the substrate 410 and the target 420 using a board 480 and a spacer 490 including the photoresist therein. It may be formed in at least a portion of the. In this case, the thickness of the photoresist 430 positioned on the upper surface of the target 420 may be adjusted according to the distance G2 between the inner surface of the plate 480 and the upper surface of the target 420. In the figure, a flat plate is represented as the plate 480 as an example. As another example, as shown in the figure, the plate 480 may be a non-flat plate. The non-flat plate may, for example, be a plate comprising a recess in the inner side. The size of G2, the distance between the inner surface of the plate 480 and the upper surface of the target 420, may be determined by the spacer 490. In the figure, a spacer separated from the plate 480 as the spacer 490 is represented as an example. In another embodiment, as shown in the figure, the spacer 490 may be integrally formed with the plate 480. As another example, the spacer 490 may be omitted if there are other means to precisely adjust the distance between the plate 480 and the top surface of the target 420. The plate 480 may be formed with an inlet (not shown) and an outlet (not shown). The inlet corresponds to a hole for injecting the photoresist 430, and the outlet corresponds to a hole through which air or the like may be emitted while the photoresist 430 is injected. In another embodiment, the inlet and the outlet may be located in the spacer 490, may be located in the substrate 410, or may be omitted. The inner surface of the plate 480 and the wall surface of the spacer 490 facing the inner surface of the plate 480 may further include an oxygen unpolymerized layer (not shown). The photoresist 430 in contact with the oxygen unpolymerized layer is not cured by light (for example, ultraviolet rays). Thus, the oxygen unpolymerized layer performs the function of the adhesion preventing layer. The above example may be used as various apparatuses in addition to the examples for understanding. All or part of the plate 480 may be transparent. Plate 480 may be, for example, a glass plate or a plastic plate. All or part of the spacer 490 may be transparent. The material of the spacer 490 may be glass or plastic as an example.

Since the materials, properties, and the like of the photoresist 430 and the fluid tube 440 are substantially the same as those of the photoresist and the fluid tube described above with reference to FIG. 1, the detailed description thereof will be omitted for convenience of description. .

Referring to FIG. 6, the target 420 is imaged to determine a light pattern for the coating layer of the target 420. For example, the light pattern may be obtained by image processing an image of the target 420 using the processor 140 described above with reference to FIGS. 1 and 2. In this case, the light pattern may be obtained from the image of the target 420 by various methods. As an example, the light pattern may be obtained by obtaining the image of the target 420 and converting the obtained image of the target 420 into a black and white image. FIG. 6A is a diagram illustrating the substrate 410 and the target 420 on which the photoresist 430 is formed. In the drawing, a photoresist 430 covering the entirety of the substrate 410 and the target 420 is represented as an example. In another embodiment, the photoresist 430 may cover a portion of the substrate 410 and the target 420. For example, the photoresist 430 may not be formed on the upper surface of the target 420. 6 (b) is a view showing an image 450 of the target 420 is converted to black and white image, Figure 6 (c) is a light pattern determined by image processing the image 450 of the target 420 460 is a drawing. The light pattern 460 may further include light patterns 462A and 464A for contacting the bonding wires on the upper surface of the target 420. In the drawing, two regions of the same shape as the light patterns 462A and 464A for contact with the bonding wire are represented as an example. In another embodiment, the light patterns 462A and 464A for contact with the bonding wire may have various numbers or shapes. After detecting the edges and corners of the target 420 from the image 450 of the converted target 420, the position and rotation angle of the target 420 therefrom. Calculate From the calculated position and rotation angle, a light pattern 460 for the coating layer of the target 420 can be obtained. That is, the light pattern 460 may be obtained by expanding or contracting the image 450 of the target 420 by a predetermined range. In addition, the light pattern 460 may be obtained by adding the light patterns 462A and 464A for contact with the bonding wires.

Thereafter, light having a predetermined light pattern 460 is provided to the substrate 410. In an embodiment, the providing of the light having the predetermined light pattern 460 to the substrate 410 may include providing a light source and modulating the light provided by the light source according to the predetermined light pattern 460. can do. Light having a predetermined light pattern 460 may be provided to the substrate 410 using, for example, the image processing based exposure apparatus 130 described above with reference to FIGS. 1 and 2. Since the process of providing the light having the predetermined light pattern 460 to the substrate 410 may be inferred from the above description with reference to FIGS. 1 and 2, a detailed description thereof will be omitted for convenience of description.

