KR101071713B1 - ionizer type static electricity removing apparatus for Flat Panel Display device and loader-port equipped the same - Google Patents

Abstract

The present invention relates to an ionizer type static eliminator and a loader port having the same for eliminating each of the substrates during the process of carrying out a substrate stacked in a cassette to the outside through the carrying surface of the cassette. It is about.

Specifically, the present invention provides an ionizer type flat panel display device comprising a pair of injection nozzles each provided at both edges of the front end of the discharge surface of the cassette and spraying ± ion and N ₂ or inert diffused gases in a direction facing each other. It provides an antistatic device, comprising a support end for mounting the cassette as a loader port having it; It provides a loader port for a flat panel display device including a pair of frames upright from the support end to both edges of the front end of the discharge surface of the cassette and is mounted to each jet nozzle.

As a result, there is an advantage that a uniform antistatic effect can be obtained over the entire surface of the substrate to be carried out from the cassette, regardless of the height of each substrate.

Description

Ionizer type static electricity removing apparatus for flat panel display device and loader-port equipped the same}             

1 is a perspective view showing a static eliminator for a general flat panel display device.

2 is a perspective view showing a static eliminator according to a first embodiment of the present invention.

3 is an enlarged perspective view of part A of the circle of FIG. 2;

4 is a perspective view showing a static eliminator according to a second embodiment of the present invention.

5 is an enlarged perspective view of a portion of FIG. 4;

6 and 7 are front views of a loader port equipped with a static eliminator according to the first and second embodiments of the present invention, respectively.

8 is an enlarged plan view of a portion of FIG. 7;

<Description of the symbols for the main parts of the drawings>

2: substrate 10: cassette

12: export side 14:

100,120: first and second injection nozzle

112,122: first and second nozzle bodies

114,124: first and second injection electrodes

BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to an antistatic device for a flat panel display device and a loader port having the same. More specifically, a substrate stacked in a cassette is carried out to the outside through an export surface of the cassette. The present invention relates to an ionizer type static eliminator and a loader port having the same for static eliminating each of the substrates during the process.

In recent years, as the society enters the information age, the display field for visually displaying various electrical signal information is rapidly developing. In response, various displays having excellent characteristics such as thinning, light weight, and low power consumption have been developed. A variety of flat panel display devices (FPDs) have been introduced to quickly replace conventional cathode ray tubes (CRTs).

Specific examples of such a flat panel display device include a liquid crystal display device (LCD), a plasma display panel device (PDP), a field emission display device (FED), and an electroluminescent display device. (Electroluminescence Display device: ELD), etc., each of which is a key part for image realization, is a flat panel display panel composed of a pair of transparent insulating substrates interposed therebetween by interposing a light emitting or polarizing material layer therebetween. (flat display panel)

Recently, in particular, active matrix type (matrix) is defined in these flat panel display panels as pixels, and each of them is independently controlled by a switching element such as a thin film transistor (TFT). type) is in the spotlight due to its excellent resolution and ability to implement video.

As a specific example, a liquid crystal panel is composed of first and second substrates bonded to each other with a liquid crystal layer having optical anisotropy and polarization therebetween, and is referred to as a dual array substrate. On the inner surface, a plurality of gate lines and data lines cross each other to define pixels, and thin film transistors are provided at each crossing point thereof, and are connected one-to-one with a pixel electrode mounted on each pixel. And the second substrate facing this is called a color filter substrate, the inner surface of each pixel electrode while covering the portion that is not directly related to the liquid crystal drive, such as the gate, data line and thin film transistor of the first substrate A black matrix having a lattice-shaped opening repeated to expose the bay, an R, G and B color filter filled in each of the openings, and a transparent common electrode covering them. ) Is provided.

Therefore, the liquid crystal panel artificially changes the arrangement direction of the liquid crystal molecules interposed therebetween by the potential difference between the pixel electrode and the common electrode, thereby causing a difference in transmittance. The color combinations of the filters display a variety of different images.

Meanwhile, a manufacturing process of such a flat panel display device includes a thin film deposition process of forming a thin film of a predetermined material on a substrate, a photolithography process of exposing a selected portion of the thin film, and removing the exposed portion. And etching is performed several times, patterning the pattern into a desired shape. In addition, cleaning and drying the substrate, and bonding a pair of substrates face to face with a unique light emitting or polarizing material therebetween Many different processes are involved, including the cell process.

During this process, the substrate to be processed is moved to each device for the process, and in all of these processes, there is a possibility of generating static electricity on the substrate. Such static electricity causes an electrostatic discharge (ESD). It has a fatal effect on integrated circuits and in addition, impurities of fine particles are adsorbed onto the substrate surface.

