KR101075467B1 - Inertial array switch using Liquid-metal droplet, manufacturing method of the same, car airbag sensor and projectile fuze power supply switch using the same - Google Patents

Inertial array switch using Liquid-metal droplet, manufacturing method of the same, car airbag sensor and projectile fuze power supply switch using the same Download PDF

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KR101075467B1
KR101075467B1 KR1020100018341A KR20100018341A KR101075467B1 KR 101075467 B1 KR101075467 B1 KR 101075467B1 KR 1020100018341 A KR1020100018341 A KR 1020100018341A KR 20100018341 A KR20100018341 A KR 20100018341A KR 101075467 B1 KR101075467 B1 KR 101075467B1
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liquid metal
inertial switch
conductive liquid
electrode pairs
channel
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KR1020100018341A
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Korean (ko)
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KR20110099366A (en
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이승섭
조익천
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한국과학기술원
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Abstract

The present invention relates to an inertial switch using a liquid metal. More specifically, the present invention relates to a multi-channel inertial switch that reacts differently according to an inertia force value by using multiple channels having various widths.
According to the present invention, an inertial switch using a conductive liquid metal, the substrate; Electrode pairs formed on one surface of the substrate in an electrically disconnected state; A first surface in contact with the substrate, a second surface facing the first surface, storage portions penetrating the first surface and positioned on the electrode pairs, and channels connecting the storage portions sequentially; Body part to be; A conductive liquid metal connecting the disconnected electrical electrode pairs located below the reservoirs while moving the reservoirs through the channels; There is provided a multi-channel inertial switch using a liquid metal comprising a.
The inertial switch according to the present invention can react in various ways according to the inertia force value. Therefore, it can be used to manufacture airbag sensors or shell fuses of automobiles that react differently depending on the degree of impact.

Figure R1020100018341

Description

Multi-channel inertial switch using liquid metal, method of manufacturing the same, fuselage of automobile airbag sensor and shell using the same {Inertial array switch using Liquid-metal droplet, manufacturing method of the same, car airbag sensor and projectile fuze power supply switch using the same }

The present invention relates to an inertial switch using a liquid metal. More particularly, the present invention relates to a multi-channel inertial switch having a plurality of channels having a wide width and reacting differently according to an inertia force value.

Inertia (慣性) refers to the nature of maintaining their own state of movement. This inertia can easily be found in life, as the passengers on the bus are pulled forward by the external force even if the bus stops.

Mechanical devices using such inertia include an inertial switch, which is applied to an airbag system, a power supply for shell fuses, and the like.

Conventionally, an inertial switch is mainly manufactured using a solid type inertial beam and a spring, but the manufacturing process is complicated, bulky, and expensive.

Recently, in order to improve such a problem, by using a fine liquid metal droplet as an inertial force object, the inertial switch and a method of manufacturing the same that are relatively simple in structure and sensitive to switch operation, and can be manufactured at low cost have been developed. Started.

KR 10-0910049 10

The inertial switch using the liquid metal droplet described above has a problem in that it reacts the same regardless of the magnitude of the inertia force value when a certain inertia force value (operating inertia force) is exceeded. An object of the present invention is to provide a multi-channel inertial switch having a plurality of channels having a wide width and reacting differently according to an inertial force value.

According to the present invention, an inertial switch using a conductive liquid metal, the substrate; Electrode pairs formed on one surface of the substrate in an electrically disconnected state; A first surface in contact with the substrate, a second surface facing the first surface, storage portions penetrating the first surface and positioned on the electrode pairs, and channels connecting the storage portions sequentially; Body part to be; A conductive liquid metal connecting the disconnected electrical electrode pairs located below the reservoirs while moving the reservoirs through the channels; There is provided a multi-channel inertial switch using a liquid metal comprising a.

The multi-channel inertial switch using the liquid metal may further include a cover coupled to the second surface of the body to close the open surfaces of the storage portions and the channels. In addition, the cover is preferably PDMS (polydimethylsiloxane) coated with a sodium dodecyl sulfate (SDS) solution.

In addition, the electrode pairs are preferably formed in the form of a comb drive to be electrically connected when the conductive liquid metal is located in the reservoirs.

