TWI292341B - An atomizer with mems-based spray device - Google Patents

Description

1292341 IX. Description of the Invention: [Technical Field] The present invention relates to a micro atomizer, and more particularly to a micro atomizer having a microelectromechanical and sheet ejection technique, the atomizer combined with a low frequency drive The piezoelectric actuator and a thin micro-spray sheet prevent the south temperature from being generated. [Prior Art] _ In recent years, liquid-phase mass spectrometers have become a very important detection and analysis instrument because of the rapid development of biochemical analysis. With the large demand for biochemical analysis in the fields of biotechnology, medicine, environmental protection, etc., the ionization technology that makes the sample enter the mass spectrometer is particularly important. The most common method is the micro-ion ionization method (Tdylor, GI (1969) Electrically driven jets. Proc. Roy. Soc. London (A313, 453-475). A conventional micro-spraying device is connected to the outlet of a wafer micro-pipe using a capillary tube, and is operated to fill the sample with a driving electric field. The charged particles are sprayed onto the mass spectrometer for analysis. The mass spectrometry performed by the electrospraying principle can quickly and accurately detect and analyze the sample. This technology is now flourishing. The development of biotechnology has become increasingly important. However, the current application for atomizers is mostly driven by ultrasonic waves, such as the Republic of China Patent Bulletin No. TW00418696 and US Patent Publication No. TW00418696, US5297734, US4479609. The atomizer of the action principle is accompanied by a thermal effect, which directly affects the fog.

5 SYS01-P452-TW 1292341 The quality of the sample is therefore not suitable for spraying biochemical samples. If another radiator is installed on the atomizer, the volume of the atomizer cannot be reduced. In addition, the ultrasonic atomizer has the following disadvantages: (1) The bulk is not easy to integrate into the mass spectrometer and the energy consumption requirement is 丨8 w~25 w2) The t-frequency drive often destroys the biochemical sample with the thermal effect, so additional heat dissipation is required. And (3) the cost of the orifice sheet made by shrinkage electroforming is higher than that of the orifice sheet of the polymer material and takes more time to produce. In order to solve the above problems, it is necessary to provide a new micro atomizer to overcome the disadvantages of the prior art. As a result of the job, the applicant was carefully tested and researched, and a perseverance spirit finally developed a micro-atomizer with micro-electromechanical and thin-film injection technology. The nebulizer is more in combination - a low frequency driven piezoelectric actuator and a thin micro-sprayed orifice are used to avoid high temperatures during actuation. 1 SUMMARY OF THE INVENTION The main object of the present invention is to provide a micro-atomizer with micro-electromechanical and thin-film technology, which combines a low-frequency driving piezoelectric actuator with a thin micro-spray hole to avoid movement. The high temperature is produced. A secondary object of the present invention is to provide a method for producing a thin micro-spray sheet which can be quickly mass-produced and reduced in production cost. For the above and other objects of the present invention, the present invention provides a micro-service: a load-bearing base; a piezoelectric actuator; a thin-type bleed orifice, a liquid storage component, and a replenishing liquid storage element.

SYS01-P452-TW 1292341 The carrier base (10) is placed at the bottom of the micro-atomizer, and the piezoelectric actuation mechanism is disposed on the carrier base to generate a vibration mode after the application of the power source. The thin micro-spray sheet is disposed on the piezoelectric actuator for spraying the sample, and the liquid storage element is disposed on the piezoelectric actuator to have a first active window and connected to the thin Micro orifice sheet = - liquid outflow port. The supplemental liquid reservoir is rotatably coupled to the liquid storage cartridge having a second movable window connected to the first active window for filling the makeup liquid. According to the micro atomizer of the present invention, the vibration mode of the piezoelectric actuator is a dual mode vibration mode in which the driving frequency is not more than 2 〇 KHz, and the power consumption during operation is not More than 1 watt (WaU). According to another feature of the micro-atomizer of the present invention, the thin micro-spray sheet is fabricated in a microelectromechanical manner in combination with a thin piece micro-injection molding technique. The material of the substrate is a group selected from the group consisting of pmma, polycarbonate (PC) and polydimethyl sulphur (PDMS) for the purpose of the present invention. The invention provides a method for manufacturing a thin microchip, which mainly comprises the steps of: providing a substrate; forming a plurality of first circular aperture holes on the substrate; and "relating to the first circle on the substrate" Forming a plurality of holes of a second circular aperture having a larger aperture; forming a metal layer on the holes of the second and second circular apertures; and molding the metal layer Ren's formed the thin micro-spray sheet. One of the manufacturing methods of the thin micro-spray sheet according to the present invention