Therefore, the static elimination of the substrate, which is an object to be processed, and its maintenance during the manufacturing process of the flat panel display device have a great influence on the reliability of the product, and thus various antistatic methods have been mobilized to solve the problem.

One of the most representative examples is an ionizer type static eliminator, and FIG. 1 is a schematic perspective view thereof.

As can be seen, a general ionizer type antistatic device for flat panel display device is used for static eliminating each of the substrates 2 stored in the cassette 10 when they are carried out to the outside. (12) It includes one ion injection nozzle 20 provided on the tip end. This ion spray nozzle 20 is called a so-called ionizer bar because of its shape.

More specifically, first, the cassette 10 is a case for storing and transporting a plurality of substrates 2, and generally has a box shape of a substantially hexahedron for accommodating a plurality of substrates 2 in a vertical layer. At least one surface thereof is opened to form a carrying surface 12 through which the substrate 2 is carried in and taken out. In the interior thereof, a plurality of stages 14, each of which constitutes a pair by the same height, protrude from the at least two side surfaces except for the upper and lower surfaces, and the upper and lower layer layers protrude. At this time, the loading and unloading of the substrate 2 into the cassette 10 is performed by a robot.

In addition, the ion ejection nozzle 20 is placed vertically to the top of the carrying surface 12 of the cassette 10 so as to intersect the loading / exporting direction of the substrate 2 and is provided with a plurality of discharge electrodes (not shown). Alternating ± ions are generated through alternating voltage, and the balance is maintained so that the sum of ± ions generated during a unit time is kept to zero through a control means such as a controller (not shown).

Accordingly, ± ions generated from the ion injection nozzle 20 come into contact with the substrate 2 carried out from the cassette 10 to the outside, and the static electricity present in the substrate 2 during this process is neutralized by ions of opposite polarity. And removed.

However, the above-described general ionizer type static eliminator exhibits some disadvantages. The most problematic problem is that the static elimination effect is uneven depending on the height of the substrate 2.

That is, as shown in the foregoing description and drawings, the ion injection nozzle 20 of the general static eliminating device is provided at the top of the discharging surface 12 of the cassette 10 to drop ions in the direction of gravity. The concentrations may be different, and therefore, the number of contact ions differs depending on the ejection height of the substrate 2, resulting in uneven charge state.

In addition, the substrate 2 blocks the falling path of ± ions generated from the ion injection nozzle 20 during the process of carrying out the substrate 2 stored on the cassette 10. In this case, when the substrate 2a at a lower position is taken out, since negative ions do not fall to the substrate 2a, static elimination is not performed at all, or the balance of ± ions is broken.

Table 1 is attached to the ion spray nozzle 20 while varying the pulse of the AC voltage during the process of static eliminating the substrate 2 carried out from the cassette 10 by using a static eliminator having a general ion spray nozzle 20 Table 1 shows the experiments performed on the static elimination completion time according to the change in the distance between the substrate and the substrate 2.

TABLE 1

mm Hz 33 Hz 22 Hz 10 Hz 8 Hz 5 Hz 3 Hz 1 Hz 300 mm 5.2 4.3 2.8 2.4 2.4 1.9 × 400 mm 7.8 6.6 5.0 4.5 3.7 3.4 3.3 500 mm 11.8 10.0 6.6 6.0 5.3 4.9 4.3 600 mm 12.2 11 7.3 6.8 6.1 5.8 5.1 700 mm 16.0 14.0 8.3 8.2 7.5 7.1 6.3 800 mm 16.4 16.8 10.6 10.0 10.4 9.5 8.8 900 mm 20.8 19.2 12.1 11.3 10.4 10.1 9.5 1000 mm 23.6 20.3 17.9 17.2 15.5 13.4 13.4

In the case of referring to this, it can be seen that in the general antistatic device, the static elimination effect is very different depending on the distance between the ion injection nozzle 20 and the substrate 2, and in particular, the × portion where the antistatic time is not indicated The balance is broken and is reversely charged.

This phenomenon has been intensified in recent years due to the increase in the number of substrates to be taken out per unit of time due to the development of various control technologies. Considering that the robot's substrate 2 is about 1 to 2 seconds per sheet, On the basis of the data shown in Table 1 above, if the distance between the ion injection nozzle 20 and the substrate 2 is 300 mm or more and the frequency of the AC voltage is out of the maximum 10 Hz or less, the correct antistatic effect cannot be expected. have.

