KR101078668B1 - Inertial array switch using ball bearing, manufacturing method of the same, car airbag sensor and projectile fuze power supply switch using the same - Google Patents

Inertial array switch using ball bearing, manufacturing method of the same, car airbag sensor and projectile fuze power supply switch using the same Download PDF

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Publication number
KR101078668B1
KR101078668B1 KR1020100031232A KR20100031232A KR101078668B1 KR 101078668 B1 KR101078668 B1 KR 101078668B1 KR 1020100031232 A KR1020100031232 A KR 1020100031232A KR 20100031232 A KR20100031232 A KR 20100031232A KR 101078668 B1 KR101078668 B1 KR 101078668B1
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KR
South Korea
Prior art keywords
ball bearing
flow path
inertial switch
storage part
substrate
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Application number
KR1020100031232A
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Korean (ko)
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KR20110111916A (en
Inventor
이승섭
조익천
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한국과학기술원
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Priority to KR1020100031232A priority Critical patent/KR101078668B1/en
Priority to PCT/KR2011/002342 priority patent/WO2011126255A2/en
Publication of KR20110111916A publication Critical patent/KR20110111916A/en
Application granted granted Critical
Publication of KR101078668B1 publication Critical patent/KR101078668B1/en

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    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01H—ELECTRIC SWITCHES; RELAYS; SELECTORS; EMERGENCY PROTECTIVE DEVICES
    • H01H35/00—Switches operated by change of a physical condition
    • H01H35/14—Switches operated by change of acceleration, e.g. by shock or vibration, inertia switch
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01H—ELECTRIC SWITCHES; RELAYS; SELECTORS; EMERGENCY PROTECTIVE DEVICES
    • H01H1/00—Contacts
    • H01H1/12—Contacts characterised by the manner in which co-operating contacts engage
    • H01H1/14—Contacts characterised by the manner in which co-operating contacts engage by abutting
    • H01H1/16—Contacts characterised by the manner in which co-operating contacts engage by abutting by rolling; by wrapping; Roller or ball contacts
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01H—ELECTRIC SWITCHES; RELAYS; SELECTORS; EMERGENCY PROTECTIVE DEVICES
    • H01H2239/00—Miscellaneous
    • H01H2239/006—Containing a capacitive switch or usable as such

Abstract

The present invention relates to an inertial switch. More particularly, the present invention relates to an inertial switch using a ball bearing.
According to the present invention, a substrate having electrode pairs facing each other in an electrically disconnected state on one surface; A flow path coupled to the substrate, the flow path being elongated along one direction, and dividing the flow path into a first storage part and a second storage part positioned on the electrode pair, and smaller than a flow path width of the first storage part and the second storage part. A body part having a flexible door having a flow path width; And a ball bearing moving along the guide groove, wherein when the inertia force is applied to the ball bearing more than a predetermined value, the ball bearing moves through the flexible door to another storage and changes the capacitance between the pair of electrodes. An inertial switch using a ball bearing is provided.
Since the inertial switch using the ball bearing according to the present invention does not cause a cracking phenomenon because the ball bearing is used, accurate operation is possible.

Figure R1020100031232

Description

Inertial array switch using ball bearing, manufacturing method of the same, car airbag sensor and projectile fuze power supply switch using the same}

The present invention relates to an inertial switch. More particularly, the present invention relates to an inertial switch using a ball bearing.

Inertia (慣性) refers to the nature of maintaining their own state of movement. This inertia can easily be found in life, as the passengers on the bus are pulled forward by the external force even if the bus stops.

Mechanical devices using such inertia include an inertial switch, which is applied to an airbag system, a power supply for shell fuses, and the like.

Conventionally, an inertial switch is mainly manufactured using a solid type inertial beam and a spring, but the manufacturing process is complicated, bulky, and expensive.

Recently, in order to improve such a problem, by using a fine liquid metal droplet as an inertial force object, the inertial switch and a method of manufacturing the same that are relatively simple in structure and sensitive to switch operation, and can be manufactured at low cost have been developed. Started.