SYS01-P452-TW 1292341 sign, the thin micro-perforation material is formed into the substrate: the film two (four) system further includes: - polymer;; - temperature solid (four) ancient: ^, brother two circular aperture concave The polymer material of the hole is solidified: the sub-material; and the crying is performed by the injection method. The second one is: the micro-atomization with the micro-electromechanical nozzle structure: into the "this/, increasing the stability of the mass spectrometry signal , low energy consumption and significant reduction ί: The above and other objects, features, and advantages of the present invention can be further described as 'detailed by several preferred embodiments' and with reference to the drawings [embodiment] Although... The embodiments may be embodied in different forms, but the drawings and the following description of the preferred embodiments of the present invention, and the examples of the present disclosure are based on (4), and are not examples. The invention is intended to be limited to the particular embodiments illustrated and/or described. Please refer to FIG. u and FIG. 113, which are respectively a perspective view and a side view of a micro atomizer having a micro electromechanical (four) structure according to the present invention. Structurally, the micro-atomizer 10 includes a carrier base 6; a piezoelectric actuator 30; a thin micro-spray sheet 4; a liquid storage member 20; and a supplemental liquid storage member 5''. The carrier base 6G is disposed at the bottom of the micro-atomizer 1 (), and the piezoelectric actuator 30 is disposed on the carrier base 6〇 and

SYS01-P452-TW 1292341 The liquid located in the liquid storage element 20 "σ - generates a vibration mode after the power supply. The extruded extra-supply liquid can be sampled by the thin micro-injection orifice 4 The thin micro-spray sheet 40 is disposed on the piezoelectric-induced spray to the spray of the sample, and the liquid is stored on the second side of the actuator 20, and has a first movable sigh placed thereon. The piezoelectric actuator /m is connected to the thin type = liquid outflow port 24. The supplemental liquid storage =: the tether is: a container, connected to the liquid storage element 20, having a sub-:: 'active window 22 connected a second movable window 52 is configured to fill the z body. The first movable window 22 and the second movable window 52 can be combined, opened and opened. In the component energy consumption, the one has: a micro-atomization HH of the structure In the case of moving (four) H force (four) is not greater than; Watt. For inclusion in 1 watt, please refer to Figure 2, which shows the structure of the piezoelectric actuator. The piezoelectric actuator includes at least a metal _ Μ, connected to: an external power source 34; and a piezoelectric film 36 disposed on the metal conductive layer 32, The vibration mode is generated after the power source 34 is applied, and the liquid is sprayed out from the liquid outflow port of the thin micro-spray sheet by the vibration mode. The piezoelectric film 36 may be zinc oxide and nitrogen. A piezoelectric film such as aluminum (A1N), lead magnesium titanate (ρζτ) or lithium niobate can be applied to the electric actuator 3 of the present invention. The piezoelectric actuator can be classified into a piezoelectric element surface. There are two types of linear displacement type of internal displacement and bending displacement type using external displacement. Linear displacement type includes single-layer type and multi-layer type, and curved