Accordingly, the present invention has been made in order to solve the above problems, an ionizer type antistatic device for eliminating each of the substrates stored in the cassette in the upper and lower double layers to the outside, in particular the transport height of the substrate and It is an object of the present invention to provide an antistatic device and a loader port having the same, which can obtain a uniform antistatic effect across the entire surface of the substrate.

In order to achieve the above object, the present invention relates to an ionizer type flat panel display device antistatic device for static eliminating each of the substrates during the process of carrying out the substrates stacked in the cassette through the cassette carrying surface. Provided is an ionizer type flat panel display antistatic device including a pair of injection nozzles each provided at both side edges of the discharging surface and injecting diffused ions of + -ion and N ₂ or inert in a direction facing each other.

At this time, the injection nozzle is a pair of nozzle body is supplied with the external diffusion gas and having a bar shape in the vertical direction; An external AC voltage is applied to generate the ± ions and at the same time include a plurality of tube-shaped injection electrodes provided on the opposite surface of each nozzle body to inject the diffusion gas, or each of the injection nozzles A plurality of nozzle bodies supplied with the diffusion gas and arranged in rows up and down; An external alternating current voltage is applied to generate the ± ions and at the same time, each of the nozzle body is provided with a tubular injection electrode provided on the opposite surface of each nozzle body to spray.

In addition, in the latter case, the nozzle body is characterized in that the angle can be adjusted up and down, respectively.

In addition, in the cassette, a plurality of stages protrude from layer to layer to support each substrate, and in this case, each injection electrode is positioned between the layers.

The present invention provides a loader port including the ionizer-type flat panel display antistatic device, comprising: a support end on which the cassette is mounted; Provided is a loader port for a flat panel display device including a pair of frames, which are upright from the support end to both edges of the front end of the carrying surface of the cassette, and each nozzle body is mounted.

At this time, each nozzle body is characterized in that the vertical angle adjustment is possible by penetrating through the shaft to the frame, respectively, and the AC voltage and the diffusion gas is characterized in that it is transmitted to each through the inside of the frame. The present invention will be described in more detail with reference to the following drawings.

In this case, since the present invention can be divided into several embodiments according to specific forms, each of them will be described separately.

First embodiment

2 is a perspective view showing an ionizer type flat panel display static eliminator (hereinafter, referred to as a static eliminator) according to a first embodiment of the present invention, the role of which is in the cassette 10 as in the general case. When the board | substrate 2 accommodated in a multilayer is carried out outside, it is for static elimination of each of these.

At this time, the cassette 10 is a case for accommodating a plurality of substrates 2 and 2 in the upper and lower layers in the same manner as the general one. The cassette 10 has a box shape of a hexahedron and has at least one surface opening so that the substrate 2 enters and exits 12. Is fulfilling. In the interior thereof, a plurality of stages 14 which constitute a pair from each other at least two side surfaces except for the upper and lower surfaces and the carrying out surface 12 are different from each other up and down in height, and each substrate 2 has a pair of stages for each layer. And supported by 14.

Loading / unloading of the substrate 2 from such a cassette 10 is performed by a robot.

Next, the static eliminating device according to the first embodiment of the present invention for respectively discharging the substrate 2 carried out from the cassette 10 is provided in a direction facing each other at both edges of the front end of the cassette 10 carrying surface 12. And first and second injection nozzles 100,120 for injecting ± ion and N ₂ or inert diffused gases.

In this case, the first and second injection nozzles 100 and 120 may be divided into first and second nozzle bodies 112 and 122 and a plurality of first and second injection electrodes 114 and 124 respectively provided therein. The nozzle bodies 112 and 122 each have a bar shape which is arranged up and down along the edges of both ends of the carrying surface 12 of the cassette 10, and the first and second injection electrodes respectively having one surface facing each other. 114, 124).

Accordingly, the first and second injection nozzles 100 and 120 of the antistatic device according to the first embodiment of the present invention are provided with a pair of general ionizer bars so as to face each other at the ends of both edges of the ejection surface 12 of the cassette 10. The first and second injection electrodes 114 and 124 provided to each of them have an external alternating voltage applied thereto to generate ± ions, and at the same time, ± ions reach the central portion of the substrate 2. External N ₂ or inert diffused gas supplied to the first and second nozzle bodies 112 and 122 may be injected in a direction facing each other.

Therefore, in the antistatic device according to the present invention, although not shown in the drawings, gas supply means for supplying N ₂ or inert diffused gas to the first and second nozzle bodies 112 and 122, and the first and second injection electrodes ( An AC power source for applying an AC voltage to the 114 and 124 may be included, and a controller or the like may be provided such that the sum of ± ions generated by the first and second injection electrodes 114 and 124 is zero.