KR 10-0910049 10

The inertial switch using the liquid metal droplets described above has a problem that when the value of the inertia force increases, scattering of the droplets occurs, making accurate operation difficult. Malfunctions are particularly problematic in that inertial switches are used in applications where malfunctions are not allowed, such as airbag systems, shell fuse power supplies, and the like. The present invention is to solve this problem, it is an object to provide an inertial switch capable of accurate operation using a ball bearing.

According to the present invention, a substrate having electrode pairs facing each other in an electrically disconnected state on one surface; A flow path coupled to the substrate, the flow path being elongated along one direction, and dividing the flow path into a first storage part and a second storage part positioned on the electrode pair, and smaller than a flow path width of the first storage part and the second storage part. A body part having a flexible door having a flow path width; And a ball bearing that moves along the flow path, wherein when the inertia force is applied to the ball bearing more than a predetermined value, the ball bearing moves through the flexible door to another storage and changes the capacitance between the pair of electrodes. An inertial switch using a ball bearing is provided.

In addition, the ball bearing is provided with an inertial switch using a ball bearing, characterized in that it further comprises a cover coupled to the body to close the open surface of the flow path to prevent the ball bearing from exiting the flow path.

In addition, there is provided an inertial switch using a ball bearing, further comprising a resin layer formed on the substrate to protect the electrode layer. In addition, the resin layer includes a guide groove elongated on the upper surface, the ball bearing is provided with an inertial switch using a ball bearing, characterized in that to move along the guide groove.

In addition, the flexible door is provided with an inertial switch using a ball bearing, characterized in that it comprises a pair of protrusions extending to face each other in the inner direction of the flow path. The spacing between the protrusions is preferably smaller than the diameter of the ball bearing.

In addition, a fuse of the shell and the vehicle airbag sensor including the inertial switch described above is provided.

In addition, forming a conductive film on the substrate; Patterning the conductive film to form electrode pairs facing each other in an electrically disconnected state; Forming and patterning the mold on the base to form a mold having a reversed phase; The resin solution for forming a body portion is formed on the base on which the mold is formed, and then cured to form a flow path formed long in one direction, and the flow path is divided into a first storage part and a second storage part positioned on the electrode pair. Forming a body part having a flexible door having a flow path width smaller than a flow path width of the first storage part and the second storage part; Separating the body portion from the base and the mold; Attaching the body portion onto a substrate on which the electrode pair is formed; And it provides a method of manufacturing an inertial switch using a ball bearing comprising the step of injecting a ball bearing into one of the storage formed in the body portion.

In addition, there is provided a method of manufacturing an inertial switch using a ball bearing, further comprising the step of coupling a cover for closing the open surface of the flow path on the body portion to prevent the ball bearing from exiting the flow path.

In addition, after the forming of the electrode pair, there is provided a method of manufacturing an inertial switch using a ball bearing, further comprising the step of forming a resin layer for protecting the electrode layer on the substrate on which the electrode pair is formed. .

In addition, the method of manufacturing an inertial switch using a ball bearing further comprises the step of forming a guide groove elongated in one direction to accommodate the ball bearing by patterning the resin layer.

In addition, a fuse of the shell and the vehicle airbag sensor including the inertial switch described above is provided.

Since the inertial switch using the ball bearing according to the present invention does not cause a cracking phenomenon because the ball bearing is used, accurate operation is possible. In addition, the structure is relatively simple, there is an advantage that can be produced in a small size. For this reason, the inertial switch according to the present invention can be applied as an inertial switch to various fields, such as a moving system of a robot, a portable system, as well as a fuse of an automobile airbag sensor or a shell.

1 is a perspective view of an inertial switch using a ball bearing according to an embodiment of the present invention.
2 to 15 are views for explaining a method of manufacturing an inertial switch using a ball bearing according to an embodiment of the present invention.

Hereinafter, a multichannel inertial switch using a liquid metal and a method of manufacturing the same will be described with reference to the accompanying drawings. In the drawings, the size and shape of the components, etc. may be exaggerated or simplified to aid in understanding the invention.

1 is a perspective view of an inertial switch using a ball bearing according to an embodiment of the present invention.

As shown in FIG. 1, the inertial switch using the ball bearing according to the present embodiment includes a substrate 1, electrode pairs 2 formed on one surface of the substrate 1, and resin layers 3 and 4 formed on the substrate on which the electrode pairs are formed. , An electrode pair accommodated in the body part 5 disposed on the substrate 1 on which the resin layers 3 and 4 are formed, the cover 6 coupled to the body part 5, and the body part 5 and electrically disconnected ( 2) a ball bearing 7 for changing the capacitance between the two.