SYS01-P452-TW 1292341 Transposition spear-type & monolithic wafer (mononl〇rph), monomorphic piezoelectric unimorph, bimodal piezoelectric wafer (bim〇rph), piezoelectric wafer (mltimorph) ), the application varies depending on the way they are combined or stacked. The piezoelectric material used in the piezoelectric actuator 30 disclosed in the present invention is a low frequency driven bimodal piezoelectric wafer actuating element. Generally, the polarization directions of the piezoelectric ceramic sheets disposed on both sides thereof can be classified into two types, one of which is a symmetrical type in which the two are combined, and the other is an asymmetrical type in which the series is combined. The symmetrical type of polarization means that the polarization directions of the two piezoelectric ceramic sheets are opposite, that is, the metal sheets are symmetrical, and the non-symmetric type is that the polarization directions of the two piezoelectric sheets are the same. Due to the different polarization modes, the two-mode embossed chip actuators also have different properties. In operation, the piezoelectric film is pulsed to the shock device, that is, the piezoelectric effect is generated, and the stainless steel & electric layer is caused to undergo stress deformation, so that the pressing pressure is generated and the sample liquid is passed through the thin micro-spray sheet 40. Spray and atomize. It should be noted that the piezoelectric actuation H 3G differs from the prior art in that the piezoelectric actuator is driven at a low frequency operating frequency (less than 20 kHz), and the droplets are ejected by extrusion to achieve The atomization effect, because the driving frequency is in the range of kHz 'so there is no heat effect' can achieve the purpose of reducing energy consumption. In the preferred embodiment disclosed in this month, the driving frequency of the low frequency driven piezoelectric actuator 3 is not more than 2 〇 KHz. Photographs 3a and 3b are shown in the photo, and the bottom view is shown as a thin micro-aperture with an 'SEM photo. The thin micro-spray sheet 40 has a circular array 41 formed by a plurality of holes. Each circle is enlarged under the SEM as shown in Figure 3b. The thin micro-spray sheet 40 is more

SYS01-P452-TW 10 1292341 includes a substrate 42 as a substrate of the thin micro-spray sheet 40; a plurality of first circular aperture holes 44 formed on the substrate 42; and a plurality of second circles The aperture 46 of the aperture forms a recess 44 above the substrate 42 and opposite the first circular apertures. The recesses 44 of the first circular aperture and the recesses 46 of the second circular aperture are used as the liquid outflow of the sample of the thin micro-spray sheet 40. It should be noted that the apertures of the second circular aperture recesses 46 are larger than the apertures of the recesses 44 of the first circular apertures. The material of the substrate 42 is a polymer material selected from the group consisting of acrylic (PMMA), polycarbonate (PC) and polydioxane (PDMS). The thin micro-spray sheet is produced by a micro-electromechanical method combined with a thin-piece micro-injection molding technique. At present, there are three main manufacturing methods for general MEMS process technology: the first one is Bulk Micromachining, which focuses on etching ruthenium wafer into mechanical components, such as diaphragm pressure sensor or cantilever-beam piezoresistive acceleration sensor; Surface Micromachining, which differs from Bulk Micromachining in that it does not corrode tantalum wafers, but fabricates the required mechanical components on the surface of the Shixi wafer; the third is the LIGA process, LIGA is the Lithographie The abbreviation of Galcanoformung Abformung is mainly used in the three technologies of integrated optics, electroplating and molding to make micromechanical components, such as Microturbine. Referring to Figure 4, in conjunction with Figures 3a and 3b, the process steps of the thin micro-spray sheet 40 are illustrated. It mainly consists of the following steps: (A)