In addition, as the inertial forces applied to the conductive liquid metal increase, the channels have a minimum value of the channel width sequentially so that the conductive liquid metal can be moved to and received from a storage unit located far from the first storage unit. It is desirable to decrease.

In addition, according to the present invention, a method for manufacturing an inertial switch, comprising: forming a conductive film on a substrate; Patterning the conductive film to form electrically disconnected electrode pairs; Forming a mold on the conductive film; Patterning the mold to form a body portion located on top of the disconnected electrode pairs, the body portion including storage portions passing through the mold and channels connecting the storage portions sequentially; Provided is a method of manufacturing a multi-channel inertial switch using a liquid metal, comprising the step of injecting a conductive liquid metal into one of the reservoirs formed in the body portion.

Also provided is a fuse of an automotive airbag sensor and shell comprising an inertial switch of the present invention.

The inertial switch according to the present invention can react in various ways according to the inertia force value. Therefore, it can be used to manufacture airbag sensors or shell fuses of automobiles that react differently depending on the degree of impact. In addition, there is an advantage that the structure is relatively simple and its size can also be manufactured relatively small. For this reason, the inertial switch according to the present invention can be applied as an inertial switch to various fields, such as a moving system of a robot, a portable system, as well as a fuse of an automobile airbag sensor or a shell.

1 is a perspective view of a multi-channel inertial switch using a liquid metal according to an embodiment of the present invention.
2 is a view for explaining the movement of the conductive liquid metal in the multi-channel inertial switch using the liquid metal shown in FIG.
3 to 8 are views for explaining a method of manufacturing a multi-channel inertial switch using a liquid metal according to an embodiment of the present invention.

Hereinafter, a multichannel inertial switch using a liquid metal and a method of manufacturing the same will be described with reference to the accompanying drawings. In the drawings, the size and shape of the components, etc. may be exaggerated or simplified to aid in understanding the invention.

1 is a perspective view of a multi-channel inertial switch using a liquid metal according to an embodiment of the present invention.

As shown in FIG. 1, the multi-channel inertial switch using the liquid metal according to the present embodiment includes a substrate 1, electrode pairs 2 formed on one surface of the substrate 1, a substrate 1, and electrode pairs 2. A body portion 3 disposed thereon, a cover 4 coupled over the body portion 3 and a conductive liquid metal 5 which is received in the body portion 3 and connects the electrically disconnected electrode pair 2. .

As the board | substrate 1, the glass substrate 1 of the thin plate form was used.

The electrode pairs 2 serve to sense the position of the conductive liquid metal 5 via electricity when the conductive liquid metal 5 is positioned thereon. In this embodiment, four pairs of electrode pairs 2 are formed. Each pair of electrodes 2 was designed in the form of a comb drive, two combs facing each other so that a portion of the comb overlaps. This is to allow electricity to pass through when the conductive liquid metal 5 is positioned on the electrode pair 2. The spacing between the comb teeth of the electrode pairs 2 should be narrow compared to the diameter of the conductive liquid metal 5. The electrode pair 2 was formed by patterning a chromium thin film, and its thickness was about 2000 mm 3. The electrode pairs 2 transmit electrical signals to the outside through the electrode pads 6 formed on the substrate 1.

The body part 3 comprises four storage parts 31 and three channels 32 connecting them. The material of the body 3 is a Su-8 registry, the height of which is 600 ~ 1000㎛. Su-8 has the advantage of being relatively thick and facilitating the construction of large aspect ratios. In this embodiment, in particular, Su-8 2 and Su-8 100 were used in combination in order to obtain a large aspect ratio.

The reservoirs 31 are through holes formed in the body portion 3 to receive the conductive liquid metal 5 therein. The storage unit 31 includes a first storage unit 31a in which the conductive liquid metal 5 is stored in the initial stage, and second to fourth storage units in which the conductive liquid metal 5 is moved and stored by inertial force. 31b to 31d). An electrode pair 2 is disposed below each reservoir 31.