As the board | substrate 1, the glass substrate 1 of the thin plate form was used.

The electrode pair 2 serves to generate a switching signal by changing capacitance when the ball bearing 7 is positioned thereon. In this embodiment, the electrode pairs 2 facing each other at a predetermined interval apart from each other are used. Since the ball bearings 7 make contact with the dots, the contact area is limited, which makes it difficult to serve as a conductor connecting the electrode pairs 2. However, when the ball bearing 7 is located between the electrode pairs 2, the capacitance between the electrode pairs 2 changes, so that it can be used as a switching signal. The electrode pair 2 was formed by patterning a chromium thin film, and its thickness was about 2000 mm 3.

On the substrate 1 on which the electrode pairs 2 were formed, a first resin layer 3 made of a SU-8 2 registry was formed to a thickness of 5 탆. On the first resin layer 3, a second resin layer 4 made of a SU-8 100 registry was formed. A guide groove 41 extending in one direction is formed at the center of the second resin layer 4. The guide groove 41 receives a portion of the ball bearing 7 and guides the ball bearing 7 to pass between the electrode pairs 2. The width of the guide groove 41 is designed to be slightly wider than the diameter of the ball bearing 7.

The body portion 5 includes a flow path 51 and a flexible door 55. Body portion 5 is manufactured using PDMS. The flow path 51 is divided into the first storage part 52 and the second storage part 53 with the flexible door 55 therebetween. An electrode pair 2 is formed on the substrate 1 positioned below the second storage part 53. The flexible door 55 consists of a pair of protrusions each extending toward the center of the flow path on both inner surfaces of the flow path 51. The flexible door 55 prevents the ball bearing 7 from moving from the first storage portion 52 to the second storage portion 53 until a certain level of inertial force is applied. Therefore, the spacing between these protrusions should be small compared to the diameter of the ball bearing 7. When more than a predetermined level of inertial force is applied, the ball bearing 7 pushes the flexible door 55 to deform so that the distance between the projections becomes greater than the diameter of the ball bearing 7 and the ball bearing 7 moves to the second storage 53. . As the material of the body portion 5, in addition to PDMS, various polymers capable of a liquid phase that are commonly used, such as polyimide, UV curable polymer, and PMMA, may be used depending on the purpose.

The cover 6 is to close the open surface on the upper portion of the reservoirs 52, 53 of the body 5 to prevent the ball bearing 7 from escaping from the body 5. The cover 7 may be made of transparent glass, PDMS, or the like. The cover 7 is bonded to the body portion 5 using an epoxy.

The operation of the inertial switch using the ball bearing according to the present invention will be briefly described. When no inertial force is applied, the ball bearing 7 is kept in the state stored in the first storage portion 52 by the flexible door 5. However, when a certain amount of inertia is applied, the ball bearing 7 pushes the flexible door 55 to open and moves to the second storage part 53. The moved ball bearing 7 changes the capacitance between the pair of electrodes 2 positioned below the second storage portion 53 to generate a switching signal.

Hereinafter, a method of manufacturing an inertial switch using a ball bearing according to an embodiment of the present invention. 2 to 15 are views for explaining a method of manufacturing an inertial switch using a ball bearing according to an embodiment of the present invention.

Method of manufacturing an inertial switch using a ball bearing according to a temporary embodiment of the present invention, the step of forming the electrode pair (2) and the resin layer (3, 4) on the substrate 1 and the body portion 5 And assembling the body portion 5 in combination with the substrate 1 on which the electrode pair 2 and the resin layers 3 and 4 are formed. First, the steps of forming the electrode pairs 2 and the resin layers 3 and 4 on the substrate 1 will be described.

This step begins with the deposition of chromium on the glass substrate 1. As a method of depositing a chromium thin film, various known physical vapor deposition (PVD) and chemical vapor deposition (CVD) methods may be used.