FIG. 7 illustrates a target including a coating layer formed by the target coating method described above with reference to FIGS. 4 to 6. (A) and (b) is sectional drawing, respectively.

Referring to FIG. 7A, a coating layer 432 is formed on the surface of the substrate 410 and the target 420 by the target coating method described above. Some areas 462 and 464 necessary for contact with the bonding wire on the upper surface of the target 420 may not be covered by the coating layer 432. As another example, as shown in the drawing, when the upper surface of the target 420 does not need to be in contact with the bonding wire, some regions 462 and 464 necessary for contact with the bonding wire are transferred to the coating layer 432. Can be replaced. The coating layer 432 corresponds to the cured photoresist 430. The thickness of the coating layer 432 is adjustable. As an example, as shown in FIG. 5A, when the photoresist 430 is formed on the surface of the target 420 by spin coating, the thickness of the coating layer 432 may be a kind of photoresist or a spin coating time. , Spin coating speed and the like. As another embodiment, when the spray coating method is used as the coating method, the thickness, thickness variation, etc. of the coating layer 432 disposed on the upper surface of the target 420 may be controlled by adjusting the type of photoresist, spray position, and the like. Can be. As another embodiment, as shown in FIG. 5B, when the photoresist 430 is formed on the surface of the target 420 using the fluid tube 440, the photoresist 430 is expanded during curing. Alternatively, assuming that it is not contracted, the thickness H of the coating layer 432 becomes G, which is the distance between the inner surface of the fluid tube 440 and the upper surface of the target 420.

Referring to FIG. 7B, a coating layer 432 is formed on the surface of the substrate 410 and the target 420 by the target coating method described above. In some embodiments, an additional coating layer 470 may be further formed on the surface of the substrate 410 and the target 420. Some areas 462 and 464 necessary for contact with the bonding wires on the upper surface of the target 420 may not be covered by the coating layer 432 and the additional coating layer 470. As another example, unlike in the drawings, when the upper surface of the target 420 does not need to be in contact with the bonding wire, some regions 462 and 464 necessary for contact with the bonding wire may be coated with the coating layer 432. And an additional coating layer 470. Various materials may be used as the additional coating layer 470. For example, the additional coating layer 470 may be a conductive film. As another example, the additional coating layer 470 may be an insulating film.

In the figure, a cured photoresist formed by the target coating method described above as an additional coating layer 470 is represented by way of example. In one example, the additional coating layer 470 may include a phosphor. In this case, the additional coating layer 470 may be used as a fluorescent film as an example. When the LED chip is used as the target 420, the additional coating layer 470 including the phosphor may implement light having various colors or white light having various color temperatures together with the coating layer 432 including the phosphor. As another example, the additional coating layer 470 may not include a phosphor. In this case, the additional coating layer 470 may be used as a protective layer, for example. The protective layer may form an appropriate space between the target 420 and the coating layer 432. When the LED chip is used as the target 420 and the coating layer 432 is used as the fluorescent film, the space may perform a function of protecting the coating layer 432 from the high heat generated in the LED chip.

As another example, unlike the figure, the additional coating layer 470 may be a coating layer patterned by the target coating method described above. The additional coating layer 470 may have various shapes or functions unlike those shown in the drawings. In one example, the additional coating layer 470 may be a wiring for electrical connection. As another example, the additional coating layer 470 may be a contact pad for contacting the bonding wire. The target coating method is performed after the process of forming the coating layer, by using the pattern formed by the target coating method to selectively etch the coating layer to form an additional coating layer 470. Various methods may be used as a method of selectively etching the coating layer to form an additional coating layer 470. This will be apparent to those skilled in the art as a general semiconductor process, so a detailed description thereof will be omitted for convenience of description. The pattern corresponds to a cured photoresist obtained by the target coating method. In one example, the coating layer may be a conductive film. As another example, the coating layer may be an insulating film. The coating layer may be formed on at least a portion of the surface of the target 420 by various methods. The coating layer may be formed on at least a portion of the surface of the target 420 by, for example, spin coating, spray coating, or printing. Alternatively, the coating layer may be formed on at least a portion of the surface of the target 420 by physical vapor deposition, chemical vapor deposition, electroplating, or the like. The above examples are examples for understanding and may form the coating layer by various methods.