11 SYS01-P452-TW 1292341 The ", forming a plurality of first circular aperture holes; (8) on the ^ large d pairs (four) some - K-shaped aperture _, forming a number of holes of the second circular aperture a recess; (6) formed by evaporation, sputtering, or electroplating, a metal layer in the first and second circular holes, and (D) a metal layer as a mold, == in step (A) For example, after the photoresist is used on the substrate: after the photoresist is transferred to the photoresist by the lithography technique, the exposed photoresist region is irradiated with a special test solution. After removal, the remaining recording will form a circular hole with a diameter of Zhenggua (4) 'The wet hole of the chemical solution or the dry etching technique of the plasma can form the first circular aperture hole. In the step (B) The step is substantially similar to the step (a). In the step (D) of forming the thin micro-spray sheet 30, the injection molding technique is mainly used, and the step further includes: filling the substrate with a polymer material The first and second circular apertures are recessed; (D_2) curing the polymeric material at a preferred temperature , and (d_3) demolding the cured polymer material by injection. Note that the polymer material is selected from the group consisting of acrylic (PMMA) and polycarbonate (ρ〇 and polydimethyl oxalate) One of the groups consisting of (PDMS). The key component of the micro atomizer 10, the orifice sheet 40, is based on microelectromechanical technology, and is fabricated by precision mold and thin piece micro-injection molding. The manufacturing technology is different from the current electroforming process, so that the cost-effective orifice sheet can be quickly produced. The most important feature of the process method disclosed by the present invention is that the orifice sheet 40 produced by micro-injection molding is only required for the secondary molding. 20

12 SYS01-P452-TW 1292341 and the molding material is polymer material ratio, which can greatly shorten the system.

Private, you can make a 12-piece orifice. Material, and the patented orifice film production time and reduce material costs. In the application example, the micro-atomizer 1 can effectively replace the ultrasonic atomization of the electrospray ionization mass spectrometry = conventional ultrasonic atomizer, except for the body: the power is 18W~25W. In contrast, the micro-atomization of the present invention: the power required for the pump is only ~ and the size is only 18 mm x 32 M; x cry: θ:: integrated in the machine. In addition, the micro-atomization of the present invention: 'frequency piezoelectric blade drive (~ kHz), does not produce thermal effects, and therefore, no additional heat sink is required. Please refer to the image of the micro-atomizer 1G of Fig. L to the hair (4) for the myoglobin M) solution mass spectrometry. In terms of the liquid used, a liquid storage element stores a myoglobin solution. From the results, it is known that the successful verification of micro-:-Yiyi 10 is simplified in the analysis mechanism of mass spectrometry and the development of the future miniaturization of the f-spectrum analyzer. , τ, above, the effect of the invention is that the micro-electromechanical technology is used to manufacture the key parts of the micro=匕1G by the precision mold and the thin micro-injection molding technology, and the low-cost spray can be quickly produced. Micro-mist g 10 ' with micro-electromechanical and material injection technology combined with low-frequency driven piezoelectric actuator 3〇 and a thin micro-spray sheet 40 to avoid high temperature during operation, so it can be widely used Detection and analysis in the fields of biochemistry and medicine.

SYS01-P452-TW 13 1292341, although the present invention has been disclosed in the foregoing preferred embodiments, it is not intended to be limited to the present invention. Various changes and modifications. The above-mentioned solution "can be used to modify and change the various types without destroying the invention = spirit. Therefore, the scope of protection of the present invention is subject to the definition of the scope of the patent. The fla diagram shows a perspective view of the micro-atomizer of the present invention; the flb diagram is not a side view of the micro-atomizer of the present invention; the f 2 diagram shows the structure of the piezoelectric actuator; The top view of the thin micro-spray sheet; ^ ^ shows the electron microscopy (SEM) of the thin micro-spray sheet; and the mass spectrometry, 4 shows the process steps of the thin micro-spray sheet. Figure 5 shows the application. The result of the invention of the micro atomizer.

SYS01-P452-TW 14 1292341 [Main component symbol description] ίοMicro atomizer 30 Piezo actuator 3 4 External power supply 40 Thin micro-spray film 41 Substrate 44 First circular aperture cavity 50 Replenishing liquid storage element 20 liquid storage element 32 metal conductive layer 36 piezoelectric film 42 second circular aperture recess 60 bearing base

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Claims (1)