Next, the deposited chromium thin film is patterned. As a photolithography process for patterning a chromium thin film, various dry or wet methods capable of removing a portion of the chromium thin film may be used. Since the photolithography process is a known technique, a detailed description of the patterning process using the same is omitted. In the present embodiment, as shown in FIGS. 2 and 3, the electrode pairs 2 facing each other at a predetermined interval apart from each other are formed.

Next, as shown in FIG. 4, the Su-8 2 photoresist (PR) layer 10 is formed on the glass substrate 1 on which the chromium electrode pair 2 is formed by a spin coating method using the spin coater 20. It was. Thereafter, the Su-8 2 photoresist layer 10 was patterned through a photolithography process to form a first resin layer 3 as shown in FIG. 5.

Next, as shown in FIG. 6, the Su-8 8 photoresist layer 11 was formed on the glass substrate 1 on which the first resin layer 3 was formed by the spin coating method using the spin coater 20. The Su-8 8 photoresist layer 11 was patterned through a photolithography process to form a second resin layer 4 having guide grooves 41 formed thereon as shown in FIGS. 7 and 8.

Next, the method of forming the body part 5 is demonstrated.

Forming the body portion 5 begins with forming a mold 12 using Su-8 photoresist on the base 30 as shown in FIG. The base 30 may be silicon, glass, quartz, or the like. The base 30 is a separate substrate used to manufacture the body portion 5 and is separated from the body portion 5 after the body portion 5 is manufactured.

Next, the Su-8 photoresist mold 12 is patterned through a photolithography process to obtain a reverse phase 13 necessary for forming the body portion as shown in FIG. 10. In the present invention, the mold 12 may be formed on the base 30 by various materials other than Su-8 photoresist by a method other than a photolithography process.

After the reverse phase 13 is formed in the base 30, as shown in FIG. 11, the polymer solution is applied onto the base 30 and then cured. Then, the body portion 5 manufactured on the base 30 is separated from the base 30 and the reverse phase 13. 12 and 13 show the body 5 separated from the base 30.

Finally, the steps of assembling are explained.

First, as shown in FIG. 14, the body portion 5 is placed on the electrode pair 2 such that the second storage portion 53 of the body portion 5 is positioned on the chromium electrode pair 2 formed on the substrate 1. ) And the substrate 1 on which the resin layers 3 and 4 are formed. The method of joining includes a method using an adhesive such as epoxy resin or using heat.

Next, as shown in FIG. 15, the ball bearing 7 is introduced into the first storage part 52 of the body part 5, and the cover 6 of the PDMS material is bonded onto the body part 5 using epoxy. It was. In addition to the PDMS, a glass substrate may be used as the cover 6.

The present invention described above is not limited to the configuration and operation as shown and described. That is, the present invention is capable of various changes and modifications within the spirit and scope of the appended claims.

In the present invention, the process of forming the electrode layer or the resin layer, and patterning in two or three dimensions is various by using a technique used in a conventional semiconductor manufacturing process or a micromachining technique used in microelectromechanical systems (MEMS). You can choose the method.

In addition, in the present embodiment, a resin layer in which a guide groove is formed is described, and the ball bearing is behaved after a part of the ball bearing is inserted into the guide groove. However, the first storage unit and the second storage unit are not formed. The width of the negative flow path may be narrowed so that the first storage part and the second storage part directly guide the behavior of the ball bearing.

In addition, in the present embodiment, the flexible door is described as extending toward the center of the flow path on both sides of the flow path, but a method of joining the cover to the body after forming the flexible door on the cover without forming the flexible door may be selected. have.

1: substrate 2: electrode pair
3: first resin layer 4: second resin layer
41: guide groove 5: body
51: Euro 52: First storage
53: second reservoir 55: flexible door
6: cover 7: ball bearing

Claims (12)