8 is a flowchart illustrating a target coating method according to another embodiment. Referring to FIG. 8, the target coating method begins at 810 block. In block 810, a substrate having at least one target disposed on one surface is prepared. In block 820, photoresist is formed in at least a portion of the surface of the substrate and the target. In block 830, the target is imaged to form a bank for the coating layer of the target. In an embodiment, the forming of the weir may include obtaining an image of the target and providing a light having a light pattern corresponding to the weir to the substrate using the obtained image of the target. Can be. In block 840, a resin is provided to at least a portion of the substrate and the target surface surrounded by the weir. In one embodiment, the resin may include a phosphor.

In some other embodiments, the target coating method is performed before forming the photoresist, and may further include forming an additional coating layer on at least a portion of the surface of the target. In addition, the target coating method may be performed after the process of forming the additional coating layer, and may further include a process of forming a pattern by selectively etching the additional coating layer. In this case, a coating layer formed by light provided by the processes of the 320 blocks and the 330 blocks may be used as an etching mask for selective etching of the additional coating layer. The coating layer may be a cured photoresist. The method of etching the additional coating layer may be a dry etching method or a wet etching method generally used in a semiconductor process. Various materials may be used as the additional coating layer. In one example, the additional coating layer may be a conductive film. As another example, the additional coating layer may be an insulating film.

In some other embodiments, the target coating method may be performed after the preparation of the substrate, and may further include changing the placement of the target. In this case, a flexible substrate can be used as the substrate. The flexible substrate can be modified by various methods. In one embodiment, the flexible substrate may be deformed by increasing the flexible substrate by applying a tensile force in at least one direction selected from an X-axis direction, a Y-axis direction, and a combination thereof. In another embodiment, the flexible substrate may be deformed by compressing the flexible substrate by applying a compressive force in at least one direction selected from an X-axis direction, a Y-axis direction, and a combination thereof. The compressive force may be a restoring force of the flexible substrate as well as a compressive force applied from the outside. The restoring force may be a restoring force corresponding to a tensile force applied to the flexible substrate. The above examples are examples for understanding, and the flexible substrate may be modified by various methods. Hereinafter, a target coating method according to another embodiment will be described in detail with reference to FIGS. 9 to 13.

9 to 13 are views illustrating a target coating method according to another embodiment.

Referring to FIG. 9, first, a substrate 910 on which at least one target 920 is disposed is prepared. 9 (a) and 9 (b) show a plan view and a sectional view, respectively. Sectional drawing of the figure is sectional drawing along the XX 'line | wire of a top view. When a flexible substrate is used as the substrate 910, the flexible substrate may be deformed by an external force. In this case, the arrangement of the at least one target 920 disposed on the substrate 910 may be changed. Since the substrate 910 and the target 920 are substantially the same as the substrate 110 and the target 120 described above with reference to FIG. 1, a detailed description thereof will be omitted for convenience of description.

Referring to FIG. 10, a photoresist 930 is formed on at least a portion of the surface of the substrate 910 and the target 920. (A) and (b) of FIG. 10 show a top view and a sectional view, respectively. The cross-sectional view of the drawings is a cross-sectional view taken along the line 'VIII' of the plan view. For brevity, hereinafter, a target coating method will be described using a photoresist 930 formed on at least a portion of the surface of the substrate 910 and one target 920. In the figure, a semiconductor chip having contact pads 922A, 922B, 922C, and 922D for contact with a bonding wire as a target 920 is formed as an example. As another example, contact pads 922A, 922B, 922C, and 922D may be omitted when a semiconductor chip is used that does not require a contact pad for contact with the bonding wire as the target 920.