1292341 i X. Patent application scope: I. A micro atomizer comprising a carrier base disposed at the bottom of the micro atomizer; piezoelectrically dynamically arranged on the carrier base for adding After a power source, a dual-mode shock-thin micro-spray hole having a driving frequency of not more than 20KHZ is generated, and is disposed on the piezoelectric actuator in a micro-electromechanical manner combined with a thin-piece micro-injection molding technique for Spraying the sample; the liquid storage element is disposed on the piezoelectric actuator, has a first movable window and a liquid outflow port connected to the thin micro-spray hole; and a supplementary liquid storage element connected to The (four) storage element has a second active window connected to the first active window for filling the replenishing liquid. 2. The micro atomizer of claim 1, wherein the piezoelectric actuator comprises at least: a metal conductive layer connected to an externally applied y piezoelectric film, disposed on the metal conductive layer f, After the power source is applied, the nucleus is generated, and the liquid modality can be used to remove the liquid from the liquid outlet port of the mu orifice sheet; wherein the piezoelectrically actuated vibration core is driven The frequency is no more than 20 ΚΗζ dual mode vibration mode. SYS01-P452-TW 16 1292341. The micro atomizer of claim 1, wherein the piezoelectric actuator squirts the liquid by a dual mode vibration mode with a driving frequency of no more than 20 以Atomization effect is achieved. 4. The micro atomizer according to item 2 of the patent application, wherein the piezoelectric film is selected from the group consisting of zinc oxide (Ζη〇), nitriding (Α1Ν), strontium titanate (ΡΖΤ) or lithium niobate. One of the piezoelectric films. The micro atomizer of the item i of the application, wherein the thin micro-heap sheet further comprises: a substrate as a substrate of the thin micro-spray sheet; a cavity of a shape aperture formed on the substrate; The recess of the second aperture is opened into a recess above the substrate and opposite to the circular aperture of the X; the aperture of the circular aperture and the second circular aperture outlet: 4 The sample of the thin micro-spray sheet is sprayed with the micro-atomizer of the liquid formula of the fifth embodiment, wherein the thin micro-molding technique. "糸 is a micro-electromechanical method combined with a thin piece of micro-ejecting the IV-4 of the orifice sheet: a type atomizer, wherein the thin microcircular array. /, a circular aperture of the hole formed into a micro-atomizer of the fourth patent of the patent scope, the substrate of the 17 SYS01-P452-TW 义92341 Γ ~ - a __ 4 ♦ :: more) Original • The material is a polymer material. ^------------------ 9. The micro-atomizer according to item 7 of the patent application, wherein the polymer material is selected from the group consisting of acrylic (ΡΜΜΑ), poly One of the groups consisting of carbonate (PC) and polydimethyloxalate (PDMS). 10. The micro-atomizer of the third aspect of the patent application, wherein the piezoelectric actuator consumes no more power during operation! Watt. η· A method for manufacturing a thin micro-spray sheet, comprising the steps of: providing a substrate; forming a plurality of first circular aperture holes on the substrate; and on the substrate, relative to the first circle Forming a plurality of second circular aperture holes having a larger aperture; forming a metal layer on the first and second circular aperture holes; and molding the base metal layer The thin, micro-spray sheet is formed. 12. The manufacturing method of the thin micro-spray sheet according to the patent application scope g 1〇, wherein the step of forming the thin micro-spray sheet is a thin micro-mouth sheet of the injection molding technique The manufacturing method and the step of forming the thin micro-spray sheet further include: SYS01-P452-TW 18 曰#更)本本1292341 • The round is filled with the polymer material into the first and first holes of the substrate; the temperature is cured by the polymer; and the curing is performed by injection. The polymer material is demoulded. The method of manufacturing a thin micro-perforated sheet according to the first aspect of the invention, wherein the first and second circular apertures of the thin micro-spray sheet form a circular array. 15. The method for producing a thin micro-spray sheet according to claim 12, wherein the polymer material is selected from the group consisting of acrylic (PMMA), polycarbonate (PC) and polydioxane (PDMS). The method of manufacturing a thin micro-perforated sheet according to the first aspect of the invention, wherein the thin micro-aperture sheet can be used as an outlet for spraying a sample of an atomizer. ' SYS01-P452-TW 19