The channel 32 is a passage connecting the storage units 31 adjacent to each other, and is narrower in width than the storage unit 31. Therefore, an inertial force must be applied to move from one storage unit 31 to another adjacent storage unit 31. The channel 32 has the largest minimum value of the width of the first channel 32a, which is the channel 32a between the first storage section 31a and the second storage section 31b, and the third storage section 31c and the third storage section 31c. The minimum value of the width of the third channel 32c, which is the channel 32c between the four storage sections 31d, is designed to be the smallest. Accordingly, as the inertial force increases, the conductive liquid metal 5 moves from the second storage portion 31b to the fourth storage portion 31d and is received.

The cover 4 closes the open side at the top of the reservoirs 31 and the channels 32 of the body 3 to prevent the conductive liquid metal 5 from escaping from the body 3. will be. The material of the cover 4 is PDMS (polydimethylsiloxane), and SDS (sodium dodecyl sulfate) solution was applied to improve the mobility of the conductive liquid metal (5). SDS serves to increase the cohesiveness of the liquid to improve the mobility of the conductive liquid metal (5). The PDMS cover 4 is attached to the body 3 using epoxy.

The conductive liquid metal 5 is a metal having electrical conductivity, but is a material that maintains a liquid state at room temperature. The conductive liquid metal 5 maintains a spherical liquid droplet form because of its very high surface tension. In this embodiment, mercury was used in consideration of surface tension and conductivity. The conductive liquid metal 5 behaves between the storage portions 31 by inertial forces and connects the electrode pairs 2 to transmit a switch operation signal.

In the initial stage before the inertial force is applied, the conductive liquid metal 5 is located in the first reservoir 31a. When an inertial force is applied to the conductive liquid metal 5, it moves to other reservoirs 31b, 31c and 31d depending on the magnitude of the value. As shown in FIG. 2, as the inertial force value increases, the conductive liquid metal 5 moves in the order of the second storage part 31b, the third storage part 31c, and the fourth storage part 31d. Therefore, it can function to operate different switches according to the inertia force value, it can be used for the car airbag sensor that operates differently according to the inertia force value.

Hereinafter will be described a method of manufacturing a multi-channel inertial switch using a liquid metal according to an embodiment of the present invention. 3 to 8 are views for explaining a method of manufacturing a multi-channel inertial switch using a liquid metal according to an embodiment of the present invention.

The method of manufacturing a multi-channel inertial switch using a liquid metal according to one embodiment of the present invention starts with depositing chromium on the glass substrate 1, as shown in FIG. As a method of depositing the chromium thin film 7, various known physical vapor deposition (PVD) and chemical vapor deposition (CVD) methods may be used.

Next, the deposited chromium thin film 7 is patterned. As a photolithography process for panning the chromium thin film 7, various dry or wet methods capable of removing a portion of the chromium thin film may be used. Since the photolithography process is a known technique, a detailed description of the patterning process using the same is omitted. In this embodiment, as shown in FIG. 4, the electrode pattern 2 is formed in the form of a comb drive.

Next, as shown in FIG. 5, a Su-8 photoresist (PR) mold layer 8 was formed on the glass substrate 1 and the chromium electrode pattern by a spin coating method using the spin coater 20.

Next, the Su-8 mold layer 8 is patterned through a photolithography process, and as shown in FIG. 6, a body part including a channel 32 connecting the reservoirs 31 and the reservoirs 31 to each other. (3) was formed. In the present invention, the body portion 3 may be formed of various materials other than the photoresist, by a method other than a photolithography process.

Next, as shown in FIG. 7, the conductive liquid metal 5 was injected into the reservoir.

Finally, as shown in FIG. 8, the PDMS cover 4 was bonded onto the body 3 using epoxy. Since the use of the glass substrate 1 is limited due to the curvature phenomena due to the characteristics of the Su-8, PDMS, which can be in close contact with the Su-8, is used as the cover 4. The PDMS cover 4 was coated with SDS solution to improve the mobility of the conductive liquid metal 5.

The present invention described above is not limited to the configuration and operation as shown and described. That is, the present invention is capable of various changes and modifications within the spirit and scope of the appended claims.