Referring to FIG. 10, the photoresist 930 may be formed on at least a portion of the surface of the substrate 910 and the target 920 by a coating method generally used in a semiconductor process. The photoresist 930 may be formed by the various methods described above with reference to FIG. 5. In addition, the thickness of the photoresist 930 may be adjusted by various methods described above with reference to FIG. 5.

Since the material, properties, and the like of the photoresist 930 are substantially the same as the materials, properties, and the like of the photoresist described above with reference to FIG. 1, a detailed description thereof will be omitted for convenience of description.

Referring to FIG. 11, the target 920 is imaged to form a weir 930A for the coating layer of the target 920.

FIG. 11A is a diagram showing a light pattern 960 for forming the weir 930A. Referring to FIG. 11A, the light pattern 960 for the coating layer of the target 920 may be determined by image processing the target 920. As an example, the light pattern 960 may be obtained by image processing an image of the target 920 using the processor 140 described above with reference to FIGS. 1 and 2. Since the process of obtaining the light pattern 960 is substantially the same as the process of obtaining the light pattern 460 described above with reference to FIG. 6, a detailed description thereof will be omitted for convenience of description.

11B illustrates a cross-sectional view of the weir 930A formed by the light pattern 960. Weir 930A is cured photoresist 930. The weir 930A may be formed by providing light having a predetermined light pattern to the substrate 910. For example, the predetermined light pattern may be light having the same shape as the light pattern 960. As another example, the predetermined light pattern may be light of a reverse phase of the light pattern 960. In the drawing, weir 930A formed by the predetermined light pattern having an inverted shape of light pattern 960 is shown as an example. Also shown in the figure is a weir 930A located above the contact pads 922A, 922B, 922C, and 922D as the weir 930A, and in contact with the side of the target 920. As another example, unlike the drawings, the shape and arrangement of the weir 930A may vary depending on the shape of the coating layer of the target 920 to be formed. The weir 930A having various shapes and arrangements can be obtained by varying the shape of the predetermined light pattern. Since the process of providing the predetermined pattern to the substrate 910 is substantially the same as the process of providing the light pattern 460 described above with reference to FIG. 6 to the substrate 410, a detailed description thereof will be omitted for convenience of description. .

Referring to FIG. 12, a resin 940 is provided in at least a portion of the surface of the substrate 910 and the target 920 surrounded by the weir 930A. As the resin 940, various kinds of resins may be used. In one example, the resin 940 may be a mixture of water, ethanol and thermoset silicone. As another example, the resin 940 may be a mixture of water, ethanol, and epoxy. As another example, the resin 940 may be a mixture of water, ethanol, thermoset silicone and epoxy. In one embodiment, the resin 940 may include a phosphor. As the phosphor, various phosphors described above with reference to FIG. 1 may be used.

Referring to FIG. 13, the weir 940A is removed to obtain a target 920 having a coating layer 940A formed on the surface thereof. Coating layer 940A is cured resin 940. Resin 940 may be cured by various methods. Resin 940 may, for example, be thermoset at room temperature or at a predetermined temperature. The thickness of the coating layer 940A may be adjusted by adjusting the composition ratio of the amount or mixture of the resin 940 provided on at least a portion of the surface of the substrate 910 and the target 920 surrounded by the weir 930A. Weir 940A may be removed by a variety of methods commonly used to remove photoresist. The method of removing the weir 940A may be, for example, a dry, wet, thermal reflow method, or the like. The dry method may be, for example, a method using an oxygen plasma. As another example, as shown in the figure, an additional coating layer (not shown) may be further formed between the coating layer 940A and the surface of the target 920. The additional coating layer may be formed by the method described above as an example, and may have various shapes and arrangements. In one example, the additional coating layer and the coating layer 940A may include a fluorescent layer. When the LED chip is used as the target 920, the coating layer 940A including the phosphor and the additional coating layer may implement light having various colors or white light having various color temperatures. As another example, the additional coating layer may function as a protective layer. The protective layer may form a suitable space between the target 920 and the coating layer 940A. When the LED chip is used as the target 920 and the coating layer 940A is used as the fluorescent film, the space may serve to protect the coating layer 940A from the influence of high heat generated in the LED chip. .