3 is an enlarged view of a portion A of the circle of FIG. 2, and a part of the first nozzle body 112 is optionally shown. As shown, a plurality of first injection electrodes 114 are provided on one surface of the first nozzle body 112, which has a tubular shape to inject N ₂ or inert diffused gas together with ± ions. The material is naturally made of a conductive material such as metal so as to generate ± ions through an external AC voltage. This also applies to the second nozzle body 122.

2, the first and second injection electrodes 114 and 124 provided in the first and second nozzle bodies 112 and 122 of the antistatic device according to the first embodiment of the present invention are paired with a cassette ( It is preferred to be located between each layer of 10, so that when the substrate 2 in the cassette 10 is unloaded, it is sprayed with a diffusion gas of ± ions and N ₂ or inert to each of the substrates 2 for each. Full-scale elimination is possible.

Second embodiment

Next, FIG. 4 is a perspective view showing a static eliminator according to a second embodiment of the present invention, which is also a pair of third and fourth spray nozzles arranged up and down along both edges of the tip of the carrying surface of the cassette 10. (130,140).

However, in this case, the third and fourth injection nozzles 130 and 140 are divided into a plurality of third and fourth nozzle bodies 132 and 142 arranged in rows, respectively, and the third and fourth injection electrodes 134 and 144 respectively. ) Is provided.

In addition, referring to FIG. 5 in which one third nozzle body 132 and an enlarged third injection electrode 134 are provided therein, the third injection electrode 134 provided in each third nozzle body 132. ) Has a tubular shape to which an external alternating voltage is applied, as in the first embodiment described above, generates ± ions and simultaneously faces external N ₂ or inert gas supplied to each of the third nozzle bodies 132. It is made to spray in the direction. The same applies to the fourth nozzle body 142.

In this case, the gas supply means not shown in the second embodiment of the present invention may supply N ₂ or inert diffused gas to each of the plurality of third and fourth nozzle bodies 132 and 142, and the AC power source may supply the respective third And applying an alternating voltage to the third and fourth injection electrodes 134 and 144 provided in the fourth nozzle bodies 132 and 142, and if necessary, the sum of ± ions generated by the third and fourth injection electrodes 134 and 144 is zero. It may be included such as a controller.

4, it is advantageous that the third and fourth nozzle bodies 132 and 142 provided in the static eliminator according to the second embodiment of the present invention are also located between the layers of the cassette 10 in pairs, respectively. As a result, when the substrates 2 in the cassette 10 are each taken out, it is possible to expect a uniform antistatic effect over the entire area of all the substrates 2.

In this case, in particular, the plurality of third and fourth nozzle bodies 132 and 142 according to the second embodiment of the present invention are characterized in that the up-down tilting is possible such that the spray direction of ± ion and the diffusion gas is directed upward or downward. As a result, when any one substrate 2 is taken out from the cassette 10, the pressure of the diffusion gas discharged from each of the third and fourth nozzle bodies 132 and 142, the amount of ions, and the angle of tilting are controlled to be more uniform. One festival is possible.

On the other hand, the antistatic device according to the first and second embodiments of the present invention described above can be fixed along the edges of both sides of the carrying surface of the cassette 10, respectively, but this may lower the utilization of the cassette 10 rather than Therefore, it is most suitable to be mounted on the loader port.

In this case, the loader port means that when the cassette 10 filled with the substrate 2 is transported through AGV (Auto Guided Vehicle), MGV (Manual Guided Vehicle), RGV (Rail Guided Vehicle), each substrate 2 in the cassette. As a platform for supporting the entire cassette 10 so that it can be brought into a suitable flat display device manufacturing equipment by a substrate transfer means such as a robot, specific shapes may vary, but each of FIGS. As shown in the front view shown, including a support end 160 on which the cassette 10 is seated, and a pair of first and second frames 162 and 164 erected from both sides of the tip of the carrying surface 12 of the cassette 10 therefrom. A plurality of frames are put together to define a predetermined accommodation space.                     

Accordingly, the antistatic device according to the present invention may use the first and second frames 162 and 164 arranged up and down along both edges of the front end of the case 10 in order to be applied to the loader port 150. FIG. The front view of the loader port 150 equipped with the static eliminator according to the first embodiment of the present invention, wherein the first and second nozzle bodies 112 and 122 are in the longitudinal direction of the first and second frames 162 and 164 of the loader port, respectively. The first and second frames 162 and 164 may also serve as the first and second nozzle bodies 112 and 122 in this case.