A substrate having electrode pairs facing each other in an electrically disconnected state on one surface thereof;
A flow path coupled to the substrate, the flow path being elongated along one direction, and dividing the flow path into a first storage part and a second storage part positioned on the electrode pair, and smaller than a flow path width of the first storage part and the second storage part. A body part having a flexible door having a flow path width; And
A ball bearing behaving along the flow path,
And a ball bearing moves through the flexible door to another storage unit and changes capacitance between the pair of electrodes when the ball bearing is applied with an inertia force greater than or equal to a predetermined value. The method of claim 1,
And a cover coupled to the body to close the open surface of the flow path to prevent the ball bearing from exiting the flow path. The method of claim 1,
Inertial switch using a ball bearing, characterized in that it further comprises a resin layer formed on the substrate to protect the electrode layer. The method of claim 3,
The resin layer,
An inertial switch using a ball bearing, characterized in that it comprises a guide groove formed on the upper surface, the ball bearing behaves along the guide groove. The method of claim 1,
The flexible door,
An inertial switch using a ball bearing, characterized in that it comprises a pair of projections extending to face each other in the inner direction of the flow path. The method of claim 5,
The distance between the protrusions is inertial switch using a ball bearing, characterized in that smaller than the diameter of the ball bearing. Forming a conductive film on the substrate;
Patterning the conductive film to form electrode pairs facing each other in an electrically disconnected state;
Forming and patterning the mold on the base to form a mold having a reversed phase;
The resin solution for forming a body part is formed on the base on which the mold is formed, and then cured to form a flow path formed long in one direction, and the flow path is divided into a first storage part and a second storage part positioned on the electrode pair. Forming a body part having a flexible door having a flow path width smaller than a flow path width of the first storage part and the second storage part;
Separating the body portion from the base and the mold;
Attaching the body portion onto a substrate on which the electrode pair is formed; And
Method of manufacturing an inertial switch using a ball bearing comprising the step of injecting a ball bearing into one of the storage formed in the body portion. The method of claim 7, wherein
And coupling a cover for closing the open surface of the flow passage on the body portion to prevent the ball bearing from escaping from the flow passage. The method of claim 7, wherein
After forming the electrode pair,
Forming a resin layer for protecting the electrode layer on the substrate on which the electrode pair is formed a method of manufacturing an inertial switch using a ball bearing. 10. The method of claim 9,
The method of manufacturing an inertial switch using a ball bearing, characterized in that it further comprises the step of patterning the resin layer to form a guide groove elongated in one direction to accommodate the ball bearing. An automotive airbag sensor comprising the inertial switch of any one of claims 1 to 6. A fuse of a shell comprising the inertial switch of any one of claims 1 to 6.
KR1020100031232A 2010-04-06 2010-04-06 Inertial array switch using ball bearing, manufacturing method of the same, car airbag sensor and projectile fuze power supply switch using the same KR101078668B1 (en)

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Application Number Priority Date Filing Date Title
KR1020100031232A KR101078668B1 (en) 2010-04-06 2010-04-06 Inertial array switch using ball bearing, manufacturing method of the same, car airbag sensor and projectile fuze power supply switch using the same
PCT/KR2011/002342 WO2011126255A2 (en) 2010-04-06 2011-04-05 Inertia switch and manufacturing method thereof and airbag sensor of vehicle and fuse of shell using inertia switch

Applications Claiming Priority (1)

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KR1020100031232A KR101078668B1 (en) 2010-04-06 2010-04-06 Inertial array switch using ball bearing, manufacturing method of the same, car airbag sensor and projectile fuze power supply switch using the same

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KR101078668B1 true KR101078668B1 (en) 2011-11-01

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WO (1) WO2011126255A2 (en)

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CN113851335B (en) * 2021-10-29 2023-08-01 湖北三江航天红林探控有限公司 Continuous inertial starting change-over switch

Citations (1)

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Publication number Priority date Publication date Assignee Title
JP2004319485A (en) 2003-04-14 2004-11-11 Agilent Technol Inc Method for operating liquid metal switch

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KR20040000827A (en) * 2002-06-25 2004-01-07 김사욱 device for switch on and off of turn indicator in car
KR20040101114A (en) * 2004-10-18 2004-12-02 권대웅 Flash Type Rear Center Brake Light Device Guided By Inertia
KR20050044883A (en) * 2005-04-23 2005-05-13 권대웅 Magnet style inertia sensor guided by special inertia power
KR100910049B1 (en) * 2007-09-07 2009-07-30 포항공과대학교 산학협력단 Inertial Switch Using Micro Droplet of Liquid-metal and Method thereof

Patent Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2004319485A (en) 2003-04-14 2004-11-11 Agilent Technol Inc Method for operating liquid metal switch

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KR20110111916A (en) 2011-10-12
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