10: inertia switch 1: glass substrate
2: electrode pair 3: body
4: cover 5: conductive liquid metal
6: electrode pad

Claims (12)

In an inertial switch using a conductive liquid metal,
Board;
Electrode pairs formed on one surface of the substrate in an electrically disconnected state;
A first surface in contact with the substrate, a second surface facing the first surface, storage portions penetrating the first surface and positioned on the electrode pairs, and channels connecting the storage portions sequentially; Body part to be;
A conductive liquid metal connecting the disconnected electrical electrode pairs located below the reservoirs while moving the reservoirs through the channels;
Multi-channel inertial switch using a liquid metal, characterized in that it comprises a. The method of claim 1,
And a cover coupled to the second surface of the body portion to close the open surface of the storage portions and the channels. The method of claim 1,
The pair of electrode is a multi-channel inertial switch using a liquid metal, characterized in that formed in the form of a comb drive (comb drive) so that the conductive liquid metal is connected when the conductive liquid metal is located in the reservoir. The method of claim 2,
The cover is a multi-channel inertial switch using a liquid metal, characterized in that the PDMS (polydimethylsiloxane) coated with a sodium dodecyl sulfate (SDS) solution. The method of claim 1,
The channels,
As the inertial force applied to the conductive liquid metal increases, the minimum value of the channel width is sequentially decreased so that the conductive liquid metal can be moved to and received from a storage unit located far from the first storage unit. Multi-channel inertial switch using liquid metal. In the manufacturing method of the inertial switch,
Forming a conductive film on the substrate;
Patterning the conductive film to form electrically disconnected electrode pairs;
Forming a mold on the conductive film;
Patterning the mold to form a body portion located on top of the disconnected electrode pairs, the body portion including storage portions passing through the mold and channels connecting the storage portions sequentially;
The method of manufacturing a multi-channel inertial switch using a liquid metal comprising the step of injecting a conductive liquid metal into one of the storage formed in the body portion. The method of claim 6,
And coupling a cover over the body portion to close the open surfaces of the reservoirs and the channels of the body portion. The method of claim 6,
Patterning the conductive film to form electrically disconnected electrode pairs,
Forming a pair of electrode pairs in the form of a comb drive so that the disconnected electrode pairs are connected when the conductive liquid metal is positioned in the reservoirs, so that the conductive liquid metal can be electrically connected. Method of manufacturing an inertial switch. The method of claim 7, wherein
Combining the cover on the body portion,
Applying a polydimethylsiloxane (PDMS) solution to sodium dodecyl sulfate (SDS) and bonding the PDMS coated with the SDS solution on the body using an epoxy to multi-channel inertial switch using a liquid metal Manufacturing method. The method of claim 6,
Forming the body portion,
As the inertial forces exerted on the conductive liquid metal increase, the channels are sequentially reduced so that the minimum value of the channel width is sequentially reduced so that the conductive liquid metal can be moved to and received from a storage located remote from the first received storage. Method for producing a multi-channel inertial switch using a liquid metal, characterized in that it comprises the step of forming. Claim 11 was abandoned upon payment of a setup registration fee. An automotive airbag sensor comprising the inertial switch of any one of claims 1 to 5. Claim 12 was abandoned upon payment of a registration fee. Fuse of the shell comprising the inertial switch of any one of claims 1 to 5.
KR1020100018341A 2010-03-02 2010-03-02 Inertial array switch using Liquid-metal droplet, manufacturing method of the same, car airbag sensor and projectile fuze power supply switch using the same KR101075467B1 (en)

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CN111883380B (en) * 2020-01-16 2022-05-27 大连理工大学 Microfluid inertia switch manufacturing method based on graphene coated gallium-based alloy liquid drops

Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2004319485A (en) 2003-04-14 2004-11-11 Agilent Technol Inc Method for operating liquid metal switch
KR100910049B1 (en) 2007-09-07 2009-07-30 포항공과대학교 산학협력단 Inertial Switch Using Micro Droplet of Liquid-metal and Method thereof

Patent Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2004319485A (en) 2003-04-14 2004-11-11 Agilent Technol Inc Method for operating liquid metal switch
KR100910049B1 (en) 2007-09-07 2009-07-30 포항공과대학교 산학협력단 Inertial Switch Using Micro Droplet of Liquid-metal and Method thereof

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