14 illustrates a target 920 including a coating layer 940A formed by the target coating method described above with reference to FIGS. 9 to 13. A coating layer 940A is formed on the surface of the target 920 by the target coating method described above with reference to FIGS. 9 to 13. Some regions 922A, 922B, 922C, and 922D necessary for contact with the bonding wires on the upper surface of the target 920 may not be covered by the coating layer 940A. As another example, unlike in the drawings, the coating layer may be provided on some regions 922A, 922B, 922C, and 922D required for contact with the bonding wire when the upper surface of the target 920 does not need to be in contact with the bonding wire. 940A may be formed. Coating layer 940A may be thermally cured. The photocured (eg UV cured) coating layer may exhibit non-uniform coating characteristics in the sidewall portion due to scattering of light by the phosphor, reduction of light intensity, and the like. Thermosetting the coating layer 940A may compensate for the non-uniform coating at the sidewall portion.

From the above, various embodiments of the present disclosure have been described for purposes of illustration, and it will be understood that various modifications are possible without departing from the scope and spirit of the present disclosure. And the various embodiments disclosed are not intended to limit the present disclosure, the true spirit and scope will be presented from the following claims.

Claims (20)

In a lithographic system,
At least one target object disposed on the substrate;
A processor for photographing the image of the target and determining a light pattern for the coating layer of the target based on the photographed image; And
An exposure apparatus for providing light having the light pattern defined by the processor to the substrate
Lithography system comprising a. The method of claim 1,
And a first coating apparatus for supplying photoresist to at least a portion of the surface of the substrate and the target. The method of claim 2,
The photoresist comprises a phosphor. The method of claim 2,
And a second coating apparatus capable of forming a conductive film or an insulating film on at least a portion of the surface of the substrate and the target. The method of claim 1,
The target is a lithography system comprising a cell, semiconductor chip, LED chip, RFID chip or CMOS chip. The method of claim 1,
The coating layer comprises a three-dimensional structure. The method of claim 1,
The exposure apparatus
Light source; And
And a spatial light modulator for modulating the light provided by the light source in accordance with a signal provided by the processor. The method of claim 7, wherein
The spatial light modulator comprises a digital micromirror array. In the target coating method,
Preparing a substrate having at least one target disposed on one surface thereof;
Photographing an image of the target and determining a light pattern for the coating layer of the target based on the photographed image; And
Providing light having the predetermined light pattern to the substrate
Target coating method comprising a. 10. The method of claim 9,
Further comprising the step of forming a photoresist on at least a portion of the surface of the substrate and the target,
And the photoresist is selectively cured by the light having the predetermined light pattern. The method of claim 10,
And the photoresist comprises a phosphor. The method of claim 10,
The method of claim 1, further comprising forming an additional coating layer on at least a portion of the surface of the target, which is performed before forming the photoresist. The method of claim 10,
In the process of forming the photoresist, the target coating method for forming a photoresist on at least a portion of the surface of the substrate and the target surface using a fluid tube containing the photoresist therein. The method of claim 13,
In performing the process of forming the photoresist, the thickness of the cured photoresist positioned on the upper surface of the target is adjusted according to the distance between the inner surface of the fluid tube and the upper surface of the target. . 10. The method of claim 9,
The process of determining the light pattern
Acquiring the target image; And
A target coating method comprising the step of converting the obtained target image black and white image. 10. The method of claim 9,
Providing the light having the predetermined light pattern to the substrate
Providing a light source; And
And modulating the light provided from the light source according to the determined light pattern. In the target coating method,
Preparing a substrate having at least one target disposed on one surface thereof;
Forming a photoresist on at least a portion of a surface of the substrate and the target;
Photographing an image of the target and forming a weir for the coating layer of the target based on the photographed image; And
Providing resin to at least a portion of the substrate and the target surface surrounded by the weir
Target coating method comprising a. The method of claim 17,
The resin is a target coating method comprising a phosphor. The method of claim 17,
The process of forming the dam
Obtaining an image of the target; And
And providing a light having a light pattern corresponding to the weir to a substrate using the obtained image of the target. The method according to any one of claims 9 to 19,
The target coating method is performed after the process of preparing the substrate, further comprising the step of changing the placement of the target.

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