In addition, the external gas can be minimized by using the first and second frames 162 and 164 of the loader port 150 rather than being supplied separately, and are not shown in a separate drawing. Inside the first and second frames 162 and 164, flow paths through which an external N ₂ or inert diffuser gas can be supplied are formed, and the first and second injection electrodes 114 and 124 communicate with the flow paths, and thus are simply configured. It is possible.

FIG. 7 is a front view illustrating a case in which the static eliminator according to the second embodiment of the present invention is applied to the loader port 150, and includes a plurality of third and fourth nozzle bodies along the first and second frames 162 and 164. 132 and 142 are mounted in rows.

In this case, the third and fourth nozzle bodies 132 and 142 of the antistatic device according to the second embodiment of the present invention are characterized in that the upper and lower folds are possible, and the arbitrary first frame 162 and the one mounted thereto Referring to FIG. 8, which is an enlarged plan view of the three nozzle bodies 132, a third nozzle body (using the shaft 170 penetrating between the third nozzle body 132 and the first frame 162) may be used. 132 is capable of tilting up and down, and can be configured simply by employing a separate control means such as a motor that can control its tilting angle.

Meanwhile, the loader port 150 equipped with the static eliminator according to the second embodiment of the present invention also includes N ₂ or inert diffused gas supplied to the third and fourth nozzle bodies 132 and 142 in the first and second frames ( 162, 164 may be supplied, for this purpose, a flow path is formed in the first and second frames 162, 164 so that external diffusion gas may be supplied. Referring to FIG. 8, a separate supply pipe 172 is provided. Each of the third nozzle bodies 132 is connected to an internal flow path of the first frame 162. In addition, the external AC voltage may also be connected to the third and fourth injection electrodes 134 and 144 through the internal flow paths of the first and second frames 162 and 164 and the supply pipe 172, which is the fourth nozzle body 142. The same applies to).

The antistatic device according to the present invention described above has a uniform antistatic effect on the entire surface of all the substrates, regardless of the height of the substrate, especially in the static elimination of each of the process of carrying out the substrate stored in the cassette in the upper and lower layers in the cassette. There is an advantage to get.                     

In particular, the antistatic device according to the present invention sprays N ₂ or inert diffused gas together to increase the reach of the ± ion at the same time injecting ± ions in the direction facing each other at both edges of the substrate, as a result Uniform static elimination is possible.

In addition, in the static elimination device according to the present invention, the spraying electrode to which substantially ± ions and the diffusion gas are injected is positioned between each layer of the cassette, so that uniform static elimination is possible for all substrates.

Claims (12)

delete delete delete delete delete delete A loader port comprising an ionizer-type flat panel display device static eliminator for static eliminating each of the substrates during the process of carrying out the substrates stacked in a cassette through the carrying surface of the cassette. A pair of nozzle bodies each having an external diffusion gas and having a bar shape in a vertical direction and an external AC voltage are applied to generate ± ions and face the opposite surfaces of the nozzle bodies to spray the diffusion gas at the same time. A pair of injection nozzles each including a plurality of tube-shaped injection electrodes provided at both ends of the discharging surface of the cassette to spray the ± ion and N ₂ or the inert diffusion gas in a direction facing each other; An antistatic device for said flat panel display device; A support end on which the cassette is seated; It comprises a pair of frames upright from the support end to both edges of the front end of the discharge surface of the cassette, the nozzle body is mounted, And the AC voltage and the diffusion gas are transferred to each of the AC through the inside of the frame. A loader port comprising an ionizer-type flat panel display device static eliminator for static eliminating each of the substrates during the process of carrying out the substrates stacked in a cassette through the carrying surface of the cassette. Each nozzle body is supplied with an external diffusion gas and is arranged in a row up and down, and an external AC voltage is applied to generate ± ions, and at the same side of the nozzle body to spray the diffusion gas at the same time. Including a pair of injection nozzles each provided with a pair of injection nozzles for injecting the ± ion and the N ₂ or the inert diffused gas in the direction facing each other, each provided at both sides of the front end of the discharge surface of the cassette; An antistatic device for the flat panel display device; A support end on which the cassette is seated; It comprises a pair of frames upright from the support end to both edges of the front end of the discharge surface of the cassette, the nozzle body is mounted, And the AC voltage and the diffusion gas are transferred to each of the AC through the inside of the frame. The method of claim 8, Each of the nozzle body is connected to the frame through each of the shafts to be penetrated freely, the vertical port angle of the loader port for the display device. delete The method according to claim 7 or 8, A loader port for an ionizer type flat panel display device in which a plurality of stages protrude from layer to layer to support each substrate in the cassette. The method of claim 11, Each of the injection electrodes is an ionizer type flat panel display loader port positioned between the layers.

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